Abstract

With the development and construction of high peak power lasers it has become more and more important to improve the laser-induced damage threshold (LIDT) of optical coatings. In this paper, ZrO2 coatings were deposited by sol-gel dip-coating method and further treated by conventional furnace annealing (CFA) and rapid thermal annealing (RTA) at different temperatures. By measuring the Raman spectra, optical constants and LIDT, the influence of annealing on the crystal structures, refractive indices, laser-induced damage characters of ZrO2 coatings were analyzed. The results show that RTA is effective in tuning the crystal structures of ZrO2 coatings. Lattice mismatch between monoclinic and tetragonal phases happened on CFA treated film reduces its refractive index, hence the film annealed by RTA at 800 °C realizes a higher refractive index. Compared with CFA annealed films, RTA annealed films were no more susceptible to laser damage due to their crystal structure difference caused lager band gap.

© 2012 OSA

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  1. X. Wang and J. Shen, “A review of contamination-resistant antireflective sol-gel coatings,” J. Sol-Gel Sci. Technol.61(1), 206–212 (2012).
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    [CrossRef]
  3. H. Li, H. Xiong, Y. Tang, and L. Hu, “ZrO2/SiO2 Two-Layer Antireflective Coatings by Sol-Gel Process,” Rare Metal Mat. Eng.39, 145–148 (2010).
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    [CrossRef]
  13. L. F. Cueto, E. Sánchez, L. M. Torres-Martínez, and G. A. Hirata, “On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates,” Mater. Charact.55(4-5), 263–271 (2005).
    [CrossRef]
  14. W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002).
    [CrossRef]
  15. H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, “Electronic band structure of zirconia and hafnia polymorphs from the GW perspective,” Phys. Rev. B81(8), 085119 (2010).
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    [CrossRef]

2012 (1)

X. Wang and J. Shen, “A review of contamination-resistant antireflective sol-gel coatings,” J. Sol-Gel Sci. Technol.61(1), 206–212 (2012).
[CrossRef]

2011 (2)

X. Dieudonné, K. Vallé, and P. Belleville, “Towards new levels for stacking of sol-gel functional coatings,” Opt. Express19(17), 16356–16364 (2011).
[CrossRef] [PubMed]

X. Wang, J. Shen, and Q. Pan, “Raman spectroscopy of sol-gel derived titanium oxide thin films,” J. Raman Spectrosc.42(7), 1578–1582 (2011).
[CrossRef]

2010 (3)

H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, “Electronic band structure of zirconia and hafnia polymorphs from the GW perspective,” Phys. Rev. B81(8), 085119 (2010).
[CrossRef]

H. Li, H. Xiong, Y. Tang, and L. Hu, “ZrO2/SiO2 Two-Layer Antireflective Coatings by Sol-Gel Process,” Rare Metal Mat. Eng.39, 145–148 (2010).

H. Li, H. Xiong, and Y. Tang, “Study on the laser-induced damage threshold of sol-gel ZrO2-PVP coatings,” Chin. Opt. Lett.8(2), 241–243 (2010).
[CrossRef]

2009 (2)

D. Ristau, M. Jupé, and K. Starke, “Laser damage thresholds of optical coatings,” Thin Solid Films518(5), 1607–1613 (2009).
[CrossRef]

M. G. Sandoval-Paz and R. Ramírez-Bon, “Analysis of the early growth mechanisms during the chemical deposition of CdS thin films by spectroscopic ellipsometry,” Thin Solid Films517(24), 6747–6752 (2009).
[CrossRef]

2008 (2)

Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008).
[CrossRef]

J. Hu, J. Yang, W. Chen, and C. Zhou, “Experimental investigation of enhancing the subsurface damage threshold of Nd-doped phosphate glass,” Chin. Opt. Lett.6(9), 681–684 (2008).
[CrossRef]

2007 (2)

L. Liang, Y. Xu, L. Zhang, Y. Sheng, D. Wu, and Y. Sun, “Annealing effect on the optical properties and laser-induced damage resistance of solgel-derived ZrO2 films,” J. Opt. Soc. Am. B24(5), 1066–1074 (2007).
[CrossRef]

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007).
[CrossRef]

2005 (2)

L. F. Cueto, E. Sánchez, L. M. Torres-Martínez, and G. A. Hirata, “On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates,” Mater. Charact.55(4-5), 263–271 (2005).
[CrossRef]

A. Kuwabara, T. Tohei, T. Yamamoto, and I. Tanaka, “Ab initio lattice dynamics and phase transformations of ZrO2,” Phys. Rev. B71(6), 064301 (2005).
[CrossRef]

2002 (1)

W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002).
[CrossRef]

2000 (1)

Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000).
[CrossRef]

Belleville, P.

Chen, L.

Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000).
[CrossRef]

Chen, W.

Cueto, L. F.

L. F. Cueto, E. Sánchez, L. M. Torres-Martínez, and G. A. Hirata, “On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates,” Mater. Charact.55(4-5), 263–271 (2005).
[CrossRef]

Dieudonné, X.

Gomez-Abal, R. I.

H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, “Electronic band structure of zirconia and hafnia polymorphs from the GW perspective,” Phys. Rev. B81(8), 085119 (2010).
[CrossRef]

Guo, Y. J.

Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008).
[CrossRef]

Hai-Yuan, L.

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007).
[CrossRef]

Hirata, G. A.

L. F. Cueto, E. Sánchez, L. M. Torres-Martínez, and G. A. Hirata, “On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates,” Mater. Charact.55(4-5), 263–271 (2005).
[CrossRef]

Hong-Bo, H.

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007).
[CrossRef]

Hu, J.

Hu, L.

H. Li, H. Xiong, Y. Tang, and L. Hu, “ZrO2/SiO2 Two-Layer Antireflective Coatings by Sol-Gel Process,” Rare Metal Mat. Eng.39, 145–148 (2010).

Jian-Da, S.

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007).
[CrossRef]

Jiang, H.

H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, “Electronic band structure of zirconia and hafnia polymorphs from the GW perspective,” Phys. Rev. B81(8), 085119 (2010).
[CrossRef]

Jiang, X. D.

Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008).
[CrossRef]

Jian-Ke, Y.

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007).
[CrossRef]

Jupé, M.

D. Ristau, M. Jupé, and K. Starke, “Laser damage thresholds of optical coatings,” Thin Solid Films518(5), 1607–1613 (2009).
[CrossRef]

Kuwabara, A.

A. Kuwabara, T. Tohei, T. Yamamoto, and I. Tanaka, “Ab initio lattice dynamics and phase transformations of ZrO2,” Phys. Rev. B71(6), 064301 (2005).
[CrossRef]

Li, A.-D.

W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002).
[CrossRef]

Li, H.

H. Li, H. Xiong, and Y. Tang, “Study on the laser-induced damage threshold of sol-gel ZrO2-PVP coatings,” Chin. Opt. Lett.8(2), 241–243 (2010).
[CrossRef]

H. Li, H. Xiong, Y. Tang, and L. Hu, “ZrO2/SiO2 Two-Layer Antireflective Coatings by Sol-Gel Process,” Rare Metal Mat. Eng.39, 145–148 (2010).

Li, X.

Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000).
[CrossRef]

Liang, L.

Ling, H.-Q.

W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002).
[CrossRef]

Liu, W.-C.

W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002).
[CrossRef]

Ming, N.-B.

W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002).
[CrossRef]

Pan, Q.

X. Wang, J. Shen, and Q. Pan, “Raman spectroscopy of sol-gel derived titanium oxide thin films,” J. Raman Spectrosc.42(7), 1578–1582 (2011).
[CrossRef]

Ramírez-Bon, R.

M. G. Sandoval-Paz and R. Ramírez-Bon, “Analysis of the early growth mechanisms during the chemical deposition of CdS thin films by spectroscopic ellipsometry,” Thin Solid Films517(24), 6747–6752 (2009).
[CrossRef]

Rinke, P.

H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, “Electronic band structure of zirconia and hafnia polymorphs from the GW perspective,” Phys. Rev. B81(8), 085119 (2010).
[CrossRef]

Ristau, D.

D. Ristau, M. Jupé, and K. Starke, “Laser damage thresholds of optical coatings,” Thin Solid Films518(5), 1607–1613 (2009).
[CrossRef]

Sánchez, E.

L. F. Cueto, E. Sánchez, L. M. Torres-Martínez, and G. A. Hirata, “On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates,” Mater. Charact.55(4-5), 263–271 (2005).
[CrossRef]

Sandoval-Paz, M. G.

M. G. Sandoval-Paz and R. Ramírez-Bon, “Analysis of the early growth mechanisms during the chemical deposition of CdS thin films by spectroscopic ellipsometry,” Thin Solid Films517(24), 6747–6752 (2009).
[CrossRef]

Scheffler, M.

H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, “Electronic band structure of zirconia and hafnia polymorphs from the GW perspective,” Phys. Rev. B81(8), 085119 (2010).
[CrossRef]

Shen, J.

X. Wang and J. Shen, “A review of contamination-resistant antireflective sol-gel coatings,” J. Sol-Gel Sci. Technol.61(1), 206–212 (2012).
[CrossRef]

X. Wang, J. Shen, and Q. Pan, “Raman spectroscopy of sol-gel derived titanium oxide thin films,” J. Raman Spectrosc.42(7), 1578–1582 (2011).
[CrossRef]

Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000).
[CrossRef]

Sheng, Y.

Starke, K.

D. Ristau, M. Jupé, and K. Starke, “Laser damage thresholds of optical coatings,” Thin Solid Films518(5), 1607–1613 (2009).
[CrossRef]

Sun, Y.

Tanaka, I.

A. Kuwabara, T. Tohei, T. Yamamoto, and I. Tanaka, “Ab initio lattice dynamics and phase transformations of ZrO2,” Phys. Rev. B71(6), 064301 (2005).
[CrossRef]

Tang, Y.

H. Li, H. Xiong, Y. Tang, and L. Hu, “ZrO2/SiO2 Two-Layer Antireflective Coatings by Sol-Gel Process,” Rare Metal Mat. Eng.39, 145–148 (2010).

H. Li, H. Xiong, and Y. Tang, “Study on the laser-induced damage threshold of sol-gel ZrO2-PVP coatings,” Chin. Opt. Lett.8(2), 241–243 (2010).
[CrossRef]

Tang, Y.-F.

W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002).
[CrossRef]

Tian, D. B.

Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008).
[CrossRef]

Tohei, T.

A. Kuwabara, T. Tohei, T. Yamamoto, and I. Tanaka, “Ab initio lattice dynamics and phase transformations of ZrO2,” Phys. Rev. B71(6), 064301 (2005).
[CrossRef]

Torres-Martínez, L. M.

L. F. Cueto, E. Sánchez, L. M. Torres-Martínez, and G. A. Hirata, “On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates,” Mater. Charact.55(4-5), 263–271 (2005).
[CrossRef]

Vallé, K.

Wang, B. Y.

Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008).
[CrossRef]

Wang, J.

Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000).
[CrossRef]

Wang, X.

X. Wang and J. Shen, “A review of contamination-resistant antireflective sol-gel coatings,” J. Sol-Gel Sci. Technol.61(1), 206–212 (2012).
[CrossRef]

X. Wang, J. Shen, and Q. Pan, “Raman spectroscopy of sol-gel derived titanium oxide thin films,” J. Raman Spectrosc.42(7), 1578–1582 (2011).
[CrossRef]

Wu, D.

L. Liang, Y. Xu, L. Zhang, Y. Sheng, D. Wu, and Y. Sun, “Annealing effect on the optical properties and laser-induced damage resistance of solgel-derived ZrO2 films,” J. Opt. Soc. Am. B24(5), 1066–1074 (2007).
[CrossRef]

W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002).
[CrossRef]

Wu, G.

Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000).
[CrossRef]

Xiong, H.

H. Li, H. Xiong, Y. Tang, and L. Hu, “ZrO2/SiO2 Two-Layer Antireflective Coatings by Sol-Gel Process,” Rare Metal Mat. Eng.39, 145–148 (2010).

H. Li, H. Xiong, and Y. Tang, “Study on the laser-induced damage threshold of sol-gel ZrO2-PVP coatings,” Chin. Opt. Lett.8(2), 241–243 (2010).
[CrossRef]

Xu, S. Z.

Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008).
[CrossRef]

Xu, Y.

Yamamoto, T.

A. Kuwabara, T. Tohei, T. Yamamoto, and I. Tanaka, “Ab initio lattice dynamics and phase transformations of ZrO2,” Phys. Rev. B71(6), 064301 (2005).
[CrossRef]

Yang, J.

Yong-Xing, T.

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007).
[CrossRef]

Yuan, X. D.

Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008).
[CrossRef]

Yuan-An, Z.

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007).
[CrossRef]

Yun-Xia, J.

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007).
[CrossRef]

Zhang, L.

Zhang, Q.

Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000).
[CrossRef]

Zheng-Xiu, F.

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007).
[CrossRef]

Zhou, C.

Zu, X. T.

Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008).
[CrossRef]

Appl. Surf. Sci. (1)

W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002).
[CrossRef]

Chin. Opt. Lett. (2)

Chin. Phys. Lett. (1)

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007).
[CrossRef]

J. Opt. Soc. Am. B (1)

J. Raman Spectrosc. (1)

X. Wang, J. Shen, and Q. Pan, “Raman spectroscopy of sol-gel derived titanium oxide thin films,” J. Raman Spectrosc.42(7), 1578–1582 (2011).
[CrossRef]

J. Sol-Gel Sci. Technol. (1)

X. Wang and J. Shen, “A review of contamination-resistant antireflective sol-gel coatings,” J. Sol-Gel Sci. Technol.61(1), 206–212 (2012).
[CrossRef]

Mater. Charact. (1)

L. F. Cueto, E. Sánchez, L. M. Torres-Martínez, and G. A. Hirata, “On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates,” Mater. Charact.55(4-5), 263–271 (2005).
[CrossRef]

Mater. Lett. (1)

Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000).
[CrossRef]

Opt. Express (1)

Opt. Laser Technol. (1)

Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008).
[CrossRef]

Phys. Rev. B (2)

A. Kuwabara, T. Tohei, T. Yamamoto, and I. Tanaka, “Ab initio lattice dynamics and phase transformations of ZrO2,” Phys. Rev. B71(6), 064301 (2005).
[CrossRef]

H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, “Electronic band structure of zirconia and hafnia polymorphs from the GW perspective,” Phys. Rev. B81(8), 085119 (2010).
[CrossRef]

Rare Metal Mat. Eng. (1)

H. Li, H. Xiong, Y. Tang, and L. Hu, “ZrO2/SiO2 Two-Layer Antireflective Coatings by Sol-Gel Process,” Rare Metal Mat. Eng.39, 145–148 (2010).

Thin Solid Films (2)

D. Ristau, M. Jupé, and K. Starke, “Laser damage thresholds of optical coatings,” Thin Solid Films518(5), 1607–1613 (2009).
[CrossRef]

M. G. Sandoval-Paz and R. Ramírez-Bon, “Analysis of the early growth mechanisms during the chemical deposition of CdS thin films by spectroscopic ellipsometry,” Thin Solid Films517(24), 6747–6752 (2009).
[CrossRef]

Other (2)

H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics Publishing, Bristol and Philadelphia, 2001).

ISO 11254–1.2, “Lasers and laser-related equipment: Determination of laser-induced damage threshold of optical surfaces-Part 1: 1-on-1 test” (2000).

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Figures (4)

Fig. 1
Fig. 1

Raman Spectra of ZrO2 films annealed at different temperatures (a) CFA; (b) RTA.

Fig. 2
Fig. 2

Experimental and calculated transmittance and reflectance curves for film annealed at 300 °C by RTA.

Fig. 3
Fig. 3

Variation of refractive index (at 633 nm) of ZrO2 films (a) CFA (b) RTA.

Fig. 4
Fig. 4

Laser-induced damage threshold of the samples (at 1064 nm, 10 ns duration).

Tables (1)

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Table 1 Thickness of ZrO2 films annealed at different temperatures

Equations (1)

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RMSE= j=1 n [ ( Y exp j Y cal c j ) 2 ×weigh t j 2 ] / j=1 n weigh t j 2 ,

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