Abstract

We report time domain observations of optical instability in high Q silicon nitride whispering gallery disk resonators. At low laser power the transmitted optical power through the disk looks chaotic. At higher power, the optical output settles into a stable self-pulsing regime with periodicity ranging from hundreds of milliseconds to hundreds of seconds. This phenomenon is explained by the interplay between a fast thermo-optic nonlinearity within the disk and a slow thermo-mechanic nonlinearity of the structure. A model for this interplay is developed which provides good agreement with experimental data and points out routes to control this instability.

© 2012 OSA

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2012 (2)

2011 (3)

2010 (7)

L. Ding, C. Belacel, S. Ducci, G. Leo, and I. Favero, “Ultralow loss single-mode silica tapers manufactured by a microheater,” Appl. Opt.49(13), 2441–2445 (2010).
[CrossRef]

W. H. P. Pernice, M. Li, and H. X. Tang, “Time-domain measurement of optical transport in silicon micro-ring resonators,” Opt. Express18(17), 18438–18452 (2010), doi:.
[CrossRef] [PubMed]

K. H. Lee, T. G. McRae, G. I. Harris, J. Knittel, and W. P. Bowen, “Cooling and control of a cavity optoelectromechanical system,” Phys. Rev. Lett.104(12), 123604 (2010).
[CrossRef] [PubMed]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett.105(26), 263903 (2010).
[CrossRef] [PubMed]

Q. P. Unterreithmeier, T. Faust, and J. P. Kotthaus, “Damping of nanomechanical resonators,” Phys. Rev. Lett.105(2), 027205 (2010).
[CrossRef] [PubMed]

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett.96(6), 061101 (2010), doi:.
[CrossRef]

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics4(1), 46–49 (2010).
[CrossRef]

2009 (4)

2008 (3)

2007 (1)

M. Oxborrow, “How to simulate the whispering gallery modes of dielectric microresonator in FEMLAB/COMSOL,” Proc. SPIE6452(64520J), 64520J (2007).
[CrossRef]

2006 (3)

S. S. Verbridge, J. M. Parpia, R. B. Reichenbach, L. M. Bellan, and H. G. Craighead, “High quality factor resonance at room temperature with nanostrings under high tensile stress,” J. Appl. Phys.99(12), 124304 (2006).
[CrossRef]

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature443(7112), 671–674 (2006).
[CrossRef] [PubMed]

T. J. Johnson, M. Borselli, and O. Painter, “Self-induced optical modulation of the transmission through a high-Q silicon microdisk resonator,” Opt. Express14(2), 817–831 (2006).
[CrossRef] [PubMed]

2005 (4)

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett.95(3), 033901 (2005).
[CrossRef] [PubMed]

E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, “Exciton-photon strong-coupling regime for a single quantum dot embedded in a microcavity,” Phys. Rev. Lett.95(6), 067401 (2005).
[CrossRef] [PubMed]

A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, “Measuring propagation loss in a multimode semiconductor waveguide,” J. Appl. Phys.97(7), 073105 (2005).
[CrossRef]

A. E. Fomin, M. L. Gorodetsky, I. S. Grudinin, and V. S. Ilchenko, “Nonstationary nonlinear effects in optical microspheres,” J. Opt. Soc. Am. B22(2), 459–465 (2005).
[CrossRef]

2004 (2)

2002 (1)

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057 (2002), doi:.
[CrossRef]

2000 (1)

1999 (2)

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, “Coupling of modes analysis of resonant channel add-drop filters,” IEEE J. Quantum Electron.35(9), 1322–1331 (1999).
[CrossRef]

S. T. Chu, B. E. Little, W. Pan, T. A. Kaneko, S. A. Sato, and Y. A. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett.11(6), 691–693 (1999).
[CrossRef]

1996 (1)

J. G. E. Gardeniers, H. A. C. Tilmans, and C. C. G. Visser, “LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design,” J. Vac. Sci. Technol. A14(5), 2879–2892 (1996).
[CrossRef]

1987 (1)

1985 (1)

R. Regener and W. Sohler, “Loss in low-finesse Ti: LiNbO3 optical waveguide resonators,” Appl. Phys. B36(3), 143–147 (1985), doi:.
[CrossRef]

1983 (1)

Almeida, V. R.

Andronico, A.

Aoki, T.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature443(7112), 671–674 (2006).
[CrossRef] [PubMed]

Arnold, S.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057 (2002), doi:.
[CrossRef]

Baker, C.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett.98, 113801 (2011).

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett.105(26), 263903 (2010).
[CrossRef] [PubMed]

Bauters, J. F.

Belacel, C.

Bellan, L. M.

S. S. Verbridge, J. M. Parpia, R. B. Reichenbach, L. M. Bellan, and H. G. Craighead, “High quality factor resonance at room temperature with nanostrings under high tensile stress,” J. Appl. Phys.99(12), 124304 (2006).
[CrossRef]

Berger, V.

A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, “Measuring propagation loss in a multimode semiconductor waveguide,” J. Appl. Phys.97(7), 073105 (2005).
[CrossRef]

Bloch, J.

E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, “Exciton-photon strong-coupling regime for a single quantum dot embedded in a microcavity,” Phys. Rev. Lett.95(6), 067401 (2005).
[CrossRef] [PubMed]

Blumenthal, D. J.

Borselli, M.

Bowen, W. P.

K. H. Lee, T. G. McRae, G. I. Harris, J. Knittel, and W. P. Bowen, “Cooling and control of a cavity optoelectromechanical system,” Phys. Rev. Lett.104(12), 123604 (2010).
[CrossRef] [PubMed]

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature443(7112), 671–674 (2006).
[CrossRef] [PubMed]

Bowers, J. E.

Braun, D.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057 (2002), doi:.
[CrossRef]

Calligaro, M.

A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, “Measuring propagation loss in a multimode semiconductor waveguide,” J. Appl. Phys.97(7), 073105 (2005).
[CrossRef]

Camacho, R. M.

Cao, T.

Carmon, T.

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett.95(3), 033901 (2005).
[CrossRef] [PubMed]

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express12(20), 4742–4750 (2004).
[CrossRef] [PubMed]

Chan, J.

Chen, D. R.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics4(1), 46–49 (2010).
[CrossRef]

Chen, L.

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature462(7273), 633–636 (2009).
[CrossRef] [PubMed]

Chen, S.

Chipouline, A.

Chu, S. T.

S. T. Chu, B. E. Little, W. Pan, T. A. Kaneko, S. A. Sato, and Y. A. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett.11(6), 691–693 (1999).
[CrossRef]

Craighead, H. G.

S. S. Verbridge, J. M. Parpia, R. B. Reichenbach, L. M. Bellan, and H. G. Craighead, “High quality factor resonance at room temperature with nanostrings under high tensile stress,” J. Appl. Phys.99(12), 124304 (2006).
[CrossRef]

Dayan, B.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature443(7112), 671–674 (2006).
[CrossRef] [PubMed]

De Rossi, A.

A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, “Measuring propagation loss in a multimode semiconductor waveguide,” J. Appl. Phys.97(7), 073105 (2005).
[CrossRef]

Deych, L.

Ding, L.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett.98, 113801 (2011).

L. Ding, C. Belacel, S. Ducci, G. Leo, and I. Favero, “Ultralow loss single-mode silica tapers manufactured by a microheater,” Appl. Opt.49(13), 2441–2445 (2010).
[CrossRef]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett.105(26), 263903 (2010).
[CrossRef] [PubMed]

Dong, C.

L. He, Y.-F. Xiao, C. Dong, J. Zhu, V. Gaddam, and L. Yang, “Compensation of thermal refraction effect in high-Q toroidal microresonator by polydimethylsiloxane coating,” Appl. Phys. Lett.93(20), 201102 (2008).
[CrossRef]

Ducci, S.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett.98, 113801 (2011).

L. Ding, C. Belacel, S. Ducci, G. Leo, and I. Favero, “Ultralow loss single-mode silica tapers manufactured by a microheater,” Appl. Opt.49(13), 2441–2445 (2010).
[CrossRef]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett.105(26), 263903 (2010).
[CrossRef] [PubMed]

A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, “Measuring propagation loss in a multimode semiconductor waveguide,” J. Appl. Phys.97(7), 073105 (2005).
[CrossRef]

Egorov, O.

Eichenfield, M.

Fainman, Y.

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett.96(6), 061101 (2010), doi:.
[CrossRef]

Fan, S.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, “Coupling of modes analysis of resonant channel add-drop filters,” IEEE J. Quantum Electron.35(9), 1322–1331 (1999).
[CrossRef]

Fang, W.

Faust, T.

Q. P. Unterreithmeier, T. Faust, and J. P. Kotthaus, “Damping of nanomechanical resonators,” Phys. Rev. Lett.105(2), 027205 (2010).
[CrossRef] [PubMed]

Favero, I.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett.98, 113801 (2011).

L. Ding, C. Belacel, S. Ducci, G. Leo, and I. Favero, “Ultralow loss single-mode silica tapers manufactured by a microheater,” Appl. Opt.49(13), 2441–2445 (2010).
[CrossRef]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett.105(26), 263903 (2010).
[CrossRef] [PubMed]

A. Andronico, I. Favero, and G. Leo, “Difference frequency generation in GaAs microdisks,” Opt. Lett.33(18), 2026–2028 (2008).
[CrossRef] [PubMed]

Fei, Y.

Fomin, A. E.

Gaddam, V.

L. He, Y.-F. Xiao, C. Dong, J. Zhu, V. Gaddam, and L. Yang, “Compensation of thermal refraction effect in high-Q toroidal microresonator by polydimethylsiloxane coating,” Appl. Phys. Lett.93(20), 201102 (2008).
[CrossRef]

Gaeta, A. L.

Gardeniers, J. G. E.

J. G. E. Gardeniers, H. A. C. Tilmans, and C. C. G. Visser, “LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design,” J. Vac. Sci. Technol. A14(5), 2879–2892 (1996).
[CrossRef]

Gérard, J. M.

E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, “Exciton-photon strong-coupling regime for a single quantum dot embedded in a microcavity,” Phys. Rev. Lett.95(6), 067401 (2005).
[CrossRef] [PubMed]

Gondarenko, A.

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature462(7273), 633–636 (2009).
[CrossRef] [PubMed]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high Q ring resonator,” Opt. Express17(14), 11366–11370 (2009).
[CrossRef] [PubMed]

Gorodetsky, M. L.

Grudinin, I. S.

Harris, G. I.

K. H. Lee, T. G. McRae, G. I. Harris, J. Knittel, and W. P. Bowen, “Cooling and control of a cavity optoelectromechanical system,” Phys. Rev. Lett.104(12), 123604 (2010).
[CrossRef] [PubMed]

Haus, H. A.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, “Coupling of modes analysis of resonant channel add-drop filters,” IEEE J. Quantum Electron.35(9), 1322–1331 (1999).
[CrossRef]

He, L.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics4(1), 46–49 (2010).
[CrossRef]

L. He, Y.-F. Xiao, C. Dong, J. Zhu, V. Gaddam, and L. Yang, “Compensation of thermal refraction effect in high-Q toroidal microresonator by polydimethylsiloxane coating,” Appl. Phys. Lett.93(20), 201102 (2008).
[CrossRef]

Heck, M. J. R.

Henry, C. H.

Hours, J.

E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, “Exciton-photon strong-coupling regime for a single quantum dot embedded in a microcavity,” Phys. Rev. Lett.95(6), 067401 (2005).
[CrossRef] [PubMed]

Ikeda, K.

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett.96(6), 061101 (2010), doi:.
[CrossRef]

Ilchenko, V. S.

Joannopoulos, J. D.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, “Coupling of modes analysis of resonant channel add-drop filters,” IEEE J. Quantum Electron.35(9), 1322–1331 (1999).
[CrossRef]

Johnson, T. J.

Kaneko, T. A.

S. T. Chu, B. E. Little, W. Pan, T. A. Kaneko, S. A. Sato, and Y. A. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett.11(6), 691–693 (1999).
[CrossRef]

Katz, L. E.

Kazarinov, R. F.

Khan, M. J.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, “Coupling of modes analysis of resonant channel add-drop filters,” IEEE J. Quantum Electron.35(9), 1322–1331 (1999).
[CrossRef]

Khoshsima, M.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057 (2002), doi:.
[CrossRef]

Kimble, H. J.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature443(7112), 671–674 (2006).
[CrossRef] [PubMed]

Kippenberg, T. J.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature443(7112), 671–674 (2006).
[CrossRef] [PubMed]

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett.95(3), 033901 (2005).
[CrossRef] [PubMed]

Knittel, J.

K. H. Lee, T. G. McRae, G. I. Harris, J. Knittel, and W. P. Bowen, “Cooling and control of a cavity optoelectromechanical system,” Phys. Rev. Lett.104(12), 123604 (2010).
[CrossRef] [PubMed]

Kokubun, Y. A.

S. T. Chu, B. E. Little, W. Pan, T. A. Kaneko, S. A. Sato, and Y. A. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett.11(6), 691–693 (1999).
[CrossRef]

Kotthaus, J. P.

Q. P. Unterreithmeier, T. Faust, and J. P. Kotthaus, “Damping of nanomechanical resonators,” Phys. Rev. Lett.105(2), 027205 (2010).
[CrossRef] [PubMed]

Kuo, P. S.

Lanco, L.

A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, “Measuring propagation loss in a multimode semiconductor waveguide,” J. Appl. Phys.97(7), 073105 (2005).
[CrossRef]

Lederer, F.

Lee, H. J.

Lee, K. H.

K. H. Lee, T. G. McRae, G. I. Harris, J. Knittel, and W. P. Bowen, “Cooling and control of a cavity optoelectromechanical system,” Phys. Rev. Lett.104(12), 123604 (2010).
[CrossRef] [PubMed]

Lemaitre, A.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett.98, 113801 (2011).

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett.105(26), 263903 (2010).
[CrossRef] [PubMed]

Lemaître, A.

E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, “Exciton-photon strong-coupling regime for a single quantum dot embedded in a microcavity,” Phys. Rev. Lett.95(6), 067401 (2005).
[CrossRef] [PubMed]

Leo, G.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett.98, 113801 (2011).

L. Ding, C. Belacel, S. Ducci, G. Leo, and I. Favero, “Ultralow loss single-mode silica tapers manufactured by a microheater,” Appl. Opt.49(13), 2441–2445 (2010).
[CrossRef]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett.105(26), 263903 (2010).
[CrossRef] [PubMed]

A. Andronico, I. Favero, and G. Leo, “Difference frequency generation in GaAs microdisks,” Opt. Lett.33(18), 2026–2028 (2008).
[CrossRef] [PubMed]

Levy, J. S.

Li, L.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics4(1), 46–49 (2010).
[CrossRef]

Li, M.

Libchaber, A.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057 (2002), doi:.
[CrossRef]

Lipson, M.

Little, B. E.

S. T. Chu, B. E. Little, W. Pan, T. A. Kaneko, S. A. Sato, and Y. A. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett.11(6), 691–693 (1999).
[CrossRef]

Luo, L. W.

Manolatou, C.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, “Coupling of modes analysis of resonant channel add-drop filters,” IEEE J. Quantum Electron.35(9), 1322–1331 (1999).
[CrossRef]

Martrou, D.

E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, “Exciton-photon strong-coupling regime for a single quantum dot embedded in a microcavity,” Phys. Rev. Lett.95(6), 067401 (2005).
[CrossRef] [PubMed]

McRae, T. G.

K. H. Lee, T. G. McRae, G. I. Harris, J. Knittel, and W. P. Bowen, “Cooling and control of a cavity optoelectromechanical system,” Phys. Rev. Lett.104(12), 123604 (2010).
[CrossRef] [PubMed]

Okamura, Y.

Okawachi, Y.

Orlowsky, K. J.

Ortiz, V.

A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, “Measuring propagation loss in a multimode semiconductor waveguide,” J. Appl. Phys.97(7), 073105 (2005).
[CrossRef]

Oxborrow, M.

M. Oxborrow, “How to simulate the whispering gallery modes of dielectric microresonator in FEMLAB/COMSOL,” Proc. SPIE6452(64520J), 64520J (2007).
[CrossRef]

Ozdemir, S. K.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics4(1), 46–49 (2010).
[CrossRef]

Painter, O.

Pan, W.

S. T. Chu, B. E. Little, W. Pan, T. A. Kaneko, S. A. Sato, and Y. A. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett.11(6), 691–693 (1999).
[CrossRef]

Parkins, A. S.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature443(7112), 671–674 (2006).
[CrossRef] [PubMed]

Parpia, J. M.

S. S. Verbridge, J. M. Parpia, R. B. Reichenbach, L. M. Bellan, and H. G. Craighead, “High quality factor resonance at room temperature with nanostrings under high tensile stress,” J. Appl. Phys.99(12), 124304 (2006).
[CrossRef]

Pernice, W. H. P.

Pertsch, T.

Peter, E.

E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, “Exciton-photon strong-coupling regime for a single quantum dot embedded in a microcavity,” Phys. Rev. Lett.95(6), 067401 (2005).
[CrossRef] [PubMed]

Preston, K.

Pryamikov, A. D.

Regener, R.

R. Regener and W. Sohler, “Loss in low-finesse Ti: LiNbO3 optical waveguide resonators,” Appl. Phys. B36(3), 143–147 (1985), doi:.
[CrossRef]

Reichenbach, R. B.

S. S. Verbridge, J. M. Parpia, R. B. Reichenbach, L. M. Bellan, and H. G. Craighead, “High quality factor resonance at room temperature with nanostrings under high tensile stress,” J. Appl. Phys.99(12), 124304 (2006).
[CrossRef]

Rokhsari, H.

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett.95(3), 033901 (2005).
[CrossRef] [PubMed]

Sagnes, I.

A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, “Measuring propagation loss in a multimode semiconductor waveguide,” J. Appl. Phys.97(7), 073105 (2005).
[CrossRef]

Saha, K.

Sato, S. A.

S. T. Chu, B. E. Little, W. Pan, T. A. Kaneko, S. A. Sato, and Y. A. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett.11(6), 691–693 (1999).
[CrossRef]

Scherer, A.

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett.95(3), 033901 (2005).
[CrossRef] [PubMed]

Schmidt, C.

Senellart, P.

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett.98, 113801 (2011).

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett.105(26), 263903 (2010).
[CrossRef] [PubMed]

E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, “Exciton-photon strong-coupling regime for a single quantum dot embedded in a microcavity,” Phys. Rev. Lett.95(6), 067401 (2005).
[CrossRef] [PubMed]

Sohler, W.

R. Regener and W. Sohler, “Loss in low-finesse Ti: LiNbO3 optical waveguide resonators,” Appl. Phys. B36(3), 143–147 (1985), doi:.
[CrossRef]

Solomon, G. S.

Spencer, D. T.

Sun, P. C.

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett.96(6), 061101 (2010), doi:.
[CrossRef]

Tan, D. T. H.

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett.96(6), 061101 (2010), doi:.
[CrossRef]

Tang, H. X.

Teraoka, I.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057 (2002), doi:.
[CrossRef]

Tien, M. C.

Tilmans, H. A. C.

J. G. E. Gardeniers, H. A. C. Tilmans, and C. C. G. Visser, “LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design,” J. Vac. Sci. Technol. A14(5), 2879–2892 (1996).
[CrossRef]

Tünnermann, A.

Unterreithmeier, Q. P.

Q. P. Unterreithmeier, T. Faust, and J. P. Kotthaus, “Damping of nanomechanical resonators,” Phys. Rev. Lett.105(2), 027205 (2010).
[CrossRef] [PubMed]

Vahala, K.

Vahala, K. J.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature443(7112), 671–674 (2006).
[CrossRef] [PubMed]

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett.95(3), 033901 (2005).
[CrossRef] [PubMed]

Verbridge, S. S.

S. S. Verbridge, J. M. Parpia, R. B. Reichenbach, L. M. Bellan, and H. G. Craighead, “High quality factor resonance at room temperature with nanostrings under high tensile stress,” J. Appl. Phys.99(12), 124304 (2006).
[CrossRef]

Villeneuve, P. R.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, “Coupling of modes analysis of resonant channel add-drop filters,” IEEE J. Quantum Electron.35(9), 1322–1331 (1999).
[CrossRef]

Visser, C. C. G.

J. G. E. Gardeniers, H. A. C. Tilmans, and C. C. G. Visser, “LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design,” J. Vac. Sci. Technol. A14(5), 2879–2892 (1996).
[CrossRef]

Vollmer, F.

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057 (2002), doi:.
[CrossRef]

Wen, Y. H.

Wiederhecker, G. S.

L. W. Luo, G. S. Wiederhecker, K. Preston, and M. Lipson, “Power insensitive silicon microring resonators,” Opt. Lett.37(4), 590–592 (2012).
[CrossRef] [PubMed]

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature462(7273), 633–636 (2009).
[CrossRef] [PubMed]

Wilcut, E.

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature443(7112), 671–674 (2006).
[CrossRef] [PubMed]

Xiao, Y. F.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics4(1), 46–49 (2010).
[CrossRef]

Xiao, Y.-F.

L. He, Y.-F. Xiao, C. Dong, J. Zhu, V. Gaddam, and L. Yang, “Compensation of thermal refraction effect in high-Q toroidal microresonator by polydimethylsiloxane coating,” Appl. Phys. Lett.93(20), 201102 (2008).
[CrossRef]

Yamamoto, S.

Yang, L.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics4(1), 46–49 (2010).
[CrossRef]

L. He, Y.-F. Xiao, C. Dong, J. Zhu, V. Gaddam, and L. Yang, “Compensation of thermal refraction effect in high-Q toroidal microresonator by polydimethylsiloxane coating,” Appl. Phys. Lett.93(20), 201102 (2008).
[CrossRef]

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express12(20), 4742–4750 (2004).
[CrossRef] [PubMed]

Yoshinaka, S.

Zhang, L.

Zhu, J.

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics4(1), 46–49 (2010).
[CrossRef]

L. He, Y.-F. Xiao, C. Dong, J. Zhu, V. Gaddam, and L. Yang, “Compensation of thermal refraction effect in high-Q toroidal microresonator by polydimethylsiloxane coating,” Appl. Phys. Lett.93(20), 201102 (2008).
[CrossRef]

Appl. Opt. (3)

Appl. Phys. B (1)

R. Regener and W. Sohler, “Loss in low-finesse Ti: LiNbO3 optical waveguide resonators,” Appl. Phys. B36(3), 143–147 (1985), doi:.
[CrossRef]

Appl. Phys. Lett. (4)

L. He, Y.-F. Xiao, C. Dong, J. Zhu, V. Gaddam, and L. Yang, “Compensation of thermal refraction effect in high-Q toroidal microresonator by polydimethylsiloxane coating,” Appl. Phys. Lett.93(20), 201102 (2008).
[CrossRef]

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett.96(6), 061101 (2010), doi:.
[CrossRef]

F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057 (2002), doi:.
[CrossRef]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “Wavelength-sized GaAs optomechanical resonators with gigahertz frequency,” Appl. Phys. Lett.98, 113801 (2011).

IEEE J. Quantum Electron. (1)

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, “Coupling of modes analysis of resonant channel add-drop filters,” IEEE J. Quantum Electron.35(9), 1322–1331 (1999).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

S. T. Chu, B. E. Little, W. Pan, T. A. Kaneko, S. A. Sato, and Y. A. Kokubun, “An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid,” IEEE Photon. Technol. Lett.11(6), 691–693 (1999).
[CrossRef]

J. Appl. Phys. (2)

S. S. Verbridge, J. M. Parpia, R. B. Reichenbach, L. M. Bellan, and H. G. Craighead, “High quality factor resonance at room temperature with nanostrings under high tensile stress,” J. Appl. Phys.99(12), 124304 (2006).
[CrossRef]

A. De Rossi, V. Ortiz, M. Calligaro, L. Lanco, S. Ducci, V. Berger, and I. Sagnes, “Measuring propagation loss in a multimode semiconductor waveguide,” J. Appl. Phys.97(7), 073105 (2005).
[CrossRef]

J. Opt. Soc. Am. B (2)

J. Vac. Sci. Technol. A (1)

J. G. E. Gardeniers, H. A. C. Tilmans, and C. C. G. Visser, “LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design,” J. Vac. Sci. Technol. A14(5), 2879–2892 (1996).
[CrossRef]

Nat. Photonics (1)

J. Zhu, S. K. Ozdemir, Y. F. Xiao, L. Li, L. He, D. R. Chen, and L. Yang, “On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator,” Nat. Photonics4(1), 46–49 (2010).
[CrossRef]

Nature (2)

T. Aoki, B. Dayan, E. Wilcut, W. P. Bowen, A. S. Parkins, T. J. Kippenberg, K. J. Vahala, and H. J. Kimble, “Observation of strong coupling between one atom and a monolithic microresonator,” Nature443(7112), 671–674 (2006).
[CrossRef] [PubMed]

G. S. Wiederhecker, L. Chen, A. Gondarenko, and M. Lipson, “Controlling photonic structures using optical forces,” Nature462(7273), 633–636 (2009).
[CrossRef] [PubMed]

Opt. Express (8)

R. M. Camacho, J. Chan, M. Eichenfield, and O. Painter, “Characterization of radiation pressure and thermal effects in a nanoscale optomechanical cavity,” Opt. Express17(18), 15726–15735 (2009).
[CrossRef] [PubMed]

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express12(20), 4742–4750 (2004).
[CrossRef] [PubMed]

C. Schmidt, A. Chipouline, T. Pertsch, A. Tünnermann, O. Egorov, F. Lederer, and L. Deych, “Nonlinear thermal effects in optical microspheres at different wavelength sweeping speeds,” Opt. Express16(9), 6285–6301 (2008), doi:.
[CrossRef] [PubMed]

T. J. Johnson, M. Borselli, and O. Painter, “Self-induced optical modulation of the transmission through a high-Q silicon microdisk resonator,” Opt. Express14(2), 817–831 (2006).
[CrossRef] [PubMed]

W. H. P. Pernice, M. Li, and H. X. Tang, “Time-domain measurement of optical transport in silicon micro-ring resonators,” Opt. Express18(17), 18438–18452 (2010), doi:.
[CrossRef] [PubMed]

S. Chen, L. Zhang, Y. Fei, and T. Cao, “Bistability and self-pulsation phenomena in silicon microring resonators based on nonlinear optical effects,” Opt. Express20(7), 7454–7468 (2012).
[CrossRef] [PubMed]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high Q ring resonator,” Opt. Express17(14), 11366–11370 (2009).
[CrossRef] [PubMed]

M. C. Tien, J. F. Bauters, M. J. R. Heck, D. T. Spencer, D. J. Blumenthal, and J. E. Bowers, “Ultra-high quality factor planar Si3N4 ring resonators on Si substrates,” Opt. Express19(14), 13551–13556 (2011).
[CrossRef] [PubMed]

Opt. Lett. (5)

Phys. Rev. Lett. (5)

Q. P. Unterreithmeier, T. Faust, and J. P. Kotthaus, “Damping of nanomechanical resonators,” Phys. Rev. Lett.105(2), 027205 (2010).
[CrossRef] [PubMed]

E. Peter, P. Senellart, D. Martrou, A. Lemaître, J. Hours, J. M. Gérard, and J. Bloch, “Exciton-photon strong-coupling regime for a single quantum dot embedded in a microcavity,” Phys. Rev. Lett.95(6), 067401 (2005).
[CrossRef] [PubMed]

T. J. Kippenberg, H. Rokhsari, T. Carmon, A. Scherer, and K. J. Vahala, “Analysis of radiation-pressure induced mechanical oscillation of an optical microcavity,” Phys. Rev. Lett.95(3), 033901 (2005).
[CrossRef] [PubMed]

L. Ding, C. Baker, P. Senellart, A. Lemaitre, S. Ducci, G. Leo, and I. Favero, “High frequency GaAs nano-optomechanical disk resonator,” Phys. Rev. Lett.105(26), 263903 (2010).
[CrossRef] [PubMed]

K. H. Lee, T. G. McRae, G. I. Harris, J. Knittel, and W. P. Bowen, “Cooling and control of a cavity optoelectromechanical system,” Phys. Rev. Lett.104(12), 123604 (2010).
[CrossRef] [PubMed]

Proc. SPIE (1)

M. Oxborrow, “How to simulate the whispering gallery modes of dielectric microresonator in FEMLAB/COMSOL,” Proc. SPIE6452(64520J), 64520J (2007).
[CrossRef]

Other (1)

COMSOL material library.

Supplementary Material (1)

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