Abstract

Optical coupling of an ensemble of silicon-vacancy (SiV) centers to single-crystal diamond microdisk cavities is demonstrated. The cavities are fabricated from a single-crystal diamond membrane generated by ion implantation and electrochemical liftoff followed by homo-epitaxial overgrowth. Whispering gallery modes spectrally overlap with the zero-phonon line (ZPL) of the SiV centers and exhibit quality factors ∼ 2200. Lifetime reduction from 1.8 ns to 1.48 ns is observed from SiV centers in the cavity compared to those in the membrane outside the cavity. These results are pivotal in developing diamond integrated photonics networks.

© 2012 OSA

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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
  4. E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
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    [CrossRef]
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    [CrossRef]
  22. A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
    [CrossRef]
  23. I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
    [CrossRef] [PubMed]
  24. C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17, 1292–1296 (2008).
    [CrossRef]
  25. H. Sternschulte, K. Thonke, R. Sauer, P. C. Münzinger, and P. Michler, “1.681-eV luminescence center in chemical-vapor-deposited homoepitaxial diamond films,” Phys. Rev. B 50, 14554–14560 (1994).
    [CrossRef]
  26. C. D. Clark, H. Kanda, I. Kiflawi, and G. Sittas, “Silicon defects in diamond,” Phys. Rev. B 51, 16681–16688 (1995).
    [CrossRef]
  27. A. V. Turukhin, C. Liu, A. A. Gorokhovsky, R. R. Alfano, and W. Phillips, “Picosecond photoluminescence decay of si-doped chemical-vapor-deposited diamond films,” Phys. Rev. B 54, 16448–16451 (1996).
    [CrossRef]
  28. A. C. Tamboli, M. C. Schmidt, A. Hirai, S. P. DenBaars, and E. L. Hu, “Observation of whispering gallery modes in nonpolar m-plane GaN microdisks,” Appl. Phys. Lett. 94, 251116 (2009).
    [CrossRef]
  29. J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
    [CrossRef]

2012

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
[CrossRef] [PubMed]

2011

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[CrossRef]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

E. Neu, D. Steinmetz, J. Riedrich-Möller, S. Gsell, M. Fischer, M. Schreck, and C. Becher, “Single photon emission from silicon-vacancy colour centres in chemical vapour deposition nano-diamonds on iridium,” New J. Phys. 13, 025012 (2011).
[CrossRef]

I. Aharonovich, A. D. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photonics 5, 397–405 (2011).
[CrossRef]

A. Faraon, P. E. Barclay, C. Santori, K. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[CrossRef]

P. Barclay, K. Fu, C. Santori, A. Faraon, and R. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[CrossRef]

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[CrossRef]

2010

T. M. Babinec, HJ M, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nano. 5, 195–199 (2010).
[CrossRef]

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vučković, H. Park, and M. D. Lukin, “Deterministic coupling of a single nitrogen vacancy center to a photonic crystal cavity,” Nano Lett. 10, 3922–3926 (2010).
[CrossRef] [PubMed]

C. Santori, P. E. Barclay, K. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[CrossRef] [PubMed]

P. Neumann, J. Beck, M. Steiner, F. Rempp, H. Fedder, P. R. Hemmer, J. Wrachtrup, and F. Jelezko, “Single-Shot readout of a single nuclear spin,” Science 329, 542–544 (2010).
[CrossRef] [PubMed]

B. B. Buckley, G. D. Fuchs, L. C. Bassett, and D. D. Awschalom, “Spin-Light coherence for Single-Spin measurement and control in diamond,” Science 330, 1212–1215 (2010).
[CrossRef] [PubMed]

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

I. Aharononvich, S. Castelletto, B. Johnson, J. McCallum, D. Simpson, A. Greentree, and S. Prawer, “Chromium single-photon emitters in diamond fabricated by ion implantation,” Phys. Rev. B 81, 121201 (2010).
[CrossRef]

2009

A. C. Tamboli, M. C. Schmidt, A. Hirai, S. P. DenBaars, and E. L. Hu, “Observation of whispering gallery modes in nonpolar m-plane GaN microdisks,” Appl. Phys. Lett. 94, 251116 (2009).
[CrossRef]

2008

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17, 1292–1296 (2008).
[CrossRef]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

2007

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[CrossRef]

2005

J. R. Rabeau, Y. L. Chin, S. Prawer, F. Jelezko, T. Gaebel, and J. Wrachtrup, “Fabrication of single nickel-nitrogen defects in diamond by chemical vapor deposition,” Appl. Phys. Lett. 86, 131926 (2005).
[CrossRef]

2002

N. Gisin, G. Ribordy, W. Tittel, and H. Zbinden, “Quantum cryptography,” Rev. Mod. Phys. 74, 145–195 (2002).
[CrossRef]

2000

C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable Solid-State source of single photons,” Phys. Rev. Lett. 85, 290–293 (2000).
[CrossRef] [PubMed]

1996

A. V. Turukhin, C. Liu, A. A. Gorokhovsky, R. R. Alfano, and W. Phillips, “Picosecond photoluminescence decay of si-doped chemical-vapor-deposited diamond films,” Phys. Rev. B 54, 16448–16451 (1996).
[CrossRef]

J. P. Goss, R. Jones, S. J. Breuer, P. R. Briddon, and S. Öberg, “The Twelve-Line 1.682 eV luminescence center in diamond and the Vacancy-Silicon complex,” Phys. Rev. Lett. 77, 3041–3044 (1996).
[CrossRef] [PubMed]

1995

C. D. Clark, H. Kanda, I. Kiflawi, and G. Sittas, “Silicon defects in diamond,” Phys. Rev. B 51, 16681–16688 (1995).
[CrossRef]

1994

H. Sternschulte, K. Thonke, R. Sauer, P. C. Münzinger, and P. Michler, “1.681-eV luminescence center in chemical-vapor-deposited homoepitaxial diamond films,” Phys. Rev. B 50, 14554–14560 (1994).
[CrossRef]

Aharononvich, I.

I. Aharononvich, S. Castelletto, B. Johnson, J. McCallum, D. Simpson, A. Greentree, and S. Prawer, “Chromium single-photon emitters in diamond fabricated by ion implantation,” Phys. Rev. B 81, 121201 (2010).
[CrossRef]

Aharonovich, I.

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
[CrossRef] [PubMed]

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[CrossRef]

I. Aharonovich, A. D. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photonics 5, 397–405 (2011).
[CrossRef]

Alfano, R. R.

A. V. Turukhin, C. Liu, A. A. Gorokhovsky, R. R. Alfano, and W. Phillips, “Picosecond photoluminescence decay of si-doped chemical-vapor-deposited diamond films,” Phys. Rev. B 54, 16448–16451 (1996).
[CrossRef]

Awschalom, D. D.

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
[CrossRef] [PubMed]

B. B. Buckley, G. D. Fuchs, L. C. Bassett, and D. D. Awschalom, “Spin-Light coherence for Single-Spin measurement and control in diamond,” Science 330, 1212–1215 (2010).
[CrossRef] [PubMed]

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Babinec, T. M.

T. M. Babinec, HJ M, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nano. 5, 195–199 (2010).
[CrossRef]

Barclay, P.

P. Barclay, K. Fu, C. Santori, A. Faraon, and R. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[CrossRef]

Barclay, P. E.

A. Faraon, P. E. Barclay, C. Santori, K. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[CrossRef]

C. Santori, P. E. Barclay, K. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[CrossRef] [PubMed]

Barth, M.

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

Bassett, L. C.

B. B. Buckley, G. D. Fuchs, L. C. Bassett, and D. D. Awschalom, “Spin-Light coherence for Single-Spin measurement and control in diamond,” Science 330, 1212–1215 (2010).
[CrossRef] [PubMed]

Baur, A.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Bayn, I.

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[CrossRef]

Beausoleil, R.

P. Barclay, K. Fu, C. Santori, A. Faraon, and R. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[CrossRef]

Beausoleil, R. G.

A. Faraon, P. E. Barclay, C. Santori, K. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[CrossRef]

C. Santori, P. E. Barclay, K. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[CrossRef] [PubMed]

Becher, C.

E. Neu, D. Steinmetz, J. Riedrich-Möller, S. Gsell, M. Fischer, M. Schreck, and C. Becher, “Single photon emission from silicon-vacancy colour centres in chemical vapour deposition nano-diamonds on iridium,” New J. Phys. 13, 025012 (2011).
[CrossRef]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Beck, J.

P. Neumann, J. Beck, M. Steiner, F. Rempp, H. Fedder, P. R. Hemmer, J. Wrachtrup, and F. Jelezko, “Single-Shot readout of a single nuclear spin,” Science 329, 542–544 (2010).
[CrossRef] [PubMed]

Benson, O.

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

Bouwmeester, D.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

Breuer, S. J.

J. P. Goss, R. Jones, S. J. Breuer, P. R. Briddon, and S. Öberg, “The Twelve-Line 1.682 eV luminescence center in diamond and the Vacancy-Silicon complex,” Phys. Rev. Lett. 77, 3041–3044 (1996).
[CrossRef] [PubMed]

Briddon, P. R.

J. P. Goss, R. Jones, S. J. Breuer, P. R. Briddon, and S. Öberg, “The Twelve-Line 1.682 eV luminescence center in diamond and the Vacancy-Silicon complex,” Phys. Rev. Lett. 77, 3041–3044 (1996).
[CrossRef] [PubMed]

Buckley, B. B.

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
[CrossRef] [PubMed]

B. B. Buckley, G. D. Fuchs, L. C. Bassett, and D. D. Awschalom, “Spin-Light coherence for Single-Spin measurement and control in diamond,” Science 330, 1212–1215 (2010).
[CrossRef] [PubMed]

Butler, J. E.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Castelletto, S.

I. Aharononvich, S. Castelletto, B. Johnson, J. McCallum, D. Simpson, A. Greentree, and S. Prawer, “Chromium single-photon emitters in diamond fabricated by ion implantation,” Phys. Rev. B 81, 121201 (2010).
[CrossRef]

Childress, L.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

Chin, Y. L.

J. R. Rabeau, Y. L. Chin, S. Prawer, F. Jelezko, T. Gaebel, and J. Wrachtrup, “Fabrication of single nickel-nitrogen defects in diamond by chemical vapor deposition,” Appl. Phys. Lett. 86, 131926 (2005).
[CrossRef]

Chu, Y.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

Clark, C. D.

C. D. Clark, H. Kanda, I. Kiflawi, and G. Sittas, “Silicon defects in diamond,” Phys. Rev. B 51, 16681–16688 (1995).
[CrossRef]

Clarke, D. R.

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[CrossRef]

Dawson, M.

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17, 1292–1296 (2008).
[CrossRef]

DenBaars, S. P.

A. C. Tamboli, M. C. Schmidt, A. Hirai, S. P. DenBaars, and E. L. Hu, “Observation of whispering gallery modes in nonpolar m-plane GaN microdisks,” Appl. Phys. Lett. 94, 251116 (2009).
[CrossRef]

Döscher, H.

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

Dutt, M. V. G.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

Englund, D.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vučković, H. Park, and M. D. Lukin, “Deterministic coupling of a single nitrogen vacancy center to a photonic crystal cavity,” Nano Lett. 10, 3922–3926 (2010).
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Fairchild, B. A.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
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P. Barclay, K. Fu, C. Santori, A. Faraon, and R. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
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A. Faraon, P. E. Barclay, C. Santori, K. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
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P. Neumann, J. Beck, M. Steiner, F. Rempp, H. Fedder, P. R. Hemmer, J. Wrachtrup, and F. Jelezko, “Single-Shot readout of a single nuclear spin,” Science 329, 542–544 (2010).
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C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
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C. Santori, P. E. Barclay, K. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
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E. Neu, D. Steinmetz, J. Riedrich-Möller, S. Gsell, M. Fischer, M. Schreck, and C. Becher, “Single photon emission from silicon-vacancy colour centres in chemical vapour deposition nano-diamonds on iridium,” New J. Phys. 13, 025012 (2011).
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J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Friel, I.

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17, 1292–1296 (2008).
[CrossRef]

Fu, K.

P. Barclay, K. Fu, C. Santori, A. Faraon, and R. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[CrossRef]

Fu, K. C.

A. Faraon, P. E. Barclay, C. Santori, K. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[CrossRef]

C. Santori, P. E. Barclay, K. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[CrossRef] [PubMed]

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B. B. Buckley, G. D. Fuchs, L. C. Bassett, and D. D. Awschalom, “Spin-Light coherence for Single-Spin measurement and control in diamond,” Science 330, 1212–1215 (2010).
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J. R. Rabeau, Y. L. Chin, S. Prawer, F. Jelezko, T. Gaebel, and J. Wrachtrup, “Fabrication of single nickel-nitrogen defects in diamond by chemical vapor deposition,” Appl. Phys. Lett. 86, 131926 (2005).
[CrossRef]

Gibson, B. C.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
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N. Gisin, G. Ribordy, W. Tittel, and H. Zbinden, “Quantum cryptography,” Rev. Mod. Phys. 74, 145–195 (2002).
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A. V. Turukhin, C. Liu, A. A. Gorokhovsky, R. R. Alfano, and W. Phillips, “Picosecond photoluminescence decay of si-doped chemical-vapor-deposited diamond films,” Phys. Rev. B 54, 16448–16451 (1996).
[CrossRef]

Goss, J. P.

J. P. Goss, R. Jones, S. J. Breuer, P. R. Briddon, and S. Öberg, “The Twelve-Line 1.682 eV luminescence center in diamond and the Vacancy-Silicon complex,” Phys. Rev. Lett. 77, 3041–3044 (1996).
[CrossRef] [PubMed]

Greentree, A.

I. Aharononvich, S. Castelletto, B. Johnson, J. McCallum, D. Simpson, A. Greentree, and S. Prawer, “Chromium single-photon emitters in diamond fabricated by ion implantation,” Phys. Rev. B 81, 121201 (2010).
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Greentree, A. D.

I. Aharonovich, A. D. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photonics 5, 397–405 (2011).
[CrossRef]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

Gsell, S.

E. Neu, D. Steinmetz, J. Riedrich-Möller, S. Gsell, M. Fischer, M. Schreck, and C. Becher, “Single photon emission from silicon-vacancy colour centres in chemical vapour deposition nano-diamonds on iridium,” New J. Phys. 13, 025012 (2011).
[CrossRef]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Gu, E.

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17, 1292–1296 (2008).
[CrossRef]

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T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

Hannappel, T.

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

Hanson, R.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Hatami, F.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vučković, H. Park, and M. D. Lukin, “Deterministic coupling of a single nitrogen vacancy center to a photonic crystal cavity,” Nano Lett. 10, 3922–3926 (2010).
[CrossRef] [PubMed]

Heeres, E. C.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

Hemmer, P. R.

T. M. Babinec, HJ M, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nano. 5, 195–199 (2010).
[CrossRef]

P. Neumann, J. Beck, M. Steiner, F. Rempp, H. Fedder, P. R. Hemmer, J. Wrachtrup, and F. Jelezko, “Single-Shot readout of a single nuclear spin,” Science 329, 542–544 (2010).
[CrossRef] [PubMed]

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

Hennessy, K.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[CrossRef]

Hepp, C.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Hirai, A.

A. C. Tamboli, M. C. Schmidt, A. Hirai, S. P. DenBaars, and E. L. Hu, “Observation of whispering gallery modes in nonpolar m-plane GaN microdisks,” Appl. Phys. Lett. 94, 251116 (2009).
[CrossRef]

Hu, E.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[CrossRef]

Hu, E. L.

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
[CrossRef] [PubMed]

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[CrossRef]

A. C. Tamboli, M. C. Schmidt, A. Hirai, S. P. DenBaars, and E. L. Hu, “Observation of whispering gallery modes in nonpolar m-plane GaN microdisks,” Appl. Phys. Lett. 94, 251116 (2009).
[CrossRef]

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Huang, M.

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[CrossRef]

Huntington, S.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

Jamieson, D. N.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

Jelezko, F.

P. Neumann, J. Beck, M. Steiner, F. Rempp, H. Fedder, P. R. Hemmer, J. Wrachtrup, and F. Jelezko, “Single-Shot readout of a single nuclear spin,” Science 329, 542–544 (2010).
[CrossRef] [PubMed]

J. R. Rabeau, Y. L. Chin, S. Prawer, F. Jelezko, T. Gaebel, and J. Wrachtrup, “Fabrication of single nickel-nitrogen defects in diamond by chemical vapor deposition,” Appl. Phys. Lett. 86, 131926 (2005).
[CrossRef]

Jiang, L.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

Johnson, B.

I. Aharononvich, S. Castelletto, B. Johnson, J. McCallum, D. Simpson, A. Greentree, and S. Prawer, “Chromium single-photon emitters in diamond fabricated by ion implantation,” Phys. Rev. B 81, 121201 (2010).
[CrossRef]

Johnson, T. J.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[CrossRef]

Jones, R.

J. P. Goss, R. Jones, S. J. Breuer, P. R. Briddon, and S. Öberg, “The Twelve-Line 1.682 eV luminescence center in diamond and the Vacancy-Silicon complex,” Phys. Rev. Lett. 77, 3041–3044 (1996).
[CrossRef] [PubMed]

Kalish, R.

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[CrossRef]

Kanda, H.

C. D. Clark, H. Kanda, I. Kiflawi, and G. Sittas, “Silicon defects in diamond,” Phys. Rev. B 51, 16681–16688 (1995).
[CrossRef]

Kewes, G.

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

Khan, M.

T. M. Babinec, HJ M, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nano. 5, 195–199 (2010).
[CrossRef]

Kiflawi, I.

C. D. Clark, H. Kanda, I. Kiflawi, and G. Sittas, “Silicon defects in diamond,” Phys. Rev. B 51, 16681–16688 (1995).
[CrossRef]

Kim, H.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[CrossRef]

Kipfstuhl, L.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Kurtsiefer, C.

C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable Solid-State source of single photons,” Phys. Rev. Lett. 85, 290–293 (2000).
[CrossRef] [PubMed]

Lee, C.

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17, 1292–1296 (2008).
[CrossRef]

Lee, J. C.

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
[CrossRef] [PubMed]

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[CrossRef]

Lee, K. H.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[CrossRef]

Limarga, A. M.

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[CrossRef]

Liu, C.

A. V. Turukhin, C. Liu, A. A. Gorokhovsky, R. R. Alfano, and W. Phillips, “Picosecond photoluminescence decay of si-doped chemical-vapor-deposited diamond films,” Phys. Rev. B 54, 16448–16451 (1996).
[CrossRef]

Löchel, B.

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

Loncar, M.

T. M. Babinec, HJ M, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nano. 5, 195–199 (2010).
[CrossRef]

Lukin, M. D.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vučković, H. Park, and M. D. Lukin, “Deterministic coupling of a single nitrogen vacancy center to a photonic crystal cavity,” Nano Lett. 10, 3922–3926 (2010).
[CrossRef] [PubMed]

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

M, HJ

T. M. Babinec, HJ M, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nano. 5, 195–199 (2010).
[CrossRef]

Magyar, A. P.

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
[CrossRef] [PubMed]

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[CrossRef]

Mayer, S.

C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable Solid-State source of single photons,” Phys. Rev. Lett. 85, 290–293 (2000).
[CrossRef] [PubMed]

Maze, J.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

Maze, J. R.

T. M. Babinec, HJ M, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nano. 5, 195–199 (2010).
[CrossRef]

McCallum, J.

I. Aharononvich, S. Castelletto, B. Johnson, J. McCallum, D. Simpson, A. Greentree, and S. Prawer, “Chromium single-photon emitters in diamond fabricated by ion implantation,” Phys. Rev. B 81, 121201 (2010).
[CrossRef]

Meyler, B.

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[CrossRef]

Michael, C. P.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[CrossRef]

Michler, P.

H. Sternschulte, K. Thonke, R. Sauer, P. C. Münzinger, and P. Michler, “1.681-eV luminescence center in chemical-vapor-deposited homoepitaxial diamond films,” Phys. Rev. B 50, 14554–14560 (1994).
[CrossRef]

Mucklich, F.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Münzinger, P. C.

H. Sternschulte, K. Thonke, R. Sauer, P. C. Münzinger, and P. Michler, “1.681-eV luminescence center in chemical-vapor-deposited homoepitaxial diamond films,” Phys. Rev. B 50, 14554–14560 (1994).
[CrossRef]

Neu, E.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

E. Neu, D. Steinmetz, J. Riedrich-Möller, S. Gsell, M. Fischer, M. Schreck, and C. Becher, “Single photon emission from silicon-vacancy colour centres in chemical vapour deposition nano-diamonds on iridium,” New J. Phys. 13, 025012 (2011).
[CrossRef]

Neumann, P.

P. Neumann, J. Beck, M. Steiner, F. Rempp, H. Fedder, P. R. Hemmer, J. Wrachtrup, and F. Jelezko, “Single-Shot readout of a single nuclear spin,” Science 329, 542–544 (2010).
[CrossRef] [PubMed]

Nüsse, N.

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

Öberg, S.

J. P. Goss, R. Jones, S. J. Breuer, P. R. Briddon, and S. Öberg, “The Twelve-Line 1.682 eV luminescence center in diamond and the Vacancy-Silicon complex,” Phys. Rev. Lett. 77, 3041–3044 (1996).
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Olivero, P.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

Oosterkamp, T. H.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

Painter, O.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[CrossRef]

Park, H.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vučković, H. Park, and M. D. Lukin, “Deterministic coupling of a single nitrogen vacancy center to a photonic crystal cavity,” Nano Lett. 10, 3922–3926 (2010).
[CrossRef] [PubMed]

Pauly, C.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Petroff, P. M.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

Pfaff, W.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

Phillips, W.

A. V. Turukhin, C. Liu, A. A. Gorokhovsky, R. R. Alfano, and W. Phillips, “Picosecond photoluminescence decay of si-doped chemical-vapor-deposited diamond films,” Phys. Rev. B 54, 16448–16451 (1996).
[CrossRef]

Prawer, S.

I. Aharonovich, A. D. Greentree, and S. Prawer, “Diamond photonics,” Nat. Photonics 5, 397–405 (2011).
[CrossRef]

I. Aharononvich, S. Castelletto, B. Johnson, J. McCallum, D. Simpson, A. Greentree, and S. Prawer, “Chromium single-photon emitters in diamond fabricated by ion implantation,” Phys. Rev. B 81, 121201 (2010).
[CrossRef]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

J. R. Rabeau, Y. L. Chin, S. Prawer, F. Jelezko, T. Gaebel, and J. Wrachtrup, “Fabrication of single nickel-nitrogen defects in diamond by chemical vapor deposition,” Appl. Phys. Lett. 86, 131926 (2005).
[CrossRef]

Rabeau, J. R.

J. R. Rabeau, Y. L. Chin, S. Prawer, F. Jelezko, T. Gaebel, and J. Wrachtrup, “Fabrication of single nickel-nitrogen defects in diamond by chemical vapor deposition,” Appl. Phys. Lett. 86, 131926 (2005).
[CrossRef]

Rempp, F.

P. Neumann, J. Beck, M. Steiner, F. Rempp, H. Fedder, P. R. Hemmer, J. Wrachtrup, and F. Jelezko, “Single-Shot readout of a single nuclear spin,” Science 329, 542–544 (2010).
[CrossRef] [PubMed]

Ribordy, G.

N. Gisin, G. Ribordy, W. Tittel, and H. Zbinden, “Quantum cryptography,” Rev. Mod. Phys. 74, 145–195 (2002).
[CrossRef]

Riedrich-Möller, J.

E. Neu, D. Steinmetz, J. Riedrich-Möller, S. Gsell, M. Fischer, M. Schreck, and C. Becher, “Single photon emission from silicon-vacancy colour centres in chemical vapour deposition nano-diamonds on iridium,” New J. Phys. 13, 025012 (2011).
[CrossRef]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Rivoire, K.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vučković, H. Park, and M. D. Lukin, “Deterministic coupling of a single nitrogen vacancy center to a photonic crystal cavity,” Nano Lett. 10, 3922–3926 (2010).
[CrossRef] [PubMed]

Rol, F.

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[CrossRef]

Rubanov, S.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

Salzman, J.

I. Bayn, B. Meyler, J. Salzman, and R. Kalish, “Triangular nanobeam photonic cavities in single-crystal diamond,” New J. Phys. 13, 025018 (2011).
[CrossRef]

Santori, C.

A. Faraon, P. E. Barclay, C. Santori, K. C. Fu, and R. G. Beausoleil, “Resonant enhancement of the zero-phonon emission from a colour centre in a diamond cavity,” Nat. Photonics 5, 301–305 (2011).
[CrossRef]

P. Barclay, K. Fu, C. Santori, A. Faraon, and R. Beausoleil, “Hybrid nanocavity resonant enhancement of color center emission in diamond,” Phys. Rev. X 1, 011007 (2011).
[CrossRef]

C. Santori, P. E. Barclay, K. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[CrossRef] [PubMed]

Sauer, R.

H. Sternschulte, K. Thonke, R. Sauer, P. C. Münzinger, and P. Michler, “1.681-eV luminescence center in chemical-vapor-deposited homoepitaxial diamond films,” Phys. Rev. B 50, 14554–14560 (1994).
[CrossRef]

Scarsbrook, G.

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17, 1292–1296 (2008).
[CrossRef]

Schell, A. W.

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

Schmidt, M. C.

A. C. Tamboli, M. C. Schmidt, A. Hirai, S. P. DenBaars, and E. L. Hu, “Observation of whispering gallery modes in nonpolar m-plane GaN microdisks,” Appl. Phys. Lett. 94, 251116 (2009).
[CrossRef]

Schoengen, M.

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

Schreck, M.

E. Neu, D. Steinmetz, J. Riedrich-Möller, S. Gsell, M. Fischer, M. Schreck, and C. Becher, “Single photon emission from silicon-vacancy colour centres in chemical vapour deposition nano-diamonds on iridium,” New J. Phys. 13, 025012 (2011).
[CrossRef]

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Shields, B.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vučković, H. Park, and M. D. Lukin, “Deterministic coupling of a single nitrogen vacancy center to a photonic crystal cavity,” Nano Lett. 10, 3922–3926 (2010).
[CrossRef] [PubMed]

Simpson, D.

I. Aharononvich, S. Castelletto, B. Johnson, J. McCallum, D. Simpson, A. Greentree, and S. Prawer, “Chromium single-photon emitters in diamond fabricated by ion implantation,” Phys. Rev. B 81, 121201 (2010).
[CrossRef]

Sittas, G.

C. D. Clark, H. Kanda, I. Kiflawi, and G. Sittas, “Silicon defects in diamond,” Phys. Rev. B 51, 16681–16688 (1995).
[CrossRef]

Smith, J. M.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

Sorensen, A. S.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

Spillane, S.

C. Santori, P. E. Barclay, K. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[CrossRef] [PubMed]

Srinivasan, K.

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[CrossRef]

Steiner, M.

P. Neumann, J. Beck, M. Steiner, F. Rempp, H. Fedder, P. R. Hemmer, J. Wrachtrup, and F. Jelezko, “Single-Shot readout of a single nuclear spin,” Science 329, 542–544 (2010).
[CrossRef] [PubMed]

Steinmetz, D.

E. Neu, D. Steinmetz, J. Riedrich-Möller, S. Gsell, M. Fischer, M. Schreck, and C. Becher, “Single photon emission from silicon-vacancy colour centres in chemical vapour deposition nano-diamonds on iridium,” New J. Phys. 13, 025012 (2011).
[CrossRef]

Sternschulte, H.

H. Sternschulte, K. Thonke, R. Sauer, P. C. Münzinger, and P. Michler, “1.681-eV luminescence center in chemical-vapor-deposited homoepitaxial diamond films,” Phys. Rev. B 50, 14554–14560 (1994).
[CrossRef]

Tamboli, A. C.

A. C. Tamboli, M. C. Schmidt, A. Hirai, S. P. DenBaars, and E. L. Hu, “Observation of whispering gallery modes in nonpolar m-plane GaN microdisks,” Appl. Phys. Lett. 94, 251116 (2009).
[CrossRef]

Taylor, R. A.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

Thon, S. M.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

Thonke, K.

H. Sternschulte, K. Thonke, R. Sauer, P. C. Münzinger, and P. Michler, “1.681-eV luminescence center in chemical-vapor-deposited homoepitaxial diamond films,” Phys. Rev. B 50, 14554–14560 (1994).
[CrossRef]

Tittel, W.

N. Gisin, G. Ribordy, W. Tittel, and H. Zbinden, “Quantum cryptography,” Rev. Mod. Phys. 74, 145–195 (2002).
[CrossRef]

Togan, E.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

Trifonov, A. S.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

Turukhin, A. V.

A. V. Turukhin, C. Liu, A. A. Gorokhovsky, R. R. Alfano, and W. Phillips, “Picosecond photoluminescence decay of si-doped chemical-vapor-deposited diamond films,” Phys. Rev. B 54, 16448–16451 (1996).
[CrossRef]

van der Sar, T.

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

Vuckovic, J.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vučković, H. Park, and M. D. Lukin, “Deterministic coupling of a single nitrogen vacancy center to a photonic crystal cavity,” Nano Lett. 10, 3922–3926 (2010).
[CrossRef] [PubMed]

Waldermann, F.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

Walmsley, I.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

Wandt, M.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Wang, C. F.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Weinfurter, H.

C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable Solid-State source of single photons,” Phys. Rev. Lett. 85, 290–293 (2000).
[CrossRef] [PubMed]

Wolff, S.

J. Riedrich-Möller, L. Kipfstuhl, C. Hepp, E. Neu, C. Pauly, F. Mucklich, A. Baur, M. Wandt, S. Wolff, M. Fischer, S. Gsell, M. Schreck, and C. Becher, “One- and two-dimensional photonic crystal microcavities in single crystal diamond,” Nat. Nano. 7, 69–74 (2011).
[CrossRef]

Wolters, J.

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

Wrachtrup, J.

P. Neumann, J. Beck, M. Steiner, F. Rempp, H. Fedder, P. R. Hemmer, J. Wrachtrup, and F. Jelezko, “Single-Shot readout of a single nuclear spin,” Science 329, 542–544 (2010).
[CrossRef] [PubMed]

J. R. Rabeau, Y. L. Chin, S. Prawer, F. Jelezko, T. Gaebel, and J. Wrachtrup, “Fabrication of single nickel-nitrogen defects in diamond by chemical vapor deposition,” Appl. Phys. Lett. 86, 131926 (2005).
[CrossRef]

Yale, C. G.

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
[CrossRef] [PubMed]

Yang, J.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

Zarda, P.

C. Kurtsiefer, S. Mayer, P. Zarda, and H. Weinfurter, “Stable Solid-State source of single photons,” Phys. Rev. Lett. 85, 290–293 (2000).
[CrossRef] [PubMed]

Zbinden, H.

N. Gisin, G. Ribordy, W. Tittel, and H. Zbinden, “Quantum cryptography,” Rev. Mod. Phys. 74, 145–195 (2002).
[CrossRef]

Zhang, Y.

T. M. Babinec, HJ M, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nano. 5, 195–199 (2010).
[CrossRef]

Zibrov, A. S.

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
[CrossRef] [PubMed]

Adv. Mater.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, “Fabrication of ultrathin Single-Crystal diamond membranes,” Adv. Mater. 20, 4793–4798 (2008).
[CrossRef]

I. Aharonovich, J. C. Lee, A. P. Magyar, B. B. Buckley, C. G. Yale, D. D. Awschalom, and E. L. Hu, “Homoepitaxial growth of single crystal diamond membranes for quantum information processing,” Adv. Mater. 24, OP54–OP59 (2012).
[CrossRef] [PubMed]

Appl. Phys. Lett.

C. F. Wang, R. Hanson, D. D. Awschalom, E. L. Hu, T. Feygelson, J. Yang, and J. E. Butler, “Fabrication and characterization of two-dimensional photonic crystal microcavities in nanocrystalline diamond,” Appl. Phys. Lett. 91, 201112 (2007).
[CrossRef]

C. P. Michael, K. Srinivasan, T. J. Johnson, O. Painter, K. H. Lee, K. Hennessy, H. Kim, and E. Hu, “Wavelength-and material-dependent absorption in GaAs and AlGaAs microcavities,” Appl. Phys. Lett. 90, 051108 (2007).
[CrossRef]

A. P. Magyar, J. C. Lee, A. M. Limarga, I. Aharonovich, F. Rol, D. R. Clarke, M. Huang, and E. L. Hu, “Fabrication of thin, luminescent, single-crystal diamond membranes,” Appl. Phys. Lett. 99, 081913 (2011).
[CrossRef]

A. C. Tamboli, M. C. Schmidt, A. Hirai, S. P. DenBaars, and E. L. Hu, “Observation of whispering gallery modes in nonpolar m-plane GaN microdisks,” Appl. Phys. Lett. 94, 251116 (2009).
[CrossRef]

T. van der Sar, J. Hagemeier, W. Pfaff, E. C. Heeres, S. M. Thon, H. Kim, P. M. Petroff, T. H. Oosterkamp, D. Bouwmeester, and R. Hanson, “Deterministic nanoassembly of a coupled quantum emitter-photonic crystal cavity system,” Appl. Phys. Lett. 98, 193103 (2011).
[CrossRef]

J. Wolters, A. W. Schell, G. Kewes, N. Nüsse, M. Schoengen, H. Döscher, T. Hannappel, B. Löchel, M. Barth, and O. Benson, “Enhancement of the zero phonon line emission from a single nitrogen vacancy center in a nanodiamond via coupling to a photonic crystal cavity,” Appl. Phys. Lett. 97, 141108 (2010).
[CrossRef]

J. R. Rabeau, Y. L. Chin, S. Prawer, F. Jelezko, T. Gaebel, and J. Wrachtrup, “Fabrication of single nickel-nitrogen defects in diamond by chemical vapor deposition,” Appl. Phys. Lett. 86, 131926 (2005).
[CrossRef]

Diamond Relat. Mater.

C. Lee, E. Gu, M. Dawson, I. Friel, and G. Scarsbrook, “Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma,” Diamond Relat. Mater. 17, 1292–1296 (2008).
[CrossRef]

Nano Lett.

D. Englund, B. Shields, K. Rivoire, F. Hatami, J. Vučković, H. Park, and M. D. Lukin, “Deterministic coupling of a single nitrogen vacancy center to a photonic crystal cavity,” Nano Lett. 10, 3922–3926 (2010).
[CrossRef] [PubMed]

Nanotechnology

C. Santori, P. E. Barclay, K. C. Fu, R. G. Beausoleil, S. Spillane, and M. Fisch, “Nanophotonics for quantum optics using nitrogen-vacancy centers in diamond,” Nanotechnology 21, 274008 (2010).
[CrossRef] [PubMed]

Nat. Nano.

T. M. Babinec, HJ M, M. Khan, Y. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nano. 5, 195–199 (2010).
[CrossRef]

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Nat. Photonics

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Nature

E. Togan, Y. Chu, A. S. Trifonov, L. Jiang, J. Maze, L. Childress, M. V. G. Dutt, A. S. Sorensen, P. R. Hemmer, A. S. Zibrov, and M. D. Lukin, “Quantum entanglement between an optical photon and a solid-state spin qubit,” Nature 466, 730–734 (2010).
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New J. Phys.

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Figures (3)

Fig. 1
Fig. 1

(a) Schematic of the SiV defect structure in diamond. The red atom represents the silicon, the empty circle represents the surrounding vacancies and the blue atoms are the carbon atoms. (b) The energy level diagram of SiV centers with doublets in both the ground states and excited states. The emitter can be excited by a 532 nm excitation and the emission is centered near the ZPL at 738 nm. (c) Fabrication process of the cavity. A ∼ 1.7 μm thick diamond membrane is placed on a silicon-dioxide substrate followed by epitaxial overgrowth of a thin diamond film. The film is flipped and thinned using reactive ion etching and the microdisk cavities are patterned using e-beam lithography with silicon-dioxide as a hard mask.

Fig. 2
Fig. 2

(a) Room temperature PL curves recorded from the membrane immediately after regrowth (blue curve), after a subsequent removal of ∼ 1.4 μm of the original template (green curve) and a final thinning to 300 nm thick membrane (100nm:200nm original template:overgrown layer). A pronounced ZPL from the SiV centers was observed as the original template is removed. The FWHM of the ZPL is ∼ 6 nm. (b) Low temperature PL measurement recorded from the membrane after removal of ∼ 1.4 μm of the original membrane. The FWHM of the ZPL of SiV centers at 9 K is ∼ 3 nm. (c) SEM image of a 2.5 μm diameter micro-disk cavity fabricated from single-crystal diamond. (d). FDTD simulation of the field intensity (Hz) profile in log scale for the TE mode with zeroth order in radial direction ( TE 0 m = 20). The red color indicates higher field intensity, and the white circle indicates the periphery of the micro-disk. (e) Room temperature PL spectrum recorded from the microdisk cavity with 20 μW laser excitation. The WGMs are observed. The zeroth order radial TE mode has a Q of ∼ 2000.

Fig. 3
Fig. 3

(a) Room temperature PL spectrum of the 1st order radial TE mode ( TE 0 m = 20). The spectrum is background corrected. The Q factor is ∼ 2200 and spectral overlap with the ZPL of SiV centers was observed. The solid curve is the spectrum measured, the dashed curve is a Lorentzian fit of the cavity mode, and the dotted curve is a Lorentzian fit of the ZPL of SiV center. (b) Fluorescence lifetime measurement of SiV centers within microdisk resonators shows lifetime reduction from 1.83 ns to 1.48 ns, compared to the SiV centers in the diamond membrane, recorded at 18 K. The lifetime was fit to a bi-exponential decay (dashed lines) where reduction for both the fast and slow decay channel were observed.

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