Abstract

A low voltage, high speed, compact silicon Mach-Zehnder Interferometer (MZI) modulator for Binary Phase Shift Keying (BPSK) modulation has been demonstrated. High modulation efficiency, VπLπ equals to 0.45V·cm, was obtained in a 1mm length device owing to a higher doping concentration and low-loss traveling-wave electrode. 25Gb/s non-return-to-zero(NRZ)-BPSK with 6Vpp RF driving signal was achieved. Driven by a very low 3Vpp RF signal, the 10Gb/s NRZ-BPSK was also realized benefiting from the high modulation efficiency and the low-voltage driving scheme. The power consumption for the BPSK modulation was as low as 0.118W. These results prove that the silicon modulator is suitable for advanced communication system with low power consumption.

© 2013 OSA

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2013 (1)

Z. Zhou, X. Wang, H. Yi, Z. Tu, W. Tan, Q. Long, M. Yin, and Y. Huang, “Silicon photonics for advanced optical communication systems, ” Opt. Eng.52(4), 045007 (2013).

2012 (8)

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

J. Ding, H. Chen, L. Yang, L. Zhang, R. Ji, Y. Tian, W. Zhu, Y. Lu, P. Zhou, R. Min, and M. Yu, “Ultra-low-power carrier-depletion Mach-Zehnder silicon optical modulator,” Opt. Express20(7), 7081–7087 (2012).
[CrossRef] [PubMed]

H. Yi, Q. Long, W. Tan, L. Li, X. Wang, and Z. Zhou, “Demonstration of low power penalty of silicon Mach-Zehnder modulator in long-haul transmission,” Opt. Express20(25), 27562–27568 (2012).
[CrossRef] [PubMed]

K. Goi, K. Oda, H. Kusaka, Y. Terada, K. Ogawa, T.-Y. Liow, X. Tu, G.-Q. Lo, and D.-L. Kwong, “11-Gb/s 80-km Transmission Performance of Zero-Chirp Silicon Mach-Zehnder Modulator,” Opt. Express20(26), B350–B356 (2012).
[CrossRef] [PubMed]

P. Dong, L. Chen, C. Xie, L. L. Buhl, and Y.-K. Chen, “50-Gb/s silicon quadrature phase-shift keying modulator,” Opt. Express20(19), 21181–21186 (2012).
[CrossRef] [PubMed]

P. Dong, C. Xie, L. Chen, L. L. Buhl, and Y.-K. Chen, “112-Gb/s Monolithic PDM-QPSK Modulator in Silicon,” Opt. Express20(26), B624–B629 (2012).
[CrossRef] [PubMed]

J. Ding, H. Chen, L. Yang, L. Zhang, R. Ji, Y. Tian, W. Zhu, Y. Lu, P. Zhou, and R. Min, “Low-voltage, high-extinction-ratio, Mach-Zehnder silicon optical modulator for CMOS-compatible integration,” Opt. Express20(3), 3209–3218 (2012).
[CrossRef] [PubMed]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

2011 (1)

H. Xu, Z. Li, Y. Zhu, Y. Li, Y. Yu, and J. Yu, “Silicon optical modulator with integrated grating couplers based on 0.18-μm complementary metal oxide semiconductor technology,” Opt. Eng. 50(4), 044001 (2011).

2010 (1)

D. J. Thomson, Y. Hu, G. T. Reed, and J.-M. Fedeli, “Low Loss MMI Couplers for High Performance MZI Modulators,” IEEE Photon. Technol. Lett.22(20), 1485–1487 (2010).
[CrossRef]

2006 (2)

Alic, N.

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Becker, J.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Buhl, L. L.

Chen, H.

Chen, L.

Chen, Y.-K.

Ding, J.

Dong, P.

Dreschmann, M.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Essiambre, R.-J.

Fedeli, J.-M.

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

D. J. Thomson, Y. Hu, G. T. Reed, and J.-M. Fedeli, “Low Loss MMI Couplers for High Performance MZI Modulators,” IEEE Photon. Technol. Lett.22(20), 1485–1487 (2010).
[CrossRef]

Freude, W.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Gardes, F. Y.

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Goi, K.

K. Goi, K. Oda, H. Kusaka, Y. Terada, K. Ogawa, T.-Y. Liow, X. Tu, G.-Q. Lo, and D.-L. Kwong, “11-Gb/s 80-km Transmission Performance of Zero-Chirp Silicon Mach-Zehnder Modulator,” Opt. Express20(26), B350–B356 (2012).
[CrossRef] [PubMed]

K. Goi, K. Oda, H. Kusaka, K. Ogawa, T.-Y. Liow, X. Tu, and G.-Q. Lo, “20-Gbps BPSK silicon Mach-Zehnder modulator with excellent chirp-free performance,” in Proceedings of OptoElectronics and Communications Conference, pp. 238–239.
[CrossRef]

Hillerkuss, D.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Hu, Y.

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

D. J. Thomson, Y. Hu, G. T. Reed, and J.-M. Fedeli, “Low Loss MMI Couplers for High Performance MZI Modulators,” IEEE Photon. Technol. Lett.22(20), 1485–1487 (2010).
[CrossRef]

Huang, Y.

Z. Zhou, X. Wang, H. Yi, Z. Tu, W. Tan, Q. Long, M. Yin, and Y. Huang, “Silicon photonics for advanced optical communication systems, ” Opt. Eng.52(4), 045007 (2013).

Huebner, M.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Ji, R.

Josten, A.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Koenig, S.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Koos, C.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Kuo, B. P. P.

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Kusaka, H.

K. Goi, K. Oda, H. Kusaka, Y. Terada, K. Ogawa, T.-Y. Liow, X. Tu, G.-Q. Lo, and D.-L. Kwong, “11-Gb/s 80-km Transmission Performance of Zero-Chirp Silicon Mach-Zehnder Modulator,” Opt. Express20(26), B350–B356 (2012).
[CrossRef] [PubMed]

K. Goi, K. Oda, H. Kusaka, K. Ogawa, T.-Y. Liow, X. Tu, and G.-Q. Lo, “20-Gbps BPSK silicon Mach-Zehnder modulator with excellent chirp-free performance,” in Proceedings of OptoElectronics and Communications Conference, pp. 238–239.
[CrossRef]

Kwong, D.-L.

Leuthold, J.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Li, L.

Li, Y.

H. Xu, Z. Li, Y. Zhu, Y. Li, Y. Yu, and J. Yu, “Silicon optical modulator with integrated grating couplers based on 0.18-μm complementary metal oxide semiconductor technology,” Opt. Eng. 50(4), 044001 (2011).

Li, Z.

H. Xu, Z. Li, Y. Zhu, Y. Li, Y. Yu, and J. Yu, “Silicon optical modulator with integrated grating couplers based on 0.18-μm complementary metal oxide semiconductor technology,” Opt. Eng. 50(4), 044001 (2011).

Liow, T.-Y.

K. Goi, K. Oda, H. Kusaka, Y. Terada, K. Ogawa, T.-Y. Liow, X. Tu, G.-Q. Lo, and D.-L. Kwong, “11-Gb/s 80-km Transmission Performance of Zero-Chirp Silicon Mach-Zehnder Modulator,” Opt. Express20(26), B350–B356 (2012).
[CrossRef] [PubMed]

K. Goi, K. Oda, H. Kusaka, K. Ogawa, T.-Y. Liow, X. Tu, and G.-Q. Lo, “20-Gbps BPSK silicon Mach-Zehnder modulator with excellent chirp-free performance,” in Proceedings of OptoElectronics and Communications Conference, pp. 238–239.
[CrossRef]

Lo, G.-Q.

K. Goi, K. Oda, H. Kusaka, Y. Terada, K. Ogawa, T.-Y. Liow, X. Tu, G.-Q. Lo, and D.-L. Kwong, “11-Gb/s 80-km Transmission Performance of Zero-Chirp Silicon Mach-Zehnder Modulator,” Opt. Express20(26), B350–B356 (2012).
[CrossRef] [PubMed]

K. Goi, K. Oda, H. Kusaka, K. Ogawa, T.-Y. Liow, X. Tu, and G.-Q. Lo, “20-Gbps BPSK silicon Mach-Zehnder modulator with excellent chirp-free performance,” in Proceedings of OptoElectronics and Communications Conference, pp. 238–239.
[CrossRef]

Long, Q.

Z. Zhou, X. Wang, H. Yi, Z. Tu, W. Tan, Q. Long, M. Yin, and Y. Huang, “Silicon photonics for advanced optical communication systems, ” Opt. Eng.52(4), 045007 (2013).

H. Yi, Q. Long, W. Tan, L. Li, X. Wang, and Z. Zhou, “Demonstration of low power penalty of silicon Mach-Zehnder modulator in long-haul transmission,” Opt. Express20(25), 27562–27568 (2012).
[CrossRef] [PubMed]

Lu, Y.

Mashanovich, G. Z.

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Meyer, J.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Min, R.

Myslivets, E.

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Nebendahl, B.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Oda, K.

K. Goi, K. Oda, H. Kusaka, Y. Terada, K. Ogawa, T.-Y. Liow, X. Tu, G.-Q. Lo, and D.-L. Kwong, “11-Gb/s 80-km Transmission Performance of Zero-Chirp Silicon Mach-Zehnder Modulator,” Opt. Express20(26), B350–B356 (2012).
[CrossRef] [PubMed]

K. Goi, K. Oda, H. Kusaka, K. Ogawa, T.-Y. Liow, X. Tu, and G.-Q. Lo, “20-Gbps BPSK silicon Mach-Zehnder modulator with excellent chirp-free performance,” in Proceedings of OptoElectronics and Communications Conference, pp. 238–239.
[CrossRef]

Ogawa, K.

K. Goi, K. Oda, H. Kusaka, Y. Terada, K. Ogawa, T.-Y. Liow, X. Tu, G.-Q. Lo, and D.-L. Kwong, “11-Gb/s 80-km Transmission Performance of Zero-Chirp Silicon Mach-Zehnder Modulator,” Opt. Express20(26), B350–B356 (2012).
[CrossRef] [PubMed]

K. Goi, K. Oda, H. Kusaka, K. Ogawa, T.-Y. Liow, X. Tu, and G.-Q. Lo, “20-Gbps BPSK silicon Mach-Zehnder modulator with excellent chirp-free performance,” in Proceedings of OptoElectronics and Communications Conference, pp. 238–239.
[CrossRef]

Radic, S.

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Reed, G. T.

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

D. J. Thomson, Y. Hu, G. T. Reed, and J.-M. Fedeli, “Low Loss MMI Couplers for High Performance MZI Modulators,” IEEE Photon. Technol. Lett.22(20), 1485–1487 (2010).
[CrossRef]

Schmogrow, R.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Tan, W.

Z. Zhou, X. Wang, H. Yi, Z. Tu, W. Tan, Q. Long, M. Yin, and Y. Huang, “Silicon photonics for advanced optical communication systems, ” Opt. Eng.52(4), 045007 (2013).

H. Yi, Q. Long, W. Tan, L. Li, X. Wang, and Z. Zhou, “Demonstration of low power penalty of silicon Mach-Zehnder modulator in long-haul transmission,” Opt. Express20(25), 27562–27568 (2012).
[CrossRef] [PubMed]

Terada, Y.

Thomson, D. J.

D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

D. J. Thomson, Y. Hu, G. T. Reed, and J.-M. Fedeli, “Low Loss MMI Couplers for High Performance MZI Modulators,” IEEE Photon. Technol. Lett.22(20), 1485–1487 (2010).
[CrossRef]

Tian, Y.

Tu, X.

K. Goi, K. Oda, H. Kusaka, Y. Terada, K. Ogawa, T.-Y. Liow, X. Tu, G.-Q. Lo, and D.-L. Kwong, “11-Gb/s 80-km Transmission Performance of Zero-Chirp Silicon Mach-Zehnder Modulator,” Opt. Express20(26), B350–B356 (2012).
[CrossRef] [PubMed]

K. Goi, K. Oda, H. Kusaka, K. Ogawa, T.-Y. Liow, X. Tu, and G.-Q. Lo, “20-Gbps BPSK silicon Mach-Zehnder modulator with excellent chirp-free performance,” in Proceedings of OptoElectronics and Communications Conference, pp. 238–239.
[CrossRef]

Tu, Z.

Z. Zhou, X. Wang, H. Yi, Z. Tu, W. Tan, Q. Long, M. Yin, and Y. Huang, “Silicon photonics for advanced optical communication systems, ” Opt. Eng.52(4), 045007 (2013).

Wang, X.

Z. Zhou, X. Wang, H. Yi, Z. Tu, W. Tan, Q. Long, M. Yin, and Y. Huang, “Silicon photonics for advanced optical communication systems, ” Opt. Eng.52(4), 045007 (2013).

H. Yi, Q. Long, W. Tan, L. Li, X. Wang, and Z. Zhou, “Demonstration of low power penalty of silicon Mach-Zehnder modulator in long-haul transmission,” Opt. Express20(25), 27562–27568 (2012).
[CrossRef] [PubMed]

Winter, M.

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error Vector Magnitude as a Performance Measure for Advanced Modulation Formats,” IEEE Photon. Technol. Lett.24(1), 61–63 (2012).
[CrossRef]

Winzer, P. J.

Xie, C.

Xu, H.

H. Xu, Z. Li, Y. Zhu, Y. Li, Y. Yu, and J. Yu, “Silicon optical modulator with integrated grating couplers based on 0.18-μm complementary metal oxide semiconductor technology,” Opt. Eng. 50(4), 044001 (2011).

Yang, L.

Yi, H.

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Yu, J.

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H. Xu, Z. Li, Y. Zhu, Y. Li, Y. Yu, and J. Yu, “Silicon optical modulator with integrated grating couplers based on 0.18-μm complementary metal oxide semiconductor technology,” Opt. Eng. 50(4), 044001 (2011).

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Z. Zhou, X. Wang, H. Yi, Z. Tu, W. Tan, Q. Long, M. Yin, and Y. Huang, “Silicon photonics for advanced optical communication systems, ” Opt. Eng.52(4), 045007 (2013).

H. Yi, Q. Long, W. Tan, L. Li, X. Wang, and Z. Zhou, “Demonstration of low power penalty of silicon Mach-Zehnder modulator in long-haul transmission,” Opt. Express20(25), 27562–27568 (2012).
[CrossRef] [PubMed]

Zhu, W.

Zhu, Y.

H. Xu, Z. Li, Y. Zhu, Y. Li, Y. Yu, and J. Yu, “Silicon optical modulator with integrated grating couplers based on 0.18-μm complementary metal oxide semiconductor technology,” Opt. Eng. 50(4), 044001 (2011).

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D. J. Thomson, F. Y. Gardes, J.-M. Fedeli, S. Zlatanovic, Y. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

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J. Lightwave Technol. (1)

Opt. Eng. (1)

Z. Zhou, X. Wang, H. Yi, Z. Tu, W. Tan, Q. Long, M. Yin, and Y. Huang, “Silicon photonics for advanced optical communication systems, ” Opt. Eng.52(4), 045007 (2013).

Opt. Express (6)

Proc. IEEE (1)

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[CrossRef]

Silicon optical modulator with integrated grating couplers based on 0.18-µm complementary metal oxide semiconductor technology (1)

H. Xu, Z. Li, Y. Zhu, Y. Li, Y. Yu, and J. Yu, “Silicon optical modulator with integrated grating couplers based on 0.18-μm complementary metal oxide semiconductor technology,” Opt. Eng. 50(4), 044001 (2011).

Other (5)

G. Raybon and P. Winzer, “100Gb/s Challenges and Solutions,” in Optical Fiber Communication Conference (Optical Society of America, 2008), paper OTuG1.

P. Dong, C. Xie, L. L. Buhl, and Y.-K. Chen, “Silicon Microring Modulators for Advanced Modulation Formats,” in Optical Fiber Communication Conference (Optical Society of America, 2013), paper OW4J.2.
[CrossRef]

K. Padmaraju, N. Ophir, Q. Xu, B. Schmidt, J. Shakya, S. Manipatruni, M. Lipson, and K. Bergman, “Error-Free Transmission of DPSK at 5 Gb/s Using a Silicon Microring Modulator,” in European Conference and Exposition on Optical Communications (Optical Society of America, 2011), Th.12.LeSaleve.2.
[CrossRef]

K. Goi, H. Kusaka, A. Oka, Y. Terada, K. Ogawa, T.-Y. Liow, X. Tu, G. Lo, and D.-L. Kwong, “DQPSK/QPSK Modulation at 40-60 Gb/s using Low-Loss Nested Silicon Mach-Zehnder Modulator,” in Optical Fiber Communication Conference (Optical Society of America, 2013), paper OW4J.4.
[CrossRef]

K. Goi, K. Oda, H. Kusaka, K. Ogawa, T.-Y. Liow, X. Tu, and G.-Q. Lo, “20-Gbps BPSK silicon Mach-Zehnder modulator with excellent chirp-free performance,” in Proceedings of OptoElectronics and Communications Conference, pp. 238–239.
[CrossRef]

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Figures (5)

Fig. 1
Fig. 1

BPSK constellation diagram with different driving voltage.

Fig. 2
Fig. 2

Schematic diagram of the device: (a) Cross-section diagram, (b) Optical micrograph of the modulator with a CPW electrode.

Fig. 3
Fig. 3

Measurement setup for the BPSK modulation.

Fig. 4
Fig. 4

(a) Static spectrum for different Vbias, (b) Measured E-O response of the 1mm MZI modulator.

Fig. 5
Fig. 5

The constellation diagrams and eye diagrams: (a) Different data rates of 10Gb/s, 20Gb/s and 25Gb/s, (b) 10Gb/s data rate under different driving voltages

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

E out = E 1 + E 2 = E in 2 exp(j ϕ 1 )+ E in 2 exp(j ϕ 2 +jϕ).
E out = E in sin( ϕ 1 ϕ 2 2 )expj( ϕ 1 + ϕ 2 +π 2 ).

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