Abstract

We present a terahertz (THz) broadband antenna-integrated 1 × 20 InGaAs Schottky barrier diode (SBD) array detector with an average responsivity of 98.5 V/W at a frequency of 250 GHz, which is measured without attaching external amplifiers and Si lenses, and an average noise equivalent power (NEP) of 106.6 pW/√Hz. The 3-dB bandwidth of the SBD detector is also investigated at approximately 180 GHz. For implementing an array-type SBD detector by a simple fabrication process to achieve a high yield, a structure comprising an SiNx layer instead of an air bridge between the anode and the cathode is designed. THz line beam imaging using a Gunn diode emitter with a center frequency of 250 GHz and a 1 × 20 SBD array detector is successfully demonstrated.

© 2013 Optical Society of America

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  1. M. Tonouchi, “Cutting-edge terahertz technology,” Nat. Photonics1(2), 97–105 (2007).
    [CrossRef]
  2. A. Rogalski and F. Sizov, “Terahertz detectors and focal plane arrays,” Opto-Electron. Rev.19(3), 346–404 (2011).
    [CrossRef]
  3. N. Oda, A. W. M. Lee, T. Ishi, I. Hosako, and Q. Hu, “Proposal for real-time terahertz imaging system, with palm-size terahertz camera and compact quantum cascade laser,” Proc. SPIE8363, 83630A (2012).
    [CrossRef]
  4. N. Karpowicz, H. Zhong, C. Zhang, K.-I. Lin, J.-S. Hwang, J. Xu, and X.-C. Zhang, “Compact continuous-wave subterahertz system for inspection applications,” Appl. Phys. Lett.86(5), 054105 (2005).
    [CrossRef]
  5. C. Sydlo, O. Cojocari, D. Schçnherr, T. Goebel, P. Meissner, and H. L. Hartnagel, “Fast THz detectors based on InGaAs Schottky diodes,” Frequenz62(5-6), 107–110 (2008).
    [CrossRef]
  6. A. W. M. Lee, B. S. Williams, S. Kumar, Q. Hu, and J. L. Reno, “Real-time imaging using a 4.3-THz quantum cascade laser and a 320 × 240 microbolometer focal-plane array,” IEEE Photon. Technol. Lett.18(13), 1415–1417 (2006).
    [CrossRef]
  7. R. Han, Y. Zhang, Y. Kim, D. Y. Kim, H. Shichijo, E. Afshari, and K. K. O, “Active terahertz imaging using Schottky diodes in CMOS array and 860-GHz pixel,” IEEE J. Solid-St. Circulation99, 1–14 (2013).
  8. F. Schuster, D. Coquillat, H. Videlier, M. Sakowicz, F. Teppe, L. Dussopt, B. Giffard, T. Skotnicki, and W. Knap, “Broadband terahertz imaging with highly sensitive silicon CMOS detectors,” Opt. Express19(8), 7827–7832 (2011).
    [CrossRef] [PubMed]
  9. V. V. Popov, D. M. Ermolaev, K. V. Maremyanin, N. A. Maleev, V. E. Zemlyakov, V. I. Gavrilenko, and S. Y. Shapoval, “High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array,” Appl. Phys. Lett.98(15), 153504 (2011).
    [CrossRef]
  10. U. V. Bhapkar, Y. Li, and R. J. Mattauch, “InGaAs-InP heteroepitaxial Schottky barrier diodes for terahertz applications,” Proc. ISSTT, 661–677 (1991).
  11. I. Oprea, A. Walber, O. Cojocari, H. Gibson, R. Zimmermann, and H. L. Hartnagel, “183 GHz mixer on InGaAs Schottky diodes,” Proc. ISSTT, 159–160 (2010).
  12. A. Semenov, O. Cojocari, H.-W. Hübers, F. Song, A. Klushin, and A.-S. Müller, “Application of zero-bias quasi-optical Schottky-diode detectors for monitoring short-pulse and weak terahertz radiation,” IEEE Electron Device Lett.31(7), 674–676 (2010).
    [CrossRef]
  13. J. L. Hesler and T. W. Crowe, “Responsivity and noise measurements of zero-bias Schottky diode detectors,” Proc. ISSTT, 89–92 (2007).
  14. J. L. Hesler, L. Liu, H. Xu, Y. Duan, and R. M. Weikle, “The development of quasi-optical THz detectors,” IRMMW-THz15–19(Sep), 1–2 (2008).
  15. N. Kim, Y. A. Leem, M. Y. Jeon, C. W. Lee, S.-P. Han, D. Lee, and K. H. Park, “Widely tunable 1.55 µm detuned dual mode laser diode for compact continuous-wave THz emitter,” ETRI J.33(5), 810–813 (2011).
    [CrossRef]
  16. N. Kim, H.-C. Ryu, D. Lee, S.-P. Han, H. Ko, K. Moon, J.-W. Park, M. Y. Jeon, and K. H. Park, “Monolithically integrated optical beat sources toward a single-chip broadband terahertz emitter,” Laser Phys. Lett.10(8), 085805 (2013).
    [CrossRef]
  17. S.-P. Han, H. Ko, N. Kim, H.-C. Ryu, C. W. Lee, Y. A. Leem, D. Lee, M. Y. Jeon, S. K. Noh, H. S. Chun, and K. H. Park, “Optical fiber-coupled InGaAs-based terahertz time-domain spectroscopy system,” Opt. Lett.36(16), 3094–3096 (2011).
    [CrossRef] [PubMed]
  18. S.-P. Han, N. Kim, H. Ko, H.-C. Ryu, J. W. Park, Y.-J. Yoon, J.-H. Shin, D. H. Lee, S.-H. Park, S.-H. Moon, S.-W. Choi, H. S. Chun, and K. H. Park, “Compact fiber-pigtailed InGaAs photoconductive antenna module for terahertz-wave generation and detection,” Opt. Express20(16), 18432–18439 (2012).
    [CrossRef] [PubMed]

2013

R. Han, Y. Zhang, Y. Kim, D. Y. Kim, H. Shichijo, E. Afshari, and K. K. O, “Active terahertz imaging using Schottky diodes in CMOS array and 860-GHz pixel,” IEEE J. Solid-St. Circulation99, 1–14 (2013).

N. Kim, H.-C. Ryu, D. Lee, S.-P. Han, H. Ko, K. Moon, J.-W. Park, M. Y. Jeon, and K. H. Park, “Monolithically integrated optical beat sources toward a single-chip broadband terahertz emitter,” Laser Phys. Lett.10(8), 085805 (2013).
[CrossRef]

2012

2011

A. Rogalski and F. Sizov, “Terahertz detectors and focal plane arrays,” Opto-Electron. Rev.19(3), 346–404 (2011).
[CrossRef]

F. Schuster, D. Coquillat, H. Videlier, M. Sakowicz, F. Teppe, L. Dussopt, B. Giffard, T. Skotnicki, and W. Knap, “Broadband terahertz imaging with highly sensitive silicon CMOS detectors,” Opt. Express19(8), 7827–7832 (2011).
[CrossRef] [PubMed]

V. V. Popov, D. M. Ermolaev, K. V. Maremyanin, N. A. Maleev, V. E. Zemlyakov, V. I. Gavrilenko, and S. Y. Shapoval, “High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array,” Appl. Phys. Lett.98(15), 153504 (2011).
[CrossRef]

N. Kim, Y. A. Leem, M. Y. Jeon, C. W. Lee, S.-P. Han, D. Lee, and K. H. Park, “Widely tunable 1.55 µm detuned dual mode laser diode for compact continuous-wave THz emitter,” ETRI J.33(5), 810–813 (2011).
[CrossRef]

S.-P. Han, H. Ko, N. Kim, H.-C. Ryu, C. W. Lee, Y. A. Leem, D. Lee, M. Y. Jeon, S. K. Noh, H. S. Chun, and K. H. Park, “Optical fiber-coupled InGaAs-based terahertz time-domain spectroscopy system,” Opt. Lett.36(16), 3094–3096 (2011).
[CrossRef] [PubMed]

2010

A. Semenov, O. Cojocari, H.-W. Hübers, F. Song, A. Klushin, and A.-S. Müller, “Application of zero-bias quasi-optical Schottky-diode detectors for monitoring short-pulse and weak terahertz radiation,” IEEE Electron Device Lett.31(7), 674–676 (2010).
[CrossRef]

2008

J. L. Hesler, L. Liu, H. Xu, Y. Duan, and R. M. Weikle, “The development of quasi-optical THz detectors,” IRMMW-THz15–19(Sep), 1–2 (2008).

C. Sydlo, O. Cojocari, D. Schçnherr, T. Goebel, P. Meissner, and H. L. Hartnagel, “Fast THz detectors based on InGaAs Schottky diodes,” Frequenz62(5-6), 107–110 (2008).
[CrossRef]

2007

M. Tonouchi, “Cutting-edge terahertz technology,” Nat. Photonics1(2), 97–105 (2007).
[CrossRef]

2006

A. W. M. Lee, B. S. Williams, S. Kumar, Q. Hu, and J. L. Reno, “Real-time imaging using a 4.3-THz quantum cascade laser and a 320 × 240 microbolometer focal-plane array,” IEEE Photon. Technol. Lett.18(13), 1415–1417 (2006).
[CrossRef]

2005

N. Karpowicz, H. Zhong, C. Zhang, K.-I. Lin, J.-S. Hwang, J. Xu, and X.-C. Zhang, “Compact continuous-wave subterahertz system for inspection applications,” Appl. Phys. Lett.86(5), 054105 (2005).
[CrossRef]

Afshari, E.

R. Han, Y. Zhang, Y. Kim, D. Y. Kim, H. Shichijo, E. Afshari, and K. K. O, “Active terahertz imaging using Schottky diodes in CMOS array and 860-GHz pixel,” IEEE J. Solid-St. Circulation99, 1–14 (2013).

Bhapkar, U. V.

U. V. Bhapkar, Y. Li, and R. J. Mattauch, “InGaAs-InP heteroepitaxial Schottky barrier diodes for terahertz applications,” Proc. ISSTT, 661–677 (1991).

Choi, S.-W.

Chun, H. S.

Cojocari, O.

A. Semenov, O. Cojocari, H.-W. Hübers, F. Song, A. Klushin, and A.-S. Müller, “Application of zero-bias quasi-optical Schottky-diode detectors for monitoring short-pulse and weak terahertz radiation,” IEEE Electron Device Lett.31(7), 674–676 (2010).
[CrossRef]

C. Sydlo, O. Cojocari, D. Schçnherr, T. Goebel, P. Meissner, and H. L. Hartnagel, “Fast THz detectors based on InGaAs Schottky diodes,” Frequenz62(5-6), 107–110 (2008).
[CrossRef]

I. Oprea, A. Walber, O. Cojocari, H. Gibson, R. Zimmermann, and H. L. Hartnagel, “183 GHz mixer on InGaAs Schottky diodes,” Proc. ISSTT, 159–160 (2010).

Coquillat, D.

Crowe, T. W.

J. L. Hesler and T. W. Crowe, “Responsivity and noise measurements of zero-bias Schottky diode detectors,” Proc. ISSTT, 89–92 (2007).

Duan, Y.

J. L. Hesler, L. Liu, H. Xu, Y. Duan, and R. M. Weikle, “The development of quasi-optical THz detectors,” IRMMW-THz15–19(Sep), 1–2 (2008).

Dussopt, L.

Ermolaev, D. M.

V. V. Popov, D. M. Ermolaev, K. V. Maremyanin, N. A. Maleev, V. E. Zemlyakov, V. I. Gavrilenko, and S. Y. Shapoval, “High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array,” Appl. Phys. Lett.98(15), 153504 (2011).
[CrossRef]

Gavrilenko, V. I.

V. V. Popov, D. M. Ermolaev, K. V. Maremyanin, N. A. Maleev, V. E. Zemlyakov, V. I. Gavrilenko, and S. Y. Shapoval, “High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array,” Appl. Phys. Lett.98(15), 153504 (2011).
[CrossRef]

Gibson, H.

I. Oprea, A. Walber, O. Cojocari, H. Gibson, R. Zimmermann, and H. L. Hartnagel, “183 GHz mixer on InGaAs Schottky diodes,” Proc. ISSTT, 159–160 (2010).

Giffard, B.

Goebel, T.

C. Sydlo, O. Cojocari, D. Schçnherr, T. Goebel, P. Meissner, and H. L. Hartnagel, “Fast THz detectors based on InGaAs Schottky diodes,” Frequenz62(5-6), 107–110 (2008).
[CrossRef]

Han, R.

R. Han, Y. Zhang, Y. Kim, D. Y. Kim, H. Shichijo, E. Afshari, and K. K. O, “Active terahertz imaging using Schottky diodes in CMOS array and 860-GHz pixel,” IEEE J. Solid-St. Circulation99, 1–14 (2013).

Han, S.-P.

N. Kim, H.-C. Ryu, D. Lee, S.-P. Han, H. Ko, K. Moon, J.-W. Park, M. Y. Jeon, and K. H. Park, “Monolithically integrated optical beat sources toward a single-chip broadband terahertz emitter,” Laser Phys. Lett.10(8), 085805 (2013).
[CrossRef]

S.-P. Han, N. Kim, H. Ko, H.-C. Ryu, J. W. Park, Y.-J. Yoon, J.-H. Shin, D. H. Lee, S.-H. Park, S.-H. Moon, S.-W. Choi, H. S. Chun, and K. H. Park, “Compact fiber-pigtailed InGaAs photoconductive antenna module for terahertz-wave generation and detection,” Opt. Express20(16), 18432–18439 (2012).
[CrossRef] [PubMed]

S.-P. Han, H. Ko, N. Kim, H.-C. Ryu, C. W. Lee, Y. A. Leem, D. Lee, M. Y. Jeon, S. K. Noh, H. S. Chun, and K. H. Park, “Optical fiber-coupled InGaAs-based terahertz time-domain spectroscopy system,” Opt. Lett.36(16), 3094–3096 (2011).
[CrossRef] [PubMed]

N. Kim, Y. A. Leem, M. Y. Jeon, C. W. Lee, S.-P. Han, D. Lee, and K. H. Park, “Widely tunable 1.55 µm detuned dual mode laser diode for compact continuous-wave THz emitter,” ETRI J.33(5), 810–813 (2011).
[CrossRef]

Hartnagel, H. L.

C. Sydlo, O. Cojocari, D. Schçnherr, T. Goebel, P. Meissner, and H. L. Hartnagel, “Fast THz detectors based on InGaAs Schottky diodes,” Frequenz62(5-6), 107–110 (2008).
[CrossRef]

I. Oprea, A. Walber, O. Cojocari, H. Gibson, R. Zimmermann, and H. L. Hartnagel, “183 GHz mixer on InGaAs Schottky diodes,” Proc. ISSTT, 159–160 (2010).

Hesler, J. L.

J. L. Hesler, L. Liu, H. Xu, Y. Duan, and R. M. Weikle, “The development of quasi-optical THz detectors,” IRMMW-THz15–19(Sep), 1–2 (2008).

J. L. Hesler and T. W. Crowe, “Responsivity and noise measurements of zero-bias Schottky diode detectors,” Proc. ISSTT, 89–92 (2007).

Hosako, I.

N. Oda, A. W. M. Lee, T. Ishi, I. Hosako, and Q. Hu, “Proposal for real-time terahertz imaging system, with palm-size terahertz camera and compact quantum cascade laser,” Proc. SPIE8363, 83630A (2012).
[CrossRef]

Hu, Q.

N. Oda, A. W. M. Lee, T. Ishi, I. Hosako, and Q. Hu, “Proposal for real-time terahertz imaging system, with palm-size terahertz camera and compact quantum cascade laser,” Proc. SPIE8363, 83630A (2012).
[CrossRef]

A. W. M. Lee, B. S. Williams, S. Kumar, Q. Hu, and J. L. Reno, “Real-time imaging using a 4.3-THz quantum cascade laser and a 320 × 240 microbolometer focal-plane array,” IEEE Photon. Technol. Lett.18(13), 1415–1417 (2006).
[CrossRef]

Hübers, H.-W.

A. Semenov, O. Cojocari, H.-W. Hübers, F. Song, A. Klushin, and A.-S. Müller, “Application of zero-bias quasi-optical Schottky-diode detectors for monitoring short-pulse and weak terahertz radiation,” IEEE Electron Device Lett.31(7), 674–676 (2010).
[CrossRef]

Hwang, J.-S.

N. Karpowicz, H. Zhong, C. Zhang, K.-I. Lin, J.-S. Hwang, J. Xu, and X.-C. Zhang, “Compact continuous-wave subterahertz system for inspection applications,” Appl. Phys. Lett.86(5), 054105 (2005).
[CrossRef]

Ishi, T.

N. Oda, A. W. M. Lee, T. Ishi, I. Hosako, and Q. Hu, “Proposal for real-time terahertz imaging system, with palm-size terahertz camera and compact quantum cascade laser,” Proc. SPIE8363, 83630A (2012).
[CrossRef]

Jeon, M. Y.

N. Kim, H.-C. Ryu, D. Lee, S.-P. Han, H. Ko, K. Moon, J.-W. Park, M. Y. Jeon, and K. H. Park, “Monolithically integrated optical beat sources toward a single-chip broadband terahertz emitter,” Laser Phys. Lett.10(8), 085805 (2013).
[CrossRef]

N. Kim, Y. A. Leem, M. Y. Jeon, C. W. Lee, S.-P. Han, D. Lee, and K. H. Park, “Widely tunable 1.55 µm detuned dual mode laser diode for compact continuous-wave THz emitter,” ETRI J.33(5), 810–813 (2011).
[CrossRef]

S.-P. Han, H. Ko, N. Kim, H.-C. Ryu, C. W. Lee, Y. A. Leem, D. Lee, M. Y. Jeon, S. K. Noh, H. S. Chun, and K. H. Park, “Optical fiber-coupled InGaAs-based terahertz time-domain spectroscopy system,” Opt. Lett.36(16), 3094–3096 (2011).
[CrossRef] [PubMed]

Karpowicz, N.

N. Karpowicz, H. Zhong, C. Zhang, K.-I. Lin, J.-S. Hwang, J. Xu, and X.-C. Zhang, “Compact continuous-wave subterahertz system for inspection applications,” Appl. Phys. Lett.86(5), 054105 (2005).
[CrossRef]

Kim, D. Y.

R. Han, Y. Zhang, Y. Kim, D. Y. Kim, H. Shichijo, E. Afshari, and K. K. O, “Active terahertz imaging using Schottky diodes in CMOS array and 860-GHz pixel,” IEEE J. Solid-St. Circulation99, 1–14 (2013).

Kim, N.

N. Kim, H.-C. Ryu, D. Lee, S.-P. Han, H. Ko, K. Moon, J.-W. Park, M. Y. Jeon, and K. H. Park, “Monolithically integrated optical beat sources toward a single-chip broadband terahertz emitter,” Laser Phys. Lett.10(8), 085805 (2013).
[CrossRef]

S.-P. Han, N. Kim, H. Ko, H.-C. Ryu, J. W. Park, Y.-J. Yoon, J.-H. Shin, D. H. Lee, S.-H. Park, S.-H. Moon, S.-W. Choi, H. S. Chun, and K. H. Park, “Compact fiber-pigtailed InGaAs photoconductive antenna module for terahertz-wave generation and detection,” Opt. Express20(16), 18432–18439 (2012).
[CrossRef] [PubMed]

S.-P. Han, H. Ko, N. Kim, H.-C. Ryu, C. W. Lee, Y. A. Leem, D. Lee, M. Y. Jeon, S. K. Noh, H. S. Chun, and K. H. Park, “Optical fiber-coupled InGaAs-based terahertz time-domain spectroscopy system,” Opt. Lett.36(16), 3094–3096 (2011).
[CrossRef] [PubMed]

N. Kim, Y. A. Leem, M. Y. Jeon, C. W. Lee, S.-P. Han, D. Lee, and K. H. Park, “Widely tunable 1.55 µm detuned dual mode laser diode for compact continuous-wave THz emitter,” ETRI J.33(5), 810–813 (2011).
[CrossRef]

Kim, Y.

R. Han, Y. Zhang, Y. Kim, D. Y. Kim, H. Shichijo, E. Afshari, and K. K. O, “Active terahertz imaging using Schottky diodes in CMOS array and 860-GHz pixel,” IEEE J. Solid-St. Circulation99, 1–14 (2013).

Klushin, A.

A. Semenov, O. Cojocari, H.-W. Hübers, F. Song, A. Klushin, and A.-S. Müller, “Application of zero-bias quasi-optical Schottky-diode detectors for monitoring short-pulse and weak terahertz radiation,” IEEE Electron Device Lett.31(7), 674–676 (2010).
[CrossRef]

Knap, W.

Ko, H.

Kumar, S.

A. W. M. Lee, B. S. Williams, S. Kumar, Q. Hu, and J. L. Reno, “Real-time imaging using a 4.3-THz quantum cascade laser and a 320 × 240 microbolometer focal-plane array,” IEEE Photon. Technol. Lett.18(13), 1415–1417 (2006).
[CrossRef]

Lee, A. W. M.

N. Oda, A. W. M. Lee, T. Ishi, I. Hosako, and Q. Hu, “Proposal for real-time terahertz imaging system, with palm-size terahertz camera and compact quantum cascade laser,” Proc. SPIE8363, 83630A (2012).
[CrossRef]

A. W. M. Lee, B. S. Williams, S. Kumar, Q. Hu, and J. L. Reno, “Real-time imaging using a 4.3-THz quantum cascade laser and a 320 × 240 microbolometer focal-plane array,” IEEE Photon. Technol. Lett.18(13), 1415–1417 (2006).
[CrossRef]

Lee, C. W.

N. Kim, Y. A. Leem, M. Y. Jeon, C. W. Lee, S.-P. Han, D. Lee, and K. H. Park, “Widely tunable 1.55 µm detuned dual mode laser diode for compact continuous-wave THz emitter,” ETRI J.33(5), 810–813 (2011).
[CrossRef]

S.-P. Han, H. Ko, N. Kim, H.-C. Ryu, C. W. Lee, Y. A. Leem, D. Lee, M. Y. Jeon, S. K. Noh, H. S. Chun, and K. H. Park, “Optical fiber-coupled InGaAs-based terahertz time-domain spectroscopy system,” Opt. Lett.36(16), 3094–3096 (2011).
[CrossRef] [PubMed]

Lee, D.

N. Kim, H.-C. Ryu, D. Lee, S.-P. Han, H. Ko, K. Moon, J.-W. Park, M. Y. Jeon, and K. H. Park, “Monolithically integrated optical beat sources toward a single-chip broadband terahertz emitter,” Laser Phys. Lett.10(8), 085805 (2013).
[CrossRef]

S.-P. Han, H. Ko, N. Kim, H.-C. Ryu, C. W. Lee, Y. A. Leem, D. Lee, M. Y. Jeon, S. K. Noh, H. S. Chun, and K. H. Park, “Optical fiber-coupled InGaAs-based terahertz time-domain spectroscopy system,” Opt. Lett.36(16), 3094–3096 (2011).
[CrossRef] [PubMed]

N. Kim, Y. A. Leem, M. Y. Jeon, C. W. Lee, S.-P. Han, D. Lee, and K. H. Park, “Widely tunable 1.55 µm detuned dual mode laser diode for compact continuous-wave THz emitter,” ETRI J.33(5), 810–813 (2011).
[CrossRef]

Lee, D. H.

Leem, Y. A.

N. Kim, Y. A. Leem, M. Y. Jeon, C. W. Lee, S.-P. Han, D. Lee, and K. H. Park, “Widely tunable 1.55 µm detuned dual mode laser diode for compact continuous-wave THz emitter,” ETRI J.33(5), 810–813 (2011).
[CrossRef]

S.-P. Han, H. Ko, N. Kim, H.-C. Ryu, C. W. Lee, Y. A. Leem, D. Lee, M. Y. Jeon, S. K. Noh, H. S. Chun, and K. H. Park, “Optical fiber-coupled InGaAs-based terahertz time-domain spectroscopy system,” Opt. Lett.36(16), 3094–3096 (2011).
[CrossRef] [PubMed]

Li, Y.

U. V. Bhapkar, Y. Li, and R. J. Mattauch, “InGaAs-InP heteroepitaxial Schottky barrier diodes for terahertz applications,” Proc. ISSTT, 661–677 (1991).

Lin, K.-I.

N. Karpowicz, H. Zhong, C. Zhang, K.-I. Lin, J.-S. Hwang, J. Xu, and X.-C. Zhang, “Compact continuous-wave subterahertz system for inspection applications,” Appl. Phys. Lett.86(5), 054105 (2005).
[CrossRef]

Liu, L.

J. L. Hesler, L. Liu, H. Xu, Y. Duan, and R. M. Weikle, “The development of quasi-optical THz detectors,” IRMMW-THz15–19(Sep), 1–2 (2008).

Maleev, N. A.

V. V. Popov, D. M. Ermolaev, K. V. Maremyanin, N. A. Maleev, V. E. Zemlyakov, V. I. Gavrilenko, and S. Y. Shapoval, “High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array,” Appl. Phys. Lett.98(15), 153504 (2011).
[CrossRef]

Maremyanin, K. V.

V. V. Popov, D. M. Ermolaev, K. V. Maremyanin, N. A. Maleev, V. E. Zemlyakov, V. I. Gavrilenko, and S. Y. Shapoval, “High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array,” Appl. Phys. Lett.98(15), 153504 (2011).
[CrossRef]

Mattauch, R. J.

U. V. Bhapkar, Y. Li, and R. J. Mattauch, “InGaAs-InP heteroepitaxial Schottky barrier diodes for terahertz applications,” Proc. ISSTT, 661–677 (1991).

Meissner, P.

C. Sydlo, O. Cojocari, D. Schçnherr, T. Goebel, P. Meissner, and H. L. Hartnagel, “Fast THz detectors based on InGaAs Schottky diodes,” Frequenz62(5-6), 107–110 (2008).
[CrossRef]

Moon, K.

N. Kim, H.-C. Ryu, D. Lee, S.-P. Han, H. Ko, K. Moon, J.-W. Park, M. Y. Jeon, and K. H. Park, “Monolithically integrated optical beat sources toward a single-chip broadband terahertz emitter,” Laser Phys. Lett.10(8), 085805 (2013).
[CrossRef]

Moon, S.-H.

Müller, A.-S.

A. Semenov, O. Cojocari, H.-W. Hübers, F. Song, A. Klushin, and A.-S. Müller, “Application of zero-bias quasi-optical Schottky-diode detectors for monitoring short-pulse and weak terahertz radiation,” IEEE Electron Device Lett.31(7), 674–676 (2010).
[CrossRef]

Noh, S. K.

O, K. K.

R. Han, Y. Zhang, Y. Kim, D. Y. Kim, H. Shichijo, E. Afshari, and K. K. O, “Active terahertz imaging using Schottky diodes in CMOS array and 860-GHz pixel,” IEEE J. Solid-St. Circulation99, 1–14 (2013).

Oda, N.

N. Oda, A. W. M. Lee, T. Ishi, I. Hosako, and Q. Hu, “Proposal for real-time terahertz imaging system, with palm-size terahertz camera and compact quantum cascade laser,” Proc. SPIE8363, 83630A (2012).
[CrossRef]

Oprea, I.

I. Oprea, A. Walber, O. Cojocari, H. Gibson, R. Zimmermann, and H. L. Hartnagel, “183 GHz mixer on InGaAs Schottky diodes,” Proc. ISSTT, 159–160 (2010).

Park, J. W.

Park, J.-W.

N. Kim, H.-C. Ryu, D. Lee, S.-P. Han, H. Ko, K. Moon, J.-W. Park, M. Y. Jeon, and K. H. Park, “Monolithically integrated optical beat sources toward a single-chip broadband terahertz emitter,” Laser Phys. Lett.10(8), 085805 (2013).
[CrossRef]

Park, K. H.

N. Kim, H.-C. Ryu, D. Lee, S.-P. Han, H. Ko, K. Moon, J.-W. Park, M. Y. Jeon, and K. H. Park, “Monolithically integrated optical beat sources toward a single-chip broadband terahertz emitter,” Laser Phys. Lett.10(8), 085805 (2013).
[CrossRef]

S.-P. Han, N. Kim, H. Ko, H.-C. Ryu, J. W. Park, Y.-J. Yoon, J.-H. Shin, D. H. Lee, S.-H. Park, S.-H. Moon, S.-W. Choi, H. S. Chun, and K. H. Park, “Compact fiber-pigtailed InGaAs photoconductive antenna module for terahertz-wave generation and detection,” Opt. Express20(16), 18432–18439 (2012).
[CrossRef] [PubMed]

N. Kim, Y. A. Leem, M. Y. Jeon, C. W. Lee, S.-P. Han, D. Lee, and K. H. Park, “Widely tunable 1.55 µm detuned dual mode laser diode for compact continuous-wave THz emitter,” ETRI J.33(5), 810–813 (2011).
[CrossRef]

S.-P. Han, H. Ko, N. Kim, H.-C. Ryu, C. W. Lee, Y. A. Leem, D. Lee, M. Y. Jeon, S. K. Noh, H. S. Chun, and K. H. Park, “Optical fiber-coupled InGaAs-based terahertz time-domain spectroscopy system,” Opt. Lett.36(16), 3094–3096 (2011).
[CrossRef] [PubMed]

Park, S.-H.

Popov, V. V.

V. V. Popov, D. M. Ermolaev, K. V. Maremyanin, N. A. Maleev, V. E. Zemlyakov, V. I. Gavrilenko, and S. Y. Shapoval, “High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array,” Appl. Phys. Lett.98(15), 153504 (2011).
[CrossRef]

Reno, J. L.

A. W. M. Lee, B. S. Williams, S. Kumar, Q. Hu, and J. L. Reno, “Real-time imaging using a 4.3-THz quantum cascade laser and a 320 × 240 microbolometer focal-plane array,” IEEE Photon. Technol. Lett.18(13), 1415–1417 (2006).
[CrossRef]

Rogalski, A.

A. Rogalski and F. Sizov, “Terahertz detectors and focal plane arrays,” Opto-Electron. Rev.19(3), 346–404 (2011).
[CrossRef]

Ryu, H.-C.

Sakowicz, M.

Schçnherr, D.

C. Sydlo, O. Cojocari, D. Schçnherr, T. Goebel, P. Meissner, and H. L. Hartnagel, “Fast THz detectors based on InGaAs Schottky diodes,” Frequenz62(5-6), 107–110 (2008).
[CrossRef]

Schuster, F.

Semenov, A.

A. Semenov, O. Cojocari, H.-W. Hübers, F. Song, A. Klushin, and A.-S. Müller, “Application of zero-bias quasi-optical Schottky-diode detectors for monitoring short-pulse and weak terahertz radiation,” IEEE Electron Device Lett.31(7), 674–676 (2010).
[CrossRef]

Shapoval, S. Y.

V. V. Popov, D. M. Ermolaev, K. V. Maremyanin, N. A. Maleev, V. E. Zemlyakov, V. I. Gavrilenko, and S. Y. Shapoval, “High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array,” Appl. Phys. Lett.98(15), 153504 (2011).
[CrossRef]

Shichijo, H.

R. Han, Y. Zhang, Y. Kim, D. Y. Kim, H. Shichijo, E. Afshari, and K. K. O, “Active terahertz imaging using Schottky diodes in CMOS array and 860-GHz pixel,” IEEE J. Solid-St. Circulation99, 1–14 (2013).

Shin, J.-H.

Sizov, F.

A. Rogalski and F. Sizov, “Terahertz detectors and focal plane arrays,” Opto-Electron. Rev.19(3), 346–404 (2011).
[CrossRef]

Skotnicki, T.

Song, F.

A. Semenov, O. Cojocari, H.-W. Hübers, F. Song, A. Klushin, and A.-S. Müller, “Application of zero-bias quasi-optical Schottky-diode detectors for monitoring short-pulse and weak terahertz radiation,” IEEE Electron Device Lett.31(7), 674–676 (2010).
[CrossRef]

Sydlo, C.

C. Sydlo, O. Cojocari, D. Schçnherr, T. Goebel, P. Meissner, and H. L. Hartnagel, “Fast THz detectors based on InGaAs Schottky diodes,” Frequenz62(5-6), 107–110 (2008).
[CrossRef]

Teppe, F.

Tonouchi, M.

M. Tonouchi, “Cutting-edge terahertz technology,” Nat. Photonics1(2), 97–105 (2007).
[CrossRef]

Videlier, H.

Walber, A.

I. Oprea, A. Walber, O. Cojocari, H. Gibson, R. Zimmermann, and H. L. Hartnagel, “183 GHz mixer on InGaAs Schottky diodes,” Proc. ISSTT, 159–160 (2010).

Weikle, R. M.

J. L. Hesler, L. Liu, H. Xu, Y. Duan, and R. M. Weikle, “The development of quasi-optical THz detectors,” IRMMW-THz15–19(Sep), 1–2 (2008).

Williams, B. S.

A. W. M. Lee, B. S. Williams, S. Kumar, Q. Hu, and J. L. Reno, “Real-time imaging using a 4.3-THz quantum cascade laser and a 320 × 240 microbolometer focal-plane array,” IEEE Photon. Technol. Lett.18(13), 1415–1417 (2006).
[CrossRef]

Xu, H.

J. L. Hesler, L. Liu, H. Xu, Y. Duan, and R. M. Weikle, “The development of quasi-optical THz detectors,” IRMMW-THz15–19(Sep), 1–2 (2008).

Xu, J.

N. Karpowicz, H. Zhong, C. Zhang, K.-I. Lin, J.-S. Hwang, J. Xu, and X.-C. Zhang, “Compact continuous-wave subterahertz system for inspection applications,” Appl. Phys. Lett.86(5), 054105 (2005).
[CrossRef]

Yoon, Y.-J.

Zemlyakov, V. E.

V. V. Popov, D. M. Ermolaev, K. V. Maremyanin, N. A. Maleev, V. E. Zemlyakov, V. I. Gavrilenko, and S. Y. Shapoval, “High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array,” Appl. Phys. Lett.98(15), 153504 (2011).
[CrossRef]

Zhang, C.

N. Karpowicz, H. Zhong, C. Zhang, K.-I. Lin, J.-S. Hwang, J. Xu, and X.-C. Zhang, “Compact continuous-wave subterahertz system for inspection applications,” Appl. Phys. Lett.86(5), 054105 (2005).
[CrossRef]

Zhang, X.-C.

N. Karpowicz, H. Zhong, C. Zhang, K.-I. Lin, J.-S. Hwang, J. Xu, and X.-C. Zhang, “Compact continuous-wave subterahertz system for inspection applications,” Appl. Phys. Lett.86(5), 054105 (2005).
[CrossRef]

Zhang, Y.

R. Han, Y. Zhang, Y. Kim, D. Y. Kim, H. Shichijo, E. Afshari, and K. K. O, “Active terahertz imaging using Schottky diodes in CMOS array and 860-GHz pixel,” IEEE J. Solid-St. Circulation99, 1–14 (2013).

Zhong, H.

N. Karpowicz, H. Zhong, C. Zhang, K.-I. Lin, J.-S. Hwang, J. Xu, and X.-C. Zhang, “Compact continuous-wave subterahertz system for inspection applications,” Appl. Phys. Lett.86(5), 054105 (2005).
[CrossRef]

Zimmermann, R.

I. Oprea, A. Walber, O. Cojocari, H. Gibson, R. Zimmermann, and H. L. Hartnagel, “183 GHz mixer on InGaAs Schottky diodes,” Proc. ISSTT, 159–160 (2010).

Appl. Phys. Lett.

N. Karpowicz, H. Zhong, C. Zhang, K.-I. Lin, J.-S. Hwang, J. Xu, and X.-C. Zhang, “Compact continuous-wave subterahertz system for inspection applications,” Appl. Phys. Lett.86(5), 054105 (2005).
[CrossRef]

V. V. Popov, D. M. Ermolaev, K. V. Maremyanin, N. A. Maleev, V. E. Zemlyakov, V. I. Gavrilenko, and S. Y. Shapoval, “High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array,” Appl. Phys. Lett.98(15), 153504 (2011).
[CrossRef]

ETRI J.

N. Kim, Y. A. Leem, M. Y. Jeon, C. W. Lee, S.-P. Han, D. Lee, and K. H. Park, “Widely tunable 1.55 µm detuned dual mode laser diode for compact continuous-wave THz emitter,” ETRI J.33(5), 810–813 (2011).
[CrossRef]

Frequenz

C. Sydlo, O. Cojocari, D. Schçnherr, T. Goebel, P. Meissner, and H. L. Hartnagel, “Fast THz detectors based on InGaAs Schottky diodes,” Frequenz62(5-6), 107–110 (2008).
[CrossRef]

IEEE Electron Device Lett.

A. Semenov, O. Cojocari, H.-W. Hübers, F. Song, A. Klushin, and A.-S. Müller, “Application of zero-bias quasi-optical Schottky-diode detectors for monitoring short-pulse and weak terahertz radiation,” IEEE Electron Device Lett.31(7), 674–676 (2010).
[CrossRef]

IEEE J. Solid-St. Circulation

R. Han, Y. Zhang, Y. Kim, D. Y. Kim, H. Shichijo, E. Afshari, and K. K. O, “Active terahertz imaging using Schottky diodes in CMOS array and 860-GHz pixel,” IEEE J. Solid-St. Circulation99, 1–14 (2013).

IEEE Photon. Technol. Lett.

A. W. M. Lee, B. S. Williams, S. Kumar, Q. Hu, and J. L. Reno, “Real-time imaging using a 4.3-THz quantum cascade laser and a 320 × 240 microbolometer focal-plane array,” IEEE Photon. Technol. Lett.18(13), 1415–1417 (2006).
[CrossRef]

IRMMW-THz

J. L. Hesler, L. Liu, H. Xu, Y. Duan, and R. M. Weikle, “The development of quasi-optical THz detectors,” IRMMW-THz15–19(Sep), 1–2 (2008).

Laser Phys. Lett.

N. Kim, H.-C. Ryu, D. Lee, S.-P. Han, H. Ko, K. Moon, J.-W. Park, M. Y. Jeon, and K. H. Park, “Monolithically integrated optical beat sources toward a single-chip broadband terahertz emitter,” Laser Phys. Lett.10(8), 085805 (2013).
[CrossRef]

Nat. Photonics

M. Tonouchi, “Cutting-edge terahertz technology,” Nat. Photonics1(2), 97–105 (2007).
[CrossRef]

Opt. Express

Opt. Lett.

Opto-Electron. Rev.

A. Rogalski and F. Sizov, “Terahertz detectors and focal plane arrays,” Opto-Electron. Rev.19(3), 346–404 (2011).
[CrossRef]

Proc. SPIE

N. Oda, A. W. M. Lee, T. Ishi, I. Hosako, and Q. Hu, “Proposal for real-time terahertz imaging system, with palm-size terahertz camera and compact quantum cascade laser,” Proc. SPIE8363, 83630A (2012).
[CrossRef]

Other

U. V. Bhapkar, Y. Li, and R. J. Mattauch, “InGaAs-InP heteroepitaxial Schottky barrier diodes for terahertz applications,” Proc. ISSTT, 661–677 (1991).

I. Oprea, A. Walber, O. Cojocari, H. Gibson, R. Zimmermann, and H. L. Hartnagel, “183 GHz mixer on InGaAs Schottky diodes,” Proc. ISSTT, 159–160 (2010).

J. L. Hesler and T. W. Crowe, “Responsivity and noise measurements of zero-bias Schottky diode detectors,” Proc. ISSTT, 89–92 (2007).

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Figures (7)

Fig. 1
Fig. 1

(a) Fabrication process of a 1 × 20 InGaAs Schottky barrier diode (SBD) detector, (b) SEM image of a fabricated SBD array sample, and (c) its I-V characteristics.

Fig. 2
Fig. 2

(a) Fiber-coupled CW THz spectroscopy system setup and (b) detected THz signal measured by using the CW THz system.

Fig. 3
Fig. 3

(a) THz pulse imaging system setup using a THz-TDS emitter and single-channel InGaAs SBD detector, (b) measured THz pulse spectrum of the THz-TDS emitter, with the inset showing the results on a logarithmic scale, and (c) photograph of a medical knife and its THz images measured by using the THz pulse imaging system.

Fig. 4
Fig. 4

(a) SBD array chip bonded onto an SBD-CB and a cylindrical Si lens placed on the SBD array chip and (b) transmitted IR image of the SBD array chip bonded onto the SBD-CB obtained by using an IR camera.

Fig. 5
Fig. 5

THz signal detected by a single-channel SBD as a function of the number of transparent tapes with the parameters of the transparent tape only and a cylindrical Si lens with four pieces of overlapped transparent tape.

Fig. 6
Fig. 6

THz radiation beam patterns of the Gunn diode emitter measured by using (a) all the channels and (b) only channel 10 of a 1 × 20 SBD array detector.

Fig. 7
Fig. 7

(a) THz CW imaging measurement setup, (b) photograph of a metal ring and clip, and their THz images measured by using the THz CW imaging system with (c) all the channels and (d) only channel 10 of the 1 × 20 SBD array detector.

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