Abstract

In the present work, antireflective sub-wavelength structures have been fabricated on fluorescent 6H-SiC to enhance the white light extraction efficiency by using the reactive-ion etching method. Broadband and omnidirectional antireflection characteristics show that 6H-SiC with antireflective sub-wavelength structures suppress the average surface reflection significantly from 20.5 % to 1.01 % over a wide spectral range of 390-784 nm. The luminescence intensity of the fluorescent 6H-SiC could be enhanced in the whole emission angle range. It maintains an enhancement larger than 91 % up to the incident angle of 70 degrees, while the largest enhancement of 115.4 % could be obtained at 16 degrees. The antireflective sub-wavelength structures on fluorescent 6H-SiC could also preserve the luminescence spectral profile at a large emission angle by eliminating the Fabry-Pérot microcavity interference effect.

© 2012 OSA

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  1. C. Shen, K. Li, Q. Hou, H. Feng, and X. Dong, “White LED based on YAG: Ce, Gd phosphor and CdSe-ZnS core/shell quantum dots,” IEEE Photon. Technol. Lett. 22, 884–886 (2010).
    [CrossRef]
  2. C. Chang, C. Chen, C. Wu, S. Chang, J. Hung, and Y. Chi, “High-color-rendering pure-white phosphorescent organic light-emitting devices employing only two complementary colors,” Org. Electron. 11, 266–272 (2010).
    [CrossRef]
  3. R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
    [CrossRef]
  4. H. Kuo, C. Hung, H. Chen, K. Chen, C. Wang, C. Sher, C. Yeh, C. Lin, C. Chen, and Y. Cheng, “Patterned structure of remote phosphor for phosphor-converted white LEDs,” Opt. Express 19, A930–A936 (2011).
    [CrossRef] [PubMed]
  5. H. Menkara, R. A. Gilstrap, T. Morris, M. Minkara, B. K. Wagner, and C. J. Summers, “Development of nanophosphors for light emitting diodes,” Opt. Express 19, A972–A981 (2011).
    [CrossRef] [PubMed]
  6. S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
    [CrossRef]
  7. Y. Ou, V. Jokubavicius, S. Kamiyama, C. Liu, R. W. Berg, M. Linnarsson, R. Yakimova, M. Syväjärvi, and H. Ou, “Donor-acceptor-pair emission characterization in N-B doped fluorescent SiC,” Opt. Mater. Express 1, 1439–1446 (2011).
    [CrossRef]
  8. S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki, M. Syväjärvi, and R. Yakimova, “Fluorescent SiC and its application to white light-emitting diodes,” J. Semicond. 32, 013004 (2011).
    [CrossRef]
  9. Y. Ou, D. Corell, C. Dam-Hansen, P. Petersen, and H. Ou, “Antireflective sub-wavelength structures for improvement of the extraction efficiency and color rendering index of monolithic white light-emitting diode,” Opt. Express 19, A166–A172 (2011).
    [CrossRef] [PubMed]
  10. Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94, 263118 (2009).
    [CrossRef]
  11. L. Sainiemi, V. Jokinen, A. Shah, M. Shpak, S. Aura, P. Suvanto, and S. Franssila, “Non-reflcecting silicon and polymer surfaces by plasma etching and replication,” Adv. Mater. 23, 122–126 (2011).
    [CrossRef]
  12. N. Yamada, T. Ijiro, E. Okamoto, K. Hayashi, and H. Masuda, “Characterization of antireflection moth-eye film on crystalline silicon photovoltaic module,” Opt. Express 19, A118–A125 (2011).
    [CrossRef] [PubMed]
  13. J. W. Leem, Y. M. Song, and J. S. Yu, “Broadband wide-angle antireflection enhancement in AZO/Si shell/core subwavelength grating structures with hydrophobic surface for Si-based solar cells,” Opt. Express 19, A1155–A1164 (2011).
    [CrossRef] [PubMed]
  14. T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
    [CrossRef]
  15. R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
    [CrossRef]
  16. M. Kang, S. Joo, W. Bahng, J. Lee, N. Kim, and S. Koo, “Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes,” Nanoscale Res. Lett. 6, 236 (2011).
    [CrossRef] [PubMed]
  17. M. Syväjärvi and R. Yakimova, “Sublimation epitaxial growth of hexagonal and cubic SiC,” in Encyclopedia - the Comprehensive Semiconductor Science and Technology, P. Bhattacharya, R. Fornari, and H. Kamimura, eds. (Elsevier, 2011).
    [CrossRef]
  18. D. Sotta, E. Hadji, N. Magnea, E. Delamadeleine, P. Besson, P. Renard, and H. Moriceau, “Resonant optical microcavity based on crystalline silicon active layer,” J. Appl. Phys. 92, 2207–2209 (2002).
    [CrossRef]
  19. S. S. Pan, C. Ye, X. M. Teng, and G. H. Li, “Angle-dependent photoluminescence of [110]-oriented nitrogen-doped SnO2 films,” J. Phys. D: Appl. Phys. 40, 4771–4774 (2007).
    [CrossRef]

2011 (9)

H. Kuo, C. Hung, H. Chen, K. Chen, C. Wang, C. Sher, C. Yeh, C. Lin, C. Chen, and Y. Cheng, “Patterned structure of remote phosphor for phosphor-converted white LEDs,” Opt. Express 19, A930–A936 (2011).
[CrossRef] [PubMed]

H. Menkara, R. A. Gilstrap, T. Morris, M. Minkara, B. K. Wagner, and C. J. Summers, “Development of nanophosphors for light emitting diodes,” Opt. Express 19, A972–A981 (2011).
[CrossRef] [PubMed]

Y. Ou, V. Jokubavicius, S. Kamiyama, C. Liu, R. W. Berg, M. Linnarsson, R. Yakimova, M. Syväjärvi, and H. Ou, “Donor-acceptor-pair emission characterization in N-B doped fluorescent SiC,” Opt. Mater. Express 1, 1439–1446 (2011).
[CrossRef]

S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki, M. Syväjärvi, and R. Yakimova, “Fluorescent SiC and its application to white light-emitting diodes,” J. Semicond. 32, 013004 (2011).
[CrossRef]

Y. Ou, D. Corell, C. Dam-Hansen, P. Petersen, and H. Ou, “Antireflective sub-wavelength structures for improvement of the extraction efficiency and color rendering index of monolithic white light-emitting diode,” Opt. Express 19, A166–A172 (2011).
[CrossRef] [PubMed]

L. Sainiemi, V. Jokinen, A. Shah, M. Shpak, S. Aura, P. Suvanto, and S. Franssila, “Non-reflcecting silicon and polymer surfaces by plasma etching and replication,” Adv. Mater. 23, 122–126 (2011).
[CrossRef]

N. Yamada, T. Ijiro, E. Okamoto, K. Hayashi, and H. Masuda, “Characterization of antireflection moth-eye film on crystalline silicon photovoltaic module,” Opt. Express 19, A118–A125 (2011).
[CrossRef] [PubMed]

J. W. Leem, Y. M. Song, and J. S. Yu, “Broadband wide-angle antireflection enhancement in AZO/Si shell/core subwavelength grating structures with hydrophobic surface for Si-based solar cells,” Opt. Express 19, A1155–A1164 (2011).
[CrossRef] [PubMed]

M. Kang, S. Joo, W. Bahng, J. Lee, N. Kim, and S. Koo, “Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes,” Nanoscale Res. Lett. 6, 236 (2011).
[CrossRef] [PubMed]

2010 (3)

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

C. Shen, K. Li, Q. Hou, H. Feng, and X. Dong, “White LED based on YAG: Ce, Gd phosphor and CdSe-ZnS core/shell quantum dots,” IEEE Photon. Technol. Lett. 22, 884–886 (2010).
[CrossRef]

C. Chang, C. Chen, C. Wu, S. Chang, J. Hung, and Y. Chi, “High-color-rendering pure-white phosphorescent organic light-emitting devices employing only two complementary colors,” Org. Electron. 11, 266–272 (2010).
[CrossRef]

2009 (2)

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94, 263118 (2009).
[CrossRef]

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

2007 (1)

S. S. Pan, C. Ye, X. M. Teng, and G. H. Li, “Angle-dependent photoluminescence of [110]-oriented nitrogen-doped SnO2 films,” J. Phys. D: Appl. Phys. 40, 4771–4774 (2007).
[CrossRef]

2006 (1)

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

2005 (1)

R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
[CrossRef]

2002 (1)

D. Sotta, E. Hadji, N. Magnea, E. Delamadeleine, P. Besson, P. Renard, and H. Moriceau, “Resonant optical microcavity based on crystalline silicon active layer,” J. Appl. Phys. 92, 2207–2209 (2002).
[CrossRef]

Abbott, S.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94, 263118 (2009).
[CrossRef]

Akasaki, I.

S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki, M. Syväjärvi, and R. Yakimova, “Fluorescent SiC and its application to white light-emitting diodes,” J. Semicond. 32, 013004 (2011).
[CrossRef]

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Allsopp, D. W. E.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94, 263118 (2009).
[CrossRef]

Amano, H.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Aura, S.

L. Sainiemi, V. Jokinen, A. Shah, M. Shpak, S. Aura, P. Suvanto, and S. Franssila, “Non-reflcecting silicon and polymer surfaces by plasma etching and replication,” Adv. Mater. 23, 122–126 (2011).
[CrossRef]

Bahng, W.

M. Kang, S. Joo, W. Bahng, J. Lee, N. Kim, and S. Koo, “Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes,” Nanoscale Res. Lett. 6, 236 (2011).
[CrossRef] [PubMed]

Berg, R. W.

Bergman, J. P.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Besson, P.

D. Sotta, E. Hadji, N. Magnea, E. Delamadeleine, P. Besson, P. Renard, and H. Moriceau, “Resonant optical microcavity based on crystalline silicon active layer,” J. Appl. Phys. 92, 2207–2209 (2002).
[CrossRef]

Chang, C.

C. Chang, C. Chen, C. Wu, S. Chang, J. Hung, and Y. Chi, “High-color-rendering pure-white phosphorescent organic light-emitting devices employing only two complementary colors,” Org. Electron. 11, 266–272 (2010).
[CrossRef]

Chang, S.

C. Chang, C. Chen, C. Wu, S. Chang, J. Hung, and Y. Chi, “High-color-rendering pure-white phosphorescent organic light-emitting devices employing only two complementary colors,” Org. Electron. 11, 266–272 (2010).
[CrossRef]

Chen, C.

H. Kuo, C. Hung, H. Chen, K. Chen, C. Wang, C. Sher, C. Yeh, C. Lin, C. Chen, and Y. Cheng, “Patterned structure of remote phosphor for phosphor-converted white LEDs,” Opt. Express 19, A930–A936 (2011).
[CrossRef] [PubMed]

C. Chang, C. Chen, C. Wu, S. Chang, J. Hung, and Y. Chi, “High-color-rendering pure-white phosphorescent organic light-emitting devices employing only two complementary colors,” Org. Electron. 11, 266–272 (2010).
[CrossRef]

Chen, H.

Chen, K.

Chen, M.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

Chen, Q.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94, 263118 (2009).
[CrossRef]

Cheng, Y.

Chi, Y.

C. Chang, C. Chen, C. Wu, S. Chang, J. Hung, and Y. Chi, “High-color-rendering pure-white phosphorescent organic light-emitting devices employing only two complementary colors,” Org. Electron. 11, 266–272 (2010).
[CrossRef]

Chichibu, S. F.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Corell, D.

Dam-Hansen, C.

Delamadeleine, E.

D. Sotta, E. Hadji, N. Magnea, E. Delamadeleine, P. Besson, P. Renard, and H. Moriceau, “Resonant optical microcavity based on crystalline silicon active layer,” J. Appl. Phys. 92, 2207–2209 (2002).
[CrossRef]

Dong, X.

C. Shen, K. Li, Q. Hou, H. Feng, and X. Dong, “White LED based on YAG: Ce, Gd phosphor and CdSe-ZnS core/shell quantum dots,” IEEE Photon. Technol. Lett. 22, 884–886 (2010).
[CrossRef]

Feng, H.

C. Shen, K. Li, Q. Hou, H. Feng, and X. Dong, “White LED based on YAG: Ce, Gd phosphor and CdSe-ZnS core/shell quantum dots,” IEEE Photon. Technol. Lett. 22, 884–886 (2010).
[CrossRef]

Franssila, S.

L. Sainiemi, V. Jokinen, A. Shah, M. Shpak, S. Aura, P. Suvanto, and S. Franssila, “Non-reflcecting silicon and polymer surfaces by plasma etching and replication,” Adv. Mater. 23, 122–126 (2011).
[CrossRef]

Furusho, T.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Gilstrap, R. A.

Hadji, E.

D. Sotta, E. Hadji, N. Magnea, E. Delamadeleine, P. Besson, P. Renard, and H. Moriceau, “Resonant optical microcavity based on crystalline silicon active layer,” J. Appl. Phys. 92, 2207–2209 (2002).
[CrossRef]

Hayashi, K.

Henry, A.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Höppe, H. A.

R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
[CrossRef]

Hou, Q.

C. Shen, K. Li, Q. Hou, H. Feng, and X. Dong, “White LED based on YAG: Ce, Gd phosphor and CdSe-ZnS core/shell quantum dots,” IEEE Photon. Technol. Lett. 22, 884–886 (2010).
[CrossRef]

Hubbard, G.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94, 263118 (2009).
[CrossRef]

Hung, C.

Hung, J.

C. Chang, C. Chen, C. Wu, S. Chang, J. Hung, and Y. Chi, “High-color-rendering pure-white phosphorescent organic light-emitting devices employing only two complementary colors,” Org. Electron. 11, 266–272 (2010).
[CrossRef]

Ijiro, T.

Ivanov, I. G.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Iwaya, M.

S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki, M. Syväjärvi, and R. Yakimova, “Fluorescent SiC and its application to white light-emitting diodes,” J. Semicond. 32, 013004 (2011).
[CrossRef]

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Jokinen, V.

L. Sainiemi, V. Jokinen, A. Shah, M. Shpak, S. Aura, P. Suvanto, and S. Franssila, “Non-reflcecting silicon and polymer surfaces by plasma etching and replication,” Adv. Mater. 23, 122–126 (2011).
[CrossRef]

Jokubavicius, V.

Joo, S.

M. Kang, S. Joo, W. Bahng, J. Lee, N. Kim, and S. Koo, “Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes,” Nanoscale Res. Lett. 6, 236 (2011).
[CrossRef] [PubMed]

Juestel, T.

R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
[CrossRef]

Kamiyama, S.

Y. Ou, V. Jokubavicius, S. Kamiyama, C. Liu, R. W. Berg, M. Linnarsson, R. Yakimova, M. Syväjärvi, and H. Ou, “Donor-acceptor-pair emission characterization in N-B doped fluorescent SiC,” Opt. Mater. Express 1, 1439–1446 (2011).
[CrossRef]

S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki, M. Syväjärvi, and R. Yakimova, “Fluorescent SiC and its application to white light-emitting diodes,” J. Semicond. 32, 013004 (2011).
[CrossRef]

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Kaneko, Y.

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

Kang, M.

M. Kang, S. Joo, W. Bahng, J. Lee, N. Kim, and S. Koo, “Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes,” Nanoscale Res. Lett. 6, 236 (2011).
[CrossRef] [PubMed]

Kawai, R.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

Kim, N.

M. Kang, S. Joo, W. Bahng, J. Lee, N. Kim, and S. Koo, “Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes,” Nanoscale Res. Lett. 6, 236 (2011).
[CrossRef] [PubMed]

Kimoto, T.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Kinoshita, H.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Kitano, T.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

Kondo, T.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

Koo, S.

M. Kang, S. Joo, W. Bahng, J. Lee, N. Kim, and S. Koo, “Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes,” Nanoscale Res. Lett. 6, 236 (2011).
[CrossRef] [PubMed]

Krames, M. R.

R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
[CrossRef]

Kuo, H.

Lee, J.

M. Kang, S. Joo, W. Bahng, J. Lee, N. Kim, and S. Koo, “Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes,” Nanoscale Res. Lett. 6, 236 (2011).
[CrossRef] [PubMed]

Leem, J. W.

Li, A.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

Li, G. H.

S. S. Pan, C. Ye, X. M. Teng, and G. H. Li, “Angle-dependent photoluminescence of [110]-oriented nitrogen-doped SnO2 films,” J. Phys. D: Appl. Phys. 40, 4771–4774 (2007).
[CrossRef]

Li, K.

C. Shen, K. Li, Q. Hou, H. Feng, and X. Dong, “White LED based on YAG: Ce, Gd phosphor and CdSe-ZnS core/shell quantum dots,” IEEE Photon. Technol. Lett. 22, 884–886 (2010).
[CrossRef]

Lin, C.

Linnarsson, M.

Liu, C.

Y. Ou, V. Jokubavicius, S. Kamiyama, C. Liu, R. W. Berg, M. Linnarsson, R. Yakimova, M. Syväjärvi, and H. Ou, “Donor-acceptor-pair emission characterization in N-B doped fluorescent SiC,” Opt. Mater. Express 1, 1439–1446 (2011).
[CrossRef]

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94, 263118 (2009).
[CrossRef]

Mabuchi, S.

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

Maeda, T.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Magnea, N.

D. Sotta, E. Hadji, N. Magnea, E. Delamadeleine, P. Besson, P. Renard, and H. Moriceau, “Resonant optical microcavity based on crystalline silicon active layer,” J. Appl. Phys. 92, 2207–2209 (2002).
[CrossRef]

Masuda, H.

Menkara, H.

Minkara, M.

Monemar, B.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Moriceau, H.

D. Sotta, E. Hadji, N. Magnea, E. Delamadeleine, P. Besson, P. Renard, and H. Moriceau, “Resonant optical microcavity based on crystalline silicon active layer,” J. Appl. Phys. 92, 2207–2209 (2002).
[CrossRef]

Morris, T.

Mueller, G.

R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
[CrossRef]

Mueller-Mach, R.

R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
[CrossRef]

Nakamura, Y.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Okamoto, E.

Onuma, T.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Ou, H.

Ou, Y.

Pan, S. S.

S. S. Pan, C. Ye, X. M. Teng, and G. H. Li, “Angle-dependent photoluminescence of [110]-oriented nitrogen-doped SnO2 films,” J. Phys. D: Appl. Phys. 40, 4771–4774 (2007).
[CrossRef]

Petersen, P.

Renard, P.

D. Sotta, E. Hadji, N. Magnea, E. Delamadeleine, P. Besson, P. Renard, and H. Moriceau, “Resonant optical microcavity based on crystalline silicon active layer,” J. Appl. Phys. 92, 2207–2209 (2002).
[CrossRef]

Sainiemi, L.

L. Sainiemi, V. Jokinen, A. Shah, M. Shpak, S. Aura, P. Suvanto, and S. Franssila, “Non-reflcecting silicon and polymer surfaces by plasma etching and replication,” Adv. Mater. 23, 122–126 (2011).
[CrossRef]

Sakurai, H.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

Schmidt, P.

R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
[CrossRef]

Schnick, W.

R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
[CrossRef]

Seko, T.

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

Shah, A.

L. Sainiemi, V. Jokinen, A. Shah, M. Shpak, S. Aura, P. Suvanto, and S. Franssila, “Non-reflcecting silicon and polymer surfaces by plasma etching and replication,” Adv. Mater. 23, 122–126 (2011).
[CrossRef]

Shen, C.

C. Shen, K. Li, Q. Hou, H. Feng, and X. Dong, “White LED based on YAG: Ce, Gd phosphor and CdSe-ZnS core/shell quantum dots,” IEEE Photon. Technol. Lett. 22, 884–886 (2010).
[CrossRef]

Sher, C.

Shields, P. A.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94, 263118 (2009).
[CrossRef]

Shpak, M.

L. Sainiemi, V. Jokinen, A. Shah, M. Shpak, S. Aura, P. Suvanto, and S. Franssila, “Non-reflcecting silicon and polymer surfaces by plasma etching and replication,” Adv. Mater. 23, 122–126 (2011).
[CrossRef]

Song, Y. M.

Sotta, D.

D. Sotta, E. Hadji, N. Magnea, E. Delamadeleine, P. Besson, P. Renard, and H. Moriceau, “Resonant optical microcavity based on crystalline silicon active layer,” J. Appl. Phys. 92, 2207–2209 (2002).
[CrossRef]

Stadler, F.

R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
[CrossRef]

Su, K.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

Suda, J.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Summers, C. J.

Suvanto, P.

L. Sainiemi, V. Jokinen, A. Shah, M. Shpak, S. Aura, P. Suvanto, and S. Franssila, “Non-reflcecting silicon and polymer surfaces by plasma etching and replication,” Adv. Mater. 23, 122–126 (2011).
[CrossRef]

Suzuki, A.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

Syväjärvi, M.

Y. Ou, V. Jokubavicius, S. Kamiyama, C. Liu, R. W. Berg, M. Linnarsson, R. Yakimova, M. Syväjärvi, and H. Ou, “Donor-acceptor-pair emission characterization in N-B doped fluorescent SiC,” Opt. Mater. Express 1, 1439–1446 (2011).
[CrossRef]

S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki, M. Syväjärvi, and R. Yakimova, “Fluorescent SiC and its application to white light-emitting diodes,” J. Semicond. 32, 013004 (2011).
[CrossRef]

M. Syväjärvi and R. Yakimova, “Sublimation epitaxial growth of hexagonal and cubic SiC,” in Encyclopedia - the Comprehensive Semiconductor Science and Technology, P. Bhattacharya, R. Fornari, and H. Kamimura, eds. (Elsevier, 2011).
[CrossRef]

Takeuchi, T.

S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki, M. Syväjärvi, and R. Yakimova, “Fluorescent SiC and its application to white light-emitting diodes,” J. Semicond. 32, 013004 (2011).
[CrossRef]

Tamura, K.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

Teng, X. M.

S. S. Pan, C. Ye, X. M. Teng, and G. H. Li, “Angle-dependent photoluminescence of [110]-oriented nitrogen-doped SnO2 films,” J. Phys. D: Appl. Phys. 40, 4771–4774 (2007).
[CrossRef]

Teramae, F.

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

Wagner, B. K.

Wang, C.

Wang, W. N.

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94, 263118 (2009).
[CrossRef]

Wu, C.

C. Chang, C. Chen, C. Wu, S. Chang, J. Hung, and Y. Chi, “High-color-rendering pure-white phosphorescent organic light-emitting devices employing only two complementary colors,” Org. Electron. 11, 266–272 (2010).
[CrossRef]

Yakimova, R.

Y. Ou, V. Jokubavicius, S. Kamiyama, C. Liu, R. W. Berg, M. Linnarsson, R. Yakimova, M. Syväjärvi, and H. Ou, “Donor-acceptor-pair emission characterization in N-B doped fluorescent SiC,” Opt. Mater. Express 1, 1439–1446 (2011).
[CrossRef]

S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki, M. Syväjärvi, and R. Yakimova, “Fluorescent SiC and its application to white light-emitting diodes,” J. Semicond. 32, 013004 (2011).
[CrossRef]

M. Syväjärvi and R. Yakimova, “Sublimation epitaxial growth of hexagonal and cubic SiC,” in Encyclopedia - the Comprehensive Semiconductor Science and Technology, P. Bhattacharya, R. Fornari, and H. Kamimura, eds. (Elsevier, 2011).
[CrossRef]

Yamada, N.

Ye, C.

S. S. Pan, C. Ye, X. M. Teng, and G. H. Li, “Angle-dependent photoluminescence of [110]-oriented nitrogen-doped SnO2 films,” J. Phys. D: Appl. Phys. 40, 4771–4774 (2007).
[CrossRef]

Yeh, C.

Yoshi-moto, M.

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

Yu, J. S.

Adv. Mater. (1)

L. Sainiemi, V. Jokinen, A. Shah, M. Shpak, S. Aura, P. Suvanto, and S. Franssila, “Non-reflcecting silicon and polymer surfaces by plasma etching and replication,” Adv. Mater. 23, 122–126 (2011).
[CrossRef]

Appl. Phys. Lett. (1)

Q. Chen, G. Hubbard, P. A. Shields, C. Liu, D. W. E. Allsopp, W. N. Wang, and S. Abbott, “Broadband moth-eye antireflection coatings fabricated by low-cost nanoimprinting,” Appl. Phys. Lett. 94, 263118 (2009).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

C. Shen, K. Li, Q. Hou, H. Feng, and X. Dong, “White LED based on YAG: Ce, Gd phosphor and CdSe-ZnS core/shell quantum dots,” IEEE Photon. Technol. Lett. 22, 884–886 (2010).
[CrossRef]

J. Appl. Phys. (2)

S. Kamiyama, T. Maeda, Y. Nakamura, M. Iwaya, H. Amano, I. Akasaki, H. Kinoshita, T. Furusho, M. Yoshi-moto, T. Kimoto, J. Suda, A. Henry, I. G. Ivanov, J. P. Bergman, B. Monemar, T. Onuma, and S. F. Chichibu, “Extremely high quantum efficiency of donor-acceptor-pair emission in N-and-B-doped 6H-SiC,” J. Appl. Phys. 99, 093108 (2006).
[CrossRef]

D. Sotta, E. Hadji, N. Magnea, E. Delamadeleine, P. Besson, P. Renard, and H. Moriceau, “Resonant optical microcavity based on crystalline silicon active layer,” J. Appl. Phys. 92, 2207–2209 (2002).
[CrossRef]

J. Phys. D: Appl. Phys. (1)

S. S. Pan, C. Ye, X. M. Teng, and G. H. Li, “Angle-dependent photoluminescence of [110]-oriented nitrogen-doped SnO2 films,” J. Phys. D: Appl. Phys. 40, 4771–4774 (2007).
[CrossRef]

J. Semicond. (1)

S. Kamiyama, M. Iwaya, T. Takeuchi, I. Akasaki, M. Syväjärvi, and R. Yakimova, “Fluorescent SiC and its application to white light-emitting diodes,” J. Semicond. 32, 013004 (2011).
[CrossRef]

Nanoscale Res. Lett. (1)

M. Kang, S. Joo, W. Bahng, J. Lee, N. Kim, and S. Koo, “Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes,” Nanoscale Res. Lett. 6, 236 (2011).
[CrossRef] [PubMed]

Opt. Express (5)

Opt. Mater. Express (1)

Org. Electron. (1)

C. Chang, C. Chen, C. Wu, S. Chang, J. Hung, and Y. Chi, “High-color-rendering pure-white phosphorescent organic light-emitting devices employing only two complementary colors,” Org. Electron. 11, 266–272 (2010).
[CrossRef]

Phys. Status Solidi A (1)

R. Mueller-Mach, G. Mueller, M. R. Krames, H. A. Höppe, F. Stadler, W. Schnick, T. Juestel, and P. Schmidt, “Highly efficient all-nitride phosphor-converted white light emitting diode,” Phys. Status Solidi A 202, 1727–1732 (2005).
[CrossRef]

Phys. Status Solidi C (1)

R. Kawai, T. Kondo, A. Suzuki, F. Teramae, T. Kitano, K. Tamura, H. Sakurai, M. Iwaya, H. Amano, S. Kamiyama, I. Akasaki, M. Chen, A. Li, and K. Su, “Realization of extreme light extraction efficiency for moth-eye LEDs on SiC substrate using high-reflection electrode,” Phys. Status Solidi C 7, 2180–2182 (2010).
[CrossRef]

Proc. SPIE (1)

T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, and I. Akasaki, “Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-lightemitting diode on SiC substrate,” Proc. SPIE 7216, 721628 (2009).
[CrossRef]

Other (1)

M. Syväjärvi and R. Yakimova, “Sublimation epitaxial growth of hexagonal and cubic SiC,” in Encyclopedia - the Comprehensive Semiconductor Science and Technology, P. Bhattacharya, R. Fornari, and H. Kamimura, eds. (Elsevier, 2011).
[CrossRef]

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Figures (3)

Fig. 1
Fig. 1

Schematic illustrations of the SiC ARS fabrication process steps (a)–(f).

Fig. 2
Fig. 2

(a) An oblique-view SEM figure of the SiC sample with ARS, and (b) reflectance spectra of the SiC samples with and without ARS (measured at 6 deg.).

Fig. 3
Fig. 3

Angle-resolved photoluminescence spectra from 20, 30, 40, 50, 60, to 70 deg. for the SiC samples (a) without and (b) with ARS; (c) integrated luminescence intensities and the (d) luminescence enhancement of the two SiC samples.

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