Abstract

UV laser induced damage (LID) on exit surface of fused silica could cause modulation effect to transmitted beam and further influence downstream propagation properties. This paper presents our experimental and analytical studies on this topic. In experiment, a series of measurement instruments are applied, including beam profiler, interferometer, microscope, and optical coherent tomography (OCT). Creating and characterizing of LID on fused silica sample have been implemented. Morphological features are studied based on their particular modulation effects on transmitted beam. In theoretical investigation, analytical modeling and numerical simulation are performed. Modulation effects from amplitude, phase, and size factors are analyzed respectively. Furthermore, we have novelly designed a simplified polygon model to simulate actual damage site with multiform modulation features, and the simulation results demonstrate that the modeling is usable and representative.

© 2013 OSA

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  1. F. O. Génin, M. D. Feit, M. R. Kozlowski, A. M. Rubenchik, A. Salleo, and J. Yoshiyama, “Rear-surface laser damage on 355-nm silica optics owing to Fresnel diffraction on front-surface contamination particles,” Appl. Opt.39(21), 3654–3663 (2000).
    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
  4. S. Mainguy, I. Tovena-Pecault, and B. Le Garrec, “Propagation of LIL/LMJ beams under the interaction with contamination particles,” Proc. SPIE5991, 59910G, 59910G-9 (2005).
    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
  13. I. L. Bass, V. G. Draggoo, G. M. Guss, R. P. Hackel, and M. A. Norton, “Mitigation of laser damage growth in fused silica NIF optics with a galvanometer scanned CO2 laser,” Proc. SPIE6261, 62612A, 62612A-10 (2006).
    [CrossRef]
  14. S. T. Yang, M. J. Matthew, S. Elhadj, D. Cooke, G. M. Guss, V. G. Draggoo, and P. J. Wegner, “Comparing the use of mid-infrared versus far-infrared lasers for mitigating damage growth on fused silica,” Appl. Opt.49(14), 2606–2616 (2010).
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]

2010 (2)

2009 (1)

2007 (3)

M. J. Matthews, L. L. Bass, G. M. Guss, C. C. Widmayer, and F. L. Ravizza, “Downstream Intensification Effects Associated with CO2 Laser Mitigation of Fused Silica,” Proc. SPIE6720, 67200A, 67200A-9 (2007).
[CrossRef]

J. R. Schmidt, M. J. Runkel, K. E. Martin, and C. J. Stolz, “Scattering-induced downstream beam modulation by plasma scalded mirrors,” Proc. SPIE6720, 67201H, 67201H-10 (2007).
[CrossRef]

C. W. Carr, J. B. Trenholme, and M. L. Spaeth, “Effect of temporal pulse shape on optical damage,” Appl. Phys. Lett.90(4), 041110 (2007).
[CrossRef]

2006 (4)

I. L. Bass, V. G. Draggoo, G. M. Guss, R. P. Hackel, and M. A. Norton, “Mitigation of laser damage growth in fused silica NIF optics with a galvanometer scanned CO2 laser,” Proc. SPIE6261, 62612A, 62612A-10 (2006).
[CrossRef]

J. Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, I. D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3ω (355nm) laser pulses,” J. Non-Cryst. Solids352(3), 255–272 (2006).
[CrossRef]

C. W. Carr, M. J. Matthews, J. D. Bude, and M. L. Spaeth, “The effect of laser pulse duration on laser-induced damage in KDP and SiO2,” Proc. SPIE6403, 64030K, 64030K-9 (2006).
[CrossRef]

E. Mendez, K. M. Nowak, H. J. Baker, F. J. Villarreal, and D. R. Hall, “Localized CO2 laser damage repair of fused silica optics,” Appl. Opt.45(21), 5358–5367 (2006).
[CrossRef] [PubMed]

2005 (2)

S. Mainguy, B. Le Garrec, and M. Josse, “Downstream impact of flaws on the LIL/LMJ laser lines,” Proc. SPIE5991, 599105, 599105-9 (2005).
[CrossRef]

S. Mainguy, I. Tovena-Pecault, and B. Le Garrec, “Propagation of LIL/LMJ beams under the interaction with contamination particles,” Proc. SPIE5991, 59910G, 59910G-9 (2005).
[CrossRef]

2004 (1)

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE5273, 264–271 (2004).
[CrossRef]

2003 (1)

O. Morice, “Miro: Complete modeling and software for pulse amplification and propagation in high-power laser system,” Opt. Eng.42(6), 1530–1541 (2003).
[CrossRef]

2002 (2)

2000 (1)

1999 (1)

M. R. Kozlowski, R. Mouser, S. Maricle, P. Wegner, and T. Weiland, “Laser damage performance of fused silica optical components measured on the Beamlet laser at 351nm,” Proc. SPIE3578, 436–445 (1999).
[CrossRef]

1998 (1)

1993 (1)

Baker, H. J.

Bass, I. L.

I. L. Bass, V. G. Draggoo, G. M. Guss, R. P. Hackel, and M. A. Norton, “Mitigation of laser damage growth in fused silica NIF optics with a galvanometer scanned CO2 laser,” Proc. SPIE6261, 62612A, 62612A-10 (2006).
[CrossRef]

Bass, L. L.

M. J. Matthews, L. L. Bass, G. M. Guss, C. C. Widmayer, and F. L. Ravizza, “Downstream Intensification Effects Associated with CO2 Laser Mitigation of Fused Silica,” Proc. SPIE6720, 67200A, 67200A-9 (2007).
[CrossRef]

Bertussi, B.

Bude, J. D.

C. W. Carr, M. J. Matthews, J. D. Bude, and M. L. Spaeth, “The effect of laser pulse duration on laser-induced damage in KDP and SiO2,” Proc. SPIE6403, 64030K, 64030K-9 (2006).
[CrossRef]

Carr, C. W.

R. A. Negres, M. A. Norton, D. A. Cross, and C. W. Carr, “Growth behavior of laser-induced damage on fused silica optics under UV, ns laser irradiation,” Opt. Express18(19), 19966–19976 (2010).
[CrossRef] [PubMed]

C. W. Carr, J. B. Trenholme, and M. L. Spaeth, “Effect of temporal pulse shape on optical damage,” Appl. Phys. Lett.90(4), 041110 (2007).
[CrossRef]

C. W. Carr, M. J. Matthews, J. D. Bude, and M. L. Spaeth, “The effect of laser pulse duration on laser-induced damage in KDP and SiO2,” Proc. SPIE6403, 64030K, 64030K-9 (2006).
[CrossRef]

Cooke, D.

Cormont, P.

Cross, D. A.

Demos, S. G.

Draggoo, V. G.

S. T. Yang, M. J. Matthew, S. Elhadj, D. Cooke, G. M. Guss, V. G. Draggoo, and P. J. Wegner, “Comparing the use of mid-infrared versus far-infrared lasers for mitigating damage growth on fused silica,” Appl. Opt.49(14), 2606–2616 (2010).
[CrossRef]

I. L. Bass, V. G. Draggoo, G. M. Guss, R. P. Hackel, and M. A. Norton, “Mitigation of laser damage growth in fused silica NIF optics with a galvanometer scanned CO2 laser,” Proc. SPIE6261, 62612A, 62612A-10 (2006).
[CrossRef]

Elhadj, S.

Feit, M. D.

Ferriera, J. L.

J. Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, I. D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3ω (355nm) laser pulses,” J. Non-Cryst. Solids352(3), 255–272 (2006).
[CrossRef]

Fujimoto, J.

Génin, F. O.

Guss, G. M.

S. T. Yang, M. J. Matthew, S. Elhadj, D. Cooke, G. M. Guss, V. G. Draggoo, and P. J. Wegner, “Comparing the use of mid-infrared versus far-infrared lasers for mitigating damage growth on fused silica,” Appl. Opt.49(14), 2606–2616 (2010).
[CrossRef]

M. J. Matthews, L. L. Bass, G. M. Guss, C. C. Widmayer, and F. L. Ravizza, “Downstream Intensification Effects Associated with CO2 Laser Mitigation of Fused Silica,” Proc. SPIE6720, 67200A, 67200A-9 (2007).
[CrossRef]

I. L. Bass, V. G. Draggoo, G. M. Guss, R. P. Hackel, and M. A. Norton, “Mitigation of laser damage growth in fused silica NIF optics with a galvanometer scanned CO2 laser,” Proc. SPIE6261, 62612A, 62612A-10 (2006).
[CrossRef]

Hackel, R. P.

I. L. Bass, V. G. Draggoo, G. M. Guss, R. P. Hackel, and M. A. Norton, “Mitigation of laser damage growth in fused silica NIF optics with a galvanometer scanned CO2 laser,” Proc. SPIE6261, 62612A, 62612A-10 (2006).
[CrossRef]

Hall, D. R.

Haupt, D. L.

J. Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, I. D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3ω (355nm) laser pulses,” J. Non-Cryst. Solids352(3), 255–272 (2006).
[CrossRef]

Hunt, J. T.

Hutcheon, I. D.

J. Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, I. D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3ω (355nm) laser pulses,” J. Non-Cryst. Solids352(3), 255–272 (2006).
[CrossRef]

Josse, M.

S. Mainguy, B. Le Garrec, and M. Josse, “Downstream impact of flaws on the LIL/LMJ laser lines,” Proc. SPIE5991, 599105, 599105-9 (2005).
[CrossRef]

Kinney, J. H.

J. Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, I. D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3ω (355nm) laser pulses,” J. Non-Cryst. Solids352(3), 255–272 (2006).
[CrossRef]

Kozlowski, M. R.

Le Garrec, B.

S. Mainguy, B. Le Garrec, and M. Josse, “Downstream impact of flaws on the LIL/LMJ laser lines,” Proc. SPIE5991, 599105, 599105-9 (2005).
[CrossRef]

S. Mainguy, I. Tovena-Pecault, and B. Le Garrec, “Propagation of LIL/LMJ beams under the interaction with contamination particles,” Proc. SPIE5991, 59910G, 59910G-9 (2005).
[CrossRef]

Legros, P.

Lindsey, E. F.

J. Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, I. D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3ω (355nm) laser pulses,” J. Non-Cryst. Solids352(3), 255–272 (2006).
[CrossRef]

Mainguy, S.

S. Mainguy, I. Tovena-Pecault, and B. Le Garrec, “Propagation of LIL/LMJ beams under the interaction with contamination particles,” Proc. SPIE5991, 59910G, 59910G-9 (2005).
[CrossRef]

S. Mainguy, B. Le Garrec, and M. Josse, “Downstream impact of flaws on the LIL/LMJ laser lines,” Proc. SPIE5991, 599105, 599105-9 (2005).
[CrossRef]

Manes, K. R.

Maricle, S.

M. R. Kozlowski, R. Mouser, S. Maricle, P. Wegner, and T. Weiland, “Laser damage performance of fused silica optical components measured on the Beamlet laser at 351nm,” Proc. SPIE3578, 436–445 (1999).
[CrossRef]

Martin, K. E.

J. R. Schmidt, M. J. Runkel, K. E. Martin, and C. J. Stolz, “Scattering-induced downstream beam modulation by plasma scalded mirrors,” Proc. SPIE6720, 67201H, 67201H-10 (2007).
[CrossRef]

Matthew, M. J.

Matthews, M. J.

M. J. Matthews, L. L. Bass, G. M. Guss, C. C. Widmayer, and F. L. Ravizza, “Downstream Intensification Effects Associated with CO2 Laser Mitigation of Fused Silica,” Proc. SPIE6720, 67200A, 67200A-9 (2007).
[CrossRef]

C. W. Carr, M. J. Matthews, J. D. Bude, and M. L. Spaeth, “The effect of laser pulse duration on laser-induced damage in KDP and SiO2,” Proc. SPIE6403, 64030K, 64030K-9 (2006).
[CrossRef]

Mendez, E.

Milam, D.

Minoshima, K.

Morice, O.

O. Morice, “Miro: Complete modeling and software for pulse amplification and propagation in high-power laser system,” Opt. Eng.42(6), 1530–1541 (2003).
[CrossRef]

Mouser, R.

M. R. Kozlowski, R. Mouser, S. Maricle, P. Wegner, and T. Weiland, “Laser damage performance of fused silica optical components measured on the Beamlet laser at 351nm,” Proc. SPIE3578, 436–445 (1999).
[CrossRef]

Negres, R. A.

Nickels, M. R.

Norton, M. A.

R. A. Negres, M. A. Norton, D. A. Cross, and C. W. Carr, “Growth behavior of laser-induced damage on fused silica optics under UV, ns laser irradiation,” Opt. Express18(19), 19966–19976 (2010).
[CrossRef] [PubMed]

I. L. Bass, V. G. Draggoo, G. M. Guss, R. P. Hackel, and M. A. Norton, “Mitigation of laser damage growth in fused silica NIF optics with a galvanometer scanned CO2 laser,” Proc. SPIE6261, 62612A, 62612A-10 (2006).
[CrossRef]

Nowak, K. M.

Palmier, S.

Ravizza, F. L.

M. J. Matthews, L. L. Bass, G. M. Guss, C. C. Widmayer, and F. L. Ravizza, “Downstream Intensification Effects Associated with CO2 Laser Mitigation of Fused Silica,” Proc. SPIE6720, 67200A, 67200A-9 (2007).
[CrossRef]

Renard, P. A.

Rubenchik, A. M.

Rullier, J. L.

Runkel, M. J.

J. R. Schmidt, M. J. Runkel, K. E. Martin, and C. J. Stolz, “Scattering-induced downstream beam modulation by plasma scalded mirrors,” Proc. SPIE6720, 67201H, 67201H-10 (2007).
[CrossRef]

Salleo, A.

Schmidt, J. R.

J. R. Schmidt, M. J. Runkel, K. E. Martin, and C. J. Stolz, “Scattering-induced downstream beam modulation by plasma scalded mirrors,” Proc. SPIE6720, 67201H, 67201H-10 (2007).
[CrossRef]

Spaeth, M. L.

C. W. Carr, J. B. Trenholme, and M. L. Spaeth, “Effect of temporal pulse shape on optical damage,” Appl. Phys. Lett.90(4), 041110 (2007).
[CrossRef]

C. W. Carr, M. J. Matthews, J. D. Bude, and M. L. Spaeth, “The effect of laser pulse duration on laser-induced damage in KDP and SiO2,” Proc. SPIE6403, 64030K, 64030K-9 (2006).
[CrossRef]

Staggs, M.

Stolz, C. J.

J. R. Schmidt, M. J. Runkel, K. E. Martin, and C. J. Stolz, “Scattering-induced downstream beam modulation by plasma scalded mirrors,” Proc. SPIE6720, 67201H, 67201H-10 (2007).
[CrossRef]

Tovena-Pecault, I.

S. Mainguy, I. Tovena-Pecault, and B. Le Garrec, “Propagation of LIL/LMJ beams under the interaction with contamination particles,” Proc. SPIE5991, 59910G, 59910G-9 (2005).
[CrossRef]

Trenholme, J. B.

C. W. Carr, J. B. Trenholme, and M. L. Spaeth, “Effect of temporal pulse shape on optical damage,” Appl. Phys. Lett.90(4), 041110 (2007).
[CrossRef]

Villarreal, F. J.

Wegner, P.

M. R. Kozlowski, R. Mouser, S. Maricle, P. Wegner, and T. Weiland, “Laser damage performance of fused silica optical components measured on the Beamlet laser at 351nm,” Proc. SPIE3578, 436–445 (1999).
[CrossRef]

Wegner, P. J.

Weiland, T.

M. R. Kozlowski, R. Mouser, S. Maricle, P. Wegner, and T. Weiland, “Laser damage performance of fused silica optical components measured on the Beamlet laser at 351nm,” Proc. SPIE3578, 436–445 (1999).
[CrossRef]

Widmayer, C. C.

M. J. Matthews, L. L. Bass, G. M. Guss, C. C. Widmayer, and F. L. Ravizza, “Downstream Intensification Effects Associated with CO2 Laser Mitigation of Fused Silica,” Proc. SPIE6720, 67200A, 67200A-9 (2007).
[CrossRef]

C. C. Widmayer, M. R. Nickels, and D. Milam, “Nonlinear holographic imaging of phase errors,” Appl. Opt.37(21), 4801–4805 (1998).
[CrossRef] [PubMed]

Wong, J.

J. Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, I. D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3ω (355nm) laser pulses,” J. Non-Cryst. Solids352(3), 255–272 (2006).
[CrossRef]

Yang, S. T.

Yoshiyama, J.

Appl. Opt. (6)

Appl. Phys. Lett. (1)

C. W. Carr, J. B. Trenholme, and M. L. Spaeth, “Effect of temporal pulse shape on optical damage,” Appl. Phys. Lett.90(4), 041110 (2007).
[CrossRef]

J. Non-Cryst. Solids (1)

J. Wong, J. L. Ferriera, E. F. Lindsey, D. L. Haupt, I. D. Hutcheon, and J. H. Kinney, “Morphology and microstructure in fused silica induced by high fluence ultraviolet 3ω (355nm) laser pulses,” J. Non-Cryst. Solids352(3), 255–272 (2006).
[CrossRef]

Opt. Eng. (1)

O. Morice, “Miro: Complete modeling and software for pulse amplification and propagation in high-power laser system,” Opt. Eng.42(6), 1530–1541 (2003).
[CrossRef]

Opt. Express (3)

Proc. SPIE (8)

C. W. Carr, M. J. Matthews, J. D. Bude, and M. L. Spaeth, “The effect of laser pulse duration on laser-induced damage in KDP and SiO2,” Proc. SPIE6403, 64030K, 64030K-9 (2006).
[CrossRef]

S. Mainguy, B. Le Garrec, and M. Josse, “Downstream impact of flaws on the LIL/LMJ laser lines,” Proc. SPIE5991, 599105, 599105-9 (2005).
[CrossRef]

S. Mainguy, I. Tovena-Pecault, and B. Le Garrec, “Propagation of LIL/LMJ beams under the interaction with contamination particles,” Proc. SPIE5991, 59910G, 59910G-9 (2005).
[CrossRef]

M. J. Matthews, L. L. Bass, G. M. Guss, C. C. Widmayer, and F. L. Ravizza, “Downstream Intensification Effects Associated with CO2 Laser Mitigation of Fused Silica,” Proc. SPIE6720, 67200A, 67200A-9 (2007).
[CrossRef]

J. R. Schmidt, M. J. Runkel, K. E. Martin, and C. J. Stolz, “Scattering-induced downstream beam modulation by plasma scalded mirrors,” Proc. SPIE6720, 67201H, 67201H-10 (2007).
[CrossRef]

M. R. Kozlowski, R. Mouser, S. Maricle, P. Wegner, and T. Weiland, “Laser damage performance of fused silica optical components measured on the Beamlet laser at 351nm,” Proc. SPIE3578, 436–445 (1999).
[CrossRef]

I. L. Bass, V. G. Draggoo, G. M. Guss, R. P. Hackel, and M. A. Norton, “Mitigation of laser damage growth in fused silica NIF optics with a galvanometer scanned CO2 laser,” Proc. SPIE6261, 62612A, 62612A-10 (2006).
[CrossRef]

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE5273, 264–271 (2004).
[CrossRef]

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Figures (11)

Fig. 1
Fig. 1

Sketch map of experimental setup. A series of measurement instruments are applied for DIME characterization.

Fig. 2
Fig. 2

DIME characterizations: (a) microscope observation, (b) surface form measured by interferometer, (c) OCT image of lateral morphology, and (d) Transmitted beam profile at 5mm downstream distance.

Fig. 3
Fig. 3

SEM micrograph of the damage site. In center, crater core with sub-micron structures is formed. Around, the cracks and flaws indicate the existence of sub-surface fracturing and peeling.

Fig. 4
Fig. 4

Modulated profiles of transmitted beam at different downstream distances.

Fig. 5
Fig. 5

Evolution curves of on-axis intensity of two different size cases.

Fig. 6
Fig. 6

Schematic diagram of transmitted beam modulation and propagation.

Fig. 7
Fig. 7

Simulation results of small size case (100μm). Beam profiles under amplitude (upper-line) and phase (lower-line) factors are exhibited and ranged according to the propagation distance. Left panels exhibit the initial parameters.

Fig. 8
Fig. 8

Simulation results of large size case (500μm). Beam profiles under amplitude (upper-line) and phase (lower-line) factors are exhibited and ranged according to the propagation distance. Left panels exhibit the initial parameters.

Fig. 9
Fig. 9

Evolution curves of the intensity parameters along with propagation distance.

Fig. 10
Fig. 10

Pentagon DIME model with crater-like morphological features.

Fig. 11
Fig. 11

Numerical simulation of the simplified DIME model with crater-like pentagon pattern.

Equations (6)

Equations on this page are rendered with MathJax. Learn more.

U( x 0 , y 0 ,Z=0 )= u 0 h( x 0 , y 0 ),
h( x 0 , y 0 )={ 1 s t( x 0 , y 0 )exp[ jϕ( x 0 , y 0 ) ] s ,
U( x,y,Z=z )= 1 jλz exp(jkz) U( x 0 , y 0 ,Z=0 ) exp{ j k 2z [ ( x x 0 ) 2 + ( y y 0 ) 2 ] }d x 0 d y 0 .
U( x,y,Z=z )= 1 jλz exp(jkz)[ ( x 0 , y 0 )s u 0 h( x 0 , y 0 ) exp{ j k 2z [ ( x x 0 ) 2 + ( y y 0 ) 2 ] }d x 0 d y 0 + ( x 0 , y 0 )s u 0 h( x 0 , y 0 ) exp{ j k 2z [ ( x x 0 ) 2 + ( y y 0 ) 2 ] }d x 0 d y 0 ]. = 1 jλz exp(jkz) ( x 0 , y 0 )s t( x 0 , y 0 )exp { j k 2z [ ( x x 0 ) 2 + ( y y 0 ) 2 ]+jϕ( x 0 , y 0 ) }d x 0 d y 0 + 1 jλz exp(jkz) ( x 0 , y 0 )s exp{ j k 2z [ ( x x 0 ) 2 + ( y y 0 ) 2 ] }d x 0 d y 0
I( x,y,Z=z )= | U( x,y,Z=z ) | 2 .
h( x 0 , y 0 )={ 0 s 0 a i exp(j ϕ i ) s i (i=1,2,...,5) 1 else .

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