Abstract

We report the uninterrupted operation of an 18.9 nm wavelength tabletop soft x-ray laser at 100 Hz repetition rate for extended periods of time. An average power of about 0.1 mW was obtained by irradiating a Mo target with pulses from a compact diode-pumped chirped pulse amplification Yb:YAG laser. Series of up to 1.8 x 105 consecutive laser pulses of ~1 µJ energy were generated by displacing the surface of a high shot-capacity rotating molybdenum target by ~2 µm between laser shots. As a proof-of-principle demonstration of the use of this compact ultrashort wavelength laser in applications requiring a high average power coherent beam, we lithographically printed an array of nanometer-scale features using coherent Talbot self-imaging.

© 2013 Optical Society of America

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  1. J. Filevich, K. Kanizay, M. C. Marconi, J. L. A. Chilla, and J. J. Rocca, “Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings,” Opt. Lett. 25(5), 356–358 (2000).
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    [Crossref] [PubMed]
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    [Crossref] [PubMed]
  4. S. Carbajo, I. D. Howlett, F. Brizuela, K. S. Buchanan, M. C. Marconi, W. Chao, E. H. Anderson, I. Artioukov, A. Vinogradov, J. J. Rocca, and C. S. Menoni, “Sequential single-shot imaging of nanoscale dynamic interactions with a table-top soft x-ray laser,” Opt. Lett. 37(14), 2994–2996 (2012).
    [Crossref] [PubMed]
  5. F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009).
    [Crossref] [PubMed]
  6. I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
    [Crossref]
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  8. H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
    [Crossref]
  9. L. Urbanski, A. Isoyan, A. Stein, J. J. Rocca, C. S. Menoni, and M. C. Marconi, “Defect-tolerant extreme ultraviolet nanoscale printing,” Opt. Lett. 37(17), 3633–3635 (2012).
    [Crossref] [PubMed]
  10. B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, “Demonstration of a high average power tabletop soft X-ray laser,” Phys. Rev. Lett. 81(26), 5804–5807 (1998).
    [Crossref]
  11. C. D. Macchietto, B. R. Benware, and J. J. Rocca, “Generation of millijoule-level soft-x-ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier,” Opt. Lett. 24(16), 1115–1117 (1999).
    [Crossref] [PubMed]
  12. Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm,” Phys. Rev. A 72(5), 053807 (2005).
    [Crossref]
  13. D. H. Martz, D. Alessi, B. M. Luther, Y. Wang, D. Kemp, M. Berrill, and J. J. Rocca, “High-energy 13.9 nm table-top soft-x-ray laser at 2.5 Hz repetition rate excited by a slab-pumped Ti: sapphire laser,” Opt. Lett. 35(10), 1632–1634 (2010).
    [Crossref] [PubMed]
  14. M. Grünig, C. Imesch, F. Staub, and J. E. Balmer, “Saturated X-ray lasing in Ni-like Sn at 11.9 nm using the GRIP scheme,” Opt. Commun. 282(2), 267–271 (2009).
    [Crossref]
  15. H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
    [Crossref]
  16. D. Zimmer, B. Zielbauer, M. Pittman, O. Guilbaud, J. Habib, S. Kazamias, D. Ros, V. Bagnoud, and T. Kuehl, “Optimization of a tabletop high-repetition-rate soft x-ray laser pumped in double-pulse single-beam grazing incidence,” Opt. Lett. 35(4), 450–452 (2010).
    [Crossref] [PubMed]
  17. D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).
  18. B. A. Reagan, K. A. Wernsing, A. H. Curtis, F. J. Furch, B. M. Luther, D. Patel, C. S. Menoni, and J. J. Rocca, “Demonstration of a 100 Hz repetition rate gain-saturated diode-pumped table-top soft x-ray laser,” Opt. Lett. 37(17), 3624–3626 (2012).
    [Crossref] [PubMed]
  19. M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
    [Crossref] [PubMed]
  20. A. Weith, M. A. Larotonda, Y. Wang, B. M. Luther, D. Alessi, M. C. Marconi, J. J. Rocca, and J. Dunn, “Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets,” Opt. Lett. 31(13), 1994–1996 (2006).
    [Crossref] [PubMed]
  21. B. Zielbauer, D. Zimmer, J. Habib, O. Guilbaud, S. Kazamias, M. Pittman, and D. Ros, “Stable and fully controlled long-time operation of a soft X-ray laser for user application experiments,” Appl. Phys. B 100(4), 731–736 (2010).
    [Crossref]
  22. A. H. Curtis, B. A. Reagan, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Demonstration of a compact 100 Hz, 0.1 J, diode-pumped picosecond laser,” Opt. Lett. 36(11), 2164–2166 (2011).
    [Crossref] [PubMed]
  23. B. A. Reagan, A. H. Curtis, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Development of high energy diode-pumped thick-disk Yb: YAG chirped-pulse-amplification lasers,” IEEE J. Quantum Electron. 48(6), 827–835 (2012).
    [Crossref]
  24. R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, “High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm,” Phys. Rev. Lett. 94(10), 103901 (2005).
    [Crossref] [PubMed]
  25. B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett. 30(2), 165–167 (2005).
    [Crossref] [PubMed]
  26. Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, “Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm,” Nat. Photonics 2(2), 94–98 (2008).
    [Crossref]
  27. M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
    [Crossref]
  28. A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
    [Crossref]
  29. C. Zanke, M. H. Qi, and H. I. Smith, “Large-area patterning for photonic crystals via coherent diffraction lithography,” J. Vac. Sci. Technol. B 22(6), 3352–3355 (2004).
    [Crossref]

2012 (5)

2011 (2)

A. H. Curtis, B. A. Reagan, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Demonstration of a compact 100 Hz, 0.1 J, diode-pumped picosecond laser,” Opt. Lett. 36(11), 2164–2166 (2011).
[Crossref] [PubMed]

D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).

2010 (4)

2009 (4)

F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009).
[Crossref] [PubMed]

M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
[Crossref] [PubMed]

M. Grünig, C. Imesch, F. Staub, and J. E. Balmer, “Saturated X-ray lasing in Ni-like Sn at 11.9 nm using the GRIP scheme,” Opt. Commun. 282(2), 267–271 (2009).
[Crossref]

A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
[Crossref]

2008 (2)

Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, “Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm,” Nat. Photonics 2(2), 94–98 (2008).
[Crossref]

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

2006 (2)

2005 (3)

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett. 30(2), 165–167 (2005).
[Crossref] [PubMed]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm,” Phys. Rev. A 72(5), 053807 (2005).
[Crossref]

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, “High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm,” Phys. Rev. Lett. 94(10), 103901 (2005).
[Crossref] [PubMed]

2004 (1)

C. Zanke, M. H. Qi, and H. I. Smith, “Large-area patterning for photonic crystals via coherent diffraction lithography,” J. Vac. Sci. Technol. B 22(6), 3352–3355 (2004).
[Crossref]

2003 (1)

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

2000 (1)

1999 (1)

1998 (1)

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, “Demonstration of a high average power tabletop soft X-ray laser,” Phys. Rev. Lett. 81(26), 5804–5807 (1998).
[Crossref]

Alessi, D.

D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).

D. H. Martz, D. Alessi, B. M. Luther, Y. Wang, D. Kemp, M. Berrill, and J. J. Rocca, “High-energy 13.9 nm table-top soft-x-ray laser at 2.5 Hz repetition rate excited by a slab-pumped Ti: sapphire laser,” Opt. Lett. 35(10), 1632–1634 (2010).
[Crossref] [PubMed]

Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, “Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm,” Nat. Photonics 2(2), 94–98 (2008).
[Crossref]

A. Weith, M. A. Larotonda, Y. Wang, B. M. Luther, D. Alessi, M. C. Marconi, J. J. Rocca, and J. Dunn, “Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets,” Opt. Lett. 31(13), 1994–1996 (2006).
[Crossref] [PubMed]

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett. 30(2), 165–167 (2005).
[Crossref] [PubMed]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm,” Phys. Rev. A 72(5), 053807 (2005).
[Crossref]

Anderson, E. H.

S. Carbajo, I. D. Howlett, F. Brizuela, K. S. Buchanan, M. C. Marconi, W. Chao, E. H. Anderson, I. Artioukov, A. Vinogradov, J. J. Rocca, and C. S. Menoni, “Sequential single-shot imaging of nanoscale dynamic interactions with a table-top soft x-ray laser,” Opt. Lett. 37(14), 2994–2996 (2012).
[Crossref] [PubMed]

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009).
[Crossref] [PubMed]

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006).
[Crossref] [PubMed]

I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
[Crossref]

Artioukov, I.

Attwood, D. T.

Bagnoud, V.

Balmer, J. E.

M. Grünig, C. Imesch, F. Staub, and J. E. Balmer, “Saturated X-ray lasing in Ni-like Sn at 11.9 nm using the GRIP scheme,” Opt. Commun. 282(2), 267–271 (2009).
[Crossref]

Benware, B. R.

C. D. Macchietto, B. R. Benware, and J. J. Rocca, “Generation of millijoule-level soft-x-ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier,” Opt. Lett. 24(16), 1115–1117 (1999).
[Crossref] [PubMed]

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, “Demonstration of a high average power tabletop soft X-ray laser,” Phys. Rev. Lett. 81(26), 5804–5807 (1998).
[Crossref]

Bernstein, E. R.

I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
[Crossref]

Berrill, M.

D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).

D. H. Martz, D. Alessi, B. M. Luther, Y. Wang, D. Kemp, M. Berrill, and J. J. Rocca, “High-energy 13.9 nm table-top soft-x-ray laser at 2.5 Hz repetition rate excited by a slab-pumped Ti: sapphire laser,” Opt. Lett. 35(10), 1632–1634 (2010).
[Crossref] [PubMed]

Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, “Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm,” Nat. Photonics 2(2), 94–98 (2008).
[Crossref]

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett. 30(2), 165–167 (2005).
[Crossref] [PubMed]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm,” Phys. Rev. A 72(5), 053807 (2005).
[Crossref]

Bravo, H.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

Brewer, C.

Brewer, C. A.

Brizuela, F.

Buchanan, K. S.

Carbajo, S.

Cerrina, F.

A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
[Crossref]

Chao, W.

Chao, W. L.

I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
[Crossref]

Cheng, Y.

A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
[Crossref]

Chilla, J. L. A.

Choi, I. W.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Crick, D. C.

I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
[Crossref]

Curtis, A. H.

Deki, M.

Dong, F.

I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
[Crossref]

Dunn, J.

A. Weith, M. A. Larotonda, Y. Wang, B. M. Luther, D. Alessi, M. C. Marconi, J. J. Rocca, and J. Dunn, “Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets,” Opt. Lett. 31(13), 1994–1996 (2006).
[Crossref] [PubMed]

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, “High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm,” Phys. Rev. Lett. 94(10), 103901 (2005).
[Crossref] [PubMed]

Filevich, J.

J. Filevich, K. Kanizay, M. C. Marconi, J. L. A. Chilla, and J. J. Rocca, “Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings,” Opt. Lett. 25(5), 356–358 (2000).
[Crossref] [PubMed]

I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
[Crossref]

Furch, F. J.

Goldberg, K. A.

Granados, E.

Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, “Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm,” Nat. Photonics 2(2), 94–98 (2008).
[Crossref]

Grünig, M.

M. Grünig, C. Imesch, F. Staub, and J. E. Balmer, “Saturated X-ray lasing in Ni-like Sn at 11.9 nm using the GRIP scheme,” Opt. Commun. 282(2), 267–271 (2009).
[Crossref]

Guilbaud, O.

D. Zimmer, B. Zielbauer, M. Pittman, O. Guilbaud, J. Habib, S. Kazamias, D. Ros, V. Bagnoud, and T. Kuehl, “Optimization of a tabletop high-repetition-rate soft x-ray laser pumped in double-pulse single-beam grazing incidence,” Opt. Lett. 35(4), 450–452 (2010).
[Crossref] [PubMed]

B. Zielbauer, D. Zimmer, J. Habib, O. Guilbaud, S. Kazamias, M. Pittman, and D. Ros, “Stable and fully controlled long-time operation of a soft X-ray laser for user application experiments,” Appl. Phys. B 100(4), 731–736 (2010).
[Crossref]

Habib, J.

B. Zielbauer, D. Zimmer, J. Habib, O. Guilbaud, S. Kazamias, M. Pittman, and D. Ros, “Stable and fully controlled long-time operation of a soft X-ray laser for user application experiments,” Appl. Phys. B 100(4), 731–736 (2010).
[Crossref]

D. Zimmer, B. Zielbauer, M. Pittman, O. Guilbaud, J. Habib, S. Kazamias, D. Ros, V. Bagnoud, and T. Kuehl, “Optimization of a tabletop high-repetition-rate soft x-ray laser pumped in double-pulse single-beam grazing incidence,” Opt. Lett. 35(4), 450–452 (2010).
[Crossref] [PubMed]

Hafz, N.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Harteneck, B. D.

Hasegawa, N.

T. Suemoto, K. Terakawa, Y. Ochi, T. Tomita, M. Yamamoto, N. Hasegawa, M. Deki, Y. Minami, and T. Kawachi, “Single-shot picosecond interferometry with one-nanometer resolution for dynamical surface morphology using a soft X-ray laser,” Opt. Express 18(13), 14114–14122 (2010).
[Crossref] [PubMed]

M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
[Crossref] [PubMed]

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

Hong, K.-H.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Howlett, I. D.

Imesch, C.

M. Grünig, C. Imesch, F. Staub, and J. E. Balmer, “Saturated X-ray lasing in Ni-like Sn at 11.9 nm using the GRIP scheme,” Opt. Commun. 282(2), 267–271 (2009).
[Crossref]

Isoyan, A.

L. Urbanski, A. Isoyan, A. Stein, J. J. Rocca, C. S. Menoni, and M. C. Marconi, “Defect-tolerant extreme ultraviolet nanoscale printing,” Opt. Lett. 37(17), 3633–3635 (2012).
[Crossref] [PubMed]

A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
[Crossref]

Janulewicz, K. A.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Jeong, T. M.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Jiang, F.

A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
[Crossref]

Kado, M.

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

Kaihori, T.

M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
[Crossref] [PubMed]

Kanizay, K.

Kato, Y.

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

Kawachi, T.

T. Suemoto, K. Terakawa, Y. Ochi, T. Tomita, M. Yamamoto, N. Hasegawa, M. Deki, Y. Minami, and T. Kawachi, “Single-shot picosecond interferometry with one-nanometer resolution for dynamical surface morphology using a soft X-ray laser,” Opt. Express 18(13), 14114–14122 (2010).
[Crossref] [PubMed]

M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
[Crossref] [PubMed]

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

Kazamias, S.

B. Zielbauer, D. Zimmer, J. Habib, O. Guilbaud, S. Kazamias, M. Pittman, and D. Ros, “Stable and fully controlled long-time operation of a soft X-ray laser for user application experiments,” Appl. Phys. B 100(4), 731–736 (2010).
[Crossref]

D. Zimmer, B. Zielbauer, M. Pittman, O. Guilbaud, J. Habib, S. Kazamias, D. Ros, V. Bagnoud, and T. Kuehl, “Optimization of a tabletop high-repetition-rate soft x-ray laser pumped in double-pulse single-beam grazing incidence,” Opt. Lett. 35(4), 450–452 (2010).
[Crossref] [PubMed]

Keenan, R.

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, “High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm,” Phys. Rev. Lett. 94(10), 103901 (2005).
[Crossref] [PubMed]

Kemp, D.

Kim, H. T.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Kishimoto, M.

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

Ko, D.-K.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Kuehl, T.

Kuznetsov, I.

I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
[Crossref]

Larotonda, M. A.

Lee, J.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Liddle, J. A.

Liu, Y.

Luther, B.

Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, “Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm,” Nat. Photonics 2(2), 94–98 (2008).
[Crossref]

Luther, B. M.

B. A. Reagan, A. H. Curtis, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Development of high energy diode-pumped thick-disk Yb: YAG chirped-pulse-amplification lasers,” IEEE J. Quantum Electron. 48(6), 827–835 (2012).
[Crossref]

B. A. Reagan, K. A. Wernsing, A. H. Curtis, F. J. Furch, B. M. Luther, D. Patel, C. S. Menoni, and J. J. Rocca, “Demonstration of a 100 Hz repetition rate gain-saturated diode-pumped table-top soft x-ray laser,” Opt. Lett. 37(17), 3624–3626 (2012).
[Crossref] [PubMed]

D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).

A. H. Curtis, B. A. Reagan, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Demonstration of a compact 100 Hz, 0.1 J, diode-pumped picosecond laser,” Opt. Lett. 36(11), 2164–2166 (2011).
[Crossref] [PubMed]

D. H. Martz, D. Alessi, B. M. Luther, Y. Wang, D. Kemp, M. Berrill, and J. J. Rocca, “High-energy 13.9 nm table-top soft-x-ray laser at 2.5 Hz repetition rate excited by a slab-pumped Ti: sapphire laser,” Opt. Lett. 35(10), 1632–1634 (2010).
[Crossref] [PubMed]

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006).
[Crossref] [PubMed]

A. Weith, M. A. Larotonda, Y. Wang, B. M. Luther, D. Alessi, M. C. Marconi, J. J. Rocca, and J. Dunn, “Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets,” Opt. Lett. 31(13), 1994–1996 (2006).
[Crossref] [PubMed]

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett. 30(2), 165–167 (2005).
[Crossref] [PubMed]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm,” Phys. Rev. A 72(5), 053807 (2005).
[Crossref]

Macchietto, C. D.

C. D. Macchietto, B. R. Benware, and J. J. Rocca, “Generation of millijoule-level soft-x-ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier,” Opt. Lett. 24(16), 1115–1117 (1999).
[Crossref] [PubMed]

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, “Demonstration of a high average power tabletop soft X-ray laser,” Phys. Rev. Lett. 81(26), 5804–5807 (1998).
[Crossref]

Marconi, M.

A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
[Crossref]

Marconi, M. C.

L. Urbanski, A. Isoyan, A. Stein, J. J. Rocca, C. S. Menoni, and M. C. Marconi, “Defect-tolerant extreme ultraviolet nanoscale printing,” Opt. Lett. 37(17), 3633–3635 (2012).
[Crossref] [PubMed]

S. Carbajo, I. D. Howlett, F. Brizuela, K. S. Buchanan, M. C. Marconi, W. Chao, E. H. Anderson, I. Artioukov, A. Vinogradov, J. J. Rocca, and C. S. Menoni, “Sequential single-shot imaging of nanoscale dynamic interactions with a table-top soft x-ray laser,” Opt. Lett. 37(14), 2994–2996 (2012).
[Crossref] [PubMed]

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009).
[Crossref] [PubMed]

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006).
[Crossref] [PubMed]

A. Weith, M. A. Larotonda, Y. Wang, B. M. Luther, D. Alessi, M. C. Marconi, J. J. Rocca, and J. Dunn, “Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets,” Opt. Lett. 31(13), 1994–1996 (2006).
[Crossref] [PubMed]

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett. 30(2), 165–167 (2005).
[Crossref] [PubMed]

J. Filevich, K. Kanizay, M. C. Marconi, J. L. A. Chilla, and J. J. Rocca, “Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings,” Opt. Lett. 25(5), 356–358 (2000).
[Crossref] [PubMed]

Martz, D. H.

D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).

D. H. Martz, D. Alessi, B. M. Luther, Y. Wang, D. Kemp, M. Berrill, and J. J. Rocca, “High-energy 13.9 nm table-top soft-x-ray laser at 2.5 Hz repetition rate excited by a slab-pumped Ti: sapphire laser,” Opt. Lett. 35(10), 1632–1634 (2010).
[Crossref] [PubMed]

Menoni, C.

A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
[Crossref]

Menoni, C. S.

L. Urbanski, A. Isoyan, A. Stein, J. J. Rocca, C. S. Menoni, and M. C. Marconi, “Defect-tolerant extreme ultraviolet nanoscale printing,” Opt. Lett. 37(17), 3633–3635 (2012).
[Crossref] [PubMed]

B. A. Reagan, K. A. Wernsing, A. H. Curtis, F. J. Furch, B. M. Luther, D. Patel, C. S. Menoni, and J. J. Rocca, “Demonstration of a 100 Hz repetition rate gain-saturated diode-pumped table-top soft x-ray laser,” Opt. Lett. 37(17), 3624–3626 (2012).
[Crossref] [PubMed]

S. Carbajo, I. D. Howlett, F. Brizuela, K. S. Buchanan, M. C. Marconi, W. Chao, E. H. Anderson, I. Artioukov, A. Vinogradov, J. J. Rocca, and C. S. Menoni, “Sequential single-shot imaging of nanoscale dynamic interactions with a table-top soft x-ray laser,” Opt. Lett. 37(14), 2994–2996 (2012).
[Crossref] [PubMed]

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009).
[Crossref] [PubMed]

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006).
[Crossref] [PubMed]

I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
[Crossref]

Minami, Y.

Moreno, C. H.

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, “Demonstration of a high average power tabletop soft X-ray laser,” Phys. Rev. Lett. 81(26), 5804–5807 (1998).
[Crossref]

Nagashima, K.

M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
[Crossref] [PubMed]

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

Naulleau, P.

Nickles, P.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Nishikino, M.

M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
[Crossref] [PubMed]

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

Noh, Y.-C.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Ochi, Y.

T. Suemoto, K. Terakawa, Y. Ochi, T. Tomita, M. Yamamoto, N. Hasegawa, M. Deki, Y. Minami, and T. Kawachi, “Single-shot picosecond interferometry with one-nanometer resolution for dynamical surface morphology using a soft X-ray laser,” Opt. Express 18(13), 14114–14122 (2010).
[Crossref] [PubMed]

M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
[Crossref] [PubMed]

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

Ohba, T.

M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
[Crossref] [PubMed]

Patel, D.

Patel, P. K.

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, “High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm,” Phys. Rev. Lett. 94(10), 103901 (2005).
[Crossref] [PubMed]

Pedaci, F.

Pittman, M.

B. Zielbauer, D. Zimmer, J. Habib, O. Guilbaud, S. Kazamias, M. Pittman, and D. Ros, “Stable and fully controlled long-time operation of a soft X-ray laser for user application experiments,” Appl. Phys. B 100(4), 731–736 (2010).
[Crossref]

D. Zimmer, B. Zielbauer, M. Pittman, O. Guilbaud, J. Habib, S. Kazamias, D. Ros, V. Bagnoud, and T. Kuehl, “Optimization of a tabletop high-repetition-rate soft x-ray laser pumped in double-pulse single-beam grazing incidence,” Opt. Lett. 35(4), 450–452 (2010).
[Crossref] [PubMed]

Price, D. F.

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, “High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm,” Phys. Rev. Lett. 94(10), 103901 (2005).
[Crossref] [PubMed]

Qi, M. H.

C. Zanke, M. H. Qi, and H. I. Smith, “Large-area patterning for photonic crystals via coherent diffraction lithography,” J. Vac. Sci. Technol. B 22(6), 3352–3355 (2004).
[Crossref]

Reagan, B. A.

Rocca, J.

A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
[Crossref]

Rocca, J. J.

B. A. Reagan, A. H. Curtis, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Development of high energy diode-pumped thick-disk Yb: YAG chirped-pulse-amplification lasers,” IEEE J. Quantum Electron. 48(6), 827–835 (2012).
[Crossref]

B. A. Reagan, K. A. Wernsing, A. H. Curtis, F. J. Furch, B. M. Luther, D. Patel, C. S. Menoni, and J. J. Rocca, “Demonstration of a 100 Hz repetition rate gain-saturated diode-pumped table-top soft x-ray laser,” Opt. Lett. 37(17), 3624–3626 (2012).
[Crossref] [PubMed]

L. Urbanski, A. Isoyan, A. Stein, J. J. Rocca, C. S. Menoni, and M. C. Marconi, “Defect-tolerant extreme ultraviolet nanoscale printing,” Opt. Lett. 37(17), 3633–3635 (2012).
[Crossref] [PubMed]

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

S. Carbajo, I. D. Howlett, F. Brizuela, K. S. Buchanan, M. C. Marconi, W. Chao, E. H. Anderson, I. Artioukov, A. Vinogradov, J. J. Rocca, and C. S. Menoni, “Sequential single-shot imaging of nanoscale dynamic interactions with a table-top soft x-ray laser,” Opt. Lett. 37(14), 2994–2996 (2012).
[Crossref] [PubMed]

D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).

A. H. Curtis, B. A. Reagan, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Demonstration of a compact 100 Hz, 0.1 J, diode-pumped picosecond laser,” Opt. Lett. 36(11), 2164–2166 (2011).
[Crossref] [PubMed]

D. H. Martz, D. Alessi, B. M. Luther, Y. Wang, D. Kemp, M. Berrill, and J. J. Rocca, “High-energy 13.9 nm table-top soft-x-ray laser at 2.5 Hz repetition rate excited by a slab-pumped Ti: sapphire laser,” Opt. Lett. 35(10), 1632–1634 (2010).
[Crossref] [PubMed]

F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009).
[Crossref] [PubMed]

Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, “Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm,” Nat. Photonics 2(2), 94–98 (2008).
[Crossref]

A. Weith, M. A. Larotonda, Y. Wang, B. M. Luther, D. Alessi, M. C. Marconi, J. J. Rocca, and J. Dunn, “Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets,” Opt. Lett. 31(13), 1994–1996 (2006).
[Crossref] [PubMed]

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006).
[Crossref] [PubMed]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm,” Phys. Rev. A 72(5), 053807 (2005).
[Crossref]

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett. 30(2), 165–167 (2005).
[Crossref] [PubMed]

J. Filevich, K. Kanizay, M. C. Marconi, J. L. A. Chilla, and J. J. Rocca, “Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings,” Opt. Lett. 25(5), 356–358 (2000).
[Crossref] [PubMed]

C. D. Macchietto, B. R. Benware, and J. J. Rocca, “Generation of millijoule-level soft-x-ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier,” Opt. Lett. 24(16), 1115–1117 (1999).
[Crossref] [PubMed]

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, “Demonstration of a high average power tabletop soft X-ray laser,” Phys. Rev. Lett. 81(26), 5804–5807 (1998).
[Crossref]

I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
[Crossref]

Ros, D.

D. Zimmer, B. Zielbauer, M. Pittman, O. Guilbaud, J. Habib, S. Kazamias, D. Ros, V. Bagnoud, and T. Kuehl, “Optimization of a tabletop high-repetition-rate soft x-ray laser pumped in double-pulse single-beam grazing incidence,” Opt. Lett. 35(4), 450–452 (2010).
[Crossref] [PubMed]

B. Zielbauer, D. Zimmer, J. Habib, O. Guilbaud, S. Kazamias, M. Pittman, and D. Ros, “Stable and fully controlled long-time operation of a soft X-ray laser for user application experiments,” Appl. Phys. B 100(4), 731–736 (2010).
[Crossref]

Sandner, W.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Shlyaptsev, V. N.

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm,” Phys. Rev. A 72(5), 053807 (2005).
[Crossref]

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett. 30(2), 165–167 (2005).
[Crossref] [PubMed]

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, “High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm,” Phys. Rev. Lett. 94(10), 103901 (2005).
[Crossref] [PubMed]

Smith, H. I.

C. Zanke, M. H. Qi, and H. I. Smith, “Large-area patterning for photonic crystals via coherent diffraction lithography,” J. Vac. Sci. Technol. B 22(6), 3352–3355 (2004).
[Crossref]

Smith, R. F.

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, “High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm,” Phys. Rev. Lett. 94(10), 103901 (2005).
[Crossref] [PubMed]

Staub, F.

M. Grünig, C. Imesch, F. Staub, and J. E. Balmer, “Saturated X-ray lasing in Ni-like Sn at 11.9 nm using the GRIP scheme,” Opt. Commun. 282(2), 267–271 (2009).
[Crossref]

Stein, A.

Suemoto, T.

Sukegawa, K.

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

Sung, J. H.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Szapiro, B. T.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

Tanaka, M.

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

Terakawa, K.

Tomita, T.

Tümmler, J.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Urbanski, L.

L. Urbanski, A. Isoyan, A. Stein, J. J. Rocca, C. S. Menoni, and M. C. Marconi, “Defect-tolerant extreme ultraviolet nanoscale printing,” Opt. Lett. 37(17), 3633–3635 (2012).
[Crossref] [PubMed]

A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
[Crossref]

Vaschenko, G.

Vinogradov, A.

Wachulak, P.

Wachulak, P. W.

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

Wang, Y.

D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).

D. H. Martz, D. Alessi, B. M. Luther, Y. Wang, D. Kemp, M. Berrill, and J. J. Rocca, “High-energy 13.9 nm table-top soft-x-ray laser at 2.5 Hz repetition rate excited by a slab-pumped Ti: sapphire laser,” Opt. Lett. 35(10), 1632–1634 (2010).
[Crossref] [PubMed]

F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009).
[Crossref] [PubMed]

Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, “Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm,” Nat. Photonics 2(2), 94–98 (2008).
[Crossref]

A. Weith, M. A. Larotonda, Y. Wang, B. M. Luther, D. Alessi, M. C. Marconi, J. J. Rocca, and J. Dunn, “Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets,” Opt. Lett. 31(13), 1994–1996 (2006).
[Crossref] [PubMed]

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006).
[Crossref] [PubMed]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm,” Phys. Rev. A 72(5), 053807 (2005).
[Crossref]

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett. 30(2), 165–167 (2005).
[Crossref] [PubMed]

Weith, A.

Wernsing, K. A.

Woolston, M. R.

D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).

Yamamoto, M.

Yamatani, H.

M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
[Crossref] [PubMed]

Yin, L.

D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).

Yu, T. J.

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Zanke, C.

C. Zanke, M. H. Qi, and H. I. Smith, “Large-area patterning for photonic crystals via coherent diffraction lithography,” J. Vac. Sci. Technol. B 22(6), 3352–3355 (2004).
[Crossref]

Zielbauer, B.

B. Zielbauer, D. Zimmer, J. Habib, O. Guilbaud, S. Kazamias, M. Pittman, and D. Ros, “Stable and fully controlled long-time operation of a soft X-ray laser for user application experiments,” Appl. Phys. B 100(4), 731–736 (2010).
[Crossref]

D. Zimmer, B. Zielbauer, M. Pittman, O. Guilbaud, J. Habib, S. Kazamias, D. Ros, V. Bagnoud, and T. Kuehl, “Optimization of a tabletop high-repetition-rate soft x-ray laser pumped in double-pulse single-beam grazing incidence,” Opt. Lett. 35(4), 450–452 (2010).
[Crossref] [PubMed]

Zimmer, D.

D. Zimmer, B. Zielbauer, M. Pittman, O. Guilbaud, J. Habib, S. Kazamias, D. Ros, V. Bagnoud, and T. Kuehl, “Optimization of a tabletop high-repetition-rate soft x-ray laser pumped in double-pulse single-beam grazing incidence,” Opt. Lett. 35(4), 450–452 (2010).
[Crossref] [PubMed]

B. Zielbauer, D. Zimmer, J. Habib, O. Guilbaud, S. Kazamias, M. Pittman, and D. Ros, “Stable and fully controlled long-time operation of a soft X-ray laser for user application experiments,” Appl. Phys. B 100(4), 731–736 (2010).
[Crossref]

Appl. Phys. B (1)

B. Zielbauer, D. Zimmer, J. Habib, O. Guilbaud, S. Kazamias, M. Pittman, and D. Ros, “Stable and fully controlled long-time operation of a soft X-ray laser for user application experiments,” Appl. Phys. B 100(4), 731–736 (2010).
[Crossref]

IEEE J. Quantum Electron. (1)

B. A. Reagan, A. H. Curtis, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Development of high energy diode-pumped thick-disk Yb: YAG chirped-pulse-amplification lasers,” IEEE J. Quantum Electron. 48(6), 827–835 (2012).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (1)

H. Bravo, B. T. Szapiro, P. W. Wachulak, M. C. Marconi, W. Chao, E. H. Anderson, C. S. Menoni, and J. J. Rocca, “Demonstration of nanomachining with focused extreme ultraviolet laser beams,” IEEE J. Sel. Top. Quantum Electron. 18(1), 443–448 (2012).
[Crossref]

J. Vac. Sci. Technol. B (2)

A. Isoyan, F. Jiang, Y. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi, “Talbot lithography: Self-imaging of complex structures,” J. Vac. Sci. Technol. B 27(6), 2931–2937 (2009).
[Crossref]

C. Zanke, M. H. Qi, and H. I. Smith, “Large-area patterning for photonic crystals via coherent diffraction lithography,” J. Vac. Sci. Technol. B 22(6), 3352–3355 (2004).
[Crossref]

Nat. Photonics (1)

Y. Wang, E. Granados, F. Pedaci, D. Alessi, B. Luther, M. Berrill, and J. J. Rocca, “Phase-coherent, injection-seeded, table-top soft-X-ray lasers at 18.9 nm and 13.9 nm,” Nat. Photonics 2(2), 94–98 (2008).
[Crossref]

Opt. Commun. (1)

M. Grünig, C. Imesch, F. Staub, and J. E. Balmer, “Saturated X-ray lasing in Ni-like Sn at 11.9 nm using the GRIP scheme,” Opt. Commun. 282(2), 267–271 (2009).
[Crossref]

Opt. Express (1)

Opt. Lett. (12)

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006).
[Crossref] [PubMed]

S. Carbajo, I. D. Howlett, F. Brizuela, K. S. Buchanan, M. C. Marconi, W. Chao, E. H. Anderson, I. Artioukov, A. Vinogradov, J. J. Rocca, and C. S. Menoni, “Sequential single-shot imaging of nanoscale dynamic interactions with a table-top soft x-ray laser,” Opt. Lett. 37(14), 2994–2996 (2012).
[Crossref] [PubMed]

F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009).
[Crossref] [PubMed]

L. Urbanski, A. Isoyan, A. Stein, J. J. Rocca, C. S. Menoni, and M. C. Marconi, “Defect-tolerant extreme ultraviolet nanoscale printing,” Opt. Lett. 37(17), 3633–3635 (2012).
[Crossref] [PubMed]

C. D. Macchietto, B. R. Benware, and J. J. Rocca, “Generation of millijoule-level soft-x-ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier,” Opt. Lett. 24(16), 1115–1117 (1999).
[Crossref] [PubMed]

J. Filevich, K. Kanizay, M. C. Marconi, J. L. A. Chilla, and J. J. Rocca, “Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings,” Opt. Lett. 25(5), 356–358 (2000).
[Crossref] [PubMed]

D. H. Martz, D. Alessi, B. M. Luther, Y. Wang, D. Kemp, M. Berrill, and J. J. Rocca, “High-energy 13.9 nm table-top soft-x-ray laser at 2.5 Hz repetition rate excited by a slab-pumped Ti: sapphire laser,” Opt. Lett. 35(10), 1632–1634 (2010).
[Crossref] [PubMed]

D. Zimmer, B. Zielbauer, M. Pittman, O. Guilbaud, J. Habib, S. Kazamias, D. Ros, V. Bagnoud, and T. Kuehl, “Optimization of a tabletop high-repetition-rate soft x-ray laser pumped in double-pulse single-beam grazing incidence,” Opt. Lett. 35(4), 450–452 (2010).
[Crossref] [PubMed]

B. A. Reagan, K. A. Wernsing, A. H. Curtis, F. J. Furch, B. M. Luther, D. Patel, C. S. Menoni, and J. J. Rocca, “Demonstration of a 100 Hz repetition rate gain-saturated diode-pumped table-top soft x-ray laser,” Opt. Lett. 37(17), 3624–3626 (2012).
[Crossref] [PubMed]

A. Weith, M. A. Larotonda, Y. Wang, B. M. Luther, D. Alessi, M. C. Marconi, J. J. Rocca, and J. Dunn, “Continuous high-repetition-rate operation of collisional soft-x-ray lasers with solid targets,” Opt. Lett. 31(13), 1994–1996 (2006).
[Crossref] [PubMed]

B. M. Luther, Y. Wang, M. A. Larotonda, D. Alessi, M. Berrill, M. C. Marconi, J. J. Rocca, and V. N. Shlyaptsev, “Saturated high-repetition-rate 18.9-nm tabletop laser in nickellike molybdenum,” Opt. Lett. 30(2), 165–167 (2005).
[Crossref] [PubMed]

A. H. Curtis, B. A. Reagan, K. A. Wernsing, F. J. Furch, B. M. Luther, and J. J. Rocca, “Demonstration of a compact 100 Hz, 0.1 J, diode-pumped picosecond laser,” Opt. Lett. 36(11), 2164–2166 (2011).
[Crossref] [PubMed]

Phys. Rev. A (3)

M. Nishikino, M. Tanaka, K. Nagashima, M. Kishimoto, M. Kado, T. Kawachi, K. Sukegawa, Y. Ochi, N. Hasegawa, and Y. Kato, “Demonstration of a soft-x-ray laser at 13.9 nm with full spatial coherence,” Phys. Rev. A 68(6), 061802 (2003).
[Crossref]

H. T. Kim, I. W. Choi, N. Hafz, J. H. Sung, T. J. Yu, K.-H. Hong, T. M. Jeong, Y.-C. Noh, D.-K. Ko, K. A. Janulewicz, J. Tümmler, P. Nickles, W. Sandner, and J. Lee, “Demonstration of a saturated Ni-like Ag x-ray laser pumped by a single profiled laser pulse from a 10-Hz Ti: sapphire laser system,” Phys. Rev. A 77(2), 023807 (2008).
[Crossref]

Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9 nm and gain down to 10.9 nm,” Phys. Rev. A 72(5), 053807 (2005).
[Crossref]

Phys. Rev. Lett. (2)

B. R. Benware, C. D. Macchietto, C. H. Moreno, and J. J. Rocca, “Demonstration of a high average power tabletop soft X-ray laser,” Phys. Rev. Lett. 81(26), 5804–5807 (1998).
[Crossref]

R. Keenan, J. Dunn, P. K. Patel, D. F. Price, R. F. Smith, and V. N. Shlyaptsev, “High-repetition-rate grazing-incidence pumped x-ray laser operating at 18.9 nm,” Phys. Rev. Lett. 94(10), 103901 (2005).
[Crossref] [PubMed]

Phys. Rev. X (1)

D. Alessi, Y. Wang, B. M. Luther, L. Yin, D. H. Martz, M. R. Woolston, Y. Liu, M. Berrill, and J. J. Rocca, “Efficient excitation of gain-saturated sub-9-nm-wavelength tabletop soft-X-ray lasers and lasing down to 7.36 nm,” Phys. Rev. X 1, 021023 (2011).

Rev. Sci. Instrum. (1)

M. Nishikino, Y. Ochi, N. Hasegawa, T. Kawachi, H. Yamatani, T. Ohba, T. Kaihori, and K. Nagashima, “Demonstration of a highly coherent 13.9 nm x-ray laser from a silver tape target,” Rev. Sci. Instrum. 80(11), 116102 (2009).
[Crossref] [PubMed]

Other (2)

I. Kuznetsov, J. Filevich, F. Dong, W. L. Chao, E. H. Anderson, E. R. Bernstein, D. C. Crick, J. J. Rocca, and C. S. Menoni, “Nanoscale 3D composition imaging by soft x-ray laser ablation mass spectrometry,” 2012 Conference on Lasers and Electro-Optics (CLEO) (2012).
[Crossref]

B. Zielbauer, J. Habib, S. Kazamias, O. Guilbaud, M. Pittman, D. Ros, M.-A. H. du Penhoat, A. Touati, C. Le Sech, and E. Porcel, “Strand breaks in DNA samples induced with LASERIX,” in X-Ray Lasers 2008 (Springer, 2009), pp. 409–411.

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Figures (4)

Fig. 1
Fig. 1

Setup for generating the continuously operating SXRL. Driver laser pulses exiting the pulse compressor are focused into a line on the target at grazing incidence using cylindrical optics. Photographs of the high shot capacity target and the line focus plasma amplifier are shown inset.

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Fig. 2
Fig. 2

(a) and (b) show a single shot on axis EUV spectrum of the Mo plasma with strong lasing observed on the λ = 18.9nm transition. (c) Measured SXRL pulse energy at 50 Hz repetition rate for just over 1 hour of operation. 180,000 consecutive shots were recorded. The line shows the running average of the pulse energy with the error bars representing the shot to shot standard deviation of each section of pulse sequence. The periodic gaps in the data correspond to transfers of the data from a digitizing oscilloscope to a computer during which the laser continued to operate.

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Fig. 3
Fig. 3

(a) Recorded laser pulse energy variation for 30 minutes of continuous 100 Hz repetition rate operation of the λ = 18.9nm SXRL. The degradation of the pulse energy over the run is due to poor thermal stabilization of the lab causing a drift in the driver laser. (b) A close-up of the shaded 30 second subsection of the run in (a) showing the shot to shot stability of 3000 consecutive shots.

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Fig. 4
Fig. 4

(a) Talbot lithography experimental setup. The SXRL beam passes through an Al filter and impinges a 45° angle of incidence Mo-Si multilayer mirror. A two dimensional periodic mask generates a Talbot image at the sample plane that is registered in photoresist. (b) Scanning electron microscope (SEM) image of the Talbot mask defined on a SiN membrane. (c) Atomic force microscope image of the nanometer-scale features printed through Talbot lithography using the λ = 18.9 nm laser. The overall size of the array was ≈0.5 mm x 0.5 mm, and the width of the printed lines was ≈400 nm.

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