Abstract

On the silicon (Si) photonic platform, we monolithically integrated a silica-based arrayed-waveguide grating (AWG) and germanium (Ge) photodiodes (PDs) using low-temperature fabrication technology. We confirmed demultiplexing by the AWG, optical-electrical signal conversion by Ge PDs, and high-speed signal detection at all channels. In addition, we mounted a multichannel transimpedance amplifier/limiting amplifier (TIA/LA) circuit on the fabricated AWG-PD device using flip-chip bonding technology. The results show the promising potential of our Si photonic platform as a photonics-electronics convergence.

© 2012 OSA

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. D. Lockwood and L. Pavesi, Silicon Photonics II (Springer-Verlag, Berlin2011).
  2. G. Jacobsen and P. Wildhagen, “A general and rigorous WDM receiver model targeting 10–40-Gb/s channel bit rates,” J. Lightwave Technol.19, 966–976 (2001).
    [CrossRef]
  3. A. Bogoni, “Photonics for solving unbundling in next-generation WDM-PON,” IEEE J. Sel. Top. Quantum Electron.17, 472–479 (2011).
    [CrossRef]
  4. F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
    [CrossRef]
  5. H. Kimura and K. Kumozaki, “A mixed rate MUX/DEMUX technique with highly efficient use of wavelength for WDM/TDM-based future optical access systems,” in IEEE Lasers and Electro-Optics Society (LEOS, 2009), Paper WU4.
  6. J. Kani, “Enabling technologies for future scalable and flexible WDM-PON and WDM/TDM-PON system,” IEEE J. Sel. Top. Quantum Electron.16, 1290–1297 (2010).
    [CrossRef]
  7. P. Iannone and K. Reichmann, “Optical access beyond 10Gb/s PON,” in 36th European Conference and Exhibition on Optical Communication (ECOC, 2010), Tu.3.B.1.
  8. T. Miya, “Silica-based planar lightwave circuits: passive and thermally active devices,” IEEE J. Sel. Top. Quantum Electron.6, 38–45 (2000).
    [CrossRef]
  9. Q. Fang, T. Y. Liow, J. F. Song, K. W. Ang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “WDM multi-channel silicon photonic receiver with 320 Gbps data transmission capability,” Opt. Express18, 5106–5113 (2010).
    [CrossRef] [PubMed]
  10. D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.
  11. L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett.23, 869–871 (2011).
    [CrossRef]
  12. C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett.23, 1201–1203 (2011).
    [CrossRef]
  13. C. Doerr and K. Okamoto, “Advances in silica planar lightwave circuits,” J. Lightwave Technol.24, 4763–4789 (2006).
    [CrossRef]
  14. I. Ogawa, H. Yamazaki, and A. Kaneko, “Highly integrated PLC-type devices with surface-mounted monitor PDs for ROADM,” in Optical Fiber Communication Conference (OFC, 2007), OWO2.
  15. Y. Han, Y. Park, S. Park, J. Shin, C. Lee, H. Ko, Y. Baek, C. Park, Y. Kwon, W. Hwang, K. Oh, and H. Sung, “Fabrication of a TFF-attached WDM-type triplex transceiver module using silica PLC hybrid integration technology,” J. Lightwave Technol.24, 5031–5038 (2006).
    [CrossRef]
  16. K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett.8, 563–565 (1996).
    [CrossRef]
  17. S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol.14, 2475–2482 (1996).
    [CrossRef]
  18. T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
    [CrossRef]
  19. G. Masini, G. Capellini, J. Witzens, and C. Gunn, “A four-channel, 10Gbps monolithic optical receiver in 130nm CMOS with integrated Ge waveguide photodetectors,” in Optical Fiber Communication Conference (OFC, 2007), PDP312.
  20. X. Zheng, F. Liu, D. Patil, H. Thacker, Y. Luo, T. Pinguet, A. Mekis, J. Yao, G. Li, J. Shi, K. Raj, J. Lexau, E. Alon, R. Ho, J. Cunningham, and A. Krishnamoorthy, “A sub-picojoule-per-bit CMOS photonic receiver for densely integrated systems,” Opt. Express18, 204–211 (2009).
    [CrossRef]
  21. X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. Moghadam, E. Alon, K. Raj, R. Ho, J. Cunningham, and A. Krishnamoorthy, “Ultra-efficient 10Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express19, 5172–5186 (2011).
    [CrossRef] [PubMed]
  22. H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
    [CrossRef]
  23. S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
    [CrossRef] [PubMed]
  24. J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
    [CrossRef]
  25. A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett.12, 1180–1182 (2000).
    [CrossRef]
  26. K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.
  27. R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.
  28. M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett.10, 1614–1616 (1998).
    [CrossRef]

2011

A. Bogoni, “Photonics for solving unbundling in next-generation WDM-PON,” IEEE J. Sel. Top. Quantum Electron.17, 472–479 (2011).
[CrossRef]

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett.23, 869–871 (2011).
[CrossRef]

C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett.23, 1201–1203 (2011).
[CrossRef]

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
[CrossRef]

X. Zheng, D. Patil, J. Lexau, F. Liu, G. Li, H. Thacker, Y. Luo, I. Shubin, J. Li, J. Yao, P. Dong, D. Feng, M. Asghari, T. Pinguet, A. Mekis, P. Amberg, M. Dayringer, J. Gainsley, H. Moghadam, E. Alon, K. Raj, R. Ho, J. Cunningham, and A. Krishnamoorthy, “Ultra-efficient 10Gb/s hybrid integrated silicon photonic transmitter and receiver,” Opt. Express19, 5172–5186 (2011).
[CrossRef] [PubMed]

2010

Q. Fang, T. Y. Liow, J. F. Song, K. W. Ang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “WDM multi-channel silicon photonic receiver with 320 Gbps data transmission capability,” Opt. Express18, 5106–5113 (2010).
[CrossRef] [PubMed]

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
[CrossRef] [PubMed]

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
[CrossRef]

J. Kani, “Enabling technologies for future scalable and flexible WDM-PON and WDM/TDM-PON system,” IEEE J. Sel. Top. Quantum Electron.16, 1290–1297 (2010).
[CrossRef]

2009

2006

2005

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
[CrossRef]

2001

2000

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett.12, 1180–1182 (2000).
[CrossRef]

T. Miya, “Silica-based planar lightwave circuits: passive and thermally active devices,” IEEE J. Sel. Top. Quantum Electron.6, 38–45 (2000).
[CrossRef]

1998

M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett.10, 1614–1616 (1998).
[CrossRef]

1996

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett.8, 563–565 (1996).
[CrossRef]

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol.14, 2475–2482 (1996).
[CrossRef]

Agashe, S.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Akahori, Y.

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol.14, 2475–2482 (1996).
[CrossRef]

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett.8, 563–565 (1996).
[CrossRef]

Akutsu, Y.

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett.8, 563–565 (1996).
[CrossRef]

Alon, E.

Amberg, P.

Ang, K. W.

Aroca, R.

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett.23, 869–871 (2011).
[CrossRef]

Asghari, M.

Bäck, J.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Baek, Y.

Baeyens, Y.

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett.23, 869–871 (2011).
[CrossRef]

Bogoni, A.

A. Bogoni, “Photonics for solving unbundling in next-generation WDM-PON,” IEEE J. Sel. Top. Quantum Electron.17, 472–479 (2011).
[CrossRef]

Bostak, J.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Buhl, L.

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett.23, 869–871 (2011).
[CrossRef]

C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett.23, 1201–1203 (2011).
[CrossRef]

Butrie, T.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Cannon, D.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
[CrossRef]

Capellini, G.

G. Masini, G. Capellini, J. Witzens, and C. Gunn, “A four-channel, 10Gbps monolithic optical receiver in 130nm CMOS with integrated Ge waveguide photodetectors,” in Optical Fiber Communication Conference (OFC, 2007), PDP312.

Chavarkar, P.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Chen, A.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Chen, L.

C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett.23, 1201–1203 (2011).
[CrossRef]

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett.23, 869–871 (2011).
[CrossRef]

Chen, Y.

C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett.23, 1201–1203 (2011).
[CrossRef]

Christini, D.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Corzine, S.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Cunningham, J.

Danielson, D.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
[CrossRef]

Dayringer, M.

DeMars, S.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Dentai, A.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Doerr, C.

C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett.23, 1201–1203 (2011).
[CrossRef]

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett.23, 869–871 (2011).
[CrossRef]

C. Doerr and K. Okamoto, “Advances in silica planar lightwave circuits,” J. Lightwave Technol.24, 4763–4789 (2006).
[CrossRef]

Dominic, V.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Dong, P.

Evans, P.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Fang, Q.

Feng, D.

Feng, N.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Fisher, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Fong, J.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Fukuda, H.

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Gainsley, J.

Goldfarb, G.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Grubb, S.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Gunn, C.

G. Masini, G. Capellini, J. Witzens, and C. Gunn, “A four-channel, 10Gbps monolithic optical receiver in 130nm CMOS with integrated Ge waveguide photodetectors,” in Optical Fiber Communication Conference (OFC, 2007), PDP312.

Han, Y.

Hashimoro, T.

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol.14, 2475–2482 (1996).
[CrossRef]

Himeno, A.

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett.12, 1180–1182 (2000).
[CrossRef]

Ho, R.

Hurtt, S.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Hwang, W.

Iannone, P.

P. Iannone and K. Reichmann, “Optical access beyond 10Gb/s PON,” in 36th European Conference and Exhibition on Optical Communication (ECOC, 2010), Tu.3.B.1.

Ishikawa, Y.

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
[CrossRef] [PubMed]

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
[CrossRef]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Itabashi, S.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
[CrossRef]

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
[CrossRef]

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
[CrossRef] [PubMed]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Itaya, Y.

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett.8, 563–565 (1996).
[CrossRef]

Itoh, M.

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett.12, 1180–1182 (2000).
[CrossRef]

Jacobsen, G.

Jongthammanurak, S.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
[CrossRef]

Joyner, C.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Kadota, Y.

M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett.10, 1614–1616 (1998).
[CrossRef]

Kaneko, A.

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett.12, 1180–1182 (2000).
[CrossRef]

I. Ogawa, H. Yamazaki, and A. Kaneko, “Highly integrated PLC-type devices with surface-mounted monitor PDs for ROADM,” in Optical Fiber Communication Conference (OFC, 2007), OWO2.

Kani, J.

J. Kani, “Enabling technologies for future scalable and flexible WDM-PON and WDM/TDM-PON system,” IEEE J. Sel. Top. Quantum Electron.16, 1290–1297 (2010).
[CrossRef]

Kato, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Kaufman, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Kimerling, L.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
[CrossRef]

Kimura, H.

H. Kimura and K. Kumozaki, “A mixed rate MUX/DEMUX technique with highly efficient use of wavelength for WDM/TDM-based future optical access systems,” in IEEE Lasers and Electro-Optics Society (LEOS, 2009), Paper WU4.

Kish, F.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Ko, H.

Kohtoku, M.

M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett.10, 1614–1616 (1998).
[CrossRef]

Kou, R.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
[CrossRef]

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
[CrossRef]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Kozen, A.

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett.8, 563–565 (1996).
[CrossRef]

Krishnamoorthy, A.

Kumozaki, K.

H. Kimura and K. Kumozaki, “A mixed rate MUX/DEMUX technique with highly efficient use of wavelength for WDM/TDM-based future optical access systems,” in IEEE Lasers and Electro-Optics Society (LEOS, 2009), Paper WU4.

Kung, C.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Kuntz, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Kwon, Y.

Kwong, D. L.

Lal, V.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Lambert, D.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Lee, C.

Lee, D.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Leeuwen, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Lexau, J.

Li, G.

Li, J.

Liang, H.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Liao, S.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Liow, T. Y.

Liu, F.

Liu, J.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
[CrossRef]

Liu, Y.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Lo, G. Q.

Lockwood, D.

D. Lockwood and L. Pavesi, Silicon Photonics II (Springer-Verlag, Berlin2011).

Luff, B.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Luo, Y.

Malendevich, R.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Masini, G.

G. Masini, G. Capellini, J. Witzens, and C. Gunn, “A four-channel, 10Gbps monolithic optical receiver in 130nm CMOS with integrated Ge waveguide photodetectors,” in Optical Fiber Communication Conference (OFC, 2007), PDP312.

Mathur, A.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

McNicol, J.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Mekis, A.

Melle, S.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Michel, J.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
[CrossRef]

Mino, S.

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol.14, 2475–2482 (1996).
[CrossRef]

Missey, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Mitchell, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Miya, T.

T. Miya, “Silica-based planar lightwave circuits: passive and thermally active devices,” IEEE J. Sel. Top. Quantum Electron.6, 38–45 (2000).
[CrossRef]

Moghadam, H.

Muramoto, Y.

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol.14, 2475–2482 (1996).
[CrossRef]

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett.8, 563–565 (1996).
[CrossRef]

Murthy, S.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Muthia, R.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Muthiah, R.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Nagarajan, R.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Nilsson, A.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Nishi, H.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
[CrossRef]

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
[CrossRef]

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
[CrossRef] [PubMed]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Ogawa, I.

I. Ogawa, H. Yamazaki, and A. Kaneko, “Highly integrated PLC-type devices with surface-mounted monitor PDs for ROADM,” in Optical Fiber Communication Conference (OFC, 2007), OWO2.

Oh, K.

Ohmori, Y.

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett.12, 1180–1182 (2000).
[CrossRef]

Ohyama, T.

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol.14, 2475–2482 (1996).
[CrossRef]

Okamoto, K.

C. Doerr and K. Okamoto, “Advances in silica planar lightwave circuits,” J. Lightwave Technol.24, 4763–4789 (2006).
[CrossRef]

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett.12, 1180–1182 (2000).
[CrossRef]

Oku, S.

M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett.10, 1614–1616 (1998).
[CrossRef]

Park, C.

Park, S.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
[CrossRef]

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
[CrossRef]

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
[CrossRef] [PubMed]

Y. Han, Y. Park, S. Park, J. Shin, C. Lee, H. Ko, Y. Baek, C. Park, Y. Kwon, W. Hwang, K. Oh, and H. Sung, “Fabrication of a TFF-attached WDM-type triplex transceiver module using silica PLC hybrid integration technology,” J. Lightwave Technol.24, 5031–5038 (2006).
[CrossRef]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Park, Y.

Patil, D.

Pavesi, L.

D. Lockwood and L. Pavesi, Silicon Photonics II (Springer-Verlag, Berlin2011).

Pavinski, D.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Pinguet, T.

Pleumeekers, J.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Qian, W.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Raburn, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Rahn, J.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Raj, K.

Reffle, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Reichmann, K.

P. Iannone and K. Reichmann, “Optical access beyond 10Gb/s PON,” in 36th European Conference and Exhibition on Optical Communication (ECOC, 2010), Tu.3.B.1.

Rossi, J.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Salvatore, R.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Samra, P.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Sanjoh, H.

M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett.10, 1614–1616 (1998).
[CrossRef]

Schneider, R.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Shafiiha, R.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

Shi, J.

Shin, J.

Shinojima, H.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
[CrossRef]

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
[CrossRef]

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
[CrossRef] [PubMed]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Shubin, I.

Song, J. F.

Spannagel, A.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Stewart, J.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Strzelecka, E.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Studenkov, P.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Sugita, A.

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett.12, 1180–1182 (2000).
[CrossRef]

Sun, H.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Sung, H.

Takahata, K.

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett.8, 563–565 (1996).
[CrossRef]

Tang, J.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Taylor, B.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Thacker, H.

Thomson, K.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Tsai, H.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Tsuchizawa, T.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
[CrossRef]

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
[CrossRef]

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
[CrossRef] [PubMed]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Wada, K.

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
[CrossRef] [PubMed]

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
[CrossRef]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Watanabe, T.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
[CrossRef]

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
[CrossRef]

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
[CrossRef] [PubMed]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Welch, D.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Wildhagen, P.

Williams, W.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Witzens, J.

G. Masini, G. Capellini, J. Witzens, and C. Gunn, “A four-channel, 10Gbps monolithic optical receiver in 130nm CMOS with integrated Ge waveguide photodetectors,” in Optical Fiber Communication Conference (OFC, 2007), PDP312.

Wu, K.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Yamada, K.

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
[CrossRef]

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
[CrossRef]

S. Park, T. Tsuchizawa, T. Watanabe, H. Shinojima, H. Nishi, K. Yamada, Y. Ishikawa, K. Wada, and S. Itabashi, “Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuator,” Opt. Express18, 8412–8421 (2010).
[CrossRef] [PubMed]

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

Yamada, Y.

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol.14, 2475–2482 (1996).
[CrossRef]

Yamazaki, H.

I. Ogawa, H. Yamazaki, and A. Kaneko, “Highly integrated PLC-type devices with surface-mounted monitor PDs for ROADM,” in Optical Fiber Communication Conference (OFC, 2007), OWO2.

Yanagisawa, M.

S. Mino, T. Ohyama, Y. Akahori, T. Hashimoro, Y. Yamada, M. Yanagisawa, and Y. Muramoto, “A 10-Gb/s hybrid-integrated receiver array module using a planar lightwave circuit (PLC) platform including a novel assembly region structure,” J. Lightwave Technol.14, 2475–2482 (1996).
[CrossRef]

Yao, J.

Yoshikuni, Y.

M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett.10, 1614–1616 (1998).
[CrossRef]

Yu, M. B.

Zhang, J.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

Zheng, X.

Ziari, M.

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

Appl. Phys. Express

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, R. Kou, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier injection structure,” Appl. Phys. Express3, 102203 (2010).
[CrossRef]

Appl. Phys. Lett.

J. Liu, D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. Danielson, J. Michel, and L. Kimerling, “Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications,” Appl. Phys. Lett.87, 011110 (2005).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

T. Miya, “Silica-based planar lightwave circuits: passive and thermally active devices,” IEEE J. Sel. Top. Quantum Electron.6, 38–45 (2000).
[CrossRef]

A. Bogoni, “Photonics for solving unbundling in next-generation WDM-PON,” IEEE J. Sel. Top. Quantum Electron.17, 472–479 (2011).
[CrossRef]

F. Kish, D. Welch, R. Nagarajan, J. Pleumeekers, V. Lal, M. Ziari, A. Nilsson, M. Kato, S. Murthy, P. Evans, S. Corzine, M. Mitchell, P. Samra, M. Missey, S. DeMars, R. Schneider, M. Reffle, T. Butrie, J. Rahn, M. Leeuwen, J. Stewart, D. Lambert, R. Muthiah, H. Tsai, J. Bostak, A. Dentai, K. Wu, H. Sun, D. Pavinski, J. Zhang, J. Tang, J. McNicol, M. Kuntz, V. Dominic, B. Taylor, R. Salvatore, M. Fisher, A. Spannagel, E. Strzelecka, P. Studenkov, M. Raburn, W. Williams, D. Christini, K. Thomson, S. Agashe, R. Malendevich, G. Goldfarb, S. Melle, C. Joyner, M. Kaufman, and S. Grubb, “Current status of large-scale InP photonic integrated circuits,” IEEE J. Sel. Top. Quantum Electron.17, 1470–1489 (2011).
[CrossRef]

J. Kani, “Enabling technologies for future scalable and flexible WDM-PON and WDM/TDM-PON system,” IEEE J. Sel. Top. Quantum Electron.16, 1290–1297 (2010).
[CrossRef]

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE J. Sel. Top. Quantum Electron.17, 516–525 (2011).
[CrossRef]

IEEE Photon. Technol. Lett.

M. Kohtoku, H. Sanjoh, S. Oku, Y. Kadota, and Y. Yoshikuni, “Packaged polarization-insensitive WDM monitor with low loss (7.3 dB) and wide tuning range (4.5 nm),” IEEE Photon. Technol. Lett.10, 1614–1616 (1998).
[CrossRef]

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, and R. Aroca, “Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,” IEEE Photon. Technol. Lett.23, 869–871 (2011).
[CrossRef]

C. Doerr, L. Chen, L. Buhl, and Y. Chen, “Eight-channel SiO2/Si3N4/Si/Ge CWDM receiver,” IEEE Photon. Technol. Lett.23, 1201–1203 (2011).
[CrossRef]

K. Takahata, Y. Muramoto, Y. Akutsu, Y. Akahori, A. Kozen, and Y. Itaya, “10-Gb/s two-channel monolithic photoreceiver array using waveguide p-i-n PD’s and HEMT’s,” IEEE Photon. Technol. Lett.8, 563–565 (1996).
[CrossRef]

A. Sugita, A. Kaneko, K. Okamoto, M. Itoh, A. Himeno, and Y. Ohmori, “Very low insertion loss arrayed-waveguide grating with vertically tapered waveguides,” IEEE Photon. Technol. Lett.12, 1180–1182 (2000).
[CrossRef]

J. Lightwave Technol.

Opt. Express

Other

G. Masini, G. Capellini, J. Witzens, and C. Gunn, “A four-channel, 10Gbps monolithic optical receiver in 130nm CMOS with integrated Ge waveguide photodetectors,” in Optical Fiber Communication Conference (OFC, 2007), PDP312.

D. Feng, W. Qian, H. Liang, N. Feng, S. Liao, C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. Lee, B. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in 8th IEEE International Conference on Group IV Photonics (GFP, 2011), FA2.

K. Yamada, T. Tsuchizawa, T. Watanabe, H. Fukuda, H. Shinojima, H. Nishi, S. Park, R. Kou, Y. Ishikawa, K. Wada, and S. Itabashi, “Silicon photonic devices and their integration technology,” in Optical Fiber Communication Conference (OFC, 2011), OWQ6.

R. Nagarajan, M. Kato, S. Hurtt, A. Dentai, J. Pleumeekers, P. Evans, M. Missey, R. Muthia, A. Chen, D. Lambert, P. Chavarkar, A. Mathur, J. Bäck, S. Murthy, R. Salvatore, C. Joyner, J. Rossi, R. Schneider, M. Ziari, F. Kish, and D. Welch, “Monolithic, 10 and 40 channel InP Receiver photonic integrated circits with on-chip amplification,” in Optical Fiber Communication Conference (OFC, 2007), PDP32.

D. Lockwood and L. Pavesi, Silicon Photonics II (Springer-Verlag, Berlin2011).

I. Ogawa, H. Yamazaki, and A. Kaneko, “Highly integrated PLC-type devices with surface-mounted monitor PDs for ROADM,” in Optical Fiber Communication Conference (OFC, 2007), OWO2.

P. Iannone and K. Reichmann, “Optical access beyond 10Gb/s PON,” in 36th European Conference and Exhibition on Optical Communication (ECOC, 2010), Tu.3.B.1.

H. Kimura and K. Kumozaki, “A mixed rate MUX/DEMUX technique with highly efficient use of wavelength for WDM/TDM-based future optical access systems,” in IEEE Lasers and Electro-Optics Society (LEOS, 2009), Paper WU4.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics