Abstract

We report ultra-compact surface-normal high-Q optical filters based on single- and double-layer stacked Fano resonance photonic crystal slabs on both Si and quartz substrates. A single layer photonic crystal filter was designed and a Q factor of 1,737 was obtained with 23 dB extinction ratio. With stacked double-layer photonic crystal configuration, the optical filter Q can increase to over 10,000,000 in design. Double-layer filters with quality factor of 9,734 and extinction ratio of 8 dB were experimentally demonstrated, for a filter design with target Q of 22,000.

© 2013 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
  36. Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012.
    [CrossRef]

2012 (5)

C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012).
[CrossRef]

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
[CrossRef]

H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett.24(6), 476–478 (2012).
[CrossRef]

V. Liu and S. Fan, “S4: A free electromagnetic solver for layered periodic structures,” Comput. Phys. Commun.183(10), 2233–2244 (2012).
[CrossRef]

D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, “Ultralow-loss polycrystalline silicon waveguides and high uniformity 1x12 MMI fanout for 3D photonic integration,” Opt. Express20(19), 21722–21728 (2012).
[CrossRef] [PubMed]

2011 (1)

C. J. Chang-Hasnain, “High-contrast gratings as a new platform for integrated optoelectronics,” Semicond. Sci. Technol.26(1), 014043 (2011).
[CrossRef]

2010 (2)

A. E. Miroshnichenko, S. Flach, and Y. S. Kivshar, “Fano resonances in nanoscale structures,” Rev. Mod. Phys.82(3), 2257–2298 (2010).
[CrossRef]

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater.9(9), 707–715 (2010).
[CrossRef] [PubMed]

2009 (3)

2008 (3)

R. Magnusson and M. Shokooh-Saremi, “Physical basis for wideband resonant reflectors,” Opt. Express16(5), 3456–3462 (2008).
[CrossRef] [PubMed]

H. Yang, Z. Qiang, H. Pang, Z. Ma, and W. D. Zhou, “Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates,” Electron. Lett.44(14), 858–859 (2008).
[CrossRef]

Z. Qiang, H. Yang, L. Chen, H. Pang, Z. Ma, and W. Zhou, “Fano filters based on transferred silicon nanomembranes on plastic substrates,” Appl. Phys. Lett.93(6), 061106 (2008).
[CrossRef]

2007 (7)

M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics1(2), 119–122 (2007).
[CrossRef]

Y. Kanamori, T. Kitani, and K. Hane, “Control of guided resonance in a photonic crystal slab using microelectromechanical actuators,” Appl. Phys. Lett.90(3), 031911 (2007).
[CrossRef]

L. Zhou and A. W. Poon, “Fano resonance-based electrically reconfigurable add-drop filters in silicon microring resonator-coupled Mach-Zehnder interferometers,” Opt. Lett.32(7), 781–783 (2007).
[CrossRef] [PubMed]

J. H. Kim, L. Chrostowski, E. Bisaillon, and D. V. Plant, “DBR, Sub-wavelength grating, and Photonic crystal slab Fabry-Perot cavity design using phase analysis by FDTD,” Opt. Express15(16), 10330–10339 (2007).
[CrossRef] [PubMed]

S. Boutami, B. Benbakir, X. Letartre, J. L. Leclercq, P. Regreny, and P. Viktorovitch, “Ultimate vertical Fabry-Perot cavity based on single-layer photonic crystal mirrors,” Opt. Express15(19), 12443–12449 (2007).
[CrossRef] [PubMed]

O. Levi, M. M. Lee, J. Zhang, V. Lousse, S. R. J. Brueck, S. Fan, and J. S. Harris, “Sensitivity analysis of a photonic crystal structure for index-of-refraction sensing,” Proc. SPIE6447, 64470P, 64470P-9 (2007).
[CrossRef]

R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett.90(20), 201105 (2007).
[CrossRef]

2006 (5)

2005 (4)

W. Suh, O. Solgaard, and S. Fan, “Displacement sensing using evanescent tunneling between guided resonances in photonic crystal slabs,” J. Appl. Phys.98(3), 033102 (2005).
[CrossRef]

M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater.5(1), 33–38 (2005).
[CrossRef]

M. Lipson, “Guiding, modulating, and emitting light on silicon-challenges and opportunities,” J. Lightwave Technol.23(12), 4222–4238 (2005).
[CrossRef]

A. Rosenberg, M. Carter, J. Casey, M. Kim, R. Holm, R. Henry, C. Eddy, V. Shamamian, K. Bussmann, S. Shi, and D. W. Prather, “Guided resonances in asymmetrical GaN photonic crystal slabs observed in the visible spectrum,” Opt. Express13(17), 6564–6571 (2005).
[CrossRef] [PubMed]

2003 (2)

C. Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microrings with sharp asymmetrical resonance,” Appl. Phys. Lett.83(8), 1527 (2003).
[CrossRef]

W. Suh, M. F. Yanik, O. Solgaard, and S. Fan, “Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs,” Appl. Phys. Lett.82(13), 1999 (2003).
[CrossRef]

2002 (2)

S. Fan and J. D. Joannopoulos, “Analysis of guided resonances in photonic crystal slabs,” Phys. Rev. B65(23), 235112 (2002).
[CrossRef]

S. Fan, “Sharp asymmetric line shapes in side-coupled waveguide-cavity systems,” Appl. Phys. Lett.80(6), 908 (2002).
[CrossRef]

1992 (1)

R. Magnusson and S. S. Wang, “New principle for optical filters,” Appl. Phys. Lett.61(9), 1022 (1992).
[CrossRef]

Adesida, I.

M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater.5(1), 33–38 (2005).
[CrossRef]

Baba, T.

N. Inoue and T. Baba, “External control of guided resonance in photonic crystal slab by changing the index anisotropy of liquid crystal,” Proc. SPIE6352, 63520R, 63520R-8 (2006).
[CrossRef]

Bakir, B. B.

C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012).
[CrossRef]

Benbakir, B.

Berggren, J.

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
[CrossRef]

Bisaillon, E.

Boutami, S.

Brueck, S. R. J.

O. Levi, M. M. Lee, J. Zhang, V. Lousse, S. R. J. Brueck, S. Fan, and J. S. Harris, “Sensitivity analysis of a photonic crystal structure for index-of-refraction sensing,” Proc. SPIE6447, 64470P, 64470P-9 (2007).
[CrossRef]

Bussmann, K.

Carter, M.

Casey, J.

Chang-Hasnain, C. J.

C. J. Chang-Hasnain, “High-contrast gratings as a new platform for integrated optoelectronics,” Semicond. Sci. Technol.26(1), 014043 (2011).
[CrossRef]

M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics1(2), 119–122 (2007).
[CrossRef]

Chao, C. Y.

C. Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microrings with sharp asymmetrical resonance,” Appl. Phys. Lett.83(8), 1527 (2003).
[CrossRef]

Chen, L.

L. Chen, Z. Qiang, H. Yang, H. Pang, Z. Ma, and W. D. Zhou, “Polarization and angular dependent transmissions on transferred nanomembrane Fano filters,” Opt. Express17(10), 8396–8406 (2009).
[CrossRef] [PubMed]

W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
[CrossRef]

Z. Qiang, H. Yang, L. Chen, H. Pang, Z. Ma, and W. Zhou, “Fano filters based on transferred silicon nanomembranes on plastic substrates,” Appl. Phys. Lett.93(6), 061106 (2008).
[CrossRef]

Chen, R. T.

Chin, M. K.

Chong, C. T.

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater.9(9), 707–715 (2010).
[CrossRef] [PubMed]

Chrostowski, L.

Chrowstowski, L.

Chuwongin, S.

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
[CrossRef]

W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
[CrossRef]

Covey, J.

Crozier, K. B.

K. B. Crozier, V. Lousse, O. Kilic, S. Kim, S. Fan, and O. Solgaard, “Air-bridged photonic crystal slabs at visible and near-infrared wavelengths,” Phys. Rev. B73(11), 115126 (2006).
[CrossRef]

Darmawan, S.

Eddy, C.

Eggleton, B. J.

Erni, D.

R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett.90(20), 201105 (2007).
[CrossRef]

Fan, S.

V. Liu and S. Fan, “S4: A free electromagnetic solver for layered periodic structures,” Comput. Phys. Commun.183(10), 2233–2244 (2012).
[CrossRef]

V. Liu, M. Povinelli, and S. Fan, “Resonance-enhanced optical forces between coupled photonic crystal slabs,” Opt. Express17(24), 21897–21909 (2009).
[CrossRef] [PubMed]

O. Levi, M. M. Lee, J. Zhang, V. Lousse, S. R. J. Brueck, S. Fan, and J. S. Harris, “Sensitivity analysis of a photonic crystal structure for index-of-refraction sensing,” Proc. SPIE6447, 64470P, 64470P-9 (2007).
[CrossRef]

K. B. Crozier, V. Lousse, O. Kilic, S. Kim, S. Fan, and O. Solgaard, “Air-bridged photonic crystal slabs at visible and near-infrared wavelengths,” Phys. Rev. B73(11), 115126 (2006).
[CrossRef]

W. Suh, O. Solgaard, and S. Fan, “Displacement sensing using evanescent tunneling between guided resonances in photonic crystal slabs,” J. Appl. Phys.98(3), 033102 (2005).
[CrossRef]

W. Suh, M. F. Yanik, O. Solgaard, and S. Fan, “Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs,” Appl. Phys. Lett.82(13), 1999 (2003).
[CrossRef]

S. Fan and J. D. Joannopoulos, “Analysis of guided resonances in photonic crystal slabs,” Phys. Rev. B65(23), 235112 (2002).
[CrossRef]

S. Fan, “Sharp asymmetric line shapes in side-coupled waveguide-cavity systems,” Appl. Phys. Lett.80(6), 908 (2002).
[CrossRef]

Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012.
[CrossRef]

Faraji, B.

Fedeli, J.

C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012).
[CrossRef]

Feng, X.

M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater.5(1), 33–38 (2005).
[CrossRef]

Flach, S.

A. E. Miroshnichenko, S. Flach, and Y. S. Kivshar, “Fano resonances in nanoscale structures,” Rev. Mod. Phys.82(3), 2257–2298 (2010).
[CrossRef]

Freeman, D.

Giessen, H.

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater.9(9), 707–715 (2010).
[CrossRef] [PubMed]

Grillet, C.

Guo, L. J.

C. Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microrings with sharp asymmetrical resonance,” Appl. Phys. Lett.83(8), 1527 (2003).
[CrossRef]

Halas, N. J.

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater.9(9), 707–715 (2010).
[CrossRef] [PubMed]

Hammar, M.

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
[CrossRef]

Hane, K.

Y. Kanamori, T. Kitani, and K. Hane, “Control of guided resonance in a photonic crystal slab using microelectromechanical actuators,” Appl. Phys. Lett.90(3), 031911 (2007).
[CrossRef]

Harbers, R.

R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett.90(20), 201105 (2007).
[CrossRef]

Harduin, J.

C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012).
[CrossRef]

Harris, J. S.

O. Levi, M. M. Lee, J. Zhang, V. Lousse, S. R. J. Brueck, S. Fan, and J. S. Harris, “Sensitivity analysis of a photonic crystal structure for index-of-refraction sensing,” Proc. SPIE6447, 64470P, 64470P-9 (2007).
[CrossRef]

Henry, R.

Hinsberg, W. D.

R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett.90(20), 201105 (2007).
[CrossRef]

Hoffnagle, J. A.

R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett.90(20), 201105 (2007).
[CrossRef]

Holm, R.

Hosseini, A.

Huang, M. C.

M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics1(2), 119–122 (2007).
[CrossRef]

Huang, Y.

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R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett.90(20), 201105 (2007).
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K. B. Crozier, V. Lousse, O. Kilic, S. Kim, S. Fan, and O. Solgaard, “Air-bridged photonic crystal slabs at visible and near-infrared wavelengths,” Phys. Rev. B73(11), 115126 (2006).
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Kim, J. H.

Kim, M.

Kim, S.

H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett.24(6), 476–478 (2012).
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K. B. Crozier, V. Lousse, O. Kilic, S. Kim, S. Fan, and O. Solgaard, “Air-bridged photonic crystal slabs at visible and near-infrared wavelengths,” Phys. Rev. B73(11), 115126 (2006).
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Kitani, T.

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A. E. Miroshnichenko, S. Flach, and Y. S. Kivshar, “Fano resonances in nanoscale structures,” Rev. Mod. Phys.82(3), 2257–2298 (2010).
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Kumar, V.

M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater.5(1), 33–38 (2005).
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Lagally, M. G.

Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012.
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Leclercq, J. L.

Lee, K.

M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater.5(1), 33–38 (2005).
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O. Levi, M. M. Lee, J. Zhang, V. Lousse, S. R. J. Brueck, S. Fan, and J. S. Harris, “Sensitivity analysis of a photonic crystal structure for index-of-refraction sensing,” Proc. SPIE6447, 64470P, 64470P-9 (2007).
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C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012).
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S. Boutami, B. Benbakir, X. Letartre, J. L. Leclercq, P. Regreny, and P. Viktorovitch, “Ultimate vertical Fabry-Perot cavity based on single-layer photonic crystal mirrors,” Opt. Express15(19), 12443–12449 (2007).
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K. B. Crozier, V. Lousse, O. Kilic, S. Kim, S. Fan, and O. Solgaard, “Air-bridged photonic crystal slabs at visible and near-infrared wavelengths,” Phys. Rev. B73(11), 115126 (2006).
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B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater.9(9), 707–715 (2010).
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Luther-Davies, B.

Ma, Z.

H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett.24(6), 476–478 (2012).
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H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
[CrossRef]

L. Chen, Z. Qiang, H. Yang, H. Pang, Z. Ma, and W. D. Zhou, “Polarization and angular dependent transmissions on transferred nanomembrane Fano filters,” Opt. Express17(10), 8396–8406 (2009).
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W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
[CrossRef]

Z. Qiang, H. Yang, L. Chen, H. Pang, Z. Ma, and W. Zhou, “Fano filters based on transferred silicon nanomembranes on plastic substrates,” Appl. Phys. Lett.93(6), 061106 (2008).
[CrossRef]

H. Yang, Z. Qiang, H. Pang, Z. Ma, and W. D. Zhou, “Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates,” Electron. Lett.44(14), 858–859 (2008).
[CrossRef]

Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012.
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R. Magnusson and M. Shokooh-Saremi, “Physical basis for wideband resonant reflectors,” Opt. Express16(5), 3456–3462 (2008).
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R. Magnusson and S. S. Wang, “New principle for optical filters,” Appl. Phys. Lett.61(9), 1022 (1992).
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R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett.90(20), 201105 (2007).
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Maier, S. A.

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater.9(9), 707–715 (2010).
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McPhedran, R.

Meitl, M.

M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater.5(1), 33–38 (2005).
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A. E. Miroshnichenko, S. Flach, and Y. S. Kivshar, “Fano resonances in nanoscale structures,” Rev. Mod. Phys.82(3), 2257–2298 (2010).
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Moll, N.

R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett.90(20), 201105 (2007).
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Nordlander, P.

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater.9(9), 707–715 (2010).
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M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater.5(1), 33–38 (2005).
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C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012).
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W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
[CrossRef]

L. Chen, Z. Qiang, H. Yang, H. Pang, Z. Ma, and W. D. Zhou, “Polarization and angular dependent transmissions on transferred nanomembrane Fano filters,” Opt. Express17(10), 8396–8406 (2009).
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Z. Qiang, H. Yang, L. Chen, H. Pang, Z. Ma, and W. Zhou, “Fano filters based on transferred silicon nanomembranes on plastic substrates,” Appl. Phys. Lett.93(6), 061106 (2008).
[CrossRef]

H. Yang, Z. Qiang, H. Pang, Z. Ma, and W. D. Zhou, “Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates,” Electron. Lett.44(14), 858–859 (2008).
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Plant, D. V.

Poon, A. W.

Povinelli, M.

Prather, D. W.

Qiang, Z.

W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
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L. Chen, Z. Qiang, H. Yang, H. Pang, Z. Ma, and W. D. Zhou, “Polarization and angular dependent transmissions on transferred nanomembrane Fano filters,” Opt. Express17(10), 8396–8406 (2009).
[CrossRef] [PubMed]

Z. Qiang, H. Yang, L. Chen, H. Pang, Z. Ma, and W. Zhou, “Fano filters based on transferred silicon nanomembranes on plastic substrates,” Appl. Phys. Lett.93(6), 061106 (2008).
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H. Yang, Z. Qiang, H. Pang, Z. Ma, and W. D. Zhou, “Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates,” Electron. Lett.44(14), 858–859 (2008).
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Qin, G.

W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
[CrossRef]

Regreny, P.

Rogers, J.

H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett.24(6), 476–478 (2012).
[CrossRef]

M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater.5(1), 33–38 (2005).
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Rosenberg, A.

Sciancalepore, C.

C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012).
[CrossRef]

Seassal, C.

C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012).
[CrossRef]

Seo, J.

H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett.24(6), 476–478 (2012).
[CrossRef]

Seo, J. H.

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
[CrossRef]

Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012.
[CrossRef]

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Shi, S.

Shokooh-Saremi, M.

Shuai, Y.

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
[CrossRef]

Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012.
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Solgaard, O.

K. B. Crozier, V. Lousse, O. Kilic, S. Kim, S. Fan, and O. Solgaard, “Air-bridged photonic crystal slabs at visible and near-infrared wavelengths,” Phys. Rev. B73(11), 115126 (2006).
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W. Suh, O. Solgaard, and S. Fan, “Displacement sensing using evanescent tunneling between guided resonances in photonic crystal slabs,” J. Appl. Phys.98(3), 033102 (2005).
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W. Suh, M. F. Yanik, O. Solgaard, and S. Fan, “Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs,” Appl. Phys. Lett.82(13), 1999 (2003).
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Steel, M. J.

Suh, W.

W. Suh, O. Solgaard, and S. Fan, “Displacement sensing using evanescent tunneling between guided resonances in photonic crystal slabs,” J. Appl. Phys.98(3), 033102 (2005).
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W. Suh, M. F. Yanik, O. Solgaard, and S. Fan, “Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs,” Appl. Phys. Lett.82(13), 1999 (2003).
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Tan, D.

Tian, Z.

Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012.
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Viktorovitch, P.

C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012).
[CrossRef]

S. Boutami, B. Benbakir, X. Letartre, J. L. Leclercq, P. Regreny, and P. Viktorovitch, “Ultimate vertical Fabry-Perot cavity based on single-layer photonic crystal mirrors,” Opt. Express15(19), 12443–12449 (2007).
[CrossRef] [PubMed]

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R. Magnusson and S. S. Wang, “New principle for optical filters,” Appl. Phys. Lett.61(9), 1022 (1992).
[CrossRef]

Xu, X.

Yang, H.

H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett.24(6), 476–478 (2012).
[CrossRef]

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
[CrossRef]

L. Chen, Z. Qiang, H. Yang, H. Pang, Z. Ma, and W. D. Zhou, “Polarization and angular dependent transmissions on transferred nanomembrane Fano filters,” Opt. Express17(10), 8396–8406 (2009).
[CrossRef] [PubMed]

W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
[CrossRef]

Z. Qiang, H. Yang, L. Chen, H. Pang, Z. Ma, and W. Zhou, “Fano filters based on transferred silicon nanomembranes on plastic substrates,” Appl. Phys. Lett.93(6), 061106 (2008).
[CrossRef]

H. Yang, Z. Qiang, H. Pang, Z. Ma, and W. D. Zhou, “Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates,” Electron. Lett.44(14), 858–859 (2008).
[CrossRef]

Yang, W.

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
[CrossRef]

W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
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Yanik, M. F.

W. Suh, M. F. Yanik, O. Solgaard, and S. Fan, “Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs,” Appl. Phys. Lett.82(13), 1999 (2003).
[CrossRef]

Zhang, J.

O. Levi, M. M. Lee, J. Zhang, V. Lousse, S. R. J. Brueck, S. Fan, and J. S. Harris, “Sensitivity analysis of a photonic crystal structure for index-of-refraction sensing,” Proc. SPIE6447, 64470P, 64470P-9 (2007).
[CrossRef]

Zhang, Y.

Zhao, D.

H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett.24(6), 476–478 (2012).
[CrossRef]

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
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W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
[CrossRef]

Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012.
[CrossRef]

Zheludev, N. I.

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater.9(9), 707–715 (2010).
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Zhou, L.

Zhou, W.

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012).
[CrossRef]

H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett.24(6), 476–478 (2012).
[CrossRef]

W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
[CrossRef]

Z. Qiang, H. Yang, L. Chen, H. Pang, Z. Ma, and W. Zhou, “Fano filters based on transferred silicon nanomembranes on plastic substrates,” Appl. Phys. Lett.93(6), 061106 (2008).
[CrossRef]

Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012.
[CrossRef]

Zhou, W. D.

L. Chen, Z. Qiang, H. Yang, H. Pang, Z. Ma, and W. D. Zhou, “Polarization and angular dependent transmissions on transferred nanomembrane Fano filters,” Opt. Express17(10), 8396–8406 (2009).
[CrossRef] [PubMed]

H. Yang, Z. Qiang, H. Pang, Z. Ma, and W. D. Zhou, “Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates,” Electron. Lett.44(14), 858–859 (2008).
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Zhou, Y.

M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics1(2), 119–122 (2007).
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Zhu, Z.

M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater.5(1), 33–38 (2005).
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Appl. Phys. Lett. (7)

W. Suh, M. F. Yanik, O. Solgaard, and S. Fan, “Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs,” Appl. Phys. Lett.82(13), 1999 (2003).
[CrossRef]

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S. Fan, “Sharp asymmetric line shapes in side-coupled waveguide-cavity systems,” Appl. Phys. Lett.80(6), 908 (2002).
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C. Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microrings with sharp asymmetrical resonance,” Appl. Phys. Lett.83(8), 1527 (2003).
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Y. Kanamori, T. Kitani, and K. Hane, “Control of guided resonance in a photonic crystal slab using microelectromechanical actuators,” Appl. Phys. Lett.90(3), 031911 (2007).
[CrossRef]

R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett.90(20), 201105 (2007).
[CrossRef]

Z. Qiang, H. Yang, L. Chen, H. Pang, Z. Ma, and W. Zhou, “Fano filters based on transferred silicon nanomembranes on plastic substrates,” Appl. Phys. Lett.93(6), 061106 (2008).
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Comput. Phys. Commun. (1)

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IEEE Photon. Technol. Lett. (2)

H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett.24(6), 476–478 (2012).
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C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012).
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W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009).
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[CrossRef]

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Figures (6)

Fig. 1
Fig. 1

Schematics of double-layer Fano resonance photonic crystal optical filters: (a) A 3D sketch; and (b) Key parameters defined for the square lattice photonic crystal double layer.

Fig. 2
Fig. 2

Simulated transmission spectra for (a,b) single- and (c,d) double-layer Fano resonance PhC filters, where (b) and (d) are zoom-in plots of (a) and (c), respectively. The design parameters are summarized in Table 1 for Case S3 and D3, respectively.

Fig. 3
Fig. 3

Simulation results for Design D2 with different buffer layer thicknesses tb: (a) Transmission spectra with different tb from 0 nm to 160 nm; (b) High Q resonant wavelengths and the corresponding Q values for different buffer thicknesses tb; (c) Zoom-in spectrum for the buffer thickness tb = 60 nm and filter Q of 10,000,000; and (d) Simulated E-field intensity profile at resonant wavelengths for three different tb values, where tb = 60 nm representing the highest Q condition for this design.

Fig. 4
Fig. 4

Experimental results for Design S1: (a) Top and (b) Cross-section views of fabricated single-layer PhC Fano resonance filters on oxide buffer; (c) Measured (blue solid line) and simulated (red dash line) transmission spectra for the fabricated single-layer PhC Fano resonance filter transferred on glass substrates; and (d) Zoom-in of (c) over the second dip (λ = 1564.62 nm) region.

Fig. 5
Fig. 5

Cross-sectional SEM images for fabricated double-layer PhC Fano resonance filters based on Design D2 parameters: (a, b, c) Double-layer PhC structure was formed by poly-Si deposition on top of the SOI substrates; and (d) Double-layer PhC structure was formed by two steps of poly-Si deposition on quartz substrates. Notice the oxide buffer thicknesses are 20 nm, 160 nm, and 20 nm, for cases (b), (c), and (d), respectively.

Fig. 6
Fig. 6

(a, b) Measured (blue solid line) and simulated (red dash line) transmission spectra for the double-layer PhC Fano resonance filters on quartz; and (c, d) Measured (blue solid line) and simulated (red dash line) reflection spectra for the double-layer PhC Fano resonance filters on SOI. (b) and (d) are zoom-in’s of (a), (c), respectively.

Tables (1)

Tables Icon

Table 1 Key design parameters and Qs for selected single- (S1-S3) and double- (D1-D3) layer filters

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