Abstract

We present the design, fabrication, and characterization of integrated Bragg gratings in silicon-on-insulator slot waveguides. The Bragg gratings are formed with sidewall corrugations, either on the inside or on the outside of the waveguide. We demonstrate resonators implemented using phase-shifted Bragg gratings in slot waveguides, showing quality factors up to 3 × 104. Due to the strong optical confinement in the slot, these devices are promising for optical sensing applications. The devices were fabricated using a CMOS-compatible process, facilitating high-volume and low-cost production.

© 2013 Optical Society of America

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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]

2013 (4)

W. Shi, X. Wang, C. Lin, H. Yun, Y. Liu, T. Baehr-Jones, M. Hochberg, N. A. F. Jaeger, and L. Chrostowski, “Silicon photonic grating-assisted, contra-directional couplers,” Opt. Express 21, 3633–3650 (2013).
[Crossref] [PubMed]

W. Shi, H. Yun, C. Lin, M. Greenberg, X. Wang, Y. Wang, S. T. Fard, J. Flueckiger, N. A. F. Jaeger, and L. Chros-towski, “Ultra-compact, flat-top demultiplexer using anti-reflection contra-directional couplers for CWDM networks on silicon,” Opt. Express 21, 6733–6738 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

2012 (6)

H. Zhang, J. Zhang, S. Chen, J. Song, J. Kee, M. Yu, and G.-Q. Lo, “CMOS-compatible fabrication of silicon-based sub-100-nm slot waveguide with efficient channel-slot coupler,” IEEE Photon. Technol. Lett. 24, 10–12 (2012).
[Crossref]

K. Van Acoleyen, J. Roels, P. Mechet, T. Claes, D. Van Thourhout, and R. Baets, “Ultracompact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in silicon-on-insulator,” IEEE Photon. J. 4, 779–788 (2012).
[Crossref]

W. Shi, X. Wang, W. Zhang, H. Yun, C. Lin, L. Chrostowski, and N. A. F. Jaeger, “Grating-coupled silicon microring resonators,” Appl. Phys. Lett. 100, 121118 (2012).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

A. S. Jugessur, M. Yagnyukova, J. Dou, and J. S. Aitchison, “Bragg-grating air-slot optical waveguide for label-free sensing,” Proc. SPIE 8231, 82310N (2012).
[Crossref]

X. Wang, W. Shi, H. Yun, S. Grist, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process,” Opt. Express 20, 15547–15558 (2012).
[Crossref] [PubMed]

2011 (7)

X. Wang, W. Shi, R. Vafaei, N. A. F. Jaeger, and L. Chrostowski, “Uniform and sampled Bragg gratings in SOI strip waveguides with sidewall corrugations,” IEEE Photon. Technol. Lett. 23, 290–292 (2011).

W. Shi, X. Wang, W. Zhang, L. Chrostowski, and N. A. F. Jaeger, “Contradirectional couplers in silicon-on-insulator rib waveguides,” Opt. Lett. 36, 3999–4001 (2011).
[Crossref] [PubMed]

G. Jiang, R. Chen, Q. Zhou, J. Yang, M. Wang, and X. Jiang, “Slab-modulated sidewall Bragg gratings in silicon-on-insulator ridge waveguides,” IEEE Photon. Technol. Lett. 23, 6–9 (2011).

A. Saynatjoki, L. Karvonen, T. Alasaarela, X. Tu, T. Y. Liow, M. Hiltunen, A. Tervonen, G. Q. Lo, and S. Honkanen, “Low-loss silicon slot waveguides and couplers fabricated with optical lithography and atomic layer deposition,” Opt. Express 19, 26275–26282 (2011).
[Crossref]

X. Wang, W. Shi, S. Grist, H. Yun, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band transmission filter using phase-shifted Bragg gratings in SOI waveguide,” in IEEE Photon. Conf. pp. 869–870 (2011).

W. Bogaerts and S. K. Selvaraja, “Compact single-mode silicon hybrid rib/strip waveguide with adiabatic bends,” IEEE Photon. J. 3, 422–432 (2011).
[Crossref]

A. Spott, T. Baehr-Jones, R. Ding, Y. Liu, R. Bojko, T. O’Malley, A. Pomerene, C. Hill, W. Reinhardt, and M. Hochberg, “Photolithographically fabricated low-loss asymmetric silicon slot waveguides,” Opt. Express 19, 10950–10958 (2011).
[Crossref] [PubMed]

2010 (2)

2009 (6)

D. T. H. Tan, K. Ikeda, and Y. Fainman, “Cladding-modulated Bragg gratings in silicon waveguides,” Opt. Lett. 34, 1357–1359 (2009).
[Crossref] [PubMed]

A. S. Jugessur, J. Dou, J. S. Aitchison, R. M. De La Rue, and M. Gnan, “A photonic nano-Bragg grating device integrated with microfluidic channels for bio-sensing applications,” Microelectron. Eng. 86, 1488–1490 (2009).
[Crossref]

T. Claes, J. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photon. J. 1, 197–204 (2009).
[Crossref]

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. VanThourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography,” J. Lightwave Technol. 27, 4076–4083 (2009).
[Crossref]

P. Prabhathan, V. M. Murukeshan, Z. Jing, and P. V. Ramana, “Compact SOI nanowire refractive index sensor using phase shifted Bragg grating,” Opt. Express 17, 15330–15341 (2009).
[Crossref] [PubMed]

2008 (1)

2007 (3)

2005 (1)

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86, 081101 (2005).
[Crossref]

2004 (1)

2002 (1)

J. T. Hastings, M. H. Lim, J. G. Goodberlet, and H. I. Smith, “Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography,” J. Vac. Sci. Technol. B 20, 2753–2757 (2002).
[Crossref]

2001 (1)

Adam, K.

X. Wang, W. Shi, M. Hochberg, K. Adam, E. Schelew, J. F. Young, N. A. F. Jaeger, and L. Chrostowski, “Lithography simulation for the fabrication of silicon photonic devices with deep-ultraviolet lithography,” in IEEE Conference on Group IV Photonics (GFP), San Diego, CA, 2012, paper ThP 17 (2012).

Aitchison, J. S.

A. S. Jugessur, M. Yagnyukova, J. Dou, and J. S. Aitchison, “Bragg-grating air-slot optical waveguide for label-free sensing,” Proc. SPIE 8231, 82310N (2012).
[Crossref]

A. S. Jugessur, J. Dou, J. S. Aitchison, R. M. De La Rue, and M. Gnan, “A photonic nano-Bragg grating device integrated with microfluidic channels for bio-sensing applications,” Microelectron. Eng. 86, 1488–1490 (2009).
[Crossref]

Alasaarela, T.

Alloatti, L.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

Almeida, V. R.

Ayache, M.

Baehr-Jones, T.

Baets, R.

K. Van Acoleyen, J. Roels, P. Mechet, T. Claes, D. Van Thourhout, and R. Baets, “Ultracompact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in silicon-on-insulator,” IEEE Photon. J. 4, 779–788 (2012).
[Crossref]

T. Claes, J. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photon. J. 1, 197–204 (2009).
[Crossref]

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. VanThourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography,” J. Lightwave Technol. 27, 4076–4083 (2009).
[Crossref]

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15, 7610–7615 (2007).
[Crossref] [PubMed]

Barrios, C.

J. Blasco and C. Barrios, “Compact slot-waveguide/channel-waveguide mode-converter,” in Conference on Lasers and Electro-Optics Europe (CLEO/Europe). p. 607 (2005).

Barrios, C. A.

Bartolozzi, I.

Biaggio, I.

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

Bienstman, P.

T. Claes, J. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photon. J. 1, 197–204 (2009).
[Crossref]

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15, 7610–7615 (2007).
[Crossref] [PubMed]

Blasco, J.

J. Blasco and C. Barrios, “Compact slot-waveguide/channel-waveguide mode-converter,” in Conference on Lasers and Electro-Optics Europe (CLEO/Europe). p. 607 (2005).

Bogaerts, W.

Bojko, R.

Bolten, J.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

Brosi, J.-M.

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

Casquel, R.

Chen, R.

G. Jiang, R. Chen, Q. Zhou, J. Yang, M. Wang, and X. Jiang, “Slab-modulated sidewall Bragg gratings in silicon-on-insulator ridge waveguides,” IEEE Photon. Technol. Lett. 23, 6–9 (2011).

Chen, S.

H. Zhang, J. Zhang, S. Chen, J. Song, J. Kee, M. Yu, and G.-Q. Lo, “CMOS-compatible fabrication of silicon-based sub-100-nm slot waveguide with efficient channel-slot coupler,” IEEE Photon. Technol. Lett. 24, 10–12 (2012).
[Crossref]

Cheung, K. C.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

Chrostowski, L.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

W. Shi, X. Wang, C. Lin, H. Yun, Y. Liu, T. Baehr-Jones, M. Hochberg, N. A. F. Jaeger, and L. Chrostowski, “Silicon photonic grating-assisted, contra-directional couplers,” Opt. Express 21, 3633–3650 (2013).
[Crossref] [PubMed]

X. Wang, W. Shi, H. Yun, S. Grist, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process,” Opt. Express 20, 15547–15558 (2012).
[Crossref] [PubMed]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

W. Shi, X. Wang, W. Zhang, H. Yun, C. Lin, L. Chrostowski, and N. A. F. Jaeger, “Grating-coupled silicon microring resonators,” Appl. Phys. Lett. 100, 121118 (2012).
[Crossref]

X. Wang, W. Shi, R. Vafaei, N. A. F. Jaeger, and L. Chrostowski, “Uniform and sampled Bragg gratings in SOI strip waveguides with sidewall corrugations,” IEEE Photon. Technol. Lett. 23, 290–292 (2011).

X. Wang, W. Shi, S. Grist, H. Yun, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band transmission filter using phase-shifted Bragg gratings in SOI waveguide,” in IEEE Photon. Conf. pp. 869–870 (2011).

W. Shi, X. Wang, W. Zhang, L. Chrostowski, and N. A. F. Jaeger, “Contradirectional couplers in silicon-on-insulator rib waveguides,” Opt. Lett. 36, 3999–4001 (2011).
[Crossref] [PubMed]

X. Wang, W. Shi, M. Hochberg, K. Adam, E. Schelew, J. F. Young, N. A. F. Jaeger, and L. Chrostowski, “Lithography simulation for the fabrication of silicon photonic devices with deep-ultraviolet lithography,” in IEEE Conference on Group IV Photonics (GFP), San Diego, CA, 2012, paper ThP 17 (2012).

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

Chros-towski, L.

Claes, T.

K. Van Acoleyen, J. Roels, P. Mechet, T. Claes, D. Van Thourhout, and R. Baets, “Ultracompact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in silicon-on-insulator,” IEEE Photon. J. 4, 779–788 (2012).
[Crossref]

T. Claes, J. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photon. J. 1, 197–204 (2009).
[Crossref]

De La Rue, R. M.

A. S. Jugessur, J. Dou, J. S. Aitchison, R. M. De La Rue, and M. Gnan, “A photonic nano-Bragg grating device integrated with microfluidic channels for bio-sensing applications,” Microelectron. Eng. 86, 1488–1490 (2009).
[Crossref]

De Vos, K.

T. Claes, J. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photon. J. 1, 197–204 (2009).
[Crossref]

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15, 7610–7615 (2007).
[Crossref] [PubMed]

Diederich, F.

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

Ding, R.

Doerfler, M.

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

Donzella, V.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

Dou, J.

A. S. Jugessur, M. Yagnyukova, J. Dou, and J. S. Aitchison, “Bragg-grating air-slot optical waveguide for label-free sensing,” Proc. SPIE 8231, 82310N (2012).
[Crossref]

A. S. Jugessur, J. Dou, J. S. Aitchison, R. M. De La Rue, and M. Gnan, “A photonic nano-Bragg grating device integrated with microfluidic channels for bio-sensing applications,” Microelectron. Eng. 86, 1488–1490 (2009).
[Crossref]

Dumon, P.

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. VanThourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crystal circuits in silicon-on-insulator using 193-nm optical lithography,” J. Lightwave Technol. 27, 4076–4083 (2009).
[Crossref]

Fainman, Y.

Fard, S. T.

W. Shi, H. Yun, C. Lin, M. Greenberg, X. Wang, Y. Wang, S. T. Fard, J. Flueckiger, N. A. F. Jaeger, and L. Chros-towski, “Ultra-compact, flat-top demultiplexer using anti-reflection contra-directional couplers for CWDM networks on silicon,” Opt. Express 21, 6733–6738 (2013).
[Crossref] [PubMed]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

Fedeli, J.-M.

Flueckiger, J.

W. Shi, H. Yun, C. Lin, M. Greenberg, X. Wang, Y. Wang, S. T. Fard, J. Flueckiger, N. A. F. Jaeger, and L. Chros-towski, “Ultra-compact, flat-top demultiplexer using anti-reflection contra-directional couplers for CWDM networks on silicon,” Opt. Express 21, 6733–6738 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

Fournier, M.

Frank, B.

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

Freude, W.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

Gnan, M.

A. S. Jugessur, J. Dou, J. S. Aitchison, R. M. De La Rue, and M. Gnan, “A photonic nano-Bragg grating device integrated with microfluidic channels for bio-sensing applications,” Microelectron. Eng. 86, 1488–1490 (2009).
[Crossref]

Goodberlet, J. G.

J. T. Hastings, M. H. Lim, J. G. Goodberlet, and H. I. Smith, “Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography,” J. Vac. Sci. Technol. B 20, 2753–2757 (2002).
[Crossref]

Greenberg, M.

Griol, A.

Grist, S.

X. Wang, W. Shi, H. Yun, S. Grist, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process,” Opt. Express 20, 15547–15558 (2012).
[Crossref] [PubMed]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

X. Wang, W. Shi, S. Grist, H. Yun, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band transmission filter using phase-shifted Bragg gratings in SOI waveguide,” in IEEE Photon. Conf. pp. 869–870 (2011).

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

Grist, S. M.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

Gylfason, K. B.

Hastings, J. T.

J. T. Hastings, M. H. Lim, J. G. Goodberlet, and H. I. Smith, “Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography,” J. Vac. Sci. Technol. B 20, 2753–2757 (2002).
[Crossref]

T. E. Murphy, J. T. Hastings, and H. I. Smith, “Fabrication and characterization of narrow-band Bragg-reflection filters in silicon-on-insulator ridge waveguides,” J. Lightwave Technol. 19, 1938–1942 (2001).
[Crossref]

Heni, W.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

Hill, C.

Hiltunen, M.

Hochberg, M.

Holgado, M.

Honkanen, S.

Ikeda, K.

Jaeger, N. A. F.

W. Shi, X. Wang, C. Lin, H. Yun, Y. Liu, T. Baehr-Jones, M. Hochberg, N. A. F. Jaeger, and L. Chrostowski, “Silicon photonic grating-assisted, contra-directional couplers,” Opt. Express 21, 3633–3650 (2013).
[Crossref] [PubMed]

W. Shi, H. Yun, C. Lin, M. Greenberg, X. Wang, Y. Wang, S. T. Fard, J. Flueckiger, N. A. F. Jaeger, and L. Chros-towski, “Ultra-compact, flat-top demultiplexer using anti-reflection contra-directional couplers for CWDM networks on silicon,” Opt. Express 21, 6733–6738 (2013).
[Crossref] [PubMed]

X. Wang, W. Shi, H. Yun, S. Grist, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process,” Opt. Express 20, 15547–15558 (2012).
[Crossref] [PubMed]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

W. Shi, X. Wang, W. Zhang, H. Yun, C. Lin, L. Chrostowski, and N. A. F. Jaeger, “Grating-coupled silicon microring resonators,” Appl. Phys. Lett. 100, 121118 (2012).
[Crossref]

X. Wang, W. Shi, R. Vafaei, N. A. F. Jaeger, and L. Chrostowski, “Uniform and sampled Bragg gratings in SOI strip waveguides with sidewall corrugations,” IEEE Photon. Technol. Lett. 23, 290–292 (2011).

X. Wang, W. Shi, S. Grist, H. Yun, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band transmission filter using phase-shifted Bragg gratings in SOI waveguide,” in IEEE Photon. Conf. pp. 869–870 (2011).

W. Shi, X. Wang, W. Zhang, L. Chrostowski, and N. A. F. Jaeger, “Contradirectional couplers in silicon-on-insulator rib waveguides,” Opt. Lett. 36, 3999–4001 (2011).
[Crossref] [PubMed]

X. Wang, W. Shi, M. Hochberg, K. Adam, E. Schelew, J. F. Young, N. A. F. Jaeger, and L. Chrostowski, “Lithography simulation for the fabrication of silicon photonic devices with deep-ultraviolet lithography,” in IEEE Conference on Group IV Photonics (GFP), San Diego, CA, 2012, paper ThP 17 (2012).

Jaenen, P.

Jiang, G.

G. Jiang, R. Chen, Q. Zhou, J. Yang, M. Wang, and X. Jiang, “Slab-modulated sidewall Bragg gratings in silicon-on-insulator ridge waveguides,” IEEE Photon. Technol. Lett. 23, 6–9 (2011).

Jiang, X.

G. Jiang, R. Chen, Q. Zhou, J. Yang, M. Wang, and X. Jiang, “Slab-modulated sidewall Bragg gratings in silicon-on-insulator ridge waveguides,” IEEE Photon. Technol. Lett. 23, 6–9 (2011).

Jing, Z.

Jugessur, A. S.

A. S. Jugessur, M. Yagnyukova, J. Dou, and J. S. Aitchison, “Bragg-grating air-slot optical waveguide for label-free sensing,” Proc. SPIE 8231, 82310N (2012).
[Crossref]

A. S. Jugessur, J. Dou, J. S. Aitchison, R. M. De La Rue, and M. Gnan, “A photonic nano-Bragg grating device integrated with microfluidic channels for bio-sensing applications,” Microelectron. Eng. 86, 1488–1490 (2009).
[Crossref]

Karl, M.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

Karvonen, L.

Kee, J.

H. Zhang, J. Zhang, S. Chen, J. Song, J. Kee, M. Yu, and G.-Q. Lo, “CMOS-compatible fabrication of silicon-based sub-100-nm slot waveguide with efficient channel-slot coupler,” IEEE Photon. Technol. Lett. 24, 10–12 (2012).
[Crossref]

Khajavikhan, M.

Kim, H.-C.

Kim, W.-J.

Kirk, J.

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

Koos, C.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

Korn, D.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

Leckel, E.

E. Leckel, J. Sang, E. U. Wagemann, and E. Mueller, “Impact of source spontaneous emission (SSE) on the measurement of DWDM components,” in Optical Fiber Communication Conference, paper WB4 (2000).

Leuthold, J.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

Liang, Z.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Lim, M. H.

J. T. Hastings, M. H. Lim, J. G. Goodberlet, and H. I. Smith, “Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography,” J. Vac. Sci. Technol. B 20, 2753–2757 (2002).
[Crossref]

Lin, C.

Liow, T. Y.

Lipson, M.

Liu, Y.

Lo, G. Q.

Lo, G.-Q.

H. Zhang, J. Zhang, S. Chen, J. Song, J. Kee, M. Yu, and G.-Q. Lo, “CMOS-compatible fabrication of silicon-based sub-100-nm slot waveguide with efficient channel-slot coupler,” IEEE Photon. Technol. Lett. 24, 10–12 (2012).
[Crossref]

Mechet, P.

K. Van Acoleyen, J. Roels, P. Mechet, T. Claes, D. Van Thourhout, and R. Baets, “Ultracompact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in silicon-on-insulator,” IEEE Photon. J. 4, 779–788 (2012).
[Crossref]

Millspaugh, A.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

Molera, J.

T. Claes, J. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photon. J. 1, 197–204 (2009).
[Crossref]

Mueller, E.

E. Leckel, J. Sang, E. U. Wagemann, and E. Mueller, “Impact of source spontaneous emission (SSE) on the measurement of DWDM components,” in Optical Fiber Communication Conference, paper WB4 (2000).

Murphy, T. E.

Murukeshan, V. M.

Nezhad, M. P.

Nie, B.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

O’Malley, T.

Ouellet, E.

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Palmer, R.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

Pomerene, A.

Prabhathan, P.

Ramana, P. V.

Ratner, D. M.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

Reinhardt, W.

Roels, J.

K. Van Acoleyen, J. Roels, P. Mechet, T. Claes, D. Van Thourhout, and R. Baets, “Ultracompact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in silicon-on-insulator,” IEEE Photon. J. 4, 779–788 (2012).
[Crossref]

Sánchez, B.

Sang, J.

E. Leckel, J. Sang, E. U. Wagemann, and E. Mueller, “Impact of source spontaneous emission (SSE) on the measurement of DWDM components,” in Optical Fiber Communication Conference, paper WB4 (2000).

Saperstein, R. E.

Saynatjoki, A.

Schacht, E.

T. Claes, J. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photon. J. 1, 197–204 (2009).
[Crossref]

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15, 7610–7615 (2007).
[Crossref] [PubMed]

Schelew, E.

X. Wang, W. Shi, M. Hochberg, K. Adam, E. Schelew, J. F. Young, N. A. F. Jaeger, and L. Chrostowski, “Lithography simulation for the fabrication of silicon photonic devices with deep-ultraviolet lithography,” in IEEE Conference on Group IV Photonics (GFP), San Diego, CA, 2012, paper ThP 17 (2012).

Scherer, A.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86, 081101 (2005).
[Crossref]

Schindler, P.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

Schmidt, S.

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

Schmidt, S. A.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Scimeca, M.

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

Selvaraja, S. K.

Shi, W.

W. Shi, H. Yun, C. Lin, M. Greenberg, X. Wang, Y. Wang, S. T. Fard, J. Flueckiger, N. A. F. Jaeger, and L. Chros-towski, “Ultra-compact, flat-top demultiplexer using anti-reflection contra-directional couplers for CWDM networks on silicon,” Opt. Express 21, 6733–6738 (2013).
[Crossref] [PubMed]

W. Shi, X. Wang, C. Lin, H. Yun, Y. Liu, T. Baehr-Jones, M. Hochberg, N. A. F. Jaeger, and L. Chrostowski, “Silicon photonic grating-assisted, contra-directional couplers,” Opt. Express 21, 3633–3650 (2013).
[Crossref] [PubMed]

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

W. Shi, X. Wang, W. Zhang, H. Yun, C. Lin, L. Chrostowski, and N. A. F. Jaeger, “Grating-coupled silicon microring resonators,” Appl. Phys. Lett. 100, 121118 (2012).
[Crossref]

X. Wang, W. Shi, H. Yun, S. Grist, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process,” Opt. Express 20, 15547–15558 (2012).
[Crossref] [PubMed]

W. Shi, X. Wang, W. Zhang, L. Chrostowski, and N. A. F. Jaeger, “Contradirectional couplers in silicon-on-insulator rib waveguides,” Opt. Lett. 36, 3999–4001 (2011).
[Crossref] [PubMed]

X. Wang, W. Shi, R. Vafaei, N. A. F. Jaeger, and L. Chrostowski, “Uniform and sampled Bragg gratings in SOI strip waveguides with sidewall corrugations,” IEEE Photon. Technol. Lett. 23, 290–292 (2011).

X. Wang, W. Shi, S. Grist, H. Yun, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band transmission filter using phase-shifted Bragg gratings in SOI waveguide,” in IEEE Photon. Conf. pp. 869–870 (2011).

X. Wang, W. Shi, M. Hochberg, K. Adam, E. Schelew, J. F. Young, N. A. F. Jaeger, and L. Chrostowski, “Lithography simulation for the fabrication of silicon photonic devices with deep-ultraviolet lithography,” in IEEE Conference on Group IV Photonics (GFP), San Diego, CA, 2012, paper ThP 17 (2012).

Slutsky, B.

Smith, H. I.

J. T. Hastings, M. H. Lim, J. G. Goodberlet, and H. I. Smith, “Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography,” J. Vac. Sci. Technol. B 20, 2753–2757 (2002).
[Crossref]

T. E. Murphy, J. T. Hastings, and H. I. Smith, “Fabrication and characterization of narrow-band Bragg-reflection filters in silicon-on-insulator ridge waveguides,” J. Lightwave Technol. 19, 1938–1942 (2001).
[Crossref]

Sohlström, H.

Song, J.

H. Zhang, J. Zhang, S. Chen, J. Song, J. Kee, M. Yu, and G.-Q. Lo, “CMOS-compatible fabrication of silicon-based sub-100-nm slot waveguide with efficient channel-slot coupler,” IEEE Photon. Technol. Lett. 24, 10–12 (2012).
[Crossref]

Spott, A.

Talebi Fard, S.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

Tan, D. T. H.

Tervonen, A.

Tu, X.

Vafaei, R.

X. Wang, W. Shi, R. Vafaei, N. A. F. Jaeger, and L. Chrostowski, “Uniform and sampled Bragg gratings in SOI strip waveguides with sidewall corrugations,” IEEE Photon. Technol. Lett. 23, 290–292 (2011).

Van Acoleyen, K.

K. Van Acoleyen, J. Roels, P. Mechet, T. Claes, D. Van Thourhout, and R. Baets, “Ultracompact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in silicon-on-insulator,” IEEE Photon. J. 4, 779–788 (2012).
[Crossref]

Van Thourhout, D.

K. Van Acoleyen, J. Roels, P. Mechet, T. Claes, D. Van Thourhout, and R. Baets, “Ultracompact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in silicon-on-insulator,” IEEE Photon. J. 4, 779–788 (2012).
[Crossref]

VanThourhout, D.

Wagemann, E. U.

E. Leckel, J. Sang, E. U. Wagemann, and E. Mueller, “Impact of source spontaneous emission (SSE) on the measurement of DWDM components,” in Optical Fiber Communication Conference, paper WB4 (2000).

Wahlbrink, T.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

Waldow, M.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

Walker, C.

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86, 081101 (2005).
[Crossref]

Wang, M.

G. Jiang, R. Chen, Q. Zhou, J. Yang, M. Wang, and X. Jiang, “Slab-modulated sidewall Bragg gratings in silicon-on-insulator ridge waveguides,” IEEE Photon. Technol. Lett. 23, 6–9 (2011).

Wang, X.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

W. Shi, X. Wang, C. Lin, H. Yun, Y. Liu, T. Baehr-Jones, M. Hochberg, N. A. F. Jaeger, and L. Chrostowski, “Silicon photonic grating-assisted, contra-directional couplers,” Opt. Express 21, 3633–3650 (2013).
[Crossref] [PubMed]

W. Shi, H. Yun, C. Lin, M. Greenberg, X. Wang, Y. Wang, S. T. Fard, J. Flueckiger, N. A. F. Jaeger, and L. Chros-towski, “Ultra-compact, flat-top demultiplexer using anti-reflection contra-directional couplers for CWDM networks on silicon,” Opt. Express 21, 6733–6738 (2013).
[Crossref] [PubMed]

X. Wang, W. Shi, H. Yun, S. Grist, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process,” Opt. Express 20, 15547–15558 (2012).
[Crossref] [PubMed]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

W. Shi, X. Wang, W. Zhang, H. Yun, C. Lin, L. Chrostowski, and N. A. F. Jaeger, “Grating-coupled silicon microring resonators,” Appl. Phys. Lett. 100, 121118 (2012).
[Crossref]

X. Wang, W. Shi, R. Vafaei, N. A. F. Jaeger, and L. Chrostowski, “Uniform and sampled Bragg gratings in SOI strip waveguides with sidewall corrugations,” IEEE Photon. Technol. Lett. 23, 290–292 (2011).

X. Wang, W. Shi, S. Grist, H. Yun, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band transmission filter using phase-shifted Bragg gratings in SOI waveguide,” in IEEE Photon. Conf. pp. 869–870 (2011).

W. Shi, X. Wang, W. Zhang, L. Chrostowski, and N. A. F. Jaeger, “Contradirectional couplers in silicon-on-insulator rib waveguides,” Opt. Lett. 36, 3999–4001 (2011).
[Crossref] [PubMed]

X. Wang, W. Shi, M. Hochberg, K. Adam, E. Schelew, J. F. Young, N. A. F. Jaeger, and L. Chrostowski, “Lithography simulation for the fabrication of silicon photonic devices with deep-ultraviolet lithography,” in IEEE Conference on Group IV Photonics (GFP), San Diego, CA, 2012, paper ThP 17 (2012).

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

Wang, Y.

Webb, M.

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

Xiong, X.

Xu, Q.

Yagnyukova, M.

A. S. Jugessur, M. Yagnyukova, J. Dou, and J. S. Aitchison, “Bragg-grating air-slot optical waveguide for label-free sensing,” Proc. SPIE 8231, 82310N (2012).
[Crossref]

Yang, J.

G. Jiang, R. Chen, Q. Zhou, J. Yang, M. Wang, and X. Jiang, “Slab-modulated sidewall Bragg gratings in silicon-on-insulator ridge waveguides,” IEEE Photon. Technol. Lett. 23, 6–9 (2011).

Young, J. F.

X. Wang, W. Shi, M. Hochberg, K. Adam, E. Schelew, J. F. Young, N. A. F. Jaeger, and L. Chrostowski, “Lithography simulation for the fabrication of silicon photonic devices with deep-ultraviolet lithography,” in IEEE Conference on Group IV Photonics (GFP), San Diego, CA, 2012, paper ThP 17 (2012).

Yu, M.

H. Zhang, J. Zhang, S. Chen, J. Song, J. Kee, M. Yu, and G.-Q. Lo, “CMOS-compatible fabrication of silicon-based sub-100-nm slot waveguide with efficient channel-slot coupler,” IEEE Photon. Technol. Lett. 24, 10–12 (2012).
[Crossref]

Yun, H.

W. Shi, H. Yun, C. Lin, M. Greenberg, X. Wang, Y. Wang, S. T. Fard, J. Flueckiger, N. A. F. Jaeger, and L. Chros-towski, “Ultra-compact, flat-top demultiplexer using anti-reflection contra-directional couplers for CWDM networks on silicon,” Opt. Express 21, 6733–6738 (2013).
[Crossref] [PubMed]

W. Shi, X. Wang, C. Lin, H. Yun, Y. Liu, T. Baehr-Jones, M. Hochberg, N. A. F. Jaeger, and L. Chrostowski, “Silicon photonic grating-assisted, contra-directional couplers,” Opt. Express 21, 3633–3650 (2013).
[Crossref] [PubMed]

X. Wang, W. Shi, H. Yun, S. Grist, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process,” Opt. Express 20, 15547–15558 (2012).
[Crossref] [PubMed]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

W. Shi, X. Wang, W. Zhang, H. Yun, C. Lin, L. Chrostowski, and N. A. F. Jaeger, “Grating-coupled silicon microring resonators,” Appl. Phys. Lett. 100, 121118 (2012).
[Crossref]

X. Wang, W. Shi, S. Grist, H. Yun, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band transmission filter using phase-shifted Bragg gratings in SOI waveguide,” in IEEE Photon. Conf. pp. 869–870 (2011).

Zamek, S.

Zhang, H.

H. Zhang, J. Zhang, S. Chen, J. Song, J. Kee, M. Yu, and G.-Q. Lo, “CMOS-compatible fabrication of silicon-based sub-100-nm slot waveguide with efficient channel-slot coupler,” IEEE Photon. Technol. Lett. 24, 10–12 (2012).
[Crossref]

Zhang, J.

H. Zhang, J. Zhang, S. Chen, J. Song, J. Kee, M. Yu, and G.-Q. Lo, “CMOS-compatible fabrication of silicon-based sub-100-nm slot waveguide with efficient channel-slot coupler,” IEEE Photon. Technol. Lett. 24, 10–12 (2012).
[Crossref]

Zhang, W.

W. Shi, X. Wang, W. Zhang, H. Yun, C. Lin, L. Chrostowski, and N. A. F. Jaeger, “Grating-coupled silicon microring resonators,” Appl. Phys. Lett. 100, 121118 (2012).
[Crossref]

W. Shi, X. Wang, W. Zhang, L. Chrostowski, and N. A. F. Jaeger, “Contradirectional couplers in silicon-on-insulator rib waveguides,” Opt. Lett. 36, 3999–4001 (2011).
[Crossref] [PubMed]

Zhou, Q.

G. Jiang, R. Chen, Q. Zhou, J. Yang, M. Wang, and X. Jiang, “Slab-modulated sidewall Bragg gratings in silicon-on-insulator ridge waveguides,” IEEE Photon. Technol. Lett. 23, 6–9 (2011).

Appl. Phys. Lett. (2)

W. Shi, X. Wang, W. Zhang, H. Yun, C. Lin, L. Chrostowski, and N. A. F. Jaeger, “Grating-coupled silicon microring resonators,” Appl. Phys. Lett. 100, 121118 (2012).
[Crossref]

T. Baehr-Jones, M. Hochberg, C. Walker, and A. Scherer, “High-Q optical resonators in silicon-on-insulator-based slot waveguides,” Appl. Phys. Lett. 86, 081101 (2005).
[Crossref]

IEEE Photon. Conf. (1)

X. Wang, W. Shi, S. Grist, H. Yun, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band transmission filter using phase-shifted Bragg gratings in SOI waveguide,” in IEEE Photon. Conf. pp. 869–870 (2011).

IEEE Photon. J. (4)

W. Bogaerts and S. K. Selvaraja, “Compact single-mode silicon hybrid rib/strip waveguide with adiabatic bends,” IEEE Photon. J. 3, 422–432 (2011).
[Crossref]

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, “Low-loss silicon strip-to-slot mode converters,” IEEE Photon. J. 5, 2200409 (2013).
[Crossref]

T. Claes, J. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photon. J. 1, 197–204 (2009).
[Crossref]

K. Van Acoleyen, J. Roels, P. Mechet, T. Claes, D. Van Thourhout, and R. Baets, “Ultracompact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in silicon-on-insulator,” IEEE Photon. J. 4, 779–788 (2012).
[Crossref]

IEEE Photon. Technol. Lett. (3)

G. Jiang, R. Chen, Q. Zhou, J. Yang, M. Wang, and X. Jiang, “Slab-modulated sidewall Bragg gratings in silicon-on-insulator ridge waveguides,” IEEE Photon. Technol. Lett. 23, 6–9 (2011).

H. Zhang, J. Zhang, S. Chen, J. Song, J. Kee, M. Yu, and G.-Q. Lo, “CMOS-compatible fabrication of silicon-based sub-100-nm slot waveguide with efficient channel-slot coupler,” IEEE Photon. Technol. Lett. 24, 10–12 (2012).
[Crossref]

X. Wang, W. Shi, R. Vafaei, N. A. F. Jaeger, and L. Chrostowski, “Uniform and sampled Bragg gratings in SOI strip waveguides with sidewall corrugations,” IEEE Photon. Technol. Lett. 23, 290–292 (2011).

J. Lightwave Technol. (3)

J. Vac. Sci. Technol. B (1)

J. T. Hastings, M. H. Lim, J. G. Goodberlet, and H. I. Smith, “Optical waveguides with apodized sidewall gratings via spatial-phase-locked electron-beam lithography,” J. Vac. Sci. Technol. B 20, 2753–2757 (2002).
[Crossref]

Microelectron. Eng. (1)

A. S. Jugessur, J. Dou, J. S. Aitchison, R. M. De La Rue, and M. Gnan, “A photonic nano-Bragg grating device integrated with microfluidic channels for bio-sensing applications,” Microelectron. Eng. 86, 1488–1490 (2009).
[Crossref]

Opt. Express (8)

K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15, 7610–7615 (2007).
[Crossref] [PubMed]

X. Wang, W. Shi, H. Yun, S. Grist, N. A. F. Jaeger, and L. Chrostowski, “Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process,” Opt. Express 20, 15547–15558 (2012).
[Crossref] [PubMed]

W. Shi, X. Wang, C. Lin, H. Yun, Y. Liu, T. Baehr-Jones, M. Hochberg, N. A. F. Jaeger, and L. Chrostowski, “Silicon photonic grating-assisted, contra-directional couplers,” Opt. Express 21, 3633–3650 (2013).
[Crossref] [PubMed]

W. Shi, H. Yun, C. Lin, M. Greenberg, X. Wang, Y. Wang, S. T. Fard, J. Flueckiger, N. A. F. Jaeger, and L. Chros-towski, “Ultra-compact, flat-top demultiplexer using anti-reflection contra-directional couplers for CWDM networks on silicon,” Opt. Express 21, 6733–6738 (2013).
[Crossref] [PubMed]

P. Prabhathan, V. M. Murukeshan, Z. Jing, and P. V. Ramana, “Compact SOI nanowire refractive index sensor using phase shifted Bragg grating,” Opt. Express 17, 15330–15341 (2009).
[Crossref] [PubMed]

A. Saynatjoki, L. Karvonen, T. Alasaarela, X. Tu, T. Y. Liow, M. Hiltunen, A. Tervonen, G. Q. Lo, and S. Honkanen, “Low-loss silicon slot waveguides and couplers fabricated with optical lithography and atomic layer deposition,” Opt. Express 19, 26275–26282 (2011).
[Crossref]

R. Ding, T. Baehr-Jones, W.-J. Kim, X. Xiong, R. Bojko, J.-M. Fedeli, M. Fournier, and M. Hochberg, “Low-loss strip-loaded slot waveguides in silicon-on-insulator,” Opt. Express 18, 25061–25067 (2010).
[Crossref] [PubMed]

A. Spott, T. Baehr-Jones, R. Ding, Y. Liu, R. Bojko, T. O’Malley, A. Pomerene, C. Hill, W. Reinhardt, and M. Hochberg, “Photolithographically fabricated low-loss asymmetric silicon slot waveguides,” Opt. Express 19, 10950–10958 (2011).
[Crossref] [PubMed]

Opt. Lett. (6)

Proc. IEEE (1)

J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. Scimeca, F. Diederich, B. Frank, and C. Koos, “Silicon organic hybrid technology – a platform for practical nonlinear optics,” Proc. IEEE 97, 1304–1316 (2009).
[Crossref]

Proc. SPIE (3)

S. Talebi Fard, S. M. Grist, V. Donzella, S. A. Schmidt, J. Flueckiger, X. Wang, W. Shi, A. Millspaugh, M. Webb, D. M. Ratner, K. C. Cheung, and L. Chrostowski, “Label-free silicon photonic biosensors for use in clinical diagnostics,” Proc. SPIE 8629, 862909 (2013).
[Crossref]

L. Chrostowski, S. Grist, J. Flueckiger, W. Shi, X. Wang, E. Ouellet, H. Yun, M. Webb, B. Nie, Z. Liang, K. C. Cheung, S. A. Schmidt, D. M. Ratner, and N. A. F. Jaeger, “Silicon photonic resonator sensors and devices,” Proc. SPIE 8236, 823620 (2012).
[Crossref]

A. S. Jugessur, M. Yagnyukova, J. Dou, and J. S. Aitchison, “Bragg-grating air-slot optical waveguide for label-free sensing,” Proc. SPIE 8231, 82310N (2012).
[Crossref]

Other (4)

X. Wang, J. Flueckiger, S. Schmidt, S. Grist, S. T. Fard, J. Kirk, M. Doerfler, K. C. Cheung, D. M. Ratner, and L. Chrostowski, “A silicon photonic biosensor using phase-shifted Bragg gratings in slot waveguide,” J. Biophoton. (2013).
[Crossref]

X. Wang, W. Shi, M. Hochberg, K. Adam, E. Schelew, J. F. Young, N. A. F. Jaeger, and L. Chrostowski, “Lithography simulation for the fabrication of silicon photonic devices with deep-ultraviolet lithography,” in IEEE Conference on Group IV Photonics (GFP), San Diego, CA, 2012, paper ThP 17 (2012).

J. Blasco and C. Barrios, “Compact slot-waveguide/channel-waveguide mode-converter,” in Conference on Lasers and Electro-Optics Europe (CLEO/Europe). p. 607 (2005).

E. Leckel, J. Sang, E. U. Wagemann, and E. Mueller, “Impact of source spontaneous emission (SSE) on the measurement of DWDM components,” in Optical Fiber Communication Conference, paper WB4 (2000).

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Figures (11)

Fig. 1
Fig. 1 Cross section of a slot waveguide. (a) Schematic diagram and the simulated mode profile for the fundamental quasi-TE mode. Warm = 270 nm, Wslot = 150 nm, H = 220 nm, and the upper cladding material is silicon oxide. (b) SEM image of the focused ion beam (FIB) milled cross section of a fabricated device (the small hole in the centre was due to the incomplete coating of platinum deposited to protect the waveguides during the FIB milling).

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Fig. 2
Fig. 2 Schematic diagrams (not to scale) of the slot waveguide Bragg gratings with corrugations (a) inside and (b) outside.

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Fig. 3
Fig. 3 Top view SEM images of the fabricated slot waveguide Bragg gratings: (a) corrugation inside for Wslot = 150 nm, Warm = 270 nm, and ΔWin = 20 nm. (b) corrugations outside for Wslot = 150 nm, Warm = 270 nm, and ΔWout = 40 nm.

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Fig. 4
Fig. 4 Phase-shifted Bragg gratings with corrugations on the outside of the slot waveguide: (a) schematic diagram (not to scale), (b) SEM image showing the phase shift region of a fabricated device, (c) transmission spectrum simulated by FDTD with the following geometric parameters: WG1, ΔWout = 40 nm, and N = 50.

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Fig. 5
Fig. 5 Electric field distributions for light incident from the left at (a) 1543 nm and (b) 1550 nm. The simulation parameters are the same as in Fig. 4(c). The field was recorded at the middle of the silicon waveguide in the vertical direction (i.e., corresponding to the plane of y=110 nm in Fig. 1(a)).

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Fig. 6
Fig. 6 (a) Schematic diagram of the device layout (not to scale, inset shows an SEM image of a fabricated slot waveguide Bragg grating), and SEM images of (b) the Y-branch and (c) the mode converter.

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Fig. 7
Fig. 7 Measured raw spectra of a uniform grating designed on WG1 with ΔWout = 10 nm.

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Fig. 8
Fig. 8 Measured transmission spectra of the uniform gratings designed on WG1. (a) corrugations inside, (b) corrugations outside.

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Fig. 9
Fig. 9 Measured bandwidth versus designed corrugation width on WG1 and WG2.

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Fig. 10
Fig. 10 Measured raw spectra of a phase-shifted grating designed on WG1 with ΔWout = 40 nm and N = 300.

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Fig. 11
Fig. 11 (a) Measured transmission spectra for phase-shifted gratings designed on WG1 with ΔWout = 40 nm and various lengths, (b) Q factor as a function of N.

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Tables (1)

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Table 1 Design variations for uniform slot waveguide Bragg gratings.

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Equations (1)

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Q I = 2 π ⋅ n g ⋅ 4.34 λ ⋅ 100 ⋅ α [ d B / c m ]

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