Abstract

Resonant diffractive elements as the association of a surface corrugation with a surface wave exhibit boosted diffraction efficiency and high selectivity properties under the effect of ultra-shallow subwavelength surface reliefs. This is demonstrated by four examples of resonant functional structures made of very different material systems over the optical spectrum. All four structures are fabricated by slow wet etching as the inherent lateral broadening in corrugations of very small aspect ratio can be neglected.

© 2012 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. I. A. Avrutsky and V. A. Sychugov, “Reflection of a beam of finite size from a corrugated waveguide,” J. Mod. Opt.36(11), 1527–1539 (1989).
    [CrossRef]
  2. M. Flury, A. V. Tishchenko, and O. Parriaux, “The leaky mode resonance condition ensures 100% diffraction efficiency of mirror-based resonant gratings,” J. Lightwave Technol.25(7), 1870–1878 (2007).
    [CrossRef]
  3. W. L. Barnes, T. W. Preist, S. C. Kitson, and J. R. Sambles, “Physical origin of photonic energy gaps in the propagation of surface plasmons on gratings,” Phys. Rev. B Condens. Matter54(9), 6227–6244 (1996).
    [CrossRef] [PubMed]
  4. C. C. Lee, Y. C. Chang, C. M. Wang, J. Y. Chang, and G. C. Chi, “Silicon-based transmissive diffractive optical element,” Opt. Lett.28(14), 1260–1262 (2003).
    [CrossRef] [PubMed]
  5. A. Talneau, F. Lemarchand, A. L. Fehrembach, J. Girard, and A. Sentenac, “Deeply-etched two-dimensional grating in a Ta2O5 guiding layer for very narrow spectral filtering,” Microelectron. Eng.87(5-8), 1360–1362 (2010).
    [CrossRef]
  6. D. Harvey, “Modern Analytical Chemistry,” Publisher: McGraw-Hill Companies, Inc., Science/Engineering/Math, ISBN: 0072375477, edition 2000.
  7. L. Maissel and R. Glang, Handbook of Thin Film Technology (McGraw-Hill, 1970).
  8. L. Mashev and E. Popov, “Zero order anomaly of dielectric coated gratings,” Opt. Commun.55(6), 377–380 (1985).
    [CrossRef]
  9. G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron.15(7), 886–887 (1985).
    [CrossRef]
  10. D. Pietroy, O. Parriaux, T. Epalle, and S. Tonchev, “Contactless functional testing of grating-coupled evanescent wave (bio)chemical sensors,” Sens. Actuators B Chem.159(1), 27–32 (2011).
    [CrossRef]
  11. N. Destouches, J.-C. Pommier, O. Parriaux, T. Clausnitzer, N. Lyndin, and S. Tonchev, “Narrow band resonant grating of 100% reflection under normal incidence,” Opt. Express14(26), 12613–12622 (2006).
    [CrossRef] [PubMed]
  12. O. Parriaux, A. V. Tishchenko, N. M. Lyndin, and J. F. Bisson, US patent 7778305, 2010.
  13. M. A. Ahmed, J. Schulz, A. Voss, O. Parriaux, J.-C. Pommier, and T. Graf, “Radially polarized 3 kW beam from a CO2 laser with an intracavity resonant grating mirror,” Opt. Lett.32(13), 1824–1826 (2007).
    [CrossRef] [PubMed]
  14. P. Muys and M. Youn, “Mathematical modeling of laser sublimation cutting,” Laser Phys.18(4), 495–499 (2008).
    [CrossRef]
  15. R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Proc.12, 21–30 (2011).
    [CrossRef]
  16. M. C. Hutley and D. Maystre, “The total absorption of light by a diffraction grating,” Opt. Commun.19(3), 431–436 (1976).
    [CrossRef]
  17. Y. Jourlin, S. Tonchev, A. V. Tishchenko, C. Pedri, C. Veillas, O. Parriaux, A. Last, and Y. Lacroute, “Spatially and polarization resolved plasmon mediated transmission through continuous metal films,” Opt. Express17(14), 12155–12166 (2009).
    [CrossRef] [PubMed]
  18. I. F. Salakhutdinov, V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, O. Parriaux, and F. A. Pudonin, “Anomalous light reflection at the surface of a corrugated thin metal film,” IEEE J. Quantum Electron.34(6), 1054–1060 (1998).
    [CrossRef]
  19. F. Garrelie, J.-P. Colombier, F. Pigeon, S. Tonchev, N. Faure, M. Bounhalli, S. Reynaud, and O. Parriaux, “Evidence of surface plasmon resonance in ultrafast laser-induced ripples,” Opt. Express19(10), 9035–9043 (2011).
    [CrossRef] [PubMed]
  20. D. Basting, K. Pippert, and U. Stamm, “History and future prospects of excimer laser technology,” Riken Review no. 43, focused on 2nd International Symposium on Laser Precision Microfabrication (LPM2001), Jan. 2002.
  21. H. Ridaoui, F. Wieder, A. Ponche, and O. Soppera, “Direct ArF laser photopatterning of metal oxide nanostructures prepared by the sol-gel route,” Nanotechnology21(6), 065303 (2010).
    [CrossRef] [PubMed]
  22. Y. Jourlin, S. Tonchev, A. V. Tishchenko, C. Pédrix, O. Parriaux, D. Jamon, and F. Lacour, “Wideband, wide angular spectrum resonant reflection by mode coalescence in dual-mode slab waveguide,” presented at the 8th EOS Topical Meeting on Diffractive Optics, Delft, Netherlands, 27 Feb.-1 Mar. 2012.

2011 (3)

D. Pietroy, O. Parriaux, T. Epalle, and S. Tonchev, “Contactless functional testing of grating-coupled evanescent wave (bio)chemical sensors,” Sens. Actuators B Chem.159(1), 27–32 (2011).
[CrossRef]

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Proc.12, 21–30 (2011).
[CrossRef]

F. Garrelie, J.-P. Colombier, F. Pigeon, S. Tonchev, N. Faure, M. Bounhalli, S. Reynaud, and O. Parriaux, “Evidence of surface plasmon resonance in ultrafast laser-induced ripples,” Opt. Express19(10), 9035–9043 (2011).
[CrossRef] [PubMed]

2010 (2)

H. Ridaoui, F. Wieder, A. Ponche, and O. Soppera, “Direct ArF laser photopatterning of metal oxide nanostructures prepared by the sol-gel route,” Nanotechnology21(6), 065303 (2010).
[CrossRef] [PubMed]

A. Talneau, F. Lemarchand, A. L. Fehrembach, J. Girard, and A. Sentenac, “Deeply-etched two-dimensional grating in a Ta2O5 guiding layer for very narrow spectral filtering,” Microelectron. Eng.87(5-8), 1360–1362 (2010).
[CrossRef]

2009 (1)

2008 (1)

P. Muys and M. Youn, “Mathematical modeling of laser sublimation cutting,” Laser Phys.18(4), 495–499 (2008).
[CrossRef]

2007 (2)

2006 (1)

2003 (1)

1998 (1)

I. F. Salakhutdinov, V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, O. Parriaux, and F. A. Pudonin, “Anomalous light reflection at the surface of a corrugated thin metal film,” IEEE J. Quantum Electron.34(6), 1054–1060 (1998).
[CrossRef]

1996 (1)

W. L. Barnes, T. W. Preist, S. C. Kitson, and J. R. Sambles, “Physical origin of photonic energy gaps in the propagation of surface plasmons on gratings,” Phys. Rev. B Condens. Matter54(9), 6227–6244 (1996).
[CrossRef] [PubMed]

1989 (1)

I. A. Avrutsky and V. A. Sychugov, “Reflection of a beam of finite size from a corrugated waveguide,” J. Mod. Opt.36(11), 1527–1539 (1989).
[CrossRef]

1985 (2)

L. Mashev and E. Popov, “Zero order anomaly of dielectric coated gratings,” Opt. Commun.55(6), 377–380 (1985).
[CrossRef]

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron.15(7), 886–887 (1985).
[CrossRef]

1976 (1)

M. C. Hutley and D. Maystre, “The total absorption of light by a diffraction grating,” Opt. Commun.19(3), 431–436 (1976).
[CrossRef]

Abdou-Ahmed, M.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Proc.12, 21–30 (2011).
[CrossRef]

Ahmed, M. A.

Avrutsky, I. A.

I. A. Avrutsky and V. A. Sychugov, “Reflection of a beam of finite size from a corrugated waveguide,” J. Mod. Opt.36(11), 1527–1539 (1989).
[CrossRef]

Barnes, W. L.

W. L. Barnes, T. W. Preist, S. C. Kitson, and J. R. Sambles, “Physical origin of photonic energy gaps in the propagation of surface plasmons on gratings,” Phys. Rev. B Condens. Matter54(9), 6227–6244 (1996).
[CrossRef] [PubMed]

Bounhalli, M.

Chang, J. Y.

Chang, Y. C.

Chi, G. C.

Clausnitzer, T.

Colombier, J.-P.

Destouches, N.

Epalle, T.

D. Pietroy, O. Parriaux, T. Epalle, and S. Tonchev, “Contactless functional testing of grating-coupled evanescent wave (bio)chemical sensors,” Sens. Actuators B Chem.159(1), 27–32 (2011).
[CrossRef]

Faure, N.

Fehrembach, A. L.

A. Talneau, F. Lemarchand, A. L. Fehrembach, J. Girard, and A. Sentenac, “Deeply-etched two-dimensional grating in a Ta2O5 guiding layer for very narrow spectral filtering,” Microelectron. Eng.87(5-8), 1360–1362 (2010).
[CrossRef]

Flury, M.

Garrelie, F.

Girard, J.

A. Talneau, F. Lemarchand, A. L. Fehrembach, J. Girard, and A. Sentenac, “Deeply-etched two-dimensional grating in a Ta2O5 guiding layer for very narrow spectral filtering,” Microelectron. Eng.87(5-8), 1360–1362 (2010).
[CrossRef]

Golubenko, G. A.

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron.15(7), 886–887 (1985).
[CrossRef]

Graf, T.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Proc.12, 21–30 (2011).
[CrossRef]

M. A. Ahmed, J. Schulz, A. Voss, O. Parriaux, J.-C. Pommier, and T. Graf, “Radially polarized 3 kW beam from a CO2 laser with an intracavity resonant grating mirror,” Opt. Lett.32(13), 1824–1826 (2007).
[CrossRef] [PubMed]

Hutley, M. C.

M. C. Hutley and D. Maystre, “The total absorption of light by a diffraction grating,” Opt. Commun.19(3), 431–436 (1976).
[CrossRef]

Jourlin, Y.

Kitson, S. C.

W. L. Barnes, T. W. Preist, S. C. Kitson, and J. R. Sambles, “Physical origin of photonic energy gaps in the propagation of surface plasmons on gratings,” Phys. Rev. B Condens. Matter54(9), 6227–6244 (1996).
[CrossRef] [PubMed]

Kraus, M.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Proc.12, 21–30 (2011).
[CrossRef]

Lacroute, Y.

Last, A.

Lee, C. C.

Lemarchand, F.

A. Talneau, F. Lemarchand, A. L. Fehrembach, J. Girard, and A. Sentenac, “Deeply-etched two-dimensional grating in a Ta2O5 guiding layer for very narrow spectral filtering,” Microelectron. Eng.87(5-8), 1360–1362 (2010).
[CrossRef]

Lyndin, N.

Mashev, L.

L. Mashev and E. Popov, “Zero order anomaly of dielectric coated gratings,” Opt. Commun.55(6), 377–380 (1985).
[CrossRef]

Maystre, D.

M. C. Hutley and D. Maystre, “The total absorption of light by a diffraction grating,” Opt. Commun.19(3), 431–436 (1976).
[CrossRef]

Michalowski, A.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Proc.12, 21–30 (2011).
[CrossRef]

Muys, P.

P. Muys and M. Youn, “Mathematical modeling of laser sublimation cutting,” Laser Phys.18(4), 495–499 (2008).
[CrossRef]

Onuseit, V.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Proc.12, 21–30 (2011).
[CrossRef]

Parriaux, O.

D. Pietroy, O. Parriaux, T. Epalle, and S. Tonchev, “Contactless functional testing of grating-coupled evanescent wave (bio)chemical sensors,” Sens. Actuators B Chem.159(1), 27–32 (2011).
[CrossRef]

F. Garrelie, J.-P. Colombier, F. Pigeon, S. Tonchev, N. Faure, M. Bounhalli, S. Reynaud, and O. Parriaux, “Evidence of surface plasmon resonance in ultrafast laser-induced ripples,” Opt. Express19(10), 9035–9043 (2011).
[CrossRef] [PubMed]

Y. Jourlin, S. Tonchev, A. V. Tishchenko, C. Pedri, C. Veillas, O. Parriaux, A. Last, and Y. Lacroute, “Spatially and polarization resolved plasmon mediated transmission through continuous metal films,” Opt. Express17(14), 12155–12166 (2009).
[CrossRef] [PubMed]

M. A. Ahmed, J. Schulz, A. Voss, O. Parriaux, J.-C. Pommier, and T. Graf, “Radially polarized 3 kW beam from a CO2 laser with an intracavity resonant grating mirror,” Opt. Lett.32(13), 1824–1826 (2007).
[CrossRef] [PubMed]

M. Flury, A. V. Tishchenko, and O. Parriaux, “The leaky mode resonance condition ensures 100% diffraction efficiency of mirror-based resonant gratings,” J. Lightwave Technol.25(7), 1870–1878 (2007).
[CrossRef]

N. Destouches, J.-C. Pommier, O. Parriaux, T. Clausnitzer, N. Lyndin, and S. Tonchev, “Narrow band resonant grating of 100% reflection under normal incidence,” Opt. Express14(26), 12613–12622 (2006).
[CrossRef] [PubMed]

I. F. Salakhutdinov, V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, O. Parriaux, and F. A. Pudonin, “Anomalous light reflection at the surface of a corrugated thin metal film,” IEEE J. Quantum Electron.34(6), 1054–1060 (1998).
[CrossRef]

Pedri, C.

Pietroy, D.

D. Pietroy, O. Parriaux, T. Epalle, and S. Tonchev, “Contactless functional testing of grating-coupled evanescent wave (bio)chemical sensors,” Sens. Actuators B Chem.159(1), 27–32 (2011).
[CrossRef]

Pigeon, F.

Pommier, J.-C.

Ponche, A.

H. Ridaoui, F. Wieder, A. Ponche, and O. Soppera, “Direct ArF laser photopatterning of metal oxide nanostructures prepared by the sol-gel route,” Nanotechnology21(6), 065303 (2010).
[CrossRef] [PubMed]

Popov, E.

L. Mashev and E. Popov, “Zero order anomaly of dielectric coated gratings,” Opt. Commun.55(6), 377–380 (1985).
[CrossRef]

Preist, T. W.

W. L. Barnes, T. W. Preist, S. C. Kitson, and J. R. Sambles, “Physical origin of photonic energy gaps in the propagation of surface plasmons on gratings,” Phys. Rev. B Condens. Matter54(9), 6227–6244 (1996).
[CrossRef] [PubMed]

Pudonin, F. A.

I. F. Salakhutdinov, V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, O. Parriaux, and F. A. Pudonin, “Anomalous light reflection at the surface of a corrugated thin metal film,” IEEE J. Quantum Electron.34(6), 1054–1060 (1998).
[CrossRef]

Reynaud, S.

Ridaoui, H.

H. Ridaoui, F. Wieder, A. Ponche, and O. Soppera, “Direct ArF laser photopatterning of metal oxide nanostructures prepared by the sol-gel route,” Nanotechnology21(6), 065303 (2010).
[CrossRef] [PubMed]

Rominger, V.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Proc.12, 21–30 (2011).
[CrossRef]

Salakhutdinov, I. F.

I. F. Salakhutdinov, V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, O. Parriaux, and F. A. Pudonin, “Anomalous light reflection at the surface of a corrugated thin metal film,” IEEE J. Quantum Electron.34(6), 1054–1060 (1998).
[CrossRef]

Sambles, J. R.

W. L. Barnes, T. W. Preist, S. C. Kitson, and J. R. Sambles, “Physical origin of photonic energy gaps in the propagation of surface plasmons on gratings,” Phys. Rev. B Condens. Matter54(9), 6227–6244 (1996).
[CrossRef] [PubMed]

Schulz, J.

Sentenac, A.

A. Talneau, F. Lemarchand, A. L. Fehrembach, J. Girard, and A. Sentenac, “Deeply-etched two-dimensional grating in a Ta2O5 guiding layer for very narrow spectral filtering,” Microelectron. Eng.87(5-8), 1360–1362 (2010).
[CrossRef]

Soppera, O.

H. Ridaoui, F. Wieder, A. Ponche, and O. Soppera, “Direct ArF laser photopatterning of metal oxide nanostructures prepared by the sol-gel route,” Nanotechnology21(6), 065303 (2010).
[CrossRef] [PubMed]

Svakhin, A. S.

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron.15(7), 886–887 (1985).
[CrossRef]

Sychugov, V. A.

I. F. Salakhutdinov, V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, O. Parriaux, and F. A. Pudonin, “Anomalous light reflection at the surface of a corrugated thin metal film,” IEEE J. Quantum Electron.34(6), 1054–1060 (1998).
[CrossRef]

I. A. Avrutsky and V. A. Sychugov, “Reflection of a beam of finite size from a corrugated waveguide,” J. Mod. Opt.36(11), 1527–1539 (1989).
[CrossRef]

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron.15(7), 886–887 (1985).
[CrossRef]

Talneau, A.

A. Talneau, F. Lemarchand, A. L. Fehrembach, J. Girard, and A. Sentenac, “Deeply-etched two-dimensional grating in a Ta2O5 guiding layer for very narrow spectral filtering,” Microelectron. Eng.87(5-8), 1360–1362 (2010).
[CrossRef]

Tishchenko, A. V.

Y. Jourlin, S. Tonchev, A. V. Tishchenko, C. Pedri, C. Veillas, O. Parriaux, A. Last, and Y. Lacroute, “Spatially and polarization resolved plasmon mediated transmission through continuous metal films,” Opt. Express17(14), 12155–12166 (2009).
[CrossRef] [PubMed]

M. Flury, A. V. Tishchenko, and O. Parriaux, “The leaky mode resonance condition ensures 100% diffraction efficiency of mirror-based resonant gratings,” J. Lightwave Technol.25(7), 1870–1878 (2007).
[CrossRef]

I. F. Salakhutdinov, V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, O. Parriaux, and F. A. Pudonin, “Anomalous light reflection at the surface of a corrugated thin metal film,” IEEE J. Quantum Electron.34(6), 1054–1060 (1998).
[CrossRef]

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron.15(7), 886–887 (1985).
[CrossRef]

Tonchev, S.

Usievich, B. A.

I. F. Salakhutdinov, V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, O. Parriaux, and F. A. Pudonin, “Anomalous light reflection at the surface of a corrugated thin metal film,” IEEE J. Quantum Electron.34(6), 1054–1060 (1998).
[CrossRef]

Veillas, C.

Voss, A.

Wang, C. M.

Weber, R.

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Proc.12, 21–30 (2011).
[CrossRef]

Wieder, F.

H. Ridaoui, F. Wieder, A. Ponche, and O. Soppera, “Direct ArF laser photopatterning of metal oxide nanostructures prepared by the sol-gel route,” Nanotechnology21(6), 065303 (2010).
[CrossRef] [PubMed]

Youn, M.

P. Muys and M. Youn, “Mathematical modeling of laser sublimation cutting,” Laser Phys.18(4), 495–499 (2008).
[CrossRef]

IEEE J. Quantum Electron. (1)

I. F. Salakhutdinov, V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, O. Parriaux, and F. A. Pudonin, “Anomalous light reflection at the surface of a corrugated thin metal film,” IEEE J. Quantum Electron.34(6), 1054–1060 (1998).
[CrossRef]

J. Lightwave Technol. (1)

J. Mod. Opt. (1)

I. A. Avrutsky and V. A. Sychugov, “Reflection of a beam of finite size from a corrugated waveguide,” J. Mod. Opt.36(11), 1527–1539 (1989).
[CrossRef]

Laser Phys. (1)

P. Muys and M. Youn, “Mathematical modeling of laser sublimation cutting,” Laser Phys.18(4), 495–499 (2008).
[CrossRef]

Microelectron. Eng. (1)

A. Talneau, F. Lemarchand, A. L. Fehrembach, J. Girard, and A. Sentenac, “Deeply-etched two-dimensional grating in a Ta2O5 guiding layer for very narrow spectral filtering,” Microelectron. Eng.87(5-8), 1360–1362 (2010).
[CrossRef]

Nanotechnology (1)

H. Ridaoui, F. Wieder, A. Ponche, and O. Soppera, “Direct ArF laser photopatterning of metal oxide nanostructures prepared by the sol-gel route,” Nanotechnology21(6), 065303 (2010).
[CrossRef] [PubMed]

Opt. Commun. (2)

L. Mashev and E. Popov, “Zero order anomaly of dielectric coated gratings,” Opt. Commun.55(6), 377–380 (1985).
[CrossRef]

M. C. Hutley and D. Maystre, “The total absorption of light by a diffraction grating,” Opt. Commun.19(3), 431–436 (1976).
[CrossRef]

Opt. Express (3)

Opt. Lett. (2)

Phys. Proc. (1)

R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, “Effects of radial and tangential polarization in laser material processing,” Phys. Proc.12, 21–30 (2011).
[CrossRef]

Phys. Rev. B Condens. Matter (1)

W. L. Barnes, T. W. Preist, S. C. Kitson, and J. R. Sambles, “Physical origin of photonic energy gaps in the propagation of surface plasmons on gratings,” Phys. Rev. B Condens. Matter54(9), 6227–6244 (1996).
[CrossRef] [PubMed]

Sens. Actuators B Chem. (1)

D. Pietroy, O. Parriaux, T. Epalle, and S. Tonchev, “Contactless functional testing of grating-coupled evanescent wave (bio)chemical sensors,” Sens. Actuators B Chem.159(1), 27–32 (2011).
[CrossRef]

Sov. J. Quantum Electron. (1)

G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron.15(7), 886–887 (1985).
[CrossRef]

Other (5)

D. Harvey, “Modern Analytical Chemistry,” Publisher: McGraw-Hill Companies, Inc., Science/Engineering/Math, ISBN: 0072375477, edition 2000.

L. Maissel and R. Glang, Handbook of Thin Film Technology (McGraw-Hill, 1970).

O. Parriaux, A. V. Tishchenko, N. M. Lyndin, and J. F. Bisson, US patent 7778305, 2010.

D. Basting, K. Pippert, and U. Stamm, “History and future prospects of excimer laser technology,” Riken Review no. 43, focused on 2nd International Symposium on Laser Precision Microfabrication (LPM2001), Jan. 2002.

Y. Jourlin, S. Tonchev, A. V. Tishchenko, C. Pédrix, O. Parriaux, D. Jamon, and F. Lacour, “Wideband, wide angular spectrum resonant reflection by mode coalescence in dual-mode slab waveguide,” presented at the 8th EOS Topical Meeting on Diffractive Optics, Delft, Netherlands, 27 Feb.-1 Mar. 2012.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (10)

Fig. 1
Fig. 1

(a) True guided mode-, (b) leaky mode- and (c) plasmon mode-mediated resonant grating structures with modal field sketch.

Fig. 2
Fig. 2

Grating coupling of a free space wave to a waveguide mode with associated wavelength, angular and polarization selective resonant reflection, (a) as a free space-wave filter, (b) as a laser mirror for emission control.

Fig. 3
Fig. 3

(a) AFM scan of wet etched holes at the surface of an ion plated Ta2O5 layer. (b) SEM top view of the same with holes of 550 nm diameter.

Fig. 4
Fig. 4

AFM pictures of 200 nm deep, 3 µm wide grooves etched in a layer of amorphous Germanium. (a) Dry RIBE etching. (b) Alkaline wet etching.

Fig. 5
Fig. 5

(a) Symbolic representation of leaky mode mediated TE tunneling into the substrate through the multilayer of a CO2 laser mirror. (b) Double-dip TE and TM reflection spectra of (a)

Fig. 6
Fig. 6

TE and TM reflection spectra in the near IR of a wide band polarization selective laser mirror with moderate reflection differential for a high Q laser resonator. Inset: experimentally obtained donut mode with radial polarization, resulting in the typical bow-tie shape after a 45° linear analyzer.

Fig. 7
Fig. 7

AFM picture of a small aspect ratio wet etched amorphous silicon grating showing the 450 nm wide, 50 nm deep grooves of the polarization selective laser mirror of Fig. 6.

Fig. 8
Fig. 8

(a) Picture under white light illumination of the Ni test-nanogratings of differing periods. (b) AFM scan of a 560 nm period, 10 nm deep undulation at the surface of a Nickel plate. (c) Histogram of ripple formation versus the period of the seed grating.

Fig. 9
Fig. 9

AFM scan of an 11 nm deep wet etched corrugation in a layer of LaF3.

Fig. 10
Fig. 10

Reflection spectra of a polarizing grating mirror for an ArF excimer laser

Metrics