Fabrication of three-dimensional microfluidic channels inside glass using nanosecond laser direct writing

Y. Hanada, K. Sugioka, I. Shihira-Ishikawa, H. Kawano, A. Miyawaki, and K. Midorikawa, “3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria,” Lab Chip 11(12), 2109–2115 (2011).
[Crossref] [PubMed]

A. Schaap, Y. Bellouard, and T. Rohrlack, “Optofluidic lab-on-a-chip for rapid algae population screening,” Biomed. Opt. Express 2(3), 658–664 (2011).
[Crossref] [PubMed]

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining,” Microfluid. Nanofluid. 11(1), 111–117 (2011).
[Crossref]

K. Sugioka, Y. Hanada, and K. Midorikawa, “Three-dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips,” Laser Photon. Rev. 4(3), 386–400 (2010).
[Crossref]

F. Venturini, W. Navarrini, G. Resnati, P. Metrangolo, R. M. Vazquez, R. Osellame, and G. Cerullo, “Selective iterative etching of fused silica with gaseous hydrofluoric acid,” J. Phys. Chem. C 114(43), 18712–18716 (2010).
[Crossref]

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing,” Opt. Lett. 35(19), 3225–3227 (2010).
[Crossref] [PubMed]

F. Bragheri, L. Ferrara, N. Bellini, K. C. Vishnubhatla, P. Minzionil, R. Ramponi, R. Osellame, and I. Cristiani, “Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond,” J. Biophoton. 3, 234–243 (2010).

S. Rajesh and Y. Bellouard, “Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy,” Opt. Express 18(20), 21490–21497 (2010).
[Crossref] [PubMed]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

C. Lee, T. Chang, S. Wang, C. Chien, and C. Cheng, “Using femtosecond laser to fabricate highly precise interior three-dimensional microstructures in polymeric flow chip,” Biomicrofluid. 4(4), 046502 (2010).
[Crossref]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

M. Kim, D. J. Hwang, H. Jeon, K. Hiromatsu, and C. P. Grigoropoulos, “Single cell detection using a glass-based optofluidic device fabricated by femtosecond laser pulses,” Lab Chip 9(2), 311–318 (2009).
[Crossref] [PubMed]

Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, “Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass,” Biomed. Microdevices 10(3), 403–410 (2008).
[Crossref] [PubMed]

G. M. Whitesides, “The origins and the future of microfluidics,” Nature 442(7101), 368–373 (2006).
[Crossref] [PubMed]

C. Vass, K. Osvay, and B. Hopp, “Fabrication of 150 nm period grating in fused silica by two-beam interferometric laser induced backside wet etching method,” Opt. Express 14(18), 8354–8359 (2006).
[Crossref] [PubMed]

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, “Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 83(1), 27–29 (2006).
[Crossref]

K. Sugioka, Y. Cheng, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture,” Appl. Phys., A Mater. Sci. Process. 81(1), 1–10 (2005).
[Crossref]

K. Ke, E. F. Hasselbrink, and A. J. Hunt, “Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates,” Anal. Chem. 77(16), 5083–5088 (2005).
[Crossref] [PubMed]

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, “Colorless transparent fluorescence material: sintered porous glass containing rare-earth and transition-metal ions,” Appl. Phys. Lett. 86(23), 231908 (2005).
[Crossref]

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for lab-on-a-chip applications,” Appl. Surf. Sci. 248(1-4), 172–176 (2005).
[Crossref]

J. Cheng, C. Wei, K. Hsu, and T. Young, “Direct-write laser micromachining and universal surface modification of PMMA for device development,” Sens. Actuators B Chem. 99(1), 186–196 (2004).
[Crossref]

M. S. Giridhar, K. Seong, A. Schülzgen, P. Khulbe, N. Peyghambarian, and M. Mansuripur, “Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices,” Appl. Opt. 43(23), 4584–4589 (2004).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing,” Opt. Lett. 29(17), 2007–2009 (2004).
[Crossref] [PubMed]

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys., A Mater. Sci. Process. 79(3), 605–612 (2004).
[Crossref]

H. Niino, Y. Yasui, X. Ding, A. Narazaki, T. Sato, Y. Kawaguchi, and A. Yabe, “Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent,” J. Photochem. Photobiol. Chem. 158(2-3), 179–182 (2003).
[Crossref]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28(13), 1144–1146 (2003).
[Crossref] [PubMed]

A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277–279 (2001).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref] [PubMed]

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, “Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer,” J. Microelectromech. Syst. 9(1), 76–81 (2000).
[Crossref]

J. Wang, H. Niino, and A. Yabe, “One-step microfabrication of fused silica by laser ablation of an organic solution,” Appl. Phys., A Mater. Sci. Process. 68(1), 111–113 (1999).
[Crossref]

A. Manz, N. Graber, and H. M. Widmer, “Miniaturized total chemical analysis systems: a novel concept for chemical sensing,” Sens. Actuators B Chem. 1(1-6), 244–248 (1990).
[Crossref]

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, “Colorless transparent fluorescence material: sintered porous glass containing rare-earth and transition-metal ions,” Appl. Phys. Lett. 86(23), 231908 (2005).
[Crossref]

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, “Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 83(1), 27–29 (2006).
[Crossref]

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, “Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer,” J. Microelectromech. Syst. 9(1), 76–81 (2000).
[Crossref]

F. Bragheri, L. Ferrara, N. Bellini, K. C. Vishnubhatla, P. Minzionil, R. Ramponi, R. Osellame, and I. Cristiani, “Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond,” J. Biophoton. 3, 234–243 (2010).

A. Schaap, Y. Bellouard, and T. Rohrlack, “Optofluidic lab-on-a-chip for rapid algae population screening,” Biomed. Opt. Express 2(3), 658–664 (2011).
[Crossref] [PubMed]

S. Rajesh and Y. Bellouard, “Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy,” Opt. Express 18(20), 21490–21497 (2010).
[Crossref] [PubMed]

F. Bragheri, L. Ferrara, N. Bellini, K. C. Vishnubhatla, P. Minzionil, R. Ramponi, R. Osellame, and I. Cristiani, “Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond,” J. Biophoton. 3, 234–243 (2010).

F. Venturini, W. Navarrini, G. Resnati, P. Metrangolo, R. M. Vazquez, R. Osellame, and G. Cerullo, “Selective iterative etching of fused silica with gaseous hydrofluoric acid,” J. Phys. Chem. C 114(43), 18712–18716 (2010).
[Crossref]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

C. Lee, T. Chang, S. Wang, C. Chien, and C. Cheng, “Using femtosecond laser to fabricate highly precise interior three-dimensional microstructures in polymeric flow chip,” Biomicrofluid. 4(4), 046502 (2010).
[Crossref]

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining,” Microfluid. Nanofluid. 11(1), 111–117 (2011).
[Crossref]

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing,” Opt. Lett. 35(19), 3225–3227 (2010).
[Crossref] [PubMed]

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, “Colorless transparent fluorescence material: sintered porous glass containing rare-earth and transition-metal ions,” Appl. Phys. Lett. 86(23), 231908 (2005).
[Crossref]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

C. Lee, T. Chang, S. Wang, C. Chien, and C. Cheng, “Using femtosecond laser to fabricate highly precise interior three-dimensional microstructures in polymeric flow chip,” Biomicrofluid. 4(4), 046502 (2010).
[Crossref]

J. Cheng, C. Wei, K. Hsu, and T. Young, “Direct-write laser micromachining and universal surface modification of PMMA for device development,” Sens. Actuators B Chem. 99(1), 186–196 (2004).
[Crossref]

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining,” Microfluid. Nanofluid. 11(1), 111–117 (2011).
[Crossref]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing,” Opt. Lett. 35(19), 3225–3227 (2010).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for lab-on-a-chip applications,” Appl. Surf. Sci. 248(1-4), 172–176 (2005).
[Crossref]

K. Sugioka, Y. Cheng, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture,” Appl. Phys., A Mater. Sci. Process. 81(1), 1–10 (2005).
[Crossref]

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing,” Opt. Lett. 29(17), 2007–2009 (2004).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28(13), 1144–1146 (2003).
[Crossref] [PubMed]

C. Lee, T. Chang, S. Wang, C. Chien, and C. Cheng, “Using femtosecond laser to fabricate highly precise interior three-dimensional microstructures in polymeric flow chip,” Biomicrofluid. 4(4), 046502 (2010).
[Crossref]

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys., A Mater. Sci. Process. 79(3), 605–612 (2004).
[Crossref]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

F. Bragheri, L. Ferrara, N. Bellini, K. C. Vishnubhatla, P. Minzionil, R. Ramponi, R. Osellame, and I. Cristiani, “Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond,” J. Biophoton. 3, 234–243 (2010).

H. Niino, Y. Yasui, X. Ding, A. Narazaki, T. Sato, Y. Kawaguchi, and A. Yabe, “Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent,” J. Photochem. Photobiol. Chem. 158(2-3), 179–182 (2003).
[Crossref]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, “Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 83(1), 27–29 (2006).
[Crossref]

F. Bragheri, L. Ferrara, N. Bellini, K. C. Vishnubhatla, P. Minzionil, R. Ramponi, R. Osellame, and I. Cristiani, “Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond,” J. Biophoton. 3, 234–243 (2010).

M. S. Giridhar, K. Seong, A. Schülzgen, P. Khulbe, N. Peyghambarian, and M. Mansuripur, “Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices,” Appl. Opt. 43(23), 4584–4589 (2004).
[Crossref] [PubMed]

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, “Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 83(1), 27–29 (2006).
[Crossref]

A. Manz, N. Graber, and H. M. Widmer, “Miniaturized total chemical analysis systems: a novel concept for chemical sensing,” Sens. Actuators B Chem. 1(1-6), 244–248 (1990).
[Crossref]

M. Kim, D. J. Hwang, H. Jeon, K. Hiromatsu, and C. P. Grigoropoulos, “Single cell detection using a glass-based optofluidic device fabricated by femtosecond laser pulses,” Lab Chip 9(2), 311–318 (2009).
[Crossref] [PubMed]

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys., A Mater. Sci. Process. 79(3), 605–612 (2004).
[Crossref]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

Y. Hanada, K. Sugioka, I. Shihira-Ishikawa, H. Kawano, A. Miyawaki, and K. Midorikawa, “3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria,” Lab Chip 11(12), 2109–2115 (2011).
[Crossref] [PubMed]

K. Sugioka, Y. Hanada, and K. Midorikawa, “Three-dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips,” Laser Photon. Rev. 4(3), 386–400 (2010).
[Crossref]

Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, “Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass,” Biomed. Microdevices 10(3), 403–410 (2008).
[Crossref] [PubMed]

K. Ke, E. F. Hasselbrink, and A. J. Hunt, “Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates,” Anal. Chem. 77(16), 5083–5088 (2005).
[Crossref] [PubMed]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing,” Opt. Lett. 35(19), 3225–3227 (2010).
[Crossref] [PubMed]

M. Kim, D. J. Hwang, H. Jeon, K. Hiromatsu, and C. P. Grigoropoulos, “Single cell detection using a glass-based optofluidic device fabricated by femtosecond laser pulses,” Lab Chip 9(2), 311–318 (2009).
[Crossref] [PubMed]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

C. Vass, K. Osvay, and B. Hopp, “Fabrication of 150 nm period grating in fused silica by two-beam interferometric laser induced backside wet etching method,” Opt. Express 14(18), 8354–8359 (2006).
[Crossref] [PubMed]

J. Cheng, C. Wei, K. Hsu, and T. Young, “Direct-write laser micromachining and universal surface modification of PMMA for device development,” Sens. Actuators B Chem. 99(1), 186–196 (2004).
[Crossref]

K. Ke, E. F. Hasselbrink, and A. J. Hunt, “Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates,” Anal. Chem. 77(16), 5083–5088 (2005).
[Crossref] [PubMed]

M. Kim, D. J. Hwang, H. Jeon, K. Hiromatsu, and C. P. Grigoropoulos, “Single cell detection using a glass-based optofluidic device fabricated by femtosecond laser pulses,” Lab Chip 9(2), 311–318 (2009).
[Crossref] [PubMed]

D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, “Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass,” Appl. Phys., A Mater. Sci. Process. 79(3), 605–612 (2004).
[Crossref]

Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, “Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass,” Biomed. Microdevices 10(3), 403–410 (2008).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref] [PubMed]

M. Kim, D. J. Hwang, H. Jeon, K. Hiromatsu, and C. P. Grigoropoulos, “Single cell detection using a glass-based optofluidic device fabricated by femtosecond laser pulses,” Lab Chip 9(2), 311–318 (2009).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref] [PubMed]

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, “Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer,” J. Microelectromech. Syst. 9(1), 76–81 (2000).
[Crossref]

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining,” Microfluid. Nanofluid. 11(1), 111–117 (2011).
[Crossref]

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing,” Opt. Lett. 35(19), 3225–3227 (2010).
[Crossref] [PubMed]

A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277–279 (2001).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28(13), 1144–1146 (2003).
[Crossref] [PubMed]

H. Niino, Y. Yasui, X. Ding, A. Narazaki, T. Sato, Y. Kawaguchi, and A. Yabe, “Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent,” J. Photochem. Photobiol. Chem. 158(2-3), 179–182 (2003).
[Crossref]

Y. Hanada, K. Sugioka, I. Shihira-Ishikawa, H. Kawano, A. Miyawaki, and K. Midorikawa, “3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria,” Lab Chip 11(12), 2109–2115 (2011).
[Crossref] [PubMed]

Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, “Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass,” Biomed. Microdevices 10(3), 403–410 (2008).
[Crossref] [PubMed]

K. Ke, E. F. Hasselbrink, and A. J. Hunt, “Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates,” Anal. Chem. 77(16), 5083–5088 (2005).
[Crossref] [PubMed]

M. S. Giridhar, K. Seong, A. Schülzgen, P. Khulbe, N. Peyghambarian, and M. Mansuripur, “Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices,” Appl. Opt. 43(23), 4584–4589 (2004).
[Crossref] [PubMed]

M. Kim, D. J. Hwang, H. Jeon, K. Hiromatsu, and C. P. Grigoropoulos, “Single cell detection using a glass-based optofluidic device fabricated by femtosecond laser pulses,” Lab Chip 9(2), 311–318 (2009).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref] [PubMed]

C. Lee, T. Chang, S. Wang, C. Chien, and C. Cheng, “Using femtosecond laser to fabricate highly precise interior three-dimensional microstructures in polymeric flow chip,” Biomicrofluid. 4(4), 046502 (2010).
[Crossref]

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, “Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 83(1), 27–29 (2006).
[Crossref]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref] [PubMed]

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining,” Microfluid. Nanofluid. 11(1), 111–117 (2011).
[Crossref]

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing,” Opt. Lett. 35(19), 3225–3227 (2010).
[Crossref] [PubMed]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, “Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 83(1), 27–29 (2006).
[Crossref]

M. S. Giridhar, K. Seong, A. Schülzgen, P. Khulbe, N. Peyghambarian, and M. Mansuripur, “Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices,” Appl. Opt. 43(23), 4584–4589 (2004).
[Crossref] [PubMed]

A. Manz, N. Graber, and H. M. Widmer, “Miniaturized total chemical analysis systems: a novel concept for chemical sensing,” Sens. Actuators B Chem. 1(1-6), 244–248 (1990).
[Crossref]

A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277–279 (2001).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28(13), 1144–1146 (2003).
[Crossref] [PubMed]

A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277–279 (2001).
[Crossref] [PubMed]

F. Venturini, W. Navarrini, G. Resnati, P. Metrangolo, R. M. Vazquez, R. Osellame, and G. Cerullo, “Selective iterative etching of fused silica with gaseous hydrofluoric acid,” J. Phys. Chem. C 114(43), 18712–18716 (2010).
[Crossref]

Y. Hanada, K. Sugioka, I. Shihira-Ishikawa, H. Kawano, A. Miyawaki, and K. Midorikawa, “3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria,” Lab Chip 11(12), 2109–2115 (2011).
[Crossref] [PubMed]

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining,” Microfluid. Nanofluid. 11(1), 111–117 (2011).
[Crossref]

K. Sugioka, Y. Hanada, and K. Midorikawa, “Three-dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips,” Laser Photon. Rev. 4(3), 386–400 (2010).
[Crossref]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing,” Opt. Lett. 35(19), 3225–3227 (2010).
[Crossref] [PubMed]

Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, “Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass,” Biomed. Microdevices 10(3), 403–410 (2008).
[Crossref] [PubMed]

K. Sugioka, Y. Cheng, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture,” Appl. Phys., A Mater. Sci. Process. 81(1), 1–10 (2005).
[Crossref]

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for lab-on-a-chip applications,” Appl. Surf. Sci. 248(1-4), 172–176 (2005).
[Crossref]

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing,” Opt. Lett. 29(17), 2007–2009 (2004).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28(13), 1144–1146 (2003).
[Crossref] [PubMed]

F. Bragheri, L. Ferrara, N. Bellini, K. C. Vishnubhatla, P. Minzionil, R. Ramponi, R. Osellame, and I. Cristiani, “Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond,” J. Biophoton. 3, 234–243 (2010).

A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277–279 (2001).
[Crossref] [PubMed]

A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277–279 (2001).
[Crossref] [PubMed]

Y. Hanada, K. Sugioka, I. Shihira-Ishikawa, H. Kawano, A. Miyawaki, and K. Midorikawa, “3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria,” Lab Chip 11(12), 2109–2115 (2011).
[Crossref] [PubMed]

Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, “Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass,” Biomed. Microdevices 10(3), 403–410 (2008).
[Crossref] [PubMed]

D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, “Colorless transparent fluorescence material: sintered porous glass containing rare-earth and transition-metal ions,” Appl. Phys. Lett. 86(23), 231908 (2005).
[Crossref]

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, “Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer,” J. Microelectromech. Syst. 9(1), 76–81 (2000).
[Crossref]

H. Niino, Y. Yasui, X. Ding, A. Narazaki, T. Sato, Y. Kawaguchi, and A. Yabe, “Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent,” J. Photochem. Photobiol. Chem. 158(2-3), 179–182 (2003).
[Crossref]

F. Venturini, W. Navarrini, G. Resnati, P. Metrangolo, R. M. Vazquez, R. Osellame, and G. Cerullo, “Selective iterative etching of fused silica with gaseous hydrofluoric acid,” J. Phys. Chem. C 114(43), 18712–18716 (2010).
[Crossref]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

H. Niino, Y. Yasui, X. Ding, A. Narazaki, T. Sato, Y. Kawaguchi, and A. Yabe, “Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent,” J. Photochem. Photobiol. Chem. 158(2-3), 179–182 (2003).
[Crossref]

J. Wang, H. Niino, and A. Yabe, “One-step microfabrication of fused silica by laser ablation of an organic solution,” Appl. Phys., A Mater. Sci. Process. 68(1), 111–113 (1999).
[Crossref]

A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277–279 (2001).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref] [PubMed]

F. Venturini, W. Navarrini, G. Resnati, P. Metrangolo, R. M. Vazquez, R. Osellame, and G. Cerullo, “Selective iterative etching of fused silica with gaseous hydrofluoric acid,” J. Phys. Chem. C 114(43), 18712–18716 (2010).
[Crossref]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

F. Bragheri, L. Ferrara, N. Bellini, K. C. Vishnubhatla, P. Minzionil, R. Ramponi, R. Osellame, and I. Cristiani, “Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond,” J. Biophoton. 3, 234–243 (2010).

C. Vass, K. Osvay, and B. Hopp, “Fabrication of 150 nm period grating in fused silica by two-beam interferometric laser induced backside wet etching method,” Opt. Express 14(18), 8354–8359 (2006).
[Crossref] [PubMed]

M. S. Giridhar, K. Seong, A. Schülzgen, P. Khulbe, N. Peyghambarian, and M. Mansuripur, “Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices,” Appl. Opt. 43(23), 4584–4589 (2004).
[Crossref] [PubMed]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

S. Rajesh and Y. Bellouard, “Towards fast femtosecond laser micromachining of fused silica: The effect of deposited energy,” Opt. Express 18(20), 21490–21497 (2010).
[Crossref] [PubMed]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

F. Bragheri, L. Ferrara, N. Bellini, K. C. Vishnubhatla, P. Minzionil, R. Ramponi, R. Osellame, and I. Cristiani, “Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond,” J. Biophoton. 3, 234–243 (2010).

F. Venturini, W. Navarrini, G. Resnati, P. Metrangolo, R. M. Vazquez, R. Osellame, and G. Cerullo, “Selective iterative etching of fused silica with gaseous hydrofluoric acid,” J. Phys. Chem. C 114(43), 18712–18716 (2010).
[Crossref]

A. Schaap, Y. Bellouard, and T. Rohrlack, “Optofluidic lab-on-a-chip for rapid algae population screening,” Biomed. Opt. Express 2(3), 658–664 (2011).
[Crossref] [PubMed]

H. Niino, Y. Yasui, X. Ding, A. Narazaki, T. Sato, Y. Kawaguchi, and A. Yabe, “Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent,” J. Photochem. Photobiol. Chem. 158(2-3), 179–182 (2003).
[Crossref]

A. Schaap, Y. Bellouard, and T. Rohrlack, “Optofluidic lab-on-a-chip for rapid algae population screening,” Biomed. Opt. Express 2(3), 658–664 (2011).
[Crossref] [PubMed]

M. S. Giridhar, K. Seong, A. Schülzgen, P. Khulbe, N. Peyghambarian, and M. Mansuripur, “Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices,” Appl. Opt. 43(23), 4584–4589 (2004).
[Crossref] [PubMed]

M. S. Giridhar, K. Seong, A. Schülzgen, P. Khulbe, N. Peyghambarian, and M. Mansuripur, “Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices,” Appl. Opt. 43(23), 4584–4589 (2004).
[Crossref] [PubMed]

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing,” Opt. Lett. 35(19), 3225–3227 (2010).
[Crossref] [PubMed]

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining,” Microfluid. Nanofluid. 11(1), 111–117 (2011).
[Crossref]

Y. Hanada, K. Sugioka, I. Shihira-Ishikawa, H. Kawano, A. Miyawaki, and K. Midorikawa, “3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria,” Lab Chip 11(12), 2109–2115 (2011).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28(13), 1144–1146 (2003).
[Crossref] [PubMed]

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining,” Microfluid. Nanofluid. 11(1), 111–117 (2011).
[Crossref]

Y. Hanada, K. Sugioka, I. Shihira-Ishikawa, H. Kawano, A. Miyawaki, and K. Midorikawa, “3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria,” Lab Chip 11(12), 2109–2115 (2011).
[Crossref] [PubMed]

K. Sugioka, Y. Hanada, and K. Midorikawa, “Three-dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips,” Laser Photon. Rev. 4(3), 386–400 (2010).
[Crossref]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing,” Opt. Lett. 35(19), 3225–3227 (2010).
[Crossref] [PubMed]

Y. Hanada, K. Sugioka, H. Kawano, I. S. Ishikawa, A. Miyawaki, and K. Midorikawa, “Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass,” Biomed. Microdevices 10(3), 403–410 (2008).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for lab-on-a-chip applications,” Appl. Surf. Sci. 248(1-4), 172–176 (2005).
[Crossref]

K. Sugioka, Y. Cheng, and K. Midorikawa, “Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture,” Appl. Phys., A Mater. Sci. Process. 81(1), 1–10 (2005).
[Crossref]

Y. Cheng, K. Sugioka, and K. Midorikawa, “Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing,” Opt. Lett. 29(17), 2007–2009 (2004).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28(13), 1144–1146 (2003).
[Crossref] [PubMed]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, “Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser,” Opt. Lett. 28(13), 1144–1146 (2003).
[Crossref] [PubMed]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, “Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer,” J. Microelectromech. Syst. 9(1), 76–81 (2000).
[Crossref]

C. Vass, K. Osvay, and B. Hopp, “Fabrication of 150 nm period grating in fused silica by two-beam interferometric laser induced backside wet etching method,” Opt. Express 14(18), 8354–8359 (2006).
[Crossref] [PubMed]

F. Venturini, W. Navarrini, G. Resnati, P. Metrangolo, R. M. Vazquez, R. Osellame, and G. Cerullo, “Selective iterative etching of fused silica with gaseous hydrofluoric acid,” J. Phys. Chem. C 114(43), 18712–18716 (2010).
[Crossref]

F. Venturini, W. Navarrini, G. Resnati, P. Metrangolo, R. M. Vazquez, R. Osellame, and G. Cerullo, “Selective iterative etching of fused silica with gaseous hydrofluoric acid,” J. Phys. Chem. C 114(43), 18712–18716 (2010).
[Crossref]

F. Bragheri, L. Ferrara, N. Bellini, K. C. Vishnubhatla, P. Minzionil, R. Ramponi, R. Osellame, and I. Cristiani, “Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond,” J. Biophoton. 3, 234–243 (2010).

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

J. Wang, H. Niino, and A. Yabe, “One-step microfabrication of fused silica by laser ablation of an organic solution,” Appl. Phys., A Mater. Sci. Process. 68(1), 111–113 (1999).
[Crossref]

C. Lee, T. Chang, S. Wang, C. Chien, and C. Cheng, “Using femtosecond laser to fabricate highly precise interior three-dimensional microstructures in polymeric flow chip,” Biomicrofluid. 4(4), 046502 (2010).
[Crossref]

A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, “Femtosecond laser-assisted three-dimensional microfabrication in silica,” Opt. Lett. 26(5), 277–279 (2001).
[Crossref] [PubMed]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref] [PubMed]

A. Crespi, Y. Gu, B. Ngamsom, H. J. W. M. Hoekstra, C. Dongre, M. Pollnau, R. Ramponi, H. H. van den Vlekkert, P. Watts, G. Cerullo, and R. Osellame, “Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection,” Lab Chip 10(9), 1167–1173 (2010).
[Crossref] [PubMed]

J. Cheng, C. Wei, K. Hsu, and T. Young, “Direct-write laser micromachining and universal surface modification of PMMA for device development,” Sens. Actuators B Chem. 99(1), 186–196 (2004).
[Crossref]

G. M. Whitesides, “The origins and the future of microfluidics,” Nature 442(7101), 368–373 (2006).
[Crossref] [PubMed]

A. Manz, N. Graber, and H. M. Widmer, “Miniaturized total chemical analysis systems: a novel concept for chemical sensing,” Sens. Actuators B Chem. 1(1-6), 244–248 (1990).
[Crossref]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

Y. Ju, Y. Liao, L. Zhang, Y. Sheng, Q. Zhang, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining,” Microfluid. Nanofluid. 11(1), 111–117 (2011).
[Crossref]

F. He, Y. Cheng, Z. Xu, Y. Liao, J. Xu, H. Sun, C. Wang, Z. Zhou, K. Sugioka, K. Midorikawa, Y. Xu, and X. Chen, “Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser,” Opt. Lett. 35(3), 282–284 (2010).
[Crossref] [PubMed]

Y. Liao, Y. Ju, L. Zhang, F. He, Q. Zhang, Y. Shen, D. Chen, Y. Cheng, Z. Xu, K. Sugioka, and K. Midorikawa, “Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing,” Opt. Lett. 35(19), 3225–3227 (2010).
[Crossref] [PubMed]

H. Niino, Y. Yasui, X. Ding, A. Narazaki, T. Sato, Y. Kawaguchi, and A. Yabe, “Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent,” J. Photochem. Photobiol. Chem. 158(2-3), 179–182 (2003).
[Crossref]

J. Wang, H. Niino, and A. Yabe, “One-step microfabrication of fused silica by laser ablation of an organic solution,” Appl. Phys., A Mater. Sci. Process. 68(1), 111–113 (1999).
[Crossref]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, “Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses,” Opt. Lett. 26(23), 1912–1914 (2001).
[Crossref] [PubMed]

R. An, Y. Li, Y. Dou, D. Liu, H. Yang, and Q. Gong, “Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses,” Appl. Phys., A Mater. Sci. Process. 83(1), 27–29 (2006).
[Crossref]

H. Niino, Y. Yasui, X. Ding, A. Narazaki, T. Sato, Y. Kawaguchi, and A. Yabe, “Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent,” J. Photochem. Photobiol. Chem. 158(2-3), 179–182 (2003).
[Crossref]

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