Abstract

Focused on silicon surface in water, superimposed multiple shots of linearly polarized 800-nm, 100-fs, 10-Hz laser pulses at lower fluence than the single-pulse ablation threshold are shown to produce two kinds of periodic nanostructures with almost constant periods of 150 nm and 400 nm. Surface plasmon polaritons excited in the surface layer illustrates well the formation of nanostructures and its dynamic properties observed. Pump and probe measurements of the ultrafast change in surface reflectivity during the interaction have demonstrated that the multiple low-fluence fs pulses are crucial to the nanostructuring through the accumulation of non-thermal bonding structure change and the subsequent nanoscale ablation.

© 2012 OSA

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    [CrossRef]
  2. N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC,” Appl. Phys., A Mater. Sci. Process. 76(6), 983–985 (2003).
    [CrossRef]
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    [CrossRef]
  4. A. Borowiec and H. K. Haugen, “Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses,” Appl. Phys. Lett. 82(25), 4462–4464 (2003).
    [CrossRef]
  5. G. Daminelli, J. Krüger, and W. Kautek, “Femtosecond laser interaction with silicon under water confinement,” Thin Solid Films 467(1-2), 334–341 (2004).
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  6. C. Wang, H. Huo, M. Johnson, M. Shen, and E. Mazur, “The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations,” Nanotechnology 21(7), 075304 (2010).
    [CrossRef] [PubMed]
  7. Q. Z. Zhao, S. Malzer, and L. J. Wang, “Formation of subwavelength periodic structures on tungsten induced by ultrashort laser pulses,” Opt. Lett. 32(13), 1932–1934 (2007).
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  8. E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
    [CrossRef]
  9. Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
    [CrossRef] [PubMed]
  10. V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically Produced Arrays of Planar Nanostructures inside Fused Silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
    [CrossRef] [PubMed]
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    [CrossRef]
  13. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3(12), 4062–4070 (2009).
    [CrossRef] [PubMed]
  14. O. Varlamova, F. Costache, J. Reif, and M. Bestehorn, “Self-organized pattern formation upon femtosecond laser ablation by circularly polarized light,” Appl. Surf. Sci. 252(13), 4702–4706 (2006).
    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
  21. D. Eversole, B. Luk’yanchuk, and A. Ben-Yakar, “Plasmonic laser nanoablation of silicon by the scattering of femtosecond pulses near gold nanospheres,” Appl. Phys., A Mater. Sci. Process. 89(2), 283–291 (2007).
    [CrossRef]
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    [CrossRef]
  23. Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
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    [CrossRef]
  28. C. V. Shank, R. Yen, and C. Hirlimann, “Time-Resolved Reflectivity Measurements of Femtosecond-Optical-Pulse-Induced Phase Transitions in Silicon,” Phys. Rev. Lett. 50(6), 454–457 (1983).
    [CrossRef]
  29. K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, “Transient States of Matter during Short Pulse Laser Ablation,” Phys. Rev. Lett. 81(1), 224–227 (1998).
    [CrossRef]
  30. R. Le Harzic, D. Dörr, D. Sauer, M. Neumeier, M. Epple, H. Zimmermann, and F. Stracke, “Large-area, uniform, high-spatial-frequency ripples generated on silicon using a nanojoule-femtosecond laser at high repetition rate,” Opt. Lett. 36(2), 229–231 (2011).
    [CrossRef] [PubMed]

2011 (2)

R. Le Harzic, D. Dörr, D. Sauer, F. Stracke, and H. Zimmermann, “Generation of high spatial frequency ripples on silicon under ultrashort laser pulses irradiation,” Appl. Phys. Lett. 98(21), 211905 (2011).
[CrossRef]

R. Le Harzic, D. Dörr, D. Sauer, M. Neumeier, M. Epple, H. Zimmermann, and F. Stracke, “Large-area, uniform, high-spatial-frequency ripples generated on silicon using a nanojoule-femtosecond laser at high repetition rate,” Opt. Lett. 36(2), 229–231 (2011).
[CrossRef] [PubMed]

2010 (1)

C. Wang, H. Huo, M. Johnson, M. Shen, and E. Mazur, “The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations,” Nanotechnology 21(7), 075304 (2010).
[CrossRef] [PubMed]

2009 (3)

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond laser pulses,” J. Appl. Phys. 106(10), 104910 (2009).
[CrossRef]

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

2008 (1)

2007 (4)

D. Eversole, B. Luk’yanchuk, and A. Ben-Yakar, “Plasmonic laser nanoablation of silicon by the scattering of femtosecond pulses near gold nanospheres,” Appl. Phys., A Mater. Sci. Process. 89(2), 283–291 (2007).
[CrossRef]

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
[CrossRef]

G. Miyaji and K. Miyazaki, “Nanoscale ablation on patterned diamondlike carbon film with femtosecond laser pulses,” Appl. Phys. Lett. 91(12), 123102 (2007).
[CrossRef]

Q. Z. Zhao, S. Malzer, and L. J. Wang, “Formation of subwavelength periodic structures on tungsten induced by ultrashort laser pulses,” Opt. Lett. 32(13), 1932–1934 (2007).
[CrossRef] [PubMed]

2006 (2)

O. Varlamova, F. Costache, J. Reif, and M. Bestehorn, “Self-organized pattern formation upon femtosecond laser ablation by circularly polarized light,” Appl. Surf. Sci. 252(13), 4702–4706 (2006).
[CrossRef]

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically Produced Arrays of Planar Nanostructures inside Fused Silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

2005 (2)

K. Miyazaki, N. Maekawa, W. Kobayashi, N. Yasumaru, and J. Kiuchi, “Reflectivity in femtosecond-laser-induced structural changes of diamond-like carbon film,” Appl. Phys., A Mater. Sci. Process. 80(1), 17–21 (2005).
[CrossRef]

R. Le Harzic, H. Schuck, D. Sauer, T. Anhut, I. Riemann, and K. König, “Sub-100 nm nanostructuring of silicon by ultrashort laser pulses,” Opt. Express 13(17), 6651–6656 (2005).
[CrossRef] [PubMed]

2004 (3)

J. Bonse, K.-W. Brzezinka, and A. J. Meixner, “Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy,” Appl. Surf. Sci. 221(1-4), 215–230 (2004).
[CrossRef]

G. Daminelli, J. Krüger, and W. Kautek, “Femtosecond laser interaction with silicon under water confinement,” Thin Solid Films 467(1-2), 334–341 (2004).
[CrossRef]

Y. Dong and P. Molian, “Coulomb explosion-induced formation of highly oriented nanoparticles on thin films of 3C–SiC by the femtosecond pulsed laser,” Appl. Phys. Lett. 84(1), 10–12 (2004).
[CrossRef]

2003 (4)

A. Borowiec and H. K. Haugen, “Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses,” Appl. Phys. Lett. 82(25), 4462–4464 (2003).
[CrossRef]

N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC,” Appl. Phys., A Mater. Sci. Process. 76(6), 983–985 (2003).
[CrossRef]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, and K. Wang, “Femtosecond laser-induced periodic surface structure on diamond film,” Appl. Phys. Lett. 82(11), 1703–1705 (2003).
[CrossRef]

2002 (1)

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197–198, 891–895 (2002).
[CrossRef]

2000 (1)

K. Sokolowski-Tinten and D. von der Linde, “Generation of dense electron-hole plasmas in silicon,” Phys. Rev. B 61(4), 2643–2650 (2000).
[CrossRef]

1998 (1)

K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, “Transient States of Matter during Short Pulse Laser Ablation,” Phys. Rev. Lett. 81(1), 224–227 (1998).
[CrossRef]

1997 (1)

D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
[CrossRef]

1986 (1)

A. E. Siegman and P. M. Faucher, “Stimulated Wood’s Anomalies on Laser-Illuminated Surfaces,” IEEE J. Quantum Electron. 22(8), 1384–1403 (1986) (and references therein).
[CrossRef]

1983 (1)

C. V. Shank, R. Yen, and C. Hirlimann, “Time-Resolved Reflectivity Measurements of Femtosecond-Optical-Pulse-Induced Phase Transitions in Silicon,” Phys. Rev. Lett. 50(6), 454–457 (1983).
[CrossRef]

Anhut, T.

Anisimov, S. I.

K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, “Transient States of Matter during Short Pulse Laser Ablation,” Phys. Rev. Lett. 81(1), 224–227 (1998).
[CrossRef]

Ben-Yakar, A.

D. Eversole, B. Luk’yanchuk, and A. Ben-Yakar, “Plasmonic laser nanoablation of silicon by the scattering of femtosecond pulses near gold nanospheres,” Appl. Phys., A Mater. Sci. Process. 89(2), 283–291 (2007).
[CrossRef]

Bestehorn, M.

O. Varlamova, F. Costache, J. Reif, and M. Bestehorn, “Self-organized pattern formation upon femtosecond laser ablation by circularly polarized light,” Appl. Surf. Sci. 252(13), 4702–4706 (2006).
[CrossRef]

Bhardwaj, V. R.

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically Produced Arrays of Planar Nanostructures inside Fused Silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Bialkowski, J.

K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, “Transient States of Matter during Short Pulse Laser Ablation,” Phys. Rev. Lett. 81(1), 224–227 (1998).
[CrossRef]

D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
[CrossRef]

Bonse, J.

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond laser pulses,” J. Appl. Phys. 106(10), 104910 (2009).
[CrossRef]

J. Bonse, K.-W. Brzezinka, and A. J. Meixner, “Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy,” Appl. Surf. Sci. 221(1-4), 215–230 (2004).
[CrossRef]

Borowiec, A.

A. Borowiec and H. K. Haugen, “Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses,” Appl. Phys. Lett. 82(25), 4462–4464 (2003).
[CrossRef]

Brzezinka, K.-W.

J. Bonse, K.-W. Brzezinka, and A. J. Meixner, “Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy,” Appl. Surf. Sci. 221(1-4), 215–230 (2004).
[CrossRef]

Cavalleri, A.

K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, “Transient States of Matter during Short Pulse Laser Ablation,” Phys. Rev. Lett. 81(1), 224–227 (1998).
[CrossRef]

Chen, X.

Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, and K. Wang, “Femtosecond laser-induced periodic surface structure on diamond film,” Appl. Phys. Lett. 82(11), 1703–1705 (2003).
[CrossRef]

Cheng, Y.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Corkum, P. B.

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically Produced Arrays of Planar Nanostructures inside Fused Silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Costache, F.

O. Varlamova, F. Costache, J. Reif, and M. Bestehorn, “Self-organized pattern formation upon femtosecond laser ablation by circularly polarized light,” Appl. Surf. Sci. 252(13), 4702–4706 (2006).
[CrossRef]

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197–198, 891–895 (2002).
[CrossRef]

Daminelli, G.

G. Daminelli, J. Krüger, and W. Kautek, “Femtosecond laser interaction with silicon under water confinement,” Thin Solid Films 467(1-2), 334–341 (2004).
[CrossRef]

Dong, Y.

Y. Dong and P. Molian, “Coulomb explosion-induced formation of highly oriented nanoparticles on thin films of 3C–SiC by the femtosecond pulsed laser,” Appl. Phys. Lett. 84(1), 10–12 (2004).
[CrossRef]

Dörr, D.

R. Le Harzic, D. Dörr, D. Sauer, F. Stracke, and H. Zimmermann, “Generation of high spatial frequency ripples on silicon under ultrashort laser pulses irradiation,” Appl. Phys. Lett. 98(21), 211905 (2011).
[CrossRef]

R. Le Harzic, D. Dörr, D. Sauer, M. Neumeier, M. Epple, H. Zimmermann, and F. Stracke, “Large-area, uniform, high-spatial-frequency ripples generated on silicon using a nanojoule-femtosecond laser at high repetition rate,” Opt. Lett. 36(2), 229–231 (2011).
[CrossRef] [PubMed]

Emel’yanov, V. I.

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

Epple, M.

Eversole, D.

D. Eversole, B. Luk’yanchuk, and A. Ben-Yakar, “Plasmonic laser nanoablation of silicon by the scattering of femtosecond pulses near gold nanospheres,” Appl. Phys., A Mater. Sci. Process. 89(2), 283–291 (2007).
[CrossRef]

Fang, R.

Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, and K. Wang, “Femtosecond laser-induced periodic surface structure on diamond film,” Appl. Phys. Lett. 82(11), 1703–1705 (2003).
[CrossRef]

Faucher, P. M.

A. E. Siegman and P. M. Faucher, “Stimulated Wood’s Anomalies on Laser-Illuminated Surfaces,” IEEE J. Quantum Electron. 22(8), 1384–1403 (1986) (and references therein).
[CrossRef]

Fujita, M.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
[CrossRef]

Golosov, E. V.

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

Hashida, M.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
[CrossRef]

Haugen, H. K.

A. Borowiec and H. K. Haugen, “Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses,” Appl. Phys. Lett. 82(25), 4462–4464 (2003).
[CrossRef]

Henyk, M.

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197–198, 891–895 (2002).
[CrossRef]

Hirao, K.

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

Hirlimann, C.

C. V. Shank, R. Yen, and C. Hirlimann, “Time-Resolved Reflectivity Measurements of Femtosecond-Optical-Pulse-Induced Phase Transitions in Silicon,” Phys. Rev. Lett. 50(6), 454–457 (1983).
[CrossRef]

Hnatovsky, C.

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically Produced Arrays of Planar Nanostructures inside Fused Silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Huang, M.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Huo, H.

C. Wang, H. Huo, M. Johnson, M. Shen, and E. Mazur, “The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations,” Nanotechnology 21(7), 075304 (2010).
[CrossRef] [PubMed]

Ionin, A. A.

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

Izawa, Y.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
[CrossRef]

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
[CrossRef]

Johnson, M.

C. Wang, H. Huo, M. Johnson, M. Shen, and E. Mazur, “The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations,” Nanotechnology 21(7), 075304 (2010).
[CrossRef] [PubMed]

Kautek, W.

G. Daminelli, J. Krüger, and W. Kautek, “Femtosecond laser interaction with silicon under water confinement,” Thin Solid Films 467(1-2), 334–341 (2004).
[CrossRef]

Kazansky, P. G.

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

Kiuchi, J.

K. Miyazaki, N. Maekawa, W. Kobayashi, N. Yasumaru, and J. Kiuchi, “Reflectivity in femtosecond-laser-induced structural changes of diamond-like carbon film,” Appl. Phys., A Mater. Sci. Process. 80(1), 17–21 (2005).
[CrossRef]

N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC,” Appl. Phys., A Mater. Sci. Process. 76(6), 983–985 (2003).
[CrossRef]

Kobayashi, W.

K. Miyazaki, N. Maekawa, W. Kobayashi, N. Yasumaru, and J. Kiuchi, “Reflectivity in femtosecond-laser-induced structural changes of diamond-like carbon film,” Appl. Phys., A Mater. Sci. Process. 80(1), 17–21 (2005).
[CrossRef]

Kolobov, Yu. R.

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

König, K.

Krüger, J.

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond laser pulses,” J. Appl. Phys. 106(10), 104910 (2009).
[CrossRef]

G. Daminelli, J. Krüger, and W. Kautek, “Femtosecond laser interaction with silicon under water confinement,” Thin Solid Films 467(1-2), 334–341 (2004).
[CrossRef]

Kudryashov, S. I.

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

Le Harzic, R.

Liao, Y.

Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, and K. Wang, “Femtosecond laser-induced periodic surface structure on diamond film,” Appl. Phys. Lett. 82(11), 1703–1705 (2003).
[CrossRef]

Ligachev, A. E.

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

Luk’yanchuk, B.

D. Eversole, B. Luk’yanchuk, and A. Ben-Yakar, “Plasmonic laser nanoablation of silicon by the scattering of femtosecond pulses near gold nanospheres,” Appl. Phys., A Mater. Sci. Process. 89(2), 283–291 (2007).
[CrossRef]

Ma, Y.

Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, and K. Wang, “Femtosecond laser-induced periodic surface structure on diamond film,” Appl. Phys. Lett. 82(11), 1703–1705 (2003).
[CrossRef]

Maekawa, N.

K. Miyazaki, N. Maekawa, W. Kobayashi, N. Yasumaru, and J. Kiuchi, “Reflectivity in femtosecond-laser-induced structural changes of diamond-like carbon film,” Appl. Phys., A Mater. Sci. Process. 80(1), 17–21 (2005).
[CrossRef]

Malzer, S.

Mazur, E.

C. Wang, H. Huo, M. Johnson, M. Shen, and E. Mazur, “The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations,” Nanotechnology 21(7), 075304 (2010).
[CrossRef] [PubMed]

Meixner, A. J.

J. Bonse, K.-W. Brzezinka, and A. J. Meixner, “Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy,” Appl. Surf. Sci. 221(1-4), 215–230 (2004).
[CrossRef]

Meyer-ter-Vehn, J.

K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, “Transient States of Matter during Short Pulse Laser Ablation,” Phys. Rev. Lett. 81(1), 224–227 (1998).
[CrossRef]

Miyaji, G.

G. Miyaji and K. Miyazaki, “Origin of periodicity in nanostructuring on thin film surfaces ablated with femtosecond laser pulses,” Opt. Express 16(20), 16265–16271 (2008).
[CrossRef] [PubMed]

G. Miyaji and K. Miyazaki, “Nanoscale ablation on patterned diamondlike carbon film with femtosecond laser pulses,” Appl. Phys. Lett. 91(12), 123102 (2007).
[CrossRef]

Miyazaki, K.

G. Miyaji and K. Miyazaki, “Origin of periodicity in nanostructuring on thin film surfaces ablated with femtosecond laser pulses,” Opt. Express 16(20), 16265–16271 (2008).
[CrossRef] [PubMed]

G. Miyaji and K. Miyazaki, “Nanoscale ablation on patterned diamondlike carbon film with femtosecond laser pulses,” Appl. Phys. Lett. 91(12), 123102 (2007).
[CrossRef]

K. Miyazaki, N. Maekawa, W. Kobayashi, N. Yasumaru, and J. Kiuchi, “Reflectivity in femtosecond-laser-induced structural changes of diamond-like carbon film,” Appl. Phys., A Mater. Sci. Process. 80(1), 17–21 (2005).
[CrossRef]

N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC,” Appl. Phys., A Mater. Sci. Process. 76(6), 983–985 (2003).
[CrossRef]

Molian, P.

Y. Dong and P. Molian, “Coulomb explosion-induced formation of highly oriented nanoparticles on thin films of 3C–SiC by the femtosecond pulsed laser,” Appl. Phys. Lett. 84(1), 10–12 (2004).
[CrossRef]

Nagai, H.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
[CrossRef]

Neumeier, M.

Novoselov, Yu. N.

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

Oparin, A.

K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, “Transient States of Matter during Short Pulse Laser Ablation,” Phys. Rev. Lett. 81(1), 224–227 (1998).
[CrossRef]

Pandelov, S. V.

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197–198, 891–895 (2002).
[CrossRef]

Qiu, J.

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

Rajeev, P. P.

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically Produced Arrays of Planar Nanostructures inside Fused Silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Rayner, D. M.

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically Produced Arrays of Planar Nanostructures inside Fused Silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Reif, J.

O. Varlamova, F. Costache, J. Reif, and M. Bestehorn, “Self-organized pattern formation upon femtosecond laser ablation by circularly polarized light,” Appl. Surf. Sci. 252(13), 4702–4706 (2006).
[CrossRef]

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197–198, 891–895 (2002).
[CrossRef]

Riemann, I.

Rosenfeld, A.

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond laser pulses,” J. Appl. Phys. 106(10), 104910 (2009).
[CrossRef]

Sasaki, R.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
[CrossRef]

Sauer, D.

Schuck, H.

Seleznev, L. V.

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

Setsuhara, Y.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
[CrossRef]

Shank, C. V.

C. V. Shank, R. Yen, and C. Hirlimann, “Time-Resolved Reflectivity Measurements of Femtosecond-Optical-Pulse-Induced Phase Transitions in Silicon,” Phys. Rev. Lett. 50(6), 454–457 (1983).
[CrossRef]

Shen, M.

C. Wang, H. Huo, M. Johnson, M. Shen, and E. Mazur, “The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations,” Nanotechnology 21(7), 075304 (2010).
[CrossRef] [PubMed]

Shimotsuma, Y.

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

Siegman, A. E.

A. E. Siegman and P. M. Faucher, “Stimulated Wood’s Anomalies on Laser-Illuminated Surfaces,” IEEE J. Quantum Electron. 22(8), 1384–1403 (1986) (and references therein).
[CrossRef]

Simova, E.

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically Produced Arrays of Planar Nanostructures inside Fused Silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Sinitsyn, D. V.

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

Sokolowski-Tinten, K.

K. Sokolowski-Tinten and D. von der Linde, “Generation of dense electron-hole plasmas in silicon,” Phys. Rev. B 61(4), 2643–2650 (2000).
[CrossRef]

K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, “Transient States of Matter during Short Pulse Laser Ablation,” Phys. Rev. Lett. 81(1), 224–227 (1998).
[CrossRef]

D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
[CrossRef]

Stracke, F.

R. Le Harzic, D. Dörr, D. Sauer, M. Neumeier, M. Epple, H. Zimmermann, and F. Stracke, “Large-area, uniform, high-spatial-frequency ripples generated on silicon using a nanojoule-femtosecond laser at high repetition rate,” Opt. Lett. 36(2), 229–231 (2011).
[CrossRef] [PubMed]

R. Le Harzic, D. Dörr, D. Sauer, F. Stracke, and H. Zimmermann, “Generation of high spatial frequency ripples on silicon under ultrashort laser pulses irradiation,” Appl. Phys. Lett. 98(21), 211905 (2011).
[CrossRef]

Taylor, R. S.

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically Produced Arrays of Planar Nanostructures inside Fused Silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Varlamova, O.

O. Varlamova, F. Costache, J. Reif, and M. Bestehorn, “Self-organized pattern formation upon femtosecond laser ablation by circularly polarized light,” Appl. Surf. Sci. 252(13), 4702–4706 (2006).
[CrossRef]

von der Linde, D.

K. Sokolowski-Tinten and D. von der Linde, “Generation of dense electron-hole plasmas in silicon,” Phys. Rev. B 61(4), 2643–2650 (2000).
[CrossRef]

K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, “Transient States of Matter during Short Pulse Laser Ablation,” Phys. Rev. Lett. 81(1), 224–227 (1998).
[CrossRef]

D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
[CrossRef]

Wang, C.

C. Wang, H. Huo, M. Johnson, M. Shen, and E. Mazur, “The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations,” Nanotechnology 21(7), 075304 (2010).
[CrossRef] [PubMed]

Wang, K.

Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, and K. Wang, “Femtosecond laser-induced periodic surface structure on diamond film,” Appl. Phys. Lett. 82(11), 1703–1705 (2003).
[CrossRef]

Wang, L. J.

Wu, Q.

Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, and K. Wang, “Femtosecond laser-induced periodic surface structure on diamond film,” Appl. Phys. Lett. 82(11), 1703–1705 (2003).
[CrossRef]

Xu, N.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Xu, Z.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Yasumaru, N.

K. Miyazaki, N. Maekawa, W. Kobayashi, N. Yasumaru, and J. Kiuchi, “Reflectivity in femtosecond-laser-induced structural changes of diamond-like carbon film,” Appl. Phys., A Mater. Sci. Process. 80(1), 17–21 (2005).
[CrossRef]

N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC,” Appl. Phys., A Mater. Sci. Process. 76(6), 983–985 (2003).
[CrossRef]

Yen, R.

C. V. Shank, R. Yen, and C. Hirlimann, “Time-Resolved Reflectivity Measurements of Femtosecond-Optical-Pulse-Induced Phase Transitions in Silicon,” Phys. Rev. Lett. 50(6), 454–457 (1983).
[CrossRef]

Yoshida, M.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
[CrossRef]

Yu, Q.

Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, and K. Wang, “Femtosecond laser-induced periodic surface structure on diamond film,” Appl. Phys. Lett. 82(11), 1703–1705 (2003).
[CrossRef]

Zhao, F.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Zhao, Q. Z.

Zimmermann, H.

R. Le Harzic, D. Dörr, D. Sauer, F. Stracke, and H. Zimmermann, “Generation of high spatial frequency ripples on silicon under ultrashort laser pulses irradiation,” Appl. Phys. Lett. 98(21), 211905 (2011).
[CrossRef]

R. Le Harzic, D. Dörr, D. Sauer, M. Neumeier, M. Epple, H. Zimmermann, and F. Stracke, “Large-area, uniform, high-spatial-frequency ripples generated on silicon using a nanojoule-femtosecond laser at high repetition rate,” Opt. Lett. 36(2), 229–231 (2011).
[CrossRef] [PubMed]

ACS Nano (1)

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Origin of Laser-Induced Near-Subwavelength Ripples: Interference between Surface Plasmons and Incident Laser,” ACS Nano 3(12), 4062–4070 (2009).
[CrossRef] [PubMed]

Appl. Phys. Lett. (6)

R. Le Harzic, D. Dörr, D. Sauer, F. Stracke, and H. Zimmermann, “Generation of high spatial frequency ripples on silicon under ultrashort laser pulses irradiation,” Appl. Phys. Lett. 98(21), 211905 (2011).
[CrossRef]

Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, and K. Wang, “Femtosecond laser-induced periodic surface structure on diamond film,” Appl. Phys. Lett. 82(11), 1703–1705 (2003).
[CrossRef]

G. Miyaji and K. Miyazaki, “Nanoscale ablation on patterned diamondlike carbon film with femtosecond laser pulses,” Appl. Phys. Lett. 91(12), 123102 (2007).
[CrossRef]

Y. Dong and P. Molian, “Coulomb explosion-induced formation of highly oriented nanoparticles on thin films of 3C–SiC by the femtosecond pulsed laser,” Appl. Phys. Lett. 84(1), 10–12 (2004).
[CrossRef]

A. Borowiec and H. K. Haugen, “Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses,” Appl. Phys. Lett. 82(25), 4462–4464 (2003).
[CrossRef]

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, “Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation,” Appl. Phys. Lett. 90(4), 044107 (2007).
[CrossRef]

Appl. Phys., A Mater. Sci. Process. (3)

D. Eversole, B. Luk’yanchuk, and A. Ben-Yakar, “Plasmonic laser nanoablation of silicon by the scattering of femtosecond pulses near gold nanospheres,” Appl. Phys., A Mater. Sci. Process. 89(2), 283–291 (2007).
[CrossRef]

K. Miyazaki, N. Maekawa, W. Kobayashi, N. Yasumaru, and J. Kiuchi, “Reflectivity in femtosecond-laser-induced structural changes of diamond-like carbon film,” Appl. Phys., A Mater. Sci. Process. 80(1), 17–21 (2005).
[CrossRef]

N. Yasumaru, K. Miyazaki, and J. Kiuchi, “Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC,” Appl. Phys., A Mater. Sci. Process. 76(6), 983–985 (2003).
[CrossRef]

Appl. Surf. Sci. (4)

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, “Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics,” Appl. Surf. Sci. 197–198, 891–895 (2002).
[CrossRef]

O. Varlamova, F. Costache, J. Reif, and M. Bestehorn, “Self-organized pattern formation upon femtosecond laser ablation by circularly polarized light,” Appl. Surf. Sci. 252(13), 4702–4706 (2006).
[CrossRef]

D. von der Linde, K. Sokolowski-Tinten, and J. Bialkowski, “Laser-solid interaction in the femtosecond time regime,” Appl. Surf. Sci. 109–110, 1–10 (1997).
[CrossRef]

J. Bonse, K.-W. Brzezinka, and A. J. Meixner, “Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy,” Appl. Surf. Sci. 221(1-4), 215–230 (2004).
[CrossRef]

IEEE J. Quantum Electron. (1)

A. E. Siegman and P. M. Faucher, “Stimulated Wood’s Anomalies on Laser-Illuminated Surfaces,” IEEE J. Quantum Electron. 22(8), 1384–1403 (1986) (and references therein).
[CrossRef]

J. Appl. Phys. (1)

J. Bonse, A. Rosenfeld, and J. Krüger, “On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond laser pulses,” J. Appl. Phys. 106(10), 104910 (2009).
[CrossRef]

JETP Lett. (1)

E. V. Golosov, V. I. Emel’yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, “Femtosecond Laser Writing of Subwave One Dimensional Quasiperiodic Nanostructures on a Titanium Surface,” JETP Lett. 90(2), 107–110 (2009).
[CrossRef]

Nanotechnology (1)

C. Wang, H. Huo, M. Johnson, M. Shen, and E. Mazur, “The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations,” Nanotechnology 21(7), 075304 (2010).
[CrossRef] [PubMed]

Opt. Express (2)

Opt. Lett. (2)

Phys. Rev. B (1)

K. Sokolowski-Tinten and D. von der Linde, “Generation of dense electron-hole plasmas in silicon,” Phys. Rev. B 61(4), 2643–2650 (2000).
[CrossRef]

Phys. Rev. Lett. (4)

C. V. Shank, R. Yen, and C. Hirlimann, “Time-Resolved Reflectivity Measurements of Femtosecond-Optical-Pulse-Induced Phase Transitions in Silicon,” Phys. Rev. Lett. 50(6), 454–457 (1983).
[CrossRef]

K. Sokolowski-Tinten, J. Bialkowski, A. Cavalleri, D. von der Linde, A. Oparin, J. Meyer-ter-Vehn, and S. I. Anisimov, “Transient States of Matter during Short Pulse Laser Ablation,” Phys. Rev. Lett. 81(1), 224–227 (1998).
[CrossRef]

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses,” Phys. Rev. Lett. 91(24), 247405 (2003).
[CrossRef] [PubMed]

V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically Produced Arrays of Planar Nanostructures inside Fused Silica,” Phys. Rev. Lett. 96(5), 057404 (2006).
[CrossRef] [PubMed]

Thin Solid Films (1)

G. Daminelli, J. Krüger, and W. Kautek, “Femtosecond laser interaction with silicon under water confinement,” Thin Solid Films 467(1-2), 334–341 (2004).
[CrossRef]

Other (2)

E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1997).

H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer, 1988).

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Figures (5)

Fig. 1
Fig. 1

SEM image of ablated Si surface and the distribution of structural period, observed with (a) N = 400, (b) N = 500, (c) N = 800, (d) N = 1200, (e) N = 1500, and (f) N = 2000 at F = 120 mJ/cm2, where the laser polarization direction is horizontal. The distribution is measured along the polarization direction, and the spectral peak is normalized by the maximum value on a linear scale.

Fig. 2
Fig. 2

SEM image of ablated Si surface and the distribution of structural period, observed with N = 1000 at (a) F = 120 mJ/cm2, (b) F = 130 mJ/cm2, (c) F = 140 mJ/cm2, and (d) F = 150 mJ/cm2.

Fig. 3
Fig. 3

Structural periods observed as a function of N at (a) F = 120 mJ/cm2, (b) F = 130 mJ/cm2, (c) F = 140 mJ/cm2, and (d) F = 150 mJ/cm2.

Fig. 4
Fig. 4

Structural periods at the water/a-Si interface (upper) and at the a-Si/c-Si interface (lower) and the skin depth in the layer b, calculated as a function of Ne for the model surface in the inset. The shaded area denotes the region of εb′ < 0 for the possible excitation of SPPs.

Fig. 5
Fig. 5

(a) Optical configuration for the pump-probe measurement of the reflectivity η, (b) the temporal change of η observed with a single fs laser pulse, and (c) η measured as a function of the superimposed shot number N of fs laser pulses at the time delay of Δt = 0.5 ps. F = 120 mJ/cm2 in (b) and (c).

Equations (1)

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k spp = k 0 [ ε a,c ε b '/( ε a,c + ε b ') ] 1/2

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