Abstract

In this work we present the design of a Pd/B4C multilayer structure optimized for high reflectance at 6.67 nm. The structure has been deposited and also characterized along one year in order to investigate its temporal stability. This coating has been developed for the beam transport system of FERMI@Elettra Free Electron Laser: the use of an additional aperiodic capping layer on top of the structure combines the high reflectance with filter properties useful in rejecting the fundamental harmonic when the goal is to select the third FEL harmonic.

© 2012 OSA

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  1. E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys. 12(7), 075002 (2010).
    [CrossRef]
  2. M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A 635(1), S24–S29 (2011).
    [CrossRef]
  3. A. J. Corso, P. Zuppella, P. Nicolosi, D. Cocco, and M. G. Pelizzo, “Multilayer mirrors for FERMI@ELETTRA beam transport system,” Proc. SPIE 8078, 80780F (2011).
    [CrossRef]
  4. D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
    [CrossRef]
  5. E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
    [CrossRef] [PubMed]
  6. R. Cucini, F. Bencivenga, M. Zangrando, and C. Masciovecchio, “Technical advances of the TIMER project,” Nucl. Instrum. Meth. A 635(1), S69–S74 (2011).
    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
  9. M. Barthelmess and S. Bajt, “Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength,” Appl. Opt. 50(11), 1610–1619 (2011).
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    [CrossRef] [PubMed]
  16. I. Kopylets, “Time degradation of nanosize multilayer Mo/B4C compositions at storage on air,” Metallofiz. Noveishie Tekhnol. 30, 497–506 (2008).
  17. T. Tsarfati, R. W. E. Van de Kruijs, E. Zoerthout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and x-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
    [CrossRef]
  18. R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express 19(1), 193–205 (2011).
    [CrossRef] [PubMed]

2011 (6)

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A 635(1), S24–S29 (2011).
[CrossRef]

A. J. Corso, P. Zuppella, P. Nicolosi, D. Cocco, and M. G. Pelizzo, “Multilayer mirrors for FERMI@ELETTRA beam transport system,” Proc. SPIE 8078, 80780F (2011).
[CrossRef]

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

R. Cucini, F. Bencivenga, M. Zangrando, and C. Masciovecchio, “Technical advances of the TIMER project,” Nucl. Instrum. Meth. A 635(1), S69–S74 (2011).
[CrossRef]

M. Barthelmess and S. Bajt, “Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength,” Appl. Opt. 50(11), 1610–1619 (2011).
[CrossRef] [PubMed]

R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express 19(1), 193–205 (2011).
[CrossRef] [PubMed]

2010 (3)

T. Tsarfati, R. W. E. Van de Kruijs, E. Zoerthout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and x-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys. 12(7), 075002 (2010).
[CrossRef]

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

2009 (5)

F. Bencivenga and C. Masciovecchio, “FEL-based transient grating spectroscopy to investigate nanoscale dynamics,” Nucl. Instrum. and Meth. A 606(3), 785–789 (2009).
[CrossRef]

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

T. Tsarfati, R. W. E. Van De Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009).
[CrossRef] [PubMed]

2008 (1)

I. Kopylets, “Time degradation of nanosize multilayer Mo/B4C compositions at storage on air,” Metallofiz. Noveishie Tekhnol. 30, 497–506 (2008).

2001 (1)

1998 (1)

1991 (1)

Abrami, A.

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Allaria, E.

E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys. 12(7), 075002 (2010).
[CrossRef]

Andreev, S. S.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

Bacescu, D. M.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Bajt, S.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

M. Barthelmess and S. Bajt, “Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength,” Appl. Opt. 50(11), 1610–1619 (2011).
[CrossRef] [PubMed]

Barthelmess, M.

M. Barthelmess and S. Bajt, “Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength,” Appl. Opt. 50(11), 1610–1619 (2011).
[CrossRef] [PubMed]

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Barty, A.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Barysheva, M. M.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

Baumbach, T.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Bencivenga, F.

R. Cucini, F. Bencivenga, M. Zangrando, and C. Masciovecchio, “Technical advances of the TIMER project,” Nucl. Instrum. Meth. A 635(1), S69–S74 (2011).
[CrossRef]

F. Bencivenga and C. Masciovecchio, “FEL-based transient grating spectroscopy to investigate nanoscale dynamics,” Nucl. Instrum. and Meth. A 606(3), 785–789 (2009).
[CrossRef]

Bianco, A.

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Bijkerk, F.

R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express 19(1), 193–205 (2011).
[CrossRef] [PubMed]

T. Tsarfati, R. W. E. Van de Kruijs, E. Zoerthout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and x-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

T. Tsarfati, R. W. E. Van De Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

Bogan, M. J.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Bormann, R.

Bruijn, S.

Burian, T.

Callegari, C.

E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys. 12(7), 075002 (2010).
[CrossRef]

Capotondi, F.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Chalupsky, J.

Chapman, H. N.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Chkhalo, N. I.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

Cihelka, J.

Cloetens, P.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Cocco, D.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A 635(1), S24–S29 (2011).
[CrossRef]

A. J. Corso, P. Zuppella, P. Nicolosi, D. Cocco, and M. G. Pelizzo, “Multilayer mirrors for FERMI@ELETTRA beam transport system,” Proc. SPIE 8078, 80780F (2011).
[CrossRef]

E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys. 12(7), 075002 (2010).
[CrossRef]

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Corso, A. J.

A. J. Corso, P. Zuppella, P. Nicolosi, D. Cocco, and M. G. Pelizzo, “Multilayer mirrors for FERMI@ELETTRA beam transport system,” Proc. SPIE 8078, 80780F (2011).
[CrossRef]

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A 635(1), S24–S29 (2011).
[CrossRef]

Cucini, R.

R. Cucini, F. Bencivenga, M. Zangrando, and C. Masciovecchio, “Technical advances of the TIMER project,” Nucl. Instrum. Meth. A 635(1), S69–S74 (2011).
[CrossRef]

Cudin, I.

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Dieker, C.

Dietsch, R.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Falco, C. M.

Fava, C.

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Fawley, W. M.

E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys. 12(7), 075002 (2010).
[CrossRef]

Frank, M.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Giuressi, D.

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Gleeson, A.

Godnig, R.

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Grigoriev, D.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Grzonka, J.

Gullikson, E. M.

Gumprecht, L.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Gusev, S. A.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

Hajdu, J.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Hajkova, V.

Hau-Riege, S.

Helfen, L.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Hollensteiner, S.

Holz, T.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Jäger, W.

Juha, L.

Jurek, M.

Kaulich, B.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Khorsand, A. R.

Kiskinova, M.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys. 12(7), 075002 (2010).
[CrossRef]

Klinger, D.

Kopylets, I.

I. Kopylets, “Time degradation of nanosize multilayer Mo/B4C compositions at storage on air,” Metallofiz. Noveishie Tekhnol. 30, 497–506 (2008).

Krämer, M.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Krzywinski, J.

Locatelli, A.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

London, R.

Louis, E.

R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express 19(1), 193–205 (2011).
[CrossRef] [PubMed]

T. Tsarfati, R. W. E. Van de Kruijs, E. Zoerthout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and x-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

T. Tsarfati, R. W. E. Van De Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

Lucatorto, T. B.

Masciovecchio, C.

R. Cucini, F. Bencivenga, M. Zangrando, and C. Masciovecchio, “Technical advances of the TIMER project,” Nucl. Instrum. Meth. A 635(1), S69–S74 (2011).
[CrossRef]

E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys. 12(7), 075002 (2010).
[CrossRef]

F. Bencivenga and C. Masciovecchio, “FEL-based transient grating spectroscopy to investigate nanoscale dynamics,” Nucl. Instrum. and Meth. A 606(3), 785–789 (2009).
[CrossRef]

Meduna, M.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Menk, R. H.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Mentes, T. O.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Michaelsen, C.

Monaco, G.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A 635(1), S24–S29 (2011).
[CrossRef]

Nelson, A. J.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Nicolosi, P.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A 635(1), S24–S29 (2011).
[CrossRef]

A. J. Corso, P. Zuppella, P. Nicolosi, D. Cocco, and M. G. Pelizzo, “Multilayer mirrors for FERMI@ELETTRA beam transport system,” Proc. SPIE 8078, 80780F (2011).
[CrossRef]

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009).
[CrossRef] [PubMed]

Nowak, C.

Parmigiani, F.

E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys. 12(7), 075002 (2010).
[CrossRef]

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Pedersoli, E.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Pelizzo, M. G.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A 635(1), S24–S29 (2011).
[CrossRef]

A. J. Corso, P. Zuppella, P. Nicolosi, D. Cocco, and M. G. Pelizzo, “Multilayer mirrors for FERMI@ELETTRA beam transport system,” Proc. SPIE 8078, 80780F (2011).
[CrossRef]

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009).
[CrossRef] [PubMed]

Pelka, J. B.

Pestov, A. E.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

Pivovaroff, M. J.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Plocinski, T.

Polkovnikov, V. N.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

Rack, A.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Rack, T.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Rasinski, M.

Riotte, M.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Rosen, R. S.

Rumiz, L.

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Salshchenko, N. N.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

Sandrin, G.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Schulz, J.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Sergo, R.

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Shmaenok, L. A.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

Siewert, F.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Slaughter, J. M.

Sobierajski, R.

Spezzani, C.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Stearns, D. G.

Suman, M.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A 635(1), S24–S29 (2011).
[CrossRef]

M. Suman, M. G. Pelizzo, D. L. Windt, and P. Nicolosi, “Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging,” Appl. Opt. 48(29), 5432–5437 (2009).
[CrossRef] [PubMed]

Svetina, C.

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Tarrio, C.

Tiedtke, K.

Toleikis, S.

Tsarfati, T.

T. Tsarfati, R. W. E. Van de Kruijs, E. Zoerthout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and x-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

T. Tsarfati, R. W. E. Van De Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

Vainer, Y. A.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

van de Kruijs, R. W. E.

R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express 19(1), 193–205 (2011).
[CrossRef] [PubMed]

T. Tsarfati, R. W. E. Van de Kruijs, E. Zoerthout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and x-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

T. Tsarfati, R. W. E. Van De Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

Vernon, S. P.

Vysin, L.

Wabnitz, H.

Watts, R. N.

Weitkamp, T.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Wiesmann, J.

Windt, D. L.

Woods, B. W.

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Zangrando, M.

R. Cucini, F. Bencivenga, M. Zangrando, and C. Masciovecchio, “Technical advances of the TIMER project,” Nucl. Instrum. Meth. A 635(1), S69–S74 (2011).
[CrossRef]

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Ziegler, E.

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Zoerthout, E.

T. Tsarfati, R. W. E. Van de Kruijs, E. Zoerthout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and x-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

Zoethout, E.

T. Tsarfati, R. W. E. Van De Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

Zuev, S. Y.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

Zuppella, P.

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A 635(1), S24–S29 (2011).
[CrossRef]

A. J. Corso, P. Zuppella, P. Nicolosi, D. Cocco, and M. G. Pelizzo, “Multilayer mirrors for FERMI@ELETTRA beam transport system,” Proc. SPIE 8078, 80780F (2011).
[CrossRef]

Appl. Opt. (3)

J. Synchrotron Radiat. (1)

A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat. 17(4), 496–510 (2010).
[CrossRef] [PubMed]

Metallofiz. Noveishie Tekhnol. (1)

I. Kopylets, “Time degradation of nanosize multilayer Mo/B4C compositions at storage on air,” Metallofiz. Noveishie Tekhnol. 30, 497–506 (2008).

New J. Phys. (1)

E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys. 12(7), 075002 (2010).
[CrossRef]

Nucl. Instrum. and Meth. A (1)

F. Bencivenga and C. Masciovecchio, “FEL-based transient grating spectroscopy to investigate nanoscale dynamics,” Nucl. Instrum. and Meth. A 606(3), 785–789 (2009).
[CrossRef]

Nucl. Instrum. Meth. A (3)

R. Cucini, F. Bencivenga, M. Zangrando, and C. Masciovecchio, “Technical advances of the TIMER project,” Nucl. Instrum. Meth. A 635(1), S69–S74 (2011).
[CrossRef]

M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A 635(1), S24–S29 (2011).
[CrossRef]

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A 603(1-2), 80–82 (2009).
[CrossRef]

Opt. Express (1)

Opt. Lett. (2)

Proc. SPIE (2)

A. J. Corso, P. Zuppella, P. Nicolosi, D. Cocco, and M. G. Pelizzo, “Multilayer mirrors for FERMI@ELETTRA beam transport system,” Proc. SPIE 8078, 80780F (2011).
[CrossRef]

D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE 7361, 736106 (2009).
[CrossRef]

Rev. Sci. Instrum. (1)

E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum. 82(4), 043711 (2011).
[CrossRef] [PubMed]

Thin Solid Films (2)

T. Tsarfati, R. W. E. Van De Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

T. Tsarfati, R. W. E. Van de Kruijs, E. Zoerthout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and x-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

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Figures (7)

Fig. 1
Fig. 1

Delay line system under realization at FERMI

Fig. 2
Fig. 2

The flowchart of the method adopted for designing the aperiodic structure reported in Table 1.

Fig. 3
Fig. 3

Standing-wave distribution in a periodic Pd/B4C multilayer structure (a) and in a periodic Pd/B4C multilayer containing an aperiodic capping layer (b).

Fig. 4
Fig. 4

(a) Reflectance vs. wavelength of a Pd/B4C multilayer containing an aperiodic capping layer structure, measured at 45° incidence, compared with a simulation (dashed line) performed using the parameters reported in Table 2. (b) Reflectance of the same structure, measured over the range 5-25nm. Again, a simulation is shown (dashed line) performed using the structural parameters reported in Table 2. The simulation of the pure periodic structure, obtained using the period, Г and interfaces roughness of Table 2, is also reported (dotted line) for comparison.

Fig. 5
Fig. 5

Reflectance vs. wavelength of our prototype Pd/B4C multilayer measured at 45° incidence angle just three weeks after deposition (continuous line) and one year after deposition (dot line) to verify its temporal stability.

Fig. 6
Fig. 6

Reflectance vs. wavelength of our prototype Pd/B4C multilayer measured at 10° incidence; also shown is the simulation (dashed line) performed using the structural parameters reported in Table 2.

Fig. 7
Fig. 7

XRR at λ = 0.154 nm (Cu-Kα line) of the Pd/B4C multilayer structure discussed in this work (black line). The figure shows also the best fit (grey line) obtained using a multilayer model with graded interfaces.

Tables (2)

Tables Icon

Table 1 B4C-Based Multilayers Performances Considered in this Work. For each material couple is reported the theoretical reflectance, the FRR and the FWHM with and without aperiodic capping-layer.

Tables Icon

Table 2 Multilayer Parameters Determined from Fits to Experimental Reflectance and FRR Measurements

Equations (1)

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F R R = R ( λ 3 r d ) R ( λ 1 s t )

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