Abstract

Silicon nitride (Si3N4) ring resonators are critical for a variety of photonic devices. However the intrinsically high film stress of silicon nitride has limited both the optical confinement and quality factor (Q) of ring resonators. We show that stress in Si3N4 films can be overcome by introducing mechanical trenches for isolating photonic devices from propagating cracks. We demonstrate a Si3N4 ring resonator with an intrinsic quality factor of 7 million, corresponding to a propagation loss of 4.2 dB/m. This is the highest quality factor reported to date for high confinement Si3N4 ring resonators in the 1550 nm wavelength range.

© 2013 OSA

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References

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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
  5. J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]

2012 (1)

K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature 485(7397), 221–224 (2012).
[Crossref] [PubMed]

2011 (3)

2010 (1)

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

2009 (2)

2008 (1)

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

2007 (4)

M. Sumetsky, R. S. Windeler, Y. Dulashko, and X. Fan, “Optical liquid ring resonator sensor,” Opt. Express 15(22), 14376–14381 (2007).
[Crossref] [PubMed]

M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett. 32(20), 2954–2956 (2007).
[Crossref] [PubMed]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature 445(7128), 627–630 (2007).
[Crossref] [PubMed]

2006 (2)

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006).
[Crossref]

R. Soref, “The Past, Present, and Future of Silicon Photonics,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[Crossref]

2002 (3)

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature 416(6877), 233–237 (2002).
[Crossref] [PubMed]

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[Crossref]

P. Rabiei, W. H. Steier, C. Zhang, and L. R. Dalton, “Polymer micro-ring filters and modulators,” J. Lightwave Technol. 20(11), 1968–1975 (2002).
[Crossref]

2000 (1)

D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron. 6(6), 1312–1317 (2000).
[Crossref]

Adibi, A.

Albonesi, D. H.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006).
[Crossref]

Arcizet, O.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Arnold, S.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[Crossref]

Atabaki, A. H.

Bauters, J. F.

Benedick, A. J.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

Blumenthal, D. J.

Borselli, M.

Bowers, J. E.

Braun, D.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[Crossref]

Chen, G.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006).
[Crossref]

Chen, H.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006).
[Crossref]

Dalton, L. R.

Del’Haye, P.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Diddams, S. A.

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-Based Optical Frequency Combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature 445(7128), 627–630 (2007).
[Crossref] [PubMed]

Dulashko, Y.

Fan, X.

Fauchet, P. M.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006).
[Crossref]

Fendel, P.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

Foster, M. A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Friedman, E. G.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006).
[Crossref]

Gaeta, A. L.

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett. 36(17), 3398–3400 (2011).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Glenday, A. G.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

Gondarenko, A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high Q ring resonator,” Opt. Express 17(14), 11366–11370 (2009).
[Crossref] [PubMed]

Hänsch, T. W.

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature 416(6877), 233–237 (2002).
[Crossref] [PubMed]

Haurylau, M.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006).
[Crossref]

Heck, M. J. R.

Hollberg, L.

S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature 445(7128), 627–630 (2007).
[Crossref] [PubMed]

Holzwarth, R.

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-Based Optical Frequency Combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature 416(6877), 233–237 (2002).
[Crossref] [PubMed]

Johnson, T. J.

Kärtner, F. X.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

Khoshsima, M.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[Crossref]

Kippenberg, T. J.

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-Based Optical Frequency Combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Ko, S. H.

K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature 485(7397), 221–224 (2012).
[Crossref] [PubMed]

Levy, J. S.

Li, C.-H.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

Libchaber, A.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[Crossref]

Lipson, M.

Mbele, V.

S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature 445(7128), 627–630 (2007).
[Crossref] [PubMed]

Miller, D. A. B.

D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron. 6(6), 1312–1317 (2000).
[Crossref]

Nam, K. H.

K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature 485(7397), 221–224 (2012).
[Crossref] [PubMed]

Nelson, N. A.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006).
[Crossref]

Okawachi, Y.

Painter, O.

Park, I. H.

K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature 485(7397), 221–224 (2012).
[Crossref] [PubMed]

Phillips, D. F.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

Rabiei, P.

Saha, K.

Sasselov, D.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

Schliesser, A.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Shah Hosseini, E.

Soltani, M.

Soref, R.

R. Soref, “The Past, Present, and Future of Silicon Photonics,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[Crossref]

Spencer, D. T.

Steier, W. H.

Sumetsky, M.

Szentgyorgyi, A.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

Teraoka, I.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[Crossref]

Tien, M.-C.

Turner-Foster, A. C.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Udem, T.

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature 416(6877), 233–237 (2002).
[Crossref] [PubMed]

Vollmer, F.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[Crossref]

Walsworth, R. L.

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

Wen, Y. H.

Wilken, T.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Windeler, R. S.

Yegnanarayanan, S.

Zhang, C.

Zhang, J.

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006).
[Crossref]

Appl. Phys. Lett. (1)

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett. 80(21), 4057–4059 (2002).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (3)

D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron. 6(6), 1312–1317 (2000).
[Crossref]

M. Haurylau, G. Chen, H. Chen, J. Zhang, N. A. Nelson, D. H. Albonesi, E. G. Friedman, and P. M. Fauchet, “On-Chip Optical Interconnect Roadmap: Challenges and Critical Directions,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1699–1705 (2006).
[Crossref]

R. Soref, “The Past, Present, and Future of Silicon Photonics,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[Crossref]

J. Lightwave Technol. (1)

Nat. Photonics (1)

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Nature (5)

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

T. Udem, R. Holzwarth, and T. W. Hänsch, “Optical frequency metrology,” Nature 416(6877), 233–237 (2002).
[Crossref] [PubMed]

K. H. Nam, I. H. Park, and S. H. Ko, “Patterning by controlled cracking,” Nature 485(7397), 221–224 (2012).
[Crossref] [PubMed]

S. A. Diddams, L. Hollberg, and V. Mbele, “Molecular fingerprinting with the resolved modes of a femtosecond laser frequency comb,” Nature 445(7128), 627–630 (2007).
[Crossref] [PubMed]

C.-H. Li, A. J. Benedick, P. Fendel, A. G. Glenday, F. X. Kärtner, D. F. Phillips, D. Sasselov, A. Szentgyorgyi, and R. L. Walsworth, “A laser frequency comb that enables radial velocity measurements with a precision of 1 cm s-1,” Nature 452(7187), 610–612 (2008).
[Crossref] [PubMed]

Opt. Express (4)

Opt. Lett. (2)

Science (1)

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-Based Optical Frequency Combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

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Figures (4)

Fig. 1
Fig. 1

Transverse electric (TE) mode simulations at 1550 nm wavelength for the (a) 400 nm x 1800 nm and (b) 910 nm x 1800 nm waveguides with 71% and 93% modal confinement, respectively. Less of the optical field interacts with the waveguide boundaries for the taller waveguide (b).

Fig. 2
Fig. 2

Microscope images in the dark field showing crack propagation terminating at a trench created with a diamond scribe. The film to the left of these trenches is crack free.

Fig. 3
Fig. 3

Scanning electron microscope (SEM) image of the resonator.

Fig. 4
Fig. 4

(a) Transmission spectrum with the finely scanned resonance outlined in red. (b) Resonance with 36 MHz linewidth corresponding to an intrinsic Q of 7 million.

Equations (1)

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α= 2π n g Q λ 0 = λ 0 QRFSR ,

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