Abstract

Microparticle and microfiber induced near-field laser heating has been widely used in surface nanostructuring. Information about the temperature and stress fields in the nanoscale near-field heating region is imperative for process control and optimization. Probing of this nanoscale temperature, stress, and optical fields remains a great challenge since the heating area is very small (~100 nm or less) and not immediately accessible for sensing. In this work, thermal probing of a single microparticle and microfiber induced near-field focusing on a substrate with laser light is conducted experimentally and interpreted by high-fidelity simulations. The laser (λ=532nm) serves as both heating and Raman probing sources. It is very interesting to note that variation of the Raman intensity, wavenumber, and linewidth all can be used to precisely capture the size of the micro-size subject on the substrate. Nanoscale mapping of conjugated optical, thermal, and stress effects, and the de-conjugation of these effects are performed. The effect of the laser fluence on the temperature and stress in the nanoscale heating region is investigated. With laser fluence of 3.9 ×109 W/m2 and for a 1.21 μm silica particle induced laser heating, the maximum temperature rise and local stress are 58.5 K and 160 MPa, respectively. For a 6.24 μm glass fiber, they are 33.0 K and 120 MPa, respectively. Experimental results are explained and consistent with three-dimensional high-fidelity optical, thermal and stress field simulation.

© 2013 OSA

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    [CrossRef]
  3. S. Jeong, L. Hu, H. R. Lee, E. Garnett, J. W. Choi, and Y. Cui, “Fast and scalable printing of large area monolayer nanoparticles for nanotexturing applications,” Nano Lett.10(8), 2989–2994 (2010).
    [CrossRef] [PubMed]
  4. L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, J. Shi, and J. C. Li, “Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles,” Nanotechnology15(3), 333–336 (2004).
    [CrossRef]
  5. E. McLeod and C. B. Arnold, “Subwavelength direct-write nanopatterning using optically trapped microspheres,” Nat. Nanotechnol.3(7), 413–417 (2008).
    [CrossRef] [PubMed]
  6. M. Rycenga, P. H. C. Camargo, W. Y. Li, C. H. Moran, and Y. N. Xia, “Understanding the SERS effects of single silver nanoparticles and their dimers, one at a time,” J Phys Chem Lett1(4), 696–703 (2010).
    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
  18. Y. W. Zheng, B. S. Luk’yanchuk, Y. F. Lu, W. D. Song, and Z. H. Mai, “Dry laser cleaning of particles from solid substrates: experiments and theory,” J. Appl. Phys.90(5), 2135–2142 (2001).
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2013 (1)

X. Tang, S. Xu, and X. Wang, “Nanoscale probing of thermal, stress, and optical fields under near-field laser heating,” PLoS ONE8(3), e58030 (2013).
[CrossRef] [PubMed]

2012 (1)

2011 (1)

Y. Yue, X. Chen, and X. Wang, “Noncontact sub-10 nm temperature measurement in near-field laser heating,” ACS Nano5(6), 4466–4475 (2011).
[CrossRef] [PubMed]

2010 (2)

M. Rycenga, P. H. C. Camargo, W. Y. Li, C. H. Moran, and Y. N. Xia, “Understanding the SERS effects of single silver nanoparticles and their dimers, one at a time,” J Phys Chem Lett1(4), 696–703 (2010).
[CrossRef] [PubMed]

S. Jeong, L. Hu, H. R. Lee, E. Garnett, J. W. Choi, and Y. Cui, “Fast and scalable printing of large area monolayer nanoparticles for nanotexturing applications,” Nano Lett.10(8), 2989–2994 (2010).
[CrossRef] [PubMed]

2009 (1)

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

2008 (1)

E. McLeod and C. B. Arnold, “Subwavelength direct-write nanopatterning using optically trapped microspheres,” Nat. Nanotechnol.3(7), 413–417 (2008).
[CrossRef] [PubMed]

2007 (1)

T. Beechem, S. Graham, S. P. Kearney, L. M. Phinney, and J. R. Serrano, “Invited article: simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy,” Rev. Sci. Instrum.78(6), 061301 (2007).
[CrossRef] [PubMed]

2004 (3)

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, and X. Y. Chen, “Parametric investigation of laser nanoimprinting of hemispherical cavity arrays,” J. Appl. Phys.96(9), 5144–5151 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, and D. R. Alexander, “Laser-assisted nanopatterning of aluminium using particle-induced near-field optical enhancement and nanoimprinting,” Nanotechnology15(11), 1655–1660 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, J. Shi, and J. C. Li, “Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles,” Nanotechnology15(3), 333–336 (2004).
[CrossRef]

2003 (1)

S. Kouteva-Arguirova, T. Arguirov, D. Wolfframm, and J. Reif, “Influence of local heating on micro-Raman spectroscopy of silicon,” J. Appl. Phys.94(8), 4946–4949 (2003).
[CrossRef]

2002 (2)

S. M. Huang, M. H. Hong, B. S. Luk’yanchuk, Y. W. Zheng, W. D. Song, Y. F. Lu, and T. C. Chong, “Pulsed laser-assisted surface structuring with optical near-field enhanced effects,” J. Appl. Phys.92(5), 2495–2500 (2002).
[CrossRef]

V. Ng, Y. Lee, B. Chen, and A. Adeyeye, “Nanostructure array fabrication with temperature-controlled self-assembly techniques,” Nanotechnology13(5), 554–558 (2002).
[CrossRef]

2001 (3)

Y. W. Zheng, B. S. Luk’yanchuk, Y. F. Lu, W. D. Song, and Z. H. Mai, “Dry laser cleaning of particles from solid substrates: experiments and theory,” J. Appl. Phys.90(5), 2135–2142 (2001).
[CrossRef]

V. M. Shelekhina, O. A. Prokhorov, P. A. Vityaz, A. P. Stupak, S. V. Gaponenko, and N. V. Gaponenko, “Towards 3D photonic crystals,” Synth. Met.124(1), 137–139 (2001).
[CrossRef]

H. J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, “Local field enhancement effects for nanostructuring of surfaces,” J. Microsc.202(1), 129–135 (2001).
[CrossRef] [PubMed]

1970 (1)

T. Hart, R. Aggarwal, and B. Lax, “Temperature dependence of Raman scattering in silicon,” Phys. Rev. B1(2), 638–642 (1970).
[CrossRef]

Adeyeye, A.

V. Ng, Y. Lee, B. Chen, and A. Adeyeye, “Nanostructure array fabrication with temperature-controlled self-assembly techniques,” Nanotechnology13(5), 554–558 (2002).
[CrossRef]

Aggarwal, R.

T. Hart, R. Aggarwal, and B. Lax, “Temperature dependence of Raman scattering in silicon,” Phys. Rev. B1(2), 638–642 (1970).
[CrossRef]

Alexander, D. R.

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, and X. Y. Chen, “Parametric investigation of laser nanoimprinting of hemispherical cavity arrays,” J. Appl. Phys.96(9), 5144–5151 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, and D. R. Alexander, “Laser-assisted nanopatterning of aluminium using particle-induced near-field optical enhancement and nanoimprinting,” Nanotechnology15(11), 1655–1660 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, J. Shi, and J. C. Li, “Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles,” Nanotechnology15(3), 333–336 (2004).
[CrossRef]

Arguirov, T.

S. Kouteva-Arguirova, T. Arguirov, D. Wolfframm, and J. Reif, “Influence of local heating on micro-Raman spectroscopy of silicon,” J. Appl. Phys.94(8), 4946–4949 (2003).
[CrossRef]

Arnold, C. B.

E. McLeod and C. B. Arnold, “Subwavelength direct-write nanopatterning using optically trapped microspheres,” Nat. Nanotechnol.3(7), 413–417 (2008).
[CrossRef] [PubMed]

Beechem, T.

T. Beechem, S. Graham, S. P. Kearney, L. M. Phinney, and J. R. Serrano, “Invited article: simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy,” Rev. Sci. Instrum.78(6), 061301 (2007).
[CrossRef] [PubMed]

Bertsch, M.

H. J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, “Local field enhancement effects for nanostructuring of surfaces,” J. Microsc.202(1), 129–135 (2001).
[CrossRef] [PubMed]

Boneberg, J.

H. J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, “Local field enhancement effects for nanostructuring of surfaces,” J. Microsc.202(1), 129–135 (2001).
[CrossRef] [PubMed]

Brambilla, G.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Camargo, P. H. C.

M. Rycenga, P. H. C. Camargo, W. Y. Li, C. H. Moran, and Y. N. Xia, “Understanding the SERS effects of single silver nanoparticles and their dimers, one at a time,” J Phys Chem Lett1(4), 696–703 (2010).
[CrossRef] [PubMed]

Chen, B.

V. Ng, Y. Lee, B. Chen, and A. Adeyeye, “Nanostructure array fabrication with temperature-controlled self-assembly techniques,” Nanotechnology13(5), 554–558 (2002).
[CrossRef]

Chen, X.

X. Tang, Y. Yue, X. Chen, and X. Wang, “Sub-wavelength temperature probing in near-field laser heating by particles,” Opt. Express20(13), 14152–14167 (2012).
[CrossRef] [PubMed]

Y. Yue, X. Chen, and X. Wang, “Noncontact sub-10 nm temperature measurement in near-field laser heating,” ACS Nano5(6), 4466–4475 (2011).
[CrossRef] [PubMed]

Chen, X. Y.

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, and X. Y. Chen, “Parametric investigation of laser nanoimprinting of hemispherical cavity arrays,” J. Appl. Phys.96(9), 5144–5151 (2004).
[CrossRef]

Choi, J. W.

S. Jeong, L. Hu, H. R. Lee, E. Garnett, J. W. Choi, and Y. Cui, “Fast and scalable printing of large area monolayer nanoparticles for nanotexturing applications,” Nano Lett.10(8), 2989–2994 (2010).
[CrossRef] [PubMed]

Chong, T. C.

S. M. Huang, M. H. Hong, B. S. Luk’yanchuk, Y. W. Zheng, W. D. Song, Y. F. Lu, and T. C. Chong, “Pulsed laser-assisted surface structuring with optical near-field enhanced effects,” J. Appl. Phys.92(5), 2495–2500 (2002).
[CrossRef]

Cui, Y.

S. Jeong, L. Hu, H. R. Lee, E. Garnett, J. W. Choi, and Y. Cui, “Fast and scalable printing of large area monolayer nanoparticles for nanotexturing applications,” Nano Lett.10(8), 2989–2994 (2010).
[CrossRef] [PubMed]

Doerr, D. W.

L. P. Li, Y. F. Lu, D. W. Doerr, and D. R. Alexander, “Laser-assisted nanopatterning of aluminium using particle-induced near-field optical enhancement and nanoimprinting,” Nanotechnology15(11), 1655–1660 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, and X. Y. Chen, “Parametric investigation of laser nanoimprinting of hemispherical cavity arrays,” J. Appl. Phys.96(9), 5144–5151 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, J. Shi, and J. C. Li, “Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles,” Nanotechnology15(3), 333–336 (2004).
[CrossRef]

Feng, X.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Gaponenko, N. V.

V. M. Shelekhina, O. A. Prokhorov, P. A. Vityaz, A. P. Stupak, S. V. Gaponenko, and N. V. Gaponenko, “Towards 3D photonic crystals,” Synth. Met.124(1), 137–139 (2001).
[CrossRef]

Gaponenko, S. V.

V. M. Shelekhina, O. A. Prokhorov, P. A. Vityaz, A. P. Stupak, S. V. Gaponenko, and N. V. Gaponenko, “Towards 3D photonic crystals,” Synth. Met.124(1), 137–139 (2001).
[CrossRef]

Garnett, E.

S. Jeong, L. Hu, H. R. Lee, E. Garnett, J. W. Choi, and Y. Cui, “Fast and scalable printing of large area monolayer nanoparticles for nanotexturing applications,” Nano Lett.10(8), 2989–2994 (2010).
[CrossRef] [PubMed]

Graham, S.

T. Beechem, S. Graham, S. P. Kearney, L. M. Phinney, and J. R. Serrano, “Invited article: simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy,” Rev. Sci. Instrum.78(6), 061301 (2007).
[CrossRef] [PubMed]

Hart, T.

T. Hart, R. Aggarwal, and B. Lax, “Temperature dependence of Raman scattering in silicon,” Phys. Rev. B1(2), 638–642 (1970).
[CrossRef]

Hong, M. H.

S. M. Huang, M. H. Hong, B. S. Luk’yanchuk, Y. W. Zheng, W. D. Song, Y. F. Lu, and T. C. Chong, “Pulsed laser-assisted surface structuring with optical near-field enhanced effects,” J. Appl. Phys.92(5), 2495–2500 (2002).
[CrossRef]

Horak, P.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Hu, L.

S. Jeong, L. Hu, H. R. Lee, E. Garnett, J. W. Choi, and Y. Cui, “Fast and scalable printing of large area monolayer nanoparticles for nanotexturing applications,” Nano Lett.10(8), 2989–2994 (2010).
[CrossRef] [PubMed]

Huang, S. M.

S. M. Huang, M. H. Hong, B. S. Luk’yanchuk, Y. W. Zheng, W. D. Song, Y. F. Lu, and T. C. Chong, “Pulsed laser-assisted surface structuring with optical near-field enhanced effects,” J. Appl. Phys.92(5), 2495–2500 (2002).
[CrossRef]

Jeong, S.

S. Jeong, L. Hu, H. R. Lee, E. Garnett, J. W. Choi, and Y. Cui, “Fast and scalable printing of large area monolayer nanoparticles for nanotexturing applications,” Nano Lett.10(8), 2989–2994 (2010).
[CrossRef] [PubMed]

Jung, Y.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Kearney, S. P.

T. Beechem, S. Graham, S. P. Kearney, L. M. Phinney, and J. R. Serrano, “Invited article: simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy,” Rev. Sci. Instrum.78(6), 061301 (2007).
[CrossRef] [PubMed]

Koizumi, F.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Koukharenko, E.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Kouteva-Arguirova, S.

S. Kouteva-Arguirova, T. Arguirov, D. Wolfframm, and J. Reif, “Influence of local heating on micro-Raman spectroscopy of silicon,” J. Appl. Phys.94(8), 4946–4949 (2003).
[CrossRef]

Lax, B.

T. Hart, R. Aggarwal, and B. Lax, “Temperature dependence of Raman scattering in silicon,” Phys. Rev. B1(2), 638–642 (1970).
[CrossRef]

Lee, H. R.

S. Jeong, L. Hu, H. R. Lee, E. Garnett, J. W. Choi, and Y. Cui, “Fast and scalable printing of large area monolayer nanoparticles for nanotexturing applications,” Nano Lett.10(8), 2989–2994 (2010).
[CrossRef] [PubMed]

Lee, Y.

V. Ng, Y. Lee, B. Chen, and A. Adeyeye, “Nanostructure array fabrication with temperature-controlled self-assembly techniques,” Nanotechnology13(5), 554–558 (2002).
[CrossRef]

Leiderer, P.

H. J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, “Local field enhancement effects for nanostructuring of surfaces,” J. Microsc.202(1), 129–135 (2001).
[CrossRef] [PubMed]

Li, J. C.

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, J. Shi, and J. C. Li, “Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles,” Nanotechnology15(3), 333–336 (2004).
[CrossRef]

Li, L. P.

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, J. Shi, and J. C. Li, “Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles,” Nanotechnology15(3), 333–336 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, and D. R. Alexander, “Laser-assisted nanopatterning of aluminium using particle-induced near-field optical enhancement and nanoimprinting,” Nanotechnology15(11), 1655–1660 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, and X. Y. Chen, “Parametric investigation of laser nanoimprinting of hemispherical cavity arrays,” J. Appl. Phys.96(9), 5144–5151 (2004).
[CrossRef]

Li, W. Y.

M. Rycenga, P. H. C. Camargo, W. Y. Li, C. H. Moran, and Y. N. Xia, “Understanding the SERS effects of single silver nanoparticles and their dimers, one at a time,” J Phys Chem Lett1(4), 696–703 (2010).
[CrossRef] [PubMed]

Lu, Y. F.

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, J. Shi, and J. C. Li, “Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles,” Nanotechnology15(3), 333–336 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, and X. Y. Chen, “Parametric investigation of laser nanoimprinting of hemispherical cavity arrays,” J. Appl. Phys.96(9), 5144–5151 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, and D. R. Alexander, “Laser-assisted nanopatterning of aluminium using particle-induced near-field optical enhancement and nanoimprinting,” Nanotechnology15(11), 1655–1660 (2004).
[CrossRef]

S. M. Huang, M. H. Hong, B. S. Luk’yanchuk, Y. W. Zheng, W. D. Song, Y. F. Lu, and T. C. Chong, “Pulsed laser-assisted surface structuring with optical near-field enhanced effects,” J. Appl. Phys.92(5), 2495–2500 (2002).
[CrossRef]

Y. W. Zheng, B. S. Luk’yanchuk, Y. F. Lu, W. D. Song, and Z. H. Mai, “Dry laser cleaning of particles from solid substrates: experiments and theory,” J. Appl. Phys.90(5), 2135–2142 (2001).
[CrossRef]

Luk’yanchuk, B. S.

S. M. Huang, M. H. Hong, B. S. Luk’yanchuk, Y. W. Zheng, W. D. Song, Y. F. Lu, and T. C. Chong, “Pulsed laser-assisted surface structuring with optical near-field enhanced effects,” J. Appl. Phys.92(5), 2495–2500 (2002).
[CrossRef]

Y. W. Zheng, B. S. Luk’yanchuk, Y. F. Lu, W. D. Song, and Z. H. Mai, “Dry laser cleaning of particles from solid substrates: experiments and theory,” J. Appl. Phys.90(5), 2135–2142 (2001).
[CrossRef]

Mai, Z. H.

Y. W. Zheng, B. S. Luk’yanchuk, Y. F. Lu, W. D. Song, and Z. H. Mai, “Dry laser cleaning of particles from solid substrates: experiments and theory,” J. Appl. Phys.90(5), 2135–2142 (2001).
[CrossRef]

McLeod, E.

E. McLeod and C. B. Arnold, “Subwavelength direct-write nanopatterning using optically trapped microspheres,” Nat. Nanotechnol.3(7), 413–417 (2008).
[CrossRef] [PubMed]

Moran, C. H.

M. Rycenga, P. H. C. Camargo, W. Y. Li, C. H. Moran, and Y. N. Xia, “Understanding the SERS effects of single silver nanoparticles and their dimers, one at a time,” J Phys Chem Lett1(4), 696–703 (2010).
[CrossRef] [PubMed]

Mosbacher, M.

H. J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, “Local field enhancement effects for nanostructuring of surfaces,” J. Microsc.202(1), 129–135 (2001).
[CrossRef] [PubMed]

Münzer, H. J.

H. J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, “Local field enhancement effects for nanostructuring of surfaces,” J. Microsc.202(1), 129–135 (2001).
[CrossRef] [PubMed]

Murugan, G. S.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Ng, V.

V. Ng, Y. Lee, B. Chen, and A. Adeyeye, “Nanostructure array fabrication with temperature-controlled self-assembly techniques,” Nanotechnology13(5), 554–558 (2002).
[CrossRef]

Phinney, L. M.

T. Beechem, S. Graham, S. P. Kearney, L. M. Phinney, and J. R. Serrano, “Invited article: simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy,” Rev. Sci. Instrum.78(6), 061301 (2007).
[CrossRef] [PubMed]

Prokhorov, O. A.

V. M. Shelekhina, O. A. Prokhorov, P. A. Vityaz, A. P. Stupak, S. V. Gaponenko, and N. V. Gaponenko, “Towards 3D photonic crystals,” Synth. Met.124(1), 137–139 (2001).
[CrossRef]

Reif, J.

S. Kouteva-Arguirova, T. Arguirov, D. Wolfframm, and J. Reif, “Influence of local heating on micro-Raman spectroscopy of silicon,” J. Appl. Phys.94(8), 4946–4949 (2003).
[CrossRef]

Richardson, D. J.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Rycenga, M.

M. Rycenga, P. H. C. Camargo, W. Y. Li, C. H. Moran, and Y. N. Xia, “Understanding the SERS effects of single silver nanoparticles and their dimers, one at a time,” J Phys Chem Lett1(4), 696–703 (2010).
[CrossRef] [PubMed]

Serrano, J. R.

T. Beechem, S. Graham, S. P. Kearney, L. M. Phinney, and J. R. Serrano, “Invited article: simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy,” Rev. Sci. Instrum.78(6), 061301 (2007).
[CrossRef] [PubMed]

Sessions, N. P.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Shelekhina, V. M.

V. M. Shelekhina, O. A. Prokhorov, P. A. Vityaz, A. P. Stupak, S. V. Gaponenko, and N. V. Gaponenko, “Towards 3D photonic crystals,” Synth. Met.124(1), 137–139 (2001).
[CrossRef]

Shi, J.

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, J. Shi, and J. C. Li, “Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles,” Nanotechnology15(3), 333–336 (2004).
[CrossRef]

Song, W. D.

S. M. Huang, M. H. Hong, B. S. Luk’yanchuk, Y. W. Zheng, W. D. Song, Y. F. Lu, and T. C. Chong, “Pulsed laser-assisted surface structuring with optical near-field enhanced effects,” J. Appl. Phys.92(5), 2495–2500 (2002).
[CrossRef]

Y. W. Zheng, B. S. Luk’yanchuk, Y. F. Lu, W. D. Song, and Z. H. Mai, “Dry laser cleaning of particles from solid substrates: experiments and theory,” J. Appl. Phys.90(5), 2135–2142 (2001).
[CrossRef]

Stupak, A. P.

V. M. Shelekhina, O. A. Prokhorov, P. A. Vityaz, A. P. Stupak, S. V. Gaponenko, and N. V. Gaponenko, “Towards 3D photonic crystals,” Synth. Met.124(1), 137–139 (2001).
[CrossRef]

Tang, X.

X. Tang, S. Xu, and X. Wang, “Nanoscale probing of thermal, stress, and optical fields under near-field laser heating,” PLoS ONE8(3), e58030 (2013).
[CrossRef] [PubMed]

X. Tang, Y. Yue, X. Chen, and X. Wang, “Sub-wavelength temperature probing in near-field laser heating by particles,” Opt. Express20(13), 14152–14167 (2012).
[CrossRef] [PubMed]

Vityaz, P. A.

V. M. Shelekhina, O. A. Prokhorov, P. A. Vityaz, A. P. Stupak, S. V. Gaponenko, and N. V. Gaponenko, “Towards 3D photonic crystals,” Synth. Met.124(1), 137–139 (2001).
[CrossRef]

Wang, X.

X. Tang, S. Xu, and X. Wang, “Nanoscale probing of thermal, stress, and optical fields under near-field laser heating,” PLoS ONE8(3), e58030 (2013).
[CrossRef] [PubMed]

X. Tang, Y. Yue, X. Chen, and X. Wang, “Sub-wavelength temperature probing in near-field laser heating by particles,” Opt. Express20(13), 14152–14167 (2012).
[CrossRef] [PubMed]

Y. Yue, X. Chen, and X. Wang, “Noncontact sub-10 nm temperature measurement in near-field laser heating,” ACS Nano5(6), 4466–4475 (2011).
[CrossRef] [PubMed]

Wilkinson, J. S.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Wolfframm, D.

S. Kouteva-Arguirova, T. Arguirov, D. Wolfframm, and J. Reif, “Influence of local heating on micro-Raman spectroscopy of silicon,” J. Appl. Phys.94(8), 4946–4949 (2003).
[CrossRef]

Xia, Y. N.

M. Rycenga, P. H. C. Camargo, W. Y. Li, C. H. Moran, and Y. N. Xia, “Understanding the SERS effects of single silver nanoparticles and their dimers, one at a time,” J Phys Chem Lett1(4), 696–703 (2010).
[CrossRef] [PubMed]

Xu, F.

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

Xu, S.

X. Tang, S. Xu, and X. Wang, “Nanoscale probing of thermal, stress, and optical fields under near-field laser heating,” PLoS ONE8(3), e58030 (2013).
[CrossRef] [PubMed]

Yue, Y.

X. Tang, Y. Yue, X. Chen, and X. Wang, “Sub-wavelength temperature probing in near-field laser heating by particles,” Opt. Express20(13), 14152–14167 (2012).
[CrossRef] [PubMed]

Y. Yue, X. Chen, and X. Wang, “Noncontact sub-10 nm temperature measurement in near-field laser heating,” ACS Nano5(6), 4466–4475 (2011).
[CrossRef] [PubMed]

Zheng, Y. W.

S. M. Huang, M. H. Hong, B. S. Luk’yanchuk, Y. W. Zheng, W. D. Song, Y. F. Lu, and T. C. Chong, “Pulsed laser-assisted surface structuring with optical near-field enhanced effects,” J. Appl. Phys.92(5), 2495–2500 (2002).
[CrossRef]

Y. W. Zheng, B. S. Luk’yanchuk, Y. F. Lu, W. D. Song, and Z. H. Mai, “Dry laser cleaning of particles from solid substrates: experiments and theory,” J. Appl. Phys.90(5), 2135–2142 (2001).
[CrossRef]

Zimmermann, J.

H. J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, “Local field enhancement effects for nanostructuring of surfaces,” J. Microsc.202(1), 129–135 (2001).
[CrossRef] [PubMed]

ACS Nano (1)

Y. Yue, X. Chen, and X. Wang, “Noncontact sub-10 nm temperature measurement in near-field laser heating,” ACS Nano5(6), 4466–4475 (2011).
[CrossRef] [PubMed]

Adv. Opt. Photonics (1)

G. Brambilla, F. Xu, P. Horak, Y. Jung, F. Koizumi, N. P. Sessions, E. Koukharenko, X. Feng, G. S. Murugan, J. S. Wilkinson, and D. J. Richardson, “Optical fiber nanowires and microwires: fabrication and applications,” Adv. Opt. Photonics1(1), 107–161 (2009).
[CrossRef]

J Phys Chem Lett (1)

M. Rycenga, P. H. C. Camargo, W. Y. Li, C. H. Moran, and Y. N. Xia, “Understanding the SERS effects of single silver nanoparticles and their dimers, one at a time,” J Phys Chem Lett1(4), 696–703 (2010).
[CrossRef] [PubMed]

J. Appl. Phys. (4)

S. M. Huang, M. H. Hong, B. S. Luk’yanchuk, Y. W. Zheng, W. D. Song, Y. F. Lu, and T. C. Chong, “Pulsed laser-assisted surface structuring with optical near-field enhanced effects,” J. Appl. Phys.92(5), 2495–2500 (2002).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, and X. Y. Chen, “Parametric investigation of laser nanoimprinting of hemispherical cavity arrays,” J. Appl. Phys.96(9), 5144–5151 (2004).
[CrossRef]

S. Kouteva-Arguirova, T. Arguirov, D. Wolfframm, and J. Reif, “Influence of local heating on micro-Raman spectroscopy of silicon,” J. Appl. Phys.94(8), 4946–4949 (2003).
[CrossRef]

Y. W. Zheng, B. S. Luk’yanchuk, Y. F. Lu, W. D. Song, and Z. H. Mai, “Dry laser cleaning of particles from solid substrates: experiments and theory,” J. Appl. Phys.90(5), 2135–2142 (2001).
[CrossRef]

J. Microsc. (1)

H. J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, “Local field enhancement effects for nanostructuring of surfaces,” J. Microsc.202(1), 129–135 (2001).
[CrossRef] [PubMed]

Nano Lett. (1)

S. Jeong, L. Hu, H. R. Lee, E. Garnett, J. W. Choi, and Y. Cui, “Fast and scalable printing of large area monolayer nanoparticles for nanotexturing applications,” Nano Lett.10(8), 2989–2994 (2010).
[CrossRef] [PubMed]

Nanotechnology (3)

L. P. Li, Y. F. Lu, D. W. Doerr, D. R. Alexander, J. Shi, and J. C. Li, “Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles,” Nanotechnology15(3), 333–336 (2004).
[CrossRef]

L. P. Li, Y. F. Lu, D. W. Doerr, and D. R. Alexander, “Laser-assisted nanopatterning of aluminium using particle-induced near-field optical enhancement and nanoimprinting,” Nanotechnology15(11), 1655–1660 (2004).
[CrossRef]

V. Ng, Y. Lee, B. Chen, and A. Adeyeye, “Nanostructure array fabrication with temperature-controlled self-assembly techniques,” Nanotechnology13(5), 554–558 (2002).
[CrossRef]

Nat. Nanotechnol. (1)

E. McLeod and C. B. Arnold, “Subwavelength direct-write nanopatterning using optically trapped microspheres,” Nat. Nanotechnol.3(7), 413–417 (2008).
[CrossRef] [PubMed]

Opt. Express (1)

Phys. Rev. B (1)

T. Hart, R. Aggarwal, and B. Lax, “Temperature dependence of Raman scattering in silicon,” Phys. Rev. B1(2), 638–642 (1970).
[CrossRef]

PLoS ONE (1)

X. Tang, S. Xu, and X. Wang, “Nanoscale probing of thermal, stress, and optical fields under near-field laser heating,” PLoS ONE8(3), e58030 (2013).
[CrossRef] [PubMed]

Rev. Sci. Instrum. (1)

T. Beechem, S. Graham, S. P. Kearney, L. M. Phinney, and J. R. Serrano, “Invited article: simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy,” Rev. Sci. Instrum.78(6), 061301 (2007).
[CrossRef] [PubMed]

Synth. Met. (1)

V. M. Shelekhina, O. A. Prokhorov, P. A. Vityaz, A. P. Stupak, S. V. Gaponenko, and N. V. Gaponenko, “Towards 3D photonic crystals,” Synth. Met.124(1), 137–139 (2001).
[CrossRef]

Other (1)

M. R. Abel, “Thermal metrology of polysilicon MEMS using Raman spectroscopy,” Master's Thesis (Georgia Institute of Technology, 2005).

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Figures (4)

Fig. 1
Fig. 1

Schematic of experimental setup for near-field thermal probing (not to scale). (a) A sample is located under an objective-focused laser beam from a Raman spectrometer. The movement of sample in the x direction is controlled by a piezo-actuated nano-stage. The focal level of the laser on the sample in the z direction is controlled by a motorized micro-stage. (b) The sample consists of a silicon substrate and a monolayer of silica particles. The spot size of the incident laser is about 0.5 μm in the x-y plane on a silicon substrate. (c) During the experiment, the position of the laser beam is fixed, and the sample moves along the x direction controlled by the nano-stage electrically without any touch of the sample and other equipment.

Fig. 2
Fig. 2

Raman mapping and thermal probing inside silicon under single-particle-focused laser irradiation. (a) The x direction variation of Raman intensity I, wavenumber ω, and linewidth Γ for silicon under particles of 1210 nm diameter with laser irradiation. (b) The position of a silica particle relative to the laser beam axis and Raman signal collecting axis to explain the observed Raman variation in space. (c) How Raman data of silicon under 1210 nm silica particle and that of pure silicon vary with energy percentage. (d) Temperature rise and thermal stress in silicon under different laser energies.

Fig. 3
Fig. 3

Raman mapping and thermal probing inside silicon under single-fiber-focused laser irradiation. (a) SEM images of microfiber and Raman spectra and Raman intensity variation in the imaging direction. (b) The x direction variation of Raman intensity I, wavenumber ω , and linewidth Γ for silicon under microfiber with laser irradiation. (c) How Raman data of silicon under glass fiber and that of pure silicon vary with energy percentage. (d) Temperature rise and thermal stress in silicon under different laser energies.

Fig. 4
Fig. 4

Optical, thermal, and stress modeling results. (a) Optical intensity distribution inside the silicon substrate. The amplitude indicates the optical intensity enhancement relative to the incident wave. (b) Temperature distribution inside the silicon substrate. The initial temperature in silicon is 300 K. (c) The thermal stress distribution induced by temperature rise inside the silicon substrate. The upper figures show the top of the substrate, and the lower figures show the vertical planes (side-view) in silicon under the particle center.

Tables (1)

Tables Icon

Table 1 Physical properties of silicon wafer used in modeling

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