Abstract

Silicon nitride (Si3N4) ring resonators are critical for a variety of photonic devices. However the intrinsically high film stress of silicon nitride has limited both the optical confinement and quality factor (Q) of ring resonators. We show that stress in Si3N4 films can be overcome by introducing mechanical trenches for isolating photonic devices from propagating cracks. We demonstrate a Si3N4 ring resonator with an intrinsic quality factor of 7 million, corresponding to a propagation loss of 4.2 dB/m. This is the highest quality factor reported to date for high confinement Si3N4 ring resonators in the 1550 nm wavelength range.

© 2013 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron.6(6), 1312–1317 (2000).
    [CrossRef]
  2. M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
    [CrossRef]
  3. R. Soref, “The Past, Present, and Future of Silicon Photonics,” IEEE J. Sel. Top. Quantum Electron.12(6), 1678–1687 (2006).
    [CrossRef]
  4. T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-Based Optical Frequency Combs,” Science332(6029), 555–559 (2011).
    [CrossRef] [PubMed]
  5. J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4(1), 37–40 (2010).
    [CrossRef]
  6. P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature450(7173), 1214–1217 (2007).
    [CrossRef] [PubMed]
  7. T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature416(6877), 233–237 (2002).
    [CrossRef] [PubMed]
  8. F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057–4059 (2002).
    [CrossRef]
  9. S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature445(7128), 627–630 (2007).
    [CrossRef] [PubMed]
  10. C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
    [CrossRef] [PubMed]
  11. M. Sumetsky, R. S. Windeler, Y. Dulashko, and X. Fan, “Optical liquid ring resonator sensor,” Opt. Express15(22), 14376–14381 (2007).
    [CrossRef] [PubMed]
  12. E. Shah Hosseini, S. Yegnanarayanan, A. H. Atabaki, M. Soltani, and A. Adibi, “High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range,” Opt. Express17(17), 14543–14551 (2009).
    [CrossRef] [PubMed]
  13. M.-C. Tien, J. F. Bauters, M. J. R. Heck, D. T. Spencer, D. J. Blumenthal, and J. E. Bowers, “Ultra-high quality factor planar Si3N4 ring resonators on Si substrates,” Opt. Express19(14), 13551–13556 (2011).
    [CrossRef] [PubMed]
  14. A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high Q ring resonator,” Opt. Express17(14), 11366–11370 (2009).
    [CrossRef] [PubMed]
  15. K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature485(7397), 221–224 (2012).
    [CrossRef] [PubMed]
  16. P. Rabiei, W. H. Steier, C. Zhang, and L. R. Dalton, “Polymer micro-ring filters and modulators,” J. Lightwave Technol.20(11), 1968–1975 (2002).
    [CrossRef]
  17. M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett.32(20), 2954–2956 (2007).
    [CrossRef] [PubMed]
  18. Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett.36(17), 3398–3400 (2011).
    [CrossRef] [PubMed]

2012

K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature485(7397), 221–224 (2012).
[CrossRef] [PubMed]

2011

2010

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4(1), 37–40 (2010).
[CrossRef]

2009

2008

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

2007

M. Sumetsky, R. S. Windeler, Y. Dulashko, and X. Fan, “Optical liquid ring resonator sensor,” Opt. Express15(22), 14376–14381 (2007).
[CrossRef] [PubMed]

M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett.32(20), 2954–2956 (2007).
[CrossRef] [PubMed]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature450(7173), 1214–1217 (2007).
[CrossRef] [PubMed]

S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature445(7128), 627–630 (2007).
[CrossRef] [PubMed]

2006

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
[CrossRef]

R. Soref, “The Past, Present, and Future of Silicon Photonics,” IEEE J. Sel. Top. Quantum Electron.12(6), 1678–1687 (2006).
[CrossRef]

2002

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature416(6877), 233–237 (2002).
[CrossRef] [PubMed]

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057–4059 (2002).
[CrossRef]

P. Rabiei, W. H. Steier, C. Zhang, and L. R. Dalton, “Polymer micro-ring filters and modulators,” J. Lightwave Technol.20(11), 1968–1975 (2002).
[CrossRef]

2000

D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron.6(6), 1312–1317 (2000).
[CrossRef]

Adibi, A.

Albonesi, D. H.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
[CrossRef]

Arcizet, O.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature450(7173), 1214–1217 (2007).
[CrossRef] [PubMed]

Arnold, S.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057–4059 (2002).
[CrossRef]

Atabaki, A. H.

Bauters, J. F.

Benedick, A. J.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

Blumenthal, D. J.

Borselli, M.

Bowers, J. E.

Braun, D.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057–4059 (2002).
[CrossRef]

Chen, G.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
[CrossRef]

Chen, H.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
[CrossRef]

Dalton, L. R.

Del’Haye, P.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature450(7173), 1214–1217 (2007).
[CrossRef] [PubMed]

Diddams, S. A.

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-Based Optical Frequency Combs,” Science332(6029), 555–559 (2011).
[CrossRef] [PubMed]

S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature445(7128), 627–630 (2007).
[CrossRef] [PubMed]

Dulashko, Y.

Fan, X.

Fauchet, P. M.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
[CrossRef]

Fendel, P.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

Foster, M. A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4(1), 37–40 (2010).
[CrossRef]

Friedman, E. G.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
[CrossRef]

Gaeta, A. L.

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett.36(17), 3398–3400 (2011).
[CrossRef] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4(1), 37–40 (2010).
[CrossRef]

Glenday, A. G.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

Gondarenko, A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4(1), 37–40 (2010).
[CrossRef]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high Q ring resonator,” Opt. Express17(14), 11366–11370 (2009).
[CrossRef] [PubMed]

Hänsch, T. W.

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature416(6877), 233–237 (2002).
[CrossRef] [PubMed]

Haurylau, M.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
[CrossRef]

Heck, M. J. R.

Hollberg, L.

S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature445(7128), 627–630 (2007).
[CrossRef] [PubMed]

Holzwarth, R.

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-Based Optical Frequency Combs,” Science332(6029), 555–559 (2011).
[CrossRef] [PubMed]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature450(7173), 1214–1217 (2007).
[CrossRef] [PubMed]

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature416(6877), 233–237 (2002).
[CrossRef] [PubMed]

Johnson, T. J.

Kärtner, F. X.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

Khoshsima, M.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057–4059 (2002).
[CrossRef]

Kippenberg, T. J.

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-Based Optical Frequency Combs,” Science332(6029), 555–559 (2011).
[CrossRef] [PubMed]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature450(7173), 1214–1217 (2007).
[CrossRef] [PubMed]

Ko, S. H.

K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature485(7397), 221–224 (2012).
[CrossRef] [PubMed]

Levy, J. S.

Li, C.-H.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

Libchaber, A.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057–4059 (2002).
[CrossRef]

Lipson, M.

Mbele, V.

S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature445(7128), 627–630 (2007).
[CrossRef] [PubMed]

Miller, D. A. B.

D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron.6(6), 1312–1317 (2000).
[CrossRef]

Nam, K. H.

K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature485(7397), 221–224 (2012).
[CrossRef] [PubMed]

Nelson, N. A.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
[CrossRef]

Okawachi, Y.

Painter, O.

Park, I. H.

K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature485(7397), 221–224 (2012).
[CrossRef] [PubMed]

Phillips, D. F.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

Rabiei, P.

Saha, K.

Sasselov, D.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

Schliesser, A.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature450(7173), 1214–1217 (2007).
[CrossRef] [PubMed]

Shah Hosseini, E.

Soltani, M.

Soref, R.

R. Soref, “The Past, Present, and Future of Silicon Photonics,” IEEE J. Sel. Top. Quantum Electron.12(6), 1678–1687 (2006).
[CrossRef]

Spencer, D. T.

Steier, W. H.

Sumetsky, M.

Szentgyorgyi, A.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

Teraoka, I.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057–4059 (2002).
[CrossRef]

Tien, M.-C.

Turner-Foster, A. C.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4(1), 37–40 (2010).
[CrossRef]

Udem, T.

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature416(6877), 233–237 (2002).
[CrossRef] [PubMed]

Vollmer, F.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057–4059 (2002).
[CrossRef]

Walsworth, R. L.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

Wen, Y. H.

Wilken, T.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature450(7173), 1214–1217 (2007).
[CrossRef] [PubMed]

Windeler, R. S.

Yegnanarayanan, S.

Zhang, C.

Zhang, J.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
[CrossRef]

Appl. Phys. Lett.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057–4059 (2002).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron.6(6), 1312–1317 (2000).
[CrossRef]

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron.12(6), 1699–1705 (2006).
[CrossRef]

R. Soref, “The Past, Present, and Future of Silicon Photonics,” IEEE J. Sel. Top. Quantum Electron.12(6), 1678–1687 (2006).
[CrossRef]

J. Lightwave Technol.

Nat. Photonics

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4(1), 37–40 (2010).
[CrossRef]

Nature

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature450(7173), 1214–1217 (2007).
[CrossRef] [PubMed]

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature416(6877), 233–237 (2002).
[CrossRef] [PubMed]

K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature485(7397), 221–224 (2012).
[CrossRef] [PubMed]

S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature445(7128), 627–630 (2007).
[CrossRef] [PubMed]

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature452(7187), 610–612 (2008).
[CrossRef] [PubMed]

Opt. Express

Opt. Lett.

Science

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-Based Optical Frequency Combs,” Science332(6029), 555–559 (2011).
[CrossRef] [PubMed]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Transverse electric (TE) mode simulations at 1550 nm wavelength for the (a) 400 nm x 1800 nm and (b) 910 nm x 1800 nm waveguides with 71% and 93% modal confinement, respectively. Less of the optical field interacts with the waveguide boundaries for the taller waveguide (b).

Fig. 2
Fig. 2

Microscope images in the dark field showing crack propagation terminating at a trench created with a diamond scribe. The film to the left of these trenches is crack free.

Fig. 3
Fig. 3

Scanning electron microscope (SEM) image of the resonator.

Fig. 4
Fig. 4

(a) Transmission spectrum with the finely scanned resonance outlined in red. (b) Resonance with 36 MHz linewidth corresponding to an intrinsic Q of 7 million.

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

α= 2π n g Q λ 0 = λ 0 QRFSR ,

Metrics