Abstract

A microelectromechanical tunable notch filter using silicon-photonic freestanding waveguides is proposed, and the basic characteristics are experimentally investigated. The proposed filter is composed of a wavelength-tunable silicon microring resonator and a busline switch. The tunable microring consists of freestanding single-mode waveguides and air-gap directional waveguide couplers. The optical path length of the microring is varied physically by a displacement of electrostatic comb-drive actuator. The busline switch consists of a gap-variable waveguide coupling mechanism, which enables coupling the tunable microring with the busline by another electrostatic comb-drive actuator. During the wavelength tuning of microring, the busline can be disconnected from the microring. Therefore, the proposed device operates as a hitless wavelength-selective switch if they are connected in series. The waveguides are 320 nm in width and 340 nm in thickness. The resonant wavelength shift of the microring is 9.96 nm at the voltage of 26 V with the actuator displacement of 1.0 μm. The coupling to busline is adjusted from the switch-off state at the gap of 600 nm to the switch-on state corresponding to the critical coupling condition at the gap of 383 nm. The whole size of the wavelength-tunable filter with hitless mechanism is about 150 μm by 80 μm. Due to the capacitive operation of the comb-drive actuators, the power consumption is negligibly small.

© 2013 OSA

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2013

T. Ikeda and K. Hane, “A Microelectromechanically tunable microring resonator composed of freestanding silicon photonic waveguide couplers,” Appl. Phys. Lett.102(22), 221113 (2013).
[CrossRef]

H. Ikehara, T. Goto, H. Kamiya, T. Arakawa, and Y. Kokubun, “Hitless wavelength-selective switch based on quantum well second-order series-coupled microring resonators,” Opt. Express21(5), 6377–6390 (2013).
[CrossRef] [PubMed]

2012

Y. Akihama and K. Hane, “Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers,” Light: Sci. Appl.1(6), e16 (2012).
[CrossRef]

2011

2010

2009

M. Geng, L. Jia, L. Zhang, L. Yang, P. Chen, T. Wang, and Y. Liu, “Four-channel reconfigurable optical add-drop multiplexer based on photonic wire waveguide,” Opt. Express17(7), 5502–5516 (2009).
[CrossRef] [PubMed]

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

2008

X. Wang, J. A. Martinez, M. S. Nawrocka, and R. R. Panepucci, “Compact thermally tunable silicon wavelength switch: Modeling and characterization,” IEEE Photon. Technol. Lett.20(11), 936–938 (2008).
[CrossRef]

E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett.92(10), 101110 (2008).
[CrossRef] [PubMed]

Y. Goebuchi, M. Hisada, T. Kato, and Y. Kokubun, “Optical cross-connect circuit using hitless wavelength selective switch,” Opt. Express16(2), 535–548 (2008).
[CrossRef] [PubMed]

K. Takahashi, Y. Kanamori, Y. Kokubun, and K. Hane, “A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator,” Opt. Express16(19), 14421–14428 (2008).
[CrossRef] [PubMed]

2007

M. S. Rasras, D. M. Gill, S. S. Patel, K.-Y. Tu, Y.-K. Chen, A. E. White, A. T. S. Pomerene, D. N. Carothers, M. J. Grove, D. K. Sparacin, J. Michel, M. A. Beals, and L. C. Kimerling, “Demonstration of a fourth-order pole-zero optical filter integrated using CMOS processes,” J. Lightwave Technol.25(1), 87–92 (2007).
[CrossRef]

W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, “Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator,” Opt. Express15(25), 17106–17113 (2007).
[CrossRef] [PubMed]

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon Microtoroidal Resonators With Integrated MEMS Tunable Coupler,” IEEE J. Sel. Top. Quantum Electron.13(2), 202–208 (2007).
[CrossRef]

H.-Y. Ng, M. R. Wang, D. Li, X. Wang, J. Martinez, R. R. Panepucci, and K. Pathak, “1x4 wavelength reconfigurable photonic switch using thermally tuned microring resonators fabricated on silicon substrate,” IEEE Photon. Technol. Lett.19(9), 704–706 (2007).
[CrossRef]

2006

I. Kiyat, A. Aydinli, and N. Dagli, “Low-power thermooptical tuning of SOI resonator switch,” IEEE Photon. Technol. Lett.18(2), 364–366 (2006).
[CrossRef]

B. Jalali and S. Fathpour, “Silicon photonics,” J. Lightwave Technol.24(12), 4600–4615 (2006).
[CrossRef]

2005

K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70 x 60 μm2 size based on Si photonic wire waveguides,” Electron. Lett.41(14), 801–802 (2005).
[CrossRef]

T. Chu, H. Yamada, S. Ishida, and Y. Arakawa, “Compact 1 × N thermo-optic switches based on silicon photonic wire waveguides,” Opt. Express13(25), 10109–10114 (2005).
[CrossRef] [PubMed]

Adibi, A.

Akedo, J.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Akihama, Y.

Y. Akihama and K. Hane, “Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers,” Light: Sci. Appl.1(6), e16 (2012).
[CrossRef]

Y. Akihama, Y. Kanamori, and K. Hane, “Ultra-small silicon waveguide coupler switch using gap-variable mechanism,” Opt. Express19(24), 23658–23663 (2011).
[CrossRef] [PubMed]

Arakawa, T.

Arakawa, Y.

Asghari, M.

Atabaki, A. H.

Aydinli, A.

I. Kiyat, A. Aydinli, and N. Dagli, “Low-power thermooptical tuning of SOI resonator switch,” IEEE Photon. Technol. Lett.18(2), 364–366 (2006).
[CrossRef]

Baba, T.

K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70 x 60 μm2 size based on Si photonic wire waveguides,” Electron. Lett.41(14), 801–802 (2005).
[CrossRef]

Beals, M. A.

Bulgan, E.

E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett.92(10), 101110 (2008).
[CrossRef] [PubMed]

Carothers, D. N.

Chen, P.

Chen, Y.-K.

Chu, T.

Dagli, N.

I. Kiyat, A. Aydinli, and N. Dagli, “Low-power thermooptical tuning of SOI resonator switch,” IEEE Photon. Technol. Lett.18(2), 364–366 (2006).
[CrossRef]

Dong, P.

Eftekhar, A. A.

Fathpour, S.

Feng, D.

Feng, N.-N.

Fujikata, J.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Furue, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Geng, M.

Gill, D. M.

Goebuchi, Y.

Gomyo, A.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Goto, T.

Green, W. M. J.

Grove, M. J.

Hane, K.

T. Ikeda and K. Hane, “A Microelectromechanically tunable microring resonator composed of freestanding silicon photonic waveguide couplers,” Appl. Phys. Lett.102(22), 221113 (2013).
[CrossRef]

Y. Akihama and K. Hane, “Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers,” Light: Sci. Appl.1(6), e16 (2012).
[CrossRef]

Y. Akihama, Y. Kanamori, and K. Hane, “Ultra-small silicon waveguide coupler switch using gap-variable mechanism,” Opt. Express19(24), 23658–23663 (2011).
[CrossRef] [PubMed]

K. Takahashi, Y. Kanamori, Y. Kokubun, and K. Hane, “A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator,” Opt. Express16(19), 14421–14428 (2008).
[CrossRef] [PubMed]

E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett.92(10), 101110 (2008).
[CrossRef] [PubMed]

Hisada, M.

Ikeda, T.

T. Ikeda and K. Hane, “A Microelectromechanically tunable microring resonator composed of freestanding silicon photonic waveguide couplers,” Appl. Phys. Lett.102(22), 221113 (2013).
[CrossRef]

Ikehara, H.

Ishi, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Ishida, S.

Itabashi, S.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Jalali, B.

Jia, L.

Kamiya, H.

Kanamori, Y.

Kato, T.

Kimerling, L. C.

Kinoshita, M.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Kiyat, I.

I. Kiyat, A. Aydinli, and N. Dagli, “Low-power thermooptical tuning of SOI resonator switch,” IEEE Photon. Technol. Lett.18(2), 364–366 (2006).
[CrossRef]

Kokubun, Y.

Krishnamoorthy, A. V.

Lee, M.-C. M.

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon Microtoroidal Resonators With Integrated MEMS Tunable Coupler,” IEEE J. Sel. Top. Quantum Electron.13(2), 202–208 (2007).
[CrossRef]

Lentine, A. L.

Leuenberger, D.

J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon Microtoroidal Resonators With Integrated MEMS Tunable Coupler,” IEEE J. Sel. Top. Quantum Electron.13(2), 202–208 (2007).
[CrossRef]

Li, D.

H.-Y. Ng, M. R. Wang, D. Li, X. Wang, J. Martinez, R. R. Panepucci, and K. Pathak, “1x4 wavelength reconfigurable photonic switch using thermally tuned microring resonators fabricated on silicon substrate,” IEEE Photon. Technol. Lett.19(9), 704–706 (2007).
[CrossRef]

Li, G.

Liang, H.

Liao, S.

Liu, Y.

Martinez, J.

H.-Y. Ng, M. R. Wang, D. Li, X. Wang, J. Martinez, R. R. Panepucci, and K. Pathak, “1x4 wavelength reconfigurable photonic switch using thermally tuned microring resonators fabricated on silicon substrate,” IEEE Photon. Technol. Lett.19(9), 704–706 (2007).
[CrossRef]

Martinez, J. A.

X. Wang, J. A. Martinez, M. S. Nawrocka, and R. R. Panepucci, “Compact thermally tunable silicon wavelength switch: Modeling and characterization,” IEEE Photon. Technol. Lett.20(11), 936–938 (2008).
[CrossRef]

Michel, J.

Mizuno, M.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Motegi, A.

K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70 x 60 μm2 size based on Si photonic wire waveguides,” Electron. Lett.41(14), 801–802 (2005).
[CrossRef]

Nakada, M.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Nawrocka, M. S.

X. Wang, J. A. Martinez, M. S. Nawrocka, and R. R. Panepucci, “Compact thermally tunable silicon wavelength switch: Modeling and characterization,” IEEE Photon. Technol. Lett.20(11), 936–938 (2008).
[CrossRef]

Ng, H.-Y.

H.-Y. Ng, M. R. Wang, D. Li, X. Wang, J. Martinez, R. R. Panepucci, and K. Pathak, “1x4 wavelength reconfigurable photonic switch using thermally tuned microring resonators fabricated on silicon substrate,” IEEE Photon. Technol. Lett.19(9), 704–706 (2007).
[CrossRef]

Nishi, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Nose, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Ohashi, K.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Ohno, F.

K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70 x 60 μm2 size based on Si photonic wire waveguides,” Electron. Lett.41(14), 801–802 (2005).
[CrossRef]

Okamoto, D.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Panepucci, R. R.

X. Wang, J. A. Martinez, M. S. Nawrocka, and R. R. Panepucci, “Compact thermally tunable silicon wavelength switch: Modeling and characterization,” IEEE Photon. Technol. Lett.20(11), 936–938 (2008).
[CrossRef]

H.-Y. Ng, M. R. Wang, D. Li, X. Wang, J. Martinez, R. R. Panepucci, and K. Pathak, “1x4 wavelength reconfigurable photonic switch using thermally tuned microring resonators fabricated on silicon substrate,” IEEE Photon. Technol. Lett.19(9), 704–706 (2007).
[CrossRef]

Patel, S. S.

Pathak, K.

H.-Y. Ng, M. R. Wang, D. Li, X. Wang, J. Martinez, R. R. Panepucci, and K. Pathak, “1x4 wavelength reconfigurable photonic switch using thermally tuned microring resonators fabricated on silicon substrate,” IEEE Photon. Technol. Lett.19(9), 704–706 (2007).
[CrossRef]

Pomerene, A. T. S.

Rasras, M. S.

Rooks, M. J.

Sasaki, K.

K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70 x 60 μm2 size based on Si photonic wire waveguides,” Electron. Lett.41(14), 801–802 (2005).
[CrossRef]

Sekaric, L.

Shafiiha, R.

Shah Hosseini, E.

Shimizu, T.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Sparacin, D. K.

Suzuki, N.

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

Takahashi, K.

Torii, S.

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K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
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K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

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K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
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K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
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K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
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K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
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Proc. IEEE

K. Ohashi, K. Nishi, T. Shimizu, M. Nakada, J. Fujikata, J. Ushida, S. Torii, K. Nose, M. Mizuno, H. Yukawa, M. Kinoshita, N. Suzuki, A. Gomyo, T. Ishi, D. Okamoto, K. Furue, T. Ueno, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, and J. Akedo, “On-chip optical interconnect,” Proc. IEEE97(7), 1186–1198 (2009).
[CrossRef]

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Figures (8)

Fig. 1
Fig. 1

(a) Schematic diagram of resonant wavelength tunable microring resonator with busline switch mechanism, (b) schematic diagram of wavelength-selective switch using three tunable microrings with busline switches.

Fig. 2
Fig. 2

(a) Schematic diagram of the fabricated tunable notch filter with microring resonator, (b) mask pattern of the filter, (c) magnified pattern in the ring and busline switch parts.

Fig. 3
Fig. 3

Fabrication steps

Fig. 4
Fig. 4

(a) Scanning electron micrograph of the whole structure of the fabricated tunable silicon microring resonator with the busline coupling mechanism, (b) oblique view of the busline coupling region.

Fig. 5
Fig. 5

Output signal intensity at the through port as a function of wavelength with the applied voltage to the tuning actuator as parameter.

Fig. 6
Fig. 6

Wavelength shift and displacement of actuator measured as a function of applied voltage.

Fig. 7
Fig. 7

Output intensity at the through port measured as a function of wavelength with changing the coupling between the microring and busline waveguides by applying the voltages to switching actuator.

Fig. 8
Fig. 8

Output intensity at the through port measured as a function of the gap between the microring and the busline waveguides at the wavelength of 1478.24 nm. The inset shows the magnified part in the range from 380 nm to 410 nm.

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