Abstract

We present a concept of suppression of the influence of variations of the refractive index of air in displacement measuring interferometry. The principle is based on referencing of wavelength of the coherent laser source in atmospheric conditions instead of traditional stabilization of the optical frequency and indirect evaluation of the refractive index of air. The key advantage is in identical beam paths of the position measuring interferometers and the interferometer used for the wavelength stabilization. Design of the optical arrangement presented here to verify the concept is suitable for real interferometric position sensing in technical practice especially where a high resolution measurement within some limited range in atmospheric conditions is needed, e.g. in nanometrology.

© 2012 OSA

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  1. G. D. Rovera, F. Ducos, J. J. Zondy, O. Acef, J. P. Wallerand, J. C. Knight, and P. S. Russell, “Absolute frequency measurement of an I-2 stabilized Nd:YAG optical frequency standard,” Meas. Sci. Technol.13(6), 918–922 (2002).
    [CrossRef]
  2. T. J. Quinn, “Practical realization of the definition of the metre, including recommended radiations of other optical frequency standards (2001),” Metrologia40(2), 103–133 (2003).
    [CrossRef]
  3. B. Edlén, “The refractive index of air,” Metrologia2(2), 71–80 (1966).
    [CrossRef]
  4. B. Bönsch and E. Potulski, “Measurement of the refractive index of air and comparison with modified Edlen’s formulae,” Metrologia35(2), 133–139 (1998).
    [CrossRef]
  5. K. P. Birch and M. J. Downs, “An updated Edlen equation for the refractive-index of air,” Metrologia30(3), 155–162 (1993).
    [CrossRef]
  6. P. E. Ciddor, “Refractive index of air: New equations for the visible and near infrared,” Appl. Opt.35(9), 1566–1573 (1996).
    [CrossRef] [PubMed]
  7. K. P. Birch and M. J. Downs, “Correction to the updated Edlen equation for the refractive-index of air,” Metrologia31(4), 315–316 (1994).
    [CrossRef]
  8. M. Ishige, M. Aketagawa, T. B. Quoc, and Y. Hoshino, “Measurement of air-refractive-index fluctuation from frequency change using a phase modulation homodyne interferometer and an external cavity laser diode,” Meas. Sci. Technol.20(8), 084019 (2009).
    [CrossRef]
  9. J. Lazar, O. Číp, and B. Růžička, “The design of a compact and tunable extended-cavity semiconductor laser,” Meas. Sci. Technol.15(6–N), 9 (2004).
  10. B. Mikel, B. Růžička, O. Číp, J. Lazar, and P. Jedlička, “Highly coherent tunable semiconductor lasers in metrology of length,” Proc. SPIE5036, 8–13 (2003).
    [CrossRef]
  11. T. B. Quoc, M. Ishige, Y. Ohkubo, and M. Aketagawa, “Measurement of air-refractive-index fluctuation from laser frequency shift with uncertainty of order 10(−9),” Meas. Sci. Technol.20(12), 125302 (2009).
    [CrossRef]
  12. S. Topcu, Y. Alayli, J. P. Wallerand, and P. Juncar, “Heterodyne refractometer and air wavelength reference at 633 nm,” Eur. Phys. J.: Appl. Phys.24, 85–90 (2003).
  13. H. Höfler, J. Molnar, C. Schröder, and K. Kulmus, “Interferometrische Wegmessung mit automatischer Brechzahlkompensation,” Tech. Mess57, 346–350 (1990).
  14. J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Suppression of air Refractive index variations in high-resolution interferometry,” Sensors (Basel)11(8), 7644–7655 (2011).
    [CrossRef] [PubMed]
  15. J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Interferometry with direct compensation of fluctuations of refractive index of air,” Proc. SPIE7746(77460E), 1–6 (2010).
  16. J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Standing wave interferometer with stabilization of wavelength on air,” Tech. Mess78(11), 484–488 (2011).
    [CrossRef]
  17. J. Lazar, O. Číp, J. Oulehla, P. Pokorný, A. Fejfar, and J. Stuchlík, “Position measurement in standing wave interferometer for metrology of length,” Proc. SPIE8306, 830607, 830607-7 (2011).
    [CrossRef]
  18. J. Lazar, M. Holá, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Refractive index compensation in over-determined interferometric systems,” Sensors (Basel Switzerland)12(10), 14084–14094 (2012).
    [CrossRef]
  19. O. Číp and F. Petrů, “A scale-linearization method for precise laser interferometry,” Meas. Sci. Technol.11(2), 133–141 (2000).
    [CrossRef]
  20. K.-N. Joo, J. D. Ellis, J. W. Spronck, and R. H. M. Schmidt, “Real-time wavelength corrected heterodyne laser interferometry,” Precis. Eng.35(1), 38–43 (2011).
    [CrossRef]
  21. R. W. Fox, B. R. Washburn, N. R. Newbury, and L. Hollberg, “Wavelength references for interferometry in air,” Appl. Opt.44(36), 7793–7801 (2005).
    [CrossRef] [PubMed]

2012 (1)

J. Lazar, M. Holá, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Refractive index compensation in over-determined interferometric systems,” Sensors (Basel Switzerland)12(10), 14084–14094 (2012).
[CrossRef]

2011 (4)

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Standing wave interferometer with stabilization of wavelength on air,” Tech. Mess78(11), 484–488 (2011).
[CrossRef]

J. Lazar, O. Číp, J. Oulehla, P. Pokorný, A. Fejfar, and J. Stuchlík, “Position measurement in standing wave interferometer for metrology of length,” Proc. SPIE8306, 830607, 830607-7 (2011).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Suppression of air Refractive index variations in high-resolution interferometry,” Sensors (Basel)11(8), 7644–7655 (2011).
[CrossRef] [PubMed]

K.-N. Joo, J. D. Ellis, J. W. Spronck, and R. H. M. Schmidt, “Real-time wavelength corrected heterodyne laser interferometry,” Precis. Eng.35(1), 38–43 (2011).
[CrossRef]

2010 (1)

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Interferometry with direct compensation of fluctuations of refractive index of air,” Proc. SPIE7746(77460E), 1–6 (2010).

2009 (2)

T. B. Quoc, M. Ishige, Y. Ohkubo, and M. Aketagawa, “Measurement of air-refractive-index fluctuation from laser frequency shift with uncertainty of order 10(−9),” Meas. Sci. Technol.20(12), 125302 (2009).
[CrossRef]

M. Ishige, M. Aketagawa, T. B. Quoc, and Y. Hoshino, “Measurement of air-refractive-index fluctuation from frequency change using a phase modulation homodyne interferometer and an external cavity laser diode,” Meas. Sci. Technol.20(8), 084019 (2009).
[CrossRef]

2005 (1)

2004 (1)

J. Lazar, O. Číp, and B. Růžička, “The design of a compact and tunable extended-cavity semiconductor laser,” Meas. Sci. Technol.15(6–N), 9 (2004).

2003 (3)

B. Mikel, B. Růžička, O. Číp, J. Lazar, and P. Jedlička, “Highly coherent tunable semiconductor lasers in metrology of length,” Proc. SPIE5036, 8–13 (2003).
[CrossRef]

T. J. Quinn, “Practical realization of the definition of the metre, including recommended radiations of other optical frequency standards (2001),” Metrologia40(2), 103–133 (2003).
[CrossRef]

S. Topcu, Y. Alayli, J. P. Wallerand, and P. Juncar, “Heterodyne refractometer and air wavelength reference at 633 nm,” Eur. Phys. J.: Appl. Phys.24, 85–90 (2003).

2002 (1)

G. D. Rovera, F. Ducos, J. J. Zondy, O. Acef, J. P. Wallerand, J. C. Knight, and P. S. Russell, “Absolute frequency measurement of an I-2 stabilized Nd:YAG optical frequency standard,” Meas. Sci. Technol.13(6), 918–922 (2002).
[CrossRef]

2000 (1)

O. Číp and F. Petrů, “A scale-linearization method for precise laser interferometry,” Meas. Sci. Technol.11(2), 133–141 (2000).
[CrossRef]

1998 (1)

B. Bönsch and E. Potulski, “Measurement of the refractive index of air and comparison with modified Edlen’s formulae,” Metrologia35(2), 133–139 (1998).
[CrossRef]

1996 (1)

1994 (1)

K. P. Birch and M. J. Downs, “Correction to the updated Edlen equation for the refractive-index of air,” Metrologia31(4), 315–316 (1994).
[CrossRef]

1993 (1)

K. P. Birch and M. J. Downs, “An updated Edlen equation for the refractive-index of air,” Metrologia30(3), 155–162 (1993).
[CrossRef]

1990 (1)

H. Höfler, J. Molnar, C. Schröder, and K. Kulmus, “Interferometrische Wegmessung mit automatischer Brechzahlkompensation,” Tech. Mess57, 346–350 (1990).

1966 (1)

B. Edlén, “The refractive index of air,” Metrologia2(2), 71–80 (1966).
[CrossRef]

Acef, O.

G. D. Rovera, F. Ducos, J. J. Zondy, O. Acef, J. P. Wallerand, J. C. Knight, and P. S. Russell, “Absolute frequency measurement of an I-2 stabilized Nd:YAG optical frequency standard,” Meas. Sci. Technol.13(6), 918–922 (2002).
[CrossRef]

Aketagawa, M.

M. Ishige, M. Aketagawa, T. B. Quoc, and Y. Hoshino, “Measurement of air-refractive-index fluctuation from frequency change using a phase modulation homodyne interferometer and an external cavity laser diode,” Meas. Sci. Technol.20(8), 084019 (2009).
[CrossRef]

T. B. Quoc, M. Ishige, Y. Ohkubo, and M. Aketagawa, “Measurement of air-refractive-index fluctuation from laser frequency shift with uncertainty of order 10(−9),” Meas. Sci. Technol.20(12), 125302 (2009).
[CrossRef]

Alayli, Y.

S. Topcu, Y. Alayli, J. P. Wallerand, and P. Juncar, “Heterodyne refractometer and air wavelength reference at 633 nm,” Eur. Phys. J.: Appl. Phys.24, 85–90 (2003).

Birch, K. P.

K. P. Birch and M. J. Downs, “Correction to the updated Edlen equation for the refractive-index of air,” Metrologia31(4), 315–316 (1994).
[CrossRef]

K. P. Birch and M. J. Downs, “An updated Edlen equation for the refractive-index of air,” Metrologia30(3), 155–162 (1993).
[CrossRef]

Bönsch, B.

B. Bönsch and E. Potulski, “Measurement of the refractive index of air and comparison with modified Edlen’s formulae,” Metrologia35(2), 133–139 (1998).
[CrossRef]

Buchta, Z.

J. Lazar, M. Holá, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Refractive index compensation in over-determined interferometric systems,” Sensors (Basel Switzerland)12(10), 14084–14094 (2012).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Standing wave interferometer with stabilization of wavelength on air,” Tech. Mess78(11), 484–488 (2011).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Suppression of air Refractive index variations in high-resolution interferometry,” Sensors (Basel)11(8), 7644–7655 (2011).
[CrossRef] [PubMed]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Interferometry with direct compensation of fluctuations of refractive index of air,” Proc. SPIE7746(77460E), 1–6 (2010).

Ciddor, P. E.

Cíp, O.

J. Lazar, M. Holá, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Refractive index compensation in over-determined interferometric systems,” Sensors (Basel Switzerland)12(10), 14084–14094 (2012).
[CrossRef]

J. Lazar, O. Číp, J. Oulehla, P. Pokorný, A. Fejfar, and J. Stuchlík, “Position measurement in standing wave interferometer for metrology of length,” Proc. SPIE8306, 830607, 830607-7 (2011).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Standing wave interferometer with stabilization of wavelength on air,” Tech. Mess78(11), 484–488 (2011).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Suppression of air Refractive index variations in high-resolution interferometry,” Sensors (Basel)11(8), 7644–7655 (2011).
[CrossRef] [PubMed]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Interferometry with direct compensation of fluctuations of refractive index of air,” Proc. SPIE7746(77460E), 1–6 (2010).

J. Lazar, O. Číp, and B. Růžička, “The design of a compact and tunable extended-cavity semiconductor laser,” Meas. Sci. Technol.15(6–N), 9 (2004).

B. Mikel, B. Růžička, O. Číp, J. Lazar, and P. Jedlička, “Highly coherent tunable semiconductor lasers in metrology of length,” Proc. SPIE5036, 8–13 (2003).
[CrossRef]

O. Číp and F. Petrů, “A scale-linearization method for precise laser interferometry,” Meas. Sci. Technol.11(2), 133–141 (2000).
[CrossRef]

Cížek, M.

J. Lazar, M. Holá, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Refractive index compensation in over-determined interferometric systems,” Sensors (Basel Switzerland)12(10), 14084–14094 (2012).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Standing wave interferometer with stabilization of wavelength on air,” Tech. Mess78(11), 484–488 (2011).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Suppression of air Refractive index variations in high-resolution interferometry,” Sensors (Basel)11(8), 7644–7655 (2011).
[CrossRef] [PubMed]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Interferometry with direct compensation of fluctuations of refractive index of air,” Proc. SPIE7746(77460E), 1–6 (2010).

Downs, M. J.

K. P. Birch and M. J. Downs, “Correction to the updated Edlen equation for the refractive-index of air,” Metrologia31(4), 315–316 (1994).
[CrossRef]

K. P. Birch and M. J. Downs, “An updated Edlen equation for the refractive-index of air,” Metrologia30(3), 155–162 (1993).
[CrossRef]

Ducos, F.

G. D. Rovera, F. Ducos, J. J. Zondy, O. Acef, J. P. Wallerand, J. C. Knight, and P. S. Russell, “Absolute frequency measurement of an I-2 stabilized Nd:YAG optical frequency standard,” Meas. Sci. Technol.13(6), 918–922 (2002).
[CrossRef]

Edlén, B.

B. Edlén, “The refractive index of air,” Metrologia2(2), 71–80 (1966).
[CrossRef]

Ellis, J. D.

K.-N. Joo, J. D. Ellis, J. W. Spronck, and R. H. M. Schmidt, “Real-time wavelength corrected heterodyne laser interferometry,” Precis. Eng.35(1), 38–43 (2011).
[CrossRef]

Fejfar, A.

J. Lazar, O. Číp, J. Oulehla, P. Pokorný, A. Fejfar, and J. Stuchlík, “Position measurement in standing wave interferometer for metrology of length,” Proc. SPIE8306, 830607, 830607-7 (2011).
[CrossRef]

Fox, R. W.

Höfler, H.

H. Höfler, J. Molnar, C. Schröder, and K. Kulmus, “Interferometrische Wegmessung mit automatischer Brechzahlkompensation,” Tech. Mess57, 346–350 (1990).

Holá, M.

J. Lazar, M. Holá, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Refractive index compensation in over-determined interferometric systems,” Sensors (Basel Switzerland)12(10), 14084–14094 (2012).
[CrossRef]

Hollberg, L.

Hoshino, Y.

M. Ishige, M. Aketagawa, T. B. Quoc, and Y. Hoshino, “Measurement of air-refractive-index fluctuation from frequency change using a phase modulation homodyne interferometer and an external cavity laser diode,” Meas. Sci. Technol.20(8), 084019 (2009).
[CrossRef]

Hrabina, J.

J. Lazar, M. Holá, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Refractive index compensation in over-determined interferometric systems,” Sensors (Basel Switzerland)12(10), 14084–14094 (2012).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Suppression of air Refractive index variations in high-resolution interferometry,” Sensors (Basel)11(8), 7644–7655 (2011).
[CrossRef] [PubMed]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Standing wave interferometer with stabilization of wavelength on air,” Tech. Mess78(11), 484–488 (2011).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Interferometry with direct compensation of fluctuations of refractive index of air,” Proc. SPIE7746(77460E), 1–6 (2010).

Ishige, M.

T. B. Quoc, M. Ishige, Y. Ohkubo, and M. Aketagawa, “Measurement of air-refractive-index fluctuation from laser frequency shift with uncertainty of order 10(−9),” Meas. Sci. Technol.20(12), 125302 (2009).
[CrossRef]

M. Ishige, M. Aketagawa, T. B. Quoc, and Y. Hoshino, “Measurement of air-refractive-index fluctuation from frequency change using a phase modulation homodyne interferometer and an external cavity laser diode,” Meas. Sci. Technol.20(8), 084019 (2009).
[CrossRef]

Jedlicka, P.

B. Mikel, B. Růžička, O. Číp, J. Lazar, and P. Jedlička, “Highly coherent tunable semiconductor lasers in metrology of length,” Proc. SPIE5036, 8–13 (2003).
[CrossRef]

Joo, K.-N.

K.-N. Joo, J. D. Ellis, J. W. Spronck, and R. H. M. Schmidt, “Real-time wavelength corrected heterodyne laser interferometry,” Precis. Eng.35(1), 38–43 (2011).
[CrossRef]

Juncar, P.

S. Topcu, Y. Alayli, J. P. Wallerand, and P. Juncar, “Heterodyne refractometer and air wavelength reference at 633 nm,” Eur. Phys. J.: Appl. Phys.24, 85–90 (2003).

Knight, J. C.

G. D. Rovera, F. Ducos, J. J. Zondy, O. Acef, J. P. Wallerand, J. C. Knight, and P. S. Russell, “Absolute frequency measurement of an I-2 stabilized Nd:YAG optical frequency standard,” Meas. Sci. Technol.13(6), 918–922 (2002).
[CrossRef]

Kulmus, K.

H. Höfler, J. Molnar, C. Schröder, and K. Kulmus, “Interferometrische Wegmessung mit automatischer Brechzahlkompensation,” Tech. Mess57, 346–350 (1990).

Lazar, J.

J. Lazar, M. Holá, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Refractive index compensation in over-determined interferometric systems,” Sensors (Basel Switzerland)12(10), 14084–14094 (2012).
[CrossRef]

J. Lazar, O. Číp, J. Oulehla, P. Pokorný, A. Fejfar, and J. Stuchlík, “Position measurement in standing wave interferometer for metrology of length,” Proc. SPIE8306, 830607, 830607-7 (2011).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Suppression of air Refractive index variations in high-resolution interferometry,” Sensors (Basel)11(8), 7644–7655 (2011).
[CrossRef] [PubMed]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Standing wave interferometer with stabilization of wavelength on air,” Tech. Mess78(11), 484–488 (2011).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Interferometry with direct compensation of fluctuations of refractive index of air,” Proc. SPIE7746(77460E), 1–6 (2010).

J. Lazar, O. Číp, and B. Růžička, “The design of a compact and tunable extended-cavity semiconductor laser,” Meas. Sci. Technol.15(6–N), 9 (2004).

B. Mikel, B. Růžička, O. Číp, J. Lazar, and P. Jedlička, “Highly coherent tunable semiconductor lasers in metrology of length,” Proc. SPIE5036, 8–13 (2003).
[CrossRef]

Mikel, B.

B. Mikel, B. Růžička, O. Číp, J. Lazar, and P. Jedlička, “Highly coherent tunable semiconductor lasers in metrology of length,” Proc. SPIE5036, 8–13 (2003).
[CrossRef]

Molnar, J.

H. Höfler, J. Molnar, C. Schröder, and K. Kulmus, “Interferometrische Wegmessung mit automatischer Brechzahlkompensation,” Tech. Mess57, 346–350 (1990).

Newbury, N. R.

Ohkubo, Y.

T. B. Quoc, M. Ishige, Y. Ohkubo, and M. Aketagawa, “Measurement of air-refractive-index fluctuation from laser frequency shift with uncertainty of order 10(−9),” Meas. Sci. Technol.20(12), 125302 (2009).
[CrossRef]

Oulehla, J.

J. Lazar, O. Číp, J. Oulehla, P. Pokorný, A. Fejfar, and J. Stuchlík, “Position measurement in standing wave interferometer for metrology of length,” Proc. SPIE8306, 830607, 830607-7 (2011).
[CrossRef]

Petru, F.

O. Číp and F. Petrů, “A scale-linearization method for precise laser interferometry,” Meas. Sci. Technol.11(2), 133–141 (2000).
[CrossRef]

Pokorný, P.

J. Lazar, O. Číp, J. Oulehla, P. Pokorný, A. Fejfar, and J. Stuchlík, “Position measurement in standing wave interferometer for metrology of length,” Proc. SPIE8306, 830607, 830607-7 (2011).
[CrossRef]

Potulski, E.

B. Bönsch and E. Potulski, “Measurement of the refractive index of air and comparison with modified Edlen’s formulae,” Metrologia35(2), 133–139 (1998).
[CrossRef]

Quinn, T. J.

T. J. Quinn, “Practical realization of the definition of the metre, including recommended radiations of other optical frequency standards (2001),” Metrologia40(2), 103–133 (2003).
[CrossRef]

Quoc, T. B.

T. B. Quoc, M. Ishige, Y. Ohkubo, and M. Aketagawa, “Measurement of air-refractive-index fluctuation from laser frequency shift with uncertainty of order 10(−9),” Meas. Sci. Technol.20(12), 125302 (2009).
[CrossRef]

M. Ishige, M. Aketagawa, T. B. Quoc, and Y. Hoshino, “Measurement of air-refractive-index fluctuation from frequency change using a phase modulation homodyne interferometer and an external cavity laser diode,” Meas. Sci. Technol.20(8), 084019 (2009).
[CrossRef]

Rovera, G. D.

G. D. Rovera, F. Ducos, J. J. Zondy, O. Acef, J. P. Wallerand, J. C. Knight, and P. S. Russell, “Absolute frequency measurement of an I-2 stabilized Nd:YAG optical frequency standard,” Meas. Sci. Technol.13(6), 918–922 (2002).
[CrossRef]

Russell, P. S.

G. D. Rovera, F. Ducos, J. J. Zondy, O. Acef, J. P. Wallerand, J. C. Knight, and P. S. Russell, “Absolute frequency measurement of an I-2 stabilized Nd:YAG optical frequency standard,” Meas. Sci. Technol.13(6), 918–922 (2002).
[CrossRef]

Ružicka, B.

J. Lazar, O. Číp, and B. Růžička, “The design of a compact and tunable extended-cavity semiconductor laser,” Meas. Sci. Technol.15(6–N), 9 (2004).

B. Mikel, B. Růžička, O. Číp, J. Lazar, and P. Jedlička, “Highly coherent tunable semiconductor lasers in metrology of length,” Proc. SPIE5036, 8–13 (2003).
[CrossRef]

Schmidt, R. H. M.

K.-N. Joo, J. D. Ellis, J. W. Spronck, and R. H. M. Schmidt, “Real-time wavelength corrected heterodyne laser interferometry,” Precis. Eng.35(1), 38–43 (2011).
[CrossRef]

Schröder, C.

H. Höfler, J. Molnar, C. Schröder, and K. Kulmus, “Interferometrische Wegmessung mit automatischer Brechzahlkompensation,” Tech. Mess57, 346–350 (1990).

Spronck, J. W.

K.-N. Joo, J. D. Ellis, J. W. Spronck, and R. H. M. Schmidt, “Real-time wavelength corrected heterodyne laser interferometry,” Precis. Eng.35(1), 38–43 (2011).
[CrossRef]

Stuchlík, J.

J. Lazar, O. Číp, J. Oulehla, P. Pokorný, A. Fejfar, and J. Stuchlík, “Position measurement in standing wave interferometer for metrology of length,” Proc. SPIE8306, 830607, 830607-7 (2011).
[CrossRef]

Topcu, S.

S. Topcu, Y. Alayli, J. P. Wallerand, and P. Juncar, “Heterodyne refractometer and air wavelength reference at 633 nm,” Eur. Phys. J.: Appl. Phys.24, 85–90 (2003).

Wallerand, J. P.

S. Topcu, Y. Alayli, J. P. Wallerand, and P. Juncar, “Heterodyne refractometer and air wavelength reference at 633 nm,” Eur. Phys. J.: Appl. Phys.24, 85–90 (2003).

G. D. Rovera, F. Ducos, J. J. Zondy, O. Acef, J. P. Wallerand, J. C. Knight, and P. S. Russell, “Absolute frequency measurement of an I-2 stabilized Nd:YAG optical frequency standard,” Meas. Sci. Technol.13(6), 918–922 (2002).
[CrossRef]

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Zondy, J. J.

G. D. Rovera, F. Ducos, J. J. Zondy, O. Acef, J. P. Wallerand, J. C. Knight, and P. S. Russell, “Absolute frequency measurement of an I-2 stabilized Nd:YAG optical frequency standard,” Meas. Sci. Technol.13(6), 918–922 (2002).
[CrossRef]

Appl. Opt. (2)

Eur. Phys. J.: Appl. Phys. (1)

S. Topcu, Y. Alayli, J. P. Wallerand, and P. Juncar, “Heterodyne refractometer and air wavelength reference at 633 nm,” Eur. Phys. J.: Appl. Phys.24, 85–90 (2003).

Meas. Sci. Technol. (5)

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[CrossRef]

M. Ishige, M. Aketagawa, T. B. Quoc, and Y. Hoshino, “Measurement of air-refractive-index fluctuation from frequency change using a phase modulation homodyne interferometer and an external cavity laser diode,” Meas. Sci. Technol.20(8), 084019 (2009).
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G. D. Rovera, F. Ducos, J. J. Zondy, O. Acef, J. P. Wallerand, J. C. Knight, and P. S. Russell, “Absolute frequency measurement of an I-2 stabilized Nd:YAG optical frequency standard,” Meas. Sci. Technol.13(6), 918–922 (2002).
[CrossRef]

O. Číp and F. Petrů, “A scale-linearization method for precise laser interferometry,” Meas. Sci. Technol.11(2), 133–141 (2000).
[CrossRef]

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[CrossRef]

Precis. Eng. (1)

K.-N. Joo, J. D. Ellis, J. W. Spronck, and R. H. M. Schmidt, “Real-time wavelength corrected heterodyne laser interferometry,” Precis. Eng.35(1), 38–43 (2011).
[CrossRef]

Proc. SPIE (3)

B. Mikel, B. Růžička, O. Číp, J. Lazar, and P. Jedlička, “Highly coherent tunable semiconductor lasers in metrology of length,” Proc. SPIE5036, 8–13 (2003).
[CrossRef]

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Interferometry with direct compensation of fluctuations of refractive index of air,” Proc. SPIE7746(77460E), 1–6 (2010).

J. Lazar, O. Číp, J. Oulehla, P. Pokorný, A. Fejfar, and J. Stuchlík, “Position measurement in standing wave interferometer for metrology of length,” Proc. SPIE8306, 830607, 830607-7 (2011).
[CrossRef]

Sensors (Basel Switzerland) (1)

J. Lazar, M. Holá, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Refractive index compensation in over-determined interferometric systems,” Sensors (Basel Switzerland)12(10), 14084–14094 (2012).
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Sensors (Basel) (1)

J. Lazar, O. Číp, M. Čížek, J. Hrabina, and Z. Buchta, “Suppression of air Refractive index variations in high-resolution interferometry,” Sensors (Basel)11(8), 7644–7655 (2011).
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[CrossRef]

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Figures (4)

Fig. 1
Fig. 1

Configuration with corner-cube reflectors measuring directly the overall length and two particluar displacements. CC: corner-cube reflector, PBS: polarizing beamsplitter, NP: non-polarizing plane, λ/2: half-wave plate, F: fiber-optic light delivery, OA, OB, OC outputs, Lc. La, Lb: particular lengths determining the position of the moving carriage.

Fig. 2
Fig. 2

Recording of the variations of the interferometers A (red line), B (yellow line), and overall length measuring C (blue line) together with the sum of A and B (green line) over time in a closed thermal box (left) and opened (right).

Fig. 3
Fig. 3

Recording of a slow refractive index drift evaluated from measurement of air temperature, pressure, humidity and CO2 content.

Fig. 4
Fig. 4

Recording of the optical frequency tuning of the laser following stabilized wavelength over the measuring range.

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

λ a = 1 n a c ν stab
n a  =f(υ, p, RH,  p CO2 )
ν= 1 n a c λ a
λ a = L C N

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