Abstract

Polarization-insensitive guided-mode resonance (GMR) filters have significant role in applications such as optical communication systems. Here, we report the design and fabrication of two types of simple-structured one-dimensional (1D) GMR gratings with non-polarizing resonance properties under normal incidence. A single-layer rectangular-profile TiO2 grating is fabricated by electron beam lithography and reactive ion etching, which demonstrates, for the first time in experiment, almost perfect non-polarizing filtering effect with 1D grating under normal incidence. Then, a TiO2-coated polycarbonate 1D GMR grating is fabricated by nanoimprinting and atomic layer deposition, which also exhibits good non-polarizing property and the potential of low-cost mass replication of such functional devices.

© 2012 OSA

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  1. D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE. J. Quantum Electron. 33, 2038–2059 (1997).
    [CrossRef]
  2. S. S. Wang and R. Magnusson, “Theory and applications of guided-mode resonance filters,” Appl. Opt. 32, 2606–2613 (1993).
    [CrossRef] [PubMed]
  3. D. Lacour, G. Granet, J-P. Plumey, and A. Mure-Ravaud, “Polarization independence of a one dimensional grating in conical mounting,” J. Opt. Soc. Am. A. 20, 1546–1552 (2003).
    [CrossRef]
  4. B. Cunningham, B. Lin, J. Qiu, P. Li, J. Pepper, and B. Hugh, “A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions,” Sens. Actuators 85, 219–226 (2002).
    [CrossRef]
  5. P. Karvinen, T. Nuutinen, J. Rahomäki, O. Hyvärinen, and P. Vahimaa, “Strong fluorescence-signal gain with single-excitation-enhancing and emission-directing nanostructured diffraction grating,” Opt. Lett. 34, 3208–3210 (2009).
    [CrossRef] [PubMed]
  6. G. Niederer, W. Nakagawa, and H. P. Herzig, “Design and characterization of a tunable polarization-independent resonanct grating filter,” Opt. Express 13, 2196–2200 (2005).
    [CrossRef] [PubMed]
  7. D. W. Peters, R. R. Boye, J. R. Wendt, R. A. Kellogg, S. A. Kemme, T. R. Carter, and S. Samora, “Demonstration of polarization-independent resonant subwavelength grating filter arrays,” Opt. Lett. 35, 3201–3203 (2010).
    [CrossRef] [PubMed]
  8. A.-L. Fehrembach and A. Sentenac, “Unpolarized narrow-band filtering with resonant gratings,” Appl. Phys. Lett. 86, 121105 (2005).
    [CrossRef]
  9. T. Alasaarela, D. Zheng, L. Huang, A. Priimagi, B. Bai, A. Tervonen, S. Honkanen, M. Kuittinen, and J. Turunen, “Single-layer one-dimensional nonpolarizing guided-mode resonance filters under normal incidence,” Opt. Lett. 36, 2411–2413 (2011).
    [CrossRef] [PubMed]
  10. L. Li, “New formulation of the Fourier modal method for crossed surface-relief gratings,” J. Opt. Soc. Am. A 14, 2758–2767 (1997).
    [CrossRef]
  11. D. Delbeke, R. Baets, and P. Muys, “Polarization-selective beam splitter based on a highly efficient simple binary diffraction grating,” Appl. Opt. 43, 6157–6165 (2004).
    [CrossRef] [PubMed]
  12. T. Clausnitzer, A. V. Tishchenko, E. B. Kley, J. Fuchs, D. Schelle, O. Parriaux, and U. Kroll, “Narrowband, polarization-independent free-space wave notch filter,” J. Opt. Soc. Am. A 22, 2799–2803 (2005).
    [CrossRef]
  13. M. R. Saleem, P. A. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, and J. Turunen, “Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers,” J. Micro/Nanolith. MEMS MOEMS 11, 013007 (2012).

2012 (1)

M. R. Saleem, P. A. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, and J. Turunen, “Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers,” J. Micro/Nanolith. MEMS MOEMS 11, 013007 (2012).

2011 (1)

2010 (1)

2009 (1)

2005 (3)

2004 (1)

2003 (1)

D. Lacour, G. Granet, J-P. Plumey, and A. Mure-Ravaud, “Polarization independence of a one dimensional grating in conical mounting,” J. Opt. Soc. Am. A. 20, 1546–1552 (2003).
[CrossRef]

2002 (1)

B. Cunningham, B. Lin, J. Qiu, P. Li, J. Pepper, and B. Hugh, “A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions,” Sens. Actuators 85, 219–226 (2002).
[CrossRef]

1997 (2)

D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE. J. Quantum Electron. 33, 2038–2059 (1997).
[CrossRef]

L. Li, “New formulation of the Fourier modal method for crossed surface-relief gratings,” J. Opt. Soc. Am. A 14, 2758–2767 (1997).
[CrossRef]

1993 (1)

Alasaarela, T.

Baets, R.

Bai, B.

Boye, R. R.

Carter, T. R.

Clausnitzer, T.

Cunningham, B.

B. Cunningham, B. Lin, J. Qiu, P. Li, J. Pepper, and B. Hugh, “A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions,” Sens. Actuators 85, 219–226 (2002).
[CrossRef]

Delbeke, D.

Fehrembach, A.-L.

A.-L. Fehrembach and A. Sentenac, “Unpolarized narrow-band filtering with resonant gratings,” Appl. Phys. Lett. 86, 121105 (2005).
[CrossRef]

Friesem, A. A.

D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE. J. Quantum Electron. 33, 2038–2059 (1997).
[CrossRef]

Fuchs, J.

Granet, G.

D. Lacour, G. Granet, J-P. Plumey, and A. Mure-Ravaud, “Polarization independence of a one dimensional grating in conical mounting,” J. Opt. Soc. Am. A. 20, 1546–1552 (2003).
[CrossRef]

Herzig, H. P.

Honkanen, S.

M. R. Saleem, P. A. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, and J. Turunen, “Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers,” J. Micro/Nanolith. MEMS MOEMS 11, 013007 (2012).

T. Alasaarela, D. Zheng, L. Huang, A. Priimagi, B. Bai, A. Tervonen, S. Honkanen, M. Kuittinen, and J. Turunen, “Single-layer one-dimensional nonpolarizing guided-mode resonance filters under normal incidence,” Opt. Lett. 36, 2411–2413 (2011).
[CrossRef] [PubMed]

Huang, L.

Hugh, B.

B. Cunningham, B. Lin, J. Qiu, P. Li, J. Pepper, and B. Hugh, “A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions,” Sens. Actuators 85, 219–226 (2002).
[CrossRef]

Hyvärinen, O.

Karvinen, P.

Kellogg, R. A.

Kemme, S. A.

Khan, M. B.

M. R. Saleem, P. A. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, and J. Turunen, “Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers,” J. Micro/Nanolith. MEMS MOEMS 11, 013007 (2012).

Khan, Z. M.

M. R. Saleem, P. A. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, and J. Turunen, “Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers,” J. Micro/Nanolith. MEMS MOEMS 11, 013007 (2012).

Kley, E. B.

Kroll, U.

Kuittinen, M.

Lacour, D.

D. Lacour, G. Granet, J-P. Plumey, and A. Mure-Ravaud, “Polarization independence of a one dimensional grating in conical mounting,” J. Opt. Soc. Am. A. 20, 1546–1552 (2003).
[CrossRef]

Li, L.

Li, P.

B. Cunningham, B. Lin, J. Qiu, P. Li, J. Pepper, and B. Hugh, “A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions,” Sens. Actuators 85, 219–226 (2002).
[CrossRef]

Lin, B.

B. Cunningham, B. Lin, J. Qiu, P. Li, J. Pepper, and B. Hugh, “A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions,” Sens. Actuators 85, 219–226 (2002).
[CrossRef]

Magnusson, R.

Mure-Ravaud, A.

D. Lacour, G. Granet, J-P. Plumey, and A. Mure-Ravaud, “Polarization independence of a one dimensional grating in conical mounting,” J. Opt. Soc. Am. A. 20, 1546–1552 (2003).
[CrossRef]

Muys, P.

Nakagawa, W.

Niederer, G.

Nuutinen, T.

Parriaux, O.

Pepper, J.

B. Cunningham, B. Lin, J. Qiu, P. Li, J. Pepper, and B. Hugh, “A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions,” Sens. Actuators 85, 219–226 (2002).
[CrossRef]

Peters, D. W.

Plumey, J-P.

D. Lacour, G. Granet, J-P. Plumey, and A. Mure-Ravaud, “Polarization independence of a one dimensional grating in conical mounting,” J. Opt. Soc. Am. A. 20, 1546–1552 (2003).
[CrossRef]

Priimagi, A.

Qiu, J.

B. Cunningham, B. Lin, J. Qiu, P. Li, J. Pepper, and B. Hugh, “A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions,” Sens. Actuators 85, 219–226 (2002).
[CrossRef]

Rahomäki, J.

Rosenblatt, D.

D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE. J. Quantum Electron. 33, 2038–2059 (1997).
[CrossRef]

Saleem, M. R.

M. R. Saleem, P. A. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, and J. Turunen, “Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers,” J. Micro/Nanolith. MEMS MOEMS 11, 013007 (2012).

Samora, S.

Schelle, D.

Sentenac, A.

A.-L. Fehrembach and A. Sentenac, “Unpolarized narrow-band filtering with resonant gratings,” Appl. Phys. Lett. 86, 121105 (2005).
[CrossRef]

Sharon, A.

D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE. J. Quantum Electron. 33, 2038–2059 (1997).
[CrossRef]

Stenberg, P. A.

M. R. Saleem, P. A. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, and J. Turunen, “Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers,” J. Micro/Nanolith. MEMS MOEMS 11, 013007 (2012).

Tervonen, A.

Tishchenko, A. V.

Turunen, J.

M. R. Saleem, P. A. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, and J. Turunen, “Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers,” J. Micro/Nanolith. MEMS MOEMS 11, 013007 (2012).

T. Alasaarela, D. Zheng, L. Huang, A. Priimagi, B. Bai, A. Tervonen, S. Honkanen, M. Kuittinen, and J. Turunen, “Single-layer one-dimensional nonpolarizing guided-mode resonance filters under normal incidence,” Opt. Lett. 36, 2411–2413 (2011).
[CrossRef] [PubMed]

Vahimaa, P.

Wang, S. S.

Wendt, J. R.

Zheng, D.

Appl. Opt. (2)

Appl. Phys. Lett. (1)

A.-L. Fehrembach and A. Sentenac, “Unpolarized narrow-band filtering with resonant gratings,” Appl. Phys. Lett. 86, 121105 (2005).
[CrossRef]

IEEE. J. Quantum Electron. (1)

D. Rosenblatt, A. Sharon, and A. A. Friesem, “Resonant grating waveguide structures,” IEEE. J. Quantum Electron. 33, 2038–2059 (1997).
[CrossRef]

J. Micro/Nanolith. MEMS MOEMS (1)

M. R. Saleem, P. A. Stenberg, M. B. Khan, Z. M. Khan, S. Honkanen, and J. Turunen, “Hydrogen silsesquioxane resist stamp for replication of nanophotonic components in polymers,” J. Micro/Nanolith. MEMS MOEMS 11, 013007 (2012).

J. Opt. Soc. Am. A (2)

J. Opt. Soc. Am. A. (1)

D. Lacour, G. Granet, J-P. Plumey, and A. Mure-Ravaud, “Polarization independence of a one dimensional grating in conical mounting,” J. Opt. Soc. Am. A. 20, 1546–1552 (2003).
[CrossRef]

Opt. Express (1)

Opt. Lett. (3)

Sens. Actuators (1)

B. Cunningham, B. Lin, J. Qiu, P. Li, J. Pepper, and B. Hugh, “A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions,” Sens. Actuators 85, 219–226 (2002).
[CrossRef]

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