Abstract

We report on new developments in wavefront and polarization control for ultrashort-pulse laser microprocessing. We use two Spatial Light Modulators in combination to structure the optical fields of a picosecond-pulse laser beam, producing vortex wavefronts and radial or azimuthal polarization states. We also carry out the first demonstration of multiple first-order beams with vortex wavefronts and radial or azimuthal polarization states, produced using Computer Generated Holograms. The beams produced are used to nano-structure a highly polished metal surface. Laser Induced Periodic Surface Structures are observed and used to directly verify the state of polarization in the focal plane and help to characterize the optical properties of the setup.

© 2013 OSA

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  27. Z. Guosheng, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
    [CrossRef]
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    [CrossRef] [PubMed]
  29. M. Beresna, M. Gecevicius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett.98(20), 201101 (2011).
    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]

2013

G. Račiukaitis, S. Grubinskas, P. Gecys, and M. Gedvilas, “Selectiveness of laser processing due to energy coupling localization: case of thin film solar cell scribing,” Appl. Phys., A Mater. Sci. Process.112(1), 93–98 (2013).
[CrossRef]

S. Hasegawa and Y. Hayasaki, “Polarization distribution control of parallel femtosecond pulses with spatial light modulators,” Opt. Express21(11), 12987–12995 (2013).
[CrossRef] [PubMed]

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

2012

O. J. Allegre, W. Perrie, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Laser microprocessing of steel with radially and azimuthally polarized femtosecond vortex pulses,” J. Opt.14(8), 085601 (2012).
[CrossRef]

K. Lou, S. X. Qian, X. L. Wang, Y. Li, B. Gu, C. Tu, and H. T. Wang, “Two-dimensional microstructures induced by femtosecond vector light fields on silicon,” Opt. Express20(1), 120–127 (2012).
[CrossRef] [PubMed]

O. J. Allegre, W. Perrie, K. Bauchert, D. Liu, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Real-time control of polarisation in ultra-short-pulse laser micro-machining,” Appl. Phys., A Mater. Sci. Process.107(2), 445–454 (2012).
[CrossRef]

M. Duocastella and C. B. Arnold, “Bessel and annular beams for materials processing,” Laser Photonics Rev.6(5), 607–621 (2012).
[CrossRef]

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

2011

M. Beresna, M. Gecevicius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett.98(20), 201101 (2011).
[CrossRef]

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Procedia12, 21–30 (2011).
[CrossRef]

2010

U. Klug, J. F. Dusing, T. Sato, K. Washio, and R. Kling, “Polarization converted laser beams for micromachining applications,” Proc. SPIE7590, 759006, 759006-8 (2010).
[CrossRef]

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

J. Hamazaki, R. Morita, K. Chujo, Y. Kobayashi, S. Tanda, and T. Omatsu, “Optical-vortex laser ablation,” Opt. Express18(3), 2144–2151 (2010).
[CrossRef] [PubMed]

2009

N. Sudani, K. Venkatakrishnan, and B. Tan, “Laser singulation of thin wafer: die strength and surface roughness analysis of 80μm silicon dice,” Opt. Lasers Eng.47(7-8), 850–854 (2009).
[CrossRef]

Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K. Watkins, “Diffractive multi-beam surface micro-processing using 10 ps laser pulses,” Appl. Surf. Sci.255(22), 9040–9044 (2009).
[CrossRef]

2008

2007

N. Sanner, N. Huot, E. Audouard, C. Larat, and J. P. Huignard, “Direct ultrafast laser micro-structuring of materials using programmable beam shaping,” Opt. Lasers Eng.45(6), 737–741 (2007).
[CrossRef]

Q. Z. Zhao, S. Malzer, and L. J. Wang, “Formation of subwavelength periodic structures on tungsten induced by ultrashort laser pulses,” Opt. Lett.32(13), 1932–1934 (2007).
[CrossRef] [PubMed]

M. Meier, V. Romano, and T. Feurer, “Material processing with pulsed radially and azimuthally polarized laser radiation,” Appl. Phys., A Mater. Sci. Process.86(3), 329–334 (2007).
[CrossRef]

G. Wu, Q. Lou, J. Zhou, J. Dong, and Y. Wei, “Focal shift in focused radially polarized ultrashort pulsed laser beams,” Appl. Opt.46(25), 6251–6255 (2007).
[CrossRef] [PubMed]

2006

K. Venkatakrishnan and B. Tan, “Interconnect microvia drilling with a radially polarized laser beam,” J. Micromech. Microeng.16(12), 2603–2607 (2006).
[CrossRef]

M. R. Beversluis, L. Novotny, and S. J. Stranick, “Programmable vector point-spread function engineering,” Opt. Express14(7), 2650–2656 (2006).
[CrossRef] [PubMed]

2005

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett.87(3), 031101 (2005).
[CrossRef]

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

2004

D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in machining of metals with short and ultrashort laser pulses,” Proc. SPIE5339, 49–63 (2004).
[CrossRef]

2002

K. Venkatakrishnan, B. Tan, P. Stanley, and N. R. Sivakumar, “The effect of polarization on ultrashort pulsed laser ablation of thin metal films,” J. Appl. Phys.92(3), 1604–1607 (2002).
[CrossRef]

1999

V. G. Niziev and A. V. Nesterov, “Influence of beam polarization on laser cutting efficiency,” J. Phys. D Appl. Phys.32(13), 1455–1461 (1999).
[CrossRef]

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process.68(5), 563–567 (1999).
[CrossRef]

P. S. Banks, M. D. Feit, A. M. Rubenchik, B. C. Stuart, and M. D. Perry, “Material effects in ultra-short pulse laser drilling of metals,” Appl. Phys., A Mater. Sci. Process.69(7), S377–S380 (1999).
[CrossRef]

1982

Z. Guosheng, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
[CrossRef]

1978

Abdou-Ahmed, M.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Procedia12, 21–30 (2011).
[CrossRef]

Allegre, O. J.

O. J. Allegre, W. Perrie, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Laser microprocessing of steel with radially and azimuthally polarized femtosecond vortex pulses,” J. Opt.14(8), 085601 (2012).
[CrossRef]

O. J. Allegre, W. Perrie, K. Bauchert, D. Liu, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Real-time control of polarisation in ultra-short-pulse laser micro-machining,” Appl. Phys., A Mater. Sci. Process.107(2), 445–454 (2012).
[CrossRef]

Arnold, C. B.

M. Duocastella and C. B. Arnold, “Bessel and annular beams for materials processing,” Laser Photonics Rev.6(5), 607–621 (2012).
[CrossRef]

Audouard, E.

N. Sanner, N. Huot, E. Audouard, C. Larat, and J. P. Huignard, “Direct ultrafast laser micro-structuring of materials using programmable beam shaping,” Opt. Lasers Eng.45(6), 737–741 (2007).
[CrossRef]

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

Banks, P. S.

P. S. Banks, M. D. Feit, A. M. Rubenchik, B. C. Stuart, and M. D. Perry, “Material effects in ultra-short pulse laser drilling of metals,” Appl. Phys., A Mater. Sci. Process.69(7), S377–S380 (1999).
[CrossRef]

Barrot, F.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Bauchert, K.

O. J. Allegre, W. Perrie, K. Bauchert, D. Liu, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Real-time control of polarisation in ultra-short-pulse laser micro-machining,” Appl. Phys., A Mater. Sci. Process.107(2), 445–454 (2012).
[CrossRef]

Baum, A.

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

Bélanger, P. A.

Bellouard, Y.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Beresna, M.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

M. Beresna, M. Gecevicius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett.98(20), 201101 (2011).
[CrossRef]

Beversluis, M. R.

Bottinelli, S.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Breguet, J. M.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Breitling, D.

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in machining of metals with short and ultrashort laser pulses,” Proc. SPIE5339, 49–63 (2004).
[CrossRef]

Champion, A.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Chappuis, O.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Chen, S.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Cheng, J.

Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K. Watkins, “Diffractive multi-beam surface micro-processing using 10 ps laser pulses,” Appl. Surf. Sci.255(22), 9040–9044 (2009).
[CrossRef]

Chujo, K.

Clark, R. L.

Clavel, R.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Cole, D. G.

Corbari, C.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Dausinger, F.

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in machining of metals with short and ultrashort laser pulses,” Proc. SPIE5339, 49–63 (2004).
[CrossRef]

Dearden, G.

O. J. Allegre, W. Perrie, K. Bauchert, D. Liu, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Real-time control of polarisation in ultra-short-pulse laser micro-machining,” Appl. Phys., A Mater. Sci. Process.107(2), 445–454 (2012).
[CrossRef]

O. J. Allegre, W. Perrie, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Laser microprocessing of steel with radially and azimuthally polarized femtosecond vortex pulses,” J. Opt.14(8), 085601 (2012).
[CrossRef]

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K. Watkins, “Diffractive multi-beam surface micro-processing using 10 ps laser pulses,” Appl. Surf. Sci.255(22), 9040–9044 (2009).
[CrossRef]

Dong, J.

Donnet, C.

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

Duocastella, M.

M. Duocastella and C. B. Arnold, “Bessel and annular beams for materials processing,” Laser Photonics Rev.6(5), 607–621 (2012).
[CrossRef]

Dusing, J. F.

U. Klug, J. F. Dusing, T. Sato, K. Washio, and R. Kling, “Polarization converted laser beams for micromachining applications,” Proc. SPIE7590, 759006, 759006-8 (2010).
[CrossRef]

Edwardson, S.

Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K. Watkins, “Diffractive multi-beam surface micro-processing using 10 ps laser pulses,” Appl. Surf. Sci.255(22), 9040–9044 (2009).
[CrossRef]

Edwardson, S. P.

O. J. Allegre, W. Perrie, K. Bauchert, D. Liu, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Real-time control of polarisation in ultra-short-pulse laser micro-machining,” Appl. Phys., A Mater. Sci. Process.107(2), 445–454 (2012).
[CrossRef]

O. J. Allegre, W. Perrie, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Laser microprocessing of steel with radially and azimuthally polarized femtosecond vortex pulses,” J. Opt.14(8), 085601 (2012).
[CrossRef]

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

Fallnich, C.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process.68(5), 563–567 (1999).
[CrossRef]

Fauchet, P. M.

Z. Guosheng, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
[CrossRef]

Fearon, E.

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

Feit, M. D.

P. S. Banks, M. D. Feit, A. M. Rubenchik, B. C. Stuart, and M. D. Perry, “Material effects in ultra-short pulse laser drilling of metals,” Appl. Phys., A Mater. Sci. Process.69(7), S377–S380 (1999).
[CrossRef]

Feurer, T.

M. Meier, V. Romano, and T. Feurer, “Material processing with pulsed radially and azimuthally polarized laser radiation,” Appl. Phys., A Mater. Sci. Process.86(3), 329–334 (2007).
[CrossRef]

Föhl, C.

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

Gecevicius, M.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

M. Beresna, M. Gecevicius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett.98(20), 201101 (2011).
[CrossRef]

Gecys, P.

G. Račiukaitis, S. Grubinskas, P. Gecys, and M. Gedvilas, “Selectiveness of laser processing due to energy coupling localization: case of thin film solar cell scribing,” Appl. Phys., A Mater. Sci. Process.112(1), 93–98 (2013).
[CrossRef]

Gedvilas, M.

G. Račiukaitis, S. Grubinskas, P. Gecys, and M. Gedvilas, “Selectiveness of laser processing due to energy coupling localization: case of thin film solar cell scribing,” Appl. Phys., A Mater. Sci. Process.112(1), 93–98 (2013).
[CrossRef]

Gertus, T.

M. Beresna, M. Gecevicius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett.98(20), 201101 (2011).
[CrossRef]

Graf, T.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Procedia12, 21–30 (2011).
[CrossRef]

Grubinskas, S.

G. Račiukaitis, S. Grubinskas, P. Gecys, and M. Gedvilas, “Selectiveness of laser processing due to energy coupling localization: case of thin film solar cell scribing,” Appl. Phys., A Mater. Sci. Process.112(1), 93–98 (2013).
[CrossRef]

Gu, B.

Guosheng, Z.

Z. Guosheng, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
[CrossRef]

Hamazaki, J.

Hasegawa, S.

Hayasaki, Y.

S. Hasegawa and Y. Hayasaki, “Polarization distribution control of parallel femtosecond pulses with spatial light modulators,” Opt. Express21(11), 12987–12995 (2013).
[CrossRef] [PubMed]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett.87(3), 031101 (2005).
[CrossRef]

Hoenninger, C.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Hopper, M.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Huignard, J. P.

N. Sanner, N. Huot, E. Audouard, C. Larat, and J. P. Huignard, “Direct ultrafast laser micro-structuring of materials using programmable beam shaping,” Opt. Lasers Eng.45(6), 737–741 (2007).
[CrossRef]

Huot, N.

N. Sanner, N. Huot, E. Audouard, C. Larat, and J. P. Huignard, “Direct ultrafast laser micro-structuring of materials using programmable beam shaping,” Opt. Lasers Eng.45(6), 737–741 (2007).
[CrossRef]

Jenness, N. J.

Jia, H.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Johannes, M. S.

Kamlage, G.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process.68(5), 563–567 (1999).
[CrossRef]

Kazansky, P.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Kazansky, P. G.

M. Beresna, M. Gecevicius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett.98(20), 201101 (2011).
[CrossRef]

Kling, R.

U. Klug, J. F. Dusing, T. Sato, K. Washio, and R. Kling, “Polarization converted laser beams for micromachining applications,” Proc. SPIE7590, 759006, 759006-8 (2010).
[CrossRef]

Klug, U.

U. Klug, J. F. Dusing, T. Sato, K. Washio, and R. Kling, “Polarization converted laser beams for micromachining applications,” Proc. SPIE7590, 759006, 759006-8 (2010).
[CrossRef]

Kobayashi, Y.

Kral, M.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Kraus, M.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Procedia12, 21–30 (2011).
[CrossRef]

Kuang, Z.

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K. Watkins, “Diffractive multi-beam surface micro-processing using 10 ps laser pulses,” Appl. Surf. Sci.255(22), 9040–9044 (2009).
[CrossRef]

Larat, C.

N. Sanner, N. Huot, E. Audouard, C. Larat, and J. P. Huignard, “Direct ultrafast laser micro-structuring of materials using programmable beam shaping,” Opt. Lasers Eng.45(6), 737–741 (2007).
[CrossRef]

Le Harzic, R.

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

Lenssen, B.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Li, X.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Li, Y.

Liao, J.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Liu, D.

O. J. Allegre, W. Perrie, K. Bauchert, D. Liu, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Real-time control of polarisation in ultra-short-pulse laser micro-machining,” Appl. Phys., A Mater. Sci. Process.107(2), 445–454 (2012).
[CrossRef]

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K. Watkins, “Diffractive multi-beam surface micro-processing using 10 ps laser pulses,” Appl. Surf. Sci.255(22), 9040–9044 (2009).
[CrossRef]

Liu, J.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Liu, X.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Lopez, J.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Lou, K.

Lou, Q.

Lu, M.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Mabillard, Y.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Malzer, S.

Matteucci, M.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Meier, M.

M. Meier, V. Romano, and T. Feurer, “Material processing with pulsed radially and azimuthally polarized laser radiation,” Appl. Phys., A Mater. Sci. Process.86(3), 329–334 (2007).
[CrossRef]

Michalowski, A.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Procedia12, 21–30 (2011).
[CrossRef]

Momma, C.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process.68(5), 563–567 (1999).
[CrossRef]

Morita, R.

Mottay, E.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Nesterov, A. V.

V. G. Niziev and A. V. Nesterov, “Influence of beam polarization on laser cutting efficiency,” J. Phys. D Appl. Phys.32(13), 1455–1461 (1999).
[CrossRef]

Nie, Y.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Nishida, N.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett.87(3), 031101 (2005).
[CrossRef]

Niziev, V. G.

V. G. Niziev and A. V. Nesterov, “Influence of beam polarization on laser cutting efficiency,” J. Phys. D Appl. Phys.32(13), 1455–1461 (1999).
[CrossRef]

Nolte, S.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process.68(5), 563–567 (1999).
[CrossRef]

Novotny, L.

Omatsu, T.

Onuseit, V.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Procedia12, 21–30 (2011).
[CrossRef]

Ostendorf, A.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process.68(5), 563–567 (1999).
[CrossRef]

Padgett, M. J.

Perrie, W.

O. J. Allegre, W. Perrie, K. Bauchert, D. Liu, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Real-time control of polarisation in ultra-short-pulse laser micro-machining,” Appl. Phys., A Mater. Sci. Process.107(2), 445–454 (2012).
[CrossRef]

O. J. Allegre, W. Perrie, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Laser microprocessing of steel with radially and azimuthally polarized femtosecond vortex pulses,” J. Opt.14(8), 085601 (2012).
[CrossRef]

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K. Watkins, “Diffractive multi-beam surface micro-processing using 10 ps laser pulses,” Appl. Surf. Sci.255(22), 9040–9044 (2009).
[CrossRef]

Perry, M. D.

P. S. Banks, M. D. Feit, A. M. Rubenchik, B. C. Stuart, and M. D. Perry, “Material effects in ultra-short pulse laser drilling of metals,” Appl. Phys., A Mater. Sci. Process.69(7), S377–S380 (1999).
[CrossRef]

Qi, J.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Qian, S. X.

Raciukaitis, G.

G. Račiukaitis, S. Grubinskas, P. Gecys, and M. Gedvilas, “Selectiveness of laser processing due to energy coupling localization: case of thin film solar cell scribing,” Appl. Phys., A Mater. Sci. Process.112(1), 93–98 (2013).
[CrossRef]

Rioux, M.

Romano, V.

M. Meier, V. Romano, and T. Feurer, “Material processing with pulsed radially and azimuthally polarized laser radiation,” Appl. Phys., A Mater. Sci. Process.86(3), 329–334 (2007).
[CrossRef]

Rominger, V.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Procedia12, 21–30 (2011).
[CrossRef]

Rubenchik, A. M.

P. S. Banks, M. D. Feit, A. M. Rubenchik, B. C. Stuart, and M. D. Perry, “Material effects in ultra-short pulse laser drilling of metals,” Appl. Phys., A Mater. Sci. Process.69(7), S377–S380 (1999).
[CrossRef]

Ruf, A.

D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in machining of metals with short and ultrashort laser pulses,” Proc. SPIE5339, 49–63 (2004).
[CrossRef]

Sanner, N.

N. Sanner, N. Huot, E. Audouard, C. Larat, and J. P. Huignard, “Direct ultrafast laser micro-structuring of materials using programmable beam shaping,” Opt. Lasers Eng.45(6), 737–741 (2007).
[CrossRef]

Sato, T.

U. Klug, J. F. Dusing, T. Sato, K. Washio, and R. Kling, “Polarization converted laser beams for micromachining applications,” Proc. SPIE7590, 759006, 759006-8 (2010).
[CrossRef]

Schaap, A.

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
[CrossRef]

Scully, P. J.

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

Siegman, A. E.

Z. Guosheng, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
[CrossRef]

Sivakumar, N. R.

K. Venkatakrishnan, B. Tan, P. Stanley, and N. R. Sivakumar, “The effect of polarization on ultrashort pulsed laser ablation of thin metal films,” J. Appl. Phys.92(3), 1604–1607 (2002).
[CrossRef]

Sommer, S.

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

Stanley, P.

K. Venkatakrishnan, B. Tan, P. Stanley, and N. R. Sivakumar, “The effect of polarization on ultrashort pulsed laser ablation of thin metal films,” J. Appl. Phys.92(3), 1604–1607 (2002).
[CrossRef]

Stranick, S. J.

Stuart, B. C.

P. S. Banks, M. D. Feit, A. M. Rubenchik, B. C. Stuart, and M. D. Perry, “Material effects in ultra-short pulse laser drilling of metals,” Appl. Phys., A Mater. Sci. Process.69(7), S377–S380 (1999).
[CrossRef]

Sudani, N.

N. Sudani, K. Venkatakrishnan, and B. Tan, “Laser singulation of thin wafer: die strength and surface roughness analysis of 80μm silicon dice,” Opt. Lasers Eng.47(7-8), 850–854 (2009).
[CrossRef]

Sugimoto, T.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett.87(3), 031101 (2005).
[CrossRef]

Sun, W.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Takita, A.

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett.87(3), 031101 (2005).
[CrossRef]

Tan, B.

N. Sudani, K. Venkatakrishnan, and B. Tan, “Laser singulation of thin wafer: die strength and surface roughness analysis of 80μm silicon dice,” Opt. Lasers Eng.47(7-8), 850–854 (2009).
[CrossRef]

K. Venkatakrishnan and B. Tan, “Interconnect microvia drilling with a radially polarized laser beam,” J. Micromech. Microeng.16(12), 2603–2607 (2006).
[CrossRef]

K. Venkatakrishnan, B. Tan, P. Stanley, and N. R. Sivakumar, “The effect of polarization on ultrashort pulsed laser ablation of thin metal films,” J. Appl. Phys.92(3), 1604–1607 (2002).
[CrossRef]

Tan, J.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Tanda, S.

Tremblay, R.

Tu, C.

Valette, S.

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

Venkatakrishnan, K.

N. Sudani, K. Venkatakrishnan, and B. Tan, “Laser singulation of thin wafer: die strength and surface roughness analysis of 80μm silicon dice,” Opt. Lasers Eng.47(7-8), 850–854 (2009).
[CrossRef]

K. Venkatakrishnan and B. Tan, “Interconnect microvia drilling with a radially polarized laser beam,” J. Micromech. Microeng.16(12), 2603–2607 (2006).
[CrossRef]

K. Venkatakrishnan, B. Tan, P. Stanley, and N. R. Sivakumar, “The effect of polarization on ultrashort pulsed laser ablation of thin metal films,” J. Appl. Phys.92(3), 1604–1607 (2002).
[CrossRef]

Von Alvensleben, F.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process.68(5), 563–567 (1999).
[CrossRef]

Wang, H. T.

Wang, L. J.

Wang, X.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Wang, X. L.

Washio, K.

U. Klug, J. F. Dusing, T. Sato, K. Washio, and R. Kling, “Polarization converted laser beams for micromachining applications,” Proc. SPIE7590, 759006, 759006-8 (2010).
[CrossRef]

Watkins, K.

Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K. Watkins, “Diffractive multi-beam surface micro-processing using 10 ps laser pulses,” Appl. Surf. Sci.255(22), 9040–9044 (2009).
[CrossRef]

Watkins, K. G.

O. J. Allegre, W. Perrie, K. Bauchert, D. Liu, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Real-time control of polarisation in ultra-short-pulse laser micro-machining,” Appl. Phys., A Mater. Sci. Process.107(2), 445–454 (2012).
[CrossRef]

O. J. Allegre, W. Perrie, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Laser microprocessing of steel with radially and azimuthally polarized femtosecond vortex pulses,” J. Opt.14(8), 085601 (2012).
[CrossRef]

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

Weber, R.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Procedia12, 21–30 (2011).
[CrossRef]

Wei, Y.

Weikert, M.

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

Welling, H.

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process.68(5), 563–567 (1999).
[CrossRef]

Wu, G.

Wulff, K. D.

Yang, J.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Zhang, J.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Zhao, Q. Z.

Zhou, J.

Appl. Opt.

Appl. Phys. B

D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, “High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings,” Appl. Phys. B101(4), 817–823 (2010).
[CrossRef]

Appl. Phys. Lett.

M. Beresna, M. Gecevicius, P. G. Kazansky, and T. Gertus, “Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass,” Appl. Phys. Lett.98(20), 201101 (2011).
[CrossRef]

Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, “Variable holographic femtosecond laser processing by use of a spatial light modulator,” Appl. Phys. Lett.87(3), 031101 (2005).
[CrossRef]

Appl. Phys., A Mater. Sci. Process.

M. Meier, V. Romano, and T. Feurer, “Material processing with pulsed radially and azimuthally polarized laser radiation,” Appl. Phys., A Mater. Sci. Process.86(3), 329–334 (2007).
[CrossRef]

G. Račiukaitis, S. Grubinskas, P. Gecys, and M. Gedvilas, “Selectiveness of laser processing due to energy coupling localization: case of thin film solar cell scribing,” Appl. Phys., A Mater. Sci. Process.112(1), 93–98 (2013).
[CrossRef]

P. S. Banks, M. D. Feit, A. M. Rubenchik, B. C. Stuart, and M. D. Perry, “Material effects in ultra-short pulse laser drilling of metals,” Appl. Phys., A Mater. Sci. Process.69(7), S377–S380 (1999).
[CrossRef]

O. J. Allegre, W. Perrie, K. Bauchert, D. Liu, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Real-time control of polarisation in ultra-short-pulse laser micro-machining,” Appl. Phys., A Mater. Sci. Process.107(2), 445–454 (2012).
[CrossRef]

S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, and H. Welling, “Polarization effects in ultrashort-pulse laser drilling,” Appl. Phys., A Mater. Sci. Process.68(5), 563–567 (1999).
[CrossRef]

Appl. Surf. Sci.

R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, “Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps,” Appl. Surf. Sci.249(1-4), 322–331 (2005).
[CrossRef]

Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K. Watkins, “Diffractive multi-beam surface micro-processing using 10 ps laser pulses,” Appl. Surf. Sci.255(22), 9040–9044 (2009).
[CrossRef]

J. Appl. Phys.

K. Venkatakrishnan, B. Tan, P. Stanley, and N. R. Sivakumar, “The effect of polarization on ultrashort pulsed laser ablation of thin metal films,” J. Appl. Phys.92(3), 1604–1607 (2002).
[CrossRef]

J. Micromech. Microeng.

K. Venkatakrishnan and B. Tan, “Interconnect microvia drilling with a radially polarized laser beam,” J. Micromech. Microeng.16(12), 2603–2607 (2006).
[CrossRef]

J. Opt.

O. J. Allegre, W. Perrie, S. P. Edwardson, G. Dearden, and K. G. Watkins, “Laser microprocessing of steel with radially and azimuthally polarized femtosecond vortex pulses,” J. Opt.14(8), 085601 (2012).
[CrossRef]

J. Phys. D Appl. Phys.

V. G. Niziev and A. V. Nesterov, “Influence of beam polarization on laser cutting efficiency,” J. Phys. D Appl. Phys.32(13), 1455–1461 (1999).
[CrossRef]

JLMN

Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, “The Femtoprint Project,” JLMN7(1), 1–10 (2012).
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M. Duocastella and C. B. Arnold, “Bessel and annular beams for materials processing,” Laser Photonics Rev.6(5), 607–621 (2012).
[CrossRef]

Opt. Eng.

J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, “Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam,” Opt. Eng.52(2), 024201 (2013).
[CrossRef]

Opt. Express

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N. Sanner, N. Huot, E. Audouard, C. Larat, and J. P. Huignard, “Direct ultrafast laser micro-structuring of materials using programmable beam shaping,” Opt. Lasers Eng.45(6), 737–741 (2007).
[CrossRef]

N. Sudani, K. Venkatakrishnan, and B. Tan, “Laser singulation of thin wafer: die strength and surface roughness analysis of 80μm silicon dice,” Opt. Lasers Eng.47(7-8), 850–854 (2009).
[CrossRef]

Opt. Lett.

Phys. Procedia

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Procedia12, 21–30 (2011).
[CrossRef]

Phys. Rev. B

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Proc. SPIE

U. Klug, J. F. Dusing, T. Sato, K. Washio, and R. Kling, “Polarization converted laser beams for micromachining applications,” Proc. SPIE7590, 759006, 759006-8 (2010).
[CrossRef]

D. Breitling, A. Ruf, and F. Dausinger, “Fundamental aspects in machining of metals with short and ultrashort laser pulses,” Proc. SPIE5339, 49–63 (2004).
[CrossRef]

Other

D. Breitling, C. Föhl, F. Dausinger, T. Kononenko, and V. Konov, “Drilling of metals”, in Femtosecond Technology for Technical and Medical Applications, Topics Appl. Phys. 96, 131–156 (Springer-Verlag, 2004).

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Figures (9)

Fig. 1
Fig. 1

Schematic of the SLM Converter, which consists of two SLMs and two zero-order waveplates. SLM1 instigates a phase pattern designed to structure the beam wavefronts. After SLM1, the horizontal polarization is tilted to + 45 with a half-waveplate. SLM2 and the quarter-waveplate are used to convert the incident linear polarization into the desired state of polarization. This schematic represents the top view of the setup. For the Jones vector calculation, we define a coordinate system with a horizontal axis (x) and a vertical axis (y).

Fig. 2
Fig. 2

Schematic showing how the SLM Converter is used to control the wavefront and polarization of a picosecond-pulse laser microprocessing setup. The “polarization test components” are removed when the micro-processing tests are carried out.

Fig. 3
Fig. 3

(a) Vortex wavefront induced at SLM1. (b) Incident beam profile before SLM1. (c) Resulting beam profile after SLM1. The colour coded scale represents intensity, in arbitrary units.

Fig. 4
Fig. 4

Optical micrographs showing the focal spot produced with ~100 pulses at 3μJ/pulse, with the SLM Converter producing a Gaussian beam (a) and a vortex beam (b). In each case, the LIPSS are perpendicular to the linear polarization, which is indicated with blue arrows.

Fig. 5
Fig. 5

Beam profiles produced by a (a) radially or (b) azimuthally polarized collimated beam, after transmission through a polarizing filter with its transmission axis oriented horizontally. The colour coded scale represents intensity in arbitrary units. The vortex wavefronts which are induced at SLM2 are shown in the top-left inlays.

Fig. 6
Fig. 6

Optical micrographs showing the focal spots produced with ~100 pulses at 3μJ/pulse, with the SLM Converter producing a vortex beam (orbital angular momentum l = 1) polarized radially (a) and azimuthally (b). The blue arrows indicate the polarization fields.

Fig. 7
Fig. 7

(a) CGH induced at SLM1 to produce three first-order focal spots. (b) Vortex wavefront induced at SLM1, in addition to the CGH. (c) Optical micrograph showing the three focal spots produced simultaneously with a vortex beam mode.

Fig. 8
Fig. 8

Beam profiles produced by a (a) radially or (b) azimuthally polarized beam, after transmission through a polarizing filter with its transmission axis oriented horizontally. The colour coded scale represents intensity, in arbitrary units. Interference fringes from the first-order diffracted beams superimpose on the radial/azimuthal profiles. The vortex wavefronts which are induced at SLM2 are shown in the top-left inlays.

Fig. 9
Fig. 9

(a) Optical micrograph showing the multiple laser spots marked simultaneously at the focal plane, with ~100 pulses at 3µJ/pulse, when the SLM Converter produced three first-order beams polarized radially. (b) A magnification of one of three focal spots produced with a radially polarized beam. (c) One of three spots produced with an azimuthally polarized beam. The blue arrows indicate the direction of polarization, which is perpendicular to the LIPSS.

Tables (1)

Tables Icon

Table 1 Jones matrices

Equations (2)

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T(x,y)= 1 2 Q×R× S 2 (x,y)×H× S 1 (x,y).
J out (x,y)= e i π 2 × e i ϕ 1 (x,y) × e i ϕ 2 (x,y) 2 ×( sin ϕ 2 (x,y) 2 cos ϕ 2 (x,y) 2 ).

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