Abstract

The generation of multi foci is an established method for high-speed parallel direct laser writing, scanning microscopy and for optical tweezer arrays. However, the quality of multi foci reduces with increasing resolution due to interference effects. Here, we report on a spatial-light-modulator-based method that allows for highly uniform, close to Gaussian spots with diffraction limited resolution using a wavelength of 780 nm. We introduce modifications of a standard algorithm that calculates a field distribution on the entrance pupil of a high numerical aperture objective splitting the focal volume into a multitude of spots. Our modified algorithm compares favourably to a commonly used algorithm in full vectorial calculations as well as in point-spread-function measurements. The lateral and axial resolution limits of spots generated by the new algorithm are found to be close to the diffraction limit.

© 2013 Optical Society of America

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  14. D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
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    [Crossref]
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    [Crossref]
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    [Crossref]
  32. J. Leach, M. R. Dennis, J. Courtial, and M. J. Padgett, “Vortex knots in light,” New J. of Phys. 7, 1–11 (2005).
    [Crossref]
  33. B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase retrieval for high-numerical-aperture optical systems, ”Opt. Letters 28, 801–803 (2003).
    [Crossref]
  34. B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase-retrieved pupil functions in wide-field fluorescence microscopy,” J. of Microscopy 216, 32–48 (2004).
    [Crossref]
  35. A. S. van de Nes, L. Billy, S. F. Pereira, and J. J. M. Braat, “Calculation of the vectorial field distribution in a stratified focal region of a high numerical aperture imaging system, ”Opt. Express 12, 1281–1293 (2004).
    [Crossref] [PubMed]
  36. J. Fischer and M. Wegener, “Three-dimensional optical laser lithography beyond the diffraction limit,” Laser Photonics Rev. 7, 22–44 (2012).
    [Crossref]

2013 (1)

H. Lin and M. Gu, “Creation of diffraction-limited non-Airy multifocal arrays using a spatially shifted vortex beam,” Appl. Phys. Lett. 102, 084103 (2013).
[Crossref]

2012 (4)

J. Albero and I. Moreno, “Grating beam splitting with liquid crystal adaptive optics,” J. of Optics 14, 1–9 (2012).

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

J. Fischer and M. Wegener, “Three-dimensional optical laser lithography beyond the diffraction limit,” Laser Photonics Rev. 7, 22–44 (2012).
[Crossref]

E. H. Waller, M. Renner, and G. von Freymann, “Active aberration- and point-spread-function control in direct laser writing, ”Opt. Express 20, 24949–24956 (2012).
[Crossref] [PubMed]

2011 (5)

D. R. Burnham, T. Schneider, and D. T. Chiu, “Effects of aliasing on the fidelity of a two dimensional array of foci generated with a kinoform, ”Opt. Express 19, 17121–17126 (2011).
[Crossref] [PubMed]

S. D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R. J. Narayan, and B. N. Chichkov, “Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator, ”Opt. Express 2, 3167–3178 (2011).
[Crossref]

P. S. Salter and M. J. Booth, “Addressable microlens array for parallel laser microfabrication, ”Opt. Letters 36, 2302–2304 (2011).
[Crossref]

K. Dholakia and T. Cizmar, “Shaping the future of manipulation,” Nature Photonics 5, 335–342 (2011).
[Crossref]

J. A. Davia, I. Moreno, J. L. Martinez, T. J. Hernandez, and D. M. Cotrell, “Creating three-dimensional lattice patterns using programmable Dammann gratings,” Appl. Optics 50, 3653–3657 (2011).
[Crossref]

2010 (5)

2009 (2)

D. Engström, A. Frank, J. Backsten, M. Goksör, and J. Bengtsson, “Grid-free 3D multiple spot generation with an efficient single-plane FFT-based algorithm, ”Opt. Express 17, 9989–10000 (2009).
[Crossref] [PubMed]

S. Hasegawa and Y. Hayasaki, “Adaptive optimization of a hologram in holographic femtosecond laser processing system, ”Opt. Letters 34, 22–24 (2009).
[Crossref]

2008 (1)

2007 (3)

2006 (2)

V. Boyer, R. M. Godun, G. Smirne, D. Cassettari, C. M. Chandrashekar, A. B. Deb, Z. J. Laczik, and C. J. Foot, “Dynamic manipulation of Bose-Einstein condensates with a spatial light modulator,” Phys. Rev. A 73, 1–4 (2006).
[Crossref]

R. Di Leonardo, F. Ianni, and G. Ruocco, “Computer generation of optimal holograms for optical trap arrays, ”Opt. Express 15, 1913–1922 (2006).
[Crossref]

2005 (2)

M. Polin, K. Ladavac, S. Lee, Y. Roichman, and D. G. Grier, “Optimized holographic optical traps, ”Opt. Express 13, 7458–7465 (2005)
[Crossref]

J. Leach, M. R. Dennis, J. Courtial, and M. J. Padgett, “Vortex knots in light,” New J. of Phys. 7, 1–11 (2005).
[Crossref]

2004 (4)

O. Ripoll, V. Kettunen, and H. P. Herzig, “Review of iterative Fourier-transform algorithms for beam shaping applications,” Opt. Eng. 43, 25492555 (2004).

P. J. Rodrigo, V. R. Daria, and J. Glückstad, “Real-time three-dimensional optical micromanipulation of multiple particles and living cells, ”Opt. Letters 29, 2270–2272 (2004).
[Crossref]

A. S. van de Nes, L. Billy, S. F. Pereira, and J. J. M. Braat, “Calculation of the vectorial field distribution in a stratified focal region of a high numerical aperture imaging system, ”Opt. Express 12, 1281–1293 (2004).
[Crossref] [PubMed]

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase-retrieved pupil functions in wide-field fluorescence microscopy,” J. of Microscopy 216, 32–48 (2004).
[Crossref]

2003 (3)

D. McGloin, G. C. Spalding, H. Melville, W. Sibbett, and K. Dholakia, “Applications of spatial light modulators in atom optics, ”Opt. Express 11, 158–166 (2003).
[Crossref] [PubMed]

D. G. Grier, “A revolution in optical manipulation,” Nature 424, 810–816 (2003).
[Crossref] [PubMed]

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase retrieval for high-numerical-aperture optical systems, ”Opt. Letters 28, 801–803 (2003).
[Crossref]

2002 (1)

2000 (1)

T. Nielsen, M. Fricke, D. Hellweg, and P. Andresen, “High efficiency beam splitter for multifocal multiphoton microscopy,” J. of Microscopy 201, 368–376 (2000).
[Crossref]

1999 (1)

J. A. Davis, D. M. Cottrell, J. Campos, M. J. Yzuel, and I. Moreno, “Encoding amplitude information onto phase-only filters,” Appl. Optics 38, 5004–5013 (1999).
[Crossref]

1998 (1)

A. H. Buist, M. Müller, J. Squier, and G. J. Brakenhoff, “Real time two-photon absorption microscopy using multi point excitation,” J. of Microscopy 192, 217–226 (1998).
[Crossref]

Agard, D. A.

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase-retrieved pupil functions in wide-field fluorescence microscopy,” J. of Microscopy 216, 32–48 (2004).
[Crossref]

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase retrieval for high-numerical-aperture optical systems, ”Opt. Letters 28, 801–803 (2003).
[Crossref]

Albero, J.

J. Albero and I. Moreno, “Grating beam splitting with liquid crystal adaptive optics,” J. of Optics 14, 1–9 (2012).

Andresen, P.

T. Nielsen, M. Fricke, D. Hellweg, and P. Andresen, “High efficiency beam splitter for multifocal multiphoton microscopy,” J. of Microscopy 201, 368–376 (2000).
[Crossref]

Audouard, E.

Backsten, J.

Baum, A.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Bay, C.

C. Bay, N. Hübner, J. Freeman, and T. Wilkinson, “Maskless photolithography via holographic optical projection, ”Opt. Letters 35, 2230–2232 (2010).
[Crossref]

Bengtsson, J.

Billy, L.

Booth, M. J.

P. S. Salter and M. J. Booth, “Addressable microlens array for parallel laser microfabrication, ”Opt. Letters 36, 2302–2304 (2011).
[Crossref]

A. Jesacher and M. J. Booth, “Parallel direct laser writing in three dimensions with spatially dependent aberration correction, ”Opt. Express 18, 21090–21099 (2010).
[Crossref] [PubMed]

Boyer, V.

V. Boyer, R. M. Godun, G. Smirne, D. Cassettari, C. M. Chandrashekar, A. B. Deb, Z. J. Laczik, and C. J. Foot, “Dynamic manipulation of Bose-Einstein condensates with a spatial light modulator,” Phys. Rev. A 73, 1–4 (2006).
[Crossref]

Braat, J. J. M.

Brakenhoff, G. J.

A. H. Buist, M. Müller, J. Squier, and G. J. Brakenhoff, “Real time two-photon absorption microscopy using multi point excitation,” J. of Microscopy 192, 217–226 (1998).
[Crossref]

Buist, A. H.

A. H. Buist, M. Müller, J. Squier, and G. J. Brakenhoff, “Real time two-photon absorption microscopy using multi point excitation,” J. of Microscopy 192, 217–226 (1998).
[Crossref]

Burnham, D. R.

Campos, J.

J. A. Davis, D. M. Cottrell, J. Campos, M. J. Yzuel, and I. Moreno, “Encoding amplitude information onto phase-only filters,” Appl. Optics 38, 5004–5013 (1999).
[Crossref]

Cassettari, D.

V. Boyer, R. M. Godun, G. Smirne, D. Cassettari, C. M. Chandrashekar, A. B. Deb, Z. J. Laczik, and C. J. Foot, “Dynamic manipulation of Bose-Einstein condensates with a spatial light modulator,” Phys. Rev. A 73, 1–4 (2006).
[Crossref]

Chandrashekar, C. M.

V. Boyer, R. M. Godun, G. Smirne, D. Cassettari, C. M. Chandrashekar, A. B. Deb, Z. J. Laczik, and C. J. Foot, “Dynamic manipulation of Bose-Einstein condensates with a spatial light modulator,” Phys. Rev. A 73, 1–4 (2006).
[Crossref]

Cheng, G.

Chichkov, B. N.

S. D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R. J. Narayan, and B. N. Chichkov, “Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator, ”Opt. Express 2, 3167–3178 (2011).
[Crossref]

K. Obata, J. Koch, U. Hinze, and B. N. Chichkov, “Multi-focus two-photon polymerization technique based on individually controlled phase modulation, ”Opt. Express 18, 17193–17200 (2010).
[Crossref] [PubMed]

Chilkoti, A.

Chiu, D. T.

Cizmar, T.

K. Dholakia and T. Cizmar, “Shaping the future of manipulation,” Nature Photonics 5, 335–342 (2011).
[Crossref]

Clark, R. L.

Cole, D. G.

Cooper, J.

Cotrell, D. M.

J. A. Davia, I. Moreno, J. L. Martinez, T. J. Hernandez, and D. M. Cotrell, “Creating three-dimensional lattice patterns using programmable Dammann gratings,” Appl. Optics 50, 3653–3657 (2011).
[Crossref]

Cottrell, D. M.

J. A. Davis, D. M. Cottrell, J. Campos, M. J. Yzuel, and I. Moreno, “Encoding amplitude information onto phase-only filters,” Appl. Optics 38, 5004–5013 (1999).
[Crossref]

Courtial, J.

Daria, V. R.

P. J. Rodrigo, V. R. Daria, and J. Glückstad, “Real-time three-dimensional optical micromanipulation of multiple particles and living cells, ”Opt. Letters 29, 2270–2272 (2004).
[Crossref]

R. L. Eriksen, V. R. Daria, and J. Glückstad, “Fully dynamic multiple-beam optical tweezers, ”Opt. Express 10, 597–602 (2002).
[Crossref] [PubMed]

Davia, J. A.

J. A. Davia, I. Moreno, J. L. Martinez, T. J. Hernandez, and D. M. Cotrell, “Creating three-dimensional lattice patterns using programmable Dammann gratings,” Appl. Optics 50, 3653–3657 (2011).
[Crossref]

Davis, J. A.

J. A. Davis, D. M. Cottrell, J. Campos, M. J. Yzuel, and I. Moreno, “Encoding amplitude information onto phase-only filters,” Appl. Optics 38, 5004–5013 (1999).
[Crossref]

Dearden, G.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Deb, A. B.

V. Boyer, R. M. Godun, G. Smirne, D. Cassettari, C. M. Chandrashekar, A. B. Deb, Z. J. Laczik, and C. J. Foot, “Dynamic manipulation of Bose-Einstein condensates with a spatial light modulator,” Phys. Rev. A 73, 1–4 (2006).
[Crossref]

Dennis, M. R.

J. Leach, M. R. Dennis, J. Courtial, and M. J. Padgett, “Vortex knots in light,” New J. of Phys. 7, 1–11 (2005).
[Crossref]

Dholakia, K.

Di Leonardo, R.

Edwardson, S. P.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Engström, D.

Eriksen, R. L.

Fearon, E.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Fischer, J.

J. Fischer and M. Wegener, “Three-dimensional optical laser lithography beyond the diffraction limit,” Laser Photonics Rev. 7, 22–44 (2012).
[Crossref]

Foot, C. J.

V. Boyer, R. M. Godun, G. Smirne, D. Cassettari, C. M. Chandrashekar, A. B. Deb, Z. J. Laczik, and C. J. Foot, “Dynamic manipulation of Bose-Einstein condensates with a spatial light modulator,” Phys. Rev. A 73, 1–4 (2006).
[Crossref]

Frank, A.

Freeman, J.

C. Bay, N. Hübner, J. Freeman, and T. Wilkinson, “Maskless photolithography via holographic optical projection, ”Opt. Letters 35, 2230–2232 (2010).
[Crossref]

Fricke, M.

T. Nielsen, M. Fricke, D. Hellweg, and P. Andresen, “High efficiency beam splitter for multifocal multiphoton microscopy,” J. of Microscopy 201, 368–376 (2000).
[Crossref]

Gittard, S. D.

S. D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R. J. Narayan, and B. N. Chichkov, “Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator, ”Opt. Express 2, 3167–3178 (2011).
[Crossref]

Glückstad, J.

P. J. Rodrigo, V. R. Daria, and J. Glückstad, “Real-time three-dimensional optical micromanipulation of multiple particles and living cells, ”Opt. Letters 29, 2270–2272 (2004).
[Crossref]

R. L. Eriksen, V. R. Daria, and J. Glückstad, “Fully dynamic multiple-beam optical tweezers, ”Opt. Express 10, 597–602 (2002).
[Crossref] [PubMed]

Godun, R. M.

V. Boyer, R. M. Godun, G. Smirne, D. Cassettari, C. M. Chandrashekar, A. B. Deb, Z. J. Laczik, and C. J. Foot, “Dynamic manipulation of Bose-Einstein condensates with a spatial light modulator,” Phys. Rev. A 73, 1–4 (2006).
[Crossref]

Goksör, M.

Grier, D. G.

Gu, M.

H. Lin and M. Gu, “Creation of diffraction-limited non-Airy multifocal arrays using a spatially shifted vortex beam,” Appl. Phys. Lett. 102, 084103 (2013).
[Crossref]

Gustafsson, M. G. L.

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase-retrieved pupil functions in wide-field fluorescence microscopy,” J. of Microscopy 216, 32–48 (2004).
[Crossref]

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase retrieval for high-numerical-aperture optical systems, ”Opt. Letters 28, 801–803 (2003).
[Crossref]

Hanser, B. M.

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase-retrieved pupil functions in wide-field fluorescence microscopy,” J. of Microscopy 216, 32–48 (2004).
[Crossref]

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase retrieval for high-numerical-aperture optical systems, ”Opt. Letters 28, 801–803 (2003).
[Crossref]

Hasegawa, S.

S. Hasegawa and Y. Hayasaki, “Adaptive optimization of a hologram in holographic femtosecond laser processing system, ”Opt. Letters 34, 22–24 (2009).
[Crossref]

Hayasaki, Y.

S. Hasegawa and Y. Hayasaki, “Adaptive optimization of a hologram in holographic femtosecond laser processing system, ”Opt. Letters 34, 22–24 (2009).
[Crossref]

Hellweg, D.

T. Nielsen, M. Fricke, D. Hellweg, and P. Andresen, “High efficiency beam splitter for multifocal multiphoton microscopy,” J. of Microscopy 201, 368–376 (2000).
[Crossref]

Hernandez, T. J.

J. A. Davia, I. Moreno, J. L. Martinez, T. J. Hernandez, and D. M. Cotrell, “Creating three-dimensional lattice patterns using programmable Dammann gratings,” Appl. Optics 50, 3653–3657 (2011).
[Crossref]

Hertel, I. V.

Herzig, H. P.

O. Ripoll, V. Kettunen, and H. P. Herzig, “Review of iterative Fourier-transform algorithms for beam shaping applications,” Opt. Eng. 43, 25492555 (2004).

Hill, R. T.

Hinze, U.

Hirao, K.

Hübner, N.

C. Bay, N. Hübner, J. Freeman, and T. Wilkinson, “Maskless photolithography via holographic optical projection, ”Opt. Letters 35, 2230–2232 (2010).
[Crossref]

Hucknall, A.

Huot, N.

Ianni, F.

Jenness, N. J.

Jesacher, A.

Johannes, M. S.

Jordan, P.

Kelemen, L.

Kettunen, V.

O. Ripoll, V. Kettunen, and H. P. Herzig, “Review of iterative Fourier-transform algorithms for beam shaping applications,” Opt. Eng. 43, 25492555 (2004).

Koch, J.

Koroleva, A.

S. D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R. J. Narayan, and B. N. Chichkov, “Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator, ”Opt. Express 2, 3167–3178 (2011).
[Crossref]

Kuang, Z.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Laczik, Z. J.

V. Boyer, R. M. Godun, G. Smirne, D. Cassettari, C. M. Chandrashekar, A. B. Deb, Z. J. Laczik, and C. J. Foot, “Dynamic manipulation of Bose-Einstein condensates with a spatial light modulator,” Phys. Rev. A 73, 1–4 (2006).
[Crossref]

Ladavac, K.

Leach, J.

J. Leach, M. R. Dennis, J. Courtial, and M. J. Padgett, “Vortex knots in light,” New J. of Phys. 7, 1–11 (2005).
[Crossref]

Lee, S.

Liang, S.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Lin, H.

H. Lin and M. Gu, “Creation of diffraction-limited non-Airy multifocal arrays using a spatially shifted vortex beam,” Appl. Phys. Lett. 102, 084103 (2013).
[Crossref]

Liu, D.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Martinez, J. L.

J. A. Davia, I. Moreno, J. L. Martinez, T. J. Hernandez, and D. M. Cotrell, “Creating three-dimensional lattice patterns using programmable Dammann gratings,” Appl. Optics 50, 3653–3657 (2011).
[Crossref]

Mauclair, C.

McGloin, D.

Melville, H.

Miura, K.

Moreno, I.

J. Albero and I. Moreno, “Grating beam splitting with liquid crystal adaptive optics,” J. of Optics 14, 1–9 (2012).

J. A. Davia, I. Moreno, J. L. Martinez, T. J. Hernandez, and D. M. Cotrell, “Creating three-dimensional lattice patterns using programmable Dammann gratings,” Appl. Optics 50, 3653–3657 (2011).
[Crossref]

J. A. Davis, D. M. Cottrell, J. Campos, M. J. Yzuel, and I. Moreno, “Encoding amplitude information onto phase-only filters,” Appl. Optics 38, 5004–5013 (1999).
[Crossref]

Müller, M.

A. H. Buist, M. Müller, J. Squier, and G. J. Brakenhoff, “Real time two-photon absorption microscopy using multi point excitation,” J. of Microscopy 192, 217–226 (1998).
[Crossref]

Narayan, R. J.

S. D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R. J. Narayan, and B. N. Chichkov, “Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator, ”Opt. Express 2, 3167–3178 (2011).
[Crossref]

Nguyen, A.

S. D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R. J. Narayan, and B. N. Chichkov, “Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator, ”Opt. Express 2, 3167–3178 (2011).
[Crossref]

Nielsen, T.

T. Nielsen, M. Fricke, D. Hellweg, and P. Andresen, “High efficiency beam splitter for multifocal multiphoton microscopy,” J. of Microscopy 201, 368–376 (2000).
[Crossref]

Obata, K.

S. D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R. J. Narayan, and B. N. Chichkov, “Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator, ”Opt. Express 2, 3167–3178 (2011).
[Crossref]

K. Obata, J. Koch, U. Hinze, and B. N. Chichkov, “Multi-focus two-photon polymerization technique based on individually controlled phase modulation, ”Opt. Express 18, 17193–17200 (2010).
[Crossref] [PubMed]

Ormos, P.

Padgett, M.

Padgett, M. J.

J. Leach, M. R. Dennis, J. Courtial, and M. J. Padgett, “Vortex knots in light,” New J. of Phys. 7, 1–11 (2005).
[Crossref]

Padgett, M. P.

Pereira, S. F.

Perrie, W.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Piestun, R.

Polin, M.

Renner, M.

Ripoll, O.

O. Ripoll, V. Kettunen, and H. P. Herzig, “Review of iterative Fourier-transform algorithms for beam shaping applications,” Opt. Eng. 43, 25492555 (2004).

Rodrigo, P. J.

P. J. Rodrigo, V. R. Daria, and J. Glückstad, “Real-time three-dimensional optical micromanipulation of multiple particles and living cells, ”Opt. Letters 29, 2270–2272 (2004).
[Crossref]

Roichman, Y.

Rosenfeld, A.

Ruocco, G.

Sakakura, M.

Salter, P. S.

P. S. Salter and M. J. Booth, “Addressable microlens array for parallel laser microfabrication, ”Opt. Letters 36, 2302–2304 (2011).
[Crossref]

Sawano, T.

Schneider, T.

Schonbrun, E.

Scully, P. J.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Sedat, J. W.

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase-retrieved pupil functions in wide-field fluorescence microscopy,” J. of Microscopy 216, 32–48 (2004).
[Crossref]

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase retrieval for high-numerical-aperture optical systems, ”Opt. Letters 28, 801–803 (2003).
[Crossref]

Shimotsuma, Y.

Sibbett, W.

Smirne, G.

V. Boyer, R. M. Godun, G. Smirne, D. Cassettari, C. M. Chandrashekar, A. B. Deb, Z. J. Laczik, and C. J. Foot, “Dynamic manipulation of Bose-Einstein condensates with a spatial light modulator,” Phys. Rev. A 73, 1–4 (2006).
[Crossref]

Spalding, G. C.

Squier, J.

A. H. Buist, M. Müller, J. Squier, and G. J. Brakenhoff, “Real time two-photon absorption microscopy using multi point excitation,” J. of Microscopy 192, 217–226 (1998).
[Crossref]

Stoian, R.

Taranu, A.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Valkai, S.

van de Nes, A. S.

von Freymann, G.

Waller, E. H.

Watkins, K. G.

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Wegener, M.

J. Fischer and M. Wegener, “Three-dimensional optical laser lithography beyond the diffraction limit,” Laser Photonics Rev. 7, 22–44 (2012).
[Crossref]

Wilkinson, T.

C. Bay, N. Hübner, J. Freeman, and T. Wilkinson, “Maskless photolithography via holographic optical projection, ”Opt. Letters 35, 2230–2232 (2010).
[Crossref]

Wulff, K. D.

Yzuel, M. J.

J. A. Davis, D. M. Cottrell, J. Campos, M. J. Yzuel, and I. Moreno, “Encoding amplitude information onto phase-only filters,” Appl. Optics 38, 5004–5013 (1999).
[Crossref]

Appl. Optics (2)

J. A. Davia, I. Moreno, J. L. Martinez, T. J. Hernandez, and D. M. Cotrell, “Creating three-dimensional lattice patterns using programmable Dammann gratings,” Appl. Optics 50, 3653–3657 (2011).
[Crossref]

J. A. Davis, D. M. Cottrell, J. Campos, M. J. Yzuel, and I. Moreno, “Encoding amplitude information onto phase-only filters,” Appl. Optics 38, 5004–5013 (1999).
[Crossref]

Appl. Phys. Lett. (1)

H. Lin and M. Gu, “Creation of diffraction-limited non-Airy multifocal arrays using a spatially shifted vortex beam,” Appl. Phys. Lett. 102, 084103 (2013).
[Crossref]

J. of Microscopy (3)

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase-retrieved pupil functions in wide-field fluorescence microscopy,” J. of Microscopy 216, 32–48 (2004).
[Crossref]

A. H. Buist, M. Müller, J. Squier, and G. J. Brakenhoff, “Real time two-photon absorption microscopy using multi point excitation,” J. of Microscopy 192, 217–226 (1998).
[Crossref]

T. Nielsen, M. Fricke, D. Hellweg, and P. Andresen, “High efficiency beam splitter for multifocal multiphoton microscopy,” J. of Microscopy 201, 368–376 (2000).
[Crossref]

J. of Optics (1)

J. Albero and I. Moreno, “Grating beam splitting with liquid crystal adaptive optics,” J. of Optics 14, 1–9 (2012).

JLMN (1)

D. Liu, W. Perrie, Z. Kuang, P. J. Scully, A. Baum, S. Liang, A. Taranu, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “Multiple Beam Internal Structuring of Poly(methyl methacrylate),” JLMN 7, 208–211 (2012).
[Crossref]

Laser Photonics Rev. (1)

J. Fischer and M. Wegener, “Three-dimensional optical laser lithography beyond the diffraction limit,” Laser Photonics Rev. 7, 22–44 (2012).
[Crossref]

Nature (1)

D. G. Grier, “A revolution in optical manipulation,” Nature 424, 810–816 (2003).
[Crossref] [PubMed]

Nature Photonics (1)

K. Dholakia and T. Cizmar, “Shaping the future of manipulation,” Nature Photonics 5, 335–342 (2011).
[Crossref]

New J. of Phys. (1)

J. Leach, M. R. Dennis, J. Courtial, and M. J. Padgett, “Vortex knots in light,” New J. of Phys. 7, 1–11 (2005).
[Crossref]

Opt. Eng. (1)

O. Ripoll, V. Kettunen, and H. P. Herzig, “Review of iterative Fourier-transform algorithms for beam shaping applications,” Opt. Eng. 43, 25492555 (2004).

Opt. Express (17)

S. D. Gittard, A. Nguyen, K. Obata, A. Koroleva, R. J. Narayan, and B. N. Chichkov, “Fabrication of microscale medical devices by two-photon polymerization with multiple foci via a spatial light modulator, ”Opt. Express 2, 3167–3178 (2011).
[Crossref]

R. L. Eriksen, V. R. Daria, and J. Glückstad, “Fully dynamic multiple-beam optical tweezers, ”Opt. Express 10, 597–602 (2002).
[Crossref] [PubMed]

D. McGloin, G. C. Spalding, H. Melville, W. Sibbett, and K. Dholakia, “Applications of spatial light modulators in atom optics, ”Opt. Express 11, 158–166 (2003).
[Crossref] [PubMed]

A. S. van de Nes, L. Billy, S. F. Pereira, and J. J. M. Braat, “Calculation of the vectorial field distribution in a stratified focal region of a high numerical aperture imaging system, ”Opt. Express 12, 1281–1293 (2004).
[Crossref] [PubMed]

M. Polin, K. Ladavac, S. Lee, Y. Roichman, and D. G. Grier, “Optimized holographic optical traps, ”Opt. Express 13, 7458–7465 (2005)
[Crossref]

R. Di Leonardo, F. Ianni, and G. Ruocco, “Computer generation of optimal holograms for optical trap arrays, ”Opt. Express 15, 1913–1922 (2006).
[Crossref]

C. Mauclair, G. Cheng, N. Huot, E. Audouard, A. Rosenfeld, I. V. Hertel, and R. Stoian, “Dynamic ultrafast laser spatial tailoring for parallel micromachining of photonic devices in transparent materials, ”Opt. Express 15, 14488–14497 (2007).

E. Schonbrun, R. Piestun, P. Jordan, J. Cooper, K. D. Wulff, J. Courtial, and M. Padgett, “3D interferometric optical tweezers using a single spatial light modulator,” Opt. Express 15, 14488–14497 (2007).

L. Kelemen, S. Valkai, and P. Ormos, “Parallel photopolymerisation with complex light patterns generated by diffractive optical elements,” Opt. Express 15, 14488–14497 (2007).
[Crossref] [PubMed]

N. J. Jenness, K. D. Wulff, M. S. Johannes, M. P. Padgett, D. G. Cole, and R. L. Clark, “Three-dimensional parallel holographic micropatterning using a spatial light modulator,” Opt. Express 16, 15942–15948 (2008).
[Crossref] [PubMed]

D. Engström, A. Frank, J. Backsten, M. Goksör, and J. Bengtsson, “Grid-free 3D multiple spot generation with an efficient single-plane FFT-based algorithm, ”Opt. Express 17, 9989–10000 (2009).
[Crossref] [PubMed]

N. J. Jenness, R. T. Hill, A. Hucknall, A. Chilkoti, and R. L. Clark, “A versatile diffractive maskless lithography for single-shot and serial microfabrication,” Opt. Express 18, 11754–11762 (2010).
[Crossref] [PubMed]

M. Sakakura, T. Sawano, Y. Shimotsuma, K. Miura, and K. Hirao, “Fabrication of three-dimensional 1 × 4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam, ”Opt. Express 18, 12136–12142 (2010).
[Crossref] [PubMed]

K. Obata, J. Koch, U. Hinze, and B. N. Chichkov, “Multi-focus two-photon polymerization technique based on individually controlled phase modulation, ”Opt. Express 18, 17193–17200 (2010).
[Crossref] [PubMed]

A. Jesacher and M. J. Booth, “Parallel direct laser writing in three dimensions with spatially dependent aberration correction, ”Opt. Express 18, 21090–21099 (2010).
[Crossref] [PubMed]

D. R. Burnham, T. Schneider, and D. T. Chiu, “Effects of aliasing on the fidelity of a two dimensional array of foci generated with a kinoform, ”Opt. Express 19, 17121–17126 (2011).
[Crossref] [PubMed]

E. H. Waller, M. Renner, and G. von Freymann, “Active aberration- and point-spread-function control in direct laser writing, ”Opt. Express 20, 24949–24956 (2012).
[Crossref] [PubMed]

Opt. Letters (5)

P. S. Salter and M. J. Booth, “Addressable microlens array for parallel laser microfabrication, ”Opt. Letters 36, 2302–2304 (2011).
[Crossref]

S. Hasegawa and Y. Hayasaki, “Adaptive optimization of a hologram in holographic femtosecond laser processing system, ”Opt. Letters 34, 22–24 (2009).
[Crossref]

P. J. Rodrigo, V. R. Daria, and J. Glückstad, “Real-time three-dimensional optical micromanipulation of multiple particles and living cells, ”Opt. Letters 29, 2270–2272 (2004).
[Crossref]

C. Bay, N. Hübner, J. Freeman, and T. Wilkinson, “Maskless photolithography via holographic optical projection, ”Opt. Letters 35, 2230–2232 (2010).
[Crossref]

B. M. Hanser, M. G. L. Gustafsson, D. A. Agard, and J. W. Sedat, “Phase retrieval for high-numerical-aperture optical systems, ”Opt. Letters 28, 801–803 (2003).
[Crossref]

Phys. Rev. A (1)

V. Boyer, R. M. Godun, G. Smirne, D. Cassettari, C. M. Chandrashekar, A. B. Deb, Z. J. Laczik, and C. J. Foot, “Dynamic manipulation of Bose-Einstein condensates with a spatial light modulator,” Phys. Rev. A 73, 1–4 (2006).
[Crossref]

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Figures (3)

Fig. 1
Fig. 1 Scheme of the algorithm. The dashed arrow indicates the starting point of the algorithm. The factors in the dashed boxes and the averaging procedure apply to the 3D algorithms only.

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Fig. 2
Fig. 2 Calculations and measurements of the lateral and axial intensity distribution of three target spots laterally placed 1000 nm (column (a) – (c)) and five target spots laterally placed 600 nm (column (d) – (f)) apart.

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Fig. 3
Fig. 3 Calculation of five spots laterally separated by 340 nm (a) and measurement of four spots laterally separated by 390 nm (b). Calculated and measured slices along the optical axis of two spots axially separated by (c) 1500 nm and (d) 1100 nm.

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Equations (2)

Equations on this page are rendered with MathJax. Learn more.

P SLM = ( ( mod ( P target + P blaze + P aberr , 2 π ) − π ) ⋅ sinc 2 ( ( 1 − A target 2 ) π ) + π .
w m 0 = 1 ;             w m k = w m k − 1 〈 | A foc , m k − 1 | 〉 / | A foc , m k − 1 | ;           A targ , m k = w m k ⋅ A targ , m k − 1 .

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