Abstract

Metal nanoparticles (NPs) are well known to increase the efficiency of photovoltaic devices by reducing reflection and increasing light trapping within device. However, metal NPs on top flat surface suffer from high reflectivity losses due to the backscattering of the NPs itself. In this paper, we experimentally demonstrate a novel structure that exhibits localized surface plasmon resonance (LSPR) along with broadband ultralow reflectivity over a wide range of wavelength. Experimental results show that by depositing Ag NPs and Au NPs onto glass subwavelength structures (SWS) the backscattering effect of NPs can be suppressed, and the reflections can be considerably reduced by up to 87.5% and 66.7% respectively, compared to NPs fabricated on a flat glass substrate. Broadband ultralow reflection (< 2%) is also observed in the case of Ag NPs and Au NPs fabricated on cone shaped SWS silicon substrate over a wavelength range from 200 nm to 800 nm. This broadband ultralow reflectivity of Ag NPs and Au NPs on silicon SWS structure leads to a substantial enhancement of average absorption by 66.53% and 66.94%, respectively, over a broad wavelength range (200-2000 nm). This allows light absorption by NPs on SWS silicon structure close to 100% over a wavelength range from 300 nm to 1000 nm. The mechanism responsible for the increased light absorption is also explained.

© 2012 OSA

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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
  10. Y. M. Song, S. J. Jang, J. S. Yu, and Y. T. Lee, “Bioinspired parabola subwavelength structures for improved broadband antireflection,” Small6(9), 984–987 (2010).
    [CrossRef] [PubMed]
  11. D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci.273(1587), 661–667 (2006).
    [CrossRef] [PubMed]
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    [CrossRef]
  13. Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
    [CrossRef] [PubMed]
  14. H. Tan, R. Santbergen, A. H. M. Smets, and M. Zeman, “Plasmonic light trapping in thin-film silicon solar cells with improved self-assembled silver nanoparticles,” Nano Lett120702151353008 (2012), doi:.
    [CrossRef] [PubMed]
  15. C. M. Müller, F. C. F. Mornaghini, and R. Spolenak, “Ordered arrays of faceted gold nanoparticles obtained by dewetting and nanosphere lithography,” Nanotechnology19(48), 485306 (2008).
    [CrossRef] [PubMed]

2012 (1)

H. Tan, R. Santbergen, A. H. M. Smets, and M. Zeman, “Plasmonic light trapping in thin-film silicon solar cells with improved self-assembled silver nanoparticles,” Nano Lett120702151353008 (2012), doi:.
[CrossRef] [PubMed]

2011 (1)

K. R. Catchpole, S. Mokkapati, F. Beck, E.-C. Wang, A. McKinley, A. Basch, and J. Lee, “Plasmonics and nanophotonics for photovoltaics,” MRS Bull.36(06), 461–467 (2011).
[CrossRef]

2010 (1)

Y. M. Song, S. J. Jang, J. S. Yu, and Y. T. Lee, “Bioinspired parabola subwavelength structures for improved broadband antireflection,” Small6(9), 984–987 (2010).
[CrossRef] [PubMed]

2009 (1)

T. L. Temple, G. D. K. Mahanama, H. S. Reehal, and D. M. Bagnall, “Influence of localized surface plasmon excitation in silver nanoparticles on the performance of silicon solar cells,” Sol. Energy Mater. Sol. Cells93(11), 1978–1985 (2009).
[CrossRef]

2008 (4)

E. Moulin, J. Sukmanowski, P. Luo, R. Carius, F. X. Royer, and H. Stiebig, “Improved light absorption in thin-film silicon solar cells by integration of silver nanoparticles,” J. Non-Cryst. Solids354(19-25), 2488–2491 (2008).
[CrossRef]

C. M. Müller, F. C. F. Mornaghini, and R. Spolenak, “Ordered arrays of faceted gold nanoparticles obtained by dewetting and nanosphere lithography,” Nanotechnology19(48), 485306 (2008).
[CrossRef] [PubMed]

K. R. Catchpole and A. Polman, “Plasmonic solar cells,” Opt. Express16(26), 21793–21800 (2008).
[CrossRef] [PubMed]

J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nat. Mater.7(6), 442–453 (2008).
[CrossRef] [PubMed]

2007 (2)

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

2006 (1)

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci.273(1587), 661–667 (2006).
[CrossRef] [PubMed]

2005 (1)

D. M. Schaadt, B. Feng, and E. T. Yu, “Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles,” Appl. Phys. Lett.86(6), 063106 (2005).
[CrossRef]

2004 (1)

K. Okamoto, I. Niki, A. Shvartser, Y. Narukawa, T. Mukai, and A. Scherer, “Surface-plasmon-enhanced light emitters based on InGaN quantum wells,” Nat. Mater.3(9), 601–605 (2004).
[CrossRef] [PubMed]

1997 (1)

P. Lalanne and G. M. Morris, “Antireflection behavior of silicon subwavelength periodic structures for visible light,” Nanotechnology8(2), 53–56 (1997).
[CrossRef]

Anker, J. N.

J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nat. Mater.7(6), 442–453 (2008).
[CrossRef] [PubMed]

Arikawa, K.

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci.273(1587), 661–667 (2006).
[CrossRef] [PubMed]

Bagnall, D. M.

T. L. Temple, G. D. K. Mahanama, H. S. Reehal, and D. M. Bagnall, “Influence of localized surface plasmon excitation in silver nanoparticles on the performance of silicon solar cells,” Sol. Energy Mater. Sol. Cells93(11), 1978–1985 (2009).
[CrossRef]

Basch, A.

K. R. Catchpole, S. Mokkapati, F. Beck, E.-C. Wang, A. McKinley, A. Basch, and J. Lee, “Plasmonics and nanophotonics for photovoltaics,” MRS Bull.36(06), 461–467 (2011).
[CrossRef]

Beck, F.

K. R. Catchpole, S. Mokkapati, F. Beck, E.-C. Wang, A. McKinley, A. Basch, and J. Lee, “Plasmonics and nanophotonics for photovoltaics,” MRS Bull.36(06), 461–467 (2011).
[CrossRef]

Carius, R.

E. Moulin, J. Sukmanowski, P. Luo, R. Carius, F. X. Royer, and H. Stiebig, “Improved light absorption in thin-film silicon solar cells by integration of silver nanoparticles,” J. Non-Cryst. Solids354(19-25), 2488–2491 (2008).
[CrossRef]

Catchpole, K. R.

K. R. Catchpole, S. Mokkapati, F. Beck, E.-C. Wang, A. McKinley, A. Basch, and J. Lee, “Plasmonics and nanophotonics for photovoltaics,” MRS Bull.36(06), 461–467 (2011).
[CrossRef]

K. R. Catchpole and A. Polman, “Plasmonic solar cells,” Opt. Express16(26), 21793–21800 (2008).
[CrossRef] [PubMed]

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

Chang, Y.-H.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chattopadhyay, S.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chen, K.-H.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Chen, L.-C.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Feng, B.

D. M. Schaadt, B. Feng, and E. T. Yu, “Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles,” Appl. Phys. Lett.86(6), 063106 (2005).
[CrossRef]

Foletti, S.

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci.273(1587), 661–667 (2006).
[CrossRef] [PubMed]

Green, M. A.

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

Hall, W. P.

J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nat. Mater.7(6), 442–453 (2008).
[CrossRef] [PubMed]

Hsu, C.-H.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Hsu, Y.-K.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Huang, Y.-F.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Jang, S. J.

Y. M. Song, S. J. Jang, J. S. Yu, and Y. T. Lee, “Bioinspired parabola subwavelength structures for improved broadband antireflection,” Small6(9), 984–987 (2010).
[CrossRef] [PubMed]

Jen, Y.-J.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Lalanne, P.

P. Lalanne and G. M. Morris, “Antireflection behavior of silicon subwavelength periodic structures for visible light,” Nanotechnology8(2), 53–56 (1997).
[CrossRef]

Lee, C.-S.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Lee, J.

K. R. Catchpole, S. Mokkapati, F. Beck, E.-C. Wang, A. McKinley, A. Basch, and J. Lee, “Plasmonics and nanophotonics for photovoltaics,” MRS Bull.36(06), 461–467 (2011).
[CrossRef]

Lee, Y. T.

Y. M. Song, S. J. Jang, J. S. Yu, and Y. T. Lee, “Bioinspired parabola subwavelength structures for improved broadband antireflection,” Small6(9), 984–987 (2010).
[CrossRef] [PubMed]

Liu, T.-A.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Lo, H.-C.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Luo, P.

E. Moulin, J. Sukmanowski, P. Luo, R. Carius, F. X. Royer, and H. Stiebig, “Improved light absorption in thin-film silicon solar cells by integration of silver nanoparticles,” J. Non-Cryst. Solids354(19-25), 2488–2491 (2008).
[CrossRef]

Lyandres, O.

J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nat. Mater.7(6), 442–453 (2008).
[CrossRef] [PubMed]

Mahanama, G. D. K.

T. L. Temple, G. D. K. Mahanama, H. S. Reehal, and D. M. Bagnall, “Influence of localized surface plasmon excitation in silver nanoparticles on the performance of silicon solar cells,” Sol. Energy Mater. Sol. Cells93(11), 1978–1985 (2009).
[CrossRef]

McKinley, A.

K. R. Catchpole, S. Mokkapati, F. Beck, E.-C. Wang, A. McKinley, A. Basch, and J. Lee, “Plasmonics and nanophotonics for photovoltaics,” MRS Bull.36(06), 461–467 (2011).
[CrossRef]

Mokkapati, S.

K. R. Catchpole, S. Mokkapati, F. Beck, E.-C. Wang, A. McKinley, A. Basch, and J. Lee, “Plasmonics and nanophotonics for photovoltaics,” MRS Bull.36(06), 461–467 (2011).
[CrossRef]

Mornaghini, F. C. F.

C. M. Müller, F. C. F. Mornaghini, and R. Spolenak, “Ordered arrays of faceted gold nanoparticles obtained by dewetting and nanosphere lithography,” Nanotechnology19(48), 485306 (2008).
[CrossRef] [PubMed]

Morris, G. M.

P. Lalanne and G. M. Morris, “Antireflection behavior of silicon subwavelength periodic structures for visible light,” Nanotechnology8(2), 53–56 (1997).
[CrossRef]

Moulin, E.

E. Moulin, J. Sukmanowski, P. Luo, R. Carius, F. X. Royer, and H. Stiebig, “Improved light absorption in thin-film silicon solar cells by integration of silver nanoparticles,” J. Non-Cryst. Solids354(19-25), 2488–2491 (2008).
[CrossRef]

Mukai, T.

K. Okamoto, I. Niki, A. Shvartser, Y. Narukawa, T. Mukai, and A. Scherer, “Surface-plasmon-enhanced light emitters based on InGaN quantum wells,” Nat. Mater.3(9), 601–605 (2004).
[CrossRef] [PubMed]

Müller, C. M.

C. M. Müller, F. C. F. Mornaghini, and R. Spolenak, “Ordered arrays of faceted gold nanoparticles obtained by dewetting and nanosphere lithography,” Nanotechnology19(48), 485306 (2008).
[CrossRef] [PubMed]

Narukawa, Y.

K. Okamoto, I. Niki, A. Shvartser, Y. Narukawa, T. Mukai, and A. Scherer, “Surface-plasmon-enhanced light emitters based on InGaN quantum wells,” Nat. Mater.3(9), 601–605 (2004).
[CrossRef] [PubMed]

Niki, I.

K. Okamoto, I. Niki, A. Shvartser, Y. Narukawa, T. Mukai, and A. Scherer, “Surface-plasmon-enhanced light emitters based on InGaN quantum wells,” Nat. Mater.3(9), 601–605 (2004).
[CrossRef] [PubMed]

Okamoto, K.

K. Okamoto, I. Niki, A. Shvartser, Y. Narukawa, T. Mukai, and A. Scherer, “Surface-plasmon-enhanced light emitters based on InGaN quantum wells,” Nat. Mater.3(9), 601–605 (2004).
[CrossRef] [PubMed]

Palasantzas, G.

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci.273(1587), 661–667 (2006).
[CrossRef] [PubMed]

Pan, C.-L.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Peng, C.-Y.

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
[CrossRef] [PubMed]

Pillai, S.

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

Polman, A.

Reehal, H. S.

T. L. Temple, G. D. K. Mahanama, H. S. Reehal, and D. M. Bagnall, “Influence of localized surface plasmon excitation in silver nanoparticles on the performance of silicon solar cells,” Sol. Energy Mater. Sol. Cells93(11), 1978–1985 (2009).
[CrossRef]

Royer, F. X.

E. Moulin, J. Sukmanowski, P. Luo, R. Carius, F. X. Royer, and H. Stiebig, “Improved light absorption in thin-film silicon solar cells by integration of silver nanoparticles,” J. Non-Cryst. Solids354(19-25), 2488–2491 (2008).
[CrossRef]

Santbergen, R.

H. Tan, R. Santbergen, A. H. M. Smets, and M. Zeman, “Plasmonic light trapping in thin-film silicon solar cells with improved self-assembled silver nanoparticles,” Nano Lett120702151353008 (2012), doi:.
[CrossRef] [PubMed]

Schaadt, D. M.

D. M. Schaadt, B. Feng, and E. T. Yu, “Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles,” Appl. Phys. Lett.86(6), 063106 (2005).
[CrossRef]

Scherer, A.

K. Okamoto, I. Niki, A. Shvartser, Y. Narukawa, T. Mukai, and A. Scherer, “Surface-plasmon-enhanced light emitters based on InGaN quantum wells,” Nat. Mater.3(9), 601–605 (2004).
[CrossRef] [PubMed]

Shah, N. C.

J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nat. Mater.7(6), 442–453 (2008).
[CrossRef] [PubMed]

Shvartser, A.

K. Okamoto, I. Niki, A. Shvartser, Y. Narukawa, T. Mukai, and A. Scherer, “Surface-plasmon-enhanced light emitters based on InGaN quantum wells,” Nat. Mater.3(9), 601–605 (2004).
[CrossRef] [PubMed]

Smets, A. H. M.

H. Tan, R. Santbergen, A. H. M. Smets, and M. Zeman, “Plasmonic light trapping in thin-film silicon solar cells with improved self-assembled silver nanoparticles,” Nano Lett120702151353008 (2012), doi:.
[CrossRef] [PubMed]

Song, Y. M.

Y. M. Song, S. J. Jang, J. S. Yu, and Y. T. Lee, “Bioinspired parabola subwavelength structures for improved broadband antireflection,” Small6(9), 984–987 (2010).
[CrossRef] [PubMed]

Spolenak, R.

C. M. Müller, F. C. F. Mornaghini, and R. Spolenak, “Ordered arrays of faceted gold nanoparticles obtained by dewetting and nanosphere lithography,” Nanotechnology19(48), 485306 (2008).
[CrossRef] [PubMed]

Stavenga, D. G.

D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci.273(1587), 661–667 (2006).
[CrossRef] [PubMed]

Stiebig, H.

E. Moulin, J. Sukmanowski, P. Luo, R. Carius, F. X. Royer, and H. Stiebig, “Improved light absorption in thin-film silicon solar cells by integration of silver nanoparticles,” J. Non-Cryst. Solids354(19-25), 2488–2491 (2008).
[CrossRef]

Sukmanowski, J.

E. Moulin, J. Sukmanowski, P. Luo, R. Carius, F. X. Royer, and H. Stiebig, “Improved light absorption in thin-film silicon solar cells by integration of silver nanoparticles,” J. Non-Cryst. Solids354(19-25), 2488–2491 (2008).
[CrossRef]

Tan, H.

H. Tan, R. Santbergen, A. H. M. Smets, and M. Zeman, “Plasmonic light trapping in thin-film silicon solar cells with improved self-assembled silver nanoparticles,” Nano Lett120702151353008 (2012), doi:.
[CrossRef] [PubMed]

Temple, T. L.

T. L. Temple, G. D. K. Mahanama, H. S. Reehal, and D. M. Bagnall, “Influence of localized surface plasmon excitation in silver nanoparticles on the performance of silicon solar cells,” Sol. Energy Mater. Sol. Cells93(11), 1978–1985 (2009).
[CrossRef]

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S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

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J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nat. Mater.7(6), 442–453 (2008).
[CrossRef] [PubMed]

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K. R. Catchpole, S. Mokkapati, F. Beck, E.-C. Wang, A. McKinley, A. Basch, and J. Lee, “Plasmonics and nanophotonics for photovoltaics,” MRS Bull.36(06), 461–467 (2011).
[CrossRef]

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D. M. Schaadt, B. Feng, and E. T. Yu, “Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles,” Appl. Phys. Lett.86(6), 063106 (2005).
[CrossRef]

Yu, J. S.

Y. M. Song, S. J. Jang, J. S. Yu, and Y. T. Lee, “Bioinspired parabola subwavelength structures for improved broadband antireflection,” Small6(9), 984–987 (2010).
[CrossRef] [PubMed]

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H. Tan, R. Santbergen, A. H. M. Smets, and M. Zeman, “Plasmonic light trapping in thin-film silicon solar cells with improved self-assembled silver nanoparticles,” Nano Lett120702151353008 (2012), doi:.
[CrossRef] [PubMed]

Zhao, J.

J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nat. Mater.7(6), 442–453 (2008).
[CrossRef] [PubMed]

Appl. Phys. Lett. (1)

D. M. Schaadt, B. Feng, and E. T. Yu, “Enhanced semiconductor optical absorption via surface plasmon excitation in metal nanoparticles,” Appl. Phys. Lett.86(6), 063106 (2005).
[CrossRef]

J. Appl. Phys. (1)

S. Pillai, K. R. Catchpole, T. Trupke, and M. A. Green, “Surface plasmon enhanced silicon solar cells,” J. Appl. Phys.101(9), 093105 (2007).
[CrossRef]

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E. Moulin, J. Sukmanowski, P. Luo, R. Carius, F. X. Royer, and H. Stiebig, “Improved light absorption in thin-film silicon solar cells by integration of silver nanoparticles,” J. Non-Cryst. Solids354(19-25), 2488–2491 (2008).
[CrossRef]

MRS Bull. (1)

K. R. Catchpole, S. Mokkapati, F. Beck, E.-C. Wang, A. McKinley, A. Basch, and J. Lee, “Plasmonics and nanophotonics for photovoltaics,” MRS Bull.36(06), 461–467 (2011).
[CrossRef]

Nano Lett (1)

H. Tan, R. Santbergen, A. H. M. Smets, and M. Zeman, “Plasmonic light trapping in thin-film silicon solar cells with improved self-assembled silver nanoparticles,” Nano Lett120702151353008 (2012), doi:.
[CrossRef] [PubMed]

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K. Okamoto, I. Niki, A. Shvartser, Y. Narukawa, T. Mukai, and A. Scherer, “Surface-plasmon-enhanced light emitters based on InGaN quantum wells,” Nat. Mater.3(9), 601–605 (2004).
[CrossRef] [PubMed]

J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nat. Mater.7(6), 442–453 (2008).
[CrossRef] [PubMed]

Nat. Nanotechnol. (1)

Y.-F. Huang, S. Chattopadhyay, Y.-J. Jen, C.-Y. Peng, T.-A. Liu, Y.-K. Hsu, C.-L. Pan, H.-C. Lo, C.-H. Hsu, Y.-H. Chang, C.-S. Lee, K.-H. Chen, and L.-C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007).
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D. G. Stavenga, S. Foletti, G. Palasantzas, and K. Arikawa, “Light on the moth-eye corneal nipple array of butterflies,” Proc. Biol. Sci.273(1587), 661–667 (2006).
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Small (1)

Y. M. Song, S. J. Jang, J. S. Yu, and Y. T. Lee, “Bioinspired parabola subwavelength structures for improved broadband antireflection,” Small6(9), 984–987 (2010).
[CrossRef] [PubMed]

Sol. Energy Mater. Sol. Cells (1)

T. L. Temple, G. D. K. Mahanama, H. S. Reehal, and D. M. Bagnall, “Influence of localized surface plasmon excitation in silver nanoparticles on the performance of silicon solar cells,” Sol. Energy Mater. Sol. Cells93(11), 1978–1985 (2009).
[CrossRef]

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Figures (5)

Fig. 1
Fig. 1

(a) Detailed fabrication process step of metal NPs on SWS structure. (b) SEM image of Ag metal NPs on substrate which used as dry etching mask (step 1). (c) SEM image of cone shaped SWS structure fabricated after ICP-RIE etching and excess Ag metal NPs are removed. (d) SEM image of metal NPs fabricated on SWS structure.

Fig. 2
Fig. 2

SEM images of (a) Au metal NPs on a flat glass substrate, (b) Au metal NPs on SWS glass substrate (synthesized by annealing a 10 nm Au film at 600 °C for 1 min). (c) Ag metal NPs on a flat glass substrate, (d) Ag metal NPs on SWS glass substrate (synthesized by annealing a 8 nm Ag film at 400 °C for 1 min).

Fig. 3
Fig. 3

Measured optical properties of metal NPs fabricated on flat glass substrate, metal NPs fabricated on SWS glass substrate, bare SWS glass substrate and bare glass (reference). (a) Transmittance and reflectance spectra for Ag NPs. (b) Absorption spectra for Ag NPs. (c) Transmittance and reflectance spectra for Au NPs. (d) Absorption spectra for Au NPs.

Fig. 4
Fig. 4

SEM images of (a,b,c) Au metal NPs on a flat silicon substrate, truncated shaped SWS silicon substrate and cone shaped SWS silicon substrate, respectively (synthesized by annealing a 10 nm Au film at 600°C for 1 min). (d,e,f) Ag metal NPs on a flat silicon substrate, truncated shaped SWS silicon substrate and cone shaped SWS silicon substrate, respectively (synthesized by annealing a 8 nm Ag film at 400°C for 1 min).

Fig. 5
Fig. 5

Measured optical properties of metal NPs fabricated on flat silicon substrate, truncated shaped SWS silicon substrate, cone shaped SWS silicon substrate and silicon substrate (reference). (a) Reflectance spectra for Ag NPs. (b) Absorption spectra for Ag NPs. (c) Reflectance spectra for Au NPs. (d) Absorption spectra for Au NPs. (e) The schematic of propagating path of the incident light on metal NPs fabricated on flat silicon substrate, truncated SWS silicon substrate and cone shaped SWS silicon substrate.

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