Abstract

In a previous paper, the University of Arizona (UA) has developed a measurement technique called: Software Configurable Optical Test System (SCOTS) based on the principle of reflection deflectometry. In this paper, we present results of this very efficient optical metrology method applied to the metrology of X-ray mirrors. We used this technique to measure surface slope errors with precision and accuracy better than 100 nrad (rms) and ~200 nrad (rms), respectively, with a lateral resolution of few mm or less. We present results of the calibration of the metrology systems, discuss their accuracy and address the precision in measuring a spherical mirror.

© 2012 OSA

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    [CrossRef]
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    [CrossRef]
  27. M. Idir, P. Mercere, M. H. Modi, G. Dovillaire, X. Levecq, S. Bucourt, L. Escolano, and P. Sauvageot, “X-ray active mirror coupled with a Hartmann wavefront sensor,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 162–171 (2010).
    [CrossRef]

2012

2011

M. Vo, Z. Wang, L. Luu, and J. Ma, “Advanced geometric camera calibration for machine vision,” Opt. Eng.50(11), 110503 (2011).
[CrossRef]

2010

2009

W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Express17(20), 17669–17677 (2009).
[CrossRef] [PubMed]

P. Su, J. H. Burge, B. Cuerden, R. Allen, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics II,” Proc. SPIE7426, 74260Y, 74260Y-9 (2009).
[CrossRef]

2008

P. Su, J. H. Burge, B. Cuerden, J. Sasian, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics,” Proc. SPIE7018, 70183T, 70183T-10 (2008).
[CrossRef]

2007

J. H. Burge, P. Su, C. Zhao, and T. Zobrist, “Use of a commercial laser tracker for optical alignment,” Proc. SPIE6676, 66760E, 66760E-12 (2007).
[CrossRef]

2004

T. Bothe, W. Li, C. von Kopylow, and W. Jueptner, “High resolution 3D shape measurement on specular surfaces by fringe reflection,” Proc. SPIE5457, 411–422 (2004).
[CrossRef]

M. Knauer, J. Kaminski, and G. Hausler, “Phase measuring deflectometry: a new approach to measure specular free form surfaces,” Proc. SPIE5457, 366–376 (2004).
[CrossRef]

2003

J. Fleig, P. Dumas, P. E. Murphy, and G. W. Forbes, “An automated subapeture stitching interferometer workstation for spherical and aspherical surfaces,” Proc. SPIE5188, 296–307 (2003).
[CrossRef]

2000

R. Höfling, P. Aswendt, and R. Neugebauer, “Phase reflection—a new solution for the detection of shape defects on car body sheets,” Opt. Eng.39(1), 175 (2000).
[CrossRef]

1998

1997

D. Perard and J. Beyerer, “Three-dimensional measurement of specular free-form surfaces with a structured-lighting reflection technique,” Proc. SPIE3204, 74–80 (1997).
[CrossRef]

1995

S. N. Qian, W. Jark, and P. Z. Takacs, “The penta-prism LTP: A long-trace-profiler with stationary optical head and moving penta prism,” Rev. Sci. Instrum.66(3), 2562–2569 (1995).
[CrossRef]

1987

P. Z. Takacs, S. N. Qian, and J. Colbert, “Design of a long trace surface profiler,” Proc. SPIE749, 59–64 (1987).

1983

R. Ritter and R. Hahn, “Contribution to analysis of the reflection grating method,” Opt. Lasers Eng.4(1), 13–24 (1983).
[CrossRef]

1954

F. Ligtenberg, “The moire method, a new experimental method for the determination of moments in small slab models,” Proc. Soc. Exp. Stress Anal.12, 83–98 (1954).

Allen, R.

P. Su, J. H. Burge, B. Cuerden, R. Allen, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics II,” Proc. SPIE7426, 74260Y, 74260Y-9 (2009).
[CrossRef]

Anderson, E. H.

Angel, R. P.

Aswendt, P.

R. Höfling, P. Aswendt, and R. Neugebauer, “Phase reflection—a new solution for the detection of shape defects on car body sheets,” Opt. Eng.39(1), 175 (2000).
[CrossRef]

Bergmann, R. B.

Beyerer, J.

D. Perard and J. Beyerer, “Three-dimensional measurement of specular free-form surfaces with a structured-lighting reflection technique,” Proc. SPIE3204, 74–80 (1997).
[CrossRef]

Bothe, T.

Boutet, S.

Boye, P.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray nanoprobe at beamline P06 at PETRA III,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 93–97 (2010).
[CrossRef]

Buchheim, J.

Bucourt, S.

M. Idir, P. Mercere, M. H. Modi, G. Dovillaire, X. Levecq, S. Bucourt, L. Escolano, and P. Sauvageot, “X-ray active mirror coupled with a Hartmann wavefront sensor,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 162–171 (2010).
[CrossRef]

Burge, J. H.

P. Su, R. E. Parks, Y. Wang, C. J. Oh, and J. H. Burge, “Swing arm optical coordinate-measuring machine: modal estimation of systematic errors from dual probe shear measurements,” Opt. Eng.51(4), 043604 (2012).
[CrossRef]

P. Su, R. E. Parks, L. Wang, R. P. Angel, and J. H. Burge, “Software configurable optical test system: a computerized reverse Hartmann test,” Appl. Opt.49(23), 4404–4412 (2010), http://www.opticsinfobase.org/abstract.cfm?URI=ao-49-23-4404 .
[CrossRef] [PubMed]

P. Su, J. H. Burge, B. Cuerden, R. Allen, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics II,” Proc. SPIE7426, 74260Y, 74260Y-9 (2009).
[CrossRef]

P. Su, J. H. Burge, B. Cuerden, J. Sasian, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics,” Proc. SPIE7018, 70183T, 70183T-10 (2008).
[CrossRef]

J. H. Burge, P. Su, C. Zhao, and T. Zobrist, “Use of a commercial laser tracker for optical alignment,” Proc. SPIE6676, 66760E, 66760E-12 (2007).
[CrossRef]

Chao, W.

Colbert, J.

P. Z. Takacs, S. N. Qian, and J. Colbert, “Design of a long trace surface profiler,” Proc. SPIE749, 59–64 (1987).

Cuerden, B.

P. Su, J. H. Burge, B. Cuerden, R. Allen, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics II,” Proc. SPIE7426, 74260Y, 74260Y-9 (2009).
[CrossRef]

P. Su, J. H. Burge, B. Cuerden, J. Sasian, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics,” Proc. SPIE7018, 70183T, 70183T-10 (2008).
[CrossRef]

Dovillaire, G.

M. Idir, P. Mercere, M. H. Modi, G. Dovillaire, X. Levecq, S. Bucourt, L. Escolano, and P. Sauvageot, “X-ray active mirror coupled with a Hartmann wavefront sensor,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 162–171 (2010).
[CrossRef]

Dumas, P.

J. Fleig, P. Dumas, P. E. Murphy, and G. W. Forbes, “An automated subapeture stitching interferometer workstation for spherical and aspherical surfaces,” Proc. SPIE5188, 296–307 (2003).
[CrossRef]

Escolano, L.

M. Idir, P. Mercere, M. H. Modi, G. Dovillaire, X. Levecq, S. Bucourt, L. Escolano, and P. Sauvageot, “X-ray active mirror coupled with a Hartmann wavefront sensor,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 162–171 (2010).
[CrossRef]

Falkenberg, G.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray nanoprobe at beamline P06 at PETRA III,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 93–97 (2010).
[CrossRef]

Feldkamp, J. M.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray nanoprobe at beamline P06 at PETRA III,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 93–97 (2010).
[CrossRef]

Fischer, P.

Fleig, J.

J. Fleig, P. Dumas, P. E. Murphy, and G. W. Forbes, “An automated subapeture stitching interferometer workstation for spherical and aspherical surfaces,” Proc. SPIE5188, 296–307 (2003).
[CrossRef]

Forbes, G. W.

J. Fleig, P. Dumas, P. E. Murphy, and G. W. Forbes, “An automated subapeture stitching interferometer workstation for spherical and aspherical surfaces,” Proc. SPIE5188, 296–307 (2003).
[CrossRef]

Hahn, R.

R. Ritter and R. Hahn, “Contribution to analysis of the reflection grating method,” Opt. Lasers Eng.4(1), 13–24 (1983).
[CrossRef]

Hausler, G.

M. Knauer, J. Kaminski, and G. Hausler, “Phase measuring deflectometry: a new approach to measure specular free form surfaces,” Proc. SPIE5457, 366–376 (2004).
[CrossRef]

Höfling, R.

R. Höfling, P. Aswendt, and R. Neugebauer, “Phase reflection—a new solution for the detection of shape defects on car body sheets,” Opt. Eng.39(1), 175 (2000).
[CrossRef]

Idir, M.

M. Idir, P. Mercere, M. H. Modi, G. Dovillaire, X. Levecq, S. Bucourt, L. Escolano, and P. Sauvageot, “X-ray active mirror coupled with a Hartmann wavefront sensor,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 162–171 (2010).
[CrossRef]

Ishikawa, T.

Jark, W.

S. N. Qian, W. Jark, and P. Z. Takacs, “The penta-prism LTP: A long-trace-profiler with stationary optical head and moving penta prism,” Rev. Sci. Instrum.66(3), 2562–2569 (1995).
[CrossRef]

Jueptner, W.

T. Bothe, W. Li, C. von Kopylow, and W. Jueptner, “High resolution 3D shape measurement on specular surfaces by fringe reflection,” Proc. SPIE5457, 411–422 (2004).
[CrossRef]

Jüptner, W. P. O.

Kaminski, J.

M. Knauer, J. Kaminski, and G. Hausler, “Phase measuring deflectometry: a new approach to measure specular free form surfaces,” Proc. SPIE5457, 366–376 (2004).
[CrossRef]

Kidani, N.

Kim, J.

Kimura, T.

Knauer, M.

M. Knauer, J. Kaminski, and G. Hausler, “Phase measuring deflectometry: a new approach to measure specular free form surfaces,” Proc. SPIE5457, 366–376 (2004).
[CrossRef]

Kohn, V.

Krzywinski, J.

Lengeler, B.

Levecq, X.

M. Idir, P. Mercere, M. H. Modi, G. Dovillaire, X. Levecq, S. Bucourt, L. Escolano, and P. Sauvageot, “X-ray active mirror coupled with a Hartmann wavefront sensor,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 162–171 (2010).
[CrossRef]

Li, W.

Ligtenberg, F.

F. Ligtenberg, “The moire method, a new experimental method for the determination of moments in small slab models,” Proc. Soc. Exp. Stress Anal.12, 83–98 (1954).

Luu, L.

M. Vo, Z. Wang, L. Luu, and J. Ma, “Advanced geometric camera calibration for machine vision,” Opt. Eng.50(11), 110503 (2011).
[CrossRef]

Ma, J.

M. Vo, Z. Wang, L. Luu, and J. Ma, “Advanced geometric camera calibration for machine vision,” Opt. Eng.50(11), 110503 (2011).
[CrossRef]

Martin, H. M.

P. Su, J. H. Burge, B. Cuerden, R. Allen, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics II,” Proc. SPIE7426, 74260Y, 74260Y-9 (2009).
[CrossRef]

P. Su, J. H. Burge, B. Cuerden, J. Sasian, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics,” Proc. SPIE7018, 70183T, 70183T-10 (2008).
[CrossRef]

Matsuyama, S.

Mercere, P.

M. Idir, P. Mercere, M. H. Modi, G. Dovillaire, X. Levecq, S. Bucourt, L. Escolano, and P. Sauvageot, “X-ray active mirror coupled with a Hartmann wavefront sensor,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 162–171 (2010).
[CrossRef]

Mimura, H.

Modi, M. H.

M. Idir, P. Mercere, M. H. Modi, G. Dovillaire, X. Levecq, S. Bucourt, L. Escolano, and P. Sauvageot, “X-ray active mirror coupled with a Hartmann wavefront sensor,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 162–171 (2010).
[CrossRef]

Montanez, P. A.

Murphy, P. E.

J. Fleig, P. Dumas, P. E. Murphy, and G. W. Forbes, “An automated subapeture stitching interferometer workstation for spherical and aspherical surfaces,” Proc. SPIE5188, 296–307 (2003).
[CrossRef]

Neugebauer, R.

R. Höfling, P. Aswendt, and R. Neugebauer, “Phase reflection—a new solution for the detection of shape defects on car body sheets,” Opt. Eng.39(1), 175 (2000).
[CrossRef]

Nishino, Y.

Oh, C. J.

P. Su, R. E. Parks, Y. Wang, C. J. Oh, and J. H. Burge, “Swing arm optical coordinate-measuring machine: modal estimation of systematic errors from dual probe shear measurements,” Opt. Eng.51(4), 043604 (2012).
[CrossRef]

Parks, R. E.

P. Su, R. E. Parks, Y. Wang, C. J. Oh, and J. H. Burge, “Swing arm optical coordinate-measuring machine: modal estimation of systematic errors from dual probe shear measurements,” Opt. Eng.51(4), 043604 (2012).
[CrossRef]

P. Su, R. E. Parks, L. Wang, R. P. Angel, and J. H. Burge, “Software configurable optical test system: a computerized reverse Hartmann test,” Appl. Opt.49(23), 4404–4412 (2010), http://www.opticsinfobase.org/abstract.cfm?URI=ao-49-23-4404 .
[CrossRef] [PubMed]

Patommel, J.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray nanoprobe at beamline P06 at PETRA III,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 93–97 (2010).
[CrossRef]

Perard, D.

D. Perard and J. Beyerer, “Three-dimensional measurement of specular free-form surfaces with a structured-lighting reflection technique,” Proc. SPIE3204, 74–80 (1997).
[CrossRef]

Qian, S. N.

S. N. Qian, W. Jark, and P. Z. Takacs, “The penta-prism LTP: A long-trace-profiler with stationary optical head and moving penta prism,” Rev. Sci. Instrum.66(3), 2562–2569 (1995).
[CrossRef]

P. Z. Takacs, S. N. Qian, and J. Colbert, “Design of a long trace surface profiler,” Proc. SPIE749, 59–64 (1987).

Reimers, N.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray nanoprobe at beamline P06 at PETRA III,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 93–97 (2010).
[CrossRef]

Rekawa, S.

Ritter, R.

R. Ritter and R. Hahn, “Contribution to analysis of the reflection grating method,” Opt. Lasers Eng.4(1), 13–24 (1983).
[CrossRef]

Samberg, D.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray nanoprobe at beamline P06 at PETRA III,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 93–97 (2010).
[CrossRef]

Sano, Y.

Sasian, J.

P. Su, J. H. Burge, B. Cuerden, J. Sasian, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics,” Proc. SPIE7018, 70183T, 70183T-10 (2008).
[CrossRef]

Sauvageot, P.

M. Idir, P. Mercere, M. H. Modi, G. Dovillaire, X. Levecq, S. Bucourt, L. Escolano, and P. Sauvageot, “X-ray active mirror coupled with a Hartmann wavefront sensor,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 162–171 (2010).
[CrossRef]

Schroer, C. G.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray nanoprobe at beamline P06 at PETRA III,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 93–97 (2010).
[CrossRef]

Schropp, A.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray nanoprobe at beamline P06 at PETRA III,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 93–97 (2010).
[CrossRef]

Schulte, M.

Schwab, A.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray nanoprobe at beamline P06 at PETRA III,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 93–97 (2010).
[CrossRef]

Siewert, F.

Signorato, R.

Snigirev, A.

Snigireva, I.

Souvorov, A.

Stephan, S.

C. G. Schroer, P. Boye, J. M. Feldkamp, J. Patommel, D. Samberg, A. Schropp, A. Schwab, S. Stephan, G. Falkenberg, G. Wellenreuther, and N. Reimers, “Hard X-ray nanoprobe at beamline P06 at PETRA III,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 93–97 (2010).
[CrossRef]

Su, P.

P. Su, R. E. Parks, Y. Wang, C. J. Oh, and J. H. Burge, “Swing arm optical coordinate-measuring machine: modal estimation of systematic errors from dual probe shear measurements,” Opt. Eng.51(4), 043604 (2012).
[CrossRef]

P. Su, R. E. Parks, L. Wang, R. P. Angel, and J. H. Burge, “Software configurable optical test system: a computerized reverse Hartmann test,” Appl. Opt.49(23), 4404–4412 (2010), http://www.opticsinfobase.org/abstract.cfm?URI=ao-49-23-4404 .
[CrossRef] [PubMed]

P. Su, J. H. Burge, B. Cuerden, R. Allen, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics II,” Proc. SPIE7426, 74260Y, 74260Y-9 (2009).
[CrossRef]

P. Su, J. H. Burge, B. Cuerden, J. Sasian, and H. M. Martin, “Scanning pentaprism measurements of off-axis aspherics,” Proc. SPIE7018, 70183T, 70183T-10 (2008).
[CrossRef]

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