Third-harmonic UV generation in silicon nitride nanostructures

Tingyin Ning; Outi Hyvärinen; Henna Pietarinen; Tommi Kaplas; Martti Kauranen; Göery Genty

doi:10.1364/OE.21.002012

Third-harmonic UV generation in silicon nitride nanostructures

Tingyin Ning, Outi Hyvärinen, Henna Pietarinen, Tommi Kaplas, Martti Kauranen, and Göery Genty

Optics Express
Vol. 21,
Issue 2,
pp. 2012-2017
(2013)
•https://doi.org/10.1364/OE.21.002012

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Tingyin Ning, Outi Hyvärinen, Henna Pietarinen, Tommi Kaplas, Martti Kauranen, and Göery Genty, "Third-harmonic UV generation in silicon nitride nanostructures," Opt. Express 21, 2012-2017 (2013)

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Related Topics
Table of Contents Category
- Nonlinear Optics
Optics & Photonics Topics
?

The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Diffraction gratings (050.1950)
- Resonance domain (050.5745)
- Harmonic generation and mixing (190.2620)
- Subwavelength structures, nanostructures (310.6628)

About this Article
History
- Original Manuscript: November 29, 2012
- Revised Manuscript: January 9, 2013
- Manuscript Accepted: January 10, 2013
- Published: January 17, 2013

Accessible

Open Access

Abstract

We report on strong UV third-harmonic generation from silicon nitride films and resonant waveguide gratings. We determine the absolute value of third-order susceptibility of silicon nitride at wavelength of 1064 nm to be χ⁽³⁾ (-3ω,ω,ω,ω) = (2.8 ± 0.6) × 10⁻²⁰ m²/V², which is two orders of magnitude larger than that of fused silica. The third-harmonic generation is further enhanced by a factor of 2000 by fabricating a resonant waveguide grating onto a silicon nitride film. Our results extend the operating range of CMOS-compatible nonlinear materials to the UV spectral regime.

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References

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R. W. Boyd, Nonlinear Optics (Academic Press, San Diego, CA, 2003).
J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4(8), 535–544 (2010).
[Crossref]
R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref] [PubMed]
M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref] [PubMed]
S. V. Andersen and K. Pedersen, “Second-harmonic generation from electron beam deposited SiO films,” Opt. Express 20(13), 13857–13869 (2012).
[Crossref] [PubMed]
J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]
D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96(6), 061101 (2010).
[Crossref]
J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson, “Harmonic generation in silicon nitride ring resonators,” Opt. Express 19(12), 11415–11421 (2011).
[Crossref] [PubMed]
R. Halir, Y. Okawachi, J. S. Levy, M. A. Foster, M. Lipson, and A. L. Gaeta, “Ultrabroadband supercontinuum generation in a CMOS-compatible platform,” Opt. Lett. 37(10), 1685–1687 (2012).
[Crossref] [PubMed]
P. N. Prasad, Introduction to Biophotonics (John Wiley & Sons, 2003).
F. Stehlin, Y. Bourgin, A. Spangenberg, Y. Jourlin, O. Parriaux, S. Reynaud, F. Wieder, and O. Soppera, “Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography,” Opt. Lett. 37(22), 4651–4653 (2012).
[PubMed]
S. V. Deshpande, E. Gulari, S. W. Brown, and S. C. Rand, “Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition,” J. Appl. Phys. 77(12), 6534–6541 (1995).
[Crossref]
B. Kim, S. Han, T. Kim, B. Kim, and I. Shim, “Modeling refraction characteristics of silicon nitride film deposited in a SiH4-NH3-N2 plasma using neural network,” IEEE Trans. Plasma Sci. 31(3), 317–323 (2003).
[Crossref]
K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
[Crossref] [PubMed]
S. Minissale, S. Yerci, and L. Nero, “Nonlinear optical properties of low temperature annealed silicon-rich oxide and silicon-rich nitride materials for silicon photonics,” Appl. Phys. Lett. 100(2), 021109 (2012).
[Crossref]
T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]
T. Ning, H. Pietarinen, O. Hyvärinen, R. Kumar, T. Kaplas, M. Kauranen, and G. Genty, “Efficient second-harmonic generation in silicon nitride resonant waveguide gratings,” Opt. Lett. 37(20), 4269–4271 (2012).
[Crossref] [PubMed]
P. Genevet, J. P. Tetienne, E. Gatzogiannis, R. Blanchard, M. A. Kats, M. O. Scully, and F. Capasso, “Large enhancement of nonlinear optical phenomena by plasmonic nanocavity gratings,” Nano Lett. 10(12), 4880–4883 (2010).
[Crossref] [PubMed]
N. Talebi, M. Shahabadi, W. Khunsin, and R. Vogelgesang, “Plasmonic grating as a nonlinear converter-coupler,” Opt. Express 20(2), 1392–1405 (2012).
[Crossref] [PubMed]
M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12(5), 1068–1076 (1995).
[Crossref]
L. Li, “Use of Fourier series in the analysis of discontinuous periodic structures,” J. Opt. Soc. Am. A 13(9), 1870–1876 (1996).
[Crossref]
J. E. Sipe, “New Green-function formalism for surface optics,” J. Opt. Soc. Am. A 4(4), 481–489 (1987).
[Crossref]
J. J. Maki, M. Kauranen, and A. Persoons, “Surface second-harmonic generation from chiral materials,” Phys. Rev. B Condens. Matter 51(3), 1425–1434 (1995).
[Crossref] [PubMed]
U. Gubler and C. Bosshard, “Optical third-harmonic generation of fused silica in gas atmosphere: Absolute value of the third-order nonlinear optical susceptibility χ(3),” Phys. Rev. B 61(16), 10702–10710 (2000).
[Crossref]
J. L. Dominguez-Juarez, G. Kozyreff, and J. Martorell, “Whispering gallery microresonators for second harmonic light generation from a low number of small molecules,” Nat Commun 2, 254 (2011).
[Crossref] [PubMed]
J. P. Mondia, H. M. van Driel, W. Jiang, A. R. Cowan, and J. F. Young, “Enhanced second-harmonic generation from planar photonic crystals,” Opt. Lett. 28(24), 2500–2502 (2003).
[Crossref] [PubMed]
M. Siltanen, S. Leivo, P. Voima, M. Kauranen, P. Karvinen, P. Vahimaa, and M. Kuittinen, “Strong enhancement of second-harmonic generation in all-dielectric resonant waveguide grating,” Appl. Phys. Lett. 91(11), 111109 (2007).
[Crossref]
A. Saari, G. Genty, M. Siltanen, P. Karvinen, P. Vahimaa, M. Kuittinen, and M. Kauranen, “Giant enhancement of second-harmonic generation in multiple diffraction orders from sub-wavelength resonant waveguide grating,” Opt. Express 18(12), 12298–12303 (2010).
[Crossref] [PubMed]

2012 (7)

S. V. Andersen and K. Pedersen, “Second-harmonic generation from electron beam deposited SiO films,” Opt. Express 20(13), 13857–13869 (2012).
[Crossref] [PubMed]

R. Halir, Y. Okawachi, J. S. Levy, M. A. Foster, M. Lipson, and A. L. Gaeta, “Ultrabroadband supercontinuum generation in a CMOS-compatible platform,” Opt. Lett. 37(10), 1685–1687 (2012).
[Crossref] [PubMed]

F. Stehlin, Y. Bourgin, A. Spangenberg, Y. Jourlin, O. Parriaux, S. Reynaud, F. Wieder, and O. Soppera, “Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography,” Opt. Lett. 37(22), 4651–4653 (2012).
[PubMed]

S. Minissale, S. Yerci, and L. Nero, “Nonlinear optical properties of low temperature annealed silicon-rich oxide and silicon-rich nitride materials for silicon photonics,” Appl. Phys. Lett. 100(2), 021109 (2012).
[Crossref]

T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]

T. Ning, H. Pietarinen, O. Hyvärinen, R. Kumar, T. Kaplas, M. Kauranen, and G. Genty, “Efficient second-harmonic generation in silicon nitride resonant waveguide gratings,” Opt. Lett. 37(20), 4269–4271 (2012).
[Crossref] [PubMed]

N. Talebi, M. Shahabadi, W. Khunsin, and R. Vogelgesang, “Plasmonic grating as a nonlinear converter-coupler,” Opt. Express 20(2), 1392–1405 (2012).
[Crossref] [PubMed]

2011 (3)

M. Cazzanelli, F. Bianco, E. Borga, G. Pucker, M. Ghulinyan, E. Degoli, E. Luppi, V. Véniard, S. Ossicini, D. Modotto, S. Wabnitz, R. Pierobon, and L. Pavesi, “Second-harmonic generation in silicon waveguides strained by silicon nitride,” Nat. Mater. 11(2), 148–154 (2011).
[Crossref] [PubMed]

J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson, “Harmonic generation in silicon nitride ring resonators,” Opt. Express 19(12), 11415–11421 (2011).
[Crossref] [PubMed]

J. L. Dominguez-Juarez, G. Kozyreff, and J. Martorell, “Whispering gallery microresonators for second harmonic light generation from a low number of small molecules,” Nat Commun 2, 254 (2011).
[Crossref] [PubMed]

2010 (5)

A. Saari, G. Genty, M. Siltanen, P. Karvinen, P. Vahimaa, M. Kuittinen, and M. Kauranen, “Giant enhancement of second-harmonic generation in multiple diffraction orders from sub-wavelength resonant waveguide grating,” Opt. Express 18(12), 12298–12303 (2010).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96(6), 061101 (2010).
[Crossref]

J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4(8), 535–544 (2010).
[Crossref]

P. Genevet, J. P. Tetienne, E. Gatzogiannis, R. Blanchard, M. A. Kats, M. O. Scully, and F. Capasso, “Large enhancement of nonlinear optical phenomena by plasmonic nanocavity gratings,” Nano Lett. 10(12), 4880–4883 (2010).
[Crossref] [PubMed]

2008 (1)

K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
[Crossref] [PubMed]

2007 (1)

M. Siltanen, S. Leivo, P. Voima, M. Kauranen, P. Karvinen, P. Vahimaa, and M. Kuittinen, “Strong enhancement of second-harmonic generation in all-dielectric resonant waveguide grating,” Appl. Phys. Lett. 91(11), 111109 (2007).
[Crossref]

2006 (1)

R. S. Jacobsen, K. N. Andersen, P. I. Borel, J. Fage-Pedersen, L. H. Frandsen, O. Hansen, M. Kristensen, A. V. Lavrinenko, G. Moulin, H. Ou, C. Peucheret, B. Zsigri, and A. Bjarklev, “Strained silicon as a new electro-optic material,” Nature 441(7090), 199–202 (2006).
[Crossref] [PubMed]

2003 (2)

B. Kim, S. Han, T. Kim, B. Kim, and I. Shim, “Modeling refraction characteristics of silicon nitride film deposited in a SiH4-NH3-N2 plasma using neural network,” IEEE Trans. Plasma Sci. 31(3), 317–323 (2003).
[Crossref]

J. P. Mondia, H. M. van Driel, W. Jiang, A. R. Cowan, and J. F. Young, “Enhanced second-harmonic generation from planar photonic crystals,” Opt. Lett. 28(24), 2500–2502 (2003).
[Crossref] [PubMed]

2000 (1)

U. Gubler and C. Bosshard, “Optical third-harmonic generation of fused silica in gas atmosphere: Absolute value of the third-order nonlinear optical susceptibility χ(3),” Phys. Rev. B 61(16), 10702–10710 (2000).
[Crossref]

1996 (1)

L. Li, “Use of Fourier series in the analysis of discontinuous periodic structures,” J. Opt. Soc. Am. A 13(9), 1870–1876 (1996).
[Crossref]

1995 (3)

J. J. Maki, M. Kauranen, and A. Persoons, “Surface second-harmonic generation from chiral materials,” Phys. Rev. B Condens. Matter 51(3), 1425–1434 (1995).
[Crossref] [PubMed]

M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12(5), 1068–1076 (1995).
[Crossref]

S. V. Deshpande, E. Gulari, S. W. Brown, and S. C. Rand, “Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition,” J. Appl. Phys. 77(12), 6534–6541 (1995).
[Crossref]

1987 (1)

J. E. Sipe, “New Green-function formalism for surface optics,” J. Opt. Soc. Am. A 4(4), 481–489 (1987).
[Crossref]

Alic, N.

Andersen, K. N.

Andersen, S. V.

S. V. Andersen and K. Pedersen, “Second-harmonic generation from electron beam deposited SiO films,” Opt. Express 20(13), 13857–13869 (2012).
[Crossref] [PubMed]

Bianco, F.

Bjarklev, A.

Blanchard, R.

Borel, P. I.

Borga, E.

Bosshard, C.

Bourgin, Y.

Brown, S. W.

Capasso, F.

Cazzanelli, M.

Cowan, A. R.

Degoli, E.

Deshpande, S. V.

Dominguez-Juarez, J. L.

Fage-Pedersen, J.

Fainman, Y.

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96(6), 061101 (2010).
[Crossref]

Foster, M. A.

J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson, “Harmonic generation in silicon nitride ring resonators,” Opt. Express 19(12), 11415–11421 (2011).
[Crossref] [PubMed]

Frandsen, L. H.

Freude, W.

J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4(8), 535–544 (2010).
[Crossref]

Gaeta, A. L.

J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson, “Harmonic generation in silicon nitride ring resonators,” Opt. Express 19(12), 11415–11421 (2011).
[Crossref] [PubMed]

Gatzogiannis, E.

Gaylord, T. K.

Genevet, P.

Genty, G.

T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]

Ghulinyan, M.

Gondarenko, A.

Grann, E. B.

Gubler, U.

Gulari, E.

Halir, R.

Han, S.

Hansen, O.

Hyvärinen, O.

T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]

Ikeda, K.

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96(6), 061101 (2010).
[Crossref]

Jacobsen, R. S.

Jiang, W.

Jourlin, Y.

Kaplas, T.

Karvinen, P.

Kats, M. A.

Kauranen, M.

T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]

J. J. Maki, M. Kauranen, and A. Persoons, “Surface second-harmonic generation from chiral materials,” Phys. Rev. B Condens. Matter 51(3), 1425–1434 (1995).
[Crossref] [PubMed]

Khunsin, W.

N. Talebi, M. Shahabadi, W. Khunsin, and R. Vogelgesang, “Plasmonic grating as a nonlinear converter-coupler,” Opt. Express 20(2), 1392–1405 (2012).
[Crossref] [PubMed]

Kim, B.

Kim, T.

Koos, C.

J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4(8), 535–544 (2010).
[Crossref]

Kozyreff, G.

Kristensen, M.

Kuittinen, M.

Kumar, R.

Lavrinenko, A. V.

Leivo, S.

Leuthold, J.

J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4(8), 535–544 (2010).
[Crossref]

Luppi, E.

Maki, J. J.

J. J. Maki, M. Kauranen, and A. Persoons, “Surface second-harmonic generation from chiral materials,” Phys. Rev. B Condens. Matter 51(3), 1425–1434 (1995).
[Crossref] [PubMed]

Martorell, J.

Minissale, S.

Modotto, D.

Moharam, M. G.

Mondia, J. P.

Moulin, G.

Nero, L.

Ning, T.

T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]

Okawachi, Y.

Ossicini, S.

Ou, H.

Parriaux, O.

Pavesi, L.

Pedersen, K.

S. V. Andersen and K. Pedersen, “Second-harmonic generation from electron beam deposited SiO films,” Opt. Express 20(13), 13857–13869 (2012).
[Crossref] [PubMed]

Persoons, A.

J. J. Maki, M. Kauranen, and A. Persoons, “Surface second-harmonic generation from chiral materials,” Phys. Rev. B Condens. Matter 51(3), 1425–1434 (1995).
[Crossref] [PubMed]

Peucheret, C.

Pierobon, R.

Pietarinen, H.

T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]

Pommet, D. A.

Pucker, G.

Rand, S. C.

Reynaud, S.

Saari, A.

Saperstein, R. E.

Scully, M. O.

Shahabadi, M.

N. Talebi, M. Shahabadi, W. Khunsin, and R. Vogelgesang, “Plasmonic grating as a nonlinear converter-coupler,” Opt. Express 20(2), 1392–1405 (2012).
[Crossref] [PubMed]

Shim, I.

Siltanen, M.

Simonen, J.

T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]

Sipe, J. E.

J. E. Sipe, “New Green-function formalism for surface optics,” J. Opt. Soc. Am. A 4(4), 481–489 (1987).
[Crossref]

Soppera, O.

Spangenberg, A.

Stehlin, F.

Sun, P. C.

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96(6), 061101 (2010).
[Crossref]

Talebi, N.

N. Talebi, M. Shahabadi, W. Khunsin, and R. Vogelgesang, “Plasmonic grating as a nonlinear converter-coupler,” Opt. Express 20(2), 1392–1405 (2012).
[Crossref] [PubMed]

Tan, D. T. H.

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96(6), 061101 (2010).
[Crossref]

Tetienne, J. P.

Turner-Foster, A. C.

Vahimaa, P.

van Driel, H. M.

Véniard, V.

Vogelgesang, R.

N. Talebi, M. Shahabadi, W. Khunsin, and R. Vogelgesang, “Plasmonic grating as a nonlinear converter-coupler,” Opt. Express 20(2), 1392–1405 (2012).
[Crossref] [PubMed]

Voima, P.

Wabnitz, S.

Wieder, F.

Yerci, S.

Young, J. F.

Zsigri, B.

Appl. Phys. Lett. (4)

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96(6), 061101 (2010).
[Crossref]

T. Ning, H. Pietarinen, O. Hyvärinen, J. Simonen, G. Genty, and M. Kauranen, “Strong second-harmonic generation in silicon nitride films,” Appl. Phys. Lett. 100(16), 161902 (2012).
[Crossref]

IEEE Trans. Plasma Sci. (1)

J. Appl. Phys. (1)

J. Opt. Soc. Am. A (3)

J. E. Sipe, “New Green-function formalism for surface optics,” J. Opt. Soc. Am. A 4(4), 481–489 (1987).
[Crossref]

L. Li, “Use of Fourier series in the analysis of discontinuous periodic structures,” J. Opt. Soc. Am. A 13(9), 1870–1876 (1996).
[Crossref]

Nano Lett. (1)

Nat Commun (1)

Nat. Mater. (1)

Nat. Photonics (2)

J. Leuthold, C. Koos, and W. Freude, “Nonlinear silicon photonics,” Nat. Photonics 4(8), 535–544 (2010).
[Crossref]

Nature (1)

Opt. Express (5)

S. V. Andersen and K. Pedersen, “Second-harmonic generation from electron beam deposited SiO films,” Opt. Express 20(13), 13857–13869 (2012).
[Crossref] [PubMed]

J. S. Levy, M. A. Foster, A. L. Gaeta, and M. Lipson, “Harmonic generation in silicon nitride ring resonators,” Opt. Express 19(12), 11415–11421 (2011).
[Crossref] [PubMed]

N. Talebi, M. Shahabadi, W. Khunsin, and R. Vogelgesang, “Plasmonic grating as a nonlinear converter-coupler,” Opt. Express 20(2), 1392–1405 (2012).
[Crossref] [PubMed]

Opt. Lett. (4)

Phys. Rev. B (1)

Phys. Rev. B Condens. Matter (1)

J. J. Maki, M. Kauranen, and A. Persoons, “Surface second-harmonic generation from chiral materials,” Phys. Rev. B Condens. Matter 51(3), 1425–1434 (1995).
[Crossref] [PubMed]

Other (2)

R. W. Boyd, Nonlinear Optics (Academic Press, San Diego, CA, 2003).

P. N. Prasad, Introduction to Biophotonics (John Wiley & Sons, 2003).

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Fig. 1

Optical setup used for the THG measurement. M, mirror; L, Lens; GP, Glan prism; WP, wave-plate; LP, long-pass filter; SP, short-pass filter; IF, interference filter; RS, rotation stage, and PMT, photomultiplier tube. The Cartesian coordinate system (x, y, z) associated with the samples is also shown.

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Fig. 2

Experimentally measured polarization-dependent THG Maker-fringe patterns, p_in-p_out (black circle) and s_in-s_out (blue square), from the reference fused silica and SiN samples under the same condition. The solid lines (black and blue) indicate theoretical fits. There is no detectable signal for the polarization configuration p_in-s_out and s_in-p_out.

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Fig. 3

(a) Scanning electron microscope image of the fabricated RWG and (b) schematic image of cross-section of the SiN RWG sample. (c) shows the calculated square of the amplitude of the electric field |E/E₀|² normalized to the incident field E₀ in the vicinity of the RWG structure at resonant angle.

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Fig. 4

(a) Experimentally measured dependence of the linear transmission and of the THG intensity on the angle of incidence for different fundamental laser powers. The inset shows the cubic relation between the THG intensity and fundamental laser power for the SiN RWG and film. (b) p and s-polarized THG intensities as a function of the polarization of the fundamental beam (modulated by a half wave plate (HWP)). The states of polarization p and s are indicated.

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Abstract

References

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