R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett. 101(4), 043111 (2012).
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P. Wachulak, M. Grisham, S. Heinbuch, D. Martz, W. Rockward, D. Hill, J. J. Rocca, C. S. Menoni, E. Anderson, and M. Marconi, “Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser,” J. Opt. Soc. Am. B 25(7), B104–B107 (2008).
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J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
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M. Vidal-Dasilva, A. L. Aquila, E. M. Gullikson, F. Salmassi, and J. I. Larruquert, “Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range,” J. Appl. Phys. 108(6), 063517 (2010).
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[Crossref]
R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.
I. A. Artioukov, B. R. Benware, J. J. Rocca, M. Forsythe, Y. A. Uspenskii, and A. V. Vinogradov, “Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser,” IEEE J. Sel. Top. Quantum Electron. 5(6), 1495–1501 (1999).
[Crossref]
C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref]
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C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref]
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C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process. 95(2), 401–408 (2009).
[Crossref]
J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE 8076, 80760D, 80760D-8 (2011).
[Crossref]
M. Vidal-Dasilva, M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm,” Opt. Express 17(25), 22773–22784 (2009).
[Crossref]
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M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A 23(11), 2880–2887 (2006).
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D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.
R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett. 101(4), 043111 (2012).
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R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt. 46(18), 3736–3746 (2007).
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[Crossref]
R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.
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[Crossref]
S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98(14), 145502 (2007).
[Crossref]
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J. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, “Extreme ultraviolet photoionization of aldoses and ketoses,” Chem. Phys. Lett. 506(4-6), 161–166 (2011).
[Crossref]
S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98(14), 145502 (2007).
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P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 41–66 (2012).
[Crossref]
B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science 331(6013), 55–58 (2011).
[Crossref]
[PubMed]
R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.
C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref]
[PubMed]
C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process. 95(2), 401–408 (2009).
[Crossref]
C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref]
[PubMed]
D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.
S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98(14), 145502 (2007).
[Crossref]
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B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science 331(6013), 55–58 (2011).
[Crossref]
[PubMed]
C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref]
[PubMed]
S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98(14), 145502 (2007).
[Crossref]
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M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng. 51(2), 023801 (2012).
[Crossref]
B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science 331(6013), 55–58 (2011).
[Crossref]
[PubMed]
C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process. 95(2), 401–408 (2009).
[Crossref]
R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc. 5901, 59010M, 59010M-11 (2005).
[Crossref]
R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.
J. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, “Extreme ultraviolet photoionization of aldoses and ketoses,” Chem. Phys. Lett. 506(4-6), 161–166 (2011).
[Crossref]
P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 41–66 (2012).
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S. A. Yulin, F. Schaefers, T. Feigl, and N. Kaiser, “Enhanced reflectivity and stability of Sc/Si multilayers,” SPIE Proc. 5193, 155–163 (2004).
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R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett. 101(4), 043111 (2012).
[Crossref]
J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE 8076, 80760D, 80760D-8 (2011).
[Crossref]
M. Vidal-Dasilva, M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm,” Opt. Express 17(25), 22773–22784 (2009).
[Crossref]
[PubMed]
M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A 23(11), 2880–2887 (2006).
[Crossref]
[PubMed]
R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.
M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng. 51(2), 023801 (2012).
[Crossref]
I. A. Artioukov, B. R. Benware, J. J. Rocca, M. Forsythe, Y. A. Uspenskii, and A. V. Vinogradov, “Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser,” IEEE J. Sel. Top. Quantum Electron. 5(6), 1495–1501 (1999).
[Crossref]
J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE 8076, 80760D, 80760D-8 (2011).
[Crossref]
C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process. 95(2), 401–408 (2009).
[Crossref]
M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A 23(11), 2880–2887 (2006).
[Crossref]
[PubMed]
P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 41–66 (2012).
[Crossref]
R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc. 5901, 59010M, 59010M-11 (2005).
[Crossref]
R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.
P. Wachulak, M. Grisham, S. Heinbuch, D. Martz, W. Rockward, D. Hill, J. J. Rocca, C. S. Menoni, E. Anderson, and M. Marconi, “Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser,” J. Opt. Soc. Am. B 25(7), B104–B107 (2008).
[Crossref]
S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, “Demonstration of a desk-top size high repetition rate soft x-ray laser,” Opt. Express 13(11), 4050–4055 (2005).
[Crossref]
[PubMed]
J. Shin, F. Dong, M. E. Grisham, J. J. Rocca, and E. R. Bernstein, “Extreme ultraviolet photoionization of aldoses and ketoses,” Chem. Phys. Lett. 506(4-6), 161–166 (2011).
[Crossref]
J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[Crossref]
[PubMed]
P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 41–66 (2012).
[Crossref]
D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.
M. Vidal-Dasilva, A. L. Aquila, E. M. Gullikson, F. Salmassi, and J. I. Larruquert, “Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range,” J. Appl. Phys. 108(6), 063517 (2010).
[Crossref]
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R. Soufli, D. L. Windt, J. C. Robinson, S. L. Baker, E. A. Spiller, F. J. Dollar, A. L. Aquila, E. M. Gullikson, B. Kjornrattanawanich, J. F. Seely, and L. Golub, “Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc. 5901, 59010M, 59010M-11 (2005).
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E. M. Gullikson, S. Mrowka, and B. B. Kaufmann, “Recent developments in EUV reflectometry at the Advanced Light Source,” SPIE Proc. 4343, 363–373 (2001).
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R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.
B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science 331(6013), 55–58 (2011).
[Crossref]
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S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98(14), 145502 (2007).
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C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process. 95(2), 401–408 (2009).
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P. Wachulak, M. Grisham, S. Heinbuch, D. Martz, W. Rockward, D. Hill, J. J. Rocca, C. S. Menoni, E. Anderson, and M. Marconi, “Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser,” J. Opt. Soc. Am. B 25(7), B104–B107 (2008).
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S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, “Demonstration of a desk-top size high repetition rate soft x-ray laser,” Opt. Express 13(11), 4050–4055 (2005).
[Crossref]
[PubMed]
P. Wachulak, M. Grisham, S. Heinbuch, D. Martz, W. Rockward, D. Hill, J. J. Rocca, C. S. Menoni, E. Anderson, and M. Marconi, “Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser,” J. Opt. Soc. Am. B 25(7), B104–B107 (2008).
[Crossref]
A. B. C. Walker, J. F. Lindblom, T. W. Barbee, and R. B. Hoover, “Soft x-ray images of the solar corona with a normal-incidence Cassegrain multilayer telescope,” Science 241(4874), 1781–1787 (1988).
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J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
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J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
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R. Soufli, R. M. Hudyma, E. Spiller, E. M. Gullikson, M. A. Schmidt, J. C. Robinson, S. L. Baker, C. C. Walton, and J. S. Taylor, “Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography,” Appl. Opt. 46(18), 3736–3746 (2007).
[Crossref]
[PubMed]
H. Takenaka, S. Ichimaru, T. Ohchi, and E. M. Gullikson, “Soft-x-ray reflectivity and heat resistance of SiC/Mg multilayer,” J. Electron Spectrosc. Relat. Phenom. 144–147, 1047–1049 (2005).
[Crossref]
C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process. 95(2), 401–408 (2009).
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J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
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S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98(14), 145502 (2007).
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S. A. Yulin, F. Schaefers, T. Feigl, and N. Kaiser, “Enhanced reflectivity and stability of Sc/Si multilayers,” SPIE Proc. 5193, 155–163 (2004).
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E. M. Gullikson, S. Mrowka, and B. B. Kaufmann, “Recent developments in EUV reflectometry at the Advanced Light Source,” SPIE Proc. 4343, 363–373 (2001).
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D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.
M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng. 51(2), 023801 (2012).
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J. F. Seely, Y. A. Uspenskii, B. Kjornrattanawanich, and D. L. Windt, “Coated photodiode technique for the determination of the optical constants of reactive elements: La and Tb,” SPIE Proc. 6317, 63170T, 63170T-9 (2006).
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D. L. Windt, J. F. Seely, B. Kjornrattanawanich, and Y. A. Uspenskii, “Terbium-based extreme ultraviolet multilayers,” Opt. Lett. 30(23), 3186–3188 (2005).
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C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref]
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S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98(14), 145502 (2007).
[Crossref]
[PubMed]
S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98(14), 145502 (2007).
[Crossref]
[PubMed]
J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE 8076, 80760D, 80760D-8 (2011).
[Crossref]
M. Vidal-Dasilva, A. L. Aquila, E. M. Gullikson, F. Salmassi, and J. I. Larruquert, “Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range,” J. Appl. Phys. 108(6), 063517 (2010).
[Crossref]
M. Vidal-Dasilva, M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm,” Opt. Express 17(25), 22773–22784 (2009).
[Crossref]
[PubMed]
M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A 23(11), 2880–2887 (2006).
[Crossref]
[PubMed]
R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.
P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 41–66 (2012).
[Crossref]
J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[Crossref]
[PubMed]
A. B. C. Walker, J. F. Lindblom, T. W. Barbee, and R. B. Hoover, “Soft x-ray images of the solar corona with a normal-incidence Cassegrain multilayer telescope,” Science 241(4874), 1781–1787 (1988).
[Crossref]
[PubMed]
S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98(14), 145502 (2007).
[Crossref]
[PubMed]
C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process. 95(2), 401–408 (2009).
[Crossref]
M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A 23(11), 2880–2887 (2006).
[Crossref]
[PubMed]
P. Wachulak, M. Grisham, S. Heinbuch, D. Martz, W. Rockward, D. Hill, J. J. Rocca, C. S. Menoni, E. Anderson, and M. Marconi, “Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser,” J. Opt. Soc. Am. B 25(7), B104–B107 (2008).
[Crossref]
C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref]
[PubMed]
J. Filevich, K. Kanizay, M. C. Marconi, J. L. A. Chilla, and J. J. Rocca, “Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings,” Opt. Lett. 25(5), 356–358 (2000).
[Crossref]
[PubMed]
D. Martínez-Galarce, R. Soufli, D. L. Windt, M. Bruner, E. Gullikson, S. Khatri, E. Spiller, J. Robinson, S. Baker, and E. Prast, “Microroughness measurements and EUV calibration of the Solar Ultraviolet Imager multilayer-coated mirrors,” SPIE Proc.in press.
B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science 331(6013), 55–58 (2011).
[Crossref]
[PubMed]
P. Wachulak, M. Grisham, S. Heinbuch, D. Martz, W. Rockward, D. Hill, J. J. Rocca, C. S. Menoni, E. Anderson, and M. Marconi, “Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser,” J. Opt. Soc. Am. B 25(7), B104–B107 (2008).
[Crossref]
S. Heinbuch, M. Grisham, D. Martz, and J. J. Rocca, “Demonstration of a desk-top size high repetition rate soft x-ray laser,” Opt. Express 13(11), 4050–4055 (2005).
[Crossref]
[PubMed]
C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref]
[PubMed]
B. De Pontieu, S. W. McIntosh, M. Carlsson, V. H. Hansteen, T. D. Tarbell, P. Boerner, J. Martinez-Sykora, C. J. Schrijver, and A. M. Title, “The origins of hot plasma in the solar corona,” Science 331(6013), 55–58 (2011).
[Crossref]
[PubMed]
P. Boerner, C. Edwards, J. Lemen, A. Rausch, C. Schrijver, R. Shine, L. Shing, R. Stern, T. Tarbell, A. Title, C. J. Wolfson, R. Soufli, E. Spiller, E. Gullikson, D. McKenzie, D. Windt, L. Golub, W. Podgorski, P. Testa, and M. Weber, “Initial calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO),” Sol. Phys. 275(1-2), 41–66 (2012).
[Crossref]
C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process. 95(2), 401–408 (2009).
[Crossref]
J. I. Larruquert, M. Vidal-Dasilva, S. García-Cortés, L. Rodríguez-de Marcos, M. Fernández-Perea, J. A. Aznárez, and J. A. Méndez, “Multilayer coatings for the far and extreme ultraviolet,” Proc. SPIE 8076, 80760D, 80760D-8 (2011).
[Crossref]
M. Vidal-Dasilva, M. Fernández-Perea, J. A. Méndez, J. A. Aznárez, and J. I. Larruquert, “Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm,” Opt. Express 17(25), 22773–22784 (2009).
[Crossref]
[PubMed]
M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A 23(11), 2880–2887 (2006).
[Crossref]
[PubMed]
R. Soufli, E. Spiller, D. L. Windt, J. C. Robinson, E. M. Gullikson, L. Rodriguez-de Marcos, M. Fernández-Perea, S. L. Baker, A. L. Aquila, F. J. Dollar, J. A. Méndez, J. I. Larruquert, L. Golub, and P. Boerner, “In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the Atmospheric Imaging Assembly instrument aboard the Solar Dynamics Observatory,” SPIE Proc.in press.
C. A. Brewer, F. Brizuela, P. Wachulak, D. H. Martz, W. Chao, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artyukov, A. G. Ponomareko, V. V. Kondratenko, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution,” Opt. Lett. 33(5), 518–520 (2008).
[Crossref]
[PubMed]
P. Wachulak, M. Grisham, S. Heinbuch, D. Martz, W. Rockward, D. Hill, J. J. Rocca, C. S. Menoni, E. Anderson, and M. Marconi, “Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser,” J. Opt. Soc. Am. B 25(7), B104–B107 (2008).
[Crossref]
E. M. Gullikson, S. Mrowka, and B. B. Kaufmann, “Recent developments in EUV reflectometry at the Advanced Light Source,” SPIE Proc. 4343, 363–373 (2001).
[Crossref]
C. Hecquet, F. Delmotte, M.-F. Ravet-Krill, S. Rossi, A. Jérome, F. Bridou, F. Varnière, E. Meltchakov, F. Auchère, A. Giglia, N. Mahne, and S. Nanaronne, “Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity,” Appl. Phys., A Mater. Sci. Process. 95(2), 401–408 (2009).
[Crossref]
M. Fernández-Perea, J. I. Larruquert, J. A. Aznárez, J. A. Méndez, L. Poletto, A. M. Malvezzi, A. Giglia, and S. Nannarone, “Determination of optical constants of scandium films in the 20-1000 eV range,” J. Opt. Soc. Am. A 23(11), 2880–2887 (2006).
[Crossref]
[PubMed]
M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng. 51(2), 023801 (2012).
[Crossref]
S. P. Hau-Riege, H. N. Chapman, J. Krzywinski, R. Sobierajski, S. Bajt, R. A. London, M. Bergh, C. Caleman, R. Nietubyc, L. Juha, J. Kuba, E. Spiller, S. Baker, R. Bionta, K. Sokolowski Tinten, N. Stojanovic, B. Kjornrattanawanich, E. M. Gullikson, E. Plönjes, S. Toleikis, and T. Tschentscher, “Subnanometer-scale measurements of the interaction of ultrafast soft x-ray free-electron-laser pulses with matter,” Phys. Rev. Lett. 98(14), 145502 (2007).
[Crossref]
[PubMed]
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