Abstract

We study the behavior of Fabry-Perot micro-optical resonators based on cylindrical reflectors, optionally combined with cylindrical lenses. The core of the resonator architecture incorporates coating-free, all-silicon, Bragg reflectors of cylindrical shape. The combined effect of high reflectance and light confinement produced by the reflectors curvature allows substantial reduction of the energy loss. The proposed resonator uses curved Bragg reflectors consisting of a stack of silicon-air wall pairs constructed by micromachining. Quality factor Q ~1000 was achieved on rather large cavity length L = 210 microns, which is mainly intended to lab-on-chip analytical experiments, where enough space is required to introduce the analyte inside the resonator. We report on the behavioral analysis of such resonators through analytical modeling along with numerical simulations supported by experimental results. We demonstrate selective excitation of pure longitudinal modes, taking advantage of a proper control of mode matching involved in the process of coupling light from an optical fiber to the resonator. For the sake of comparison, insight on the behavior of Fabry-Perot cavity incorporating a Fiber-Rod-Lens is confirmed by similar numerical simulations.

© 2013 OSA

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. C. Zener, “Internal friction in solids. Pt. II: general theory of thermoelastic internal friction,” Phys. Rev.53(1), 90–99 (1938).
    [CrossRef]
  2. D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglass, and H. W. Gutche, “Measurements of the mechanical Q of single-crystal silicon at low temperatures,” J. Low Temp. Phys.30(5-6), 621–629 (1978).
    [CrossRef]
  3. F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
    [CrossRef] [PubMed]
  4. G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
    [CrossRef]
  5. D. Kleckner and D. Bouwmeester, “Sub-kelvin optical cooling of a micromechanical resonator,” Nature444(7115), 75–78 (2006).
    [CrossRef] [PubMed]
  6. O. Arcizet, P.-F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature444(7115), 71–74 (2006).
    [CrossRef] [PubMed]
  7. H. Mabuchi and A. C. Doherty, “Cavity quantum electrodynamics: coherence in context,” Science298(5597), 1372–1377 (2002).
    [CrossRef] [PubMed]
  8. K. J. Vahala, “Optical microcavities,” Nature424(6950), 839–846 (2003).
    [CrossRef] [PubMed]
  9. D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature421(6926), 925–928 (2003).
    [CrossRef] [PubMed]
  10. D. W. Vernooy, V. S. Ilchenko, H. Mabuchi, E. W. Streed, and H. J. Kimble, “High-Q measurements of fused-silica microspheres in the near infrared,” Opt. Lett.23(4), 247–249 (1998).
    [CrossRef] [PubMed]
  11. D. R. Burnham and D. McGloin, “Holographic optical trapping of aerosol droplets,” Opt. Express14(9), 4176–4182 (2006).
    [CrossRef] [PubMed]
  12. D. Collin, F. Ritort, C. Jarzynski, S. B. Smith, I. Tinoco, and C. Bustamante, “Verification of the Crooks fluctuation theorem and recovery of RNA folding free energies,” Nature437(7056), 231–234 (2005).
    [CrossRef] [PubMed]
  13. W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, “Refractive index measurement of single living cells using on-chip Fabry-Perot cavity,” Appl. Phys. Lett.89(20), 203901 (2006).
    [CrossRef]
  14. S. Kassi, M. Chenevier, L. Gianfrani, A. Salhi, Y. Rouillard, A. Ouvrard, and D. Romanini, “Looking into the volcano with a mid-IR DFB diode laser and cavity enhanced absorption spectroscopy,” Opt. Express14(23), 11442–11452 (2006).
    [CrossRef] [PubMed]
  15. J. M. Langridge, T. Laurila, R. S. Watt, R. L. Jones, C. F. Kaminski, and J. Hult, “Cavity enhanced absorption spectroscopy of multiple trace gas species using a supercontinuum radiation source,” Opt. Express16(14), 10178–10188 (2008).
    [CrossRef] [PubMed]
  16. M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “In-plane microelectromechanical resonator with integrated Fabry–Perot cavity,” Appl. Phys. Lett.92(8), 081101 (2008).
    [CrossRef]
  17. M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors,” Opt. Lett.32(5), 533–535 (2007).
    [CrossRef] [PubMed]
  18. B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, “Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon,” J. Sel. Top. Quantum Electron.12(6), 1480–1488 (2006).
    [CrossRef]
  19. R. St-Gelais, J. Masson, and Y.-A. Peter, “All-silicon integrated Fabry-Perot cavity for volume refractive index measurement in microfuidic systems,” Appl. Phys. Lett.94(24), 243905 (2009).
    [CrossRef]
  20. A. Lipson and E. M. Yeatman, “A 1-D photonic band gap tunable optical filter in (110) silicon,” J. Microelectromech. Syst.16(3), 521–527 (2007).
    [CrossRef]
  21. F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro- and nanostructures,” Microelectron. J.36(7), 673–677 (2005).
    [CrossRef]
  22. A. Yariv, Quantum Electronics (Wiley, New York, USA 1989).
  23. M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor,” Appl. Phys. Lett.98(21), 211113 (2011).
    [CrossRef]
  24. M. Malak, F. Marty, N. Pavy, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-gap silicon Fabry–Perot cavities,” J. Microelectromech. Syst.21(1), 171–180 (2012).
    [CrossRef]
  25. M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, “Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers,” AIP Adv2(2), 022143 (2012).
    [CrossRef]
  26. T. Verdeyen, Laser Electronics (Prentice Hall, 1995).

2012 (2)

M. Malak, F. Marty, N. Pavy, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-gap silicon Fabry–Perot cavities,” J. Microelectromech. Syst.21(1), 171–180 (2012).
[CrossRef]

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, “Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers,” AIP Adv2(2), 022143 (2012).
[CrossRef]

2011 (1)

M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor,” Appl. Phys. Lett.98(21), 211113 (2011).
[CrossRef]

2010 (1)

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

2009 (1)

R. St-Gelais, J. Masson, and Y.-A. Peter, “All-silicon integrated Fabry-Perot cavity for volume refractive index measurement in microfuidic systems,” Appl. Phys. Lett.94(24), 243905 (2009).
[CrossRef]

2008 (2)

J. M. Langridge, T. Laurila, R. S. Watt, R. L. Jones, C. F. Kaminski, and J. Hult, “Cavity enhanced absorption spectroscopy of multiple trace gas species using a supercontinuum radiation source,” Opt. Express16(14), 10178–10188 (2008).
[CrossRef] [PubMed]

M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “In-plane microelectromechanical resonator with integrated Fabry–Perot cavity,” Appl. Phys. Lett.92(8), 081101 (2008).
[CrossRef]

2007 (2)

M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors,” Opt. Lett.32(5), 533–535 (2007).
[CrossRef] [PubMed]

A. Lipson and E. M. Yeatman, “A 1-D photonic band gap tunable optical filter in (110) silicon,” J. Microelectromech. Syst.16(3), 521–527 (2007).
[CrossRef]

2006 (6)

B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, “Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon,” J. Sel. Top. Quantum Electron.12(6), 1480–1488 (2006).
[CrossRef]

D. R. Burnham and D. McGloin, “Holographic optical trapping of aerosol droplets,” Opt. Express14(9), 4176–4182 (2006).
[CrossRef] [PubMed]

W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, “Refractive index measurement of single living cells using on-chip Fabry-Perot cavity,” Appl. Phys. Lett.89(20), 203901 (2006).
[CrossRef]

S. Kassi, M. Chenevier, L. Gianfrani, A. Salhi, Y. Rouillard, A. Ouvrard, and D. Romanini, “Looking into the volcano with a mid-IR DFB diode laser and cavity enhanced absorption spectroscopy,” Opt. Express14(23), 11442–11452 (2006).
[CrossRef] [PubMed]

D. Kleckner and D. Bouwmeester, “Sub-kelvin optical cooling of a micromechanical resonator,” Nature444(7115), 75–78 (2006).
[CrossRef] [PubMed]

O. Arcizet, P.-F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature444(7115), 71–74 (2006).
[CrossRef] [PubMed]

2005 (2)

D. Collin, F. Ritort, C. Jarzynski, S. B. Smith, I. Tinoco, and C. Bustamante, “Verification of the Crooks fluctuation theorem and recovery of RNA folding free energies,” Nature437(7056), 231–234 (2005).
[CrossRef] [PubMed]

F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro- and nanostructures,” Microelectron. J.36(7), 673–677 (2005).
[CrossRef]

2003 (2)

K. J. Vahala, “Optical microcavities,” Nature424(6950), 839–846 (2003).
[CrossRef] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature421(6926), 925–928 (2003).
[CrossRef] [PubMed]

2002 (2)

H. Mabuchi and A. C. Doherty, “Cavity quantum electrodynamics: coherence in context,” Science298(5597), 1372–1377 (2002).
[CrossRef] [PubMed]

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

1998 (1)

1978 (1)

D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglass, and H. W. Gutche, “Measurements of the mechanical Q of single-crystal silicon at low temperatures,” J. Low Temp. Phys.30(5-6), 621–629 (1978).
[CrossRef]

1938 (1)

C. Zener, “Internal friction in solids. Pt. II: general theory of thermoelastic internal friction,” Phys. Rev.53(1), 90–99 (1938).
[CrossRef]

Arcizet, O.

O. Arcizet, P.-F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Armani, D. K.

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature421(6926), 925–928 (2003).
[CrossRef] [PubMed]

Basset, P.

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, “Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers,” AIP Adv2(2), 022143 (2012).
[CrossRef]

Bourouina, T.

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, “Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers,” AIP Adv2(2), 022143 (2012).
[CrossRef]

M. Malak, F. Marty, N. Pavy, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-gap silicon Fabry–Perot cavities,” J. Microelectromech. Syst.21(1), 171–180 (2012).
[CrossRef]

M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor,” Appl. Phys. Lett.98(21), 211113 (2011).
[CrossRef]

B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, “Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon,” J. Sel. Top. Quantum Electron.12(6), 1480–1488 (2006).
[CrossRef]

F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro- and nanostructures,” Microelectron. J.36(7), 673–677 (2005).
[CrossRef]

Bouwmeester, D.

D. Kleckner and D. Bouwmeester, “Sub-kelvin optical cooling of a micromechanical resonator,” Nature444(7115), 75–78 (2006).
[CrossRef] [PubMed]

Briant, T.

O. Arcizet, P.-F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Britzger, M.

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

Brückner, F.

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

Burmeister, O.

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

Burnham, D. R.

Bustamante, C.

D. Collin, F. Ritort, C. Jarzynski, S. B. Smith, I. Tinoco, and C. Bustamante, “Verification of the Crooks fluctuation theorem and recovery of RNA folding free energies,” Nature437(7056), 231–234 (2005).
[CrossRef] [PubMed]

Cagnoli, G.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Chenevier, M.

Clausnitzer, T.

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

Cohadon, P.-F.

O. Arcizet, P.-F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Collin, D.

D. Collin, F. Ritort, C. Jarzynski, S. B. Smith, I. Tinoco, and C. Bustamante, “Verification of the Crooks fluctuation theorem and recovery of RNA folding free energies,” Nature437(7056), 231–234 (2005).
[CrossRef] [PubMed]

Crooks, D. R. M.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Danzmann, K.

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

Didelon, S.

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, “Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers,” AIP Adv2(2), 022143 (2012).
[CrossRef]

Doherty, A. C.

H. Mabuchi and A. C. Doherty, “Cavity quantum electrodynamics: coherence in context,” Science298(5597), 1372–1377 (2002).
[CrossRef] [PubMed]

Douglass, D. H.

D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglass, and H. W. Gutche, “Measurements of the mechanical Q of single-crystal silicon at low temperatures,” J. Low Temp. Phys.30(5-6), 621–629 (1978).
[CrossRef]

Fejer, M. M.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Français, O.

F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro- and nanostructures,” Microelectron. J.36(7), 673–677 (2005).
[CrossRef]

Friedrich, D.

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

Gianfrani, L.

Gram, R. Q.

D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglass, and H. W. Gutche, “Measurements of the mechanical Q of single-crystal silicon at low temperatures,” J. Low Temp. Phys.30(5-6), 621–629 (1978).
[CrossRef]

Gretarsson, A. M.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Gutche, H. W.

D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglass, and H. W. Gutche, “Measurements of the mechanical Q of single-crystal silicon at low temperatures,” J. Low Temp. Phys.30(5-6), 621–629 (1978).
[CrossRef]

Harry, G. M.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Heidmann, A.

O. Arcizet, P.-F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Hoffman, A. W.

D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglass, and H. W. Gutche, “Measurements of the mechanical Q of single-crystal silicon at low temperatures,” J. Low Temp. Phys.30(5-6), 621–629 (1978).
[CrossRef]

Hosseini, H. M. M.

W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, “Refractive index measurement of single living cells using on-chip Fabry-Perot cavity,” Appl. Phys. Lett.89(20), 203901 (2006).
[CrossRef]

Hough, J.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Hult, J.

Ilchenko, V. S.

Jarzynski, C.

D. Collin, F. Ritort, C. Jarzynski, S. B. Smith, I. Tinoco, and C. Bustamante, “Verification of the Crooks fluctuation theorem and recovery of RNA folding free energies,” Nature437(7056), 231–234 (2005).
[CrossRef] [PubMed]

Jones, R. L.

Kaminski, C. F.

Kassi, S.

Khalil, D.

B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, “Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon,” J. Sel. Top. Quantum Electron.12(6), 1480–1488 (2006).
[CrossRef]

Kimble, H. J.

Kippenberg, T. J.

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature421(6926), 925–928 (2003).
[CrossRef] [PubMed]

Kittelberger, S. E.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Kleckner, D.

D. Kleckner and D. Bouwmeester, “Sub-kelvin optical cooling of a micromechanical resonator,” Nature444(7115), 75–78 (2006).
[CrossRef] [PubMed]

Kley, E.-B.

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

Kubota, M.

B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, “Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon,” J. Sel. Top. Quantum Electron.12(6), 1480–1488 (2006).
[CrossRef]

Lam, C. C.

D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglass, and H. W. Gutche, “Measurements of the mechanical Q of single-crystal silicon at low temperatures,” J. Low Temp. Phys.30(5-6), 621–629 (1978).
[CrossRef]

Langridge, J. M.

Laurila, T.

Lim, C. S.

W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, “Refractive index measurement of single living cells using on-chip Fabry-Perot cavity,” Appl. Phys. Lett.89(20), 203901 (2006).
[CrossRef]

Lipson, A.

A. Lipson and E. M. Yeatman, “A 1-D photonic band gap tunable optical filter in (110) silicon,” J. Microelectromech. Syst.16(3), 521–527 (2007).
[CrossRef]

Liu, A. Q.

M. Malak, F. Marty, N. Pavy, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-gap silicon Fabry–Perot cavities,” J. Microelectromech. Syst.21(1), 171–180 (2012).
[CrossRef]

M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor,” Appl. Phys. Lett.98(21), 211113 (2011).
[CrossRef]

W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, “Refractive index measurement of single living cells using on-chip Fabry-Perot cavity,” Appl. Phys. Lett.89(20), 203901 (2006).
[CrossRef]

Mabuchi, H.

Malak, M.

M. Malak, F. Marty, N. Pavy, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-gap silicon Fabry–Perot cavities,” J. Microelectromech. Syst.21(1), 171–180 (2012).
[CrossRef]

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, “Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers,” AIP Adv2(2), 022143 (2012).
[CrossRef]

M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor,” Appl. Phys. Lett.98(21), 211113 (2011).
[CrossRef]

B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, “Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon,” J. Sel. Top. Quantum Electron.12(6), 1480–1488 (2006).
[CrossRef]

Marty, F.

M. Malak, F. Marty, N. Pavy, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-gap silicon Fabry–Perot cavities,” J. Microelectromech. Syst.21(1), 171–180 (2012).
[CrossRef]

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, “Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers,” AIP Adv2(2), 022143 (2012).
[CrossRef]

M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor,” Appl. Phys. Lett.98(21), 211113 (2011).
[CrossRef]

B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, “Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon,” J. Sel. Top. Quantum Electron.12(6), 1480–1488 (2006).
[CrossRef]

F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro- and nanostructures,” Microelectron. J.36(7), 673–677 (2005).
[CrossRef]

Masson, J.

R. St-Gelais, J. Masson, and Y.-A. Peter, “All-silicon integrated Fabry-Perot cavity for volume refractive index measurement in microfuidic systems,” Appl. Phys. Lett.94(24), 243905 (2009).
[CrossRef]

McGloin, D.

McGuigan, D. F.

D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglass, and H. W. Gutche, “Measurements of the mechanical Q of single-crystal silicon at low temperatures,” J. Low Temp. Phys.30(5-6), 621–629 (1978).
[CrossRef]

Mercier, B.

F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro- and nanostructures,” Microelectron. J.36(7), 673–677 (2005).
[CrossRef]

Mita, Y.

B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, “Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon,” J. Sel. Top. Quantum Electron.12(6), 1480–1488 (2006).
[CrossRef]

F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro- and nanostructures,” Microelectron. J.36(7), 673–677 (2005).
[CrossRef]

Nakagawa, N.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Obaton, A.-F.

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, “Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers,” AIP Adv2(2), 022143 (2012).
[CrossRef]

Ouvrard, A.

Pavy, N.

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, “Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers,” AIP Adv2(2), 022143 (2012).
[CrossRef]

M. Malak, F. Marty, N. Pavy, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-gap silicon Fabry–Perot cavities,” J. Microelectromech. Syst.21(1), 171–180 (2012).
[CrossRef]

M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor,” Appl. Phys. Lett.98(21), 211113 (2011).
[CrossRef]

Penn, S. D.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Peter, Y.-A.

M. Malak, F. Marty, N. Pavy, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-gap silicon Fabry–Perot cavities,” J. Microelectromech. Syst.21(1), 171–180 (2012).
[CrossRef]

M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor,” Appl. Phys. Lett.98(21), 211113 (2011).
[CrossRef]

R. St-Gelais, J. Masson, and Y.-A. Peter, “All-silicon integrated Fabry-Perot cavity for volume refractive index measurement in microfuidic systems,” Appl. Phys. Lett.94(24), 243905 (2009).
[CrossRef]

Pinard, M.

O. Arcizet, P.-F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Pruessner, M. W.

M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “In-plane microelectromechanical resonator with integrated Fabry–Perot cavity,” Appl. Phys. Lett.92(8), 081101 (2008).
[CrossRef]

M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors,” Opt. Lett.32(5), 533–535 (2007).
[CrossRef] [PubMed]

Rabinovich, W. S.

M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “In-plane microelectromechanical resonator with integrated Fabry–Perot cavity,” Appl. Phys. Lett.92(8), 081101 (2008).
[CrossRef]

M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors,” Opt. Lett.32(5), 533–535 (2007).
[CrossRef] [PubMed]

Ritort, F.

D. Collin, F. Ritort, C. Jarzynski, S. B. Smith, I. Tinoco, and C. Bustamante, “Verification of the Crooks fluctuation theorem and recovery of RNA folding free energies,” Nature437(7056), 231–234 (2005).
[CrossRef] [PubMed]

Romanini, D.

Rouillard, Y.

Rousseau, L.

F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro- and nanostructures,” Microelectron. J.36(7), 673–677 (2005).
[CrossRef]

Rowan, S.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Saadany, B.

B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, “Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon,” J. Sel. Top. Quantum Electron.12(6), 1480–1488 (2006).
[CrossRef]

F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro- and nanostructures,” Microelectron. J.36(7), 673–677 (2005).
[CrossRef]

Salhi, A.

Saulson, P. R.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

Schnabel, R.

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

Smith, S. B.

D. Collin, F. Ritort, C. Jarzynski, S. B. Smith, I. Tinoco, and C. Bustamante, “Verification of the Crooks fluctuation theorem and recovery of RNA folding free energies,” Nature437(7056), 231–234 (2005).
[CrossRef] [PubMed]

Song, W. Z.

W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, “Refractive index measurement of single living cells using on-chip Fabry-Perot cavity,” Appl. Phys. Lett.89(20), 203901 (2006).
[CrossRef]

Spillane, S. M.

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature421(6926), 925–928 (2003).
[CrossRef] [PubMed]

Startin, W. J.

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

St-Gelais, R.

R. St-Gelais, J. Masson, and Y.-A. Peter, “All-silicon integrated Fabry-Perot cavity for volume refractive index measurement in microfuidic systems,” Appl. Phys. Lett.94(24), 243905 (2009).
[CrossRef]

Stievater, T. H.

M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “In-plane microelectromechanical resonator with integrated Fabry–Perot cavity,” Appl. Phys. Lett.92(8), 081101 (2008).
[CrossRef]

M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “Integrated waveguide Fabry-Perot microcavities with silicon/air Bragg mirrors,” Opt. Lett.32(5), 533–535 (2007).
[CrossRef] [PubMed]

Streed, E. W.

Tinoco, I.

D. Collin, F. Ritort, C. Jarzynski, S. B. Smith, I. Tinoco, and C. Bustamante, “Verification of the Crooks fluctuation theorem and recovery of RNA folding free energies,” Nature437(7056), 231–234 (2005).
[CrossRef] [PubMed]

Tünnermann, A.

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

Vahala, K. J.

K. J. Vahala, “Optical microcavities,” Nature424(6950), 839–846 (2003).
[CrossRef] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature421(6926), 925–928 (2003).
[CrossRef] [PubMed]

Vernooy, D. W.

Watt, R. S.

Yap, P. H.

W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, “Refractive index measurement of single living cells using on-chip Fabry-Perot cavity,” Appl. Phys. Lett.89(20), 203901 (2006).
[CrossRef]

Yeatman, E. M.

A. Lipson and E. M. Yeatman, “A 1-D photonic band gap tunable optical filter in (110) silicon,” J. Microelectromech. Syst.16(3), 521–527 (2007).
[CrossRef]

Zener, C.

C. Zener, “Internal friction in solids. Pt. II: general theory of thermoelastic internal friction,” Phys. Rev.53(1), 90–99 (1938).
[CrossRef]

Zhang, X. M.

W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, “Refractive index measurement of single living cells using on-chip Fabry-Perot cavity,” Appl. Phys. Lett.89(20), 203901 (2006).
[CrossRef]

AIP Adv (1)

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, and T. Bourouina, “Analysis of micromachined Fabry-Perot cavities using phase-sensitive optical low coherence interferometry: insight on dimensional measurements of dielectric layers,” AIP Adv2(2), 022143 (2012).
[CrossRef]

Appl. Phys. Lett. (4)

M. Malak, N. Pavy, F. Marty, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Micromachined Fabry–Perot resonator combining submillimeter cavity length and high quality factor,” Appl. Phys. Lett.98(21), 211113 (2011).
[CrossRef]

R. St-Gelais, J. Masson, and Y.-A. Peter, “All-silicon integrated Fabry-Perot cavity for volume refractive index measurement in microfuidic systems,” Appl. Phys. Lett.94(24), 243905 (2009).
[CrossRef]

W. Z. Song, X. M. Zhang, A. Q. Liu, C. S. Lim, P. H. Yap, and H. M. M. Hosseini, “Refractive index measurement of single living cells using on-chip Fabry-Perot cavity,” Appl. Phys. Lett.89(20), 203901 (2006).
[CrossRef]

M. W. Pruessner, T. H. Stievater, and W. S. Rabinovich, “In-plane microelectromechanical resonator with integrated Fabry–Perot cavity,” Appl. Phys. Lett.92(8), 081101 (2008).
[CrossRef]

Class. Quantum Gravity (1)

G. M. Harry, A. M. Gretarsson, P. R. Saulson, S. E. Kittelberger, S. D. Penn, W. J. Startin, S. Rowan, M. M. Fejer, D. R. M. Crooks, G. Cagnoli, J. Hough, and N. Nakagawa, “Thermal noise in interferometric gravitational wave detectors due to dielectric optical coatings,” Class. Quantum Gravity19(5), 897–917 (2002).
[CrossRef]

J. Low Temp. Phys. (1)

D. F. McGuigan, C. C. Lam, R. Q. Gram, A. W. Hoffman, D. H. Douglass, and H. W. Gutche, “Measurements of the mechanical Q of single-crystal silicon at low temperatures,” J. Low Temp. Phys.30(5-6), 621–629 (1978).
[CrossRef]

J. Microelectromech. Syst. (2)

A. Lipson and E. M. Yeatman, “A 1-D photonic band gap tunable optical filter in (110) silicon,” J. Microelectromech. Syst.16(3), 521–527 (2007).
[CrossRef]

M. Malak, F. Marty, N. Pavy, Y.-A. Peter, A. Q. Liu, and T. Bourouina, “Cylindrical surfaces enable wavelength-selective extinction and sub-0.2 nm linewidth in 250 μm-gap silicon Fabry–Perot cavities,” J. Microelectromech. Syst.21(1), 171–180 (2012).
[CrossRef]

J. Sel. Top. Quantum Electron. (1)

B. Saadany, M. Malak, M. Kubota, F. Marty, Y. Mita, D. Khalil, and T. Bourouina, “Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon,” J. Sel. Top. Quantum Electron.12(6), 1480–1488 (2006).
[CrossRef]

Microelectron. J. (1)

F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, and T. Bourouina, “Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro- and nanostructures,” Microelectron. J.36(7), 673–677 (2005).
[CrossRef]

Nature (5)

D. Collin, F. Ritort, C. Jarzynski, S. B. Smith, I. Tinoco, and C. Bustamante, “Verification of the Crooks fluctuation theorem and recovery of RNA folding free energies,” Nature437(7056), 231–234 (2005).
[CrossRef] [PubMed]

K. J. Vahala, “Optical microcavities,” Nature424(6950), 839–846 (2003).
[CrossRef] [PubMed]

D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Ultra-high-Q toroid microcavity on a chip,” Nature421(6926), 925–928 (2003).
[CrossRef] [PubMed]

D. Kleckner and D. Bouwmeester, “Sub-kelvin optical cooling of a micromechanical resonator,” Nature444(7115), 75–78 (2006).
[CrossRef] [PubMed]

O. Arcizet, P.-F. Cohadon, T. Briant, M. Pinard, and A. Heidmann, “Radiation-pressure cooling and optomechanical instability of a micromirror,” Nature444(7115), 71–74 (2006).
[CrossRef] [PubMed]

Opt. Express (3)

Opt. Lett. (2)

Phys. Rev. (1)

C. Zener, “Internal friction in solids. Pt. II: general theory of thermoelastic internal friction,” Phys. Rev.53(1), 90–99 (1938).
[CrossRef]

Phys. Rev. Lett. (1)

F. Brückner, D. Friedrich, T. Clausnitzer, M. Britzger, O. Burmeister, K. Danzmann, E.-B. Kley, A. Tünnermann, and R. Schnabel, “Realization of a monolithic high-reflectivity cavity mirror from a single silicon crystal,” Phys. Rev. Lett.104(16), 163903 (2010).
[CrossRef] [PubMed]

Science (1)

H. Mabuchi and A. C. Doherty, “Cavity quantum electrodynamics: coherence in context,” Science298(5597), 1372–1377 (2002).
[CrossRef] [PubMed]

Other (2)

A. Yariv, Quantum Electronics (Wiley, New York, USA 1989).

T. Verdeyen, Laser Electronics (Prentice Hall, 1995).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics