Abstract

We have developed new, Mg/SiC multilayer coatings with corrosion barriers which can be used to efficiently and simultaneously reflect extreme ultraviolet (EUV) radiation in single or multiple narrow bands centered at wavelengths in the spectral region from 25 to 80 nm. Corrosion mitigation was attempted through the use of Al-Mg or Al thin layers. Three different multilayer design concepts were developed and deposited by magnetron sputtering and the reflectance was measured at near-normal incidence in a broad spectral range. Standard Mg/SiC multilayers were also deposited and measured for comparison. They were shown to efficiently reflect radiation at a wavelength of 76.9 nm with a peak reflectance of 40.6% at near-normal incidence, the highest experimental reflectance reported at this wavelength for a narrowband coating. The demonstration of multilayer coatings with corrosion resistance and multiple-wavelength EUV performance is of great interest in the development of mirrors for space-borne solar physics telescopes and other applications requiring long-lasting coatings with narrowband response in multiple emission lines across the EUV range.

© 2012 OSA

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    [CrossRef]
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    [CrossRef]
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  38. R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt.46(18), 3736–3746 (2007).
    [CrossRef] [PubMed]
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    [CrossRef]
  40. J. H. Underwood and E. M. Gullikson, “High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50-1300 eV energy region,” J. Electr. Spectr. Rel. Phenom.92(1-3), 265–272 (1998).
    [CrossRef]
  41. E. M. Gullikson, S. Mrowka, and B. B. Kaufmann, “Recent developments in EUV reflectometry at the Advanced Light Source,” SPIE Proc.4343, 363–373 (2001).
    [CrossRef]
  42. J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE8076, 80760D, 80760D-8 (2011).
    [CrossRef]

2012

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

2011

B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science331(6013), 55–58 (2011).
[CrossRef] [PubMed]

J. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, “Extreme ultraviolet photoionization of aldoses and ketoses,” Chem. Phys. Lett.506(4-6), 161–166 (2011).
[CrossRef]

J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE8076, 80760D, 80760D-8 (2011).
[CrossRef]

2010

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt.49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

M. Vidal-Dasilva, A. L. Aquila, E. M. Gullikson, F. Salmassi, and J. I. Larruquert, “Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range,” J. Appl. Phys.108(6), 063517 (2010).
[CrossRef]

2009

2008

2007

R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt.46(18), 3736–3746 (2007).
[CrossRef] [PubMed]

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

2006

J. F. Seely, Y. A. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, “Coated photodiode technique for the determination of the optical constants of reactive elements: La and Tb,” SPIE Proc.6317, 63170T, 63170T-9 (2006).
[CrossRef]

M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A23(11), 2880–2887 (2006).
[CrossRef] [PubMed]

2005

S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, “Demonstration of a desk-top size high repetition rate soft x-ray laser,” Opt. Express13(11), 4050–4055 (2005).
[CrossRef] [PubMed]

D. L. Windt, J. F. Seely, B. Kjornrattanawanich, and Y. A. Uspenskii, “Terbium-based extreme ultraviolet multilayers,” Opt. Lett.30(23), 3186–3188 (2005).
[CrossRef] [PubMed]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom.144–147, 1047–1049 (2005).
[CrossRef]

2004

S. A. Yulin, F. Schaefers, T. Feigl, and N. Kaiser, “Enhanced reflectivity and stability of Sc/Si multilayers,” SPIE Proc.5193, 155–163 (2004).
[CrossRef]

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.43(9), 1835–1848 (2004).
[CrossRef] [PubMed]

2001

M. Seminario, J. J. Rocca, R. A. Depine, B. Bach, and B. Bach, “Characterization of diffraction gratings by use of a tabletop soft-x-ray laser,” Appl. Opt.40(30), 5539–5544 (2001).
[CrossRef] [PubMed]

T. Ejima, Y. Kondo, and M. Watanabe, “Two-color reflection multilayers for He-I and He-II resonance lines for microscopic ultraviolet photoelectron spectroscopy using Schwarzschild objective,” Jpn. J. Appl. Phys.40(Part 1, No. 1), 376–379 (2001).
[CrossRef]

E. M. Gullikson, S. Mrowka, and B. B. Kaufmann, “Recent developments in EUV reflectometry at the Advanced Light Source,” SPIE Proc.4343, 363–373 (2001).
[CrossRef]

2000

1999

I. A. Artioukov, B. R. Benware, J. J. Rocca, M. Forsythe, Y. A. Uspenskii, and A. V. Vinogradov, “Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser,” IEEE J. Sel. Top. Quantum Electron.5(6), 1495–1501 (1999).
[CrossRef]

1998

J. H. Underwood and E. M. Gullikson, “High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50-1300 eV energy region,” J. Electr. Spectr. Rel. Phenom.92(1-3), 265–272 (1998).
[CrossRef]

D. L. Windt, “IMD: Software for modeling the optical properties of multilayer films,” Comput. Phys.12(4), 360–370 (1998), http://www.rxollc.com/idl/index.html .
[CrossRef]

1997

1988

J. B. Kortright and D. L. Windt, “Amorphous silicon carbide coatings for extreme ultraviolet optics,” Appl. Opt.27(14), 2841–2846 (1988).
[CrossRef] [PubMed]

A. B. C. Walker, J. F. Lindblom, T. W. Barbee, and R. B. Hoover, “Soft x-ray images of the solar corona with a normal-incidence Cassegrain multilayer telescope,” Science241(4874), 1781–1787 (1988).
[CrossRef] [PubMed]

1909

G. G. Stoney, “The tension of metallic films deposited by electrolysis,” Proc. R. Soc. Lond., A Contain. Pap. Math. Phys. Character82(553), 172–175 (1909).
[CrossRef]

Alameda, J.

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

Anderson, E.

Anderson, E. H.

André, J.-M.

Aquila, A.

Aquila, A. L.

M. Vidal-Dasilva, A. L. Aquila, E. M. Gullikson, F. Salmassi, and J. I. Larruquert, “Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range,” J. Appl. Phys.108(6), 063517 (2010).
[CrossRef]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Artioukov, I. A.

I. A. Artioukov, B. R. Benware, J. J. Rocca, M. Forsythe, Y. A. Uspenskii, and A. V. Vinogradov, “Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser,” IEEE J. Sel. Top. Quantum Electron.5(6), 1495–1501 (1999).
[CrossRef]

Artyukov, I. A.

Attwood, D. T.

Auchère, F.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
[CrossRef]

Aznárez, J. A.

Bach, B.

Bajt, S.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Baker, S.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.

Baker, S. L.

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt.46(18), 3736–3746 (2007).
[CrossRef] [PubMed]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Barbee, T. W.

A. B. C. Walker, J. F. Lindblom, T. W. Barbee, and R. B. Hoover, “Soft x-ray images of the solar corona with a normal-incidence Cassegrain multilayer telescope,” Science241(4874), 1781–1787 (1988).
[CrossRef] [PubMed]

Bellotti, J. A.

Benware, B. R.

I. A. Artioukov, B. R. Benware, J. J. Rocca, M. Forsythe, Y. A. Uspenskii, and A. V. Vinogradov, “Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser,” IEEE J. Sel. Top. Quantum Electron.5(6), 1495–1501 (1999).
[CrossRef]

Bergh, M.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Bernstein, E. R.

J. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, “Extreme ultraviolet photoionization of aldoses and ketoses,” Chem. Phys. Lett.506(4-6), 161–166 (2011).
[CrossRef]

Bionta, R.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Boerner, P.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science331(6013), 55–58 (2011).
[CrossRef] [PubMed]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Brewer, C. A.

Bridou, F.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
[CrossRef]

Brizuela, F.

Bruner, M.

D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.

Caleman, C.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Carlsson, M.

B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science331(6013), 55–58 (2011).
[CrossRef] [PubMed]

Chao, W.

Chapman, H. N.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Chilla, J. L. A.

Corso, A. J.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

De Pontieu, B.

B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science331(6013), 55–58 (2011).
[CrossRef] [PubMed]

Delmotte, F.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
[CrossRef]

Depine, R. A.

Dollar, F. J.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Dong, F.

J. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, “Extreme ultraviolet photoionization of aldoses and ketoses,” Chem. Phys. Lett.506(4-6), 161–166 (2011).
[CrossRef]

Donguy, S.

Edwards, C.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

Ejima, T.

T. Ejima, Y. Kondo, and M. Watanabe, “Two-color reflection multilayers for He-I and He-II resonance lines for microscopic ultraviolet photoelectron spectroscopy using Schwarzschild objective,” Jpn. J. Appl. Phys.40(Part 1, No. 1), 376–379 (2001).
[CrossRef]

Feigl, T.

S. A. Yulin, F. Schaefers, T. Feigl, and N. Kaiser, “Enhanced reflectivity and stability of Sc/Si multilayers,” SPIE Proc.5193, 155–163 (2004).
[CrossRef]

Fernández-Perea, M.

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE8076, 80760D, 80760D-8 (2011).
[CrossRef]

M. Vidal-Dasilva, M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm,” Opt. Express17(25), 22773–22784 (2009).
[CrossRef] [PubMed]

M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A23(11), 2880–2887 (2006).
[CrossRef] [PubMed]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Filevich, J.

Fineschi, S.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Forsythe, M.

I. A. Artioukov, B. R. Benware, J. J. Rocca, M. Forsythe, Y. A. Uspenskii, and A. V. Vinogradov, “Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser,” IEEE J. Sel. Top. Quantum Electron.5(6), 1495–1501 (1999).
[CrossRef]

García-Cortés, S.

J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE8076, 80760D, 80760D-8 (2011).
[CrossRef]

Giglia, A.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
[CrossRef]

M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A23(11), 2880–2887 (2006).
[CrossRef] [PubMed]

Golub, L.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Grisham, M.

Grisham, M. E.

J. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, “Extreme ultraviolet photoionization of aldoses and ketoses,” Chem. Phys. Lett.506(4-6), 161–166 (2011).
[CrossRef]

Guen, K. L.

Gullikson, E.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.

Gullikson, E. M.

M. Vidal-Dasilva, A. L. Aquila, E. M. Gullikson, F. Salmassi, and J. I. Larruquert, “Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range,” J. Appl. Phys.108(6), 063517 (2010).
[CrossRef]

A. Aquila, F. Salmassi, Y. Liu, and E. M. Gullikson, “Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light,” Opt. Express17(24), 22102–22107 (2009).
[CrossRef] [PubMed]

R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt.46(18), 3736–3746 (2007).
[CrossRef] [PubMed]

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom.144–147, 1047–1049 (2005).
[CrossRef]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

E. M. Gullikson, S. Mrowka, and B. B. Kaufmann, “Recent developments in EUV reflectometry at the Advanced Light Source,” SPIE Proc.4343, 363–373 (2001).
[CrossRef]

J. H. Underwood and E. M. Gullikson, “High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50-1300 eV energy region,” J. Electr. Spectr. Rel. Phenom.92(1-3), 265–272 (1998).
[CrossRef]

R. Soufli and E. M. Gullikson, “Reflectance measurements on clean surfaces for the determination of optical constants of silicon in the extreme ultraviolet-soft-x-ray region,” Appl. Opt.36(22), 5499–5507 (1997).
[CrossRef] [PubMed]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Hansteen, V. H.

B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science331(6013), 55–58 (2011).
[CrossRef] [PubMed]

Hau-Riege, S. P.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Hecquet, C.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
[CrossRef]

Heinbuch, S.

Hill, D.

Hoover, R. B.

A. B. C. Walker, J. F. Lindblom, T. W. Barbee, and R. B. Hoover, “Soft x-ray images of the solar corona with a normal-incidence Cassegrain multilayer telescope,” Science241(4874), 1781–1787 (1988).
[CrossRef] [PubMed]

Hu, M.-H.

Huang, Q.

Hudyma, R. M.

Ichimaru, S.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom.144–147, 1047–1049 (2005).
[CrossRef]

Jérome, A.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
[CrossRef]

Jonnard, P.

Juha, L.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Kaiser, N.

S. A. Yulin, F. Schaefers, T. Feigl, and N. Kaiser, “Enhanced reflectivity and stability of Sc/Si multilayers,” SPIE Proc.5193, 155–163 (2004).
[CrossRef]

Kanizay, K.

Kaufmann, B. B.

E. M. Gullikson, S. Mrowka, and B. B. Kaufmann, “Recent developments in EUV reflectometry at the Advanced Light Source,” SPIE Proc.4343, 363–373 (2001).
[CrossRef]

Khatri, S.

D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.

Kjornrattanawanich, B.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

B. Kjornrattanawanich, D. L. Windt, and J. F. Seely, “Normal-incidence silicon-gadolinium multilayers for imaging at 63 nm wavelength,” Opt. Lett.33(9), 965–967 (2008).
[CrossRef] [PubMed]

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

J. F. Seely, Y. A. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, “Coated photodiode technique for the determination of the optical constants of reactive elements: La and Tb,” SPIE Proc.6317, 63170T, 63170T-9 (2006).
[CrossRef]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

D. L. Windt, J. F. Seely, B. Kjornrattanawanich, and Y. A. Uspenskii, “Terbium-based extreme ultraviolet multilayers,” Opt. Lett.30(23), 3186–3188 (2005).
[CrossRef] [PubMed]

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.43(9), 1835–1848 (2004).
[CrossRef] [PubMed]

Kondo, Y.

T. Ejima, Y. Kondo, and M. Watanabe, “Two-color reflection multilayers for He-I and He-II resonance lines for microscopic ultraviolet photoelectron spectroscopy using Schwarzschild objective,” Jpn. J. Appl. Phys.40(Part 1, No. 1), 376–379 (2001).
[CrossRef]

Kondratenko, V. V.

Kortright, J. B.

Krzywinski, J.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
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S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Larruquert, J. I.

J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE8076, 80760D, 80760D-8 (2011).
[CrossRef]

M. Vidal-Dasilva, A. L. Aquila, E. M. Gullikson, F. Salmassi, and J. I. Larruquert, “Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range,” J. Appl. Phys.108(6), 063517 (2010).
[CrossRef]

M. Vidal-Dasilva, M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm,” Opt. Express17(25), 22773–22784 (2009).
[CrossRef] [PubMed]

M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A23(11), 2880–2887 (2006).
[CrossRef] [PubMed]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Lemen, J.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
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Li, H.

Lindblom, J. F.

A. B. C. Walker, J. F. Lindblom, T. W. Barbee, and R. B. Hoover, “Soft x-ray images of the solar corona with a normal-incidence Cassegrain multilayer telescope,” Science241(4874), 1781–1787 (1988).
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Liu, Y.

London, R. A.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Mahne, N.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
[CrossRef]

Malvezzi, A. M.

Marconi, M.

Marconi, M. C.

Martínez-Galarce, D.

D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.

Martinez-Sykora, J.

B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science331(6013), 55–58 (2011).
[CrossRef] [PubMed]

Martz, D.

Martz, D. H.

McIntosh, S. W.

B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science331(6013), 55–58 (2011).
[CrossRef] [PubMed]

McKenzie, D.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

Meltchakov, E.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
[CrossRef]

Méndez, J. A.

J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE8076, 80760D, 80760D-8 (2011).
[CrossRef]

M. Vidal-Dasilva, M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm,” Opt. Express17(25), 22773–22784 (2009).
[CrossRef] [PubMed]

M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A23(11), 2880–2887 (2006).
[CrossRef] [PubMed]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Menoni, C. S.

Mrowka, S.

E. M. Gullikson, S. Mrowka, and B. B. Kaufmann, “Recent developments in EUV reflectometry at the Advanced Light Source,” SPIE Proc.4343, 363–373 (2001).
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Nanaronne, S.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
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Nannarone, S.

Nicolosi, P.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
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S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
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H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom.144–147, 1047–1049 (2005).
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M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
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Plönjes, E.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
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Podgorski, W.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

Poletto, L.

Ponomareko, A. G.

Prast, E.

D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.

Rausch, A.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

Ravet-Krill, M.-F.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
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D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.

Robinson, J. C.

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
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R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt.46(18), 3736–3746 (2007).
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R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Rocca, J. J.

J. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, “Extreme ultraviolet photoionization of aldoses and ketoses,” Chem. Phys. Lett.506(4-6), 161–166 (2011).
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C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett.33(5), 518–520 (2008).
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P. Wachulak, M. Grisham, S. Heinbuch, D. Martz, W. Rockward, D. Hill, J. J. Rocca, C. S. Menoni, E. Anderson, and M. Marconi, “Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser,” J. Opt. Soc. Am. B25(7), B104–B107 (2008).
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S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, “Demonstration of a desk-top size high repetition rate soft x-ray laser,” Opt. Express13(11), 4050–4055 (2005).
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M. Seminario, J. J. Rocca, R. A. Depine, B. Bach, and B. Bach, “Characterization of diffraction gratings by use of a tabletop soft-x-ray laser,” Appl. Opt.40(30), 5539–5544 (2001).
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J. Filevich, K. Kanizay, M. C. Marconi, J. L. A. Chilla, and J. J. Rocca, “Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings,” Opt. Lett.25(5), 356–358 (2000).
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Rockward, W.

Rodriguez-de Marcos, L.

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Rodríguez-de Marcos, L.

J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE8076, 80760D, 80760D-8 (2011).
[CrossRef]

Rossi, S.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
[CrossRef]

Salmassi, F.

M. Vidal-Dasilva, A. L. Aquila, E. M. Gullikson, F. Salmassi, and J. I. Larruquert, “Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range,” J. Appl. Phys.108(6), 063517 (2010).
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A. Aquila, F. Salmassi, Y. Liu, and E. M. Gullikson, “Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light,” Opt. Express17(24), 22102–22107 (2009).
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Schaefers, F.

S. A. Yulin, F. Schaefers, T. Feigl, and N. Kaiser, “Enhanced reflectivity and stability of Sc/Si multilayers,” SPIE Proc.5193, 155–163 (2004).
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Schmidt, M. A.

Schrijver, C.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

Schrijver, C. J.

B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science331(6013), 55–58 (2011).
[CrossRef] [PubMed]

Seely, J.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.43(9), 1835–1848 (2004).
[CrossRef] [PubMed]

Seely, J. F.

B. Kjornrattanawanich, D. L. Windt, and J. F. Seely, “Normal-incidence silicon-gadolinium multilayers for imaging at 63 nm wavelength,” Opt. Lett.33(9), 965–967 (2008).
[CrossRef] [PubMed]

J. F. Seely, Y. A. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, “Coated photodiode technique for the determination of the optical constants of reactive elements: La and Tb,” SPIE Proc.6317, 63170T, 63170T-9 (2006).
[CrossRef]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

D. L. Windt, J. F. Seely, B. Kjornrattanawanich, and Y. A. Uspenskii, “Terbium-based extreme ultraviolet multilayers,” Opt. Lett.30(23), 3186–3188 (2005).
[CrossRef] [PubMed]

Seminario, M.

Shin, J.

J. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, “Extreme ultraviolet photoionization of aldoses and ketoses,” Chem. Phys. Lett.506(4-6), 161–166 (2011).
[CrossRef]

Shine, R.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

Shing, L.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

Sobierajski, R.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Sokolowski Tinten, K.

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

Soufli, R.

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt.46(18), 3736–3746 (2007).
[CrossRef] [PubMed]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

R. Soufli and E. M. Gullikson, “Reflectance measurements on clean surfaces for the determination of optical constants of silicon in the extreme ultraviolet-soft-x-ray region,” Appl. Opt.36(22), 5499–5507 (1997).
[CrossRef] [PubMed]

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.

Spiller, E.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
[CrossRef] [PubMed]

R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt.46(18), 3736–3746 (2007).
[CrossRef] [PubMed]

D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Spiller, E. A.

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

Stern, R.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

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S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
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G. G. Stoney, “The tension of metallic films deposited by electrolysis,” Proc. R. Soc. Lond., A Contain. Pap. Math. Phys. Character82(553), 172–175 (1909).
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H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom.144–147, 1047–1049 (2005).
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Tarbell, T.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
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B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science331(6013), 55–58 (2011).
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Taylor, J. S.

Testa, P.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
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P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
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B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science331(6013), 55–58 (2011).
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S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
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S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett.98(14), 145502 (2007).
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J. H. Underwood and E. M. Gullikson, “High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50-1300 eV energy region,” J. Electr. Spectr. Rel. Phenom.92(1-3), 265–272 (1998).
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Uspenskii, Y. A.

J. F. Seely, Y. A. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, “Coated photodiode technique for the determination of the optical constants of reactive elements: La and Tb,” SPIE Proc.6317, 63170T, 63170T-9 (2006).
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D. L. Windt, J. F. Seely, B. Kjornrattanawanich, and Y. A. Uspenskii, “Terbium-based extreme ultraviolet multilayers,” Opt. Lett.30(23), 3186–3188 (2005).
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I. A. Artioukov, B. R. Benware, J. J. Rocca, M. Forsythe, Y. A. Uspenskii, and A. V. Vinogradov, “Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser,” IEEE J. Sel. Top. Quantum Electron.5(6), 1495–1501 (1999).
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C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
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J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE8076, 80760D, 80760D-8 (2011).
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M. Vidal-Dasilva, A. L. Aquila, E. M. Gullikson, F. Salmassi, and J. I. Larruquert, “Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range,” J. Appl. Phys.108(6), 063517 (2010).
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M. Vidal-Dasilva, M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm,” Opt. Express17(25), 22773–22784 (2009).
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C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett.33(5), 518–520 (2008).
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Walker, A. B. C.

A. B. C. Walker, J. F. Lindblom, T. W. Barbee, and R. B. Hoover, “Soft x-ray images of the solar corona with a normal-incidence Cassegrain multilayer telescope,” Science241(4874), 1781–1787 (1988).
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R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt.46(18), 3736–3746 (2007).
[CrossRef] [PubMed]

Wang, Z.

Watanabe, M.

T. Ejima, Y. Kondo, and M. Watanabe, “Two-color reflection multilayers for He-I and He-II resonance lines for microscopic ultraviolet photoelectron spectroscopy using Schwarzschild objective,” Jpn. J. Appl. Phys.40(Part 1, No. 1), 376–379 (2001).
[CrossRef]

Weber, M.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
[CrossRef]

Windt, D.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
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Windt, D. L.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

D. L. Windt and J. A. Bellotti, “Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications,” Appl. Opt.48(26), 4932–4941 (2009).
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B. Kjornrattanawanich, D. L. Windt, and J. F. Seely, “Normal-incidence silicon-gadolinium multilayers for imaging at 63 nm wavelength,” Opt. Lett.33(9), 965–967 (2008).
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J. F. Seely, Y. A. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, “Coated photodiode technique for the determination of the optical constants of reactive elements: La and Tb,” SPIE Proc.6317, 63170T, 63170T-9 (2006).
[CrossRef]

R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.5901, 59010M, 59010M-11 (2005).
[CrossRef]

D. L. Windt, J. F. Seely, B. Kjornrattanawanich, and Y. A. Uspenskii, “Terbium-based extreme ultraviolet multilayers,” Opt. Lett.30(23), 3186–3188 (2005).
[CrossRef] [PubMed]

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.43(9), 1835–1848 (2004).
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D. L. Windt, “IMD: Software for modeling the optical properties of multilayer films,” Comput. Phys.12(4), 360–370 (1998), http://www.rxollc.com/idl/index.html .
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J. B. Kortright and D. L. Windt, “Amorphous silicon carbide coatings for extreme ultraviolet optics,” Appl. Opt.27(14), 2841–2846 (1988).
[CrossRef] [PubMed]

D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.

R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.

Wolfson, C. J.

P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys.275(1-2), 41–66 (2012).
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Yulin, S. A.

S. A. Yulin, F. Schaefers, T. Feigl, and N. Kaiser, “Enhanced reflectivity and stability of Sc/Si multilayers,” SPIE Proc.5193, 155–163 (2004).
[CrossRef]

Zhou, S.

Zhu, J.

Zuppella, P.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Appl. Opt.

J. B. Kortright and D. L. Windt, “Amorphous silicon carbide coatings for extreme ultraviolet optics,” Appl. Opt.27(14), 2841–2846 (1988).
[CrossRef] [PubMed]

R. Soufli and E. M. Gullikson, “Reflectance measurements on clean surfaces for the determination of optical constants of silicon in the extreme ultraviolet-soft-x-ray region,” Appl. Opt.36(22), 5499–5507 (1997).
[CrossRef] [PubMed]

M. Seminario, J. J. Rocca, R. A. Depine, B. Bach, and B. Bach, “Characterization of diffraction gratings by use of a tabletop soft-x-ray laser,” Appl. Opt.40(30), 5539–5544 (2001).
[CrossRef] [PubMed]

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.43(9), 1835–1848 (2004).
[CrossRef] [PubMed]

R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt.46(18), 3736–3746 (2007).
[CrossRef] [PubMed]

D. L. Windt and J. A. Bellotti, “Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications,” Appl. Opt.48(26), 4932–4941 (2009).
[CrossRef] [PubMed]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt.49(20), 3922–3925 (2010).
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Appl. Phys. Lett.

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

Appl. Phys., A Mater. Sci. Process.

C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process.95(2), 401–408 (2009).
[CrossRef]

Chem. Phys. Lett.

J. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, “Extreme ultraviolet photoionization of aldoses and ketoses,” Chem. Phys. Lett.506(4-6), 161–166 (2011).
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Comput. Phys.

D. L. Windt, “IMD: Software for modeling the optical properties of multilayer films,” Comput. Phys.12(4), 360–370 (1998), http://www.rxollc.com/idl/index.html .
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

I. A. Artioukov, B. R. Benware, J. J. Rocca, M. Forsythe, Y. A. Uspenskii, and A. V. Vinogradov, “Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser,” IEEE J. Sel. Top. Quantum Electron.5(6), 1495–1501 (1999).
[CrossRef]

J. Appl. Phys.

M. Vidal-Dasilva, A. L. Aquila, E. M. Gullikson, F. Salmassi, and J. I. Larruquert, “Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range,” J. Appl. Phys.108(6), 063517 (2010).
[CrossRef]

J. Electr. Spectr. Rel. Phenom.

J. H. Underwood and E. M. Gullikson, “High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50-1300 eV energy region,” J. Electr. Spectr. Rel. Phenom.92(1-3), 265–272 (1998).
[CrossRef]

J. Electron Spectrosc. Relat. Phenom.

H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom.144–147, 1047–1049 (2005).
[CrossRef]

J. Opt. Soc. Am. A

J. Opt. Soc. Am. B

Jpn. J. Appl. Phys.

T. Ejima, Y. Kondo, and M. Watanabe, “Two-color reflection multilayers for He-I and He-II resonance lines for microscopic ultraviolet photoelectron spectroscopy using Schwarzschild objective,” Jpn. J. Appl. Phys.40(Part 1, No. 1), 376–379 (2001).
[CrossRef]

Opt. Eng.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Opt. Express

Opt. Lett.

Phys. Rev. Lett.

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Science

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The observation that the thickness of the intermixed Al-Mg layer is approximately equal to the sum of the thicknesses of the constituent Al and Mg layers was made in Ref. [28] for Al and Mg thicknesses of 20 and 19 nm, respectively. This assumption may not hold for Al and Mg layers in different thickness ranges. At the time of writing of this manuscript, this is the best assumption that can be made based on experimental evidence.

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Figures (4)

Fig. 1
Fig. 1

Extinction coefficient of several materials widely used as spacers for multilayers in the EUV. Mg shows the lowest extinction coefficient values in the EUV above the Mg 2p edge at 25 nm. Notice that Al also exhibits relatively low absorption between the Al 2p edge at 17 nm and the Al plasma wavelength at 83 nm.

Fig. 2
Fig. 2

Two-dimensional, calculated [34] contour plots of near-normal-incidence (θ = 85°) reflectance (R) as a function of both wavelength and multilayer period, for (a) standard Mg/SiC multilayers ([SiC/Mg]x40/SiC), (b) Mg/SiC multilayers where the topmost Mg layer has been replaced by an Al-Mg layer of optimized thickness ([SiC/Mg]x39/SiC/Al-Mg/SiC), and (c) (Al-Mg)/SiC multilayers ([SiC/Al-Mg]x40/SiC).

Fig. 3
Fig. 3

Experimental reflectance of standard Mg/SiC multilayer showing a) the first four reflectance orders in log-linear scale and b) data spanning 5 orders of magnitude in log-log scale. Calculated values [34], corresponding to a model with parameters as shown in Table 1, are also included as a solid line. A record narrowband peak reflectance value of 40.6% was obtained at 76.9 nm.

Fig. 4
Fig. 4

Experimental reflectance of candidate corrosion-resistant, multiple-wavelength Mg/SiC multilayer concepts where a) the topmost Mg layer has been replaced by an Al-Mg layer with 15.3 wt. % of Al, b) each Mg layer has been replaced by an Al-Mg layer with 60.8 wt. % of Al, and c) the topmost Mg layer has been replaced by an Al layer. All plots include calculated [34] values corresponding to models with parameters as shown in Table 1. In b) the performance of a multilayer with the same thickness and roughness parameters but with a 15.3 wt. % of Al in the Al-Mg layers was also calculated and is shown for the purpose of illustrating the potential of this concept towards high peak reflectance.

Tables (1)

Tables Icon

Table 1 Coating parameters corresponding to the models shown as red solid lines in Figs. 3 and 4. The multilayer structure is specified from the bottom to the top of the sample. All thickness (period, d) and roughness (σ) values are given in nm and nm rms, respectively. The thickness of the base Al layer (Al′) is 20 nm. Γ is the ratio of Mg (or Al-Mg) thickness to the total period thickness. σ′ and σ″ represent the roughness in nm of the Mg (or Al-Mg) on SiC and SiC on Mg (or Al-Mg) multilayer interfaces, respectively. The multilayers were designed to have the 1st order reflectance peak at 75, 75, 65 and 55 nm wavelengths.

Equations (4)

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f 1 2π n a r e λ 2 (1n),
f 2 2π n a r e λ 2 k.
n(AlMg)1 r e λ 2 2π [ n ˜ a (Al) f 1 (Al)+ n ˜ a (Mg) f 1 (Mg)],
k(AlMg) r e λ 2 2π [ n ˜ a (Al) f 2 (Al)+ n ˜ a (Mg) f 2 (Mg)].

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