Abstract

We measure the motional fluctuations of a micromechanical mirror using a Michelson interferometer, and demonstrate its interferometric stability. The position stability of the micromirror is dominated by the thermal mechanical noise of the structure. With this level of stability, we utilize the micromirror to realize an optical phase modulator by simply reflecting light off the mirror and modulating its position. The resonant frequency of the modulator can be tuned by applying a voltage between the mirror and an underlying electrode. Full modulation depth of ±π is achieved when the mirror resonantly excited with a sinusoidal voltage at an amplitude of 11V.

© 2012 OSA

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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2010

C. Knoernschild, X. L. Zhang, L. Isenhower, A. T. Gill, F. P. Lu, M. Saffman, and J. Kim, “Independent individual addressing of multiple neutral atom qubits with a micromirror-based beam steering system,” Appl. Phys. Lett. 97, 134101 (2010).
[CrossRef]

S. X. Wang, J. Labaziewicz, Y. Ge, R. Shewmon, and I. L. Chuang, “Demonstration of a quantum logic gate in a cryogenic surface-electrode ion trap,” Phys. Rev. A 81, 062332 (2010).
[CrossRef]

2009

L. Luo, D. Hayes, T. Manning, D. Matsukevich, P. Maunz, S. Olmschenk, J. Sterk, and C. Monroe, “Protocols and techniques for a scalable atom-photon quantum network,” Fortschr. Phys. 57, 1133–1152 (2009).
[CrossRef]

C. Knoernschild, C. Kim, F. P. Lu, and J. Kim, “Multiplexed broadband beam steering system utilizing high speed MEMS mirrors,” Opt. Express 17, 7233–7244 (2009).
[CrossRef] [PubMed]

2008

2007

C. Kim, C. Knoernschild, B. Liu, and J. Kim, “Design and characterization of MEMS micromirrors for ion-trap quantum computation,” IEEE J. Sel. Top. Quantum Electron. 13, 322–329 (2007).
[CrossRef]

D. L. Moehring, M. J. Madsen, K. C. Younge, R. N. Kohn, P. Maunz, L.-M. Duan, C. Monroe, and B. B. Blinov, “Quantum networking with photons and trapped atoms,” J. Opt. Soc. Am. B 24, 300–315 (2007).
[CrossRef]

2004

2003

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

2000

R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, “A raster-scanning full-motion video display using polysilicon micromachined mirrors,” Sens. Actuators A 83, 291–296 (2000).
[CrossRef]

Z. Djuric, “Mechanisms of noise sources in microelectromechanical systems,” Microelectron. Reliab. 40, 919–932 (2000).
[CrossRef]

1993

M. Andrews, I. Harris, and G. Turner, “A comparison of squeeze-film theory with measurements on a microstructure,” Sens. Actuators A 36, 79–87 (1993).
[CrossRef]

Aksyuk, V. A.

D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, “256 × 256 port optical cross-connect subsystem,” J. Lightwave Technol. 22, 1499–1509 (2004).
[CrossRef]

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Andrews, M.

M. Andrews, I. Harris, and G. Turner, “A comparison of squeeze-film theory with measurements on a microstructure,” Sens. Actuators A 36, 79–87 (1993).
[CrossRef]

Arney, S.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Basavanhally, N. R.

D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, “256 × 256 port optical cross-connect subsystem,” J. Lightwave Technol. 22, 1499–1509 (2004).
[CrossRef]

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Becher, C.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Blatt, R.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Blinov, B. B.

Bolle, C. A.

D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, “256 × 256 port optical cross-connect subsystem,” J. Lightwave Technol. 22, 1499–1509 (2004).
[CrossRef]

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Castelino, K.

K. Castelino, V. Milanovic, and D. McCormick, “MEMS-based high-speed low-power vector display,” International Conference on Optical MEMS and Their Applications IEEE/LEOS (IEEE, 2005), pp. 127 –128.
[CrossRef]

Chan, H. B.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Chuang, I. L.

S. X. Wang, J. Labaziewicz, Y. Ge, R. Shewmon, and I. L. Chuang, “Demonstration of a quantum logic gate in a cryogenic surface-electrode ion trap,” Phys. Rev. A 81, 062332 (2010).
[CrossRef]

Close, J. D.

Conant, R. A.

R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, “A raster-scanning full-motion video display using polysilicon micromachined mirrors,” Sens. Actuators A 83, 291–296 (2000).
[CrossRef]

Debs, J. E.

Deuschle, T.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Djuric, Z.

Z. Djuric, “Mechanisms of noise sources in microelectromechanical systems,” Microelectron. Reliab. 40, 919–932 (2000).
[CrossRef]

Duan, L.-M.

Eschner, J.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Frahm, R.

Frahm, R. E.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Gasparyan, A.

D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, “256 × 256 port optical cross-connect subsystem,” J. Lightwave Technol. 22, 1499–1509 (2004).
[CrossRef]

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Gates, J. V.

D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, “256 × 256 port optical cross-connect subsystem,” J. Lightwave Technol. 22, 1499–1509 (2004).
[CrossRef]

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Ge, Y.

S. X. Wang, J. Labaziewicz, Y. Ge, R. Shewmon, and I. L. Chuang, “Demonstration of a quantum logic gate in a cryogenic surface-electrode ion trap,” Phys. Rev. A 81, 062332 (2010).
[CrossRef]

Gill, A. T.

C. Knoernschild, X. L. Zhang, L. Isenhower, A. T. Gill, F. P. Lu, M. Saffman, and J. Kim, “Independent individual addressing of multiple neutral atom qubits with a micromirror-based beam steering system,” Appl. Phys. Lett. 97, 134101 (2010).
[CrossRef]

Gottlieb, M.

M. Gottlieb, C. L. M. Ireland, and J. M. Ley, Electro-Optic and Acousto-Optic Scanning and Deflection (M. Dekker, 1983).

Gulde, S.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Häffner, H.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Hagelin, P. M.

R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, “A raster-scanning full-motion video display using polysilicon micromachined mirrors,” Sens. Actuators A 83, 291–296 (2000).
[CrossRef]

Hänsel, W.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Harris, I.

M. Andrews, I. Harris, and G. Turner, “A comparison of squeeze-film theory with measurements on a microstructure,” Sens. Actuators A 36, 79–87 (1993).
[CrossRef]

Hart, M.

R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, “A raster-scanning full-motion video display using polysilicon micromachined mirrors,” Sens. Actuators A 83, 291–296 (2000).
[CrossRef]

Haueis, M.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Hayes, D.

L. Luo, D. Hayes, T. Manning, D. Matsukevich, P. Maunz, S. Olmschenk, J. Sterk, and C. Monroe, “Protocols and techniques for a scalable atom-photon quantum network,” Fortschr. Phys. 57, 1133–1152 (2009).
[CrossRef]

Ireland, C. L. M.

M. Gottlieb, C. L. M. Ireland, and J. M. Ley, Electro-Optic and Acousto-Optic Scanning and Deflection (M. Dekker, 1983).

Isenhower, L.

C. Knoernschild, X. L. Zhang, L. Isenhower, A. T. Gill, F. P. Lu, M. Saffman, and J. Kim, “Independent individual addressing of multiple neutral atom qubits with a micromirror-based beam steering system,” Appl. Phys. Lett. 97, 134101 (2010).
[CrossRef]

Kim, C.

Kim, J.

C. Knoernschild, X. L. Zhang, L. Isenhower, A. T. Gill, F. P. Lu, M. Saffman, and J. Kim, “Independent individual addressing of multiple neutral atom qubits with a micromirror-based beam steering system,” Appl. Phys. Lett. 97, 134101 (2010).
[CrossRef]

C. Knoernschild, C. Kim, F. P. Lu, and J. Kim, “Multiplexed broadband beam steering system utilizing high speed MEMS mirrors,” Opt. Express 17, 7233–7244 (2009).
[CrossRef] [PubMed]

C. Knoernschild, C. Kim, B. Liu, F. P. Lu, and J. Kim, “MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems,” Opt. Lett. 33, 273–275 (2008).
[CrossRef] [PubMed]

C. Kim, C. Knoernschild, B. Liu, and J. Kim, “Design and characterization of MEMS micromirrors for ion-trap quantum computation,” IEEE J. Sel. Top. Quantum Electron. 13, 322–329 (2007).
[CrossRef]

D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, “256 × 256 port optical cross-connect subsystem,” J. Lightwave Technol. 22, 1499–1509 (2004).
[CrossRef]

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Kim, S.

Knoernschild, C.

C. Knoernschild, X. L. Zhang, L. Isenhower, A. T. Gill, F. P. Lu, M. Saffman, and J. Kim, “Independent individual addressing of multiple neutral atom qubits with a micromirror-based beam steering system,” Appl. Phys. Lett. 97, 134101 (2010).
[CrossRef]

C. Knoernschild, C. Kim, F. P. Lu, and J. Kim, “Multiplexed broadband beam steering system utilizing high speed MEMS mirrors,” Opt. Express 17, 7233–7244 (2009).
[CrossRef] [PubMed]

C. Knoernschild, C. Kim, B. Liu, F. P. Lu, and J. Kim, “MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems,” Opt. Lett. 33, 273–275 (2008).
[CrossRef] [PubMed]

C. Kim, C. Knoernschild, B. Liu, and J. Kim, “Design and characterization of MEMS micromirrors for ion-trap quantum computation,” IEEE J. Sel. Top. Quantum Electron. 13, 322–329 (2007).
[CrossRef]

Kohn, R. N.

Kolodner, P.

Kolodner, P. R.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Kraus, J. S.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Krishnamoorthy, U.

R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, “A raster-scanning full-motion video display using polysilicon micromachined mirrors,” Sens. Actuators A 83, 291–296 (2000).
[CrossRef]

Kruger, M. B.

Kumar, B.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Labaziewicz, J.

S. X. Wang, J. Labaziewicz, Y. Ge, R. Shewmon, and I. L. Chuang, “Demonstration of a quantum logic gate in a cryogenic surface-electrode ion trap,” Phys. Rev. A 81, 062332 (2010).
[CrossRef]

Lancaster, G.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Lance, A.

Lau, K. Y.

R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, “A raster-scanning full-motion video display using polysilicon micromachined mirrors,” Sens. Actuators A 83, 291–296 (2000).
[CrossRef]

Ley, J. M.

M. Gottlieb, C. L. M. Ireland, and J. M. Ley, Electro-Optic and Acousto-Optic Scanning and Deflection (M. Dekker, 1983).

Lichtenwalner, C. P.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Lieuwen, D. F.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Lifton, V.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Liu, B.

C. Knoernschild, C. Kim, B. Liu, F. P. Lu, and J. Kim, “MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems,” Opt. Lett. 33, 273–275 (2008).
[CrossRef] [PubMed]

C. Kim, C. Knoernschild, B. Liu, and J. Kim, “Design and characterization of MEMS micromirrors for ion-trap quantum computation,” IEEE J. Sel. Top. Quantum Electron. 13, 322–329 (2007).
[CrossRef]

Lu, F. P.

Luo, L.

L. Luo, D. Hayes, T. Manning, D. Matsukevich, P. Maunz, S. Olmschenk, J. Sterk, and C. Monroe, “Protocols and techniques for a scalable atom-photon quantum network,” Fortschr. Phys. 57, 1133–1152 (2009).
[CrossRef]

Madsen, M. J.

Manning, T.

L. Luo, D. Hayes, T. Manning, D. Matsukevich, P. Maunz, S. Olmschenk, J. Sterk, and C. Monroe, “Protocols and techniques for a scalable atom-photon quantum network,” Fortschr. Phys. 57, 1133–1152 (2009).
[CrossRef]

Matsukevich, D.

L. Luo, D. Hayes, T. Manning, D. Matsukevich, P. Maunz, S. Olmschenk, J. Sterk, and C. Monroe, “Protocols and techniques for a scalable atom-photon quantum network,” Fortschr. Phys. 57, 1133–1152 (2009).
[CrossRef]

Maunz, P.

L. Luo, D. Hayes, T. Manning, D. Matsukevich, P. Maunz, S. Olmschenk, J. Sterk, and C. Monroe, “Protocols and techniques for a scalable atom-photon quantum network,” Fortschr. Phys. 57, 1133–1152 (2009).
[CrossRef]

D. L. Moehring, M. J. Madsen, K. C. Younge, R. N. Kohn, P. Maunz, L.-M. Duan, C. Monroe, and B. B. Blinov, “Quantum networking with photons and trapped atoms,” J. Opt. Soc. Am. B 24, 300–315 (2007).
[CrossRef]

McCormick, D.

K. Castelino, V. Milanovic, and D. McCormick, “MEMS-based high-speed low-power vector display,” International Conference on Optical MEMS and Their Applications IEEE/LEOS (IEEE, 2005), pp. 127 –128.
[CrossRef]

Mcleod, R. R.

Milanovic, V.

K. Castelino, V. Milanovic, and D. McCormick, “MEMS-based high-speed low-power vector display,” International Conference on Optical MEMS and Their Applications IEEE/LEOS (IEEE, 2005), pp. 127 –128.
[CrossRef]

Moehring, D. L.

Monroe, C.

L. Luo, D. Hayes, T. Manning, D. Matsukevich, P. Maunz, S. Olmschenk, J. Sterk, and C. Monroe, “Protocols and techniques for a scalable atom-photon quantum network,” Fortschr. Phys. 57, 1133–1152 (2009).
[CrossRef]

D. L. Moehring, M. J. Madsen, K. C. Younge, R. N. Kohn, P. Maunz, L.-M. Duan, C. Monroe, and B. B. Blinov, “Quantum networking with photons and trapped atoms,” J. Opt. Soc. Am. B 24, 300–315 (2007).
[CrossRef]

Muller, R. S.

R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, “A raster-scanning full-motion video display using polysilicon micromachined mirrors,” Sens. Actuators A 83, 291–296 (2000).
[CrossRef]

Neilson, D. T.

D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, “256 × 256 port optical cross-connect subsystem,” J. Lightwave Technol. 22, 1499–1509 (2004).
[CrossRef]

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Nuzman, C. J.

D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, “256 × 256 port optical cross-connect subsystem,” J. Lightwave Technol. 22, 1499–1509 (2004).
[CrossRef]

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Olmschenk, S.

L. Luo, D. Hayes, T. Manning, D. Matsukevich, P. Maunz, S. Olmschenk, J. Sterk, and C. Monroe, “Protocols and techniques for a scalable atom-photon quantum network,” Fortschr. Phys. 57, 1133–1152 (2009).
[CrossRef]

Papazian, A. R.

D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, “256 × 256 port optical cross-connect subsystem,” J. Lightwave Technol. 22, 1499–1509 (2004).
[CrossRef]

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Pardo, F.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Ramsey, D. A.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Riebe, M.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Robins, N. P.

Roos, C.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Ryf, R.

D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, “256 × 256 port optical cross-connect subsystem,” J. Lightwave Technol. 22, 1499–1509 (2004).
[CrossRef]

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Saffman, M.

C. Knoernschild, X. L. Zhang, L. Isenhower, A. T. Gill, F. P. Lu, M. Saffman, and J. Kim, “Independent individual addressing of multiple neutral atom qubits with a micromirror-based beam steering system,” Appl. Phys. Lett. 97, 134101 (2010).
[CrossRef]

S. Kim, R. R. Mcleod, M. Saffman, and K. H. Wagner, “Doppler-free, multiwavelength acousto-optic deflector for two-photon addressing arrays of Rb atoms in a quantum information processor,” Appl. Opt. 47, 1816–1831 (2008).
[CrossRef] [PubMed]

Saleh, B. E. A.

B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics (Wiley-Interscience, 2007).

Schmidt-Kaler, F.

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Shea, H. R.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Shewmon, R.

S. X. Wang, J. Labaziewicz, Y. Ge, R. Shewmon, and I. L. Chuang, “Demonstration of a quantum logic gate in a cryogenic surface-electrode ion trap,” Phys. Rev. A 81, 062332 (2010).
[CrossRef]

Simon, M. E.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Solgaard, O.

R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, “A raster-scanning full-motion video display using polysilicon micromachined mirrors,” Sens. Actuators A 83, 291–296 (2000).
[CrossRef]

Sterk, J.

L. Luo, D. Hayes, T. Manning, D. Matsukevich, P. Maunz, S. Olmschenk, J. Sterk, and C. Monroe, “Protocols and techniques for a scalable atom-photon quantum network,” Fortschr. Phys. 57, 1133–1152 (2009).
[CrossRef]

Teich, M. C.

B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics (Wiley-Interscience, 2007).

Turner, G.

M. Andrews, I. Harris, and G. Turner, “A comparison of squeeze-film theory with measurements on a microstructure,” Sens. Actuators A 36, 79–87 (1993).
[CrossRef]

Wagner, K. H.

Wang, S. X.

S. X. Wang, J. Labaziewicz, Y. Ge, R. Shewmon, and I. L. Chuang, “Demonstration of a quantum logic gate in a cryogenic surface-electrode ion trap,” Phys. Rev. A 81, 062332 (2010).
[CrossRef]

Weiss, A.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

Younge, K. C.

Zhang, X. L.

C. Knoernschild, X. L. Zhang, L. Isenhower, A. T. Gill, F. P. Lu, M. Saffman, and J. Kim, “Independent individual addressing of multiple neutral atom qubits with a micromirror-based beam steering system,” Appl. Phys. Lett. 97, 134101 (2010).
[CrossRef]

Appl. Opt.

Appl. Phys. B

F. Schmidt-Kaler, H. Häffner, S. Gulde, M. Riebe, G. Lancaster, T. Deuschle, C. Becher, W. Hänsel, J. Eschner, C. Roos, and R. Blatt, “How to realize a universal quantum gate with trapped ions,” Appl. Phys. B 77, 789–796 (2003).
[CrossRef]

Appl. Phys. Lett.

C. Knoernschild, X. L. Zhang, L. Isenhower, A. T. Gill, F. P. Lu, M. Saffman, and J. Kim, “Independent individual addressing of multiple neutral atom qubits with a micromirror-based beam steering system,” Appl. Phys. Lett. 97, 134101 (2010).
[CrossRef]

Fortschr. Phys.

L. Luo, D. Hayes, T. Manning, D. Matsukevich, P. Maunz, S. Olmschenk, J. Sterk, and C. Monroe, “Protocols and techniques for a scalable atom-photon quantum network,” Fortschr. Phys. 57, 1133–1152 (2009).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

C. Kim, C. Knoernschild, B. Liu, and J. Kim, “Design and characterization of MEMS micromirrors for ion-trap quantum computation,” IEEE J. Sel. Top. Quantum Electron. 13, 322–329 (2007).
[CrossRef]

IEEE Photon. Technol. Lett.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, “1100 × 1100 port MEMS-based optical crossconnect with 4-dB maximum loss,” IEEE Photon. Technol. Lett. 15, 1537–1539 (2003).
[CrossRef]

J. Lightwave Technol.

J. Opt. Soc. Am. B

Microelectron. Reliab.

Z. Djuric, “Mechanisms of noise sources in microelectromechanical systems,” Microelectron. Reliab. 40, 919–932 (2000).
[CrossRef]

Opt. Express

Opt. Lett.

Phys. Rev. A

S. X. Wang, J. Labaziewicz, Y. Ge, R. Shewmon, and I. L. Chuang, “Demonstration of a quantum logic gate in a cryogenic surface-electrode ion trap,” Phys. Rev. A 81, 062332 (2010).
[CrossRef]

Sens. Actuators A

M. Andrews, I. Harris, and G. Turner, “A comparison of squeeze-film theory with measurements on a microstructure,” Sens. Actuators A 36, 79–87 (1993).
[CrossRef]

R. A. Conant, P. M. Hagelin, U. Krishnamoorthy, M. Hart, O. Solgaard, K. Y. Lau, and R. S. Muller, “A raster-scanning full-motion video display using polysilicon micromachined mirrors,” Sens. Actuators A 83, 291–296 (2000).
[CrossRef]

Other

K. Castelino, V. Milanovic, and D. McCormick, “MEMS-based high-speed low-power vector display,” International Conference on Optical MEMS and Their Applications IEEE/LEOS (IEEE, 2005), pp. 127 –128.
[CrossRef]

M. Gottlieb, C. L. M. Ireland, and J. M. Ley, Electro-Optic and Acousto-Optic Scanning and Deflection (M. Dekker, 1983).

B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics (Wiley-Interscience, 2007).

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Figures (3)

Fig. 1
Fig. 1

Schematic of the measurement setup. (a) Scanning electron micrograph of a MEMS mirror. (b) MEMS mirror stability measurement setup using a Michelson interferometer. (c) Shifting the reflection point on the MEMS mirror for sensitivity in the tilting mode.

Fig. 2
Fig. 2

Interferometer output representing the position noise spectrum of a micromirror at a pressure of 5 Torr (Q ≈ 45) and 760 Torr (Q ≈ 2) with 0V bias voltage. The dotted line shows shot noise level corresponding to laser intensity fluctuations. Simulations of the mode shapes corresponding to the five peaks (A – E) are shown by a color plot of maximum displacement. The inset shows tuning of tiling mode resonant frequency as a function of bias voltage. Dots indicate measured data while the solid line shows the theoretical prediction.

Fig. 3
Fig. 3

(a) Spectrum of interferometer output for a given modulation amplitude of a sagging mode at f =258 kHz. (b) Normalized spectrum peak heights as a function of RF voltage amplitude. Bessel functions of different orders J n ( s v d 2 ) are plotted using a single fitting parameter s = 0.025/V2 (lines), while the measured DC values (circles) and peak heights are shown with squares (f), diamonds (3f), and triangles (5f).

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

I θ ¨ + D θ θ ˙ + 2 κ θ = 1 2 C ( θ , z ) θ V 2 + F θ ,
M z ¨ + D z z ˙ + 2 K z = 1 2 C ( θ , z ) z V 2 + F z ,
| θ ˜ ( ω ) | 2 = | F ˜ θ ( ω ) | 2 ( 2 κ ) 2 1 ( 1 ω 2 / ω θ 2 ) 2 + ω 2 / ( Q 2 ω θ 2 ) ,
I det 1 + cos ( ϕ i + β sin ω t ) = 1 + J 0 ( β ) cos ϕ i + 2 { J 2 ( β ) cos 2 ω t + J 4 ( β ) cos 4 ω t + } cos ϕ i 2 { J 1 ( β ) sin ω t + J 3 ( β ) sin 3 ω t + } sin ϕ i .

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