Abstract

In spite of rapidly increasing demand and various applications of infrared (IR) detectors, their design process for the performance improvement has been mostly dependent on researchers’ intuition and knowledge. We present two-dimensional unit structure design of the absorbing layer in IR detectors. A systematic approach is introduced to enhance the absorbing efficiency of incident beam in the near-infrared wavelength range. We derived a layered structure composed of a silicon nitride (Si3N4) layer and an amorphous silicon (a-Si) one in turn by the so called topology optimization in association with the time variant finite element analysis (FEA). It is confirmed that thickness at each layer is in associated with the IR wavelength so that detail dimensions of each layer are inferred. A prototype of the layered structure was fabricated and its performance has been verified through experimental measurement.

© 2013 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Design of practicable phase-change metadevices for near-infrared absorber and modulator applications

Santiago García-Cuevas Carrillo, Geoffrey R. Nash, Hasan Hayat, Martin J. Cryan, Maciej Klemm, Harish Bhaskaran, and C. David Wright
Opt. Express 24(12) 13563-13573 (2016)

Enhancement of the infrared detection efficiency of silicon photon-counting avalanche photodiodes by use of silicon germanium absorbing layers

Alison Y. Loudon, Philip A. Hiskett, Gerald S. Buller, Roger T. Carline, Dave C. Herbert, W. Y. Leong, and John G. Rarity
Opt. Lett. 27(4) 219-221 (2002)

Triple-layer Fabry-Perot absorber with near-perfect absorption in visible and near-infrared regime

Shiwei Shu, Zhe Li, and Yang Yang Li
Opt. Express 21(21) 25307-25315 (2013)

More Recommended Articles

References

  • View by:
  • Article Order
  • |
  • Year
  • |
  • Author
  • |
  • Publication
  1. M. Laamanen, M. Blomberg, R. L. Puurunen, A. Miranto, and H. Kattelus, “Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra,” Sensor Actuator A 162(2), 210–214 (2010).
    [Crossref]
  2. A. Rogalski, Infrared Detectors (CRC Press, 2011).
  3. A. Rogalski, “Infrared detector: status and trends,” Prog. Quantum Electron. 27(2-3), 59–210 (2003).
    [Crossref]
  4. M. Yuan, X. Zhou, and X. Yu, “Study on Infrared Absorption Characteristics of Ti and TiNx Nanofilms,” ECS Trans. 44, 1429–1435 (2012).
    [Crossref]
  5. A. Rogalski, “Infrared detectors: an overview,” Infrared Phys. Technol. 43(3-5), 187–210 (2002).
    [Crossref]
  6. A. Lin and J. Phillips, “Optimization of random diffraction gratings in thin-film solar cells using genetic algorithms,” Sol. Energy Mater. Sol. Cells 92(12), 1689–1696 (2008).
    [Crossref]
  7. P. Campbell and M. Green, “Light trapping properties of pyramidally textured surfaces,” J. Appl. Phys. 62(1), 243–249 (1987).
    [Crossref]
  8. C. Haase and H. Stiebig, “Thin-film silicon solar cells with efficient periodic light trapping texture,” Appl. Phys. Lett. 91(6), 061116 (2007).
    [Crossref]
  9. R. Dewan and D. Knipp, “Light trapping in thin-film silicon solar cells with integrated diffraction grating,” J. Appl. Phys. 106(7), 074901 (2009).
    [Crossref]
  10. H. Soh and J. Yoo, “Texturing design for a light trapping system using topology optimization,” IEEE Trans. Magn. 48(2), 227–230 (2012).
    [Crossref]
  11. J. B. Baxter and E. S. Aydil, “Nanowire-based dye-sensitized solar cells,” Appl. Phys. Lett. 86(5), 053114 (2005).
    [Crossref]
  12. J. Li, H. Yu, S. M. Wong, G. Zhang, G. Lo, and D. Kwong, “Si nanocone array optimization on crystalline Si thin films for solar energy harvesting,” J. Phys. D Appl. Phys. 43(25), 255101 (2010).
    [Crossref]
  13. E. D. Kosten, E. L. Warren, and H. A. Atwater, “Ray optical light trapping in Silicon microwires: exceeding the 2n2 intensity limit,” Opt. Express 19(4), 3316–3331 (2011).
    [Crossref] [PubMed]
  14. D. Lockau, T. Sontheimer, C. Becker, E. Rudigier-Voigt, F. Schmidt, and B. Rech, “Nanophotonic light trapping in 3-dimensional thin-film silicon architectures,” Opt. Express 21(S1Suppl 1), A42–A52 (2013).
    [Crossref] [PubMed]
  15. H. Soh, J. Yoo, and D. Kim, “Optimal design of the light absorbing layer in thin film silicon solar cells,” Sol. Energy 86(7), 2095–2105 (2012).
    [Crossref]
  16. M. P. Bendsøe and N. Kikuchi, “Generating optimal topologies in optimal design using a homogenization method,” Comput. Method Appl. M. 71(2), 197–224 (1988).
    [Crossref]
  17. M. P. Bendsøe and O. Sigmund, Topology optimization: theory, methods, and applications (Springer-Verlag, 2003).
  18. J. Yoo, N. Kikuchi, and J. L. Volakis, “Structural optimization in magnetic devices by the homogenization design method,” IEEE Trans. Magn. 36(3), 574–580 (2000).
    [Crossref]
  19. J. S. Jensen and O. Sigmund, “Topology optimization of photonic crystal structures: a high-bandwidth low-loss T-junction waveguide,” J. Opt. Soc. Am. B 22(6), 1191–1198 (2005).
    [Crossref]
  20. J. Andkjær, S. Nishiwaki, T. Nomura, and O. Sigmund, “Topology optimization of grating couplers for the efficient excitation of surface plasmons,” J. Opt. Soc. Am. B 27(9), 1828–1832 (2010).
    [Crossref]
  21. R. Matzen, J. S. Jensen, and O. Sigmund, “Topology optimization for transient response of photonic crystal structures,” J. Opt. Soc. Am. B 27(10), 2040–2050 (2010).
    [Crossref]
  22. T. Nomura, S. Nishiwaki, K. Sato, and K. Hirayama, “Topology optimization for the design of periodic microstructures composed of electromagnetic materials,” Finite Elem. Anal. Des. 45(3), 210–226 (2009).
    [Crossref]
  23. D. Bergström, J. Powell, and A. F. H. Kaplan, “The absorptance of steels to Nd:YLF and Nd:YAG laser light at room temperature,” Appl. Surf. Sci. 253(11), 5017–5028 (2007).
    [Crossref]
  24. L. Hanssen, “Integrating-sphere system and method for absolute measurement of transmittance, reflectance, and absorptance of specular samples,” Appl. Opt. 40(19), 3196–3204 (2001).
    [Crossref] [PubMed]
  25. P. Norton, “HgCdTe infrared detectors,” Opto-Electron. Rev. 10, 159–174 (2002).
  26. J. Springer, A. Poruba, L. Müllerova, and M. Vanecek, “Absorption loss at nanorough silver back reflector of thin-film silicon solar cells,” J. Appl. Phys. 95(3), 1427–1429 (2004).
    [Crossref]
  27. P. Ye, Optical waves in layered media (Wiley, 1998).
  28. D. W. Driscoll and W. Vaughan, Handbook of optics (McGraw-Hill, New York, 1978)
  29. D. N. Wang, J. M. White, K. S. Law, and C. Leung, “Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process,” US Patent, 5000113 (1991).
  30. G. S. Sandhu and T. W. Buley, “Low-pressure chemical vapor deposition process for depositing high-density, highly-conformal titanium nitride films of low bulk resistivity,” US Patent, 5246881 (1993).
  31. U. Willamowski, D. Ristau, and E. Welsch, “Measuring the absolute absorptance of optical laser components,” Appl. Opt. 37(36), 8362–8370 (1998).
    [Crossref] [PubMed]
  32. J. M. Palmer, Handbook of optics, (McGraw-Hill, 1995).

2013 (1)

2012 (3)

M. Yuan, X. Zhou, and X. Yu, “Study on Infrared Absorption Characteristics of Ti and TiNx Nanofilms,” ECS Trans. 44, 1429–1435 (2012).
[Crossref]

H. Soh and J. Yoo, “Texturing design for a light trapping system using topology optimization,” IEEE Trans. Magn. 48(2), 227–230 (2012).
[Crossref]

H. Soh, J. Yoo, and D. Kim, “Optimal design of the light absorbing layer in thin film silicon solar cells,” Sol. Energy 86(7), 2095–2105 (2012).
[Crossref]

2011 (1)

2010 (4)

J. Andkjær, S. Nishiwaki, T. Nomura, and O. Sigmund, “Topology optimization of grating couplers for the efficient excitation of surface plasmons,” J. Opt. Soc. Am. B 27(9), 1828–1832 (2010).
[Crossref]

R. Matzen, J. S. Jensen, and O. Sigmund, “Topology optimization for transient response of photonic crystal structures,” J. Opt. Soc. Am. B 27(10), 2040–2050 (2010).
[Crossref]

J. Li, H. Yu, S. M. Wong, G. Zhang, G. Lo, and D. Kwong, “Si nanocone array optimization on crystalline Si thin films for solar energy harvesting,” J. Phys. D Appl. Phys. 43(25), 255101 (2010).
[Crossref]

M. Laamanen, M. Blomberg, R. L. Puurunen, A. Miranto, and H. Kattelus, “Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra,” Sensor Actuator A 162(2), 210–214 (2010).
[Crossref]

2009 (2)

R. Dewan and D. Knipp, “Light trapping in thin-film silicon solar cells with integrated diffraction grating,” J. Appl. Phys. 106(7), 074901 (2009).
[Crossref]

T. Nomura, S. Nishiwaki, K. Sato, and K. Hirayama, “Topology optimization for the design of periodic microstructures composed of electromagnetic materials,” Finite Elem. Anal. Des. 45(3), 210–226 (2009).
[Crossref]

2008 (1)

A. Lin and J. Phillips, “Optimization of random diffraction gratings in thin-film solar cells using genetic algorithms,” Sol. Energy Mater. Sol. Cells 92(12), 1689–1696 (2008).
[Crossref]

2007 (2)

C. Haase and H. Stiebig, “Thin-film silicon solar cells with efficient periodic light trapping texture,” Appl. Phys. Lett. 91(6), 061116 (2007).
[Crossref]

D. Bergström, J. Powell, and A. F. H. Kaplan, “The absorptance of steels to Nd:YLF and Nd:YAG laser light at room temperature,” Appl. Surf. Sci. 253(11), 5017–5028 (2007).
[Crossref]

2005 (2)

2004 (1)

J. Springer, A. Poruba, L. Müllerova, and M. Vanecek, “Absorption loss at nanorough silver back reflector of thin-film silicon solar cells,” J. Appl. Phys. 95(3), 1427–1429 (2004).
[Crossref]

2003 (1)

A. Rogalski, “Infrared detector: status and trends,” Prog. Quantum Electron. 27(2-3), 59–210 (2003).
[Crossref]

2002 (2)

A. Rogalski, “Infrared detectors: an overview,” Infrared Phys. Technol. 43(3-5), 187–210 (2002).
[Crossref]

P. Norton, “HgCdTe infrared detectors,” Opto-Electron. Rev. 10, 159–174 (2002).

2001 (1)

2000 (1)

J. Yoo, N. Kikuchi, and J. L. Volakis, “Structural optimization in magnetic devices by the homogenization design method,” IEEE Trans. Magn. 36(3), 574–580 (2000).
[Crossref]

1998 (1)

1988 (1)

M. P. Bendsøe and N. Kikuchi, “Generating optimal topologies in optimal design using a homogenization method,” Comput. Method Appl. M. 71(2), 197–224 (1988).
[Crossref]

1987 (1)

P. Campbell and M. Green, “Light trapping properties of pyramidally textured surfaces,” J. Appl. Phys. 62(1), 243–249 (1987).
[Crossref]

Andkjær, J.

Atwater, H. A.

Aydil, E. S.

J. B. Baxter and E. S. Aydil, “Nanowire-based dye-sensitized solar cells,” Appl. Phys. Lett. 86(5), 053114 (2005).
[Crossref]

Baxter, J. B.

J. B. Baxter and E. S. Aydil, “Nanowire-based dye-sensitized solar cells,” Appl. Phys. Lett. 86(5), 053114 (2005).
[Crossref]

Becker, C.

Bendsøe, M. P.

M. P. Bendsøe and N. Kikuchi, “Generating optimal topologies in optimal design using a homogenization method,” Comput. Method Appl. M. 71(2), 197–224 (1988).
[Crossref]

Bergström, D.

D. Bergström, J. Powell, and A. F. H. Kaplan, “The absorptance of steels to Nd:YLF and Nd:YAG laser light at room temperature,” Appl. Surf. Sci. 253(11), 5017–5028 (2007).
[Crossref]

Blomberg, M.

M. Laamanen, M. Blomberg, R. L. Puurunen, A. Miranto, and H. Kattelus, “Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra,” Sensor Actuator A 162(2), 210–214 (2010).
[Crossref]

Campbell, P.

P. Campbell and M. Green, “Light trapping properties of pyramidally textured surfaces,” J. Appl. Phys. 62(1), 243–249 (1987).
[Crossref]

Dewan, R.

R. Dewan and D. Knipp, “Light trapping in thin-film silicon solar cells with integrated diffraction grating,” J. Appl. Phys. 106(7), 074901 (2009).
[Crossref]

Green, M.

P. Campbell and M. Green, “Light trapping properties of pyramidally textured surfaces,” J. Appl. Phys. 62(1), 243–249 (1987).
[Crossref]

Haase, C.

C. Haase and H. Stiebig, “Thin-film silicon solar cells with efficient periodic light trapping texture,” Appl. Phys. Lett. 91(6), 061116 (2007).
[Crossref]

Hanssen, L.

Hirayama, K.

T. Nomura, S. Nishiwaki, K. Sato, and K. Hirayama, “Topology optimization for the design of periodic microstructures composed of electromagnetic materials,” Finite Elem. Anal. Des. 45(3), 210–226 (2009).
[Crossref]

Jensen, J. S.

Kaplan, A. F. H.

D. Bergström, J. Powell, and A. F. H. Kaplan, “The absorptance of steels to Nd:YLF and Nd:YAG laser light at room temperature,” Appl. Surf. Sci. 253(11), 5017–5028 (2007).
[Crossref]

Kattelus, H.

M. Laamanen, M. Blomberg, R. L. Puurunen, A. Miranto, and H. Kattelus, “Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra,” Sensor Actuator A 162(2), 210–214 (2010).
[Crossref]

Kikuchi, N.

J. Yoo, N. Kikuchi, and J. L. Volakis, “Structural optimization in magnetic devices by the homogenization design method,” IEEE Trans. Magn. 36(3), 574–580 (2000).
[Crossref]

M. P. Bendsøe and N. Kikuchi, “Generating optimal topologies in optimal design using a homogenization method,” Comput. Method Appl. M. 71(2), 197–224 (1988).
[Crossref]

Kim, D.

H. Soh, J. Yoo, and D. Kim, “Optimal design of the light absorbing layer in thin film silicon solar cells,” Sol. Energy 86(7), 2095–2105 (2012).
[Crossref]

Knipp, D.

R. Dewan and D. Knipp, “Light trapping in thin-film silicon solar cells with integrated diffraction grating,” J. Appl. Phys. 106(7), 074901 (2009).
[Crossref]

Kosten, E. D.

Kwong, D.

J. Li, H. Yu, S. M. Wong, G. Zhang, G. Lo, and D. Kwong, “Si nanocone array optimization on crystalline Si thin films for solar energy harvesting,” J. Phys. D Appl. Phys. 43(25), 255101 (2010).
[Crossref]

Laamanen, M.

M. Laamanen, M. Blomberg, R. L. Puurunen, A. Miranto, and H. Kattelus, “Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra,” Sensor Actuator A 162(2), 210–214 (2010).
[Crossref]

Li, J.

J. Li, H. Yu, S. M. Wong, G. Zhang, G. Lo, and D. Kwong, “Si nanocone array optimization on crystalline Si thin films for solar energy harvesting,” J. Phys. D Appl. Phys. 43(25), 255101 (2010).
[Crossref]

Lin, A.

A. Lin and J. Phillips, “Optimization of random diffraction gratings in thin-film solar cells using genetic algorithms,” Sol. Energy Mater. Sol. Cells 92(12), 1689–1696 (2008).
[Crossref]

Lo, G.

J. Li, H. Yu, S. M. Wong, G. Zhang, G. Lo, and D. Kwong, “Si nanocone array optimization on crystalline Si thin films for solar energy harvesting,” J. Phys. D Appl. Phys. 43(25), 255101 (2010).
[Crossref]

Lockau, D.

Matzen, R.

Miranto, A.

M. Laamanen, M. Blomberg, R. L. Puurunen, A. Miranto, and H. Kattelus, “Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra,” Sensor Actuator A 162(2), 210–214 (2010).
[Crossref]

Müllerova, L.

J. Springer, A. Poruba, L. Müllerova, and M. Vanecek, “Absorption loss at nanorough silver back reflector of thin-film silicon solar cells,” J. Appl. Phys. 95(3), 1427–1429 (2004).
[Crossref]

Nishiwaki, S.

J. Andkjær, S. Nishiwaki, T. Nomura, and O. Sigmund, “Topology optimization of grating couplers for the efficient excitation of surface plasmons,” J. Opt. Soc. Am. B 27(9), 1828–1832 (2010).
[Crossref]

T. Nomura, S. Nishiwaki, K. Sato, and K. Hirayama, “Topology optimization for the design of periodic microstructures composed of electromagnetic materials,” Finite Elem. Anal. Des. 45(3), 210–226 (2009).
[Crossref]

Nomura, T.

J. Andkjær, S. Nishiwaki, T. Nomura, and O. Sigmund, “Topology optimization of grating couplers for the efficient excitation of surface plasmons,” J. Opt. Soc. Am. B 27(9), 1828–1832 (2010).
[Crossref]

T. Nomura, S. Nishiwaki, K. Sato, and K. Hirayama, “Topology optimization for the design of periodic microstructures composed of electromagnetic materials,” Finite Elem. Anal. Des. 45(3), 210–226 (2009).
[Crossref]

Norton, P.

P. Norton, “HgCdTe infrared detectors,” Opto-Electron. Rev. 10, 159–174 (2002).

Phillips, J.

A. Lin and J. Phillips, “Optimization of random diffraction gratings in thin-film solar cells using genetic algorithms,” Sol. Energy Mater. Sol. Cells 92(12), 1689–1696 (2008).
[Crossref]

Poruba, A.

J. Springer, A. Poruba, L. Müllerova, and M. Vanecek, “Absorption loss at nanorough silver back reflector of thin-film silicon solar cells,” J. Appl. Phys. 95(3), 1427–1429 (2004).
[Crossref]

Powell, J.

D. Bergström, J. Powell, and A. F. H. Kaplan, “The absorptance of steels to Nd:YLF and Nd:YAG laser light at room temperature,” Appl. Surf. Sci. 253(11), 5017–5028 (2007).
[Crossref]

Puurunen, R. L.

M. Laamanen, M. Blomberg, R. L. Puurunen, A. Miranto, and H. Kattelus, “Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra,” Sensor Actuator A 162(2), 210–214 (2010).
[Crossref]

Rech, B.

Ristau, D.

Rogalski, A.

A. Rogalski, “Infrared detector: status and trends,” Prog. Quantum Electron. 27(2-3), 59–210 (2003).
[Crossref]

A. Rogalski, “Infrared detectors: an overview,” Infrared Phys. Technol. 43(3-5), 187–210 (2002).
[Crossref]

Rudigier-Voigt, E.

Sato, K.

T. Nomura, S. Nishiwaki, K. Sato, and K. Hirayama, “Topology optimization for the design of periodic microstructures composed of electromagnetic materials,” Finite Elem. Anal. Des. 45(3), 210–226 (2009).
[Crossref]

Schmidt, F.

Sigmund, O.

Soh, H.

H. Soh, J. Yoo, and D. Kim, “Optimal design of the light absorbing layer in thin film silicon solar cells,” Sol. Energy 86(7), 2095–2105 (2012).
[Crossref]

H. Soh and J. Yoo, “Texturing design for a light trapping system using topology optimization,” IEEE Trans. Magn. 48(2), 227–230 (2012).
[Crossref]

Sontheimer, T.

Springer, J.

J. Springer, A. Poruba, L. Müllerova, and M. Vanecek, “Absorption loss at nanorough silver back reflector of thin-film silicon solar cells,” J. Appl. Phys. 95(3), 1427–1429 (2004).
[Crossref]

Stiebig, H.

C. Haase and H. Stiebig, “Thin-film silicon solar cells with efficient periodic light trapping texture,” Appl. Phys. Lett. 91(6), 061116 (2007).
[Crossref]

Vanecek, M.

J. Springer, A. Poruba, L. Müllerova, and M. Vanecek, “Absorption loss at nanorough silver back reflector of thin-film silicon solar cells,” J. Appl. Phys. 95(3), 1427–1429 (2004).
[Crossref]

Volakis, J. L.

J. Yoo, N. Kikuchi, and J. L. Volakis, “Structural optimization in magnetic devices by the homogenization design method,” IEEE Trans. Magn. 36(3), 574–580 (2000).
[Crossref]

Warren, E. L.

Welsch, E.

Willamowski, U.

Wong, S. M.

J. Li, H. Yu, S. M. Wong, G. Zhang, G. Lo, and D. Kwong, “Si nanocone array optimization on crystalline Si thin films for solar energy harvesting,” J. Phys. D Appl. Phys. 43(25), 255101 (2010).
[Crossref]

Yoo, J.

H. Soh and J. Yoo, “Texturing design for a light trapping system using topology optimization,” IEEE Trans. Magn. 48(2), 227–230 (2012).
[Crossref]

H. Soh, J. Yoo, and D. Kim, “Optimal design of the light absorbing layer in thin film silicon solar cells,” Sol. Energy 86(7), 2095–2105 (2012).
[Crossref]

J. Yoo, N. Kikuchi, and J. L. Volakis, “Structural optimization in magnetic devices by the homogenization design method,” IEEE Trans. Magn. 36(3), 574–580 (2000).
[Crossref]

Yu, H.

J. Li, H. Yu, S. M. Wong, G. Zhang, G. Lo, and D. Kwong, “Si nanocone array optimization on crystalline Si thin films for solar energy harvesting,” J. Phys. D Appl. Phys. 43(25), 255101 (2010).
[Crossref]

Yu, X.

M. Yuan, X. Zhou, and X. Yu, “Study on Infrared Absorption Characteristics of Ti and TiNx Nanofilms,” ECS Trans. 44, 1429–1435 (2012).
[Crossref]

Yuan, M.

M. Yuan, X. Zhou, and X. Yu, “Study on Infrared Absorption Characteristics of Ti and TiNx Nanofilms,” ECS Trans. 44, 1429–1435 (2012).
[Crossref]

Zhang, G.

J. Li, H. Yu, S. M. Wong, G. Zhang, G. Lo, and D. Kwong, “Si nanocone array optimization on crystalline Si thin films for solar energy harvesting,” J. Phys. D Appl. Phys. 43(25), 255101 (2010).
[Crossref]

Zhou, X.

M. Yuan, X. Zhou, and X. Yu, “Study on Infrared Absorption Characteristics of Ti and TiNx Nanofilms,” ECS Trans. 44, 1429–1435 (2012).
[Crossref]

Appl. Opt. (2)

Appl. Phys. Lett. (2)

C. Haase and H. Stiebig, “Thin-film silicon solar cells with efficient periodic light trapping texture,” Appl. Phys. Lett. 91(6), 061116 (2007).
[Crossref]

J. B. Baxter and E. S. Aydil, “Nanowire-based dye-sensitized solar cells,” Appl. Phys. Lett. 86(5), 053114 (2005).
[Crossref]

Appl. Surf. Sci. (1)

D. Bergström, J. Powell, and A. F. H. Kaplan, “The absorptance of steels to Nd:YLF and Nd:YAG laser light at room temperature,” Appl. Surf. Sci. 253(11), 5017–5028 (2007).
[Crossref]

Comput. Method Appl. M. (1)

M. P. Bendsøe and N. Kikuchi, “Generating optimal topologies in optimal design using a homogenization method,” Comput. Method Appl. M. 71(2), 197–224 (1988).
[Crossref]

ECS Trans. (1)

M. Yuan, X. Zhou, and X. Yu, “Study on Infrared Absorption Characteristics of Ti and TiNx Nanofilms,” ECS Trans. 44, 1429–1435 (2012).
[Crossref]

Finite Elem. Anal. Des. (1)

T. Nomura, S. Nishiwaki, K. Sato, and K. Hirayama, “Topology optimization for the design of periodic microstructures composed of electromagnetic materials,” Finite Elem. Anal. Des. 45(3), 210–226 (2009).
[Crossref]

IEEE Trans. Magn. (2)

H. Soh and J. Yoo, “Texturing design for a light trapping system using topology optimization,” IEEE Trans. Magn. 48(2), 227–230 (2012).
[Crossref]

J. Yoo, N. Kikuchi, and J. L. Volakis, “Structural optimization in magnetic devices by the homogenization design method,” IEEE Trans. Magn. 36(3), 574–580 (2000).
[Crossref]

Infrared Phys. Technol. (1)

A. Rogalski, “Infrared detectors: an overview,” Infrared Phys. Technol. 43(3-5), 187–210 (2002).
[Crossref]

J. Appl. Phys. (3)

R. Dewan and D. Knipp, “Light trapping in thin-film silicon solar cells with integrated diffraction grating,” J. Appl. Phys. 106(7), 074901 (2009).
[Crossref]

P. Campbell and M. Green, “Light trapping properties of pyramidally textured surfaces,” J. Appl. Phys. 62(1), 243–249 (1987).
[Crossref]

J. Springer, A. Poruba, L. Müllerova, and M. Vanecek, “Absorption loss at nanorough silver back reflector of thin-film silicon solar cells,” J. Appl. Phys. 95(3), 1427–1429 (2004).
[Crossref]

J. Opt. Soc. Am. B (3)

J. Phys. D Appl. Phys. (1)

J. Li, H. Yu, S. M. Wong, G. Zhang, G. Lo, and D. Kwong, “Si nanocone array optimization on crystalline Si thin films for solar energy harvesting,” J. Phys. D Appl. Phys. 43(25), 255101 (2010).
[Crossref]

Opt. Express (2)

Opto-Electron. Rev. (1)

P. Norton, “HgCdTe infrared detectors,” Opto-Electron. Rev. 10, 159–174 (2002).

Prog. Quantum Electron. (1)

A. Rogalski, “Infrared detector: status and trends,” Prog. Quantum Electron. 27(2-3), 59–210 (2003).
[Crossref]

Sensor Actuator A (1)

M. Laamanen, M. Blomberg, R. L. Puurunen, A. Miranto, and H. Kattelus, “Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra,” Sensor Actuator A 162(2), 210–214 (2010).
[Crossref]

Sol. Energy (1)

H. Soh, J. Yoo, and D. Kim, “Optimal design of the light absorbing layer in thin film silicon solar cells,” Sol. Energy 86(7), 2095–2105 (2012).
[Crossref]

Sol. Energy Mater. Sol. Cells (1)

A. Lin and J. Phillips, “Optimization of random diffraction gratings in thin-film solar cells using genetic algorithms,” Sol. Energy Mater. Sol. Cells 92(12), 1689–1696 (2008).
[Crossref]

Other (7)

A. Rogalski, Infrared Detectors (CRC Press, 2011).

M. P. Bendsøe and O. Sigmund, Topology optimization: theory, methods, and applications (Springer-Verlag, 2003).

P. Ye, Optical waves in layered media (Wiley, 1998).

D. W. Driscoll and W. Vaughan, Handbook of optics (McGraw-Hill, New York, 1978)

D. N. Wang, J. M. White, K. S. Law, and C. Leung, “Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process,” US Patent, 5000113 (1991).

G. S. Sandhu and T. W. Buley, “Low-pressure chemical vapor deposition process for depositing high-density, highly-conformal titanium nitride films of low bulk resistivity,” US Patent, 5246881 (1993).

J. M. Palmer, Handbook of optics, (McGraw-Hill, 1995).

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (8)

Fig. 1
Fig. 1 Model for analysis and design. (a) simplified schematic of photovoltaic IR detector and (b) its initial model for analysis.

Download Full Size | PPT Slide | PDF

Fig. 2
Fig. 2 Hz contour plot of the initial model and its time history at the measuring domain with the definition of the time integration period. It is measured for 1064nm incident beam wavelength.

Download Full Size | PPT Slide | PDF

Fig. 3
Fig. 3 Hz Topology optimization concept of a traditional structural design in a 2D problem. Design domain is subjected to boudary and load conditions and its optimal material distribution is determined according to the density value of each element

Download Full Size | PPT Slide | PDF

Fig. 4
Fig. 4 Hz Convergence histories of the objective function and the Si3N4/a-Si layer shape changes during the topology optimization process in the 1064nm incident beam wavelength for different initial shapes (a) wedge shaped initial case and (b) full Si3N4 initial case.

Download Full Size | PPT Slide | PDF

Fig. 5
Fig. 5 Absorbing layer structures for (a) wedge initial case, (b) Si3N4 mono layer case and (c) optimal case suggested. Efficiencies are computed as 0.0988, 0.3686 and 0.4480, respectively.

Download Full Size | PPT Slide | PDF

Fig. 6
Fig. 6 Wave propagation plots in cases of (a) wedge initial model, (b) Si3N4 mono layer model and (c) optimal model suggested.

Download Full Size | PPT Slide | PDF

Fig. 7
Fig. 7 SEM images of prototypes for (a) Si3N4 mono layer model and (b) Si3N4 and a-Si multi-layer model.

Download Full Size | PPT Slide | PDF

Fig. 8
Fig. 8 Experiment set-ups for (a) reflectance measurement using an integrating sphere and (b) transmittance measurement.

Download Full Size | PPT Slide | PDF

Tables (1)

Tables Icon

Table 1 Measured values of transmittance, reflectance and resultant absorptance of Si3N4 mono layer model and Si3N4/a-Si multi-layered model

View Table

Equations (15)

Equations on this page are rendered with MathJax. Learn more.

∇ ⋅ 1 ε r ∇ H z = 1 c 0 2 ∂ 2 ∂ t 2 H z
1 ε r ∂ H z ∂ x + 1 ε r ∂ H z ∂ y = i ω 2 1 c 2 ε r ( H z − H 0 )
E = Re [ 1 j ω ε 0 ( 1 ε r ∂ H z ∂ y H z * ) ]
P o y o b j = ∫ Ω o b j E d Ω / A m e a s u r e
P o y i n c = ∫ Γ i n c E d Ω / L i n c
ψ o b j = ∫ t t + Δ t P o y o b j d τ
ψ i n c = ∫ t ′ t ′ + Δ t P o y i n c d τ
e f f t r = ψ o b j ψ i n c
ε r = ( γ p ε ′ S i 3 N 4 + ( 1 − γ p ) ε ′ a − S i ) + j ( γ p ε ″ S i 3 N 4 + ( 1 − γ p ) ε ″ a − S i )
M a x i m i z e e f f t r = ψ o b j ψ i n c S u b j e c t t o (Equilibrium of Eq . (2)) and (No volume constraint)
1 ( Δ t ) 2 1 c 2 ( H z ) n + 1 ≈ ( 1 ε r ∇ 2 ) n ( H z ) n + 2 ( Δ t ) 2 1 c 2 ( H z ) n − 1 ( Δ t ) 2 1 c 2 ( H z ) n − 1
K φ = f
d F ⌢ ( t i , Δ t ) d γ = ∂ F ⌢ ( t i , Δ t ) ∂ γ − λ T ( t i , Δ t ) ( ∂ K ∂ γ H z ( t ) − ∂ f ∂ γ )
F ⌢ ( t i , Δ t ) = ∫ t i t i + Δ t F d τ
K λ ( t i , Δ t ) T = ∂ F ⌢ ( t i , Δ t ) ∂ H z ( t )

Metrics