Abstract

We demonstrate silicon Mach-Zehnder Interferometer (MZI) optical modulator with 50.1-Gb/s data rate and 5.56 dB dynamic extinction ratios. The phase shifter is composed by a 4 mm-long reverse-biased p-n junction with a modulation efficiency (Vπ·Lπ) of ~26.7 V·mm and phase shifter loss of ~1.04 dB/mm at Vbias = −6 V. The measured electro-optic bandwidth reaches 25.6 GHz at Vbias = −5 V. Compensation doping method and low loss traveling-wave electrodes are utilized to improve the modulator performance. Measurement result demonstrates that reasonable choosing of working point and doping profile of the silicon optical modulator is critical in order to match the performance requirement of the real application.

© 2013 OSA

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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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2012

2011

2010

M. Paniccia, “Integrating silicon photonics,” Nat. Photonics4(8), 498–499 (2010).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics4(8), 518–526 (2010).
[CrossRef]

J. Michel, JF. Liu and L. C. Kimerling, “High-performance Ge-on-Si photo detectors,” Nat. Photonics4, 527–534 (2010).

J. Michel, JF. Liu and L. C. Kimerling, “High-performance Ge-on-Si photo detectors,” Nat. Photonics4, 527–534 (2010).

2006

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

1992

W. R. Eisenstadt and Y. S. Eo, “S-Parameter-Based IC Interconnect transmission line characterization,” IEEE. Trans. Compon. Manufact. Technol.15(4), 483–490 (1992).
[CrossRef]

Ahn, D.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Alic, N.

D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Apsel, A. B.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Beals, M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Buhl, L. L.

Carothers, D.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Chen, L.

Chen, Y. K.

Chen, Y.-K.

P. Dong, L. Chen, and Y.-K. Chen, “High-speed low-voltage single-drive push-pull silicon Mach-Zehnder modulators,” Opt. Express20(6), 6163–6169 (2012).
[CrossRef] [PubMed]

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Chu, T.

X. Xiao, X. Y. Li, H. Xu, Y. T. Hu, K. Xiong, Z. Y. Li, T. Chu, J. Z. Yu, and Y. D. Yu, “44Gbit/s silicon micro-ring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012).
[CrossRef]

Conway, T.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Doerr, C. R.

Dong, P.

Duan, N.

T. Y. Liow, J. F. Song, X. G. Tu, E. J. Lim, Q. Fang, N. Duan, M. B. Yu, and G. Q. Lo, “Silicon optical interconnect device technologies for 40Gb/s and beyond,” IEEE J. Sel. Top. Quantum. Electron.PP(1)

Eisenstadt, W. R.

W. R. Eisenstadt and Y. S. Eo, “S-Parameter-Based IC Interconnect transmission line characterization,” IEEE. Trans. Compon. Manufact. Technol.15(4), 483–490 (1992).
[CrossRef]

Eo, Y. S.

W. R. Eisenstadt and Y. S. Eo, “S-Parameter-Based IC Interconnect transmission line characterization,” IEEE. Trans. Compon. Manufact. Technol.15(4), 483–490 (1992).
[CrossRef]

Fang, Q.

T. Y. Liow, J. F. Song, X. G. Tu, E. J. Lim, Q. Fang, N. Duan, M. B. Yu, and G. Q. Lo, “Silicon optical interconnect device technologies for 40Gb/s and beyond,” IEEE J. Sel. Top. Quantum. Electron.PP(1)

Fedeli, J. M.

D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Gardes, F. Y.

D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics4(8), 518–526 (2010).
[CrossRef]

Gill, D. M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Goi, K.

Grove, M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Hong, C.-Y.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Hu, Y. F.

D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Hu, Y. T.

X. Xiao, X. Y. Li, H. Xu, Y. T. Hu, K. Xiong, Z. Y. Li, T. Chu, J. Z. Yu, and Y. D. Yu, “44Gbit/s silicon micro-ring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012).
[CrossRef]

Kimerling, L. C.

J. Michel, JF. Liu and L. C. Kimerling, “High-performance Ge-on-Si photo detectors,” Nat. Photonics4, 527–534 (2010).

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Kuo, B. P. P.

D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Kusaka, H.

Kwong, D. L.

Li, X. Y.

X. Xiao, X. Y. Li, H. Xu, Y. T. Hu, K. Xiong, Z. Y. Li, T. Chu, J. Z. Yu, and Y. D. Yu, “44Gbit/s silicon micro-ring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012).
[CrossRef]

Li, Z. Y.

X. Xiao, X. Y. Li, H. Xu, Y. T. Hu, K. Xiong, Z. Y. Li, T. Chu, J. Z. Yu, and Y. D. Yu, “44Gbit/s silicon micro-ring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012).
[CrossRef]

Lim, E. J.

T. Y. Liow, J. F. Song, X. G. Tu, E. J. Lim, Q. Fang, N. Duan, M. B. Yu, and G. Q. Lo, “Silicon optical interconnect device technologies for 40Gb/s and beyond,” IEEE J. Sel. Top. Quantum. Electron.PP(1)

Liow, T. Y.

Lipson, M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Liu, F.

J. Michel, JF. Liu and L. C. Kimerling, “High-performance Ge-on-Si photo detectors,” Nat. Photonics4, 527–534 (2010).

Liu, J.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Lo, G. Q.

Mashanovich, G.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics4(8), 518–526 (2010).
[CrossRef]

Mashanovich, G. Z.

D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Michel, J.

J. Michel, JF. Liu and L. C. Kimerling, “High-performance Ge-on-Si photo detectors,” Nat. Photonics4, 527–534 (2010).

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Myslivets, E.

D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Oda, K.

Ogawa, K.

Pan, D.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Paniccia, M.

M. Paniccia, “Integrating silicon photonics,” Nat. Photonics4(8), 498–499 (2010).
[CrossRef]

Patel, S. S.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Pomerene, A. T.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Radic, S.

D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

Rasras, M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Reed, G. T.

D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics4(8), 518–526 (2010).
[CrossRef]

Song, J. F.

X. G. Tu, T. Y. Liow, J. F. Song, M. B. Yu, and G. Q. Lo, “Fabrication of low loss and high speed silicon optical modulator using doping compensation method,” Opt. Express19(19), 18029–18035 (2011).
[CrossRef] [PubMed]

T. Y. Liow, J. F. Song, X. G. Tu, E. J. Lim, Q. Fang, N. Duan, M. B. Yu, and G. Q. Lo, “Silicon optical interconnect device technologies for 40Gb/s and beyond,” IEEE J. Sel. Top. Quantum. Electron.PP(1)

Sparacin, D. K. I.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Terada, Y.

Thomson, D. J.

D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics4(8), 518–526 (2010).
[CrossRef]

Tu, K.-Y.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Tu, X. G.

White, A. E.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Wong, C. W.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006).
[CrossRef]

Xiao, X.

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X. Xiao, X. Y. Li, H. Xu, Y. T. Hu, K. Xiong, Z. Y. Li, T. Chu, J. Z. Yu, and Y. D. Yu, “44Gbit/s silicon micro-ring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012).
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Figures (5)

Fig. 1
Fig. 1

Schematic diagrams of the MZI silicon optical modulator.

Fig. 2
Fig. 2

Output spectra of 4 mm-long phase shifter (a), phase shift of 4 mm long phase shifter (b), loss and efficiency VπLπ of the phase shifter under different applied voltage (c) and performance of phase shifter under different doping profile by fixing Vbias = −6.0 V and Vpp = 3.0 V (d).

Fig. 3
Fig. 3

Transmission coefficient S21EE amplitude (a), phase of the microwave (b), group refractive index of the microwave (c), Reflection coefficient S11EE amplitude (d), real part of impedance (e), image part of impedance (f), absorption loss (g) of microwave in the 4 mm long traveling wave electrodes under different applied voltage and normalized loss (h) under Vbias = −5 V.

Fig. 4
Fig. 4

The AC measurement system of the silicon MZI optical modulator.

Fig. 5
Fig. 5

The electro-optic bandwidth of silicon modulator with doping profile under VπLπ = 26.7 V·mm (a), eye diagram of the silicon modulator with the doping profile under VπLπ = 26.7 V·mm (b) and eye diagram of the modulator with doping profile under VπLπ = 22.0 V·mm (c).

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

[S]= 1 D S [ ( Z 2 Z 0 2 )sinhγL 2Z Z 0 2Z Z 0 ( Z 2 Z 0 2 )sinhγL ]
D S =2Z Z 0 coshγL+( Z 2 + Z 0 2 )sinhγL
Z 2 = Z 0 2 (1+ S 11 ) 2 S 21 2 (1 S 11 ) 2 S 21 2
e γL = e (α+jβ)L = 1 S 11 2 + S 21 2 2 S 21 ± [ (1+ S 11 2 S 21 2 ) 2 4 S 11 2 ] 1/2 2 S 21

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