Abstract

Deterministic hydrodynamic polishing with HyDRa requires a precise control of polishing parameters, such as propelling air pressure, slurry density, slurry flux and tool height. We describe the HyDRa polishing system and prove how precise, deterministic polishing can be achieved in terms of the control of these parameters. The polishing results of an 84 cm hyperbolic mirror are presented to illustrate how the stability of these parameters is important to obtain high-quality surfaces.

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  1. R.A. Jones, “Computer control for grinding and polishing,” Photonics Spectra, 34–39 (1963).
  2. R. A. Jones, Computer-controlled polishing of telescope mirror segments, Opt. Eng.22, 236–240 (1983).
    [CrossRef]
  3. Kordonski William and Sergei Gorodkin, “Material Removal in Magnetorheological Finishing of Optics,” Appl. Opt.50, 1984–1994 (2011).
    [CrossRef]
  4. Piché, Francois, and Andrew R. Clarkson, “One Year of Finishing Meter-Class Optics with MRFat L-3 IOS Brashear Optics,” In Optical Fabrication and Testing, OThB6. OSA Technical Digest (CD). Optical Society of America, 2010.
  5. L. N. Allen, R. E. Keim, T. S. Lewis, and J. R. Ullom, “Surface error correction of a Keck 10-m telescope primary mirror segment by ion-beam figuring,” Proc. SPIE1531, Advanced Optical Manufacturing and testing II, 195 (1992).
    [CrossRef]
  6. D. D. Walker, D. Brooks, A. King, R. Freeman, R. Morton, G. McCavana, and S.W. Kim, “The ‘Precessions’ tooling for polishing and figuring flat and aspheric surfaces,” Opt. Express11(8), 958–964 (2003).
    [CrossRef] [PubMed]
  7. D. W. Kim and J. H. Burge, “Rigid confromal tool using non-linear visco-elastic effect,” Opt. Express18(3), 2242–2256 (2010).
    [CrossRef] [PubMed]
  8. E. Sohn, E. Ruiz, L. Salas, E. Luna, and J. Herrera, “HyDRa: polishing with a vortex,” Appl. Opt. (submitted to, 2013).
  9. O. W. Fähnle, H. van Brug, and H. J. Frankena, “Fluid Jet Polishing of Optical Surfaces,” Appl. Opt.37, 6771–6773 (1998).
    [CrossRef]
  10. E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” US patent 7169012 (2007).
  11. E. Sohn, E. Ruiz, L. Salas, E. Luna, J. Herrera, F. Quiros, M. Nunez, and E. Lopez, “Polishing results of an 84 cm primary mirror with HyDRa,” Proc. SPIE Optifab, TD07-17 (2011).
  12. E. Luna, L. Salas, E. Sohn, E. Ruiz, J.M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt.48, 1494–1501 (2009).
    [CrossRef] [PubMed]

2011

2010

2009

2003

1998

1992

L. N. Allen, R. E. Keim, T. S. Lewis, and J. R. Ullom, “Surface error correction of a Keck 10-m telescope primary mirror segment by ion-beam figuring,” Proc. SPIE1531, Advanced Optical Manufacturing and testing II, 195 (1992).
[CrossRef]

1983

R. A. Jones, Computer-controlled polishing of telescope mirror segments, Opt. Eng.22, 236–240 (1983).
[CrossRef]

1963

R.A. Jones, “Computer control for grinding and polishing,” Photonics Spectra, 34–39 (1963).

Allen, L. N.

L. N. Allen, R. E. Keim, T. S. Lewis, and J. R. Ullom, “Surface error correction of a Keck 10-m telescope primary mirror segment by ion-beam figuring,” Proc. SPIE1531, Advanced Optical Manufacturing and testing II, 195 (1992).
[CrossRef]

Brooks, D.

Burge, J. H.

Clarkson, Andrew R.

Piché, Francois, and Andrew R. Clarkson, “One Year of Finishing Meter-Class Optics with MRFat L-3 IOS Brashear Optics,” In Optical Fabrication and Testing, OThB6. OSA Technical Digest (CD). Optical Society of America, 2010.

Fähnle, O. W.

Francois,

Piché, Francois, and Andrew R. Clarkson, “One Year of Finishing Meter-Class Optics with MRFat L-3 IOS Brashear Optics,” In Optical Fabrication and Testing, OThB6. OSA Technical Digest (CD). Optical Society of America, 2010.

Frankena, H. J.

Freeman, R.

Gorodkin, Sergei

Herrera, J.

E. Luna, L. Salas, E. Sohn, E. Ruiz, J.M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt.48, 1494–1501 (2009).
[CrossRef] [PubMed]

E. Sohn, E. Ruiz, L. Salas, E. Luna, and J. Herrera, “HyDRa: polishing with a vortex,” Appl. Opt. (submitted to, 2013).

E. Sohn, E. Ruiz, L. Salas, E. Luna, J. Herrera, F. Quiros, M. Nunez, and E. Lopez, “Polishing results of an 84 cm primary mirror with HyDRa,” Proc. SPIE Optifab, TD07-17 (2011).

Jones, R. A.

R. A. Jones, Computer-controlled polishing of telescope mirror segments, Opt. Eng.22, 236–240 (1983).
[CrossRef]

Jones, R.A.

R.A. Jones, “Computer control for grinding and polishing,” Photonics Spectra, 34–39 (1963).

Keim, R. E.

L. N. Allen, R. E. Keim, T. S. Lewis, and J. R. Ullom, “Surface error correction of a Keck 10-m telescope primary mirror segment by ion-beam figuring,” Proc. SPIE1531, Advanced Optical Manufacturing and testing II, 195 (1992).
[CrossRef]

Kim, D. W.

Kim, S.W.

King, A.

Lewis, T. S.

L. N. Allen, R. E. Keim, T. S. Lewis, and J. R. Ullom, “Surface error correction of a Keck 10-m telescope primary mirror segment by ion-beam figuring,” Proc. SPIE1531, Advanced Optical Manufacturing and testing II, 195 (1992).
[CrossRef]

Lopez, E.

E. Sohn, E. Ruiz, L. Salas, E. Luna, J. Herrera, F. Quiros, M. Nunez, and E. Lopez, “Polishing results of an 84 cm primary mirror with HyDRa,” Proc. SPIE Optifab, TD07-17 (2011).

Luna, E.

E. Luna, L. Salas, E. Sohn, E. Ruiz, J.M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt.48, 1494–1501 (2009).
[CrossRef] [PubMed]

E. Sohn, E. Ruiz, L. Salas, E. Luna, and J. Herrera, “HyDRa: polishing with a vortex,” Appl. Opt. (submitted to, 2013).

E. Sohn, E. Ruiz, L. Salas, E. Luna, J. Herrera, F. Quiros, M. Nunez, and E. Lopez, “Polishing results of an 84 cm primary mirror with HyDRa,” Proc. SPIE Optifab, TD07-17 (2011).

E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” US patent 7169012 (2007).

McCavana, G.

Morton, R.

Nunez, J.M.

Nunez, M.

E. Sohn, E. Ruiz, L. Salas, E. Luna, J. Herrera, F. Quiros, M. Nunez, and E. Lopez, “Polishing results of an 84 cm primary mirror with HyDRa,” Proc. SPIE Optifab, TD07-17 (2011).

Piché,

Piché, Francois, and Andrew R. Clarkson, “One Year of Finishing Meter-Class Optics with MRFat L-3 IOS Brashear Optics,” In Optical Fabrication and Testing, OThB6. OSA Technical Digest (CD). Optical Society of America, 2010.

Quiros, F.

E. Sohn, E. Ruiz, L. Salas, E. Luna, J. Herrera, F. Quiros, M. Nunez, and E. Lopez, “Polishing results of an 84 cm primary mirror with HyDRa,” Proc. SPIE Optifab, TD07-17 (2011).

Ruiz, E.

E. Luna, L. Salas, E. Sohn, E. Ruiz, J.M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt.48, 1494–1501 (2009).
[CrossRef] [PubMed]

E. Sohn, E. Ruiz, L. Salas, E. Luna, and J. Herrera, “HyDRa: polishing with a vortex,” Appl. Opt. (submitted to, 2013).

E. Sohn, E. Ruiz, L. Salas, E. Luna, J. Herrera, F. Quiros, M. Nunez, and E. Lopez, “Polishing results of an 84 cm primary mirror with HyDRa,” Proc. SPIE Optifab, TD07-17 (2011).

E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” US patent 7169012 (2007).

Salas, L.

E. Luna, L. Salas, E. Sohn, E. Ruiz, J.M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt.48, 1494–1501 (2009).
[CrossRef] [PubMed]

E. Sohn, E. Ruiz, L. Salas, E. Luna, and J. Herrera, “HyDRa: polishing with a vortex,” Appl. Opt. (submitted to, 2013).

E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” US patent 7169012 (2007).

E. Sohn, E. Ruiz, L. Salas, E. Luna, J. Herrera, F. Quiros, M. Nunez, and E. Lopez, “Polishing results of an 84 cm primary mirror with HyDRa,” Proc. SPIE Optifab, TD07-17 (2011).

Sohn, E.

E. Luna, L. Salas, E. Sohn, E. Ruiz, J.M. Nunez, and J. Herrera, “Deterministic convergence in iterative phase shifting,” Appl. Opt.48, 1494–1501 (2009).
[CrossRef] [PubMed]

E. Sohn, E. Ruiz, L. Salas, E. Luna, and J. Herrera, “HyDRa: polishing with a vortex,” Appl. Opt. (submitted to, 2013).

E. Sohn, E. Ruiz, L. Salas, E. Luna, J. Herrera, F. Quiros, M. Nunez, and E. Lopez, “Polishing results of an 84 cm primary mirror with HyDRa,” Proc. SPIE Optifab, TD07-17 (2011).

E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” US patent 7169012 (2007).

Ullom, J. R.

L. N. Allen, R. E. Keim, T. S. Lewis, and J. R. Ullom, “Surface error correction of a Keck 10-m telescope primary mirror segment by ion-beam figuring,” Proc. SPIE1531, Advanced Optical Manufacturing and testing II, 195 (1992).
[CrossRef]

van Brug, H.

Walker, D. D.

William, Kordonski

Appl. Opt.

Opt. Eng.

R. A. Jones, Computer-controlled polishing of telescope mirror segments, Opt. Eng.22, 236–240 (1983).
[CrossRef]

Opt. Express

Photonics Spectra

R.A. Jones, “Computer control for grinding and polishing,” Photonics Spectra, 34–39 (1963).

Proc. SPIE

L. N. Allen, R. E. Keim, T. S. Lewis, and J. R. Ullom, “Surface error correction of a Keck 10-m telescope primary mirror segment by ion-beam figuring,” Proc. SPIE1531, Advanced Optical Manufacturing and testing II, 195 (1992).
[CrossRef]

Other

Piché, Francois, and Andrew R. Clarkson, “One Year of Finishing Meter-Class Optics with MRFat L-3 IOS Brashear Optics,” In Optical Fabrication and Testing, OThB6. OSA Technical Digest (CD). Optical Society of America, 2010.

E. Sohn, E. Ruiz, L. Salas, E. Luna, and J. Herrera, “HyDRa: polishing with a vortex,” Appl. Opt. (submitted to, 2013).

E. Ruiz, E. Sohn, L. Salas, and E. Luna, “Hydrodynamic radial flux tool for polishing and grinding optical and semiconductor surfaces,” US patent 7169012 (2007).

E. Sohn, E. Ruiz, L. Salas, E. Luna, J. Herrera, F. Quiros, M. Nunez, and E. Lopez, “Polishing results of an 84 cm primary mirror with HyDRa,” Proc. SPIE Optifab, TD07-17 (2011).

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