Abstract

The paper presents our results on laser micro- and nanostructuring of sodium aluminosilicate glass for the permanent storage purposes and photonics applications. Surface structuring is realized by fs laser irradiation followed by the subsequent etching in a potassium hydroxide (10M@80 °C) for 1 to 10 minutes. As the energy deposited is lower than the damage and/or ablation threshold, the chemical etching permits to produce small craters in the laser modified region. The laser parameters dependent interaction regimes are revealed by microscopic analysis (SEM and AFM). The influence of etching time on craters formation is investigated under different incident energies, number of pulses and polarization states.

© 2013 Optical Society of America

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    [CrossRef]
  44. K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
    [CrossRef]
  45. A. N. Trukhin, J. Teteris, A. Fedotov, D. L. Griscom, and G. Buscarino, “Photosensitivity of SiO2–Al and SiO2– Na glasses under ArF (193 nm) laser,” J. Non-cristal. Solids355, 1066–1074 (2009).
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  47. K. Kadono, N. Itakura, T. Akai, M. Yamashita, and T. Yazawa, “The effet of additive ions on the optical density and stability of the color centers induced by X-Ray irradiation in soda lime silicate glass,” Nuclear Instrum. Method. Phys. Res. B267, 2411–2415 (2009).
    [CrossRef]

2013 (3)

B.-B. Xu, Y.-L. Zhang, H. Xia, W.-F. Dong, H. Ding, and H.-B Sun, “Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing,” Lab chip13, 1677–1690 (2013).
[CrossRef] [PubMed]

N. Varkentina, N. Sanner, M. Lebugle, O. Utéza, and M. Sentis, “Absorption of a single 500 fs laser pulse at the surface of fused silica: energy balance and ablation efficiency,” J. Appl. Phys.14, 173105 (2013).

J. M. Fernández-Pradas, D. Comas, J. L. Morenza, and P. Serra, “Irradiation of glass with infrared femtosecond laser pulses,” Appl. Phys. A112, 203–207 (2013).
[CrossRef]

2012 (2)

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Las. Appl.24, 042006 (2012).
[CrossRef]

F. Liang, R. Vallée, and S. L. Chin, “Mechanism of nanograting formation on the surface of fused silica,” Opt. Express20(4), 4389–4396 (2012).
[CrossRef] [PubMed]

2011 (3)

F. Garrelie, J. P. Colombier, F. Pigeon, S. Tonchev, N. Faure, M. Bounhalli, S. Reynaud, and O. Parriaux, “Evidence of surface plasmon resonance in ultrafast laser-induced ripples,” Opt. Express19(10), 9035–9043 (2011).
[CrossRef] [PubMed]

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotech.22,055304 (2011).
[CrossRef]

L. Bressel, D. de Ligny, C. Sonneville, V. Martinez, V. Mizeikis, R. Buividas, and S. Juodkazis, “Femtosecond laser induced density changes in GeO2and SiO2glasses: fictive temperature effect,” Opt. Mat. Express1(4), 605–613 (2011).
[CrossRef]

2010 (6)

D. Grojo, M. Gertsvolf, S. Lei, T. Barillot, D. M. Rayner, and P. B. Corkum, “Exciton-seeded multiphoton ionization in bulk SiO2,” Phys. Rev. B81, 212301 (2010).
[CrossRef]

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

D. Bäuerle, “Laser chemical processing: an overview to the 30th anniversary,” Appl. Phys. A101(2), 447–459 (2010).
[CrossRef]

A. Royon, K. Bourhis, M. Bellec, G. Papon, B. Bousquet, Y. Deshayes, T. Cardinal, and L. Canioni, “Silver Clusters Embedded in Glass as a Perennial High Capacity Optical Recording Medium,” Advanc. Mat.22(46), 5282–5286 (2010).
[CrossRef]

D. Puerto, J. Siegel, W. Gawelda, M. Galvan-Sosa, L. Ehrentraut, J. Bonse, and J. Solis, “Dynamics of plasma formation, relaxation, and topography modification induced by femtosecond laser pulses in crystalline and amorphous dielectrics,” J. Opt. Soc. Am. B27(5), 1065–1076 (2010).
[CrossRef]

F. Madani-Grasset and Y. Bellouard, “Femtosecond laser micromachining of fused silica molds,” Opt. Express18(21), 21826–21840 (2010).
[CrossRef] [PubMed]

2009 (6)

K. Kadono, N. Itakura, T. Akai, M. Yamashita, and T. Yazawa, “The effet of additive ions on the optical density and stability of the color centers induced by X-Ray irradiation in soda lime silicate glass,” Nuclear Instrum. Method. Phys. Res. B267, 2411–2415 (2009).
[CrossRef]

P. Zijlstra, J. W. M. Chon, and M. Gu, “Five-dimensional optical recording mediated by surface plasmons in gold nanorods,” Nature (London)459, 410–413 (2009).
[CrossRef]

S. H. Chung and E. Mazur, “Surgical applications of femtosecond lasers,” J. of Biophoton.2(10), 557–1381 (2009).
[CrossRef]

N. Sanner, O. Utéza, B. Bussière, G. Coustillier, A. Leray, T. Itina, and M. Sentis, “Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics,” Appl. Phys. A94, 889–897 (2009).
[CrossRef]

A. N. Trukhin, J. Teteris, A. Fedotov, D. L. Griscom, and G. Buscarino, “Photosensitivity of SiO2–Al and SiO2– Na glasses under ArF (193 nm) laser,” J. Non-cristal. Solids355, 1066–1074 (2009).
[CrossRef]

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates,” J. Phys. Chem. C113(27), 11560–11566 (2009).
[CrossRef]

2008 (3)

D. Puerto, W. Gawelda, J. Siegel, J. Bonse, G. Bachelier, and J. Solis, “Transient reflectivity and transmission changes during plasma formotion and ablation in fused silica induced by femtosecond laser pulses,” Appl. Phys. A92, 803–808 (2008).
[CrossRef]

M. Ams, G. D. Marshall, P. Dekker, M. Dubov, V. K. Mezentsev, I. Bennion, and M. J. Withford, “Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics,” IEEE J. Quantum Electron.14(5), 1370–1381 (2008).
[CrossRef]

D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
[CrossRef]

2007 (2)

S. Xu, J. Qiu, T. Jia, C. Li, H. Sun, and Z. Xu, “Femtosecond laser ablation of crystals SiO2and YAG,” Opt. Commun.274, 163–166 (2007).
[CrossRef]

A. Ben-Yakar, A. Harkin, J. Ashmore, R. L. Byer, and H. A. Stone, “Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass: the formation of rims by single laser pulses,” J. Phys. D: Appl. Phys.40, 1447–1459 (2007).
[CrossRef]

2006 (4)

E. A. Vanina, M. A. Chibisova, and S. M. Sokolova, “Effect of radiation bleaching in sodium-silicate glasses,” Glass and Ceramics63(11–12), 366–367 (2006).
[CrossRef]

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, “Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching,” Appl. Phys. A84(1–2), 47–56 (2006).
[CrossRef]

R. Wagner, J. Gottmann, A. Horn, and E. W. Kreutz, “Subwavelength ripple formation induced by tightly focused femtosecond laser radiation,” Appl. Surf. Sci.252, 8576–8579 (2006).
[CrossRef]

I. H. Chowdhury, X. Xu, and A. M. Weiner, “Ultrafast two-color ablation of fused silica,” Appl. Phys. A83, 49–52 (2006).
[CrossRef]

2005 (1)

I. H. Chowdhury and X. Xu, “Ultrafast double-pulse ablation of fused silica,” Appl. Phys. Lett.86, 151110 (2005).
[CrossRef]

2004 (1)

2003 (4)

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, “A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B77, 25–30 (2003).
[CrossRef]

J. B. Lonzaga, S. M. Avanesyan, S. C. Langford, and J. T. Dickinson, “Color center formation in soda-lime glass with femtosecond laser pulses,” J. Appl. Phys.94(7), 4332–4340 (2003).
[CrossRef]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett.91,247405 (2003).
[CrossRef]

F. Costache, M. Henyk, and J. Reif, “Surface patterning on insulators upon femtosecond laser ablation,” Appl. Surf. Sci.208–209, 486–491 (2003).
[CrossRef]

2002 (1)

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside sodalime glass with femtosecond laser pulses,” Appl. Phys. Lett.80(9), 1508–1510 (2002).
[CrossRef]

2001 (1)

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Com.191, 333–339 (2001).
[CrossRef]

1999 (3)

A-C. Tien, S. Backus, H. Kapteyn, M. Murnane, and G. Mourou, “Short-pulse laser damage in transparent materials as a function of pulse duration,” Phys. Rev. Lett.82(19), 3883–3886 (1999).
[CrossRef]

M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics,” Phys. Rev. Lett.82(11), 2394–2397 (1999).
[CrossRef]

A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys. A69, S373–S376 (1999).
[CrossRef]

1997 (1)

N. Glezer and E. Mazur, “Ultrafast-laser driven micro-explosions in transparent materials,” Appl. Phys. Lett.71, 882–884 (1997).
[CrossRef]

1996 (2)

D. Du, X. Liu, and G. Mourou, “Reduction of multi-photon ionization in dielectrics due to collisions,” Appl. Phys. B63, 617–621 (1996).

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. Campbell, “Laser- induced damage in SiO2 and CaF with picosecond and femtosecond laser pulses with picosecond and femtosecond laser pulses,” Appl. Phys. A62, 293–294 (1996).
[CrossRef]

Akai, T.

K. Kadono, N. Itakura, T. Akai, M. Yamashita, and T. Yazawa, “The effet of additive ions on the optical density and stability of the color centers induced by X-Ray irradiation in soda lime silicate glass,” Nuclear Instrum. Method. Phys. Res. B267, 2411–2415 (2009).
[CrossRef]

Ams, M.

M. Ams, G. D. Marshall, P. Dekker, M. Dubov, V. K. Mezentsev, I. Bennion, and M. J. Withford, “Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics,” IEEE J. Quantum Electron.14(5), 1370–1381 (2008).
[CrossRef]

Ashkenasi, D.

A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys. A69, S373–S376 (1999).
[CrossRef]

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. Campbell, “Laser- induced damage in SiO2 and CaF with picosecond and femtosecond laser pulses with picosecond and femtosecond laser pulses,” Appl. Phys. A62, 293–294 (1996).
[CrossRef]

Ashmore, J.

A. Ben-Yakar, A. Harkin, J. Ashmore, R. L. Byer, and H. A. Stone, “Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass: the formation of rims by single laser pulses,” J. Phys. D: Appl. Phys.40, 1447–1459 (2007).
[CrossRef]

Avanesyan, S. M.

J. B. Lonzaga, S. M. Avanesyan, S. C. Langford, and J. T. Dickinson, “Color center formation in soda-lime glass with femtosecond laser pulses,” J. Appl. Phys.94(7), 4332–4340 (2003).
[CrossRef]

Bachelier, G.

D. Puerto, W. Gawelda, J. Siegel, J. Bonse, G. Bachelier, and J. Solis, “Transient reflectivity and transmission changes during plasma formotion and ablation in fused silica induced by femtosecond laser pulses,” Appl. Phys. A92, 803–808 (2008).
[CrossRef]

Backus, S.

A-C. Tien, S. Backus, H. Kapteyn, M. Murnane, and G. Mourou, “Short-pulse laser damage in transparent materials as a function of pulse duration,” Phys. Rev. Lett.82(19), 3883–3886 (1999).
[CrossRef]

Bado, P.

Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching,” Opt. Express12(10), 2120–2129 (2004).
[CrossRef] [PubMed]

A. A. Said, M. Dugan, P. Bado, Y. Bellouard, A. Scott, and J. R. Mabes, “Manufacturing by laser direct-write of three-dimensional devices containing optical and microfluidic networks,” in Photon Processing in Microelectronics and Photonics III, Proc. SPIE 5339,194 (2004).
[CrossRef]

Barillot, T.

D. Grojo, M. Gertsvolf, S. Lei, T. Barillot, D. M. Rayner, and P. B. Corkum, “Exciton-seeded multiphoton ionization in bulk SiO2,” Phys. Rev. B81, 212301 (2010).
[CrossRef]

Bäuerle, D.

D. Bäuerle, “Laser chemical processing: an overview to the 30th anniversary,” Appl. Phys. A101(2), 447–459 (2010).
[CrossRef]

Bellec, M.

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

A. Royon, K. Bourhis, M. Bellec, G. Papon, B. Bousquet, Y. Deshayes, T. Cardinal, and L. Canioni, “Silver Clusters Embedded in Glass as a Perennial High Capacity Optical Recording Medium,” Advanc. Mat.22(46), 5282–5286 (2010).
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F. Madani-Grasset and Y. Bellouard, “Femtosecond laser micromachining of fused silica molds,” Opt. Express18(21), 21826–21840 (2010).
[CrossRef] [PubMed]

Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching,” Opt. Express12(10), 2120–2129 (2004).
[CrossRef] [PubMed]

A. A. Said, M. Dugan, P. Bado, Y. Bellouard, A. Scott, and J. R. Mabes, “Manufacturing by laser direct-write of three-dimensional devices containing optical and microfluidic networks,” in Photon Processing in Microelectronics and Photonics III, Proc. SPIE 5339,194 (2004).
[CrossRef]

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M. Ams, G. D. Marshall, P. Dekker, M. Dubov, V. K. Mezentsev, I. Bennion, and M. J. Withford, “Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics,” IEEE J. Quantum Electron.14(5), 1370–1381 (2008).
[CrossRef]

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A. Ben-Yakar, A. Harkin, J. Ashmore, R. L. Byer, and H. A. Stone, “Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass: the formation of rims by single laser pulses,” J. Phys. D: Appl. Phys.40, 1447–1459 (2007).
[CrossRef]

Bhardwaj, V. R.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, “Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching,” Appl. Phys. A84(1–2), 47–56 (2006).
[CrossRef]

Bonse, J.

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Las. Appl.24, 042006 (2012).
[CrossRef]

D. Puerto, J. Siegel, W. Gawelda, M. Galvan-Sosa, L. Ehrentraut, J. Bonse, and J. Solis, “Dynamics of plasma formation, relaxation, and topography modification induced by femtosecond laser pulses in crystalline and amorphous dielectrics,” J. Opt. Soc. Am. B27(5), 1065–1076 (2010).
[CrossRef]

D. Puerto, W. Gawelda, J. Siegel, J. Bonse, G. Bachelier, and J. Solis, “Transient reflectivity and transmission changes during plasma formotion and ablation in fused silica induced by femtosecond laser pulses,” Appl. Phys. A92, 803–808 (2008).
[CrossRef]

Bounhalli, M.

Bourhis, K.

A. Royon, K. Bourhis, M. Bellec, G. Papon, B. Bousquet, Y. Deshayes, T. Cardinal, and L. Canioni, “Silver Clusters Embedded in Glass as a Perennial High Capacity Optical Recording Medium,” Advanc. Mat.22(46), 5282–5286 (2010).
[CrossRef]

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

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A. Royon, K. Bourhis, M. Bellec, G. Papon, B. Bousquet, Y. Deshayes, T. Cardinal, and L. Canioni, “Silver Clusters Embedded in Glass as a Perennial High Capacity Optical Recording Medium,” Advanc. Mat.22(46), 5282–5286 (2010).
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L. Bressel, D. de Ligny, C. Sonneville, V. Martinez, V. Mizeikis, R. Buividas, and S. Juodkazis, “Femtosecond laser induced density changes in GeO2and SiO2glasses: fictive temperature effect,” Opt. Mat. Express1(4), 605–613 (2011).
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L. Bressel, D. de Ligny, C. Sonneville, V. Martinez, V. Mizeikis, R. Buividas, and S. Juodkazis, “Femtosecond laser induced density changes in GeO2and SiO2glasses: fictive temperature effect,” Opt. Mat. Express1(4), 605–613 (2011).
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R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotech.22,055304 (2011).
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A. N. Trukhin, J. Teteris, A. Fedotov, D. L. Griscom, and G. Buscarino, “Photosensitivity of SiO2–Al and SiO2– Na glasses under ArF (193 nm) laser,” J. Non-cristal. Solids355, 1066–1074 (2009).
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N. Sanner, O. Utéza, B. Bussière, G. Coustillier, A. Leray, T. Itina, and M. Sentis, “Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics,” Appl. Phys. A94, 889–897 (2009).
[CrossRef]

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A. Ben-Yakar, A. Harkin, J. Ashmore, R. L. Byer, and H. A. Stone, “Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass: the formation of rims by single laser pulses,” J. Phys. D: Appl. Phys.40, 1447–1459 (2007).
[CrossRef]

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H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. Campbell, “Laser- induced damage in SiO2 and CaF with picosecond and femtosecond laser pulses with picosecond and femtosecond laser pulses,” Appl. Phys. A62, 293–294 (1996).
[CrossRef]

Canioni, L.

A. Royon, K. Bourhis, M. Bellec, G. Papon, B. Bousquet, Y. Deshayes, T. Cardinal, and L. Canioni, “Silver Clusters Embedded in Glass as a Perennial High Capacity Optical Recording Medium,” Advanc. Mat.22(46), 5282–5286 (2010).
[CrossRef]

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

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K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

A. Royon, K. Bourhis, M. Bellec, G. Papon, B. Bousquet, Y. Deshayes, T. Cardinal, and L. Canioni, “Silver Clusters Embedded in Glass as a Perennial High Capacity Optical Recording Medium,” Advanc. Mat.22(46), 5282–5286 (2010).
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D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
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Chin, S. L.

Choi, J.

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
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P. Zijlstra, J. W. M. Chon, and M. Gu, “Five-dimensional optical recording mediated by surface plasmons in gold nanorods,” Nature (London)459, 410–413 (2009).
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Comas, D.

J. M. Fernández-Pradas, D. Comas, J. L. Morenza, and P. Serra, “Irradiation of glass with infrared femtosecond laser pulses,” Appl. Phys. A112, 203–207 (2013).
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D. Grojo, M. Gertsvolf, S. Lei, T. Barillot, D. M. Rayner, and P. B. Corkum, “Exciton-seeded multiphoton ionization in bulk SiO2,” Phys. Rev. B81, 212301 (2010).
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C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, “Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching,” Appl. Phys. A84(1–2), 47–56 (2006).
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F. Costache, M. Henyk, and J. Reif, “Surface patterning on insulators upon femtosecond laser ablation,” Appl. Surf. Sci.208–209, 486–491 (2003).
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N. Sanner, O. Utéza, B. Bussière, G. Coustillier, A. Leray, T. Itina, and M. Sentis, “Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics,” Appl. Phys. A94, 889–897 (2009).
[CrossRef]

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R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotech.22,055304 (2011).
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L. Bressel, D. de Ligny, C. Sonneville, V. Martinez, V. Mizeikis, R. Buividas, and S. Juodkazis, “Femtosecond laser induced density changes in GeO2and SiO2glasses: fictive temperature effect,” Opt. Mat. Express1(4), 605–613 (2011).
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M. Ams, G. D. Marshall, P. Dekker, M. Dubov, V. K. Mezentsev, I. Bennion, and M. J. Withford, “Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics,” IEEE J. Quantum Electron.14(5), 1370–1381 (2008).
[CrossRef]

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A. Royon, K. Bourhis, M. Bellec, G. Papon, B. Bousquet, Y. Deshayes, T. Cardinal, and L. Canioni, “Silver Clusters Embedded in Glass as a Perennial High Capacity Optical Recording Medium,” Advanc. Mat.22(46), 5282–5286 (2010).
[CrossRef]

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J. B. Lonzaga, S. M. Avanesyan, S. C. Langford, and J. T. Dickinson, “Color center formation in soda-lime glass with femtosecond laser pulses,” J. Appl. Phys.94(7), 4332–4340 (2003).
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B.-B. Xu, Y.-L. Zhang, H. Xia, W.-F. Dong, H. Ding, and H.-B Sun, “Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing,” Lab chip13, 1677–1690 (2013).
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Dong, W.-F.

B.-B. Xu, Y.-L. Zhang, H. Xia, W.-F. Dong, H. Ding, and H.-B Sun, “Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing,” Lab chip13, 1677–1690 (2013).
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D. Du, X. Liu, and G. Mourou, “Reduction of multi-photon ionization in dielectrics due to collisions,” Appl. Phys. B63, 617–621 (1996).

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M. Ams, G. D. Marshall, P. Dekker, M. Dubov, V. K. Mezentsev, I. Bennion, and M. J. Withford, “Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics,” IEEE J. Quantum Electron.14(5), 1370–1381 (2008).
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Dugan, M.

Y. Bellouard, A. Said, M. Dugan, and P. Bado, “Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching,” Opt. Express12(10), 2120–2129 (2004).
[CrossRef] [PubMed]

A. A. Said, M. Dugan, P. Bado, Y. Bellouard, A. Scott, and J. R. Mabes, “Manufacturing by laser direct-write of three-dimensional devices containing optical and microfluidic networks,” in Photon Processing in Microelectronics and Photonics III, Proc. SPIE 5339,194 (2004).
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Ehrentraut, L.

Fargues, A.

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
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Faure, N.

Fedotov, A.

A. N. Trukhin, J. Teteris, A. Fedotov, D. L. Griscom, and G. Buscarino, “Photosensitivity of SiO2–Al and SiO2– Na glasses under ArF (193 nm) laser,” J. Non-cristal. Solids355, 1066–1074 (2009).
[CrossRef]

Fernández-Pradas, J. M.

J. M. Fernández-Pradas, D. Comas, J. L. Morenza, and P. Serra, “Irradiation of glass with infrared femtosecond laser pulses,” Appl. Phys. A112, 203–207 (2013).
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Ferrigno, G.

D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
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L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Com.191, 333–339 (2001).
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Garrelie, F.

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D. Puerto, J. Siegel, W. Gawelda, M. Galvan-Sosa, L. Ehrentraut, J. Bonse, and J. Solis, “Dynamics of plasma formation, relaxation, and topography modification induced by femtosecond laser pulses in crystalline and amorphous dielectrics,” J. Opt. Soc. Am. B27(5), 1065–1076 (2010).
[CrossRef]

D. Puerto, W. Gawelda, J. Siegel, J. Bonse, G. Bachelier, and J. Solis, “Transient reflectivity and transmission changes during plasma formotion and ablation in fused silica induced by femtosecond laser pulses,” Appl. Phys. A92, 803–808 (2008).
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Gertsvolf, M.

D. Grojo, M. Gertsvolf, S. Lei, T. Barillot, D. M. Rayner, and P. B. Corkum, “Exciton-seeded multiphoton ionization in bulk SiO2,” Phys. Rev. B81, 212301 (2010).
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D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
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M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics,” Phys. Rev. Lett.82(11), 2394–2397 (1999).
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R. Wagner, J. Gottmann, A. Horn, and E. W. Kreutz, “Subwavelength ripple formation induced by tightly focused femtosecond laser radiation,” Appl. Surf. Sci.252, 8576–8579 (2006).
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Griscom, D. L.

A. N. Trukhin, J. Teteris, A. Fedotov, D. L. Griscom, and G. Buscarino, “Photosensitivity of SiO2–Al and SiO2– Na glasses under ArF (193 nm) laser,” J. Non-cristal. Solids355, 1066–1074 (2009).
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Grojo, D.

D. Grojo, M. Gertsvolf, S. Lei, T. Barillot, D. M. Rayner, and P. B. Corkum, “Exciton-seeded multiphoton ionization in bulk SiO2,” Phys. Rev. B81, 212301 (2010).
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Gu, M.

P. Zijlstra, J. W. M. Chon, and M. Gu, “Five-dimensional optical recording mediated by surface plasmons in gold nanorods,” Nature (London)459, 410–413 (2009).
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A. Ben-Yakar, A. Harkin, J. Ashmore, R. L. Byer, and H. A. Stone, “Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass: the formation of rims by single laser pulses,” J. Phys. D: Appl. Phys.40, 1447–1459 (2007).
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Hashimoto, S.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates,” J. Phys. Chem. C113(27), 11560–11566 (2009).
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S. Matsuo, H. Sumi, S. Kiyama, T. Tomita, and S. Hashimoto, “Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH,” in Proceedings of the sixth international conference on photo-excited processes and applications (6-ICPEPA), Appl. Surf. Sci. 255(24), 9758–9760 (2009).

Henyk, M.

F. Costache, M. Henyk, and J. Reif, “Surface patterning on insulators upon femtosecond laser ablation,” Appl. Surf. Sci.208–209, 486–491 (2003).
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H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. Campbell, “Laser- induced damage in SiO2 and CaF with picosecond and femtosecond laser pulses with picosecond and femtosecond laser pulses,” Appl. Phys. A62, 293–294 (1996).
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Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett.91,247405 (2003).
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C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, “Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching,” Appl. Phys. A84(1–2), 47–56 (2006).
[CrossRef]

Höhm, S.

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Las. Appl.24, 042006 (2012).
[CrossRef]

Horn, A.

R. Wagner, J. Gottmann, A. Horn, and E. W. Kreutz, “Subwavelength ripple formation induced by tightly focused femtosecond laser radiation,” Appl. Surf. Sci.252, 8576–8579 (2006).
[CrossRef]

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A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, “A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B77, 25–30 (2003).
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K. Kadono, N. Itakura, T. Akai, M. Yamashita, and T. Yazawa, “The effet of additive ions on the optical density and stability of the color centers induced by X-Ray irradiation in soda lime silicate glass,” Nuclear Instrum. Method. Phys. Res. B267, 2411–2415 (2009).
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Itina, T.

N. Sanner, O. Utéza, B. Bussière, G. Coustillier, A. Leray, T. Itina, and M. Sentis, “Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics,” Appl. Phys. A94, 889–897 (2009).
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N. Varkentina, O. Utéza, N. Sanner, B. Chimier, M. Sentis, and T. Itina, “Absorption of femtosecond laser pulse in fused silica: experiments and modelling,” in International Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, B. Gu, G. Hennig, X. Xu, and H. Niino, eds., Proc. SPIE 7920,792003-1–792003-9 (2011).

Itoh, K.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside sodalime glass with femtosecond laser pulses,” Appl. Phys. Lett.80(9), 1508–1510 (2002).
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Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside sodalime glass with femtosecond laser pulses,” Appl. Phys. Lett.80(9), 1508–1510 (2002).
[CrossRef]

Joglekar, A. P.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, “A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B77, 25–30 (2003).
[CrossRef]

Juodkazis, S.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotech.22,055304 (2011).
[CrossRef]

L. Bressel, D. de Ligny, C. Sonneville, V. Martinez, V. Mizeikis, R. Buividas, and S. Juodkazis, “Femtosecond laser induced density changes in GeO2and SiO2glasses: fictive temperature effect,” Opt. Mat. Express1(4), 605–613 (2011).
[CrossRef]

Kadono, K.

K. Kadono, N. Itakura, T. Akai, M. Yamashita, and T. Yazawa, “The effet of additive ions on the optical density and stability of the color centers induced by X-Ray irradiation in soda lime silicate glass,” Nuclear Instrum. Method. Phys. Res. B267, 2411–2415 (2009).
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Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett.91,247405 (2003).
[CrossRef]

Kiyama, S.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates,” J. Phys. Chem. C113(27), 11560–11566 (2009).
[CrossRef]

S. Matsuo, H. Sumi, S. Kiyama, T. Tomita, and S. Hashimoto, “Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH,” in Proceedings of the sixth international conference on photo-excited processes and applications (6-ICPEPA), Appl. Surf. Sci. 255(24), 9758–9760 (2009).

Kreutz, E. W.

R. Wagner, J. Gottmann, A. Horn, and E. W. Kreutz, “Subwavelength ripple formation induced by tightly focused femtosecond laser radiation,” Appl. Surf. Sci.252, 8576–8579 (2006).
[CrossRef]

Krüger, J.

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Las. Appl.24, 042006 (2012).
[CrossRef]

Kudrius, T.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotech.22,055304 (2011).
[CrossRef]

Langford, S. C.

J. B. Lonzaga, S. M. Avanesyan, S. C. Langford, and J. T. Dickinson, “Color center formation in soda-lime glass with femtosecond laser pulses,” J. Appl. Phys.94(7), 4332–4340 (2003).
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N. Varkentina, N. Sanner, M. Lebugle, O. Utéza, and M. Sentis, “Absorption of a single 500 fs laser pulse at the surface of fused silica: energy balance and ablation efficiency,” J. Appl. Phys.14, 173105 (2013).

Lei, S.

D. Grojo, M. Gertsvolf, S. Lei, T. Barillot, D. M. Rayner, and P. B. Corkum, “Exciton-seeded multiphoton ionization in bulk SiO2,” Phys. Rev. B81, 212301 (2010).
[CrossRef]

Leray, A.

N. Sanner, O. Utéza, B. Bussière, G. Coustillier, A. Leray, T. Itina, and M. Sentis, “Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics,” Appl. Phys. A94, 889–897 (2009).
[CrossRef]

Li, C.

S. Xu, J. Qiu, T. Jia, C. Li, H. Sun, and Z. Xu, “Femtosecond laser ablation of crystals SiO2and YAG,” Opt. Commun.274, 163–166 (2007).
[CrossRef]

Li, M.

M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics,” Phys. Rev. Lett.82(11), 2394–2397 (1999).
[CrossRef]

Li, Y.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside sodalime glass with femtosecond laser pulses,” Appl. Phys. Lett.80(9), 1508–1510 (2002).
[CrossRef]

Liang, F.

Liu, H.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, “A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B77, 25–30 (2003).
[CrossRef]

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D. Du, X. Liu, and G. Mourou, “Reduction of multi-photon ionization in dielectrics due to collisions,” Appl. Phys. B63, 617–621 (1996).

Lonzaga, J. B.

J. B. Lonzaga, S. M. Avanesyan, S. C. Langford, and J. T. Dickinson, “Color center formation in soda-lime glass with femtosecond laser pulses,” J. Appl. Phys.94(7), 4332–4340 (2003).
[CrossRef]

Lorenz, M.

A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys. A69, S373–S376 (1999).
[CrossRef]

Mabes, J. R.

A. A. Said, M. Dugan, P. Bado, Y. Bellouard, A. Scott, and J. R. Mabes, “Manufacturing by laser direct-write of three-dimensional devices containing optical and microfluidic networks,” in Photon Processing in Microelectronics and Photonics III, Proc. SPIE 5339,194 (2004).
[CrossRef]

Madani-Grasset, F.

Marshall, G. D.

M. Ams, G. D. Marshall, P. Dekker, M. Dubov, V. K. Mezentsev, I. Bennion, and M. J. Withford, “Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics,” IEEE J. Quantum Electron.14(5), 1370–1381 (2008).
[CrossRef]

Martinez, V.

L. Bressel, D. de Ligny, C. Sonneville, V. Martinez, V. Mizeikis, R. Buividas, and S. Juodkazis, “Femtosecond laser induced density changes in GeO2and SiO2glasses: fictive temperature effect,” Opt. Mat. Express1(4), 605–613 (2011).
[CrossRef]

Matsuo, S.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates,” J. Phys. Chem. C113(27), 11560–11566 (2009).
[CrossRef]

S. Matsuo, H. Sumi, S. Kiyama, T. Tomita, and S. Hashimoto, “Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH,” in Proceedings of the sixth international conference on photo-excited processes and applications (6-ICPEPA), Appl. Surf. Sci. 255(24), 9758–9760 (2009).

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S. H. Chung and E. Mazur, “Surgical applications of femtosecond lasers,” J. of Biophoton.2(10), 557–1381 (2009).
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N. Glezer and E. Mazur, “Ultrafast-laser driven micro-explosions in transparent materials,” Appl. Phys. Lett.71, 882–884 (1997).
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M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics,” Phys. Rev. Lett.82(11), 2394–2397 (1999).
[CrossRef]

Meyhöfer, E.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, “A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B77, 25–30 (2003).
[CrossRef]

Mezentsev, V. K.

M. Ams, G. D. Marshall, P. Dekker, M. Dubov, V. K. Mezentsev, I. Bennion, and M. J. Withford, “Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics,” IEEE J. Quantum Electron.14(5), 1370–1381 (2008).
[CrossRef]

Mine, T.

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

Miura, K.

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

Mizeikis, V.

L. Bressel, D. de Ligny, C. Sonneville, V. Martinez, V. Mizeikis, R. Buividas, and S. Juodkazis, “Femtosecond laser induced density changes in GeO2and SiO2glasses: fictive temperature effect,” Opt. Mat. Express1(4), 605–613 (2011).
[CrossRef]

Morenza, J. L.

J. M. Fernández-Pradas, D. Comas, J. L. Morenza, and P. Serra, “Irradiation of glass with infrared femtosecond laser pulses,” Appl. Phys. A112, 203–207 (2013).
[CrossRef]

Morihira, Y.

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates,” J. Phys. Chem. C113(27), 11560–11566 (2009).
[CrossRef]

Mourou, G.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, “A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B77, 25–30 (2003).
[CrossRef]

A-C. Tien, S. Backus, H. Kapteyn, M. Murnane, and G. Mourou, “Short-pulse laser damage in transparent materials as a function of pulse duration,” Phys. Rev. Lett.82(19), 3883–3886 (1999).
[CrossRef]

D. Du, X. Liu, and G. Mourou, “Reduction of multi-photon ionization in dielectrics due to collisions,” Appl. Phys. B63, 617–621 (1996).

Murnane, M.

A-C. Tien, S. Backus, H. Kapteyn, M. Murnane, and G. Mourou, “Short-pulse laser damage in transparent materials as a function of pulse duration,” Phys. Rev. Lett.82(19), 3883–3886 (1999).
[CrossRef]

Mysyrowicz, A.

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Com.191, 333–339 (2001).
[CrossRef]

Nakabayashi, M.

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

Nibarger, J. P.

M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics,” Phys. Rev. Lett.82(11), 2394–2397 (1999).
[CrossRef]

Nishii, J.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside sodalime glass with femtosecond laser pulses,” Appl. Phys. Lett.80(9), 1508–1510 (2002).
[CrossRef]

Noack, F.

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. Campbell, “Laser- induced damage in SiO2 and CaF with picosecond and femtosecond laser pulses with picosecond and femtosecond laser pulses,” Appl. Phys. A62, 293–294 (1996).
[CrossRef]

Osellame, R.

D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
[CrossRef]

Papon, G.

A. Royon, K. Bourhis, M. Bellec, G. Papon, B. Bousquet, Y. Deshayes, T. Cardinal, and L. Canioni, “Silver Clusters Embedded in Glass as a Perennial High Capacity Optical Recording Medium,” Advanc. Mat.22(46), 5282–5286 (2010).
[CrossRef]

Parriaux, O.

Pedrocchi, A.

D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
[CrossRef]

Pigeon, F.

Prade, B.

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Com.191, 333–339 (2001).
[CrossRef]

Puerto, D.

D. Puerto, J. Siegel, W. Gawelda, M. Galvan-Sosa, L. Ehrentraut, J. Bonse, and J. Solis, “Dynamics of plasma formation, relaxation, and topography modification induced by femtosecond laser pulses in crystalline and amorphous dielectrics,” J. Opt. Soc. Am. B27(5), 1065–1076 (2010).
[CrossRef]

D. Puerto, W. Gawelda, J. Siegel, J. Bonse, G. Bachelier, and J. Solis, “Transient reflectivity and transmission changes during plasma formotion and ablation in fused silica induced by femtosecond laser pulses,” Appl. Phys. A92, 803–808 (2008).
[CrossRef]

Qiu, J.

S. Xu, J. Qiu, T. Jia, C. Li, H. Sun, and Z. Xu, “Femtosecond laser ablation of crystals SiO2and YAG,” Opt. Commun.274, 163–166 (2007).
[CrossRef]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett.91,247405 (2003).
[CrossRef]

Rajeev, P. P.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, “Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching,” Appl. Phys. A84(1–2), 47–56 (2006).
[CrossRef]

Ramponi, R.

D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
[CrossRef]

Rayner, D. M.

D. Grojo, M. Gertsvolf, S. Lei, T. Barillot, D. M. Rayner, and P. B. Corkum, “Exciton-seeded multiphoton ionization in bulk SiO2,” Phys. Rev. B81, 212301 (2010).
[CrossRef]

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, “Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching,” Appl. Phys. A84(1–2), 47–56 (2006).
[CrossRef]

Reif, J.

F. Costache, M. Henyk, and J. Reif, “Surface patterning on insulators upon femtosecond laser ablation,” Appl. Surf. Sci.208–209, 486–491 (2003).
[CrossRef]

Reynaud, S.

Richardson, M.

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

Rosa, L.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotech.22,055304 (2011).
[CrossRef]

Rosenfeld, A.

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Las. Appl.24, 042006 (2012).
[CrossRef]

A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys. A69, S373–S376 (1999).
[CrossRef]

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. Campbell, “Laser- induced damage in SiO2 and CaF with picosecond and femtosecond laser pulses with picosecond and femtosecond laser pulses,” Appl. Phys. A62, 293–294 (1996).
[CrossRef]

Royon, A.

A. Royon, K. Bourhis, M. Bellec, G. Papon, B. Bousquet, Y. Deshayes, T. Cardinal, and L. Canioni, “Silver Clusters Embedded in Glass as a Perennial High Capacity Optical Recording Medium,” Advanc. Mat.22(46), 5282–5286 (2010).
[CrossRef]

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

Said, A.

Said, A. A.

A. A. Said, M. Dugan, P. Bado, Y. Bellouard, A. Scott, and J. R. Mabes, “Manufacturing by laser direct-write of three-dimensional devices containing optical and microfluidic networks,” in Photon Processing in Microelectronics and Photonics III, Proc. SPIE 5339,194 (2004).
[CrossRef]

Sakakura, M.

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

Sanner, N.

N. Varkentina, N. Sanner, M. Lebugle, O. Utéza, and M. Sentis, “Absorption of a single 500 fs laser pulse at the surface of fused silica: energy balance and ablation efficiency,” J. Appl. Phys.14, 173105 (2013).

N. Sanner, O. Utéza, B. Bussière, G. Coustillier, A. Leray, T. Itina, and M. Sentis, “Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics,” Appl. Phys. A94, 889–897 (2009).
[CrossRef]

N. Varkentina, O. Utéza, N. Sanner, B. Chimier, M. Sentis, and T. Itina, “Absorption of femtosecond laser pulse in fused silica: experiments and modelling,” in International Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, B. Gu, G. Hennig, X. Xu, and H. Niino, eds., Proc. SPIE 7920,792003-1–792003-9 (2011).

Scott, A.

A. A. Said, M. Dugan, P. Bado, Y. Bellouard, A. Scott, and J. R. Mabes, “Manufacturing by laser direct-write of three-dimensional devices containing optical and microfluidic networks,” in Photon Processing in Microelectronics and Photonics III, Proc. SPIE 5339,194 (2004).
[CrossRef]

Sentis, M.

N. Varkentina, N. Sanner, M. Lebugle, O. Utéza, and M. Sentis, “Absorption of a single 500 fs laser pulse at the surface of fused silica: energy balance and ablation efficiency,” J. Appl. Phys.14, 173105 (2013).

N. Sanner, O. Utéza, B. Bussière, G. Coustillier, A. Leray, T. Itina, and M. Sentis, “Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics,” Appl. Phys. A94, 889–897 (2009).
[CrossRef]

N. Varkentina, O. Utéza, N. Sanner, B. Chimier, M. Sentis, and T. Itina, “Absorption of femtosecond laser pulse in fused silica: experiments and modelling,” in International Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, B. Gu, G. Hennig, X. Xu, and H. Niino, eds., Proc. SPIE 7920,792003-1–792003-9 (2011).

Serra, P.

J. M. Fernández-Pradas, D. Comas, J. L. Morenza, and P. Serra, “Irradiation of glass with infrared femtosecond laser pulses,” Appl. Phys. A112, 203–207 (2013).
[CrossRef]

Shimotsuma, Y.

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett.91,247405 (2003).
[CrossRef]

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

Shinagawa, T.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside sodalime glass with femtosecond laser pulses,” Appl. Phys. Lett.80(9), 1508–1510 (2002).
[CrossRef]

Shiozawa, M.

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

Siegel, J.

D. Puerto, J. Siegel, W. Gawelda, M. Galvan-Sosa, L. Ehrentraut, J. Bonse, and J. Solis, “Dynamics of plasma formation, relaxation, and topography modification induced by femtosecond laser pulses in crystalline and amorphous dielectrics,” J. Opt. Soc. Am. B27(5), 1065–1076 (2010).
[CrossRef]

D. Puerto, W. Gawelda, J. Siegel, J. Bonse, G. Bachelier, and J. Solis, “Transient reflectivity and transmission changes during plasma formotion and ablation in fused silica induced by femtosecond laser pulses,” Appl. Phys. A92, 803–808 (2008).
[CrossRef]

Simova, E.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, “Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching,” Appl. Phys. A84(1–2), 47–56 (2006).
[CrossRef]

Slekys, G.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotech.22,055304 (2011).
[CrossRef]

Sliupas, R.

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotech.22,055304 (2011).
[CrossRef]

Sokolova, S. M.

E. A. Vanina, M. A. Chibisova, and S. M. Sokolova, “Effect of radiation bleaching in sodium-silicate glasses,” Glass and Ceramics63(11–12), 366–367 (2006).
[CrossRef]

Solis, J.

D. Puerto, J. Siegel, W. Gawelda, M. Galvan-Sosa, L. Ehrentraut, J. Bonse, and J. Solis, “Dynamics of plasma formation, relaxation, and topography modification induced by femtosecond laser pulses in crystalline and amorphous dielectrics,” J. Opt. Soc. Am. B27(5), 1065–1076 (2010).
[CrossRef]

D. Puerto, W. Gawelda, J. Siegel, J. Bonse, G. Bachelier, and J. Solis, “Transient reflectivity and transmission changes during plasma formotion and ablation in fused silica induced by femtosecond laser pulses,” Appl. Phys. A92, 803–808 (2008).
[CrossRef]

Sonneville, C.

L. Bressel, D. de Ligny, C. Sonneville, V. Martinez, V. Mizeikis, R. Buividas, and S. Juodkazis, “Femtosecond laser induced density changes in GeO2and SiO2glasses: fictive temperature effect,” Opt. Mat. Express1(4), 605–613 (2011).
[CrossRef]

Spooner, G. J.

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, “A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B77, 25–30 (2003).
[CrossRef]

Stoian, R.

A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys. A69, S373–S376 (1999).
[CrossRef]

Stone, H. A.

A. Ben-Yakar, A. Harkin, J. Ashmore, R. L. Byer, and H. A. Stone, “Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass: the formation of rims by single laser pulses,” J. Phys. D: Appl. Phys.40, 1447–1459 (2007).
[CrossRef]

Sudrie, L.

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Com.191, 333–339 (2001).
[CrossRef]

Sumi, H.

S. Matsuo, H. Sumi, S. Kiyama, T. Tomita, and S. Hashimoto, “Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH,” in Proceedings of the sixth international conference on photo-excited processes and applications (6-ICPEPA), Appl. Surf. Sci. 255(24), 9758–9760 (2009).

Sun, H.

S. Xu, J. Qiu, T. Jia, C. Li, H. Sun, and Z. Xu, “Femtosecond laser ablation of crystals SiO2and YAG,” Opt. Commun.274, 163–166 (2007).
[CrossRef]

Sun, H.-B

B.-B. Xu, Y.-L. Zhang, H. Xia, W.-F. Dong, H. Ding, and H.-B Sun, “Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing,” Lab chip13, 1677–1690 (2013).
[CrossRef] [PubMed]

Talaga, D.

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

Tatsu, E.

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

Taylor, R. S.

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, “Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching,” Appl. Phys. A84(1–2), 47–56 (2006).
[CrossRef]

Teteris, J.

A. N. Trukhin, J. Teteris, A. Fedotov, D. L. Griscom, and G. Buscarino, “Photosensitivity of SiO2–Al and SiO2– Na glasses under ArF (193 nm) laser,” J. Non-cristal. Solids355, 1066–1074 (2009).
[CrossRef]

Tien, A-C.

A-C. Tien, S. Backus, H. Kapteyn, M. Murnane, and G. Mourou, “Short-pulse laser damage in transparent materials as a function of pulse duration,” Phys. Rev. Lett.82(19), 3883–3886 (1999).
[CrossRef]

Tomita, T.

S. Matsuo, H. Sumi, S. Kiyama, T. Tomita, and S. Hashimoto, “Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH,” in Proceedings of the sixth international conference on photo-excited processes and applications (6-ICPEPA), Appl. Surf. Sci. 255(24), 9758–9760 (2009).

Tonchev, S.

Treguer, M.

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

Trukhin, A. N.

A. N. Trukhin, J. Teteris, A. Fedotov, D. L. Griscom, and G. Buscarino, “Photosensitivity of SiO2–Al and SiO2– Na glasses under ArF (193 nm) laser,” J. Non-cristal. Solids355, 1066–1074 (2009).
[CrossRef]

Umeda, M.

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

Utéza, O.

N. Varkentina, N. Sanner, M. Lebugle, O. Utéza, and M. Sentis, “Absorption of a single 500 fs laser pulse at the surface of fused silica: energy balance and ablation efficiency,” J. Appl. Phys.14, 173105 (2013).

N. Sanner, O. Utéza, B. Bussière, G. Coustillier, A. Leray, T. Itina, and M. Sentis, “Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics,” Appl. Phys. A94, 889–897 (2009).
[CrossRef]

N. Varkentina, O. Utéza, N. Sanner, B. Chimier, M. Sentis, and T. Itina, “Absorption of femtosecond laser pulse in fused silica: experiments and modelling,” in International Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, B. Gu, G. Hennig, X. Xu, and H. Niino, eds., Proc. SPIE 7920,792003-1–792003-9 (2011).

Valle, G. D.

D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
[CrossRef]

Vallée, R.

Valtorta, F.

D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
[CrossRef]

Vanina, E. A.

E. A. Vanina, M. A. Chibisova, and S. M. Sokolova, “Effect of radiation bleaching in sodium-silicate glasses,” Glass and Ceramics63(11–12), 366–367 (2006).
[CrossRef]

Varel, H.

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. Campbell, “Laser- induced damage in SiO2 and CaF with picosecond and femtosecond laser pulses with picosecond and femtosecond laser pulses,” Appl. Phys. A62, 293–294 (1996).
[CrossRef]

Varkentina, N.

N. Varkentina, N. Sanner, M. Lebugle, O. Utéza, and M. Sentis, “Absorption of a single 500 fs laser pulse at the surface of fused silica: energy balance and ablation efficiency,” J. Appl. Phys.14, 173105 (2013).

N. Varkentina, O. Utéza, N. Sanner, B. Chimier, M. Sentis, and T. Itina, “Absorption of femtosecond laser pulse in fused silica: experiments and modelling,” in International Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, B. Gu, G. Hennig, X. Xu, and H. Niino, eds., Proc. SPIE 7920,792003-1–792003-9 (2011).

Vazquez, R. M.

D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
[CrossRef]

Videau, J.-J.

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

Wagner, R.

R. Wagner, J. Gottmann, A. Horn, and E. W. Kreutz, “Subwavelength ripple formation induced by tightly focused femtosecond laser radiation,” Appl. Surf. Sci.252, 8576–8579 (2006).
[CrossRef]

Watanabe, K.

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

Watanabe, T.

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

Watanabe, W.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside sodalime glass with femtosecond laser pulses,” Appl. Phys. Lett.80(9), 1508–1510 (2002).
[CrossRef]

Weiner, A. M.

I. H. Chowdhury, X. Xu, and A. M. Weiner, “Ultrafast two-color ablation of fused silica,” Appl. Phys. A83, 49–52 (2006).
[CrossRef]

Withford, M. J.

M. Ams, G. D. Marshall, P. Dekker, M. Dubov, V. K. Mezentsev, I. Bennion, and M. J. Withford, “Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics,” IEEE J. Quantum Electron.14(5), 1370–1381 (2008).
[CrossRef]

Xia, H.

B.-B. Xu, Y.-L. Zhang, H. Xia, W.-F. Dong, H. Ding, and H.-B Sun, “Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing,” Lab chip13, 1677–1690 (2013).
[CrossRef] [PubMed]

Xu, B.-B.

B.-B. Xu, Y.-L. Zhang, H. Xia, W.-F. Dong, H. Ding, and H.-B Sun, “Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing,” Lab chip13, 1677–1690 (2013).
[CrossRef] [PubMed]

Xu, S.

S. Xu, J. Qiu, T. Jia, C. Li, H. Sun, and Z. Xu, “Femtosecond laser ablation of crystals SiO2and YAG,” Opt. Commun.274, 163–166 (2007).
[CrossRef]

Xu, X.

I. H. Chowdhury, X. Xu, and A. M. Weiner, “Ultrafast two-color ablation of fused silica,” Appl. Phys. A83, 49–52 (2006).
[CrossRef]

I. H. Chowdhury and X. Xu, “Ultrafast double-pulse ablation of fused silica,” Appl. Phys. Lett.86, 151110 (2005).
[CrossRef]

Xu, Z.

S. Xu, J. Qiu, T. Jia, C. Li, H. Sun, and Z. Xu, “Femtosecond laser ablation of crystals SiO2and YAG,” Opt. Commun.274, 163–166 (2007).
[CrossRef]

Yamada, K.

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside sodalime glass with femtosecond laser pulses,” Appl. Phys. Lett.80(9), 1508–1510 (2002).
[CrossRef]

Yamashita, M.

K. Kadono, N. Itakura, T. Akai, M. Yamashita, and T. Yazawa, “The effet of additive ions on the optical density and stability of the color centers induced by X-Ray irradiation in soda lime silicate glass,” Nuclear Instrum. Method. Phys. Res. B267, 2411–2415 (2009).
[CrossRef]

Yazawa, T.

K. Kadono, N. Itakura, T. Akai, M. Yamashita, and T. Yazawa, “The effet of additive ions on the optical density and stability of the color centers induced by X-Ray irradiation in soda lime silicate glass,” Nuclear Instrum. Method. Phys. Res. B267, 2411–2415 (2009).
[CrossRef]

Zhang, Y.-L.

B.-B. Xu, Y.-L. Zhang, H. Xia, W.-F. Dong, H. Ding, and H.-B Sun, “Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing,” Lab chip13, 1677–1690 (2013).
[CrossRef] [PubMed]

Zijlstra, P.

P. Zijlstra, J. W. M. Chon, and M. Gu, “Five-dimensional optical recording mediated by surface plasmons in gold nanorods,” Nature (London)459, 410–413 (2009).
[CrossRef]

Advanc. Mat. (1)

A. Royon, K. Bourhis, M. Bellec, G. Papon, B. Bousquet, Y. Deshayes, T. Cardinal, and L. Canioni, “Silver Clusters Embedded in Glass as a Perennial High Capacity Optical Recording Medium,” Advanc. Mat.22(46), 5282–5286 (2010).
[CrossRef]

Appl. Phys. A (8)

D. Bäuerle, “Laser chemical processing: an overview to the 30th anniversary,” Appl. Phys. A101(2), 447–459 (2010).
[CrossRef]

H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. Campbell, “Laser- induced damage in SiO2 and CaF with picosecond and femtosecond laser pulses with picosecond and femtosecond laser pulses,” Appl. Phys. A62, 293–294 (1996).
[CrossRef]

N. Sanner, O. Utéza, B. Bussière, G. Coustillier, A. Leray, T. Itina, and M. Sentis, “Measurement of femtosecond laser-induced damage and ablation thresholds in dielectrics,” Appl. Phys. A94, 889–897 (2009).
[CrossRef]

D. Puerto, W. Gawelda, J. Siegel, J. Bonse, G. Bachelier, and J. Solis, “Transient reflectivity and transmission changes during plasma formotion and ablation in fused silica induced by femtosecond laser pulses,” Appl. Phys. A92, 803–808 (2008).
[CrossRef]

I. H. Chowdhury, X. Xu, and A. M. Weiner, “Ultrafast two-color ablation of fused silica,” Appl. Phys. A83, 49–52 (2006).
[CrossRef]

J. M. Fernández-Pradas, D. Comas, J. L. Morenza, and P. Serra, “Irradiation of glass with infrared femtosecond laser pulses,” Appl. Phys. A112, 203–207 (2013).
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A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys. A69, S373–S376 (1999).
[CrossRef]

C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, “Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching,” Appl. Phys. A84(1–2), 47–56 (2006).
[CrossRef]

Appl. Phys. B (2)

D. Du, X. Liu, and G. Mourou, “Reduction of multi-photon ionization in dielectrics due to collisions,” Appl. Phys. B63, 617–621 (1996).

A. P. Joglekar, H. Liu, G. J. Spooner, E. Meyhöfer, G. Mourou, and A. J. Hunt, “A study of the deterministic character of optical damage by femtosecond laser pulses and applications to nanomachining,” Appl. Phys. B77, 25–30 (2003).
[CrossRef]

Appl. Phys. Lett. (3)

Y. Li, W. Watanabe, K. Yamada, T. Shinagawa, K. Itoh, J. Nishii, and Y. Jiang, “Holographic fabrication of multiple layers of grating inside sodalime glass with femtosecond laser pulses,” Appl. Phys. Lett.80(9), 1508–1510 (2002).
[CrossRef]

I. H. Chowdhury and X. Xu, “Ultrafast double-pulse ablation of fused silica,” Appl. Phys. Lett.86, 151110 (2005).
[CrossRef]

N. Glezer and E. Mazur, “Ultrafast-laser driven micro-explosions in transparent materials,” Appl. Phys. Lett.71, 882–884 (1997).
[CrossRef]

Appl. Surf. Sci. (2)

R. Wagner, J. Gottmann, A. Horn, and E. W. Kreutz, “Subwavelength ripple formation induced by tightly focused femtosecond laser radiation,” Appl. Surf. Sci.252, 8576–8579 (2006).
[CrossRef]

F. Costache, M. Henyk, and J. Reif, “Surface patterning on insulators upon femtosecond laser ablation,” Appl. Surf. Sci.208–209, 486–491 (2003).
[CrossRef]

Glass and Ceramics (1)

E. A. Vanina, M. A. Chibisova, and S. M. Sokolova, “Effect of radiation bleaching in sodium-silicate glasses,” Glass and Ceramics63(11–12), 366–367 (2006).
[CrossRef]

IEEE J. Quantum Electron. (1)

M. Ams, G. D. Marshall, P. Dekker, M. Dubov, V. K. Mezentsev, I. Bennion, and M. J. Withford, “Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics,” IEEE J. Quantum Electron.14(5), 1370–1381 (2008).
[CrossRef]

J. Appl. Phys. (1)

N. Varkentina, N. Sanner, M. Lebugle, O. Utéza, and M. Sentis, “Absorption of a single 500 fs laser pulse at the surface of fused silica: energy balance and ablation efficiency,” J. Appl. Phys.14, 173105 (2013).

J. Appl. Phys. (1)

J. B. Lonzaga, S. M. Avanesyan, S. C. Langford, and J. T. Dickinson, “Color center formation in soda-lime glass with femtosecond laser pulses,” J. Appl. Phys.94(7), 4332–4340 (2003).
[CrossRef]

J. Las. Appl. (1)

J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, “Femtosecond laser-induced periodic surface structures,” J. Las. Appl.24, 042006 (2012).
[CrossRef]

J. Non-cristal. Solids (1)

A. N. Trukhin, J. Teteris, A. Fedotov, D. L. Griscom, and G. Buscarino, “Photosensitivity of SiO2–Al and SiO2– Na glasses under ArF (193 nm) laser,” J. Non-cristal. Solids355, 1066–1074 (2009).
[CrossRef]

J. Non-Cryst. Solids (1)

K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J.-J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, “Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass,” J. Non-Cryst. Solids356(44–49), 2658–2665 (2010).
[CrossRef]

J. of Biophoton. (1)

S. H. Chung and E. Mazur, “Surgical applications of femtosecond lasers,” J. of Biophoton.2(10), 557–1381 (2009).
[CrossRef]

J. Opt. Soc. Am. B (1)

J. Phys. Chem. C (1)

S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, “Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates,” J. Phys. Chem. C113(27), 11560–11566 (2009).
[CrossRef]

J. Phys. D: Appl. Phys. (1)

A. Ben-Yakar, A. Harkin, J. Ashmore, R. L. Byer, and H. A. Stone, “Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass: the formation of rims by single laser pulses,” J. Phys. D: Appl. Phys.40, 1447–1459 (2007).
[CrossRef]

Lab chip (1)

B.-B. Xu, Y.-L. Zhang, H. Xia, W.-F. Dong, H. Ding, and H.-B Sun, “Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing,” Lab chip13, 1677–1690 (2013).
[CrossRef] [PubMed]

Nanotech. (1)

R. Buividas, L. Rosa, R. Sliupas, T. Kudrius, G. Slekys, V. Datsyuk, and S. Juodkazis, “Mechanism of fine ripple formation on surfaces of (semi)transparent materials via a half-wavelength cavity feedback,” Nanotech.22,055304 (2011).
[CrossRef]

Nature (London) (1)

P. Zijlstra, J. W. M. Chon, and M. Gu, “Five-dimensional optical recording mediated by surface plasmons in gold nanorods,” Nature (London)459, 410–413 (2009).
[CrossRef]

Nuclear Instrum. Method. Phys. Res. B (1)

K. Kadono, N. Itakura, T. Akai, M. Yamashita, and T. Yazawa, “The effet of additive ions on the optical density and stability of the color centers induced by X-Ray irradiation in soda lime silicate glass,” Nuclear Instrum. Method. Phys. Res. B267, 2411–2415 (2009).
[CrossRef]

Opt. Com. (1)

L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, “Study of damage in fused silica induced by ultra-short IR laser pulses,” Opt. Com.191, 333–339 (2001).
[CrossRef]

Opt. Commun. (1)

S. Xu, J. Qiu, T. Jia, C. Li, H. Sun, and Z. Xu, “Femtosecond laser ablation of crystals SiO2and YAG,” Opt. Commun.274, 163–166 (2007).
[CrossRef]

Opt. Express (4)

Opt. Mat. Express (1)

L. Bressel, D. de Ligny, C. Sonneville, V. Martinez, V. Mizeikis, R. Buividas, and S. Juodkazis, “Femtosecond laser induced density changes in GeO2and SiO2glasses: fictive temperature effect,” Opt. Mat. Express1(4), 605–613 (2011).
[CrossRef]

Phys. Rev. B (1)

D. Grojo, M. Gertsvolf, S. Lei, T. Barillot, D. M. Rayner, and P. B. Corkum, “Exciton-seeded multiphoton ionization in bulk SiO2,” Phys. Rev. B81, 212301 (2010).
[CrossRef]

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Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett.91,247405 (2003).
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A-C. Tien, S. Backus, H. Kapteyn, M. Murnane, and G. Mourou, “Short-pulse laser damage in transparent materials as a function of pulse duration,” Phys. Rev. Lett.82(19), 3883–3886 (1999).
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M. Li, S. Menon, J. P. Nibarger, and G. N. Gibson, “Ultrafast electron dynamics in femtosecond optical breakdown of dielectrics,” Phys. Rev. Lett.82(11), 2394–2397 (1999).
[CrossRef]

Sensors (1)

D. Ghezzi, R. M. Vazquez, R. Osellame, F. Valtorta, A. Pedrocchi, G. D. Valle, R. Ramponi, G. Ferrigno, and G. Cerullo, “Femtosecond laser microfabrication of an integrated device for optical release and sensing of bioactive compounds,” Sensors8(10), 6595–6604 (2008).
[CrossRef]

Other (4)

M. Shiozawa, T. Watanabe, E. Tatsu, M. Umeda, T. Mine, Y. Shimotsuma, M. Sakakura, M. Nakabayashi, K. Miura, and K. Watanabe, “Simultaneous multi-bit recording in fused silica for permanent storage,” presented at the International symposuim on optical memory 2012, Tokyo, Japan, Sep. 30–Oct. 4, 2012.

S. Matsuo, H. Sumi, S. Kiyama, T. Tomita, and S. Hashimoto, “Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH,” in Proceedings of the sixth international conference on photo-excited processes and applications (6-ICPEPA), Appl. Surf. Sci. 255(24), 9758–9760 (2009).

A. A. Said, M. Dugan, P. Bado, Y. Bellouard, A. Scott, and J. R. Mabes, “Manufacturing by laser direct-write of three-dimensional devices containing optical and microfluidic networks,” in Photon Processing in Microelectronics and Photonics III, Proc. SPIE 5339,194 (2004).
[CrossRef]

N. Varkentina, O. Utéza, N. Sanner, B. Chimier, M. Sentis, and T. Itina, “Absorption of femtosecond laser pulse in fused silica: experiments and modelling,” in International Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, B. Gu, G. Hennig, X. Xu, and H. Niino, eds., Proc. SPIE 7920,792003-1–792003-9 (2011).

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Figures (6)

Fig. 1
Fig. 1

Experimental test-bench for laser surface micro-structuring (a) and chemical etching (b). M - mirror; AOM - Acousto-optic modulator; MO - Microscope objective ; Camera -Visualization system.

Fig. 2
Fig. 2

General sketch of the regimes of laser surface modifications for high repetition rate lasers and wet etching.

Fig. 3
Fig. 3

Nano-grating formation in defects accumulation regime. The arrow indicates the direction of the electric filed. Nano-gratings are situated in zone D in Fig. 2.

Fig. 4
Fig. 4

Increase of the diameter with number of pulses due to defects accumulation (Epulse= 21.7 nJ). Zone C in Fig. 2.

Fig. 5
Fig. 5

(a) – (b) AFM images after 10 min in KOH respectively of nano-craters revealed after wet surface etching(105 and 106pulses@18.9 nJ) and nano-hills for 105 and 106 pulses with energies 21.7 nJ per pulse; nano-hill (10 pulses, 26.7 nJ per pulse) and polarisation dependent ablation at energies of 26.7 and 29.2 nJ with 10 and 102 pulses.

Fig. 6
Fig. 6

Nano-gratings after 10 min of KOH etching (10 to 104 pulses from right to left). The direction of the electric filed is shown by an arrow. Zone A, B, C, D in Fig. 2.

Tables (1)

Tables Icon

Table 1 Elemental chemical concentration of cations in the sodium aluminosilicate glass samples measured by electron probe microanalyzer.

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