Abstract

We demonstrate gigahertz electro-optic modulator fabricated on low temperature polysilicon using excimer laser annealing technique compatible with CMOS backend integration. Carrier injection modulation at 3 Gbps is achieved. These results open up an array of possibilities for silicon photonics including photonics on DRAM and on flexible substrates.

© 2013 Optical Society of America

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References

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  1. J. S. Orcutt, A. Khilo, C. W. Holzwarth, M. A. Popović, H. Li, J. Sun, T. Bonifield, R. Hollingsworth, F. X. Kärtner, H. I. Smith, V. Stojanović, and R. J. Ram, “Nanophotonic integration in state-of-the-art CMOS foundries,” Opt. Express 19(3), 2335–2346 (2011).
    [Crossref] [PubMed]
  2. S. Sridaran and S. A. Bhave, “Nanophotonic devices on thin buried oxide silicon-on-insulator substrates,” Opt. Express 18(4), 3850–3857 (2010).
    [Crossref] [PubMed]
  3. B. R. Moss, S. Chen, M. Georgas, J. Shainline, J. S. Orcutt, J. C. Leu, M. Wade, C. Yu-Hsin, K. Nammari, W. Xiaoxi, L. Hanqing, R. Ram, M. A. Popovic, and V. Stojanovic, “A 1.23pJ/b 2.5Gb/s monolithically integrated optical carrier-injection ring modulator and all-digital driver circuit in commercial 45nm SOI,” in Solid-State Circuits Conference Digest of Technical Papers (ISSCC),2013 (IEEE International, 2013), pp. 126–127.
  4. J. M. Shainline, J. S. Orcutt, M. T. Wade, K. Nammari, B. Moss, M. Georgas, C. Sun, R. J. Ram, V. Stojanović, and M. A. Popović, “Depletion-mode carrier-plasma optical modulator in zero-change advanced CMOS,” Opt. Lett. 38(15), 2657–2659 (2013).
    [Crossref] [PubMed]
  5. T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours of silicon photonics,” Nat. Photonics 6(4), 206–208 (2012).
    [Crossref]
  6. J. M. Shainline, J. S. Orcutt, M. T. Wade, K. Nammari, O. Tehar-Zahav, Z. Sternberg, R. Meade, R. J. Ram, V. Stojanović, and M. A. Popović, “Depletion-mode polysilicon optical modulators in a bulk complementary metal-oxide semiconductor process,” Opt. Lett. 38(15), 2729–2731 (2013).
    [Crossref] [PubMed]
  7. D. J. Shin, K. S. Cho, H. C. Ji, B. S. Lee, S. G. Kim, J. K. Bok, S. H. Choi, Y. H. Shin, J. H. Kim, S. Y. Lee, K. Y. Cho, B. J. Kuh, J. H. Shin, J. S. Lim, J. M. Kim, H. M. Choi, K. H. Ha, Y. D. Park, and C. H. Chung, “Integration of Si photonics into DRAM process,” in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (online) (Optical Society of America, 2013), pp. OTu2C.4.
    [Crossref]
  8. A. Hosseini, B. Fallahazad, D. N. Kwong, Y. Zhang, E. Tutuc, and R. T. Chen, “A platform for three-dimensional on-chip photonics: Multi-bonded silicon-on-insulator wafers,” in 2011Conference onLasers and Electro-Optics (CLEO), 2011, pp. 1–2.
    [Crossref]
  9. A. E.-J. Lim, T.-Y. Liow, N. Duan, L. Ding, M. Yu, G. Q. Lo, and D. L. Kwong, “Germanium electro-absorption modulator for power efficient optical links,” in Microwave Photonics, 2011 International Topical Meeting on & Microwave Photonics Conference, 2011 Asia-Pacific (MWP/APMP, 2011), pp. 105–108.
    [Crossref]
  10. Y. Chen, H. Li, and M. Li, “Flexible and tunable silicon photonic circuits on plastic substrates,” Sci. Rep. 2, 622 (2012).
  11. A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
    [Crossref]
  12. A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).
  13. L. Alloatti, D. Korn, R. Palmer, D. Hillerkuss, J. Li, A. Barklund, R. Dinu, J. Wieland, M. Fournier, J. Fedeli, H. Yu, W. Bogaerts, P. Dumon, R. Baets, C. Koos, W. Freude, and J. Leuthold, “42.7 Gbit/s electro-optic modulator in silicon technology,” Opt. Express 19(12), 11841–11851 (2011).
    [Crossref] [PubMed]
  14. M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
    [Crossref]
  15. N. Sherwood-Droz and M. Lipson, “Scalable 3D dense integration of photonics on bulk silicon,” Opt. Express 19(18), 17758–17765 (2011).
    [Crossref] [PubMed]
  16. S. Rao, G. Coppola, M. A. Gioffrè, and F. G. Della Corte, “A 2.5 ns switching time MachZehnder modulator in as-deposited a-Si:H,” Opt. Express 20(9), 9351–9356 (2012).
    [Crossref] [PubMed]
  17. A. M. Agarwal, M. R. Black, J. S. Foresi, L. Liao, Y. Liu, and L. C. Kimerling, “Polysilicon waveguides for silicon photonics,” MRS Proc.403(1995).
  18. J. S. Orcutt, S. D. Tang, S. Kramer, K. Mehta, H. Li, V. Stojanović, and R. J. Ram, “Low-loss polysilicon waveguides fabricated in an emulated high-volume electronics process,” Opt. Express 20(7), 7243–7254 (2012).
    [Crossref] [PubMed]
  19. K. Preston, S. Manipatruni, A. Gondarenko, C. B. Poitras, and M. Lipson, “Deposited silicon high-speed integrated electro-optic modulator,” Opt. Express 17(7), 5118–5124 (2009).
    [Crossref] [PubMed]
  20. P. M. Smith, P. G. Carey, and T. W. Sigmon, “Excimer laser crystallization and doping of silicon films on plastic substrates,” Appl. Phys. Lett. 70(3), 342–344 (1997).
    [Crossref]
  21. R. Delmdahl, “The excimer laser: Precision engineering,” Nat. Photonics 4(5), 286 (2010).
    [Crossref]
  22. Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express 15(2), 430–436 (2007).
    [Crossref] [PubMed]

2013 (2)

2012 (5)

Y. Chen, H. Li, and M. Li, “Flexible and tunable silicon photonic circuits on plastic substrates,” Sci. Rep. 2, 622 (2012).

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours of silicon photonics,” Nat. Photonics 6(4), 206–208 (2012).
[Crossref]

S. Rao, G. Coppola, M. A. Gioffrè, and F. G. Della Corte, “A 2.5 ns switching time MachZehnder modulator in as-deposited a-Si:H,” Opt. Express 20(9), 9351–9356 (2012).
[Crossref] [PubMed]

J. S. Orcutt, S. D. Tang, S. Kramer, K. Mehta, H. Li, V. Stojanović, and R. J. Ram, “Low-loss polysilicon waveguides fabricated in an emulated high-volume electronics process,” Opt. Express 20(7), 7243–7254 (2012).
[Crossref] [PubMed]

2011 (4)

2010 (2)

2009 (1)

2007 (1)

2005 (1)

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

1997 (1)

P. M. Smith, P. G. Carey, and T. W. Sigmon, “Excimer laser crystallization and doping of silicon films on plastic substrates,” Appl. Phys. Lett. 70(3), 342–344 (1997).
[Crossref]

Agarwal, A. M.

A. M. Agarwal, M. R. Black, J. S. Foresi, L. Liao, Y. Liu, and L. C. Kimerling, “Polysilicon waveguides for silicon photonics,” MRS Proc.403(1995).

Alloatti, L.

Asghari, M.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Assefa, S.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Baehr-Jones, T.

T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours of silicon photonics,” Nat. Photonics 6(4), 206–208 (2012).
[Crossref]

Baets, R.

Barklund, A.

Bellutti, P.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Bhave, S. A.

Black, M. R.

A. M. Agarwal, M. R. Black, J. S. Foresi, L. Liao, Y. Liu, and L. C. Kimerling, “Polysilicon waveguides for silicon photonics,” MRS Proc.403(1995).

Bogaerts, W.

Bonifield, T.

Carey, P. G.

P. M. Smith, P. G. Carey, and T. W. Sigmon, “Excimer laser crystallization and doping of silicon films on plastic substrates,” Appl. Phys. Lett. 70(3), 342–344 (1997).
[Crossref]

Chen, R. T.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Chen, Y.

Y. Chen, H. Li, and M. Li, “Flexible and tunable silicon photonic circuits on plastic substrates,” Sci. Rep. 2, 622 (2012).

Coppola, G.

Costa, J.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Cunningham, J. E.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Daldosso, N.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Danziger, S.

T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours of silicon photonics,” Nat. Photonics 6(4), 206–208 (2012).
[Crossref]

Della Corte, F. G.

Delmdahl, R.

R. Delmdahl, “The excimer laser: Precision engineering,” Nat. Photonics 4(5), 286 (2010).
[Crossref]

Dinu, R.

Doany, F. E.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Dong, P.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Dumon, P.

Fedeli, J.

Feng, D.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Foresi, J. S.

A. M. Agarwal, M. R. Black, J. S. Foresi, L. Liao, Y. Liu, and L. C. Kimerling, “Polysilicon waveguides for silicon photonics,” MRS Proc.403(1995).

Fournier, M.

Freude, W.

Georgas, M.

Gioffrè, M. A.

Glebov, A. L.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Gondarenko, A.

Green, W. M. J.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Hillerkuss, D.

Ho, R.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Hochberg, M.

T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours of silicon photonics,” Nat. Photonics 6(4), 206–208 (2012).
[Crossref]

Hollingsworth, R.

Holzwarth, C. W.

Jahnes, C. V.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Kärtner, F. X.

Kash, J. A.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Khilo, A.

Kimerling, L. C.

A. M. Agarwal, M. R. Black, J. S. Foresi, L. Liao, Y. Liu, and L. C. Kimerling, “Polysilicon waveguides for silicon photonics,” MRS Proc.403(1995).

Kompocholis, C.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Koos, C.

Korn, D.

Kramer, S.

Krishnamoorthy, A. V.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Lee, B. G.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Leuthold, J.

Lexau, J.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Li, G.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Li, H.

Li, J.

Li, M.

Y. Chen, H. Li, and M. Li, “Flexible and tunable silicon photonic circuits on plastic substrates,” Sci. Rep. 2, 622 (2012).

Liao, L.

A. M. Agarwal, M. R. Black, J. S. Foresi, L. Liao, Y. Liu, and L. C. Kimerling, “Polysilicon waveguides for silicon photonics,” MRS Proc.403(1995).

Lipson, M.

Liu, F.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Liu, Y.

A. M. Agarwal, M. R. Black, J. S. Foresi, L. Liao, Y. Liu, and L. C. Kimerling, “Polysilicon waveguides for silicon photonics,” MRS Proc.403(1995).

Lo Guo-Qiang, P.

T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours of silicon photonics,” Nat. Photonics 6(4), 206–208 (2012).
[Crossref]

Lui, A.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Luo, Y.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Manipatruni, S.

Meade, R.

Mehta, K.

Melchiorri, M.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Mitchell, J. G.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Moss, B.

Nammari, K.

Orcutt, J. S.

Palmer, R.

Patil, D.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Pavesi, L.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Pinguet, T.

T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours of silicon photonics,” Nat. Photonics 6(4), 206–208 (2012).
[Crossref]

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Poitras, C. B.

Popovic, M. A.

Prather, D.

T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours of silicon photonics,” Nat. Photonics 6(4), 206–208 (2012).
[Crossref]

Preston, K.

Pucker, G.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Raj, K.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Ram, R. J.

Rao, S.

Rylyakov, A. V.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Sbrana, F.

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

Schmidt, B.

Schow, C. L.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Shainline, J. M.

Shakya, J.

Sherwood-Droz, N.

Shubin, I.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Sigmon, T. W.

P. M. Smith, P. G. Carey, and T. W. Sigmon, “Excimer laser crystallization and doping of silicon films on plastic substrates,” Appl. Phys. Lett. 70(3), 342–344 (1997).
[Crossref]

Smith, H. I.

Smith, P. M.

P. M. Smith, P. G. Carey, and T. W. Sigmon, “Excimer laser crystallization and doping of silicon films on plastic substrates,” Appl. Phys. Lett. 70(3), 342–344 (1997).
[Crossref]

Sridaran, S.

Sternberg, Z.

Stojanovic, V.

Sun, C.

Sun, J.

Tang, S. D.

Tehar-Zahav, O.

Thacker, H. D.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Van Campenhout, J.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Vlasov, Y. A.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Wade, M. T.

Wieland, J.

Xu, Q.

Yang, M.

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Yao, J.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Yu, H.

Zheng, X.

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Appl. Phys. Lett. (2)

M. Melchiorri, N. Daldosso, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, P. Bellutti, and A. Lui, “Propagation losses of silicon nitride waveguides in the near-infrared range,” Appl. Phys. Lett. 86(12), 121111 (2005).
[Crossref]

P. M. Smith, P. G. Carey, and T. W. Sigmon, “Excimer laser crystallization and doping of silicon films on plastic substrates,” Appl. Phys. Lett. 70(3), 342–344 (1997).
[Crossref]

IEEE J. Solid State Circuits (1)

A. V. Rylyakov, C. L. Schow, B. G. Lee, W. M. J. Green, S. Assefa, F. E. Doany, M. Yang, J. Van Campenhout, C. V. Jahnes, J. A. Kash, and Y. A. Vlasov, “Silicon photonic switches hybrid-integrated with CMOS drivers,” IEEE J. Solid State Circuits 47(1), 345–354 (2012).
[Crossref]

Nat. Photonics (2)

T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours of silicon photonics,” Nat. Photonics 6(4), 206–208 (2012).
[Crossref]

R. Delmdahl, “The excimer laser: Precision engineering,” Nat. Photonics 4(5), 286 (2010).
[Crossref]

Opt. Express (8)

Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express 15(2), 430–436 (2007).
[Crossref] [PubMed]

L. Alloatti, D. Korn, R. Palmer, D. Hillerkuss, J. Li, A. Barklund, R. Dinu, J. Wieland, M. Fournier, J. Fedeli, H. Yu, W. Bogaerts, P. Dumon, R. Baets, C. Koos, W. Freude, and J. Leuthold, “42.7 Gbit/s electro-optic modulator in silicon technology,” Opt. Express 19(12), 11841–11851 (2011).
[Crossref] [PubMed]

J. S. Orcutt, A. Khilo, C. W. Holzwarth, M. A. Popović, H. Li, J. Sun, T. Bonifield, R. Hollingsworth, F. X. Kärtner, H. I. Smith, V. Stojanović, and R. J. Ram, “Nanophotonic integration in state-of-the-art CMOS foundries,” Opt. Express 19(3), 2335–2346 (2011).
[Crossref] [PubMed]

S. Sridaran and S. A. Bhave, “Nanophotonic devices on thin buried oxide silicon-on-insulator substrates,” Opt. Express 18(4), 3850–3857 (2010).
[Crossref] [PubMed]

J. S. Orcutt, S. D. Tang, S. Kramer, K. Mehta, H. Li, V. Stojanović, and R. J. Ram, “Low-loss polysilicon waveguides fabricated in an emulated high-volume electronics process,” Opt. Express 20(7), 7243–7254 (2012).
[Crossref] [PubMed]

K. Preston, S. Manipatruni, A. Gondarenko, C. B. Poitras, and M. Lipson, “Deposited silicon high-speed integrated electro-optic modulator,” Opt. Express 17(7), 5118–5124 (2009).
[Crossref] [PubMed]

N. Sherwood-Droz and M. Lipson, “Scalable 3D dense integration of photonics on bulk silicon,” Opt. Express 19(18), 17758–17765 (2011).
[Crossref] [PubMed]

S. Rao, G. Coppola, M. A. Gioffrè, and F. G. Della Corte, “A 2.5 ns switching time MachZehnder modulator in as-deposited a-Si:H,” Opt. Express 20(9), 9351–9356 (2012).
[Crossref] [PubMed]

Opt. Lett. (2)

Proc. SPIE (1)

A. L. Glebov, H. D. Thacker, I. Shubin, Y. Luo, J. Costa, J. Lexau, X. Zheng, G. Li, J. Yao, D. Patil, F. Liu, R. Ho, T. Pinguet, P. Dong, D. Feng, M. Asghari, K. Raj, J. G. Mitchell, A. V. Krishnamoorthy, J. E. Cunningham, and R. T. Chen, “Hybrid-integrated silicon photonic bridge chips for ultralow-energy inter-chip communications,” Proc. SPIE 7944, 79440B (2011).

Sci. Rep. (1)

Y. Chen, H. Li, and M. Li, “Flexible and tunable silicon photonic circuits on plastic substrates,” Sci. Rep. 2, 622 (2012).

Other (5)

B. R. Moss, S. Chen, M. Georgas, J. Shainline, J. S. Orcutt, J. C. Leu, M. Wade, C. Yu-Hsin, K. Nammari, W. Xiaoxi, L. Hanqing, R. Ram, M. A. Popovic, and V. Stojanovic, “A 1.23pJ/b 2.5Gb/s monolithically integrated optical carrier-injection ring modulator and all-digital driver circuit in commercial 45nm SOI,” in Solid-State Circuits Conference Digest of Technical Papers (ISSCC),2013 (IEEE International, 2013), pp. 126–127.

D. J. Shin, K. S. Cho, H. C. Ji, B. S. Lee, S. G. Kim, J. K. Bok, S. H. Choi, Y. H. Shin, J. H. Kim, S. Y. Lee, K. Y. Cho, B. J. Kuh, J. H. Shin, J. S. Lim, J. M. Kim, H. M. Choi, K. H. Ha, Y. D. Park, and C. H. Chung, “Integration of Si photonics into DRAM process,” in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (online) (Optical Society of America, 2013), pp. OTu2C.4.
[Crossref]

A. Hosseini, B. Fallahazad, D. N. Kwong, Y. Zhang, E. Tutuc, and R. T. Chen, “A platform for three-dimensional on-chip photonics: Multi-bonded silicon-on-insulator wafers,” in 2011Conference onLasers and Electro-Optics (CLEO), 2011, pp. 1–2.
[Crossref]

A. E.-J. Lim, T.-Y. Liow, N. Duan, L. Ding, M. Yu, G. Q. Lo, and D. L. Kwong, “Germanium electro-absorption modulator for power efficient optical links,” in Microwave Photonics, 2011 International Topical Meeting on & Microwave Photonics Conference, 2011 Asia-Pacific (MWP/APMP, 2011), pp. 105–108.
[Crossref]

A. M. Agarwal, M. R. Black, J. S. Foresi, L. Liao, Y. Liu, and L. C. Kimerling, “Polysilicon waveguides for silicon photonics,” MRS Proc.403(1995).

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Figures (3)

Fig. 1
Fig. 1

Backend deposited silicon photonics. Rendered image of polysilicon modulator integrated on CMOS BEOL. For clarity, we show only a part of the metal contacts. One can see that the grain boundaries and the dimensions of the cross-section of the device are comparable.

Fig. 2
Fig. 2

Characterization of low temperature polysilicon devices. (a) Optical micrograph of the fabricated device (b) Transmission spectrum of polysilicon ring resonator with Qloaded ~12,000 (c) IV curve of the fabricated polysilicon ring modulator device.

Fig. 3
Fig. 3

Electro-optic modulation using polysilicon modulator. (a) Modulator output with square wave input signal. (b) Optical eye diagram of polysilicon ring modulator at 1598.9 nm (PRBS 27-1 pattern with pre-emphasis at 3 Gbps).

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