Abstract

In this study, porous silica films, which have particle accumulation microstructure, were prepared using the sol–gel method. For comparison, compact silica films were deposited using the electron-beam-heating method. These films were then irradiated using nanosecond-pulsed laser beams with wavelengths of 1064 and 532 nm. Laser-induced damage thresholds were recorded and the film microstructures, as well as damage photographs, were observed using scanning electron microscopy. The experimental results show that different kinds of stripes formed on the surface of the silica films with particle accumulation structure. A kind of subwavelength periodic straight stripe was observed in the case of the 1064 nm wavelength, whereas another kind of annular stripe around the small damage pits was observed in the case of the 532 nm wavelength.

© 2012 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. J. Perrière, É. Millon, and É. Fogarassy, Recent Advances in Laser Processing of Materials (Elsevier, 2006).
  2. G. S. Zhou, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
    [CrossRef]
  3. H. M. van Driel, J. E. Sipe, and J. F. Young, “Laser-induced periodic surface structure on solids: a universal phenomenon,” Phys. Rev. Lett.49(26), 1955–1958 (1982).
    [CrossRef]
  4. M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Large area uniform nanostructures fabricated by direct femtosecond laser ablation,” Opt. Express16(23), 19354–19365 (2008).
    [CrossRef] [PubMed]
  5. M. Huang, A Study on Formation of Subwavelength Periodic Structures Induced by Ultrashort Laser Pulses (Doctoral Dissertation, Sun Yat-sen University, 2009).
  6. E. M. Hsua, T. H. R. Crawford, H. F. Tiedje, and H. K. Haugen, “Periodic surface structures on gallium phosphide after irradiation with 150fs-7ns laser pulses at 800nm,” Appl. Phys. Lett. 91, 111102–1~3 (2007).
  7. P. Mora, “Plasma expansion into a vacuum,” Phys. Rev. Lett. 90, 185002–1~4 (2003).
  8. Z. L. Xia, “New damage behavior induced by nanosecond laser pulses on the surface of silica films,” Opt. Laser Technol.submitted., doi:.
    [CrossRef]
  9. S. Theppakuttai and S. Chen, “Submicron ripple formation on glass surface upon laser-nanosphere interaction,” J. Appl. Phys.95, 5049–5052 (2004).
    [CrossRef]
  10. J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B27(2), 1141–1154 (1983).
    [CrossRef]
  11. L. L. Ran, Z. Y. Guo, and S. L. Qu, “Self-organized periodic surface structures on ZnO induced by femtosecond laser,” Appl. Phys., A Mater. Sci. Process.100(2), 517–521 (2010).
    [CrossRef]
  12. T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
    [CrossRef]
  13. M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B 79, 125436–1~9 (2009).
  14. Y. A. Zhao, T. Wang, D. W. Zhang, J. D. Shao, and Z. X. Fan, “Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 anti-reflective films,” Appl. Surf. Sci.245(1-4), 335–339 (2005).
    [CrossRef]
  15. M. S. W. Vong and N. J. Bazin, “Chemical modification of silica gels,” Sol-Gel Sci. Technol.8, 499–505 (1997).
  16. L. P. Liang, L. Zhang, and Y. G. Sheng, “Studies on the laser-induced damage resistance of sol-gel derived ZrO2-TiO2 composite high refractive index films,” Acta Phys. Sin.56, 3596–3601 (2007).
  17. D. Grosso and P. A. Sermon, “Scandia optical coatings for application at 351 nm,” Thin Solid Films368(1), 116–124 (2000).
    [CrossRef]
  18. Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett.91(24), 247405 (2003).
    [CrossRef] [PubMed]
  19. Z. L. Xia, Z. X. Fan, and J. D. Shao, “Statistical approach to bulk inclusion initialized damage in films,” Opt. Commun.265(2), 620–627 (2006).
    [CrossRef]
  20. Z. L. Xia, H. Wang, and Q. Xu, “The stress relief mechanism in laser irradiating on porous films,” Opt. Commun.285(1), 70–76 (2012).
    [CrossRef]
  21. D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett.64(23), 3071–3073 (1994).
    [CrossRef]
  22. H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer, 1988).
  23. M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano3(12), 4062–4070 (2009).
    [CrossRef] [PubMed]
  24. J. Y. Natoli, L. Gallais, B. Bertussi, A. During, M. Commandré, J. L. Rullier, F. Bonneau, and P. Combis, “Localized pulsed laser interaction with submicronic gold particles embedded in silica: a method for investigating laser damage initiation,” Opt. Express11(7), 824–829 (2003).
    [CrossRef] [PubMed]
  25. M. Jupé, L. Jensen, A. Melninkaitis, V. Sirutkaitis, and D. Ristau, “Calculations and experimental demonstration of multi-photon absorption governing fs laser-induced damage in titania,” Opt. Express17(15), 12269–12278 (2009).
    [CrossRef] [PubMed]
  26. X. Z. Zeng, X. L. Mao, S.-B. Wen, R. Greif, and R. E. Russo, “Energy deposition and shock wave propagation during pulsed laser ablation in fused silica cavities,” J. Phys. D Appl. Phys.37(7), 1132–1136 (2004).
    [CrossRef]

2012 (1)

Z. L. Xia, H. Wang, and Q. Xu, “The stress relief mechanism in laser irradiating on porous films,” Opt. Commun.285(1), 70–76 (2012).
[CrossRef]

2010 (1)

L. L. Ran, Z. Y. Guo, and S. L. Qu, “Self-organized periodic surface structures on ZnO induced by femtosecond laser,” Appl. Phys., A Mater. Sci. Process.100(2), 517–521 (2010).
[CrossRef]

2009 (2)

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

M. Jupé, L. Jensen, A. Melninkaitis, V. Sirutkaitis, and D. Ristau, “Calculations and experimental demonstration of multi-photon absorption governing fs laser-induced damage in titania,” Opt. Express17(15), 12269–12278 (2009).
[CrossRef] [PubMed]

2008 (1)

2007 (1)

L. P. Liang, L. Zhang, and Y. G. Sheng, “Studies on the laser-induced damage resistance of sol-gel derived ZrO2-TiO2 composite high refractive index films,” Acta Phys. Sin.56, 3596–3601 (2007).

2006 (1)

Z. L. Xia, Z. X. Fan, and J. D. Shao, “Statistical approach to bulk inclusion initialized damage in films,” Opt. Commun.265(2), 620–627 (2006).
[CrossRef]

2005 (2)

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Y. A. Zhao, T. Wang, D. W. Zhang, J. D. Shao, and Z. X. Fan, “Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 anti-reflective films,” Appl. Surf. Sci.245(1-4), 335–339 (2005).
[CrossRef]

2004 (2)

S. Theppakuttai and S. Chen, “Submicron ripple formation on glass surface upon laser-nanosphere interaction,” J. Appl. Phys.95, 5049–5052 (2004).
[CrossRef]

X. Z. Zeng, X. L. Mao, S.-B. Wen, R. Greif, and R. E. Russo, “Energy deposition and shock wave propagation during pulsed laser ablation in fused silica cavities,” J. Phys. D Appl. Phys.37(7), 1132–1136 (2004).
[CrossRef]

2003 (2)

2000 (1)

D. Grosso and P. A. Sermon, “Scandia optical coatings for application at 351 nm,” Thin Solid Films368(1), 116–124 (2000).
[CrossRef]

1997 (1)

M. S. W. Vong and N. J. Bazin, “Chemical modification of silica gels,” Sol-Gel Sci. Technol.8, 499–505 (1997).

1994 (1)

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett.64(23), 3071–3073 (1994).
[CrossRef]

1983 (1)

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B27(2), 1141–1154 (1983).
[CrossRef]

1982 (2)

G. S. Zhou, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
[CrossRef]

H. M. van Driel, J. E. Sipe, and J. F. Young, “Laser-induced periodic surface structure on solids: a universal phenomenon,” Phys. Rev. Lett.49(26), 1955–1958 (1982).
[CrossRef]

Bazin, N. J.

M. S. W. Vong and N. J. Bazin, “Chemical modification of silica gels,” Sol-Gel Sci. Technol.8, 499–505 (1997).

Bertussi, B.

Bonneau, F.

Chen, H.

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Chen, S.

S. Theppakuttai and S. Chen, “Submicron ripple formation on glass surface upon laser-nanosphere interaction,” J. Appl. Phys.95, 5049–5052 (2004).
[CrossRef]

Cheng, Y.

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Large area uniform nanostructures fabricated by direct femtosecond laser ablation,” Opt. Express16(23), 19354–19365 (2008).
[CrossRef] [PubMed]

Combis, P.

Commandré, M.

Du, D.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett.64(23), 3071–3073 (1994).
[CrossRef]

During, A.

Fan, Z. X.

Z. L. Xia, Z. X. Fan, and J. D. Shao, “Statistical approach to bulk inclusion initialized damage in films,” Opt. Commun.265(2), 620–627 (2006).
[CrossRef]

Y. A. Zhao, T. Wang, D. W. Zhang, J. D. Shao, and Z. X. Fan, “Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 anti-reflective films,” Appl. Surf. Sci.245(1-4), 335–339 (2005).
[CrossRef]

Fauchet, P. M.

G. S. Zhou, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
[CrossRef]

Gallais, L.

Greif, R.

X. Z. Zeng, X. L. Mao, S.-B. Wen, R. Greif, and R. E. Russo, “Energy deposition and shock wave propagation during pulsed laser ablation in fused silica cavities,” J. Phys. D Appl. Phys.37(7), 1132–1136 (2004).
[CrossRef]

Grosso, D.

D. Grosso and P. A. Sermon, “Scandia optical coatings for application at 351 nm,” Thin Solid Films368(1), 116–124 (2000).
[CrossRef]

Guo, Z. Y.

L. L. Ran, Z. Y. Guo, and S. L. Qu, “Self-organized periodic surface structures on ZnO induced by femtosecond laser,” Appl. Phys., A Mater. Sci. Process.100(2), 517–521 (2010).
[CrossRef]

He, X.

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Hirao, K.

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett.91(24), 247405 (2003).
[CrossRef] [PubMed]

Huang, M.

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Large area uniform nanostructures fabricated by direct femtosecond laser ablation,” Opt. Express16(23), 19354–19365 (2008).
[CrossRef] [PubMed]

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Jensen, L.

Jia, T. Q.

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Jupé, M.

Kazansky, P. G.

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett.91(24), 247405 (2003).
[CrossRef] [PubMed]

Korn, G.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett.64(23), 3071–3073 (1994).
[CrossRef]

Kuroda, H.

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Li, R.

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Liang, L. P.

L. P. Liang, L. Zhang, and Y. G. Sheng, “Studies on the laser-induced damage resistance of sol-gel derived ZrO2-TiO2 composite high refractive index films,” Acta Phys. Sin.56, 3596–3601 (2007).

Liu, X.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett.64(23), 3071–3073 (1994).
[CrossRef]

Mao, X. L.

X. Z. Zeng, X. L. Mao, S.-B. Wen, R. Greif, and R. E. Russo, “Energy deposition and shock wave propagation during pulsed laser ablation in fused silica cavities,” J. Phys. D Appl. Phys.37(7), 1132–1136 (2004).
[CrossRef]

Melninkaitis, A.

Mourou, G.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett.64(23), 3071–3073 (1994).
[CrossRef]

Natoli, J. Y.

Preston, J. S.

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B27(2), 1141–1154 (1983).
[CrossRef]

Qiu, J.

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett.91(24), 247405 (2003).
[CrossRef] [PubMed]

Qu, S. L.

L. L. Ran, Z. Y. Guo, and S. L. Qu, “Self-organized periodic surface structures on ZnO induced by femtosecond laser,” Appl. Phys., A Mater. Sci. Process.100(2), 517–521 (2010).
[CrossRef]

Ran, L. L.

L. L. Ran, Z. Y. Guo, and S. L. Qu, “Self-organized periodic surface structures on ZnO induced by femtosecond laser,” Appl. Phys., A Mater. Sci. Process.100(2), 517–521 (2010).
[CrossRef]

Ristau, D.

Rullier, J. L.

Russo, R. E.

X. Z. Zeng, X. L. Mao, S.-B. Wen, R. Greif, and R. E. Russo, “Energy deposition and shock wave propagation during pulsed laser ablation in fused silica cavities,” J. Phys. D Appl. Phys.37(7), 1132–1136 (2004).
[CrossRef]

Sermon, P. A.

D. Grosso and P. A. Sermon, “Scandia optical coatings for application at 351 nm,” Thin Solid Films368(1), 116–124 (2000).
[CrossRef]

Shao, J. D.

Z. L. Xia, Z. X. Fan, and J. D. Shao, “Statistical approach to bulk inclusion initialized damage in films,” Opt. Commun.265(2), 620–627 (2006).
[CrossRef]

Y. A. Zhao, T. Wang, D. W. Zhang, J. D. Shao, and Z. X. Fan, “Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 anti-reflective films,” Appl. Surf. Sci.245(1-4), 335–339 (2005).
[CrossRef]

Sheng, Y. G.

L. P. Liang, L. Zhang, and Y. G. Sheng, “Studies on the laser-induced damage resistance of sol-gel derived ZrO2-TiO2 composite high refractive index films,” Acta Phys. Sin.56, 3596–3601 (2007).

Shimotsuma, Y.

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett.91(24), 247405 (2003).
[CrossRef] [PubMed]

Siegman, A. E.

G. S. Zhou, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
[CrossRef]

Sipe, J. E.

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B27(2), 1141–1154 (1983).
[CrossRef]

H. M. van Driel, J. E. Sipe, and J. F. Young, “Laser-induced periodic surface structure on solids: a universal phenomenon,” Phys. Rev. Lett.49(26), 1955–1958 (1982).
[CrossRef]

Sirutkaitis, V.

Squier, J.

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett.64(23), 3071–3073 (1994).
[CrossRef]

Theppakuttai, S.

S. Theppakuttai and S. Chen, “Submicron ripple formation on glass surface upon laser-nanosphere interaction,” J. Appl. Phys.95, 5049–5052 (2004).
[CrossRef]

van Driel, H. M.

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B27(2), 1141–1154 (1983).
[CrossRef]

H. M. van Driel, J. E. Sipe, and J. F. Young, “Laser-induced periodic surface structure on solids: a universal phenomenon,” Phys. Rev. Lett.49(26), 1955–1958 (1982).
[CrossRef]

Vong, M. S. W.

M. S. W. Vong and N. J. Bazin, “Chemical modification of silica gels,” Sol-Gel Sci. Technol.8, 499–505 (1997).

Wang, H.

Z. L. Xia, H. Wang, and Q. Xu, “The stress relief mechanism in laser irradiating on porous films,” Opt. Commun.285(1), 70–76 (2012).
[CrossRef]

Wang, T.

Y. A. Zhao, T. Wang, D. W. Zhang, J. D. Shao, and Z. X. Fan, “Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 anti-reflective films,” Appl. Surf. Sci.245(1-4), 335–339 (2005).
[CrossRef]

Wen, S.-B.

X. Z. Zeng, X. L. Mao, S.-B. Wen, R. Greif, and R. E. Russo, “Energy deposition and shock wave propagation during pulsed laser ablation in fused silica cavities,” J. Phys. D Appl. Phys.37(7), 1132–1136 (2004).
[CrossRef]

Xia, Z. L.

Z. L. Xia, H. Wang, and Q. Xu, “The stress relief mechanism in laser irradiating on porous films,” Opt. Commun.285(1), 70–76 (2012).
[CrossRef]

Z. L. Xia, Z. X. Fan, and J. D. Shao, “Statistical approach to bulk inclusion initialized damage in films,” Opt. Commun.265(2), 620–627 (2006).
[CrossRef]

Z. L. Xia, “New damage behavior induced by nanosecond laser pulses on the surface of silica films,” Opt. Laser Technol.submitted., doi:.
[CrossRef]

Xu, N. S.

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Large area uniform nanostructures fabricated by direct femtosecond laser ablation,” Opt. Express16(23), 19354–19365 (2008).
[CrossRef] [PubMed]

Xu, Q.

Z. L. Xia, H. Wang, and Q. Xu, “The stress relief mechanism in laser irradiating on porous films,” Opt. Commun.285(1), 70–76 (2012).
[CrossRef]

Xu, Z.

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Xu, Z. Z.

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Large area uniform nanostructures fabricated by direct femtosecond laser ablation,” Opt. Express16(23), 19354–19365 (2008).
[CrossRef] [PubMed]

Young, J. F.

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B27(2), 1141–1154 (1983).
[CrossRef]

H. M. van Driel, J. E. Sipe, and J. F. Young, “Laser-induced periodic surface structure on solids: a universal phenomenon,” Phys. Rev. Lett.49(26), 1955–1958 (1982).
[CrossRef]

Zeng, X. Z.

X. Z. Zeng, X. L. Mao, S.-B. Wen, R. Greif, and R. E. Russo, “Energy deposition and shock wave propagation during pulsed laser ablation in fused silica cavities,” J. Phys. D Appl. Phys.37(7), 1132–1136 (2004).
[CrossRef]

Zhang, D. W.

Y. A. Zhao, T. Wang, D. W. Zhang, J. D. Shao, and Z. X. Fan, “Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 anti-reflective films,” Appl. Surf. Sci.245(1-4), 335–339 (2005).
[CrossRef]

Zhang, J.

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Zhang, L.

L. P. Liang, L. Zhang, and Y. G. Sheng, “Studies on the laser-induced damage resistance of sol-gel derived ZrO2-TiO2 composite high refractive index films,” Acta Phys. Sin.56, 3596–3601 (2007).

Zhao, F.

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

Zhao, F. L.

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Large area uniform nanostructures fabricated by direct femtosecond laser ablation,” Opt. Express16(23), 19354–19365 (2008).
[CrossRef] [PubMed]

Zhao, Y. A.

Y. A. Zhao, T. Wang, D. W. Zhang, J. D. Shao, and Z. X. Fan, “Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 anti-reflective films,” Appl. Surf. Sci.245(1-4), 335–339 (2005).
[CrossRef]

Zhou, G. S.

G. S. Zhou, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
[CrossRef]

ACS Nano (1)

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Acta Phys. Sin. (1)

L. P. Liang, L. Zhang, and Y. G. Sheng, “Studies on the laser-induced damage resistance of sol-gel derived ZrO2-TiO2 composite high refractive index films,” Acta Phys. Sin.56, 3596–3601 (2007).

Appl. Phys. Lett. (1)

D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett.64(23), 3071–3073 (1994).
[CrossRef]

Appl. Phys., A Mater. Sci. Process. (1)

L. L. Ran, Z. Y. Guo, and S. L. Qu, “Self-organized periodic surface structures on ZnO induced by femtosecond laser,” Appl. Phys., A Mater. Sci. Process.100(2), 517–521 (2010).
[CrossRef]

Appl. Surf. Sci. (1)

Y. A. Zhao, T. Wang, D. W. Zhang, J. D. Shao, and Z. X. Fan, “Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 anti-reflective films,” Appl. Surf. Sci.245(1-4), 335–339 (2005).
[CrossRef]

J. Appl. Phys. (1)

S. Theppakuttai and S. Chen, “Submicron ripple formation on glass surface upon laser-nanosphere interaction,” J. Appl. Phys.95, 5049–5052 (2004).
[CrossRef]

J. Phys. D Appl. Phys. (1)

X. Z. Zeng, X. L. Mao, S.-B. Wen, R. Greif, and R. E. Russo, “Energy deposition and shock wave propagation during pulsed laser ablation in fused silica cavities,” J. Phys. D Appl. Phys.37(7), 1132–1136 (2004).
[CrossRef]

Opt. Commun. (2)

Z. L. Xia, Z. X. Fan, and J. D. Shao, “Statistical approach to bulk inclusion initialized damage in films,” Opt. Commun.265(2), 620–627 (2006).
[CrossRef]

Z. L. Xia, H. Wang, and Q. Xu, “The stress relief mechanism in laser irradiating on porous films,” Opt. Commun.285(1), 70–76 (2012).
[CrossRef]

Opt. Express (3)

Opt. Laser Technol. (1)

Z. L. Xia, “New damage behavior induced by nanosecond laser pulses on the surface of silica films,” Opt. Laser Technol.submitted., doi:.
[CrossRef]

Phys. Rev. B (3)

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B27(2), 1141–1154 (1983).
[CrossRef]

T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005).
[CrossRef]

G. S. Zhou, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982).
[CrossRef]

Phys. Rev. Lett. (2)

H. M. van Driel, J. E. Sipe, and J. F. Young, “Laser-induced periodic surface structure on solids: a universal phenomenon,” Phys. Rev. Lett.49(26), 1955–1958 (1982).
[CrossRef]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett.91(24), 247405 (2003).
[CrossRef] [PubMed]

Sol-Gel Sci. Technol. (1)

M. S. W. Vong and N. J. Bazin, “Chemical modification of silica gels,” Sol-Gel Sci. Technol.8, 499–505 (1997).

Thin Solid Films (1)

D. Grosso and P. A. Sermon, “Scandia optical coatings for application at 351 nm,” Thin Solid Films368(1), 116–124 (2000).
[CrossRef]

Other (6)

H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer, 1988).

M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B 79, 125436–1~9 (2009).

M. Huang, A Study on Formation of Subwavelength Periodic Structures Induced by Ultrashort Laser Pulses (Doctoral Dissertation, Sun Yat-sen University, 2009).

E. M. Hsua, T. H. R. Crawford, H. F. Tiedje, and H. K. Haugen, “Periodic surface structures on gallium phosphide after irradiation with 150fs-7ns laser pulses at 800nm,” Appl. Phys. Lett. 91, 111102–1~3 (2007).

P. Mora, “Plasma expansion into a vacuum,” Phys. Rev. Lett. 90, 185002–1~4 (2003).

J. Perrière, É. Millon, and É. Fogarassy, Recent Advances in Laser Processing of Materials (Elsevier, 2006).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1
Fig. 1

SEM images of the SiO2 films: (a) to (e) are SEM pictures of porous films and (f) is the SEM picture of the compact silica film.

Fig. 2
Fig. 2

Relationship between the particle radii of SiO2 porous films and R

Fig. 3
Fig. 3

Relationship between the laser damage thresholds of sol–gel films and R.

Fig. 4
Fig. 4

SEM images of the damage spots. A Nd: YAG laser pulse with pulse width of 12 ns was used. (a) and (b) show the damage spots of sol-gel films when R is 0.2. (c) shows the damage spot of the electron beam evaporation film. (a) shows the damage spot when the laser wavelength is 532 nm. (b) and (c) show the damage spots when the laser wavelength is 1064nm.

Fig. 5
Fig. 5

Periodic stripes in the sol–gel film damage spot when R is 0.2. A Nd: YAG laser pulse with energy density of 17.6 J/cm2 and pulse width of 12 ns was used.

Fig. 6
Fig. 6

Damage photograph of the sol–gel film when R is 0.8. A Nd: YAG laser pulse with energy density of 13.6 J/cm2, wavelength of 532nm, and pulse width of 12 ns was used.

Metrics