Laser induced sponge-like Si in Si-rich oxides for photovoltaics

J. Cho, B. O'Donnell, L. Yu, K.-H. Kim, I. Ngo, and P. R. Cabarrocas, “Sn-catalyzed silicon nanowire solar cells with 4.9% efficiency grown on glass,” Prog. Photovolt. Res. Appl. 21(1), 77–81 (2013).
[Crossref]

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

B. O'Donnell, L. Yu, M. Foldyna, and P. R. Cabarrocas, “Silicon nanowire solar cells grown by PECVD,” J. Non-Cryst. Solids 358(17), 2299–2302 (2012).
[Crossref]

B.-R. Huang, Y.-K. Yang, T.-C. Lin, and W.-L. Yang, “A simple and low-cost technique for silicon nanowire arrays based solar cells,” Sol. Energy Mater. Sol. Cells 98, 357–362 (2012).
[Crossref]

E. G. Barbagiovanni, D. J. Lockwood, P. J. Simpson, and L. V. Goncharova, “Quantum confinement in Si and Ge nanostructures,” J. Appl. Phys. 111(3), 034307 (2012).
[Crossref]

J. Carrillo-López, J. A. Luna-López, I. Vivaldo-De la Cruz, M. Aceves-Mijares, A. Morales-Sanchez, and G. García-Salgado, “UV enhancement of silicon solar cells using thin SRO films,” Sol. Energy Mater. Sol. Cells 100, 39–42 (2012).
[Crossref]

A. Polman and H. A. Atwater, “Photonic design principles for ultrahigh-efficiency photovoltaics,” Nat. Mater. 11(3), 174–177 (2012).
[Crossref] [PubMed]

L. Khriachtchev, “Optical and structural properties of silicon nanocrystals and laser-induced thermal effects',” J. Electrochem. Soc. 159(1), K21–K26 (2012).
[Crossref]

Z. Wan, S. Huang, M. A. Green, and G. Conibeer, “Rapid thermal annealing and crystallization mechanism study of Si-NCs in SiC matrix,” Nanoscale Res. Lett. 6, 129 (2011).

L. Yu, B. O’Donnell, P.-J. Alet, and P. R. Cabarrocas, “All-in-situ fabrication and characterization of silicon nanowires on TCO/glass substrates for photovoltaic application,” Sol. Energy Mater. Sol. Cells 94(11), 1855–1859 (2010).
[Crossref]

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

S. P. Singh, P. Srivastava, S. Ghosh, S. A. Khan, and G. Vijaya Prakash, “Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film,” J. Phys. Condens. Matter 21(9), 095010 (2009).
[Crossref] [PubMed]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

D. Barba, F. Martin, and G. G. Ross, “Evidence of localized amorphous silicon clustering from Raman depth-probing of silicon nanocrystals in fused silica,” Nanotechnology 19(11), 115707 (2008).
[Crossref] [PubMed]

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

M. D. Kelzenberg, D. B. Turner-Evans, B. M. Kayes, M. A. Filler, M. C. Putnam, N. S. Lewis, and H. A. Atwater, “Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells,” Nano Lett. 8(2), 710–714 (2008).
[Crossref] [PubMed]

T. J. Kempa, B. Tian, D. R. Kim, J. Hu, X. Zheng, and C. M. Lieber, “Single and Tandem Axial p-i-n Nanowire Photovoltaic Devices,” Nano Lett. 8(10), 3456–3460 (2008).
[Crossref] [PubMed]

M. D. Kelzenberg, M. C. Putnam, D. B. Turner-Evans, N. S. Lewis, and H. A. Atwater, “Predicted efficiency of Si wire array solar cells,” Appl. Phys. Lett. 93, 032112 (2008).

G. Conibeer, “Third-generation photovoltaics,” Mater. Today 10(11), 42–50 (2007).
[Crossref]

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature 449(7164), 885–889 (2007).
[Crossref] [PubMed]

L. Tsakalakos, J. Balch, J. Fronheiser, B. A. Korevaar, O. Sulima, and J. Rand, “Silicon nanowire solar cells,” Appl. Phys. Lett. 91(23), 233117 (2007).
[Crossref]

I. Balberg, E. Savir, J. Jedrzejewski, A. G. Nassiopoulou, and S. Gardelis, “Fundamental tansport processes in ensembles of silicon quantum dots,” Phys. Rev. B 75(23), 235329 (2007).
[Crossref]

D. Riabinina, C. Durand, J. Margot, M. Chaker, G. A. Botton, and F. Rosei, “Nucleation and growth of Si nanocrystals in an amorphous SiO2 matrix,” Phys. Rev. B 74(7), 075334 (2006).
[Crossref]

G. Conibeer, M. A. Green, R. Corkish, Y.-H. Cho, E.-C. Cho, and C.-W. Jiang, “Silicon nanostructures for third generation photovoltaic solar cells,” Thin Solid Films 654, 511–512 (2005).

B.-H. Kim, C.-H. Cho, T.-W. Kim, N.-M. Park, G. Y. Sung, and S.-J. Park, “Photoluminescence of silicon quantum dots in silicon nitride grown by NH3 and SiH4,” Appl. Phys. Lett. 86(9), 091908 (2005).
[Crossref]

J. J. van Hapert, A. M. Vredenberg, E. E. van Faassen, N. Tomozeiu, W. M. Arnoldbik, and F. H. P. M. Habraken, “Role of spinodal decomposition in the structure of SiOx,” Phys. Rev. B 69(24), 245202 (2004).

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

A. Janotta, Y. Dikce, M. Schmidt, C. Eisele, M. Stutzmann, M. Luysberg, and L. Houben, “Light-induced modification of a-SiO[sub x] II: Laser crystallization,” J. Appl. Phys. 95(8), 4060–4069 (2004).
[Crossref]

Y. Ritz, H. Stegmann, H.-J. Engelmann, and E. Zschech, “Target preparation of samples for 3D-TEM using micromanipulators,” Prakt. Metallogr. 41, 180–189 (2004).

F. Iacona, C. Bongiorno, C. Spinella, S. Boninelli, and F. Priolo, “Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films,” J. Appl. Phys. 95(7), 3723–3733 (2004).
[Crossref]

R. A. R. Oliveira, M. Ribeiro, I. Pereyra, and M. I. Alayo, “Silicon clusters in PECVD silicon-rich SiOxNy,” Mater. Charact. 50(2-3), 161–166 (2003).
[Crossref]

T. Muller, K.-H. Heinig, and W. Moller, “Size and location control of Si nanocrystals at ion beam synthesis in thin SiO2 films,” Appl. Phys. Lett. 81(16), 3049–3052 (2002).
[Crossref]

B. Hinds, F. Wang, D. Wolfe, Hinkle, and G. Lucovsky, “Investigation of postoxidation thermal treatments of Si/SiO2 interface in relationship to the kinetics of amorphous Si suboxide decomposition,” J. Vac. Sci. Technol. B 16, 2171–2177 (1998).

N. P. Barradas, C. Jeynes, and R. P. Webb, “Simulated annealing analysis of rutherford backscattering data,” Appl. Phys. Lett. 71(2), 291–293 (1997).
[Crossref]

C. M. M. Denisse, K. Z. Troost, J. B. Oude Elferink, F. H. P. M. Habraken, and M. Hendriks, “Plasma-enhanced growth and composition of silicon oxynitride films,” J. Appl. Phys. 60(7), 2536–2542 (1986).
[Crossref]

J. Carrillo-López, J. A. Luna-López, I. Vivaldo-De la Cruz, M. Aceves-Mijares, A. Morales-Sanchez, and G. García-Salgado, “UV enhancement of silicon solar cells using thin SRO films,” Sol. Energy Mater. Sol. Cells 100, 39–42 (2012).
[Crossref]

R. A. R. Oliveira, M. Ribeiro, I. Pereyra, and M. I. Alayo, “Silicon clusters in PECVD silicon-rich SiOxNy,” Mater. Charact. 50(2-3), 161–166 (2003).
[Crossref]

L. Yu, B. O’Donnell, P.-J. Alet, and P. R. Cabarrocas, “All-in-situ fabrication and characterization of silicon nanowires on TCO/glass substrates for photovoltaic application,” Sol. Energy Mater. Sol. Cells 94(11), 1855–1859 (2010).
[Crossref]

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

J. J. van Hapert, A. M. Vredenberg, E. E. van Faassen, N. Tomozeiu, W. M. Arnoldbik, and F. H. P. M. Habraken, “Role of spinodal decomposition in the structure of SiOx,” Phys. Rev. B 69(24), 245202 (2004).

A. Polman and H. A. Atwater, “Photonic design principles for ultrahigh-efficiency photovoltaics,” Nat. Mater. 11(3), 174–177 (2012).
[Crossref] [PubMed]

M. D. Kelzenberg, M. C. Putnam, D. B. Turner-Evans, N. S. Lewis, and H. A. Atwater, “Predicted efficiency of Si wire array solar cells,” Appl. Phys. Lett. 93, 032112 (2008).

M. D. Kelzenberg, D. B. Turner-Evans, B. M. Kayes, M. A. Filler, M. C. Putnam, N. S. Lewis, and H. A. Atwater, “Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells,” Nano Lett. 8(2), 710–714 (2008).
[Crossref] [PubMed]

I. Balberg, E. Savir, J. Jedrzejewski, A. G. Nassiopoulou, and S. Gardelis, “Fundamental tansport processes in ensembles of silicon quantum dots,” Phys. Rev. B 75(23), 235329 (2007).
[Crossref]

L. Tsakalakos, J. Balch, J. Fronheiser, B. A. Korevaar, O. Sulima, and J. Rand, “Silicon nanowire solar cells,” Appl. Phys. Lett. 91(23), 233117 (2007).
[Crossref]

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

D. Barba, F. Martin, and G. G. Ross, “Evidence of localized amorphous silicon clustering from Raman depth-probing of silicon nanocrystals in fused silica,” Nanotechnology 19(11), 115707 (2008).
[Crossref] [PubMed]

E. G. Barbagiovanni, D. J. Lockwood, P. J. Simpson, and L. V. Goncharova, “Quantum confinement in Si and Ge nanostructures,” J. Appl. Phys. 111(3), 034307 (2012).
[Crossref]

N. P. Barradas, C. Jeynes, and R. P. Webb, “Simulated annealing analysis of rutherford backscattering data,” Appl. Phys. Lett. 71(2), 291–293 (1997).
[Crossref]

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

F. Iacona, C. Bongiorno, C. Spinella, S. Boninelli, and F. Priolo, “Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films,” J. Appl. Phys. 95(7), 3723–3733 (2004).
[Crossref]

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

F. Iacona, C. Bongiorno, C. Spinella, S. Boninelli, and F. Priolo, “Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films,” J. Appl. Phys. 95(7), 3723–3733 (2004).
[Crossref]

D. Riabinina, C. Durand, J. Margot, M. Chaker, G. A. Botton, and F. Rosei, “Nucleation and growth of Si nanocrystals in an amorphous SiO2 matrix,” Phys. Rev. B 74(7), 075334 (2006).
[Crossref]

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

J. Cho, B. O'Donnell, L. Yu, K.-H. Kim, I. Ngo, and P. R. Cabarrocas, “Sn-catalyzed silicon nanowire solar cells with 4.9% efficiency grown on glass,” Prog. Photovolt. Res. Appl. 21(1), 77–81 (2013).
[Crossref]

B. O'Donnell, L. Yu, M. Foldyna, and P. R. Cabarrocas, “Silicon nanowire solar cells grown by PECVD,” J. Non-Cryst. Solids 358(17), 2299–2302 (2012).
[Crossref]

L. Yu, B. O’Donnell, P.-J. Alet, and P. R. Cabarrocas, “All-in-situ fabrication and characterization of silicon nanowires on TCO/glass substrates for photovoltaic application,” Sol. Energy Mater. Sol. Cells 94(11), 1855–1859 (2010).
[Crossref]

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

J. Carrillo-López, J. A. Luna-López, I. Vivaldo-De la Cruz, M. Aceves-Mijares, A. Morales-Sanchez, and G. García-Salgado, “UV enhancement of silicon solar cells using thin SRO films,” Sol. Energy Mater. Sol. Cells 100, 39–42 (2012).
[Crossref]

D. Riabinina, C. Durand, J. Margot, M. Chaker, G. A. Botton, and F. Rosei, “Nucleation and growth of Si nanocrystals in an amorphous SiO2 matrix,” Phys. Rev. B 74(7), 075334 (2006).
[Crossref]

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

B.-H. Kim, C.-H. Cho, T.-W. Kim, N.-M. Park, G. Y. Sung, and S.-J. Park, “Photoluminescence of silicon quantum dots in silicon nitride grown by NH3 and SiH4,” Appl. Phys. Lett. 86(9), 091908 (2005).
[Crossref]

G. Conibeer, M. A. Green, R. Corkish, Y.-H. Cho, E.-C. Cho, and C.-W. Jiang, “Silicon nanostructures for third generation photovoltaic solar cells,” Thin Solid Films 654, 511–512 (2005).

J. Cho, B. O'Donnell, L. Yu, K.-H. Kim, I. Ngo, and P. R. Cabarrocas, “Sn-catalyzed silicon nanowire solar cells with 4.9% efficiency grown on glass,” Prog. Photovolt. Res. Appl. 21(1), 77–81 (2013).
[Crossref]

G. Conibeer, M. A. Green, R. Corkish, Y.-H. Cho, E.-C. Cho, and C.-W. Jiang, “Silicon nanostructures for third generation photovoltaic solar cells,” Thin Solid Films 654, 511–512 (2005).

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

Z. Wan, S. Huang, M. A. Green, and G. Conibeer, “Rapid thermal annealing and crystallization mechanism study of Si-NCs in SiC matrix,” Nanoscale Res. Lett. 6, 129 (2011).

G. Conibeer, “Third-generation photovoltaics,” Mater. Today 10(11), 42–50 (2007).
[Crossref]

G. Conibeer, M. A. Green, R. Corkish, Y.-H. Cho, E.-C. Cho, and C.-W. Jiang, “Silicon nanostructures for third generation photovoltaic solar cells,” Thin Solid Films 654, 511–512 (2005).

G. Conibeer, M. A. Green, R. Corkish, Y.-H. Cho, E.-C. Cho, and C.-W. Jiang, “Silicon nanostructures for third generation photovoltaic solar cells,” Thin Solid Films 654, 511–512 (2005).

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

C. M. M. Denisse, K. Z. Troost, J. B. Oude Elferink, F. H. P. M. Habraken, and M. Hendriks, “Plasma-enhanced growth and composition of silicon oxynitride films,” J. Appl. Phys. 60(7), 2536–2542 (1986).
[Crossref]

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

A. Janotta, Y. Dikce, M. Schmidt, C. Eisele, M. Stutzmann, M. Luysberg, and L. Houben, “Light-induced modification of a-SiO[sub x] II: Laser crystallization,” J. Appl. Phys. 95(8), 4060–4069 (2004).
[Crossref]

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

D. Riabinina, C. Durand, J. Margot, M. Chaker, G. A. Botton, and F. Rosei, “Nucleation and growth of Si nanocrystals in an amorphous SiO2 matrix,” Phys. Rev. B 74(7), 075334 (2006).
[Crossref]

A. Janotta, Y. Dikce, M. Schmidt, C. Eisele, M. Stutzmann, M. Luysberg, and L. Houben, “Light-induced modification of a-SiO[sub x] II: Laser crystallization,” J. Appl. Phys. 95(8), 4060–4069 (2004).
[Crossref]

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

Y. Ritz, H. Stegmann, H.-J. Engelmann, and E. Zschech, “Target preparation of samples for 3D-TEM using micromanipulators,” Prakt. Metallogr. 41, 180–189 (2004).

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature 449(7164), 885–889 (2007).
[Crossref] [PubMed]

M. D. Kelzenberg, D. B. Turner-Evans, B. M. Kayes, M. A. Filler, M. C. Putnam, N. S. Lewis, and H. A. Atwater, “Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells,” Nano Lett. 8(2), 710–714 (2008).
[Crossref] [PubMed]

B. O'Donnell, L. Yu, M. Foldyna, and P. R. Cabarrocas, “Silicon nanowire solar cells grown by PECVD,” J. Non-Cryst. Solids 358(17), 2299–2302 (2012).
[Crossref]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

L. Tsakalakos, J. Balch, J. Fronheiser, B. A. Korevaar, O. Sulima, and J. Rand, “Silicon nanowire solar cells,” Appl. Phys. Lett. 91(23), 233117 (2007).
[Crossref]

J. Carrillo-López, J. A. Luna-López, I. Vivaldo-De la Cruz, M. Aceves-Mijares, A. Morales-Sanchez, and G. García-Salgado, “UV enhancement of silicon solar cells using thin SRO films,” Sol. Energy Mater. Sol. Cells 100, 39–42 (2012).
[Crossref]

I. Balberg, E. Savir, J. Jedrzejewski, A. G. Nassiopoulou, and S. Gardelis, “Fundamental tansport processes in ensembles of silicon quantum dots,” Phys. Rev. B 75(23), 235329 (2007).
[Crossref]

S. P. Singh, P. Srivastava, S. Ghosh, S. A. Khan, and G. Vijaya Prakash, “Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film,” J. Phys. Condens. Matter 21(9), 095010 (2009).
[Crossref] [PubMed]

E. G. Barbagiovanni, D. J. Lockwood, P. J. Simpson, and L. V. Goncharova, “Quantum confinement in Si and Ge nanostructures,” J. Appl. Phys. 111(3), 034307 (2012).
[Crossref]

Z. Wan, S. Huang, M. A. Green, and G. Conibeer, “Rapid thermal annealing and crystallization mechanism study of Si-NCs in SiC matrix,” Nanoscale Res. Lett. 6, 129 (2011).

G. Conibeer, M. A. Green, R. Corkish, Y.-H. Cho, E.-C. Cho, and C.-W. Jiang, “Silicon nanostructures for third generation photovoltaic solar cells,” Thin Solid Films 654, 511–512 (2005).

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

J. J. van Hapert, A. M. Vredenberg, E. E. van Faassen, N. Tomozeiu, W. M. Arnoldbik, and F. H. P. M. Habraken, “Role of spinodal decomposition in the structure of SiOx,” Phys. Rev. B 69(24), 245202 (2004).

C. M. M. Denisse, K. Z. Troost, J. B. Oude Elferink, F. H. P. M. Habraken, and M. Hendriks, “Plasma-enhanced growth and composition of silicon oxynitride films,” J. Appl. Phys. 60(7), 2536–2542 (1986).
[Crossref]

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

T. Muller, K.-H. Heinig, and W. Moller, “Size and location control of Si nanocrystals at ion beam synthesis in thin SiO2 films,” Appl. Phys. Lett. 81(16), 3049–3052 (2002).
[Crossref]

C. M. M. Denisse, K. Z. Troost, J. B. Oude Elferink, F. H. P. M. Habraken, and M. Hendriks, “Plasma-enhanced growth and composition of silicon oxynitride films,” J. Appl. Phys. 60(7), 2536–2542 (1986).
[Crossref]

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

B. Hinds, F. Wang, D. Wolfe, Hinkle, and G. Lucovsky, “Investigation of postoxidation thermal treatments of Si/SiO2 interface in relationship to the kinetics of amorphous Si suboxide decomposition,” J. Vac. Sci. Technol. B 16, 2171–2177 (1998).

B. Hinds, F. Wang, D. Wolfe, Hinkle, and G. Lucovsky, “Investigation of postoxidation thermal treatments of Si/SiO2 interface in relationship to the kinetics of amorphous Si suboxide decomposition,” J. Vac. Sci. Technol. B 16, 2171–2177 (1998).

A. Janotta, Y. Dikce, M. Schmidt, C. Eisele, M. Stutzmann, M. Luysberg, and L. Houben, “Light-induced modification of a-SiO[sub x] II: Laser crystallization,” J. Appl. Phys. 95(8), 4060–4069 (2004).
[Crossref]

T. J. Kempa, B. Tian, D. R. Kim, J. Hu, X. Zheng, and C. M. Lieber, “Single and Tandem Axial p-i-n Nanowire Photovoltaic Devices,” Nano Lett. 8(10), 3456–3460 (2008).
[Crossref] [PubMed]

B.-R. Huang, Y.-K. Yang, T.-C. Lin, and W.-L. Yang, “A simple and low-cost technique for silicon nanowire arrays based solar cells,” Sol. Energy Mater. Sol. Cells 98, 357–362 (2012).
[Crossref]

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature 449(7164), 885–889 (2007).
[Crossref] [PubMed]

Z. Wan, S. Huang, M. A. Green, and G. Conibeer, “Rapid thermal annealing and crystallization mechanism study of Si-NCs in SiC matrix,” Nanoscale Res. Lett. 6, 129 (2011).

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

F. Iacona, C. Bongiorno, C. Spinella, S. Boninelli, and F. Priolo, “Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films,” J. Appl. Phys. 95(7), 3723–3733 (2004).
[Crossref]

A. Janotta, Y. Dikce, M. Schmidt, C. Eisele, M. Stutzmann, M. Luysberg, and L. Houben, “Light-induced modification of a-SiO[sub x] II: Laser crystallization,” J. Appl. Phys. 95(8), 4060–4069 (2004).
[Crossref]

I. Balberg, E. Savir, J. Jedrzejewski, A. G. Nassiopoulou, and S. Gardelis, “Fundamental tansport processes in ensembles of silicon quantum dots,” Phys. Rev. B 75(23), 235329 (2007).
[Crossref]

N. P. Barradas, C. Jeynes, and R. P. Webb, “Simulated annealing analysis of rutherford backscattering data,” Appl. Phys. Lett. 71(2), 291–293 (1997).
[Crossref]

G. Conibeer, M. A. Green, R. Corkish, Y.-H. Cho, E.-C. Cho, and C.-W. Jiang, “Silicon nanostructures for third generation photovoltaic solar cells,” Thin Solid Films 654, 511–512 (2005).

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

M. D. Kelzenberg, D. B. Turner-Evans, B. M. Kayes, M. A. Filler, M. C. Putnam, N. S. Lewis, and H. A. Atwater, “Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells,” Nano Lett. 8(2), 710–714 (2008).
[Crossref] [PubMed]

M. D. Kelzenberg, D. B. Turner-Evans, B. M. Kayes, M. A. Filler, M. C. Putnam, N. S. Lewis, and H. A. Atwater, “Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells,” Nano Lett. 8(2), 710–714 (2008).
[Crossref] [PubMed]

M. D. Kelzenberg, M. C. Putnam, D. B. Turner-Evans, N. S. Lewis, and H. A. Atwater, “Predicted efficiency of Si wire array solar cells,” Appl. Phys. Lett. 93, 032112 (2008).

T. J. Kempa, B. Tian, D. R. Kim, J. Hu, X. Zheng, and C. M. Lieber, “Single and Tandem Axial p-i-n Nanowire Photovoltaic Devices,” Nano Lett. 8(10), 3456–3460 (2008).
[Crossref] [PubMed]

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature 449(7164), 885–889 (2007).
[Crossref] [PubMed]

S. P. Singh, P. Srivastava, S. Ghosh, S. A. Khan, and G. Vijaya Prakash, “Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film,” J. Phys. Condens. Matter 21(9), 095010 (2009).
[Crossref] [PubMed]

L. Khriachtchev, “Optical and structural properties of silicon nanocrystals and laser-induced thermal effects',” J. Electrochem. Soc. 159(1), K21–K26 (2012).
[Crossref]

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

B.-H. Kim, C.-H. Cho, T.-W. Kim, N.-M. Park, G. Y. Sung, and S.-J. Park, “Photoluminescence of silicon quantum dots in silicon nitride grown by NH3 and SiH4,” Appl. Phys. Lett. 86(9), 091908 (2005).
[Crossref]

T. J. Kempa, B. Tian, D. R. Kim, J. Hu, X. Zheng, and C. M. Lieber, “Single and Tandem Axial p-i-n Nanowire Photovoltaic Devices,” Nano Lett. 8(10), 3456–3460 (2008).
[Crossref] [PubMed]

J. Cho, B. O'Donnell, L. Yu, K.-H. Kim, I. Ngo, and P. R. Cabarrocas, “Sn-catalyzed silicon nanowire solar cells with 4.9% efficiency grown on glass,” Prog. Photovolt. Res. Appl. 21(1), 77–81 (2013).
[Crossref]

B.-H. Kim, C.-H. Cho, T.-W. Kim, N.-M. Park, G. Y. Sung, and S.-J. Park, “Photoluminescence of silicon quantum dots in silicon nitride grown by NH3 and SiH4,” Appl. Phys. Lett. 86(9), 091908 (2005).
[Crossref]

L. Tsakalakos, J. Balch, J. Fronheiser, B. A. Korevaar, O. Sulima, and J. Rand, “Silicon nanowire solar cells,” Appl. Phys. Lett. 91(23), 233117 (2007).
[Crossref]

M. D. Kelzenberg, D. B. Turner-Evans, B. M. Kayes, M. A. Filler, M. C. Putnam, N. S. Lewis, and H. A. Atwater, “Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells,” Nano Lett. 8(2), 710–714 (2008).
[Crossref] [PubMed]

M. D. Kelzenberg, M. C. Putnam, D. B. Turner-Evans, N. S. Lewis, and H. A. Atwater, “Predicted efficiency of Si wire array solar cells,” Appl. Phys. Lett. 93, 032112 (2008).

T. J. Kempa, B. Tian, D. R. Kim, J. Hu, X. Zheng, and C. M. Lieber, “Single and Tandem Axial p-i-n Nanowire Photovoltaic Devices,” Nano Lett. 8(10), 3456–3460 (2008).
[Crossref] [PubMed]

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature 449(7164), 885–889 (2007).
[Crossref] [PubMed]

B.-R. Huang, Y.-K. Yang, T.-C. Lin, and W.-L. Yang, “A simple and low-cost technique for silicon nanowire arrays based solar cells,” Sol. Energy Mater. Sol. Cells 98, 357–362 (2012).
[Crossref]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

E. G. Barbagiovanni, D. J. Lockwood, P. J. Simpson, and L. V. Goncharova, “Quantum confinement in Si and Ge nanostructures,” J. Appl. Phys. 111(3), 034307 (2012).
[Crossref]

B. Hinds, F. Wang, D. Wolfe, Hinkle, and G. Lucovsky, “Investigation of postoxidation thermal treatments of Si/SiO2 interface in relationship to the kinetics of amorphous Si suboxide decomposition,” J. Vac. Sci. Technol. B 16, 2171–2177 (1998).

J. Carrillo-López, J. A. Luna-López, I. Vivaldo-De la Cruz, M. Aceves-Mijares, A. Morales-Sanchez, and G. García-Salgado, “UV enhancement of silicon solar cells using thin SRO films,” Sol. Energy Mater. Sol. Cells 100, 39–42 (2012).
[Crossref]

A. Janotta, Y. Dikce, M. Schmidt, C. Eisele, M. Stutzmann, M. Luysberg, and L. Houben, “Light-induced modification of a-SiO[sub x] II: Laser crystallization,” J. Appl. Phys. 95(8), 4060–4069 (2004).
[Crossref]

D. Riabinina, C. Durand, J. Margot, M. Chaker, G. A. Botton, and F. Rosei, “Nucleation and growth of Si nanocrystals in an amorphous SiO2 matrix,” Phys. Rev. B 74(7), 075334 (2006).
[Crossref]

D. Barba, F. Martin, and G. G. Ross, “Evidence of localized amorphous silicon clustering from Raman depth-probing of silicon nanocrystals in fused silica,” Nanotechnology 19(11), 115707 (2008).
[Crossref] [PubMed]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

T. Muller, K.-H. Heinig, and W. Moller, “Size and location control of Si nanocrystals at ion beam synthesis in thin SiO2 films,” Appl. Phys. Lett. 81(16), 3049–3052 (2002).
[Crossref]

J. Carrillo-López, J. A. Luna-López, I. Vivaldo-De la Cruz, M. Aceves-Mijares, A. Morales-Sanchez, and G. García-Salgado, “UV enhancement of silicon solar cells using thin SRO films,” Sol. Energy Mater. Sol. Cells 100, 39–42 (2012).
[Crossref]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

T. Muller, K.-H. Heinig, and W. Moller, “Size and location control of Si nanocrystals at ion beam synthesis in thin SiO2 films,” Appl. Phys. Lett. 81(16), 3049–3052 (2002).
[Crossref]

I. Balberg, E. Savir, J. Jedrzejewski, A. G. Nassiopoulou, and S. Gardelis, “Fundamental tansport processes in ensembles of silicon quantum dots,” Phys. Rev. B 75(23), 235329 (2007).
[Crossref]

J. Cho, B. O'Donnell, L. Yu, K.-H. Kim, I. Ngo, and P. R. Cabarrocas, “Sn-catalyzed silicon nanowire solar cells with 4.9% efficiency grown on glass,” Prog. Photovolt. Res. Appl. 21(1), 77–81 (2013).
[Crossref]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

L. Yu, B. O’Donnell, P.-J. Alet, and P. R. Cabarrocas, “All-in-situ fabrication and characterization of silicon nanowires on TCO/glass substrates for photovoltaic application,” Sol. Energy Mater. Sol. Cells 94(11), 1855–1859 (2010).
[Crossref]

J. Cho, B. O'Donnell, L. Yu, K.-H. Kim, I. Ngo, and P. R. Cabarrocas, “Sn-catalyzed silicon nanowire solar cells with 4.9% efficiency grown on glass,” Prog. Photovolt. Res. Appl. 21(1), 77–81 (2013).
[Crossref]

B. O'Donnell, L. Yu, M. Foldyna, and P. R. Cabarrocas, “Silicon nanowire solar cells grown by PECVD,” J. Non-Cryst. Solids 358(17), 2299–2302 (2012).
[Crossref]

R. A. R. Oliveira, M. Ribeiro, I. Pereyra, and M. I. Alayo, “Silicon clusters in PECVD silicon-rich SiOxNy,” Mater. Charact. 50(2-3), 161–166 (2003).
[Crossref]

C. M. M. Denisse, K. Z. Troost, J. B. Oude Elferink, F. H. P. M. Habraken, and M. Hendriks, “Plasma-enhanced growth and composition of silicon oxynitride films,” J. Appl. Phys. 60(7), 2536–2542 (1986).
[Crossref]

B.-H. Kim, C.-H. Cho, T.-W. Kim, N.-M. Park, G. Y. Sung, and S.-J. Park, “Photoluminescence of silicon quantum dots in silicon nitride grown by NH3 and SiH4,” Appl. Phys. Lett. 86(9), 091908 (2005).
[Crossref]

B.-H. Kim, C.-H. Cho, T.-W. Kim, N.-M. Park, G. Y. Sung, and S.-J. Park, “Photoluminescence of silicon quantum dots in silicon nitride grown by NH3 and SiH4,” Appl. Phys. Lett. 86(9), 091908 (2005).
[Crossref]

R. A. R. Oliveira, M. Ribeiro, I. Pereyra, and M. I. Alayo, “Silicon clusters in PECVD silicon-rich SiOxNy,” Mater. Charact. 50(2-3), 161–166 (2003).
[Crossref]

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

A. Polman and H. A. Atwater, “Photonic design principles for ultrahigh-efficiency photovoltaics,” Nat. Mater. 11(3), 174–177 (2012).
[Crossref] [PubMed]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

F. Iacona, C. Bongiorno, C. Spinella, S. Boninelli, and F. Priolo, “Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films,” J. Appl. Phys. 95(7), 3723–3733 (2004).
[Crossref]

M. D. Kelzenberg, M. C. Putnam, D. B. Turner-Evans, N. S. Lewis, and H. A. Atwater, “Predicted efficiency of Si wire array solar cells,” Appl. Phys. Lett. 93, 032112 (2008).

M. D. Kelzenberg, D. B. Turner-Evans, B. M. Kayes, M. A. Filler, M. C. Putnam, N. S. Lewis, and H. A. Atwater, “Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells,” Nano Lett. 8(2), 710–714 (2008).
[Crossref] [PubMed]

L. Tsakalakos, J. Balch, J. Fronheiser, B. A. Korevaar, O. Sulima, and J. Rand, “Silicon nanowire solar cells,” Appl. Phys. Lett. 91(23), 233117 (2007).
[Crossref]

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

D. Riabinina, C. Durand, J. Margot, M. Chaker, G. A. Botton, and F. Rosei, “Nucleation and growth of Si nanocrystals in an amorphous SiO2 matrix,” Phys. Rev. B 74(7), 075334 (2006).
[Crossref]

R. A. R. Oliveira, M. Ribeiro, I. Pereyra, and M. I. Alayo, “Silicon clusters in PECVD silicon-rich SiOxNy,” Mater. Charact. 50(2-3), 161–166 (2003).
[Crossref]

Y. Ritz, H. Stegmann, H.-J. Engelmann, and E. Zschech, “Target preparation of samples for 3D-TEM using micromanipulators,” Prakt. Metallogr. 41, 180–189 (2004).

D. Riabinina, C. Durand, J. Margot, M. Chaker, G. A. Botton, and F. Rosei, “Nucleation and growth of Si nanocrystals in an amorphous SiO2 matrix,” Phys. Rev. B 74(7), 075334 (2006).
[Crossref]

D. Barba, F. Martin, and G. G. Ross, “Evidence of localized amorphous silicon clustering from Raman depth-probing of silicon nanocrystals in fused silica,” Nanotechnology 19(11), 115707 (2008).
[Crossref] [PubMed]

I. Balberg, E. Savir, J. Jedrzejewski, A. G. Nassiopoulou, and S. Gardelis, “Fundamental tansport processes in ensembles of silicon quantum dots,” Phys. Rev. B 75(23), 235329 (2007).
[Crossref]

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

A. Janotta, Y. Dikce, M. Schmidt, C. Eisele, M. Stutzmann, M. Luysberg, and L. Houben, “Light-induced modification of a-SiO[sub x] II: Laser crystallization,” J. Appl. Phys. 95(8), 4060–4069 (2004).
[Crossref]

E. G. Barbagiovanni, D. J. Lockwood, P. J. Simpson, and L. V. Goncharova, “Quantum confinement in Si and Ge nanostructures,” J. Appl. Phys. 111(3), 034307 (2012).
[Crossref]

S. P. Singh, P. Srivastava, S. Ghosh, S. A. Khan, and G. Vijaya Prakash, “Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film,” J. Phys. Condens. Matter 21(9), 095010 (2009).
[Crossref] [PubMed]

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

F. Iacona, C. Bongiorno, C. Spinella, S. Boninelli, and F. Priolo, “Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films,” J. Appl. Phys. 95(7), 3723–3733 (2004).
[Crossref]

S. P. Singh, P. Srivastava, S. Ghosh, S. A. Khan, and G. Vijaya Prakash, “Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film,” J. Phys. Condens. Matter 21(9), 095010 (2009).
[Crossref] [PubMed]

Y. Ritz, H. Stegmann, H.-J. Engelmann, and E. Zschech, “Target preparation of samples for 3D-TEM using micromanipulators,” Prakt. Metallogr. 41, 180–189 (2004).

A. Janotta, Y. Dikce, M. Schmidt, C. Eisele, M. Stutzmann, M. Luysberg, and L. Houben, “Light-induced modification of a-SiO[sub x] II: Laser crystallization,” J. Appl. Phys. 95(8), 4060–4069 (2004).
[Crossref]

L. Tsakalakos, J. Balch, J. Fronheiser, B. A. Korevaar, O. Sulima, and J. Rand, “Silicon nanowire solar cells,” Appl. Phys. Lett. 91(23), 233117 (2007).
[Crossref]

B.-H. Kim, C.-H. Cho, T.-W. Kim, N.-M. Park, G. Y. Sung, and S.-J. Park, “Photoluminescence of silicon quantum dots in silicon nitride grown by NH3 and SiH4,” Appl. Phys. Lett. 86(9), 091908 (2005).
[Crossref]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

T. J. Kempa, B. Tian, D. R. Kim, J. Hu, X. Zheng, and C. M. Lieber, “Single and Tandem Axial p-i-n Nanowire Photovoltaic Devices,” Nano Lett. 8(10), 3456–3460 (2008).
[Crossref] [PubMed]

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature 449(7164), 885–889 (2007).
[Crossref] [PubMed]

J. J. van Hapert, A. M. Vredenberg, E. E. van Faassen, N. Tomozeiu, W. M. Arnoldbik, and F. H. P. M. Habraken, “Role of spinodal decomposition in the structure of SiOx,” Phys. Rev. B 69(24), 245202 (2004).

C. M. M. Denisse, K. Z. Troost, J. B. Oude Elferink, F. H. P. M. Habraken, and M. Hendriks, “Plasma-enhanced growth and composition of silicon oxynitride films,” J. Appl. Phys. 60(7), 2536–2542 (1986).
[Crossref]

L. Tsakalakos, J. Balch, J. Fronheiser, B. A. Korevaar, O. Sulima, and J. Rand, “Silicon nanowire solar cells,” Appl. Phys. Lett. 91(23), 233117 (2007).
[Crossref]

M. D. Kelzenberg, D. B. Turner-Evans, B. M. Kayes, M. A. Filler, M. C. Putnam, N. S. Lewis, and H. A. Atwater, “Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells,” Nano Lett. 8(2), 710–714 (2008).
[Crossref] [PubMed]

M. D. Kelzenberg, M. C. Putnam, D. B. Turner-Evans, N. S. Lewis, and H. A. Atwater, “Predicted efficiency of Si wire array solar cells,” Appl. Phys. Lett. 93, 032112 (2008).

J. J. van Hapert, A. M. Vredenberg, E. E. van Faassen, N. Tomozeiu, W. M. Arnoldbik, and F. H. P. M. Habraken, “Role of spinodal decomposition in the structure of SiOx,” Phys. Rev. B 69(24), 245202 (2004).

J. J. van Hapert, A. M. Vredenberg, E. E. van Faassen, N. Tomozeiu, W. M. Arnoldbik, and F. H. P. M. Habraken, “Role of spinodal decomposition in the structure of SiOx,” Phys. Rev. B 69(24), 245202 (2004).

S. P. Singh, P. Srivastava, S. Ghosh, S. A. Khan, and G. Vijaya Prakash, “Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film,” J. Phys. Condens. Matter 21(9), 095010 (2009).
[Crossref] [PubMed]

J. Carrillo-López, J. A. Luna-López, I. Vivaldo-De la Cruz, M. Aceves-Mijares, A. Morales-Sanchez, and G. García-Salgado, “UV enhancement of silicon solar cells using thin SRO films,” Sol. Energy Mater. Sol. Cells 100, 39–42 (2012).
[Crossref]

J. J. van Hapert, A. M. Vredenberg, E. E. van Faassen, N. Tomozeiu, W. M. Arnoldbik, and F. H. P. M. Habraken, “Role of spinodal decomposition in the structure of SiOx,” Phys. Rev. B 69(24), 245202 (2004).

Z. Wan, S. Huang, M. A. Green, and G. Conibeer, “Rapid thermal annealing and crystallization mechanism study of Si-NCs in SiC matrix,” Nanoscale Res. Lett. 6, 129 (2011).

B. Hinds, F. Wang, D. Wolfe, Hinkle, and G. Lucovsky, “Investigation of postoxidation thermal treatments of Si/SiO2 interface in relationship to the kinetics of amorphous Si suboxide decomposition,” J. Vac. Sci. Technol. B 16, 2171–2177 (1998).

N. P. Barradas, C. Jeynes, and R. P. Webb, “Simulated annealing analysis of rutherford backscattering data,” Appl. Phys. Lett. 71(2), 291–293 (1997).
[Crossref]

B. Hinds, F. Wang, D. Wolfe, Hinkle, and G. Lucovsky, “Investigation of postoxidation thermal treatments of Si/SiO2 interface in relationship to the kinetics of amorphous Si suboxide decomposition,” J. Vac. Sci. Technol. B 16, 2171–2177 (1998).

B.-R. Huang, Y.-K. Yang, T.-C. Lin, and W.-L. Yang, “A simple and low-cost technique for silicon nanowire arrays based solar cells,” Sol. Energy Mater. Sol. Cells 98, 357–362 (2012).
[Crossref]

B.-R. Huang, Y.-K. Yang, T.-C. Lin, and W.-L. Yang, “A simple and low-cost technique for silicon nanowire arrays based solar cells,” Sol. Energy Mater. Sol. Cells 98, 357–362 (2012).
[Crossref]

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature 449(7164), 885–889 (2007).
[Crossref] [PubMed]

J. Cho, B. O'Donnell, L. Yu, K.-H. Kim, I. Ngo, and P. R. Cabarrocas, “Sn-catalyzed silicon nanowire solar cells with 4.9% efficiency grown on glass,” Prog. Photovolt. Res. Appl. 21(1), 77–81 (2013).
[Crossref]

B. O'Donnell, L. Yu, M. Foldyna, and P. R. Cabarrocas, “Silicon nanowire solar cells grown by PECVD,” J. Non-Cryst. Solids 358(17), 2299–2302 (2012).
[Crossref]

L. Yu, B. O’Donnell, P.-J. Alet, and P. R. Cabarrocas, “All-in-situ fabrication and characterization of silicon nanowires on TCO/glass substrates for photovoltaic application,” Sol. Energy Mater. Sol. Cells 94(11), 1855–1859 (2010).
[Crossref]

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature 449(7164), 885–889 (2007).
[Crossref] [PubMed]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

T. J. Kempa, B. Tian, D. R. Kim, J. Hu, X. Zheng, and C. M. Lieber, “Single and Tandem Axial p-i-n Nanowire Photovoltaic Devices,” Nano Lett. 8(10), 3456–3460 (2008).
[Crossref] [PubMed]

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature 449(7164), 885–889 (2007).
[Crossref] [PubMed]

Y. Ritz, H. Stegmann, H.-J. Engelmann, and E. Zschech, “Target preparation of samples for 3D-TEM using micromanipulators,” Prakt. Metallogr. 41, 180–189 (2004).

P. Cuony, D. T. L. Alexander, I. Perez-Wurfl, M. Despeisse, G. Bugnon, M. Boccard, T. Söderström, A. Hessler-Wyser, C. Hébert, and C. Ballif, “Silicon filaments in silicon oxide for next-generation photovoltaics,” Adv. Mater. 24(9), 1182–1186 (2012).
[Crossref] [PubMed]

M. D. Kelzenberg, M. C. Putnam, D. B. Turner-Evans, N. S. Lewis, and H. A. Atwater, “Predicted efficiency of Si wire array solar cells,” Appl. Phys. Lett. 93, 032112 (2008).

L. Tsakalakos, J. Balch, J. Fronheiser, B. A. Korevaar, O. Sulima, and J. Rand, “Silicon nanowire solar cells,” Appl. Phys. Lett. 91(23), 233117 (2007).
[Crossref]

B.-H. Kim, C.-H. Cho, T.-W. Kim, N.-M. Park, G. Y. Sung, and S.-J. Park, “Photoluminescence of silicon quantum dots in silicon nitride grown by NH3 and SiH4,” Appl. Phys. Lett. 86(9), 091908 (2005).
[Crossref]

T. Muller, K.-H. Heinig, W. Moller, C. Bonafos, H. Coffin, N. Cherkashin, G. Ben Assayag, S. Schamm, G. Zanchi, A. Claverie, M. Tence, and C. Colliex, “Multi-dot floating-gates for nonvolatile semiconductor memories: Their ion beam synthesis and morphology,” Appl. Phys. Lett. 85(12), 2373–2376 (2004).
[Crossref]

T. Muller, K.-H. Heinig, and W. Moller, “Size and location control of Si nanocrystals at ion beam synthesis in thin SiO2 films,” Appl. Phys. Lett. 81(16), 3049–3052 (2002).
[Crossref]

N. P. Barradas, C. Jeynes, and R. P. Webb, “Simulated annealing analysis of rutherford backscattering data,” Appl. Phys. Lett. 71(2), 291–293 (1997).
[Crossref]

A. Janotta, Y. Dikce, M. Schmidt, C. Eisele, M. Stutzmann, M. Luysberg, and L. Houben, “Light-induced modification of a-SiO[sub x] II: Laser crystallization,” J. Appl. Phys. 95(8), 4060–4069 (2004).
[Crossref]

L. Khriachtchev, T. Nikitin, M. Rasanen, A. Domanskaya, S. Boninelli, F. Iacona, A. Engdahl, J. Juhanoja, and S. Novikov, “Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si[Single Bond]SiO2 phase separation,” J. Appl. Phys. 108(12), 124301 (2010).
[Crossref]

G. Franzò, M. Miritello, S. Boninelli, R. Lo Savio, M. G. Grimaldi, F. Priolo, F. Iacona, G. Nicotra, C. Spinella, and S. Coffa, “Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters,” J. Appl. Phys. 104(9), 094306 (2008).
[Crossref]

C. M. M. Denisse, K. Z. Troost, J. B. Oude Elferink, F. H. P. M. Habraken, and M. Hendriks, “Plasma-enhanced growth and composition of silicon oxynitride films,” J. Appl. Phys. 60(7), 2536–2542 (1986).
[Crossref]

F. Iacona, C. Bongiorno, C. Spinella, S. Boninelli, and F. Priolo, “Formation and evolution of luminescent Si nanoclusters produced by thermal annealing of SiOx films,” J. Appl. Phys. 95(7), 3723–3733 (2004).
[Crossref]

E. G. Barbagiovanni, D. J. Lockwood, P. J. Simpson, and L. V. Goncharova, “Quantum confinement in Si and Ge nanostructures,” J. Appl. Phys. 111(3), 034307 (2012).
[Crossref]

L. Khriachtchev, “Optical and structural properties of silicon nanocrystals and laser-induced thermal effects',” J. Electrochem. Soc. 159(1), K21–K26 (2012).
[Crossref]

B. O'Donnell, L. Yu, M. Foldyna, and P. R. Cabarrocas, “Silicon nanowire solar cells grown by PECVD,” J. Non-Cryst. Solids 358(17), 2299–2302 (2012).
[Crossref]

S. P. Singh, P. Srivastava, S. Ghosh, S. A. Khan, and G. Vijaya Prakash, “Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film,” J. Phys. Condens. Matter 21(9), 095010 (2009).
[Crossref] [PubMed]

B. Hinds, F. Wang, D. Wolfe, Hinkle, and G. Lucovsky, “Investigation of postoxidation thermal treatments of Si/SiO2 interface in relationship to the kinetics of amorphous Si suboxide decomposition,” J. Vac. Sci. Technol. B 16, 2171–2177 (1998).

R. A. R. Oliveira, M. Ribeiro, I. Pereyra, and M. I. Alayo, “Silicon clusters in PECVD silicon-rich SiOxNy,” Mater. Charact. 50(2-3), 161–166 (2003).
[Crossref]

G. Conibeer, “Third-generation photovoltaics,” Mater. Today 10(11), 42–50 (2007).
[Crossref]

T. J. Kempa, B. Tian, D. R. Kim, J. Hu, X. Zheng, and C. M. Lieber, “Single and Tandem Axial p-i-n Nanowire Photovoltaic Devices,” Nano Lett. 8(10), 3456–3460 (2008).
[Crossref] [PubMed]

M. D. Kelzenberg, D. B. Turner-Evans, B. M. Kayes, M. A. Filler, M. C. Putnam, N. S. Lewis, and H. A. Atwater, “Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells,” Nano Lett. 8(2), 710–714 (2008).
[Crossref] [PubMed]

Z. Wan, S. Huang, M. A. Green, and G. Conibeer, “Rapid thermal annealing and crystallization mechanism study of Si-NCs in SiC matrix,” Nanoscale Res. Lett. 6, 129 (2011).

D. Barba, F. Martin, and G. G. Ross, “Evidence of localized amorphous silicon clustering from Raman depth-probing of silicon nanocrystals in fused silica,” Nanotechnology 19(11), 115707 (2008).
[Crossref] [PubMed]

A. Polman and H. A. Atwater, “Photonic design principles for ultrahigh-efficiency photovoltaics,” Nat. Mater. 11(3), 174–177 (2012).
[Crossref] [PubMed]

B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, and C. M. Lieber, “Coaxial silicon nanowires as solar cells and nanoelectronic power sources,” Nature 449(7164), 885–889 (2007).
[Crossref] [PubMed]

J. J. van Hapert, A. M. Vredenberg, E. E. van Faassen, N. Tomozeiu, W. M. Arnoldbik, and F. H. P. M. Habraken, “Role of spinodal decomposition in the structure of SiOx,” Phys. Rev. B 69(24), 245202 (2004).

I. Balberg, E. Savir, J. Jedrzejewski, A. G. Nassiopoulou, and S. Gardelis, “Fundamental tansport processes in ensembles of silicon quantum dots,” Phys. Rev. B 75(23), 235329 (2007).
[Crossref]

D. Riabinina, C. Durand, J. Margot, M. Chaker, G. A. Botton, and F. Rosei, “Nucleation and growth of Si nanocrystals in an amorphous SiO2 matrix,” Phys. Rev. B 74(7), 075334 (2006).
[Crossref]

Y. Ritz, H. Stegmann, H.-J. Engelmann, and E. Zschech, “Target preparation of samples for 3D-TEM using micromanipulators,” Prakt. Metallogr. 41, 180–189 (2004).

J. Cho, B. O'Donnell, L. Yu, K.-H. Kim, I. Ngo, and P. R. Cabarrocas, “Sn-catalyzed silicon nanowire solar cells with 4.9% efficiency grown on glass,” Prog. Photovolt. Res. Appl. 21(1), 77–81 (2013).
[Crossref]

B.-R. Huang, Y.-K. Yang, T.-C. Lin, and W.-L. Yang, “A simple and low-cost technique for silicon nanowire arrays based solar cells,” Sol. Energy Mater. Sol. Cells 98, 357–362 (2012).
[Crossref]

L. Yu, B. O’Donnell, P.-J. Alet, and P. R. Cabarrocas, “All-in-situ fabrication and characterization of silicon nanowires on TCO/glass substrates for photovoltaic application,” Sol. Energy Mater. Sol. Cells 94(11), 1855–1859 (2010).
[Crossref]

J. Carrillo-López, J. A. Luna-López, I. Vivaldo-De la Cruz, M. Aceves-Mijares, A. Morales-Sanchez, and G. García-Salgado, “UV enhancement of silicon solar cells using thin SRO films,” Sol. Energy Mater. Sol. Cells 100, 39–42 (2012).
[Crossref]

G. Conibeer, M. A. Green, R. Corkish, Y.-H. Cho, E.-C. Cho, and C.-W. Jiang, “Silicon nanostructures for third generation photovoltaic solar cells,” Thin Solid Films 654, 511–512 (2005).

S. Schamm, C. Bonafos, H. Coffin, N. Cherkashin, M. Carrada, G. Ben Assayag, A. Claverie, M. Tencé, and C. Colliex, “Imaging Si nanoparticles embedded in SiO2 layers by (S)TEM-EELS,” Ultramicroscopy 108(4), 346–357 (2008).
[Crossref] [PubMed]

R. Elliman, “The synthesis of silicon nanocrystals by ion implantation” Silicon Nanocrystals: Fundamentals, Synthesis and Applications, Lorenzo Pavesi and Rasit Turan,eds. (Wiley, 2010), Chap. 9.

N. Tomozeiu, “Silicon oxide (SiOx, 0<x<2): a challenging material for optoelectronics,” Optoelectronics - Materials and Techniques, Prof. P. Predeep (Ed.), (2011).