R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
P. Genevet, J. P. Tetienne, E. Gatzogiannis, R. Blanchard, M. A. Kats, M. O. Scully, and F. Capasso, “Large enhancement of nonlinear optical phenomena by plasmonic nanocavity gratings,” Nano Lett. 10(12), 4880–4883 (2010).
[Crossref]
[PubMed]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
U. Gubler and C. Bosshard, “Optical third-harmonic generation of fused silica in gas atmosphere: Absolute value of the third-order nonlinear optical susceptibility χ(3),” Phys. Rev. B 61(16), 10702–10710 (2000).
[Crossref]
F. Stehlin, Y. Bourgin, A. Spangenberg, Y. Jourlin, O. Parriaux, S. Reynaud, F. Wieder, and O. Soppera, “Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography,” Opt. Lett. 37(22), 4651–4653 (2012).
[PubMed]
S. V. Deshpande, E. Gulari, S. W. Brown, and S. C. Rand, “Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition,” J. Appl. Phys. 77(12), 6534–6541 (1995).
[Crossref]
P. Genevet, J. P. Tetienne, E. Gatzogiannis, R. Blanchard, M. A. Kats, M. O. Scully, and F. Capasso, “Large enhancement of nonlinear optical phenomena by plasmonic nanocavity gratings,” Nano Lett. 10(12), 4880–4883 (2010).
[Crossref]
[PubMed]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
S. V. Deshpande, E. Gulari, S. W. Brown, and S. C. Rand, “Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition,” J. Appl. Phys. 77(12), 6534–6541 (1995).
[Crossref]
J. L. Dominguez-Juarez, G. Kozyreff, and J. Martorell, “Whispering gallery microresonators for second harmonic light generation from a low number of small molecules,” Nat Commun 2, 254 (2011).
[Crossref]
[PubMed]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96(6), 061101 (2010).
[Crossref]
K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
[Crossref]
[PubMed]
R. Halir, Y. Okawachi, J. S. Levy, M. A. Foster, M. Lipson, and A. L. Gaeta, “Ultrabroadband supercontinuum generation in a CMOS-compatible platform,” Opt. Lett. 37(10), 1685–1687 (2012).
[Crossref]
[PubMed]
J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson, “Harmonic generation in silicon nitride ring resonators,” Opt. Express 19(12), 11415–11421 (2011).
[Crossref]
[PubMed]
J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4(8), 535–544 (2010).
[Crossref]
R. Halir, Y. Okawachi, J. S. Levy, M. A. Foster, M. Lipson, and A. L. Gaeta, “Ultrabroadband supercontinuum generation in a CMOS-compatible platform,” Opt. Lett. 37(10), 1685–1687 (2012).
[Crossref]
[PubMed]
J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson, “Harmonic generation in silicon nitride ring resonators,” Opt. Express 19(12), 11415–11421 (2011).
[Crossref]
[PubMed]
J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]
P. Genevet, J. P. Tetienne, E. Gatzogiannis, R. Blanchard, M. A. Kats, M. O. Scully, and F. Capasso, “Large enhancement of nonlinear optical phenomena by plasmonic nanocavity gratings,” Nano Lett. 10(12), 4880–4883 (2010).
[Crossref]
[PubMed]
P. Genevet, J. P. Tetienne, E. Gatzogiannis, R. Blanchard, M. A. Kats, M. O. Scully, and F. Capasso, “Large enhancement of nonlinear optical phenomena by plasmonic nanocavity gratings,” Nano Lett. 10(12), 4880–4883 (2010).
[Crossref]
[PubMed]
T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]
T. Ning, H. Pietarinen, O. Hyvärinen, R. Kumar, T. Kaplas, M. Kauranen, and G. Genty, “Efficient second-harmonic generation in silicon nitride resonant waveguide gratings,” Opt. Lett. 37(20), 4269–4271 (2012).
[Crossref]
[PubMed]
A. Saari, G. Genty, M. Siltanen, P. Karvinen, P. Vahimaa, M. Kuittinen, and M. Kauranen, “Giant enhancement of second-harmonic generation in multiple diffraction orders from sub-wavelength resonant waveguide grating,” Opt. Express 18(12), 12298–12303 (2010).
[Crossref]
[PubMed]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]
U. Gubler and C. Bosshard, “Optical third-harmonic generation of fused silica in gas atmosphere: Absolute value of the third-order nonlinear optical susceptibility χ(3),” Phys. Rev. B 61(16), 10702–10710 (2000).
[Crossref]
S. V. Deshpande, E. Gulari, S. W. Brown, and S. C. Rand, “Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition,” J. Appl. Phys. 77(12), 6534–6541 (1995).
[Crossref]
B. Kim, S. Han, T. Kim, B. Kim, and I. Shim, “Modeling refraction characteristics of silicon nitride film deposited in a SiH4-NH3-N2 plasma using neural network,” IEEE Trans. Plasma Sci. 31(3), 317–323 (2003).
[Crossref]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]
T. Ning, H. Pietarinen, O. Hyvärinen, R. Kumar, T. Kaplas, M. Kauranen, and G. Genty, “Efficient second-harmonic generation in silicon nitride resonant waveguide gratings,” Opt. Lett. 37(20), 4269–4271 (2012).
[Crossref]
[PubMed]
D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96(6), 061101 (2010).
[Crossref]
K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
[Crossref]
[PubMed]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
F. Stehlin, Y. Bourgin, A. Spangenberg, Y. Jourlin, O. Parriaux, S. Reynaud, F. Wieder, and O. Soppera, “Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography,” Opt. Lett. 37(22), 4651–4653 (2012).
[PubMed]
A. Saari, G. Genty, M. Siltanen, P. Karvinen, P. Vahimaa, M. Kuittinen, and M. Kauranen, “Giant enhancement of second-harmonic generation in multiple diffraction orders from sub-wavelength resonant waveguide grating,” Opt. Express 18(12), 12298–12303 (2010).
[Crossref]
[PubMed]
M. Siltanen, S. Leivo, P. Voima, M. Kauranen, P. Karvinen, P. Vahimaa, and M. Kuittinen, “Strong enhancement of second-harmonic generation in all-dielectric resonant waveguide grating,” Appl. Phys. Lett. 91(11), 111109 (2007).
[Crossref]
P. Genevet, J. P. Tetienne, E. Gatzogiannis, R. Blanchard, M. A. Kats, M. O. Scully, and F. Capasso, “Large enhancement of nonlinear optical phenomena by plasmonic nanocavity gratings,” Nano Lett. 10(12), 4880–4883 (2010).
[Crossref]
[PubMed]
T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]
T. Ning, H. Pietarinen, O. Hyvärinen, R. Kumar, T. Kaplas, M. Kauranen, and G. Genty, “Efficient second-harmonic generation in silicon nitride resonant waveguide gratings,” Opt. Lett. 37(20), 4269–4271 (2012).
[Crossref]
[PubMed]
A. Saari, G. Genty, M. Siltanen, P. Karvinen, P. Vahimaa, M. Kuittinen, and M. Kauranen, “Giant enhancement of second-harmonic generation in multiple diffraction orders from sub-wavelength resonant waveguide grating,” Opt. Express 18(12), 12298–12303 (2010).
[Crossref]
[PubMed]
M. Siltanen, S. Leivo, P. Voima, M. Kauranen, P. Karvinen, P. Vahimaa, and M. Kuittinen, “Strong enhancement of second-harmonic generation in all-dielectric resonant waveguide grating,” Appl. Phys. Lett. 91(11), 111109 (2007).
[Crossref]
J. J. Maki, M. Kauranen, and A. Persoons, “Surface second-harmonic generation from chiral materials,” Phys. Rev. B Condens. Matter 51(3), 1425–1434 (1995).
[Crossref]
[PubMed]
B. Kim, S. Han, T. Kim, B. Kim, and I. Shim, “Modeling refraction characteristics of silicon nitride film deposited in a SiH4-NH3-N2 plasma using neural network,” IEEE Trans. Plasma Sci. 31(3), 317–323 (2003).
[Crossref]
B. Kim, S. Han, T. Kim, B. Kim, and I. Shim, “Modeling refraction characteristics of silicon nitride film deposited in a SiH4-NH3-N2 plasma using neural network,” IEEE Trans. Plasma Sci. 31(3), 317–323 (2003).
[Crossref]
B. Kim, S. Han, T. Kim, B. Kim, and I. Shim, “Modeling refraction characteristics of silicon nitride film deposited in a SiH4-NH3-N2 plasma using neural network,” IEEE Trans. Plasma Sci. 31(3), 317–323 (2003).
[Crossref]
J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4(8), 535–544 (2010).
[Crossref]
J. L. Dominguez-Juarez, G. Kozyreff, and J. Martorell, “Whispering gallery microresonators for second harmonic light generation from a low number of small molecules,” Nat Commun 2, 254 (2011).
[Crossref]
[PubMed]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
A. Saari, G. Genty, M. Siltanen, P. Karvinen, P. Vahimaa, M. Kuittinen, and M. Kauranen, “Giant enhancement of second-harmonic generation in multiple diffraction orders from sub-wavelength resonant waveguide grating,” Opt. Express 18(12), 12298–12303 (2010).
[Crossref]
[PubMed]
M. Siltanen, S. Leivo, P. Voima, M. Kauranen, P. Karvinen, P. Vahimaa, and M. Kuittinen, “Strong enhancement of second-harmonic generation in all-dielectric resonant waveguide grating,” Appl. Phys. Lett. 91(11), 111109 (2007).
[Crossref]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
M. Siltanen, S. Leivo, P. Voima, M. Kauranen, P. Karvinen, P. Vahimaa, and M. Kuittinen, “Strong enhancement of second-harmonic generation in all-dielectric resonant waveguide grating,” Appl. Phys. Lett. 91(11), 111109 (2007).
[Crossref]
J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4(8), 535–544 (2010).
[Crossref]
R. Halir, Y. Okawachi, J. S. Levy, M. A. Foster, M. Lipson, and A. L. Gaeta, “Ultrabroadband supercontinuum generation in a CMOS-compatible platform,” Opt. Lett. 37(10), 1685–1687 (2012).
[Crossref]
[PubMed]
J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson, “Harmonic generation in silicon nitride ring resonators,” Opt. Express 19(12), 11415–11421 (2011).
[Crossref]
[PubMed]
J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]
R. Halir, Y. Okawachi, J. S. Levy, M. A. Foster, M. Lipson, and A. L. Gaeta, “Ultrabroadband supercontinuum generation in a CMOS-compatible platform,” Opt. Lett. 37(10), 1685–1687 (2012).
[Crossref]
[PubMed]
J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson, “Harmonic generation in silicon nitride ring resonators,” Opt. Express 19(12), 11415–11421 (2011).
[Crossref]
[PubMed]
J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
J. J. Maki, M. Kauranen, and A. Persoons, “Surface second-harmonic generation from chiral materials,” Phys. Rev. B Condens. Matter 51(3), 1425–1434 (1995).
[Crossref]
[PubMed]
J. L. Dominguez-Juarez, G. Kozyreff, and J. Martorell, “Whispering gallery microresonators for second harmonic light generation from a low number of small molecules,” Nat Commun 2, 254 (2011).
[Crossref]
[PubMed]
S. Minissale, S. Yerci, and L. Nero, “Nonlinear optical properties of low temperature annealed silicon-rich oxide and silicon-rich nitride materials for silicon photonics,” Appl. Phys. Lett. 100(2), 021109 (2012).
[Crossref]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
S. Minissale, S. Yerci, and L. Nero, “Nonlinear optical properties of low temperature annealed silicon-rich oxide and silicon-rich nitride materials for silicon photonics,” Appl. Phys. Lett. 100(2), 021109 (2012).
[Crossref]
T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]
T. Ning, H. Pietarinen, O. Hyvärinen, R. Kumar, T. Kaplas, M. Kauranen, and G. Genty, “Efficient second-harmonic generation in silicon nitride resonant waveguide gratings,” Opt. Lett. 37(20), 4269–4271 (2012).
[Crossref]
[PubMed]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
F. Stehlin, Y. Bourgin, A. Spangenberg, Y. Jourlin, O. Parriaux, S. Reynaud, F. Wieder, and O. Soppera, “Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography,” Opt. Lett. 37(22), 4651–4653 (2012).
[PubMed]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
J. J. Maki, M. Kauranen, and A. Persoons, “Surface second-harmonic generation from chiral materials,” Phys. Rev. B Condens. Matter 51(3), 1425–1434 (1995).
[Crossref]
[PubMed]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref]
[PubMed]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]
T. Ning, H. Pietarinen, O. Hyvärinen, R. Kumar, T. Kaplas, M. Kauranen, and G. Genty, “Efficient second-harmonic generation in silicon nitride resonant waveguide gratings,” Opt. Lett. 37(20), 4269–4271 (2012).
[Crossref]
[PubMed]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref]
[PubMed]
S. V. Deshpande, E. Gulari, S. W. Brown, and S. C. Rand, “Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition,” J. Appl. Phys. 77(12), 6534–6541 (1995).
[Crossref]
F. Stehlin, Y. Bourgin, A. Spangenberg, Y. Jourlin, O. Parriaux, S. Reynaud, F. Wieder, and O. Soppera, “Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography,” Opt. Lett. 37(22), 4651–4653 (2012).
[PubMed]
P. Genevet, J. P. Tetienne, E. Gatzogiannis, R. Blanchard, M. A. Kats, M. O. Scully, and F. Capasso, “Large enhancement of nonlinear optical phenomena by plasmonic nanocavity gratings,” Nano Lett. 10(12), 4880–4883 (2010).
[Crossref]
[PubMed]
B. Kim, S. Han, T. Kim, B. Kim, and I. Shim, “Modeling refraction characteristics of silicon nitride film deposited in a SiH4-NH3-N2 plasma using neural network,” IEEE Trans. Plasma Sci. 31(3), 317–323 (2003).
[Crossref]
A. Saari, G. Genty, M. Siltanen, P. Karvinen, P. Vahimaa, M. Kuittinen, and M. Kauranen, “Giant enhancement of second-harmonic generation in multiple diffraction orders from sub-wavelength resonant waveguide grating,” Opt. Express 18(12), 12298–12303 (2010).
[Crossref]
[PubMed]
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