Abstract

Measurement of subsurface damage (SSD) induced by grinding process is of major interest in the development of high laser damage fused silica optical components manufacturing processes. Most SSD measurements methods give only access to the peak to peak value. We herein report on the benefit of using Abbott–Firestone curves to get an insight of the SSD distribution inside the optical material. We evidence on various diamond wheel ground fused silica substrates that such an approach is complementary to a classical SSD peak to peak measurement and bring useful information to optimize a grinding process.

© 2012 OSA

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References

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  1. M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE 5273, 264–272 (2004).
    [CrossRef]
  2. M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE 6403, 64030E, 64030E-7 (2006).
    [CrossRef]
  3. J. Lambropoulos, “Micromechanics of material-removal mechanisms from brittle surfaces,” LLE Review 74, 131–138 (1998).
  4. Y. Zhou, D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc. 77(12), 3277–3280 (1994).
    [CrossRef]
  5. J. A. Randi, J. C. Lambropoulos, and S. D. Jacobs, “Subsurface damage in some single crystalline optical materials,” Appl. Opt. 44(12), 2241–2249 (2005).
    [CrossRef] [PubMed]
  6. T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
    [CrossRef]
  7. F. W. Preston, “The structure of abraded glass surfaces,” Trans. Opt. Soc. 23(3), 141–164 (1922).
    [CrossRef]
  8. J. Neauport, C. Ambard, P. Cormont, N. Darbois, J. Destribats, C. Luitot, and O. Rondeau, “Subsurface damage measurement of ground fused silica parts by HF etching techniques,” Opt. Express 17(22), 20448–20456 (2009).
    [CrossRef] [PubMed]
  9. J. Neauport, P. Cormont, P. Legros, C. Ambard, and J. Destribats, “Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy,” Opt. Express 17(5), 3543–3554 (2009).
    [CrossRef] [PubMed]
  10. E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng. 55, 569–572 (1933).
  11. M. Bigerelle and A. Iost, “A numerical method to calculate the Abbott parameters: A wear application,” Tribol. Int. 40(9), 1319–1334 (2007).
    [CrossRef]
  12. A. Brient, M. Brissot, T. Rouxel, and J. C. Sangleboeuf, “Influence of grinding parameters on glass workpieces surface finish using response surface methodology,” J. Manuf. Sci. Eng. 133(4), 044501 (2011).
    [CrossRef]
  13. AFNOR, “NF EN ISO 13565,” in Geometrical Product Specifications (GPS)–Surface texture: Profile method; Surfaces having stratified functional properties, (Paris, 1998).

2011 (1)

A. Brient, M. Brissot, T. Rouxel, and J. C. Sangleboeuf, “Influence of grinding parameters on glass workpieces surface finish using response surface methodology,” J. Manuf. Sci. Eng. 133(4), 044501 (2011).
[CrossRef]

2009 (2)

2007 (1)

M. Bigerelle and A. Iost, “A numerical method to calculate the Abbott parameters: A wear application,” Tribol. Int. 40(9), 1319–1334 (2007).
[CrossRef]

2006 (2)

M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE 6403, 64030E, 64030E-7 (2006).
[CrossRef]

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
[CrossRef]

2005 (1)

2004 (1)

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE 5273, 264–272 (2004).
[CrossRef]

1998 (1)

J. Lambropoulos, “Micromechanics of material-removal mechanisms from brittle surfaces,” LLE Review 74, 131–138 (1998).

1994 (1)

Y. Zhou, D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc. 77(12), 3277–3280 (1994).
[CrossRef]

1933 (1)

E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng. 55, 569–572 (1933).

1922 (1)

F. W. Preston, “The structure of abraded glass surfaces,” Trans. Opt. Soc. 23(3), 141–164 (1922).
[CrossRef]

Abbott, E. J.

E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng. 55, 569–572 (1933).

Ambard, C.

Bercegol, H.

M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE 6403, 64030E, 64030E-7 (2006).
[CrossRef]

Bigerelle, M.

M. Bigerelle and A. Iost, “A numerical method to calculate the Abbott parameters: A wear application,” Tribol. Int. 40(9), 1319–1334 (2007).
[CrossRef]

Brient, A.

A. Brient, M. Brissot, T. Rouxel, and J. C. Sangleboeuf, “Influence of grinding parameters on glass workpieces surface finish using response surface methodology,” J. Manuf. Sci. Eng. 133(4), 044501 (2011).
[CrossRef]

Brissot, M.

A. Brient, M. Brissot, T. Rouxel, and J. C. Sangleboeuf, “Influence of grinding parameters on glass workpieces surface finish using response surface methodology,” J. Manuf. Sci. Eng. 133(4), 044501 (2011).
[CrossRef]

Cormont, P.

Courchinoux, R.

M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE 6403, 64030E, 64030E-7 (2006).
[CrossRef]

Darbois, N.

Davis, P.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
[CrossRef]

Destribats, J.

Donval, T.

M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE 6403, 64030E, 64030E-7 (2006).
[CrossRef]

Feit, M. D.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
[CrossRef]

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE 5273, 264–272 (2004).
[CrossRef]

Firestone, F. A.

E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng. 55, 569–572 (1933).

Funkenbusch, D.

Y. Zhou, D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc. 77(12), 3277–3280 (1994).
[CrossRef]

Golini, D.

Y. Zhou, D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc. 77(12), 3277–3280 (1994).
[CrossRef]

Iost, A.

M. Bigerelle and A. Iost, “A numerical method to calculate the Abbott parameters: A wear application,” Tribol. Int. 40(9), 1319–1334 (2007).
[CrossRef]

Jacobs, S. D.

Josse, M. A.

M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE 6403, 64030E, 64030E-7 (2006).
[CrossRef]

Lamaignère, L.

M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE 6403, 64030E, 64030E-7 (2006).
[CrossRef]

Lambropoulos, J.

J. Lambropoulos, “Micromechanics of material-removal mechanisms from brittle surfaces,” LLE Review 74, 131–138 (1998).

Lambropoulos, J. C.

Legros, P.

Lindquist, A.

Y. Zhou, D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc. 77(12), 3277–3280 (1994).
[CrossRef]

Luitot, C.

Menapace, J.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
[CrossRef]

Miller, P.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
[CrossRef]

Neauport, J.

Preston, F. W.

F. W. Preston, “The structure of abraded glass surfaces,” Trans. Opt. Soc. 23(3), 141–164 (1922).
[CrossRef]

Pussacq, B.

M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE 6403, 64030E, 64030E-7 (2006).
[CrossRef]

Quesnel, D. J.

Y. Zhou, D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc. 77(12), 3277–3280 (1994).
[CrossRef]

Randi, J. A.

Rondeau, O.

Rouxel, T.

A. Brient, M. Brissot, T. Rouxel, and J. C. Sangleboeuf, “Influence of grinding parameters on glass workpieces surface finish using response surface methodology,” J. Manuf. Sci. Eng. 133(4), 044501 (2011).
[CrossRef]

Rubenchik, A. M.

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE 5273, 264–272 (2004).
[CrossRef]

Rullier, J. L.

M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE 6403, 64030E, 64030E-7 (2006).
[CrossRef]

Sangleboeuf, J. C.

A. Brient, M. Brissot, T. Rouxel, and J. C. Sangleboeuf, “Influence of grinding parameters on glass workpieces surface finish using response surface methodology,” J. Manuf. Sci. Eng. 133(4), 044501 (2011).
[CrossRef]

Steele, R.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
[CrossRef]

Suratwala, T.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
[CrossRef]

Walmer, D.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
[CrossRef]

Wong, L.

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
[CrossRef]

Zhou, Y.

Y. Zhou, D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc. 77(12), 3277–3280 (1994).
[CrossRef]

Appl. Opt. (1)

J. Am. Ceram. Soc. (1)

Y. Zhou, D. Funkenbusch, D. J. Quesnel, D. Golini, and A. Lindquist, “Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses,” J. Am. Ceram. Soc. 77(12), 3277–3280 (1994).
[CrossRef]

J. Manuf. Sci. Eng. (1)

A. Brient, M. Brissot, T. Rouxel, and J. C. Sangleboeuf, “Influence of grinding parameters on glass workpieces surface finish using response surface methodology,” J. Manuf. Sci. Eng. 133(4), 044501 (2011).
[CrossRef]

J. Non-Cryst. Solids (1)

T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis, and D. Walmer, “Sub-surface mechanical damage distributions during grinding of fused silica,” J. Non-Cryst. Solids 352(52-54), 5601–5617 (2006).
[CrossRef]

LLE Review (1)

J. Lambropoulos, “Micromechanics of material-removal mechanisms from brittle surfaces,” LLE Review 74, 131–138 (1998).

Mech. Eng. (1)

E. J. Abbott and F. A. Firestone, “Specifying surface quality: a method based on accurate measurement and comparison,” Mech. Eng. 55, 569–572 (1933).

Opt. Express (2)

Proc. SPIE (2)

M. D. Feit and A. M. Rubenchik, “Influence of subsurface cracks on laser induced surface damage,” Proc. SPIE 5273, 264–272 (2004).
[CrossRef]

M. A. Josse, H. Bercegol, R. Courchinoux, T. Donval, L. Lamaignère, B. Pussacq, and J. L. Rullier, “Study of the evolution of mechanical defects on silica samples under laser irradiation at 355 nm,” Proc. SPIE 6403, 64030E, 64030E-7 (2006).
[CrossRef]

Trans. Opt. Soc. (1)

F. W. Preston, “The structure of abraded glass surfaces,” Trans. Opt. Soc. 23(3), 141–164 (1922).
[CrossRef]

Tribol. Int. (1)

M. Bigerelle and A. Iost, “A numerical method to calculate the Abbott parameters: A wear application,” Tribol. Int. 40(9), 1319–1334 (2007).
[CrossRef]

Other (1)

AFNOR, “NF EN ISO 13565,” in Geometrical Product Specifications (GPS)–Surface texture: Profile method; Surfaces having stratified functional properties, (Paris, 1998).

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Figures (6)

Fig. 1
Fig. 1

Abbott–Firestone curve. (a) measured roughness profile trace. (b) the cumulative probability density function of the profile trace analysis allows the computation of Abbott–Firestone parameters.

Fig. 2
Fig. 2

Typical Abbott–Firestone curve for fused silica sample. (a) measured roughness profile trace. (b) the cumulative probability density function of the profile trace analysis allows the computation of Abbott–Firestone parameters.

Fig. 3
Fig. 3

Rt (a) and δ (b) bibliographic indicators evolution [6].

Fig. 4
Fig. 4

Rk (a), Rpk (b)and Rvk (c) Abbott–Firestone indicators evolution.

Fig. 5
Fig. 5

Mr1 (a) and Mr2 (b) Abbott–Firestone indicators evolution.

Fig. 6
Fig. 6

SSD (a) and Mr2 (b) Abbott–Firestone parameter evolution.

Tables (4)

Tables Icon

Table 1 Abbott–Firestone Parameters

Tables Icon

Table 2 Summary of Operating Conditions for Fused Silica Samples Batches A-B

Tables Icon

Table 3 Roughness, Abbott–Firestone Parameters and SSD Results

Tables Icon

Table 4 Indicators Definition

Metrics