Abstract

We demonstrate the feasibility of monolithic integration of evanescently coupled Uni-Traveling Carrier Photodiodes (UTC-PDs) having a bandwidth exceeding 100 GHz with Multimode Interference (MMI) couplers. This platform is suitable for active-passive, butt-joint monolithic integration with various Multiple Quantum Well (MQW) devices for narrow linewidth millimeter-wave photomixing sources. The fabricated devices achieved a high 3-dB bandwidth of up to 110 GHz and a generated output power of more than 0 dBm (1 mW) at 120 GHz with a flat frequency response over the microwave F-band (90-140 GHz).

©2012 Optical Society of America

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  1. H.-J. Song and T. Nagatsuma, “Present and future of terahertz communications,” IEEE Trans. Terahertz Sci. Tech. 1(1), 256–263 (2011).
    [Crossref]
  2. A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
    [Crossref]
  3. M. J. Fice, E. Rouvalis, F. van Dijk, A. Accard, F. Lelarge, C. C. Renaud, G. Carpintero, and A. J. Seeds, “146-GHz millimeter-wave radio-over-fiber photonic wireless transmission system,” Opt. Express 20(2), 1769–1774 (2012).
    [Crossref] [PubMed]
  4. M. J. Fice, E. Rouvalis, L. Ponnampalam, C. C. Renaud, and A. J. Seeds, “Telecommunications technology-based terahertz sources,” Electron. Lett. 46(26), S28–S31 (2010).
    [Crossref]
  5. E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Traveling-wave uni-traveling carrier photodiodes for continuous wave THz generation,” Opt. Express 18(11), 11105–11110 (2010).
    [Crossref] [PubMed]
  6. J.-W. Shi, F.-M. Kuo, C.-J. Wu, C. L. Chang, C.-Y. Liu, C. Y. Chen, and J.-I. Chyi, “Extremely high saturation current-bandwidth product performance of a near-ballistic uni-traveling-carrier photodiode with a flip-chip bonding structure,” IEEE J. Quantum Electron. 46(1), 80–86 (2010).
    [Crossref]
  7. M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
    [Crossref]
  8. J. Klamkin, A. Ramaswamy, H.-F. Chou, M. N. Sysak, J. W. Raring, N. Parthasarathy, S. P. DenBaars, J. E. Bowers, and L. A. Coldren, “Monolithically integrated balanced uni-traveling-carrier photodiode with tunable MMI coupler for microwave photonic circuits,” in Proc. Conf. Optoelectron. Microelectron. Materials Devices (COMMAD) 2006, 184–187.
  9. S. S. Agashe, S. Datta, F. Xia, and S. R. Forrest, “A monolithically integrated long-wavelength balanced photodiode using asymmetric twin-waveguide technology,” IEEE Photon. Technol. Lett. 16(1), 236–238 (2004).
    [Crossref]
  10. S. Murthy, M. C. Wu, D. Sivco, and A. Y. Cho, “Parallel feed travelling wave distributed pin photodetectors with integrated MMI couplers,” Electron. Lett. 38(2), 78–80 (2002).
    [Crossref]
  11. A. Beling and J. C. Campbell, “InP-based high-speed photodetectors,” J. Lightwave Technol. 27(3), 343–355 (2009).
    [Crossref]
  12. J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
    [Crossref]
  13. E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Continuous wave terahertz generation from ultra-fast InP-based photodiodes,” IEEE Trans. Microw. Theory Tech. 60(3), 509–517 (2012).
    [Crossref]
  14. C. C. Renaud, D. Moodie, M. Robertson, and A. J. Seeds, “High output power at 110 GHz with a waveguide uni-travelling carrier photodiode,” in Proc. 20th Ann. Meeting IEEE Lasers and Electro-Optics Soc. (LEOS) 2007, 782–783.

2012 (3)

M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
[Crossref]

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Continuous wave terahertz generation from ultra-fast InP-based photodiodes,” IEEE Trans. Microw. Theory Tech. 60(3), 509–517 (2012).
[Crossref]

M. J. Fice, E. Rouvalis, F. van Dijk, A. Accard, F. Lelarge, C. C. Renaud, G. Carpintero, and A. J. Seeds, “146-GHz millimeter-wave radio-over-fiber photonic wireless transmission system,” Opt. Express 20(2), 1769–1774 (2012).
[Crossref] [PubMed]

2011 (1)

H.-J. Song and T. Nagatsuma, “Present and future of terahertz communications,” IEEE Trans. Terahertz Sci. Tech. 1(1), 256–263 (2011).
[Crossref]

2010 (4)

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

M. J. Fice, E. Rouvalis, L. Ponnampalam, C. C. Renaud, and A. J. Seeds, “Telecommunications technology-based terahertz sources,” Electron. Lett. 46(26), S28–S31 (2010).
[Crossref]

J.-W. Shi, F.-M. Kuo, C.-J. Wu, C. L. Chang, C.-Y. Liu, C. Y. Chen, and J.-I. Chyi, “Extremely high saturation current-bandwidth product performance of a near-ballistic uni-traveling-carrier photodiode with a flip-chip bonding structure,” IEEE J. Quantum Electron. 46(1), 80–86 (2010).
[Crossref]

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Traveling-wave uni-traveling carrier photodiodes for continuous wave THz generation,” Opt. Express 18(11), 11105–11110 (2010).
[Crossref] [PubMed]

2009 (1)

2006 (1)

J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
[Crossref]

2004 (1)

S. S. Agashe, S. Datta, F. Xia, and S. R. Forrest, “A monolithically integrated long-wavelength balanced photodiode using asymmetric twin-waveguide technology,” IEEE Photon. Technol. Lett. 16(1), 236–238 (2004).
[Crossref]

2002 (1)

S. Murthy, M. C. Wu, D. Sivco, and A. Y. Cho, “Parallel feed travelling wave distributed pin photodetectors with integrated MMI couplers,” Electron. Lett. 38(2), 78–80 (2002).
[Crossref]

Accard, A.

Achouche, M.

M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
[Crossref]

Agashe, S. S.

S. S. Agashe, S. Datta, F. Xia, and S. R. Forrest, “A monolithically integrated long-wavelength balanced photodiode using asymmetric twin-waveguide technology,” IEEE Photon. Technol. Lett. 16(1), 236–238 (2004).
[Crossref]

Barton, J. S.

J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
[Crossref]

Beling, A.

Campbell, J. C.

Cannard, P.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Carpentier, D.

M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
[Crossref]

Carpintero, G.

Chang, C. L.

J.-W. Shi, F.-M. Kuo, C.-J. Wu, C. L. Chang, C.-Y. Liu, C. Y. Chen, and J.-I. Chyi, “Extremely high saturation current-bandwidth product performance of a near-ballistic uni-traveling-carrier photodiode with a flip-chip bonding structure,” IEEE J. Quantum Electron. 46(1), 80–86 (2010).
[Crossref]

Charbonnier, B.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Chen, C. Y.

J.-W. Shi, F.-M. Kuo, C.-J. Wu, C. L. Chang, C.-Y. Liu, C. Y. Chen, and J.-I. Chyi, “Extremely high saturation current-bandwidth product performance of a near-ballistic uni-traveling-carrier photodiode with a flip-chip bonding structure,” IEEE J. Quantum Electron. 46(1), 80–86 (2010).
[Crossref]

Cho, A. Y.

S. Murthy, M. C. Wu, D. Sivco, and A. Y. Cho, “Parallel feed travelling wave distributed pin photodetectors with integrated MMI couplers,” Electron. Lett. 38(2), 78–80 (2002).
[Crossref]

Chtioui, M.

M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
[Crossref]

Chyi, J.-I.

J.-W. Shi, F.-M. Kuo, C.-J. Wu, C. L. Chang, C.-Y. Liu, C. Y. Chen, and J.-I. Chyi, “Extremely high saturation current-bandwidth product performance of a near-ballistic uni-traveling-carrier photodiode with a flip-chip bonding structure,” IEEE J. Quantum Electron. 46(1), 80–86 (2010).
[Crossref]

Coldren, L. A.

J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
[Crossref]

Datta, S.

S. S. Agashe, S. Datta, F. Xia, and S. R. Forrest, “A monolithically integrated long-wavelength balanced photodiode using asymmetric twin-waveguide technology,” IEEE Photon. Technol. Lett. 16(1), 236–238 (2004).
[Crossref]

Demiguel, S.

J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
[Crossref]

Denbaars, S. P.

J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
[Crossref]

Enard, A.

M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
[Crossref]

Fedderwitz, S.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Fice, M. J.

M. J. Fice, E. Rouvalis, F. van Dijk, A. Accard, F. Lelarge, C. C. Renaud, G. Carpintero, and A. J. Seeds, “146-GHz millimeter-wave radio-over-fiber photonic wireless transmission system,” Opt. Express 20(2), 1769–1774 (2012).
[Crossref] [PubMed]

M. J. Fice, E. Rouvalis, L. Ponnampalam, C. C. Renaud, and A. J. Seeds, “Telecommunications technology-based terahertz sources,” Electron. Lett. 46(26), S28–S31 (2010).
[Crossref]

Forrest, S. R.

S. S. Agashe, S. Datta, F. Xia, and S. R. Forrest, “A monolithically integrated long-wavelength balanced photodiode using asymmetric twin-waveguide technology,” IEEE Photon. Technol. Lett. 16(1), 236–238 (2004).
[Crossref]

Kuo, F.-M.

J.-W. Shi, F.-M. Kuo, C.-J. Wu, C. L. Chang, C.-Y. Liu, C. Y. Chen, and J.-I. Chyi, “Extremely high saturation current-bandwidth product performance of a near-ballistic uni-traveling-carrier photodiode with a flip-chip bonding structure,” IEEE J. Quantum Electron. 46(1), 80–86 (2010).
[Crossref]

Lelarge, F.

M. J. Fice, E. Rouvalis, F. van Dijk, A. Accard, F. Lelarge, C. C. Renaud, G. Carpintero, and A. J. Seeds, “146-GHz millimeter-wave radio-over-fiber photonic wireless transmission system,” Opt. Express 20(2), 1769–1774 (2012).
[Crossref] [PubMed]

M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
[Crossref]

Liu, C.-Y.

J.-W. Shi, F.-M. Kuo, C.-J. Wu, C. L. Chang, C.-Y. Liu, C. Y. Chen, and J.-I. Chyi, “Extremely high saturation current-bandwidth product performance of a near-ballistic uni-traveling-carrier photodiode with a flip-chip bonding structure,” IEEE J. Quantum Electron. 46(1), 80–86 (2010).
[Crossref]

Marceaux, A.

M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
[Crossref]

Moodie, D.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Moodie, D. G.

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Continuous wave terahertz generation from ultra-fast InP-based photodiodes,” IEEE Trans. Microw. Theory Tech. 60(3), 509–517 (2012).
[Crossref]

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Traveling-wave uni-traveling carrier photodiodes for continuous wave THz generation,” Opt. Express 18(11), 11105–11110 (2010).
[Crossref] [PubMed]

Morrison, G. B.

J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
[Crossref]

Murthy, S.

S. Murthy, M. C. Wu, D. Sivco, and A. Y. Cho, “Parallel feed travelling wave distributed pin photodetectors with integrated MMI couplers,” Electron. Lett. 38(2), 78–80 (2002).
[Crossref]

Nagatsuma, T.

H.-J. Song and T. Nagatsuma, “Present and future of terahertz communications,” IEEE Trans. Terahertz Sci. Tech. 1(1), 256–263 (2011).
[Crossref]

Pavlovic, L.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Pommereau, F.

M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
[Crossref]

Ponnampalam, L.

M. J. Fice, E. Rouvalis, L. Ponnampalam, C. C. Renaud, and A. J. Seeds, “Telecommunications technology-based terahertz sources,” Electron. Lett. 46(26), S28–S31 (2010).
[Crossref]

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Raring, J. W.

J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
[Crossref]

Renaud, C. C.

M. J. Fice, E. Rouvalis, F. van Dijk, A. Accard, F. Lelarge, C. C. Renaud, G. Carpintero, and A. J. Seeds, “146-GHz millimeter-wave radio-over-fiber photonic wireless transmission system,” Opt. Express 20(2), 1769–1774 (2012).
[Crossref] [PubMed]

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Continuous wave terahertz generation from ultra-fast InP-based photodiodes,” IEEE Trans. Microw. Theory Tech. 60(3), 509–517 (2012).
[Crossref]

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Traveling-wave uni-traveling carrier photodiodes for continuous wave THz generation,” Opt. Express 18(11), 11105–11110 (2010).
[Crossref] [PubMed]

M. J. Fice, E. Rouvalis, L. Ponnampalam, C. C. Renaud, and A. J. Seeds, “Telecommunications technology-based terahertz sources,” Electron. Lett. 46(26), S28–S31 (2010).
[Crossref]

Robertson, M. J.

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Continuous wave terahertz generation from ultra-fast InP-based photodiodes,” IEEE Trans. Microw. Theory Tech. 60(3), 509–517 (2012).
[Crossref]

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Traveling-wave uni-traveling carrier photodiodes for continuous wave THz generation,” Opt. Express 18(11), 11105–11110 (2010).
[Crossref] [PubMed]

Rogers, D.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Rouvalis, E.

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Continuous wave terahertz generation from ultra-fast InP-based photodiodes,” IEEE Trans. Microw. Theory Tech. 60(3), 509–517 (2012).
[Crossref]

M. J. Fice, E. Rouvalis, F. van Dijk, A. Accard, F. Lelarge, C. C. Renaud, G. Carpintero, and A. J. Seeds, “146-GHz millimeter-wave radio-over-fiber photonic wireless transmission system,” Opt. Express 20(2), 1769–1774 (2012).
[Crossref] [PubMed]

M. J. Fice, E. Rouvalis, L. Ponnampalam, C. C. Renaud, and A. J. Seeds, “Telecommunications technology-based terahertz sources,” Electron. Lett. 46(26), S28–S31 (2010).
[Crossref]

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Traveling-wave uni-traveling carrier photodiodes for continuous wave THz generation,” Opt. Express 18(11), 11105–11110 (2010).
[Crossref] [PubMed]

Rymanov, V.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Seeds, A.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Seeds, A. J.

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Continuous wave terahertz generation from ultra-fast InP-based photodiodes,” IEEE Trans. Microw. Theory Tech. 60(3), 509–517 (2012).
[Crossref]

M. J. Fice, E. Rouvalis, F. van Dijk, A. Accard, F. Lelarge, C. C. Renaud, G. Carpintero, and A. J. Seeds, “146-GHz millimeter-wave radio-over-fiber photonic wireless transmission system,” Opt. Express 20(2), 1769–1774 (2012).
[Crossref] [PubMed]

M. J. Fice, E. Rouvalis, L. Ponnampalam, C. C. Renaud, and A. J. Seeds, “Telecommunications technology-based terahertz sources,” Electron. Lett. 46(26), S28–S31 (2010).
[Crossref]

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Traveling-wave uni-traveling carrier photodiodes for continuous wave THz generation,” Opt. Express 18(11), 11105–11110 (2010).
[Crossref] [PubMed]

Shi, J.-W.

J.-W. Shi, F.-M. Kuo, C.-J. Wu, C. L. Chang, C.-Y. Liu, C. Y. Chen, and J.-I. Chyi, “Extremely high saturation current-bandwidth product performance of a near-ballistic uni-traveling-carrier photodiode with a flip-chip bonding structure,” IEEE J. Quantum Electron. 46(1), 80–86 (2010).
[Crossref]

Sivco, D.

S. Murthy, M. C. Wu, D. Sivco, and A. Y. Cho, “Parallel feed travelling wave distributed pin photodetectors with integrated MMI couplers,” Electron. Lett. 38(2), 78–80 (2002).
[Crossref]

Skogen, E. J.

J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
[Crossref]

Song, H.-J.

H.-J. Song and T. Nagatsuma, “Present and future of terahertz communications,” IEEE Trans. Terahertz Sci. Tech. 1(1), 256–263 (2011).
[Crossref]

Steffan, A.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Stöhr, A.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Umbach, A.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

van Dijk, F.

M. J. Fice, E. Rouvalis, F. van Dijk, A. Accard, F. Lelarge, C. C. Renaud, G. Carpintero, and A. J. Seeds, “146-GHz millimeter-wave radio-over-fiber photonic wireless transmission system,” Opt. Express 20(2), 1769–1774 (2012).
[Crossref] [PubMed]

M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
[Crossref]

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Wang, C. S.

J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
[Crossref]

Weiß, M.

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

Wu, C.-J.

J.-W. Shi, F.-M. Kuo, C.-J. Wu, C. L. Chang, C.-Y. Liu, C. Y. Chen, and J.-I. Chyi, “Extremely high saturation current-bandwidth product performance of a near-ballistic uni-traveling-carrier photodiode with a flip-chip bonding structure,” IEEE J. Quantum Electron. 46(1), 80–86 (2010).
[Crossref]

Wu, M. C.

S. Murthy, M. C. Wu, D. Sivco, and A. Y. Cho, “Parallel feed travelling wave distributed pin photodetectors with integrated MMI couplers,” Electron. Lett. 38(2), 78–80 (2002).
[Crossref]

Xia, F.

S. S. Agashe, S. Datta, F. Xia, and S. R. Forrest, “A monolithically integrated long-wavelength balanced photodiode using asymmetric twin-waveguide technology,” IEEE Photon. Technol. Lett. 16(1), 236–238 (2004).
[Crossref]

Electron. Lett. (2)

M. J. Fice, E. Rouvalis, L. Ponnampalam, C. C. Renaud, and A. J. Seeds, “Telecommunications technology-based terahertz sources,” Electron. Lett. 46(26), S28–S31 (2010).
[Crossref]

S. Murthy, M. C. Wu, D. Sivco, and A. Y. Cho, “Parallel feed travelling wave distributed pin photodetectors with integrated MMI couplers,” Electron. Lett. 38(2), 78–80 (2002).
[Crossref]

IEEE J. Quantum Electron. (2)

J. W. Raring, E. J. Skogen, C. S. Wang, J. S. Barton, G. B. Morrison, S. Demiguel, S. P. Denbaars, and L. A. Coldren, “Design and demonstration of novel QW intermixing scheme for the integration of UTC-type photodiodes with QW-based components,” IEEE J. Quantum Electron. 42(2), 171–181 (2006).
[Crossref]

J.-W. Shi, F.-M. Kuo, C.-J. Wu, C. L. Chang, C.-Y. Liu, C. Y. Chen, and J.-I. Chyi, “Extremely high saturation current-bandwidth product performance of a near-ballistic uni-traveling-carrier photodiode with a flip-chip bonding structure,” IEEE J. Quantum Electron. 46(1), 80–86 (2010).
[Crossref]

IEEE Photon. Technol. Lett. (2)

M. Chtioui, F. Lelarge, A. Enard, F. Pommereau, D. Carpentier, A. Marceaux, F. Van Dijk, and M. Achouche, “High responsivity and high power UTC and MUTC GaInAs-InP photodiodes,” IEEE Photon. Technol. Lett. 24(4), 318–320 (2012).
[Crossref]

S. S. Agashe, S. Datta, F. Xia, and S. R. Forrest, “A monolithically integrated long-wavelength balanced photodiode using asymmetric twin-waveguide technology,” IEEE Photon. Technol. Lett. 16(1), 236–238 (2004).
[Crossref]

IEEE Trans. Microw. Theory Tech. (2)

A. Stöhr, P. Cannard, B. Charbonnier, F. van Dijk, S. Fedderwitz, D. Moodie, L. Pavlovic, L. Ponnampalam, C. C. Renaud, D. Rogers, V. Rymanov, A. Seeds, A. Steffan, A. Umbach, and M. Weiß, “Millimeter-wave photonic components for broadband wireless systems,” IEEE Trans. Microw. Theory Tech. 58(11), 3071–3082 (2010).
[Crossref]

E. Rouvalis, C. C. Renaud, D. G. Moodie, M. J. Robertson, and A. J. Seeds, “Continuous wave terahertz generation from ultra-fast InP-based photodiodes,” IEEE Trans. Microw. Theory Tech. 60(3), 509–517 (2012).
[Crossref]

IEEE Trans. Terahertz Sci. Tech. (1)

H.-J. Song and T. Nagatsuma, “Present and future of terahertz communications,” IEEE Trans. Terahertz Sci. Tech. 1(1), 256–263 (2011).
[Crossref]

J. Lightwave Technol. (1)

Opt. Express (2)

Other (2)

C. C. Renaud, D. Moodie, M. Robertson, and A. J. Seeds, “High output power at 110 GHz with a waveguide uni-travelling carrier photodiode,” in Proc. 20th Ann. Meeting IEEE Lasers and Electro-Optics Soc. (LEOS) 2007, 782–783.

J. Klamkin, A. Ramaswamy, H.-F. Chou, M. N. Sysak, J. W. Raring, N. Parthasarathy, S. P. DenBaars, J. E. Bowers, and L. A. Coldren, “Monolithically integrated balanced uni-traveling-carrier photodiode with tunable MMI coupler for microwave photonic circuits,” in Proc. Conf. Optoelectron. Microelectron. Materials Devices (COMMAD) 2006, 184–187.

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Figures (6)

Fig. 1
Fig. 1 (a) Output optical power divided by input optical power after propagation over 1 mm (λ = 1.55 μm), together with simulated series resistance as a function of cap layer thickness. (b) Quantum Efficiency of waveguide UTC-PDs (λ = 1.55 μm) versus length of the device for 3 different widths (2, 3 and 4 μm).

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Fig. 2
Fig. 2 Normalized generated power at 120 GHz as a function of device length and width.

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Fig. 3
Fig. 3 Images of chips with (a) Single UTC-PDs, (b) Dual angled UTC-PDs with Arc-Type bends and (c) Dual straight UTC-PDs with S-type bends.

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Fig. 4
Fig. 4 (a) Normalized frequency response up to 110 GHz from UTC-PDs with various active area dimensions. All measurements were taken at a DC photocurrent level of 5 mA. (b) Power saturation at 110 GHz for various UTC-PDs with different active area dimensions. The reverse bias voltage was 3 V.

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Fig. 5
Fig. 5 Emitted power from a 3 × 15 μm2 UTC-PD in the F-Band (90-140 GHz). The DC photocurrent level was 12 mA.

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Fig. 6
Fig. 6 (a) Photocurrent as a function of applied reverse bias for devices with short (70 μm) and long waveguides (770 μm, 970 μm, and 1170 μm) at an input optical power level of 36 mW. The active area of all UTC-PDs was 3 × 15 μm2. (b) power at 110 GHz for straight (blue, continuous line) and angled (red, dashed line) UTC-PDs.

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