Abstract

For reliable three dimensional (3D) imaging system, it is necessary for the optical shutter to have a wide spectral bandwidth operation and enhanced modulation depth. We propose an electro-absorption modulator (EAM) based on coupled Fabry-Perot cavities with micro-cavity (CCMC) which uses asymmetric tandem quantum wells (ATQWs) to obtain improved spectral bandwidth and enhanced modulation depth. Several modulator designs are investigated to obtain improved modulation performance such as wider spectral bandwidth and enhanced modulation depth. It was found that among all the studied modulator geometries, CCMC structure with ATQWs provides the widest spectral bandwidth of 9.6nm and high modulation depth in excess of 50% at −24V, which is good agreement with theoretical calculations. These results suggest that EAM has excellent potential as optical shutter for 3D imaging application.

© 2012 OSA

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    [CrossRef]
  2. H. Liu, C. C. Lin, and J. S. Harris, “High-speed, dual-function vertical cavity multiple quantum well modulators and photodetectors for optical interconnects,” Opt. Eng.40(7), 1186–1191 (2001).
    [CrossRef]
  3. G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
    [CrossRef]
  4. W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
    [CrossRef]
  5. Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
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    [CrossRef]
  9. U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003).
    [CrossRef]
  10. B. H. Na, G. W. Ju, H. J. Choi, Y. C. Cho, Y. H. Park, and Y. T. Lee, “Large aperture asymmetric Fabry Perot modulator based on asymmetric tandem quantum well for low voltage operation,” Opt. Express20(6), 6003–6009 (2012).
    [CrossRef] [PubMed]
  11. Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012).
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
  17. K. W. Goossen, J. E. Cunningham, and W. Y. Jan, “Stacked-diode electroabsorption modulator,” IEEE Photon. Technol. Lett.6(8), 936–938 (1994).
    [CrossRef]
  18. H. Mohseni, W. K. Chan, H. An, A. Ulmer, and D. Capewell, “Tunable surface-normal modulator operating near 1550nm with a high-extinction ratio at high temperature,” IEEE Photon. Technol. Lett.18(1), 214–216 (2006).
    [CrossRef]
  19. N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005).
    [CrossRef]
  20. T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004).
    [CrossRef]
  21. P. Chaisakul, D. Marris-Morini, M. S. Rouifed, G. Isella, D. Chrastina, J. Frigerio, X. Le Roux, S. Edmond, J. R. Coudevylle, and L. Vivien, “23 GHz Ge/SiGe multiple quantum well electroabsorption modulator,” Opt. Express20(3), 3219–3224 (2012).
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    [CrossRef]
  23. F. L. Pedrotti and L. S. Pedrotti, Introduction to Optics (Pearson Prentice Hall, New Jersey, 2007), Chap. 22.
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    [CrossRef]
  25. K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992).
    [CrossRef]
  26. Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).

2012

2009

E. A. Dorjgotov, A. K. Bhowmik, and P. J. Bos, “Switchable polarization-independent liquid-crystal Fabry-Perot filter,” Appl. Opt.48(1), 74–79 (2009).
[CrossRef] [PubMed]

E. Dorjgotov, A. Bhowmik, and P. Bos, “Design of a wide bandwidth switchable mirror based on a liquid crystal etalon,” J. Appl. Phys.105(10), 104906 (2009).
[CrossRef]

2008

2007

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

2006

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

H. Mohseni, W. K. Chan, H. An, A. Ulmer, and D. Capewell, “Tunable surface-normal modulator operating near 1550nm with a high-extinction ratio at high temperature,” IEEE Photon. Technol. Lett.18(1), 214–216 (2006).
[CrossRef]

2005

N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005).
[CrossRef]

S. Junique, Q. Wang, S. Almqvist, J. Guo, H. Martijn, B. Noharet, and J. Y. Andersson, “GaAs-based multiple-quantum-well spatial light modulators fabricated by a wafer-scale process,” Appl. Opt.44(9), 1635–1641 (2005).
[CrossRef] [PubMed]

2004

T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004).
[CrossRef]

Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).

2003

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003).
[CrossRef]

2001

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

H. Liu, C. C. Lin, and J. S. Harris, “High-speed, dual-function vertical cavity multiple quantum well modulators and photodetectors for optical interconnects,” Opt. Eng.40(7), 1186–1191 (2001).
[CrossRef]

1996

1994

K. W. Goossen, J. E. Cunningham, and W. Y. Jan, “Stacked-diode electroabsorption modulator,” IEEE Photon. Technol. Lett.6(8), 936–938 (1994).
[CrossRef]

1993

N. Susa and T. Nakahara, “Design of AlGaAs/GaAs quantum well for electro-absorption modulator,” Solid-State Electron.36(9), 1277–1287 (1993).
[CrossRef]

1992

K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992).
[CrossRef]

1991

I. J. Fritz, J. F. Klem, and J. R. Wendt, “Reflectance modulator based on tandem Fabry‐Perot resonators,” Appl. Phys. Lett.59(7), 753–755 (1991).
[CrossRef]

1989

A. A. M. Saleh and J. Stone, “Two stage Fabry-Perot filters as de-multiplexers in optical FDMA LAN’s,” J. Lightwave Technol.7(2), 323–330 (1989).
[CrossRef]

1984

T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984).
[CrossRef]

D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984).
[CrossRef]

Adams, S. B.

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

Ahearn, J. S.

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

Alboon, S. A.

Almqvist, S.

Altug, H.

N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005).
[CrossRef]

An, H.

H. Mohseni, W. K. Chan, H. An, A. Ulmer, and D. Capewell, “Tunable surface-normal modulator operating near 1550nm with a high-extinction ratio at high temperature,” IEEE Photon. Technol. Lett.18(1), 214–216 (2006).
[CrossRef]

Andersson, J. Y.

Arad, U.

U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003).
[CrossRef]

Averboukh, A.

U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003).
[CrossRef]

Bacher, K.

K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992).
[CrossRef]

Bhowmik, A.

E. Dorjgotov, A. Bhowmik, and P. Bos, “Design of a wide bandwidth switchable mirror based on a liquid crystal etalon,” J. Appl. Phys.105(10), 104906 (2009).
[CrossRef]

Bhowmik, A. K.

Binari, S.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

Binari, S. C.

T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004).
[CrossRef]

Bos, P.

E. Dorjgotov, A. Bhowmik, and P. Bos, “Design of a wide bandwidth switchable mirror based on a liquid crystal etalon,” J. Appl. Phys.105(10), 104906 (2009).
[CrossRef]

Bos, P. J.

Bour, D. P.

N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005).
[CrossRef]

Burrus, C. A.

T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984).
[CrossRef]

D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984).
[CrossRef]

Capewell, D.

H. Mohseni, W. K. Chan, H. An, A. Ulmer, and D. Capewell, “Tunable surface-normal modulator operating near 1550nm with a high-extinction ratio at high temperature,” IEEE Photon. Technol. Lett.18(1), 214–216 (2006).
[CrossRef]

Chaisakul, P.

Chan, W. K.

H. Mohseni, W. K. Chan, H. An, A. Ulmer, and D. Capewell, “Tunable surface-normal modulator operating near 1550nm with a high-extinction ratio at high temperature,” IEEE Photon. Technol. Lett.18(1), 214–216 (2006).
[CrossRef]

Chemla, D. S.

T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984).
[CrossRef]

D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984).
[CrossRef]

Cho, Y. C.

B. H. Na, G. W. Ju, H. J. Choi, Y. C. Cho, Y. H. Park, and Y. T. Lee, “Large aperture asymmetric Fabry Perot modulator based on asymmetric tandem quantum well for low voltage operation,” Opt. Express20(6), 6003–6009 (2012).
[CrossRef] [PubMed]

Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012).
[CrossRef]

Choi, H. J.

Chrastina, D.

Chuang, C. H.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Coudevylle, J. R.

Cunningham, J. E.

K. W. Goossen, J. E. Cunningham, and W. Y. Jan, “Stacked-diode electroabsorption modulator,” IEEE Photon. Technol. Lett.6(8), 936–938 (1994).
[CrossRef]

Damen, T. C.

T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984).
[CrossRef]

D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984).
[CrossRef]

DePaulis, L.

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

Dorjgotov, E.

E. Dorjgotov, A. Bhowmik, and P. Bos, “Design of a wide bandwidth switchable mirror based on a liquid crystal etalon,” J. Appl. Phys.105(10), 104906 (2009).
[CrossRef]

Dorjgotov, E. A.

Dou, Y.

Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).

Edmond, S.

Efron, U.

U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003).
[CrossRef]

Ferraro, M.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

Frigerio, J.

Fritz, I. J.

I. J. Fritz, J. F. Klem, and J. R. Wendt, “Reflectance modulator based on tandem Fabry‐Perot resonators,” Appl. Phys. Lett.59(7), 753–755 (1991).
[CrossRef]

Gilbreath, G. C.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Goetz, P. G.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004).
[CrossRef]

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Goossen, K. W.

K. W. Goossen, J. E. Cunningham, and W. Y. Jan, “Stacked-diode electroabsorption modulator,” IEEE Photon. Technol. Lett.6(8), 936–938 (1994).
[CrossRef]

Gossard, A. C.

T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984).
[CrossRef]

D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984).
[CrossRef]

Guo, J.

Harris, J. S.

H. Liu, C. C. Lin, and J. S. Harris, “High-speed, dual-function vertical cavity multiple quantum well modulators and photodetectors for optical interconnects,” Opt. Eng.40(7), 1186–1191 (2001).
[CrossRef]

K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992).
[CrossRef]

He, S. L.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Helman, N. C.

N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005).
[CrossRef]

Hongsmatip, T.

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

Huang, Y.

Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).

Isella, G.

Jan, W. Y.

K. W. Goossen, J. E. Cunningham, and W. Y. Jan, “Stacked-diode electroabsorption modulator,” IEEE Photon. Technol. Lett.6(8), 936–938 (1994).
[CrossRef]

Ju, G. W.

Junique, S.

Karlsson, S.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Kjebon, O.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Klem, J. F.

I. J. Fritz, J. F. Klem, and J. R. Wendt, “Reflectance modulator based on tandem Fabry‐Perot resonators,” Appl. Phys. Lett.59(7), 753–755 (1991).
[CrossRef]

Klotzkin, D.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

Krysa, A. B.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Kwon, J. O.

Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012).
[CrossRef]

Lane, B.

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

T. L. Worchesky, K. J. Ritter, R. Martin, and B. Lane, “Large arrays of spatial light modulators hybridized to silicon integrated circuits,” Appl. Opt.35(8), 1180–1186 (1996).
[CrossRef] [PubMed]

Le Roux, X.

Lee, S. H.

Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012).
[CrossRef]

Lee, S. W.

Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012).
[CrossRef]

Lee, Y. T.

Levit, S.

U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003).
[CrossRef]

Lin, C. C.

H. Liu, C. C. Lin, and J. S. Harris, “High-speed, dual-function vertical cavity multiple quantum well modulators and photodetectors for optical interconnects,” Opt. Eng.40(7), 1186–1191 (2001).
[CrossRef]

Lindquist, R. G.

Liu, C. P.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Liu, H.

H. Liu, C. C. Lin, and J. S. Harris, “High-speed, dual-function vertical cavity multiple quantum well modulators and photodetectors for optical interconnects,” Opt. Eng.40(7), 1186–1191 (2001).
[CrossRef]

Lord, S. M.

K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992).
[CrossRef]

Lucke, K. C. R. L.

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Mahon, R.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004).
[CrossRef]

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Marris-Morini, D.

Martijn, H.

Martin, R.

Martin, R. J.

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

McElwain, T. P.

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

Meehan, T. J.

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Miller, D. A. B.

N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005).
[CrossRef]

T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984).
[CrossRef]

D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984).
[CrossRef]

Mohseni, H.

H. Mohseni, W. K. Chan, H. An, A. Ulmer, and D. Capewell, “Tunable surface-normal modulator operating near 1550nm with a high-extinction ratio at high temperature,” IEEE Photon. Technol. Lett.18(1), 214–216 (2006).
[CrossRef]

Moore, C. I.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

Mozersky, S.

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Murphy, J.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

Na, B. H.

Nakahara, T.

N. Susa and T. Nakahara, “Design of AlGaAs/GaAs quantum well for electro-absorption modulator,” Solid-State Electron.36(9), 1277–1287 (1993).
[CrossRef]

Noharet, B.

Oh, E.

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Park, C. Y.

Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012).
[CrossRef]

Park, Y. H.

Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012).
[CrossRef]

B. H. Na, G. W. Ju, H. J. Choi, Y. C. Cho, Y. H. Park, and Y. T. Lee, “Large aperture asymmetric Fabry Perot modulator based on asymmetric tandem quantum well for low voltage operation,” Opt. Express20(6), 6003–6009 (2012).
[CrossRef] [PubMed]

Pezeshki, B.

K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992).
[CrossRef]

Rabinovich, W. S.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004).
[CrossRef]

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Ray Burris, J. H.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

Redmard, E.

U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003).
[CrossRef]

Ren, X.

Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).

Ritter, K. J.

Roberts, J. S.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Roth, J. E.

N. C. Helman, J. E. Roth, D. P. Bour, H. Altug, and D. A. B. Miller, “Misalignment-tolerant surface-normal low-voltage modulator for optical interconnects,” IEEE J. Sel. Top. Quantum Electron.11(2), 338–342 (2005).
[CrossRef]

Rouifed, M. S.

Saleh, A. A. M.

A. A. M. Saleh and J. Stone, “Two stage Fabry-Perot filters as de-multiplexers in optical FDMA LAN’s,” J. Lightwave Technol.7(2), 323–330 (1989).
[CrossRef]

Sarafinas, A. L.

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

Schatz, R.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Seeds, A. J.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Shamay, M.

U. Arad, E. Redmard, M. Shamay, A. Averboukh, S. Levit, and U. Efron, “Development of a large high performance 2-D array of GaAs/AlGaAs multiple quantum-well modulators,” IEEE Photon. Technol. Lett.15(11), 1531–1533 (2003).
[CrossRef]

Stark, A.

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

Stell, M.

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Stievater, T. H.

T. H. Stievater, W. S. Rabinovich, P. G. Goetz, R. Mahon, and S. C. Binari, “A surface-normal coupled-quantum-well modulator at 1.55 µm,” IEEE Photon. Technol. Lett.16(9), 2036–2038 (2004).
[CrossRef]

Stone, J.

A. A. M. Saleh and J. Stone, “Two stage Fabry-Perot filters as de-multiplexers in optical FDMA LAN’s,” J. Lightwave Technol.7(2), 323–330 (1989).
[CrossRef]

Suite, M.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

Susa, N.

N. Susa and T. Nakahara, “Design of AlGaAs/GaAs quantum well for electro-absorption modulator,” Solid-State Electron.36(9), 1277–1287 (1993).
[CrossRef]

Swingen, L.

W. S. Rabinovich, P. G. Goetz, R. Mahon, L. Swingen, J. Murphy, M. Ferraro, J. H. Ray Burris, C. I. Moore, M. Suite, G. C. Gilbreath, S. Binari, and D. Klotzkin, “45-Mbit/s cat’s-eye modulating retroreflectors,” Opt. Eng.46(10), 104001 (2007).
[CrossRef]

Thylen, L.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Ulmer, A.

H. Mohseni, W. K. Chan, H. An, A. Ulmer, and D. Capewell, “Tunable surface-normal modulator operating near 1550nm with a high-extinction ratio at high temperature,” IEEE Photon. Technol. Lett.18(1), 214–216 (2006).
[CrossRef]

Vasquez, J. A.

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Vilcheck, M. J.

G. C. Gilbreath, W. S. Rabinovich, T. J. Meehan, M. J. Vilcheck, M. Stell, R. Mahon, P. G. Goetz, E. Oh, J. A. Vasquez, K. C. R. L. Lucke, and S. Mozersky, “Progress in development of multiple-quantum-well retromodulators for free-space data links,” Opt. Eng.42(6), 1611–1617 (2003).
[CrossRef]

Vivien, L.

Wang, Q.

Weiler, M. H.

J. S. Ahearn, M. H. Weiler, S. B. Adams, T. P. McElwain, A. Stark, L. DePaulis, A. L. Sarafinas, T. Hongsmatip, R. J. Martin, and B. Lane, “Multiple quantum well (MQW) spatial light modulators (SLMs) for optical data processing and beam steering,” Proc. SPIE4457, 43–53 (2001).
[CrossRef]

Wendt, J. R.

I. J. Fritz, J. F. Klem, and J. R. Wendt, “Reflectance modulator based on tandem Fabry‐Perot resonators,” Appl. Phys. Lett.59(7), 753–755 (1991).
[CrossRef]

Westergren, U.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Wiegmann, W.

D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984).
[CrossRef]

T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984).
[CrossRef]

Wood, T. H.

T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984).
[CrossRef]

D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, W. Wiegmann, T. H. Wood, and C. A. Burrus, “Bandedge electro-absorption in quantum well structures: the quantum confined Stark effect,” Phys. Rev. Lett.53(22), 2173–2176 (1984).
[CrossRef]

Worchesky, T. L.

Wu, R.

Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).

Yoon, H.

Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012).
[CrossRef]

You, J. W.

Y. H. Park, Y. C. Cho, J. W. You, C. Y. Park, H. Yoon, S. H. Lee, J. O. Kwon, and S. W. Lee, “Micro optical system based 3D imaging for full HD depth image capturing,” Proc. SPIE8252, 82520X (2012).
[CrossRef]

Yu, Y.

Y. Yu, S. Karlsson, C. P. Liu, R. Schatz, U. Westergren, O. Kjebon, C. H. Chuang, S. L. He, L. Thylen, A. B. Krysa, J. S. Roberts, and A. J. Seeds, “Enhanced linear dynamic range of asymmetric Fabry–Perot modulator/detector,” IEEE Photon. Technol. Lett.18(6), 770–772 (2006).
[CrossRef]

Zhou, Z.

Z. Zhou, Y. Dou, Y. Huang, R. Wu, and X. Ren, “Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity,” Proc. SPIE5280, 889–895 (2004).

Appl. Opt.

Appl. Phys. Lett.

I. J. Fritz, J. F. Klem, and J. R. Wendt, “Reflectance modulator based on tandem Fabry‐Perot resonators,” Appl. Phys. Lett.59(7), 753–755 (1991).
[CrossRef]

T. H. Wood, C. A. Burrus, D. A. B. Miller, D. S. Chemla, T. C. Damen, A. C. Gossard, and W. Wiegmann, “High‐speed optical modulation with GaAs/GaAlAs quantum wells in a p‐i‐n diode structure,” Appl. Phys. Lett.44(1), 16–18 (1984).
[CrossRef]

K. Bacher, B. Pezeshki, S. M. Lord, and J. S. Harris, “Molecular beam epitaxy growth of vertical cavity optical devices with in situ corrections,” Appl. Phys. Lett.61(12), 1387–1389 (1992).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

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Figures (5)

Fig. 1
Fig. 1

Contour plots of the calculated transmittance change as a function of number of pairs of DBR for a SC structure with (a) an 8nm thick SQWs, (b) ATQWs with 7-λ single cavity, (c) transmittance and transmittance change along dashed line AB of a 8nm thick SQWs, (d) transmittance and transmittance change of ATQWs with 7-λ single cavity along dashed line AB. The insets of (a) and (b) show the schematic of single cavity structure with an 8nm thick SQWs and ATQWs, respectively.

Fig. 2
Fig. 2

The contour plot of the calculated transmittance change as a function of number of pairs of middle DBR for CCMC structure with (a) an 8nm thick SQWs, (b) ATQWs and transmittance, transmittance change for CCMC with (c) an 8nm thick SQWs, (d) ATQWs along dashed line AB of (a), (b). The insets of (a) and (b) show a schematic of CCMC structure with an 8nm thick SQWs and ATQWs.

Fig. 3
Fig. 3

(a) Transmittance change and (b) contrast ratio as a function of wavelength for four modulator structures such as SC with SQWs, SC with ATQWs, CCMC with SQWs and CCMC with ATQWs.

Fig. 4
Fig. 4

(a) The schematic of CCMC structure with ATQWs and (b) the measured transmittance spectrum for CCMC structure with ATQWs at 0V and −24.5V. The inset of Fig. 4(b) shows scanning electron microscope (SEM) image of the grown CCMC structure with ATQWs.

Fig. 5
Fig. 5

(a) The maximum transmittance changes and (b) the contrast ratio as a function of wavelength and for four modulator structures such as SC with SQWs, SC with ATQWs, CCMC with SQWs and CCMC with ATQWs

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