Abstract

Silica micro-bubble resonators (MBRs) with cavity quality factor as high as Q = 5 × 107 are fabricated. The total dispersion of MBRs is analyzed. The thin-wall structure opens a new anomalous dispersion window and thus supports the dispersion compensation for hyper-parametric frequency conversion processes. Experimentally, Kerr parametric oscillation is observed in a 136 μm diameter MBR, frequency comb generation is also realized. Meanwhile the same nonlinear process is not allowed in solid silica spheres with size smaller than 150 μm.

© 2013 OSA

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References

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2012 (4)

2011 (6)

2010 (4)

M. Sumetsky, Y. Dulashko, and R. S. Windeler, “Super free spectral range tunable optical microbubble resonator,” Opt. Lett. 35(11), 1866–1868 (2010).
[Crossref] [PubMed]

H. Li, Y. Guo, Y. Sun, K. Reddy, and X. Fan, “Analysis of single nanoparticle detection by using 3-dimensionally confined optofluidic ring resonators,” Opt. Express 18(24), 25081–25088 (2010).
[Crossref] [PubMed]

Y. K. Chembo and N. Yu, “Modal expansion approach to optical-frequency-comb generation with monolithic whispering-gallery- mode resonators,” Phys. Rev. A 82(3), 033801 (2010).
[Crossref]

Y. K. Chembo, D. V. Strekalov, and N. Yu, “Spectrum and dynamics of optical frequency combs generated with Monolithic Whispering Gallery Mode Resonators,” Phys. Rev. Lett. 104(10), 103902 (2010).
[Crossref] [PubMed]

2009 (3)

I. H. Agha, Y. Okawachi, and A. L. Gaeta, “Theoretical and experimental investigation of broadband cascaded four-wave mixing in high-Q microspheres,” Opt. Express 17(18), 16209–16215 (2009).
[Crossref] [PubMed]

M. Pöllinger, D. O’Shea, F. Warken, and A. Rauschenbeutel, “Ultrahigh-Q tunable whispering-gallery-mode microresonator,” Phys. Rev. Lett. 103(5), 053901 (2009).
[Crossref] [PubMed]

P. Del’Haye, O. Arcizet, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency Comb Assisted Diode Laser Spectroscopy for Measurement of Microcavity Dispersion,” Nat. Photonics 3(9), 529–533 (2009).
[Crossref]

2008 (1)

2007 (3)

I. H. Agha, Y. Okawachi, M. A. Foster, J. E. Sharping, and A. L. Gaeta, “Four-wave-mixing parametric oscillations in dispersion-compensated high-Q silica microspheres,” Phys. Rev. A 76(4), 043837 (2007).
[Crossref]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic Microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

J. Meier, W. S. Mohammed, A. Jugessur, L. Qian, M. Mojahedi, and J. S. Aitchison, “Group velocity inversion in AlGaAs nanowires,” Opt. Express 15(20), 12755–12762 (2007).
[Crossref] [PubMed]

2006 (1)

2005 (1)

B. Min, L. Yang, and K. Vahala, “Controlled transition between parametric and Raman oscillationsin ultrahigh-Q silica toroidal microcavities,” Appl. Phys. Lett. 87(18), 181109 (2005).
[Crossref]

2004 (1)

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity,” Phys. Rev. Lett. 93(8), 083904 (2004).
[Crossref] [PubMed]

2003 (1)

2000 (1)

1997 (1)

S. Coen and M. Haelterman, “Modulational Instability Induced by Cavity Boundary Conditions in a Normally Dispersive Optical Fiber,” Phys. Rev. Lett. 79(21), 4139–4142 (1997).
[Crossref]

1993 (1)

Agha, I. H.

I. H. Agha, Y. Okawachi, and A. L. Gaeta, “Theoretical and experimental investigation of broadband cascaded four-wave mixing in high-Q microspheres,” Opt. Express 17(18), 16209–16215 (2009).
[Crossref] [PubMed]

I. H. Agha, Y. Okawachi, M. A. Foster, J. E. Sharping, and A. L. Gaeta, “Four-wave-mixing parametric oscillations in dispersion-compensated high-Q silica microspheres,” Phys. Rev. A 76(4), 043837 (2007).
[Crossref]

Aitchison, J. S.

Arcizet, O.

P. Del’Haye, O. Arcizet, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency Comb Assisted Diode Laser Spectroscopy for Measurement of Microcavity Dispersion,” Nat. Photonics 3(9), 529–533 (2009).
[Crossref]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic Microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Beausoleil, R. G.

Benson, O.

Berneschi, S.

Birks, T. A.

Brasch, V.

Bures, J.

Chembo, Y. K.

Y. K. Chembo, D. V. Strekalov, and N. Yu, “Spectrum and dynamics of optical frequency combs generated with Monolithic Whispering Gallery Mode Resonators,” Phys. Rev. Lett. 104(10), 103902 (2010).
[Crossref] [PubMed]

Y. K. Chembo and N. Yu, “Modal expansion approach to optical-frequency-comb generation with monolithic whispering-gallery- mode resonators,” Phys. Rev. A 82(3), 033801 (2010).
[Crossref]

Coen, S.

S. Coen and M. Haelterman, “Modulational Instability Induced by Cavity Boundary Conditions in a Normally Dispersive Optical Fiber,” Phys. Rev. Lett. 79(21), 4139–4142 (1997).
[Crossref]

Conti, G. N.

Cosi, F.

Del’Haye, P.

P. Del’Haye, O. Arcizet, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency Comb Assisted Diode Laser Spectroscopy for Measurement of Microcavity Dispersion,” Nat. Photonics 3(9), 529–533 (2009).
[Crossref]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic Microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Diddams, S. A.

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

Dulashko, Y.

Dumais, P.

Fan, X.

Farnesi, D.

Foster, M. A.

I. H. Agha, Y. Okawachi, M. A. Foster, J. E. Sharping, and A. L. Gaeta, “Four-wave-mixing parametric oscillations in dispersion-compensated high-Q silica microspheres,” Phys. Rev. A 76(4), 043837 (2007).
[Crossref]

Gaeta, A. L.

Gonthier, F.

Gorodetsky, M. L.

P. Del’Haye, O. Arcizet, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency Comb Assisted Diode Laser Spectroscopy for Measurement of Microcavity Dispersion,” Nat. Photonics 3(9), 529–533 (2009).
[Crossref]

Guo, Y.

Haelterman, M.

S. Coen and M. Haelterman, “Modulational Instability Induced by Cavity Boundary Conditions in a Normally Dispersive Optical Fiber,” Phys. Rev. Lett. 79(21), 4139–4142 (1997).
[Crossref]

Hänsch, T. W.

A. Schliesser, N. Picqué, and T. W. Hänsch, “Mid-infrared frequency combs,” Nat. Photonics 6(7), 440–449 (2012).
[Crossref]

Hartinger, K.

Henze, R.

Herr, T.

Holzwarth, R.

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

P. Del’Haye, O. Arcizet, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency Comb Assisted Diode Laser Spectroscopy for Measurement of Microcavity Dispersion,” Nat. Photonics 3(9), 529–533 (2009).
[Crossref]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic Microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Ilchenko, V. S.

Jugessur, A.

Kippenberg, T. J.

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332(6029), 555–559 (2011).
[Crossref] [PubMed]

P. Del’Haye, O. Arcizet, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency Comb Assisted Diode Laser Spectroscopy for Measurement of Microcavity Dispersion,” Nat. Photonics 3(9), 529–533 (2009).
[Crossref]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic Microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity,” Phys. Rev. Lett. 93(8), 083904 (2004).
[Crossref] [PubMed]

Lacroix, S.

Lee, H.

Levy, J. S.

Li, H.

Li, J.

Liang, W.

Lipson, M.

Maleki, L.

Manolatou, C.

Matsko, A. B.

Meier, J.

Min, B.

B. Min, L. Yang, and K. Vahala, “Controlled transition between parametric and Raman oscillationsin ultrahigh-Q silica toroidal microcavities,” Appl. Phys. Lett. 87(18), 181109 (2005).
[Crossref]

Mohammed, W. S.

Mojahedi, M.

O’Shea, D.

M. Pöllinger, D. O’Shea, F. Warken, and A. Rauschenbeutel, “Ultrahigh-Q tunable whispering-gallery-mode microresonator,” Phys. Rev. Lett. 103(5), 053901 (2009).
[Crossref] [PubMed]

Okawachi, Y.

Pelli, S.

Picqué, N.

A. Schliesser, N. Picqué, and T. W. Hänsch, “Mid-infrared frequency combs,” Nat. Photonics 6(7), 440–449 (2012).
[Crossref]

Pöllinger, M.

M. Pöllinger, D. O’Shea, F. Warken, and A. Rauschenbeutel, “Ultrahigh-Q tunable whispering-gallery-mode microresonator,” Phys. Rev. Lett. 103(5), 053901 (2009).
[Crossref] [PubMed]

Qian, L.

Rauschenbeutel, A.

M. Pöllinger, D. O’Shea, F. Warken, and A. Rauschenbeutel, “Ultrahigh-Q tunable whispering-gallery-mode microresonator,” Phys. Rev. Lett. 103(5), 053901 (2009).
[Crossref] [PubMed]

Reddy, K.

Riemensberger, J.

Righini, G. C.

Rubiola, E.

Russell, P. St. J.

Saha, K.

Savchenkov, A. A.

Schliesser, A.

A. Schliesser, N. Picqué, and T. W. Hänsch, “Mid-infrared frequency combs,” Nat. Photonics 6(7), 440–449 (2012).
[Crossref]

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic Microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Schmidt, B. S.

Seidel, D.

Seifert, T.

Sharping, J. E.

I. H. Agha, Y. Okawachi, M. A. Foster, J. E. Sharping, and A. L. Gaeta, “Four-wave-mixing parametric oscillations in dispersion-compensated high-Q silica microspheres,” Phys. Rev. A 76(4), 043837 (2007).
[Crossref]

Soria, S.

Spillane, S. M.

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity,” Phys. Rev. Lett. 93(8), 083904 (2004).
[Crossref] [PubMed]

Stegeman, G. I.

Strekalov, D. V.

Y. K. Chembo, D. V. Strekalov, and N. Yu, “Spectrum and dynamics of optical frequency combs generated with Monolithic Whispering Gallery Mode Resonators,” Phys. Rev. Lett. 104(10), 103902 (2010).
[Crossref] [PubMed]

Sumetsky, M.

Sun, Y.

Turner, C. A.

Vahala, K.

B. Min, L. Yang, and K. Vahala, “Controlled transition between parametric and Raman oscillationsin ultrahigh-Q silica toroidal microcavities,” Appl. Phys. Lett. 87(18), 181109 (2005).
[Crossref]

Vahala, K. J.

J. Li, H. Lee, K. Y. Yang, and K. J. Vahala, “Sideband spectroscopy and dispersion measurement in microcavities,” Opt. Express 20(24), 26337–26344 (2012).
[Crossref] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Kerr-nonlinearity optical parametric oscillation in an ultrahigh-Q toroid microcavity,” Phys. Rev. Lett. 93(8), 083904 (2004).
[Crossref] [PubMed]

Villeneuve, A.

Wadsworth, W. J.

Ward, J.

Warken, F.

M. Pöllinger, D. O’Shea, F. Warken, and A. Rauschenbeutel, “Ultrahigh-Q tunable whispering-gallery-mode microresonator,” Phys. Rev. Lett. 103(5), 053901 (2009).
[Crossref] [PubMed]

Wen, Y. H.

Wigley, P. G. J.

Wilken, T.

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic Microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Willner, A. E.

Windeler, R. S.

Yang, K. Y.

Yang, L.

B. Min, L. Yang, and K. Vahala, “Controlled transition between parametric and Raman oscillationsin ultrahigh-Q silica toroidal microcavities,” Appl. Phys. Lett. 87(18), 181109 (2005).
[Crossref]

Yu, N.

Y. K. Chembo, D. V. Strekalov, and N. Yu, “Spectrum and dynamics of optical frequency combs generated with Monolithic Whispering Gallery Mode Resonators,” Phys. Rev. Lett. 104(10), 103902 (2010).
[Crossref] [PubMed]

Y. K. Chembo and N. Yu, “Modal expansion approach to optical-frequency-comb generation with monolithic whispering-gallery- mode resonators,” Phys. Rev. A 82(3), 033801 (2010).
[Crossref]

Yue, Y.

Zhang, L.

Appl. Phys. Lett. (1)

B. Min, L. Yang, and K. Vahala, “Controlled transition between parametric and Raman oscillationsin ultrahigh-Q silica toroidal microcavities,” Appl. Phys. Lett. 87(18), 181109 (2005).
[Crossref]

J. Opt. Soc. Am. A (1)

Nat. Photonics (2)

A. Schliesser, N. Picqué, and T. W. Hänsch, “Mid-infrared frequency combs,” Nat. Photonics 6(7), 440–449 (2012).
[Crossref]

P. Del’Haye, O. Arcizet, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency Comb Assisted Diode Laser Spectroscopy for Measurement of Microcavity Dispersion,” Nat. Photonics 3(9), 529–533 (2009).
[Crossref]

Nature (1)

P. Del’Haye, A. Schliesser, O. Arcizet, T. Wilken, R. Holzwarth, and T. J. Kippenberg, “Optical frequency comb generation from a monolithic Microresonator,” Nature 450(7173), 1214–1217 (2007).
[Crossref] [PubMed]

Opt. Express (8)

J. Meier, W. S. Mohammed, A. Jugessur, L. Qian, M. Mojahedi, and J. S. Aitchison, “Group velocity inversion in AlGaAs nanowires,” Opt. Express 15(20), 12755–12762 (2007).
[Crossref] [PubMed]

A. A. Savchenkov, E. Rubiola, A. B. Matsko, V. S. Ilchenko, and L. Maleki, “Phase noise of whispering gallery photonic hyper-parametric microwave oscillators,” Opt. Express 16(6), 4130–4144 (2008).
[Crossref] [PubMed]

I. H. Agha, Y. Okawachi, and A. L. Gaeta, “Theoretical and experimental investigation of broadband cascaded four-wave mixing in high-Q microspheres,” Opt. Express 17(18), 16209–16215 (2009).
[Crossref] [PubMed]

J. Li, H. Lee, K. Y. Yang, and K. J. Vahala, “Sideband spectroscopy and dispersion measurement in microcavities,” Opt. Express 20(24), 26337–26344 (2012).
[Crossref] [PubMed]

J. Riemensberger, K. Hartinger, T. Herr, V. Brasch, R. Holzwarth, and T. J. Kippenberg, “Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition,” Opt. Express 20(25), 27661–27669 (2012).
[Crossref] [PubMed]

H. Li, Y. Guo, Y. Sun, K. Reddy, and X. Fan, “Analysis of single nanoparticle detection by using 3-dimensionally confined optofluidic ring resonators,” Opt. Express 18(24), 25081–25088 (2010).
[Crossref] [PubMed]

C. A. Turner, C. Manolatou, B. S. Schmidt, and M. Lipson, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express 19, 4357–4362 (2006).

L. Zhang, Y. Yue, R. G. Beausoleil, and A. E. Willner, “Analysis and engineering of chromatic dispersion in silicon waveguide bends and ring resonators,” Opt. Express 19(9), 8102–8107 (2011).
[Crossref] [PubMed]

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Figures (5)

Fig. 1
Fig. 1

(a-b) The effective RI (black square) and the group RI (red circle) versus wavelength of a microsphere and a 3 μm wall thickness MBR are plotted. The diameter of the both micro-resonator is 120 μm. (c) Plot of ΔFSR as a function of MBR size at wavelength 1.55 μm, bubble wall thickness varies from 3.5 to 4.5 μm. (d) Plot of ZDW versus MBR wall thickness, MBR size is fixed at 120 μm.

Fig. 2
Fig. 2

The fabrication process of a MBR.

Fig. 3
Fig. 3

(a) Transmitted spectrum of a 136 μm diameter and 3-4μm thick wall MBR, the mode Q is 5 × 107. Inset is a photo of the MBR. (b) Transmitted spectrum of the MBR at 3-4 mW optical pump.

Fig. 4
Fig. 4

Transmitted spectrum under optical pump. (a) A 136 μm silica sphere, (b) a 245 μm diameter silica sphere. The inset in (a) shows a photo of the 136 μm sphere.

Fig. 5
Fig. 5

ΔFSR as a function of RI inside the MBR, and the bubble wall thickness. The diameter of MBR is 136 μm.

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