Abstract

Ultrafast pump-probe microscopy is a common method for time and space resolved imaging of short and ultra-short pulse laser ablation. The temporal delay between the ablating pump pulse and the illuminating probe pulse is tuned either by an optical delay, resulting in several hundred femtoseconds temporal resolution for delay times up to a few ns, or by an electronic delay, resulting in several nanoseconds resolution for longer delay times. In this work we combine both delay types for temporally high resolved observations of complete ablation processes ranging from femtoseconds to microseconds, while ablation is initiated by an ultrafast 660 fs laser pump pulse. For this purpose, we also demonstrate the calibration of the delay time zero point, the synchronization of both probe sources, as well as a method for image quality enhancing. In addition, we present for the first time to our knowledge pump-probe microscopy investigations of the complete substrate side selective ablation process of molybdenum films on glass. The initiation of mechanical film deformation is observed at about 400 ps, continues until approximately 15 ns, whereupon a Mo disk is sheared off free from thermal effects due to a directly induced laser lift-off ablation process.

© 2012 OSA

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  1. J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
    [CrossRef]
  2. J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
    [CrossRef]
  3. S. Zoppel, H. Huber, and G. Reider, “Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells,” Appl. Phys, A-Mater. 89, 161–163 (2007).
  4. A. Compaan, I. Matulionis, and S. Nakade, “Laser scribing of polycrystalline thin films,” Opt. Lasers Eng. 34(1), 15–45 (2000).
    [CrossRef]
  5. G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater. 102, 173–178 (2011).
  6. B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys, A-Mater. 63, 109–115 (1997).
  7. C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
    [CrossRef]
  8. S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
    [CrossRef]
  9. G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).
  10. A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).
  11. G. Heise, J. Konrad, S. Sarrach, J. Sotrop, and H. Huber, “Directly induced ablation of metal thin films by ultrashort laser pulses,” Proc. SPIE 7925, 792511, 792511-8 (2011).
    [CrossRef]
  12. M. Downer, R. Fork, and C. Shank, “Femtosecond imaging of melting and evaporation at a photoexcited silicon surface,” J. Opt. Soc. Am. B 2(4), 595–599 (1985).
    [CrossRef]
  13. D. von der Linde and K. Sokolowski-Tinten, “Physical mechanisms of short-pulse laser ablation,” Appl. Surf. Sci. 154–155, 1–10 (2000).
    [CrossRef]
  14. J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, “Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide,” J. Appl. Phys. 103(5), 054910 (2008).
    [CrossRef]
  15. I. Mingareev and A. Horn, “Melt dynamics of aluminum irradiated with ultrafast laser radiation at large intensities,” J. Appl. Phys. 106(1), 013513 (2009).
    [CrossRef]
  16. D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
    [CrossRef]
  17. J. McDonald, J. Nees, and S. Yalisove, “Pump-probe imaging of femtosecond pulsed laser ablation of silicon with thermally grown oxide films,” J. Appl. Phys. 102(6), 063109 (2007).
    [CrossRef]
  18. D. Dlott, “Ultra-low threshold laser ablation investigated by time-resolved microscopy,” Appl. Surf. Sci. 197–198, 3–10 (2002).
    [CrossRef]
  19. D. Young, R. Auyeung, A. Pique, D. Chrisey, and D. Dlott, “Time-resolved optical microscopy of a laser-based forward transfer process,” Appl. Phys. Lett. 78(21), 3169 (2001).
    [CrossRef]
  20. C. Unger, M. Gruene, L. Koch, J. Koch, and B. Chichkov, “Time-resolved imaging of hydrogel printing via laser-induced forward transfer,” Appl. Phys, A-Mater. 103, 271–277 (2011).
  21. I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci. 208–209, 177–180 (2003).
    [CrossRef]
  22. I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci. 247(1-4), 584–589 (2005).
    [CrossRef]
  23. B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, and S. Anisimov, “Timescales in the response of materials to femtosecond laser excitation,” Appl. Phys, A-Mater. 79, 767–769 (2004).
  24. M. Domke, G. Heise, I. Richter, S. Sarrach, and H. Huber, “Pump-probe investigations on the laser ablation of CIS thin film solar cells,” Physics Procedia 12, 396–406 (2011).
    [CrossRef]

2011 (5)

G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater. 102, 173–178 (2011).

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

G. Heise, J. Konrad, S. Sarrach, J. Sotrop, and H. Huber, “Directly induced ablation of metal thin films by ultrashort laser pulses,” Proc. SPIE 7925, 792511, 792511-8 (2011).
[CrossRef]

C. Unger, M. Gruene, L. Koch, J. Koch, and B. Chichkov, “Time-resolved imaging of hydrogel printing via laser-induced forward transfer,” Appl. Phys, A-Mater. 103, 271–277 (2011).

M. Domke, G. Heise, I. Richter, S. Sarrach, and H. Huber, “Pump-probe investigations on the laser ablation of CIS thin film solar cells,” Physics Procedia 12, 396–406 (2011).
[CrossRef]

2009 (1)

I. Mingareev and A. Horn, “Melt dynamics of aluminum irradiated with ultrafast laser radiation at large intensities,” J. Appl. Phys. 106(1), 013513 (2009).
[CrossRef]

2008 (1)

J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, “Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide,” J. Appl. Phys. 103(5), 054910 (2008).
[CrossRef]

2007 (2)

J. McDonald, J. Nees, and S. Yalisove, “Pump-probe imaging of femtosecond pulsed laser ablation of silicon with thermally grown oxide films,” J. Appl. Phys. 102(6), 063109 (2007).
[CrossRef]

S. Zoppel, H. Huber, and G. Reider, “Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells,” Appl. Phys, A-Mater. 89, 161–163 (2007).

2006 (2)

J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
[CrossRef]

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

2005 (1)

I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci. 247(1-4), 584–589 (2005).
[CrossRef]

2004 (1)

B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, and S. Anisimov, “Timescales in the response of materials to femtosecond laser excitation,” Appl. Phys, A-Mater. 79, 767–769 (2004).

2003 (1)

I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci. 208–209, 177–180 (2003).
[CrossRef]

2002 (1)

D. Dlott, “Ultra-low threshold laser ablation investigated by time-resolved microscopy,” Appl. Surf. Sci. 197–198, 3–10 (2002).
[CrossRef]

2001 (1)

D. Young, R. Auyeung, A. Pique, D. Chrisey, and D. Dlott, “Time-resolved optical microscopy of a laser-based forward transfer process,” Appl. Phys. Lett. 78(21), 3169 (2001).
[CrossRef]

2000 (2)

D. von der Linde and K. Sokolowski-Tinten, “Physical mechanisms of short-pulse laser ablation,” Appl. Surf. Sci. 154–155, 1–10 (2000).
[CrossRef]

A. Compaan, I. Matulionis, and S. Nakade, “Laser scribing of polycrystalline thin films,” Opt. Lasers Eng. 34(1), 15–45 (2000).
[CrossRef]

1999 (1)

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

1997 (3)

B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys, A-Mater. 63, 109–115 (1997).

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
[CrossRef]

D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
[CrossRef]

1996 (1)

C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

1985 (1)

Alloncle, P.

J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
[CrossRef]

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

Anisimov, S.

B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, and S. Anisimov, “Timescales in the response of materials to femtosecond laser excitation,” Appl. Phys, A-Mater. 79, 767–769 (2004).

Auyeung, R.

D. Young, R. Auyeung, A. Pique, D. Chrisey, and D. Dlott, “Time-resolved optical microscopy of a laser-based forward transfer process,” Appl. Phys. Lett. 78(21), 3169 (2001).
[CrossRef]

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Axente, E.

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
[CrossRef]

Bachelier, G.

J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, “Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide,” J. Appl. Phys. 103(5), 054910 (2008).
[CrossRef]

Benfarah, M.

J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
[CrossRef]

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

Bialkowski, J.

D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
[CrossRef]

Bonse, J.

J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, “Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide,” J. Appl. Phys. 103(5), 054910 (2008).
[CrossRef]

Bruneau, S.

J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
[CrossRef]

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

Chichkov, B.

C. Unger, M. Gruene, L. Koch, J. Koch, and B. Chichkov, “Time-resolved imaging of hydrogel printing via laser-induced forward transfer,” Appl. Phys, A-Mater. 103, 271–277 (2011).

B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys, A-Mater. 63, 109–115 (1997).

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
[CrossRef]

C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Chrisey, D.

D. Young, R. Auyeung, A. Pique, D. Chrisey, and D. Dlott, “Time-resolved optical microscopy of a laser-based forward transfer process,” Appl. Phys. Lett. 78(21), 3169 (2001).
[CrossRef]

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Compaan, A.

A. Compaan, I. Matulionis, and S. Nakade, “Laser scribing of polycrystalline thin films,” Opt. Lasers Eng. 34(1), 15–45 (2000).
[CrossRef]

Coustillier, G.

J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
[CrossRef]

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

Dickmann, M.

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

Dlott, D.

D. Dlott, “Ultra-low threshold laser ablation investigated by time-resolved microscopy,” Appl. Surf. Sci. 197–198, 3–10 (2002).
[CrossRef]

D. Young, R. Auyeung, A. Pique, D. Chrisey, and D. Dlott, “Time-resolved optical microscopy of a laser-based forward transfer process,” Appl. Phys. Lett. 78(21), 3169 (2001).
[CrossRef]

Domke, M.

M. Domke, G. Heise, I. Richter, S. Sarrach, and H. Huber, “Pump-probe investigations on the laser ablation of CIS thin film solar cells,” Physics Procedia 12, 396–406 (2011).
[CrossRef]

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

Downer, M.

Duignan, M.

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Englmaier, M.

G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater. 102, 173–178 (2011).

Fitz-Gerald, J.

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Fork, R.

Fotakis, C.

I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci. 247(1-4), 584–589 (2005).
[CrossRef]

I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci. 208–209, 177–180 (2003).
[CrossRef]

Gamaly, E.

I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci. 208–209, 177–180 (2003).
[CrossRef]

Gruene, M.

C. Unger, M. Gruene, L. Koch, J. Koch, and B. Chichkov, “Time-resolved imaging of hydrogel printing via laser-induced forward transfer,” Appl. Phys, A-Mater. 103, 271–277 (2011).

Guillemoles, J.-F.

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
[CrossRef]

Heise, G.

G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater. 102, 173–178 (2011).

G. Heise, J. Konrad, S. Sarrach, J. Sotrop, and H. Huber, “Directly induced ablation of metal thin films by ultrashort laser pulses,” Proc. SPIE 7925, 792511, 792511-8 (2011).
[CrossRef]

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

M. Domke, G. Heise, I. Richter, S. Sarrach, and H. Huber, “Pump-probe investigations on the laser ablation of CIS thin film solar cells,” Physics Procedia 12, 396–406 (2011).
[CrossRef]

Heiss, A.

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

Hellwig, C.

G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater. 102, 173–178 (2011).

Hermann, J.

J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
[CrossRef]

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

Horn, A.

I. Mingareev and A. Horn, “Melt dynamics of aluminum irradiated with ultrafast laser radiation at large intensities,” J. Appl. Phys. 106(1), 013513 (2009).
[CrossRef]

Huber, H.

G. Heise, J. Konrad, S. Sarrach, J. Sotrop, and H. Huber, “Directly induced ablation of metal thin films by ultrashort laser pulses,” Proc. SPIE 7925, 792511, 792511-8 (2011).
[CrossRef]

M. Domke, G. Heise, I. Richter, S. Sarrach, and H. Huber, “Pump-probe investigations on the laser ablation of CIS thin film solar cells,” Physics Procedia 12, 396–406 (2011).
[CrossRef]

G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater. 102, 173–178 (2011).

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

S. Zoppel, H. Huber, and G. Reider, “Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells,” Appl. Phys, A-Mater. 89, 161–163 (2007).

Itina, T.

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
[CrossRef]

Jacobs, H.

Kafetzopoulos, D.

I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci. 247(1-4), 584–589 (2005).
[CrossRef]

Kapsetaki, M.

I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci. 247(1-4), 584–589 (2005).
[CrossRef]

Karaiskou, A.

I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci. 247(1-4), 584–589 (2005).
[CrossRef]

I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci. 208–209, 177–180 (2003).
[CrossRef]

Koch, J.

C. Unger, M. Gruene, L. Koch, J. Koch, and B. Chichkov, “Time-resolved imaging of hydrogel printing via laser-induced forward transfer,” Appl. Phys, A-Mater. 103, 271–277 (2011).

Koch, L.

C. Unger, M. Gruene, L. Koch, J. Koch, and B. Chichkov, “Time-resolved imaging of hydrogel printing via laser-induced forward transfer,” Appl. Phys, A-Mater. 103, 271–277 (2011).

Konrad, J.

G. Heise, J. Konrad, S. Sarrach, J. Sotrop, and H. Huber, “Directly induced ablation of metal thin films by ultrashort laser pulses,” Proc. SPIE 7925, 792511, 792511-8 (2011).
[CrossRef]

Kuznicki, T.

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater. 102, 173–178 (2011).

Lakeou, S.

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Matulionis, I.

A. Compaan, I. Matulionis, and S. Nakade, “Laser scribing of polycrystalline thin films,” Opt. Lasers Eng. 34(1), 15–45 (2000).
[CrossRef]

McDonald, J.

J. McDonald, J. Nees, and S. Yalisove, “Pump-probe imaging of femtosecond pulsed laser ablation of silicon with thermally grown oxide films,” J. Appl. Phys. 102(6), 063109 (2007).
[CrossRef]

McGill, R.

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Mingareev, I.

I. Mingareev and A. Horn, “Melt dynamics of aluminum irradiated with ultrafast laser radiation at large intensities,” J. Appl. Phys. 106(1), 013513 (2009).
[CrossRef]

Momma, C.

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
[CrossRef]

B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys, A-Mater. 63, 109–115 (1997).

C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Nakade, S.

A. Compaan, I. Matulionis, and S. Nakade, “Laser scribing of polycrystalline thin films,” Opt. Lasers Eng. 34(1), 15–45 (2000).
[CrossRef]

Nees, J.

J. McDonald, J. Nees, and S. Yalisove, “Pump-probe imaging of femtosecond pulsed laser ablation of silicon with thermally grown oxide films,” J. Appl. Phys. 102(6), 063109 (2007).
[CrossRef]

Nguyen, V.

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Nolte, S.

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
[CrossRef]

B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys, A-Mater. 63, 109–115 (1997).

C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Palm, J.

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

Papazoglou, D. G.

I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci. 247(1-4), 584–589 (2005).
[CrossRef]

I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci. 208–209, 177–180 (2003).
[CrossRef]

Pique, A.

D. Young, R. Auyeung, A. Pique, D. Chrisey, and D. Dlott, “Time-resolved optical microscopy of a laser-based forward transfer process,” Appl. Phys. Lett. 78(21), 3169 (2001).
[CrossRef]

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Reider, G.

S. Zoppel, H. Huber, and G. Reider, “Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells,” Appl. Phys, A-Mater. 89, 161–163 (2007).

Rethfeld, B.

B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, and S. Anisimov, “Timescales in the response of materials to femtosecond laser excitation,” Appl. Phys, A-Mater. 79, 767–769 (2004).

Richter, I.

M. Domke, G. Heise, I. Richter, S. Sarrach, and H. Huber, “Pump-probe investigations on the laser ablation of CIS thin film solar cells,” Physics Procedia 12, 396–406 (2011).
[CrossRef]

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

Rode, A.

I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci. 208–209, 177–180 (2003).
[CrossRef]

Sarrach, S.

M. Domke, G. Heise, I. Richter, S. Sarrach, and H. Huber, “Pump-probe investigations on the laser ablation of CIS thin film solar cells,” Physics Procedia 12, 396–406 (2011).
[CrossRef]

G. Heise, J. Konrad, S. Sarrach, J. Sotrop, and H. Huber, “Directly induced ablation of metal thin films by ultrashort laser pulses,” Proc. SPIE 7925, 792511, 792511-8 (2011).
[CrossRef]

G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater. 102, 173–178 (2011).

Sentis, M.

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

Shank, C.

Siegel, J.

J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, “Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide,” J. Appl. Phys. 103(5), 054910 (2008).
[CrossRef]

Sokolowski-Tinten, K.

B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, and S. Anisimov, “Timescales in the response of materials to femtosecond laser excitation,” Appl. Phys, A-Mater. 79, 767–769 (2004).

D. von der Linde and K. Sokolowski-Tinten, “Physical mechanisms of short-pulse laser ablation,” Appl. Surf. Sci. 154–155, 1–10 (2000).
[CrossRef]

D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
[CrossRef]

Solis, J.

J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, “Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide,” J. Appl. Phys. 103(5), 054910 (2008).
[CrossRef]

Sotrop, J.

G. Heise, J. Konrad, S. Sarrach, J. Sotrop, and H. Huber, “Directly induced ablation of metal thin films by ultrashort laser pulses,” Proc. SPIE 7925, 792511, 792511-8 (2011).
[CrossRef]

Sturm, H.

J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, “Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide,” J. Appl. Phys. 103(5), 054910 (2008).
[CrossRef]

Tünnermann, A.

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
[CrossRef]

B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys, A-Mater. 63, 109–115 (1997).

C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Unger, C.

C. Unger, M. Gruene, L. Koch, J. Koch, and B. Chichkov, “Time-resolved imaging of hydrogel printing via laser-induced forward transfer,” Appl. Phys, A-Mater. 103, 271–277 (2011).

Vogt, H.

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

Von Alvensleben, F.

B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys, A-Mater. 63, 109–115 (1997).

C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Von Der Linde, D.

B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, and S. Anisimov, “Timescales in the response of materials to femtosecond laser excitation,” Appl. Phys, A-Mater. 79, 767–769 (2004).

D. von der Linde and K. Sokolowski-Tinten, “Physical mechanisms of short-pulse laser ablation,” Appl. Surf. Sci. 154–155, 1–10 (2000).
[CrossRef]

D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
[CrossRef]

Wellegehausen, B.

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
[CrossRef]

C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Welling, H.

S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B 14(10), 2716–2722 (1997).
[CrossRef]

C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Wu, H.

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Wu, P.

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Yalisove, S.

J. McDonald, J. Nees, and S. Yalisove, “Pump-probe imaging of femtosecond pulsed laser ablation of silicon with thermally grown oxide films,” J. Appl. Phys. 102(6), 063109 (2007).
[CrossRef]

Young, D.

D. Young, R. Auyeung, A. Pique, D. Chrisey, and D. Dlott, “Time-resolved optical microscopy of a laser-based forward transfer process,” Appl. Phys. Lett. 78(21), 3169 (2001).
[CrossRef]

Zergioti, I.

I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci. 247(1-4), 584–589 (2005).
[CrossRef]

I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci. 208–209, 177–180 (2003).
[CrossRef]

Zoppel, S.

S. Zoppel, H. Huber, and G. Reider, “Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells,” Appl. Phys, A-Mater. 89, 161–163 (2007).

Appl. Phys, A-Mater. (7)

S. Zoppel, H. Huber, and G. Reider, “Selective ablation of thin Mo and TCO films with femtosecond laser pulses for structuring thin film solar cells,” Appl. Phys, A-Mater. 89, 161–163 (2007).

G. Heise, M. Englmaier, C. Hellwig, T. Kuznicki, S. Sarrach, and H. Huber, “Laser ablation of thin molybdenum films on transparent substrates at low fluences,” Appl. Phys, A-Mater. 102, 173–178 (2011).

B. Chichkov, C. Momma, S. Nolte, F. Von Alvensleben, and A. Tünnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys, A-Mater. 63, 109–115 (1997).

C. Unger, M. Gruene, L. Koch, J. Koch, and B. Chichkov, “Time-resolved imaging of hydrogel printing via laser-induced forward transfer,” Appl. Phys, A-Mater. 103, 271–277 (2011).

B. Rethfeld, K. Sokolowski-Tinten, D. Von Der Linde, and S. Anisimov, “Timescales in the response of materials to femtosecond laser excitation,” Appl. Phys, A-Mater. 79, 767–769 (2004).

G. Heise, M. Dickmann, M. Domke, A. Heiss, T. Kuznicki, J. Palm, I. Richter, H. Vogt, and H. Huber, “Investigation of the ablation of zinc oxide thin films on copper-indium-selenide layers by ps laser pulses,” Appl. Phys, A-Mater. 104, 387–393 (2011).

A. Pique, D. Chrisey, R. Auyeung, J. Fitz-Gerald, H. Wu, R. McGill, S. Lakeou, P. Wu, V. Nguyen, and M. Duignan, “A novel laser transfer process for direct writing of electronic and sensor materials,” Appl. Phys, A-Mater. 69, 279–284 (1999).

Appl. Phys. Lett. (1)

D. Young, R. Auyeung, A. Pique, D. Chrisey, and D. Dlott, “Time-resolved optical microscopy of a laser-based forward transfer process,” Appl. Phys. Lett. 78(21), 3169 (2001).
[CrossRef]

Appl. Surf. Sci. (6)

D. Dlott, “Ultra-low threshold laser ablation investigated by time-resolved microscopy,” Appl. Surf. Sci. 197–198, 3–10 (2002).
[CrossRef]

D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
[CrossRef]

I. Zergioti, D. G. Papazoglou, A. Karaiskou, C. Fotakis, E. Gamaly, and A. Rode, “A comparative schlieren imaging study between ns and sub-ps laser forward transfer of Cr,” Appl. Surf. Sci. 208–209, 177–180 (2003).
[CrossRef]

I. Zergioti, A. Karaiskou, D. G. Papazoglou, C. Fotakis, M. Kapsetaki, and D. Kafetzopoulos, “Time resolved schlieren study of sub-picosecond and nanosecond laser transfer of biomaterials,” Appl. Surf. Sci. 247(1-4), 584–589 (2005).
[CrossRef]

D. von der Linde and K. Sokolowski-Tinten, “Physical mechanisms of short-pulse laser ablation,” Appl. Surf. Sci. 154–155, 1–10 (2000).
[CrossRef]

J. Hermann, M. Benfarah, G. Coustillier, S. Bruneau, E. Axente, J.-F. Guillemoles, M. Sentis, P. Alloncle, and T. Itina, “Selective ablation of thin films with short and ultrashort laser pulses,” Appl. Surf. Sci. 252(13), 4814–4818 (2006).
[CrossRef]

J. Appl. Phys. (3)

J. Bonse, G. Bachelier, J. Siegel, J. Solis, and H. Sturm, “Time- and space-resolved dynamics of ablation and optical breakdown induced by femtosecond laser pulses in indium phosphide,” J. Appl. Phys. 103(5), 054910 (2008).
[CrossRef]

I. Mingareev and A. Horn, “Melt dynamics of aluminum irradiated with ultrafast laser radiation at large intensities,” J. Appl. Phys. 106(1), 013513 (2009).
[CrossRef]

J. McDonald, J. Nees, and S. Yalisove, “Pump-probe imaging of femtosecond pulsed laser ablation of silicon with thermally grown oxide films,” J. Appl. Phys. 102(6), 063109 (2007).
[CrossRef]

J. Opt. Soc. Am. B (2)

J. Phys. D Appl. Phys. (1)

J. Hermann, M. Benfarah, S. Bruneau, E. Axente, G. Coustillier, T. Itina, J.-F. Guillemoles, and P. Alloncle, “Comparative investigation of solar cell thin film processing using nanosecond and femtosecond lasers,” J. Phys. D Appl. Phys. 39(3), 453–460 (2006).
[CrossRef]

Opt. Commun. (1)

C. Momma, B. Chichkov, S. Nolte, F. Von Alvensleben, A. Tünnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Opt. Commun. 129(1-2), 134–142 (1996).
[CrossRef]

Opt. Lasers Eng. (1)

A. Compaan, I. Matulionis, and S. Nakade, “Laser scribing of polycrystalline thin films,” Opt. Lasers Eng. 34(1), 15–45 (2000).
[CrossRef]

Physics Procedia (1)

M. Domke, G. Heise, I. Richter, S. Sarrach, and H. Huber, “Pump-probe investigations on the laser ablation of CIS thin film solar cells,” Physics Procedia 12, 396–406 (2011).
[CrossRef]

Proc. SPIE (1)

G. Heise, J. Konrad, S. Sarrach, J. Sotrop, and H. Huber, “Directly induced ablation of metal thin films by ultrashort laser pulses,” Proc. SPIE 7925, 792511, 792511-8 (2011).
[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Pump-probe microscopy setup. A femtosecond laser pulse is split by beam splitter 1 into pump- and probe pulse. The pump pulse (red branch) is focused on the sample. The probe pulse (green branch) is frequency doubled by a LBO crystal, and passes an optical delay line for time delays up to 4 ns. A picosecond laser emits a second probe pulse, which is triggered by a digital delay generator for time delays above 4 ns. Both probe beams are combined in beam splitter 3, and illuminate the sample, imaged by a microscope with CCD camera.

Fig. 2
Fig. 2

A streak related to the pump pulse propagation in the glass can be traced from the bottom of the image to the ablation centre at fluences above 1 J/cm2. The delay time zero point is defined when the streak reaches the ablation centre.

Fig. 3
Fig. 3

Comparison of pump-probe images using the optical delay line with a pulse duration of about 510 fs (upper row) and the electronic delay with a pulse duration of 600 ps (lower row), each at delay time of 1 ns, 2 ns, and 3 ns (columns). The delay time of the ps-probe pulse is calibrated in respect to the optical delay time by means of matching images.

Fig. 4
Fig. 4

Pump-probe microscopy images of Mo film on glass observed and irradiated from the glass substrate side. The two upper and two lower rows show the temporal evolution of a bulging and Mo lift-off process in reading direction for fluences of 0.5 J/cm2 and 0.7 J/cm2, respectively. The black dotted horizontal lines indicate the boarders of the blister and the ablated hole and also separate Newton’s rings from diffraction rings.

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