Abstract

The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region.

© 2012 OSA

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    [CrossRef]
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    [CrossRef]
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2011 (4)

D. Kasahara, D. Morita, T. Kosugi, K. Nakagawa, J. Kawamata, Y. Higuchi, H. Matsumura, and T. Mukai, “Demonstration of blue and green GaN-based vertical-cavity surface-emitting lasers by current injection at Room Temperature,” Appl. Phys. Express4(7), 072103 (2011).
[CrossRef]

W. C. Lin, L. S. Liao, H. Chen, H. C. Chang, D. P. Tsai, and H. P. Chiang, “Size dependence of nanoparticle-SERS enhancement from silver film over nanosphere (AgFON) Substrate,” Plasmonics6(2), 201–206 (2011).
[CrossRef]

W. T. Chen, C. J. Chen, P. C. Wu, S. Sun, L. Zhou, G. Y. Guo, C. T. Hsiao, K. Y. Yang, N. I. Zheludev, and D. P. Tsai, “Optical magnetic response in three-dimensional metamaterial of upright plasmonic meta-molecules,” Opt. Express19(13), 12837–12842 (2011).
[CrossRef] [PubMed]

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of signle crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B29(1), 010601 (2011).
[CrossRef]

2010 (4)

2009 (4)

R. G. Mote, S. F. Yu, W. Zhou, and X. F. Li, “Design and analysis of two-dimensional high-index-contrast grating surface-emitting lasers,” Opt. Express17(1), 260–265 (2009).
[CrossRef] [PubMed]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-index-contrast grating (HCG) and its applications in optoelectronic devices,” IEEE J. Sel. Top. Quantum Electron.15(5), 1485–1499 (2009).
[CrossRef]

J. H. Lee, S. M. Ahn, H. J. Chang, J. H. Kim, Y. S. Park, and H. S. Jeon, “Polarization-dependent GaN surface grating reflector for short wavelength applications,” Opt. Express17(25), 22535–22542 (2009).
[CrossRef] [PubMed]

J. H. Kim, D. U. Kim, J. H. Lee, H. S. Jeon, Y. S. Park, and Y. S. Choi, “AlGaN membrane grating reflector,” Appl. Phys. Lett.95(2), 021102 (2009).
[CrossRef]

2008 (2)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics2(3), 180–184 (2008).
[CrossRef]

T. C. Lu, C. C. Kao, H. C. Kuo, G. S. Huang, and S. C. Wang, “CW lasing of current injection blue GaN-based vertical cavity surface emitting laser,” Appl. Phys. Lett.92(14), 141102 (2008).
[CrossRef]

2007 (2)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “Nano electro-mechanical optoelectronic tunable VCSEL,” Opt. Express15(3), 1222–1227 (2007).
[CrossRef] [PubMed]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics1(2), 119–122 (2007).
[CrossRef]

2006 (1)

G. S. Huang, T. C. Lu, H. H. Yao, H. C. Kuo, S. C. Wang, C. W. Lin, and L. Chang, “Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition,” Appl. Phys. Lett.88(6), 061904 (2006).
[CrossRef]

2004 (2)

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 μm) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

A. J. Shaw, A. L. Bradley, J. F. Donegan, and J. G. Lunney, “GaN resonant cavity light-emitting diodes for plastic optical fiber applications,” IEEE Photon. Technol. Lett.16(9), 2006–2008 (2004).
[CrossRef]

1981 (1)

1966 (1)

K. S. Yee, “Numerical solution of isitial boundary value problems involving Maxwell’s equations in isotropic media,” IEEE Trans. Antennas Propag. AP14(3), 302–307 (1966).
[CrossRef]

Ahn, S. M.

Babinec, T. M.

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of signle crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B29(1), 010601 (2011).
[CrossRef]

Bradley, A. L.

A. J. Shaw, A. L. Bradley, J. F. Donegan, and J. G. Lunney, “GaN resonant cavity light-emitting diodes for plastic optical fiber applications,” IEEE Photon. Technol. Lett.16(9), 2006–2008 (2004).
[CrossRef]

Chang, H. C.

W. C. Lin, L. S. Liao, H. Chen, H. C. Chang, D. P. Tsai, and H. P. Chiang, “Size dependence of nanoparticle-SERS enhancement from silver film over nanosphere (AgFON) Substrate,” Plasmonics6(2), 201–206 (2011).
[CrossRef]

Chang, H. J.

Chang, L.

G. S. Huang, T. C. Lu, H. H. Yao, H. C. Kuo, S. C. Wang, C. W. Lin, and L. Chang, “Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition,” Appl. Phys. Lett.88(6), 061904 (2006).
[CrossRef]

Chang-Hasnain, C.

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 μm) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Chang-Hasnain, C. J.

V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express18(2), 694–699 (2010).
[CrossRef] [PubMed]

C. Chase, Y. Rao, W. Hofmann, and C. J. Chang-Hasnain, “1550 nm high contrast grating VCSEL,” Opt. Express18(15), 15461–15466 (2010).
[CrossRef] [PubMed]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-index-contrast grating (HCG) and its applications in optoelectronic devices,” IEEE J. Sel. Top. Quantum Electron.15(5), 1485–1499 (2009).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics2(3), 180–184 (2008).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “Nano electro-mechanical optoelectronic tunable VCSEL,” Opt. Express15(3), 1222–1227 (2007).
[CrossRef] [PubMed]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics1(2), 119–122 (2007).
[CrossRef]

Chase, C.

Chau, Y. F.

Chen, C. H.

T. C. Lu, S. W. Chen, T. T. Wu, P. M. Tu, C. K. Chen, C. H. Chen, Z. Y. Li, H. C. Kuo, and S. C. Wang, “Continuous wave operation of current injected GaN vertical cavity surface emitting lasers at room temperature,” Appl. Phys. Lett.97(7), 071114 (2010).
[CrossRef]

Chen, C. J.

Chen, C. K.

T. C. Lu, S. W. Chen, T. T. Wu, P. M. Tu, C. K. Chen, C. H. Chen, Z. Y. Li, H. C. Kuo, and S. C. Wang, “Continuous wave operation of current injected GaN vertical cavity surface emitting lasers at room temperature,” Appl. Phys. Lett.97(7), 071114 (2010).
[CrossRef]

Chen, H.

W. C. Lin, L. S. Liao, H. Chen, H. C. Chang, D. P. Tsai, and H. P. Chiang, “Size dependence of nanoparticle-SERS enhancement from silver film over nanosphere (AgFON) Substrate,” Plasmonics6(2), 201–206 (2011).
[CrossRef]

Chen, L.

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 μm) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Chen, S. W.

T. C. Lu, S. W. Chen, T. T. Wu, P. M. Tu, C. K. Chen, C. H. Chen, Z. Y. Li, H. C. Kuo, and S. C. Wang, “Continuous wave operation of current injected GaN vertical cavity surface emitting lasers at room temperature,” Appl. Phys. Lett.97(7), 071114 (2010).
[CrossRef]

Chen, W. T.

Chiang, H. P.

W. C. Lin, L. S. Liao, H. Chen, H. C. Chang, D. P. Tsai, and H. P. Chiang, “Size dependence of nanoparticle-SERS enhancement from silver film over nanosphere (AgFON) Substrate,” Plasmonics6(2), 201–206 (2011).
[CrossRef]

Choi, Y. S.

J. H. Kim, D. U. Kim, J. H. Lee, H. S. Jeon, Y. S. Park, and Y. S. Choi, “AlGaN membrane grating reflector,” Appl. Phys. Lett.95(2), 021102 (2009).
[CrossRef]

Choy, J. T.

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of signle crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B29(1), 010601 (2011).
[CrossRef]

Chung, H. Y.

Donegan, J. F.

A. J. Shaw, A. L. Bradley, J. F. Donegan, and J. G. Lunney, “GaN resonant cavity light-emitting diodes for plastic optical fiber applications,” IEEE Photon. Technol. Lett.16(9), 2006–2008 (2004).
[CrossRef]

Gaylord, T. K.

Guo, G. Y.

Higuchi, Y.

D. Kasahara, D. Morita, T. Kosugi, K. Nakagawa, J. Kawamata, Y. Higuchi, H. Matsumura, and T. Mukai, “Demonstration of blue and green GaN-based vertical-cavity surface-emitting lasers by current injection at Room Temperature,” Appl. Phys. Express4(7), 072103 (2011).
[CrossRef]

Hofmann, W.

Hsiao, C. T.

Huang, G. S.

T. C. Lu, C. C. Kao, H. C. Kuo, G. S. Huang, and S. C. Wang, “CW lasing of current injection blue GaN-based vertical cavity surface emitting laser,” Appl. Phys. Lett.92(14), 141102 (2008).
[CrossRef]

G. S. Huang, T. C. Lu, H. H. Yao, H. C. Kuo, S. C. Wang, C. W. Lin, and L. Chang, “Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition,” Appl. Phys. Lett.88(6), 061904 (2006).
[CrossRef]

Huang, M.

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 μm) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Huang, M. C. Y.

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-index-contrast grating (HCG) and its applications in optoelectronic devices,” IEEE J. Sel. Top. Quantum Electron.15(5), 1485–1499 (2009).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics2(3), 180–184 (2008).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “Nano electro-mechanical optoelectronic tunable VCSEL,” Opt. Express15(3), 1222–1227 (2007).
[CrossRef] [PubMed]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics1(2), 119–122 (2007).
[CrossRef]

Jeon, H. S.

Kao, C. C.

T. C. Lu, C. C. Kao, H. C. Kuo, G. S. Huang, and S. C. Wang, “CW lasing of current injection blue GaN-based vertical cavity surface emitting laser,” Appl. Phys. Lett.92(14), 141102 (2008).
[CrossRef]

Karagodsky, V.

V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express18(2), 694–699 (2010).
[CrossRef] [PubMed]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-index-contrast grating (HCG) and its applications in optoelectronic devices,” IEEE J. Sel. Top. Quantum Electron.15(5), 1485–1499 (2009).
[CrossRef]

Kasahara, D.

D. Kasahara, D. Morita, T. Kosugi, K. Nakagawa, J. Kawamata, Y. Higuchi, H. Matsumura, and T. Mukai, “Demonstration of blue and green GaN-based vertical-cavity surface-emitting lasers by current injection at Room Temperature,” Appl. Phys. Express4(7), 072103 (2011).
[CrossRef]

Kawamata, J.

D. Kasahara, D. Morita, T. Kosugi, K. Nakagawa, J. Kawamata, Y. Higuchi, H. Matsumura, and T. Mukai, “Demonstration of blue and green GaN-based vertical-cavity surface-emitting lasers by current injection at Room Temperature,” Appl. Phys. Express4(7), 072103 (2011).
[CrossRef]

Khan, M.

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of signle crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B29(1), 010601 (2011).
[CrossRef]

Kim, D. U.

J. H. Kim, D. U. Kim, J. H. Lee, H. S. Jeon, Y. S. Park, and Y. S. Choi, “AlGaN membrane grating reflector,” Appl. Phys. Lett.95(2), 021102 (2009).
[CrossRef]

Kim, J. H.

Kosugi, T.

D. Kasahara, D. Morita, T. Kosugi, K. Nakagawa, J. Kawamata, Y. Higuchi, H. Matsumura, and T. Mukai, “Demonstration of blue and green GaN-based vertical-cavity surface-emitting lasers by current injection at Room Temperature,” Appl. Phys. Express4(7), 072103 (2011).
[CrossRef]

Koyama, F.

Kuan, C. H.

Kuo, H. C.

T. C. Lu, S. W. Chen, T. T. Wu, P. M. Tu, C. K. Chen, C. H. Chen, Z. Y. Li, H. C. Kuo, and S. C. Wang, “Continuous wave operation of current injected GaN vertical cavity surface emitting lasers at room temperature,” Appl. Phys. Lett.97(7), 071114 (2010).
[CrossRef]

T. C. Lu, C. C. Kao, H. C. Kuo, G. S. Huang, and S. C. Wang, “CW lasing of current injection blue GaN-based vertical cavity surface emitting laser,” Appl. Phys. Lett.92(14), 141102 (2008).
[CrossRef]

G. S. Huang, T. C. Lu, H. H. Yao, H. C. Kuo, S. C. Wang, C. W. Lin, and L. Chang, “Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition,” Appl. Phys. Lett.88(6), 061904 (2006).
[CrossRef]

Lee, J. H.

Li, X. F.

Li, Z. Y.

T. C. Lu, S. W. Chen, T. T. Wu, P. M. Tu, C. K. Chen, C. H. Chen, Z. Y. Li, H. C. Kuo, and S. C. Wang, “Continuous wave operation of current injected GaN vertical cavity surface emitting lasers at room temperature,” Appl. Phys. Lett.97(7), 071114 (2010).
[CrossRef]

Liao, L. S.

W. C. Lin, L. S. Liao, H. Chen, H. C. Chang, D. P. Tsai, and H. P. Chiang, “Size dependence of nanoparticle-SERS enhancement from silver film over nanosphere (AgFON) Substrate,” Plasmonics6(2), 201–206 (2011).
[CrossRef]

Lin, C. W.

G. S. Huang, T. C. Lu, H. H. Yao, H. C. Kuo, S. C. Wang, C. W. Lin, and L. Chang, “Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition,” Appl. Phys. Lett.88(6), 061904 (2006).
[CrossRef]

Lin, W. C.

W. C. Lin, L. S. Liao, H. Chen, H. C. Chang, D. P. Tsai, and H. P. Chiang, “Size dependence of nanoparticle-SERS enhancement from silver film over nanosphere (AgFON) Substrate,” Plasmonics6(2), 201–206 (2011).
[CrossRef]

Loncar, M.

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of signle crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B29(1), 010601 (2011).
[CrossRef]

Lu, T. C.

T. C. Lu, S. W. Chen, T. T. Wu, P. M. Tu, C. K. Chen, C. H. Chen, Z. Y. Li, H. C. Kuo, and S. C. Wang, “Continuous wave operation of current injected GaN vertical cavity surface emitting lasers at room temperature,” Appl. Phys. Lett.97(7), 071114 (2010).
[CrossRef]

T. C. Lu, C. C. Kao, H. C. Kuo, G. S. Huang, and S. C. Wang, “CW lasing of current injection blue GaN-based vertical cavity surface emitting laser,” Appl. Phys. Lett.92(14), 141102 (2008).
[CrossRef]

G. S. Huang, T. C. Lu, H. H. Yao, H. C. Kuo, S. C. Wang, C. W. Lin, and L. Chang, “Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition,” Appl. Phys. Lett.88(6), 061904 (2006).
[CrossRef]

Lunney, J. G.

A. J. Shaw, A. L. Bradley, J. F. Donegan, and J. G. Lunney, “GaN resonant cavity light-emitting diodes for plastic optical fiber applications,” IEEE Photon. Technol. Lett.16(9), 2006–2008 (2004).
[CrossRef]

Mateus, C.

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 μm) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Matsumura, H.

D. Kasahara, D. Morita, T. Kosugi, K. Nakagawa, J. Kawamata, Y. Higuchi, H. Matsumura, and T. Mukai, “Demonstration of blue and green GaN-based vertical-cavity surface-emitting lasers by current injection at Room Temperature,” Appl. Phys. Express4(7), 072103 (2011).
[CrossRef]

Moewe, M.

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-index-contrast grating (HCG) and its applications in optoelectronic devices,” IEEE J. Sel. Top. Quantum Electron.15(5), 1485–1499 (2009).
[CrossRef]

Moharam, M. G.

Morita, D.

D. Kasahara, D. Morita, T. Kosugi, K. Nakagawa, J. Kawamata, Y. Higuchi, H. Matsumura, and T. Mukai, “Demonstration of blue and green GaN-based vertical-cavity surface-emitting lasers by current injection at Room Temperature,” Appl. Phys. Express4(7), 072103 (2011).
[CrossRef]

Mote, R. G.

Mukai, T.

D. Kasahara, D. Morita, T. Kosugi, K. Nakagawa, J. Kawamata, Y. Higuchi, H. Matsumura, and T. Mukai, “Demonstration of blue and green GaN-based vertical-cavity surface-emitting lasers by current injection at Room Temperature,” Appl. Phys. Express4(7), 072103 (2011).
[CrossRef]

Nakagawa, K.

D. Kasahara, D. Morita, T. Kosugi, K. Nakagawa, J. Kawamata, Y. Higuchi, H. Matsumura, and T. Mukai, “Demonstration of blue and green GaN-based vertical-cavity surface-emitting lasers by current injection at Room Temperature,” Appl. Phys. Express4(7), 072103 (2011).
[CrossRef]

Park, Y. S.

Pesala, B.

V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express18(2), 694–699 (2010).
[CrossRef] [PubMed]

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-index-contrast grating (HCG) and its applications in optoelectronic devices,” IEEE J. Sel. Top. Quantum Electron.15(5), 1485–1499 (2009).
[CrossRef]

Rao, Y.

Sedgwick, F. G.

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-index-contrast grating (HCG) and its applications in optoelectronic devices,” IEEE J. Sel. Top. Quantum Electron.15(5), 1485–1499 (2009).
[CrossRef]

Shaw, A. J.

A. J. Shaw, A. L. Bradley, J. F. Donegan, and J. G. Lunney, “GaN resonant cavity light-emitting diodes for plastic optical fiber applications,” IEEE Photon. Technol. Lett.16(9), 2006–2008 (2004).
[CrossRef]

Smith, K. J. M.

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of signle crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B29(1), 010601 (2011).
[CrossRef]

Sun, S.

Suzuki, Y.

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 μm) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Tsai, D. P.

Tu, P. M.

T. C. Lu, S. W. Chen, T. T. Wu, P. M. Tu, C. K. Chen, C. H. Chen, Z. Y. Li, H. C. Kuo, and S. C. Wang, “Continuous wave operation of current injected GaN vertical cavity surface emitting lasers at room temperature,” Appl. Phys. Lett.97(7), 071114 (2010).
[CrossRef]

Wang, S. C.

T. C. Lu, S. W. Chen, T. T. Wu, P. M. Tu, C. K. Chen, C. H. Chen, Z. Y. Li, H. C. Kuo, and S. C. Wang, “Continuous wave operation of current injected GaN vertical cavity surface emitting lasers at room temperature,” Appl. Phys. Lett.97(7), 071114 (2010).
[CrossRef]

T. C. Lu, C. C. Kao, H. C. Kuo, G. S. Huang, and S. C. Wang, “CW lasing of current injection blue GaN-based vertical cavity surface emitting laser,” Appl. Phys. Lett.92(14), 141102 (2008).
[CrossRef]

G. S. Huang, T. C. Lu, H. H. Yao, H. C. Kuo, S. C. Wang, C. W. Lin, and L. Chang, “Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition,” Appl. Phys. Lett.88(6), 061904 (2006).
[CrossRef]

Wu, P. C.

Wu, T. T.

T. C. Lu, S. W. Chen, T. T. Wu, P. M. Tu, C. K. Chen, C. H. Chen, Z. Y. Li, H. C. Kuo, and S. C. Wang, “Continuous wave operation of current injected GaN vertical cavity surface emitting lasers at room temperature,” Appl. Phys. Lett.97(7), 071114 (2010).
[CrossRef]

Yang, K. Y.

Yao, H. H.

G. S. Huang, T. C. Lu, H. H. Yao, H. C. Kuo, S. C. Wang, C. W. Lin, and L. Chang, “Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition,” Appl. Phys. Lett.88(6), 061904 (2006).
[CrossRef]

Yee, K. S.

K. S. Yee, “Numerical solution of isitial boundary value problems involving Maxwell’s equations in isotropic media,” IEEE Trans. Antennas Propag. AP14(3), 302–307 (1966).
[CrossRef]

Yu, S. F.

Zheludev, N. I.

Zhou, L.

Zhou, W.

Zhou, Y.

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-index-contrast grating (HCG) and its applications in optoelectronic devices,” IEEE J. Sel. Top. Quantum Electron.15(5), 1485–1499 (2009).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics2(3), 180–184 (2008).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “Nano electro-mechanical optoelectronic tunable VCSEL,” Opt. Express15(3), 1222–1227 (2007).
[CrossRef] [PubMed]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics1(2), 119–122 (2007).
[CrossRef]

Appl. Phys. Express (1)

D. Kasahara, D. Morita, T. Kosugi, K. Nakagawa, J. Kawamata, Y. Higuchi, H. Matsumura, and T. Mukai, “Demonstration of blue and green GaN-based vertical-cavity surface-emitting lasers by current injection at Room Temperature,” Appl. Phys. Express4(7), 072103 (2011).
[CrossRef]

Appl. Phys. Lett. (4)

T. C. Lu, C. C. Kao, H. C. Kuo, G. S. Huang, and S. C. Wang, “CW lasing of current injection blue GaN-based vertical cavity surface emitting laser,” Appl. Phys. Lett.92(14), 141102 (2008).
[CrossRef]

T. C. Lu, S. W. Chen, T. T. Wu, P. M. Tu, C. K. Chen, C. H. Chen, Z. Y. Li, H. C. Kuo, and S. C. Wang, “Continuous wave operation of current injected GaN vertical cavity surface emitting lasers at room temperature,” Appl. Phys. Lett.97(7), 071114 (2010).
[CrossRef]

G. S. Huang, T. C. Lu, H. H. Yao, H. C. Kuo, S. C. Wang, C. W. Lin, and L. Chang, “Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition,” Appl. Phys. Lett.88(6), 061904 (2006).
[CrossRef]

J. H. Kim, D. U. Kim, J. H. Lee, H. S. Jeon, Y. S. Park, and Y. S. Choi, “AlGaN membrane grating reflector,” Appl. Phys. Lett.95(2), 021102 (2009).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

Y. Zhou, M. C. Y. Huang, C. Chase, V. Karagodsky, M. Moewe, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, “High-index-contrast grating (HCG) and its applications in optoelectronic devices,” IEEE J. Sel. Top. Quantum Electron.15(5), 1485–1499 (2009).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

C. Mateus, M. Huang, L. Chen, C. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 μm) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

A. J. Shaw, A. L. Bradley, J. F. Donegan, and J. G. Lunney, “GaN resonant cavity light-emitting diodes for plastic optical fiber applications,” IEEE Photon. Technol. Lett.16(9), 2006–2008 (2004).
[CrossRef]

IEEE Trans. Antennas Propag. AP (1)

K. S. Yee, “Numerical solution of isitial boundary value problems involving Maxwell’s equations in isotropic media,” IEEE Trans. Antennas Propag. AP14(3), 302–307 (1966).
[CrossRef]

J. Opt. Soc. Am. (1)

J. Vac. Sci. Technol. B (1)

T. M. Babinec, J. T. Choy, K. J. M. Smith, M. Khan, and M. Lončar, “Design and focused ion beam fabrication of signle crystal diamond nanobeam cavities,” J. Vac. Sci. Technol. B29(1), 010601 (2011).
[CrossRef]

Nat. Photonics (2)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A nanoelectromechanical tunable laser,” Nat. Photonics2(3), 180–184 (2008).
[CrossRef]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics1(2), 119–122 (2007).
[CrossRef]

Opt. Express (7)

R. G. Mote, S. F. Yu, W. Zhou, and X. F. Li, “Design and analysis of two-dimensional high-index-contrast grating surface-emitting lasers,” Opt. Express17(1), 260–265 (2009).
[CrossRef] [PubMed]

V. Karagodsky, B. Pesala, C. Chase, W. Hofmann, F. Koyama, and C. J. Chang-Hasnain, “Monolithically integrated multi-wavelength VCSEL arrays using high-contrast gratings,” Opt. Express18(2), 694–699 (2010).
[CrossRef] [PubMed]

C. Chase, Y. Rao, W. Hofmann, and C. J. Chang-Hasnain, “1550 nm high contrast grating VCSEL,” Opt. Express18(15), 15461–15466 (2010).
[CrossRef] [PubMed]

J. H. Lee, S. M. Ahn, H. J. Chang, J. H. Kim, Y. S. Park, and H. S. Jeon, “Polarization-dependent GaN surface grating reflector for short wavelength applications,” Opt. Express17(25), 22535–22542 (2009).
[CrossRef] [PubMed]

M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, “Nano electro-mechanical optoelectronic tunable VCSEL,” Opt. Express15(3), 1222–1227 (2007).
[CrossRef] [PubMed]

W. T. Chen, C. J. Chen, P. C. Wu, S. Sun, L. Zhou, G. Y. Guo, C. T. Hsiao, K. Y. Yang, N. I. Zheludev, and D. P. Tsai, “Optical magnetic response in three-dimensional metamaterial of upright plasmonic meta-molecules,” Opt. Express19(13), 12837–12842 (2011).
[CrossRef] [PubMed]

W. T. Chen, P. C. Wu, C. J. Chen, H. Y. Chung, Y. F. Chau, C. H. Kuan, and D. P. Tsai, “Electromagnetic energy vortex associated with sub-wavelength plasmonic Taiji marks,” Opt. Express18(19), 19665–19671 (2010).
[CrossRef] [PubMed]

Plasmonics (1)

W. C. Lin, L. S. Liao, H. Chen, H. C. Chang, D. P. Tsai, and H. P. Chiang, “Size dependence of nanoparticle-SERS enhancement from silver film over nanosphere (AgFON) Substrate,” Plasmonics6(2), 201–206 (2011).
[CrossRef]

Other (1)

M. Bass and the Optical Society of America, Handbook of Optics, 3rd ed. (McGraw-Hill, 2009).

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Figures (4)

Fig. 1
Fig. 1

The schematic of the GaN-based membrane high contrast grating. The blue arrows show the E-field polarization direction.

Fig. 2
Fig. 2

The simulated diffraction efficiency spectra of the GaN-based membrane high contrast grating (optimized for λ = 460 nm) (a) TE-polarization and (b) TM-polarization. The electric field distribution in y-axis around the high contrast grating region for incident wavelength of 460 nm with TE-polarization light when (c) air-gap is 100 nm and (d) air-gap is 500 nm.

Fig. 3
Fig. 3

Reflectivity spectra mappings of the GaN-based membrane HCG reflectors (optimized for λ = 460 nm TE-polarization) for various structural parameters: (a) grating period, (b) grating height, (c) filling factor, (d) air-gap height.

Fig. 4
Fig. 4

SEM images for (a) top view, (b) tilted angle view and (c) enlarged tilted angle view of the GaN-based membrane HCG reflector. (d) Experimental and simulated reflectivity spectra of the GaN-based membrane HCG reflector for both TE and TM polarizations.

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