Abstract

On the silicon (Si) photonic platform, we monolithically integrated a silica-based arrayed-waveguide grating (AWG) and germanium (Ge) photodiodes (PDs) using low-temperature fabrication technology. We confirmed demultiplexing by the AWG, optical-electrical signal conversion by Ge PDs, and high-speed signal detection at all channels. In addition, we mounted a multichannel transimpedance amplifier/limiting amplifier (TIA/LA) circuit on the fabricated AWG-PD device using flip-chip bonding technology. The results show the promising potential of our Si photonic platform as a photonics-electronics convergence.

© 2012 OSA

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2011 (6)

A. Bogoni, “Photonics for solving unbundling in next-generation WDM-PON,” IEEE J. Sel. Top. Quantum Electron. 17, 472–479 (2011).
[CrossRef]

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett. 23, 1201–1203 (2011).
[CrossRef]

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron. 17, 516–525 (2011).
[CrossRef]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. Moghadam, E. Alon, K. Raj, R. Ho, J. Cunningham, and A. Krishnamoorthy, “Ultra-efficient 10Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express 19, 5172–5186 (2011).
[CrossRef] [PubMed]

2010 (4)

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express 3, 102203 (2010).
[CrossRef]

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express 18, 8412–8421 (2010).
[CrossRef] [PubMed]

Q. Fang, T. Y. Liow, J. F. Song, K. W. Ang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “WDM multi-channel silicon photonic receiver with 320 Gbps data transmission capability,” Opt. Express 18, 5106–5113 (2010).
[CrossRef] [PubMed]

J. Kani, “Enabling technologies for future scalable and flexible WDM-PON and WDM/TDM-PON system,” IEEE J. Sel. Top. Quantum Electron. 16, 1290–1297 (2010).
[CrossRef]

2009 (1)

2006 (2)

2005 (1)

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett. 87, 011110 (2005).
[CrossRef]

2001 (1)

2000 (2)

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett. 12, 1180–1182 (2000).
[CrossRef]

T. Miya, “Silica-based planar lightwave circuits: passive and thermally active devices,” IEEE J. Sel. Top. Quantum Electron. 6, 38–45 (2000).
[CrossRef]

1998 (1)

M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett. 10, 1614–1616 (1998).
[CrossRef]

1996 (2)

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett. 8, 563–565 (1996).
[CrossRef]

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol. 14, 2475–2482 (1996).
[CrossRef]

Agashe, S.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

Akahori, Y.

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett. 8, 563–565 (1996).
[CrossRef]

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol. 14, 2475–2482 (1996).
[CrossRef]

Akutsu, Y.

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett. 8, 563–565 (1996).
[CrossRef]

Alon, E.

Amberg, P.

Ang, K. W.

Aroca, R.

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

Asghari, M.

Bäck, J.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Baek, Y.

Baeyens, Y.

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

Bogoni, A.

A. Bogoni, “Photonics for solving unbundling in next-generation WDM-PON,” IEEE J. Sel. Top. Quantum Electron. 17, 472–479 (2011).
[CrossRef]

Bostak, J.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

Buhl, L.

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett. 23, 1201–1203 (2011).
[CrossRef]

Butrie, T.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

Cannon, D.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett. 87, 011110 (2005).
[CrossRef]

Capellini, G.

G. Masini, G. Capellini, J. Witzens, and C. Gunn, “A four-channel, 10Gbps monolithic optical receiver in 130nm CMOS with integrated Ge waveguide photodetectors,” in Optical Fiber Communication Conference (OFC, 2007), PDP312.

Chavarkar, P.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Chen, A.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Chen, L.

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett. 23, 869–871 (2011).
[CrossRef]

C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett. 23, 1201–1203 (2011).
[CrossRef]

Chen, Y.

C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett. 23, 1201–1203 (2011).
[CrossRef]

Christini, D.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

Corzine, S.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

Cunningham, J.

Danielson, D.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett. 87, 011110 (2005).
[CrossRef]

Dayringer, M.

DeMars, S.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

Dentai, A.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

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D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

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F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Gainsley, J.

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F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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Hashimoro, T.

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol. 14, 2475–2482 (1996).
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R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

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Iannone, P.

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S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express 18, 8412–8421 (2010).
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K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Itabashi, S.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron. 17, 516–525 (2011).
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S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express 18, 8412–8421 (2010).
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H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express 3, 102203 (2010).
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K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

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K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett. 8, 563–565 (1996).
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Itoh, M.

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett. 12, 1180–1182 (2000).
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Jacobsen, G.

Jongthammanurak, S.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett. 87, 011110 (2005).
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Joyner, C.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

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M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett. 10, 1614–1616 (1998).
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Kaneko, A.

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett. 12, 1180–1182 (2000).
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F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Kaufman, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

Kimerling, L.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett. 87, 011110 (2005).
[CrossRef]

Kimura, H.

H. Kimura and K. Kumozaki, “A mixed rate MUX/DEMUX technique with highly efficient use of wavelength for WDM/TDM-based future optical access systems,” in IEEE Lasers and Electro-Optics Society (LEOS, 2009), Paper WU4.

Kish, F.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Ko, H.

Kohtoku, M.

M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett. 10, 1614–1616 (1998).
[CrossRef]

Kou, R.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron. 17, 516–525 (2011).
[CrossRef]

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express 3, 102203 (2010).
[CrossRef]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Kozen, A.

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett. 8, 563–565 (1996).
[CrossRef]

Krishnamoorthy, A.

Kumozaki, K.

H. Kimura and K. Kumozaki, “A mixed rate MUX/DEMUX technique with highly efficient use of wavelength for WDM/TDM-based future optical access systems,” in IEEE Lasers and Electro-Optics Society (LEOS, 2009), Paper WU4.

Kung, C.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Kuntz, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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Kwong, D. L.

Lal, V.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

Lambert, D.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

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Salvatore, R.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Samra, P.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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Shafiiha, R.

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Shi, J.

Shin, J.

Shinojima, H.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron. 17, 516–525 (2011).
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H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express 3, 102203 (2010).
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S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express 18, 8412–8421 (2010).
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K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Shubin, I.

Song, J. F.

Spannagel, A.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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Stewart, J.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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Strzelecka, E.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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Studenkov, P.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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Takahata, K.

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F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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Thacker, H.

Thomson, K.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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Tsuchizawa, T.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron. 17, 516–525 (2011).
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H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express 3, 102203 (2010).
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S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express 18, 8412–8421 (2010).
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K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Wada, K.

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express 18, 8412–8421 (2010).
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Watanabe, T.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron. 17, 516–525 (2011).
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S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express 18, 8412–8421 (2010).
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H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express 3, 102203 (2010).
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K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Welch, D.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Wildhagen, P.

Williams, W.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron. 17, 1470–1489 (2011).
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Yamada, K.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron. 17, 516–525 (2011).
[CrossRef]

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express 18, 8412–8421 (2010).
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H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express 3, 102203 (2010).
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K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Yamada, Y.

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Figures (11)

Fig. 1
Fig. 1

Schematic image of connecting structure of SiOx waveguide and Ge PD.

Fig. 2
Fig. 2

Cross sections of AWG-PD integrated device. (a) SiOx waveguide, (b) SSC at Si taper tip, (c) Si wire rib waveguide, and (d) Ge PD.

Fig. 3
Fig. 3

Microscope images of a fabricated AWG-PD chip.

Fig. 4
Fig. 4

I–V characteristics of an integrated Ge PD (blue: unilluminated, red:illuminated), the light was input from SiOx waveguide.

Fig. 5
Fig. 5

Photocurrent spectrum of a Ge PD integrated with an SiOx waveguide.

Fig. 6
Fig. 6

Spectrum of fiber-to-detector photocurrent as a function of input wavelength for all 16 channels.

Fig. 7
Fig. 7

Set of eye diagrams of 16 demultiplexed channels obtained from fabricated AWG-PD measured at a bitrate of 1.25 Gbps with NRZ PRBS data having a word length of 231 − 1.

Fig. 8
Fig. 8

BER characteristics measured at channel 7 of fabricated AWG-PD.

Fig. 9
Fig. 9

Schematic cross-section of one-chip integration of TIA/LA on the AWG-PD integrated Si photonic chip.

Fig. 10
Fig. 10

Images of TIA/LA integratad AWG-PD devices. (a) Birds-eye view of a wafer after flip-chip bonding; (b) microscope image of AWG-PD-TIA/LA integrated device.

Fig. 11
Fig. 11

(a) Waveform of TIA/LA output bias on the time axis. Yellow, green, and red lines are positive (P), negative (N), and differential output, respectively. (b) Eye diagram obtained from differential signal at input of 1.25-Gbps NRZ input.

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