Abstract

The spectral properties of La/B, La/B4C, and LaN/B, LaN/B4C multilayer mirrors have been investigated in the 6.5-6.9 nm wavelength range based on measured B and B4C optical constants. Experimentally it is verified to what extent measured and tabulated optical constants are applicable for simulations of the reflectivity of these short period multilayer mirrors. The measured maximum reflectance at various wavelength values around the boron-K absorption edge is compared to calculated values from model systems. The measured reflectance profiles of La/B and La/B4C show a maximum at a slightly larger wavelength than calculations would predict based on the measured B and B4C optical constants. This is explained by the influence of a formed boron-lanthanum compound on the wavelength where the multilayer shows maximum reflectance. The maximum reflectance profiles of LaN/B and LaN/B4C multilayers can be described accurately by using the same boron atomic scattering factors, indicating boron in the LaN/B4C multilayer to be in a similar chemical state as boron in the LaN/B multilayer. It also indicates that nitridation of the La layer in the multilayer prevents the formation of La-B compounds. We show that the optimal wavelength for boron based optics is about 6.65 nm and depends on the B chemical state. Finally, using the measured B optical constants we are able to calculate the spectral response of the multilayers, enabling the prediction of the optimal parameters for the above mentioned multilayers

© 2012 OSA

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    [CrossRef]

2011

E. Louis, A. E. Yakshin, T. Tsarfati, and F. Bijkerk, “Nanometer interface and materials control for multilayer EUV-optical applications,” Prog. Surf. Sci. 86(11-12), 255–294 (2011).
[CrossRef]

2010

D. Ksenzov, C. Schlemper, and U. Pietsch, “Resonant soft x-ray reflectivity of Me/B(4)C multilayers near the boron K edge,” Appl. Opt. 49(25), 4767–4773 (2010).
[CrossRef] [PubMed]

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

2009

S. S. Churilov, R. R. Kildiyarova, A. N. Ryabtsev, and S. V. Sadovsky, “EUV spectra of Gd and Tb ions excited in laser-produced and vacuum spark plasmas,” Phys. Scr. 80(4), 045303 (2009).
[CrossRef]

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

D. Ksenzov, T. Panzner, C. Schlemper, C. Morawe, and U. Pietsch, “Optical properties of boron carbide near the boron K edge evaluated by soft-x-ray reflectometry from a Ru/B(4)C multilayer,” Appl. Opt. 48(35), 6684–6691 (2009).
[CrossRef] [PubMed]

2008

2007

2005

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, and G. Ulm, “Status of EUV reflectometry at PTB,” Proc. SPIE 5751, 749–758 (2005).
[CrossRef]

1998

D. L. Windt, “IMD - Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[CrossRef]

1996

C. Montcalm, P. A. Kearney, J. M. Slaughter, B. T. Sullivan, M. Chaker, H. Pépin, and C. M. Falco, “Survey of Ti-, B-, and Y-based soft x-ray-extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region,” Appl. Opt. 35(25), 5134–5147 (1996).
[CrossRef] [PubMed]

G. H. Kwei and B. Morosin, “Structures of the boron-rich boron carbides from neutron powder diffraction: implications for the nature of the inter-icosahedral chains,” J. Phys. Chem. 100(19), 8031–8039 (1996).
[CrossRef]

1993

A. M. Hawryluk and N. M. Ceglio, “Wavelength considerations in soft-x-ray projection lithography,” Appl. Opt. 32(34), 7062–7067 (1993).
[CrossRef] [PubMed]

B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-Ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54(2), 181–342 (1993).
[CrossRef]

1990

1977

1954

L. G. Parratt, “Surface studies of solids by total reflection of x-rays,” Phys. Rev. 95(2), 359–369 (1954).
[CrossRef]

André, J. M.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

Andreev, S.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Andreev, S. S.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

Aquila, A.

Aquila, A. L.

Aznárez, J. A.

Barysheva, M.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Barysheva, M. M.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

Bijkerk, F.

E. Louis, A. E. Yakshin, T. Tsarfati, and F. Bijkerk, “Nanometer interface and materials control for multilayer EUV-optical applications,” Prog. Surf. Sci. 86(11-12), 255–294 (2011).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

Bridou, F.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

Buchholz, C.

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, and G. Ulm, “Status of EUV reflectometry at PTB,” Proc. SPIE 5751, 749–758 (2005).
[CrossRef]

Ceglio, N. M.

Chaker, M.

Chkhalo, N.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Chkhalo, N. I.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

Churilov, S. S.

S. S. Churilov, R. R. Kildiyarova, A. N. Ryabtsev, and S. V. Sadovsky, “EUV spectra of Gd and Tb ions excited in laser-produced and vacuum spark plasmas,” Phys. Scr. 80(4), 045303 (2009).
[CrossRef]

Davis, J. C.

B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-Ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54(2), 181–342 (1993).
[CrossRef]

Delmotte, F.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

Falco, C. M.

Fernández-Perea, M.

Fierro, J. L. G.

Filatova, E. O.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

Fischer, A.

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, and G. Ulm, “Status of EUV reflectometry at PTB,” Proc. SPIE 5751, 749–758 (2005).
[CrossRef]

Gullikson, E.

Gullikson, E. M.

R. Soufli, A. L. Aquila, F. Salmassi, M. Fernández-Perea, and E. M. Gullikson, “Optical constants of magnetron-sputtered boron carbide thin films from photoabsorption data in the range 30 to 770 eV,” Appl. Opt. 47(25), 4633–4639 (2008).
[CrossRef] [PubMed]

B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-Ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54(2), 181–342 (1993).
[CrossRef]

Gusev, S.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Gusev, S. A.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

Hawryluk, A. M.

Henke, B. L.

B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-Ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54(2), 181–342 (1993).
[CrossRef]

Jerome, A.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

Jonnard, P.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

Kearney, P. A.

Kildiyarova, R. R.

S. S. Churilov, R. R. Kildiyarova, A. N. Ryabtsev, and S. V. Sadovsky, “EUV spectra of Gd and Tb ions excited in laser-produced and vacuum spark plasmas,” Phys. Scr. 80(4), 045303 (2009).
[CrossRef]

Ksenzov, D.

Kwei, G. H.

G. H. Kwei and B. Morosin, “Structures of the boron-rich boron carbides from neutron powder diffraction: implications for the nature of the inter-icosahedral chains,” J. Phys. Chem. 100(19), 8031–8039 (1996).
[CrossRef]

Larruquert, J. I.

Laubis, C.

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, and G. Ulm, “Status of EUV reflectometry at PTB,” Proc. SPIE 5751, 749–758 (2005).
[CrossRef]

Louis, E.

E. Louis, A. E. Yakshin, T. Tsarfati, and F. Bijkerk, “Nanometer interface and materials control for multilayer EUV-optical applications,” Prog. Surf. Sci. 86(11-12), 255–294 (2011).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

Méndez, J. A.

Michaelsen, C.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

Montcalm, C.

Morawe, C.

Morosin, B.

G. H. Kwei and B. Morosin, “Structures of the boron-rich boron carbides from neutron powder diffraction: implications for the nature of the inter-icosahedral chains,” J. Phys. Chem. 100(19), 8031–8039 (1996).
[CrossRef]

Panzner, T.

Parratt, L. G.

L. G. Parratt, “Surface studies of solids by total reflection of x-rays,” Phys. Rev. 95(2), 359–369 (1954).
[CrossRef]

Pépin, H.

Pestov, A.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Pestov, A. E.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

Pietsch, U.

Plöger, S.

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, and G. Ulm, “Status of EUV reflectometry at PTB,” Proc. SPIE 5751, 749–758 (2005).
[CrossRef]

Polkovnikov, V.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Polkovnikov, V. N.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

Ravet, M. F.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

Rogachev, D.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Ryabtsev, A. N.

S. S. Churilov, R. R. Kildiyarova, A. N. Ryabtsev, and S. V. Sadovsky, “EUV spectra of Gd and Tb ions excited in laser-produced and vacuum spark plasmas,” Phys. Scr. 80(4), 045303 (2009).
[CrossRef]

Sadovsky, S. V.

S. S. Churilov, R. R. Kildiyarova, A. N. Ryabtsev, and S. V. Sadovsky, “EUV spectra of Gd and Tb ions excited in laser-produced and vacuum spark plasmas,” Phys. Scr. 80(4), 045303 (2009).
[CrossRef]

Salashchenko, N.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Salashchenko, N. N.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

Salmassi, F.

Schlemper, C.

Scholz, F.

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, and G. Ulm, “Status of EUV reflectometry at PTB,” Proc. SPIE 5751, 749–758 (2005).
[CrossRef]

Scholze, F.

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, and G. Ulm, “Status of EUV reflectometry at PTB,” Proc. SPIE 5751, 749–758 (2005).
[CrossRef]

Shmaenok, L. A.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

Slaughter, J. M.

Soufli, R.

Spiller, E.

Sullivan, B. T.

Tsarfati, T.

E. Louis, A. E. Yakshin, T. Tsarfati, and F. Bijkerk, “Nanometer interface and materials control for multilayer EUV-optical applications,” Prog. Surf. Sci. 86(11-12), 255–294 (2011).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

Ulm, G.

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, and G. Ulm, “Status of EUV reflectometry at PTB,” Proc. SPIE 5751, 749–758 (2005).
[CrossRef]

Vainer, Y.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Vainer, Y. A.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

van de Kruijs, R. W. E.

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

Vidal-Dasilva, M.

Vinogradov, A. V.

Wagner, H.

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, and G. Ulm, “Status of EUV reflectometry at PTB,” Proc. SPIE 5751, 749–758 (2005).
[CrossRef]

Wiesmann, J.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

Windt, D. L.

D. L. Windt, “IMD - Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[CrossRef]

Yakshin, A. E.

E. Louis, A. E. Yakshin, T. Tsarfati, and F. Bijkerk, “Nanometer interface and materials control for multilayer EUV-optical applications,” Prog. Surf. Sci. 86(11-12), 255–294 (2011).
[CrossRef]

Zeldovich, B. Y.

Zoethout, E.

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

Zuev, S.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Zuev, S. Y.

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

Appl. Opt.

At. Data Nucl. Data Tables

B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-Ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54(2), 181–342 (1993).
[CrossRef]

Comput. Phys.

D. L. Windt, “IMD - Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[CrossRef]

J. Opt. Soc. Am. A

J. Phys. Chem.

G. H. Kwei and B. Morosin, “Structures of the boron-rich boron carbides from neutron powder diffraction: implications for the nature of the inter-icosahedral chains,” J. Phys. Chem. 100(19), 8031–8039 (1996).
[CrossRef]

Nucl. Instrum. Methods Phys. Res. A

S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for X-ray range near anomalous dispersion of boron (λ≈6.7nm),” Nucl. Instrum. Methods Phys. Res. A 603(1-2), 80–82 (2009).
[CrossRef]

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L. G. Parratt, “Surface studies of solids by total reflection of x-rays,” Phys. Rev. 95(2), 359–369 (1954).
[CrossRef]

Phys. Scr.

S. S. Churilov, R. R. Kildiyarova, A. N. Ryabtsev, and S. V. Sadovsky, “EUV spectra of Gd and Tb ions excited in laser-produced and vacuum spark plasmas,” Phys. Scr. 80(4), 045303 (2009).
[CrossRef]

Proc. SPIE

F. Scholze, C. Laubis, C. Buchholz, A. Fischer, S. Plöger, F. Scholz, H. Wagner, and G. Ulm, “Status of EUV reflectometry at PTB,” Proc. SPIE 5751, 749–758 (2005).
[CrossRef]

Prog. Surf. Sci.

E. Louis, A. E. Yakshin, T. Tsarfati, and F. Bijkerk, “Nanometer interface and materials control for multilayer EUV-optical applications,” Prog. Surf. Sci. 86(11-12), 255–294 (2011).
[CrossRef]

Tech. Phys.

S. Andreev, M. Barysheva, N. Chkhalo, S. Gusev, A. Pestov, V. Polkovnikov, D. Rogachev, N. Salashchenko, Y. Vainer, and S. Zuev, “Multilayer x-ray mirrors based on La/B4C and La/B9C,” Tech. Phys. 55(8), 1168–1174 (2010).
[CrossRef]

Thin Solid Films

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography,” Thin Solid Films 518(5), 1365–1368 (2009).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films 518(24), 7249–7252 (2010).
[CrossRef]

XRay Spectrom.

J. M. André, P. Jonnard, C. Michaelsen, J. Wiesmann, F. Bridou, M. F. Ravet, A. Jerome, F. Delmotte, and E. O. Filatova, “La/B4C small period multilayer interferential mirror for the analysis of boron,” XRay Spectrom. 34(3), 203–206 (2005).
[CrossRef]

Other

A. V. Vinogradov, I. A. Brytov, A. Ya. Grudskii., M. X. Kogan, and I. V. Kozhevnikov, Zerkal'naya rentgenovskaya optika (X-ray Mirror Optics, Leningrad: Mashinostroenie, 1989).

E. Spiller, Soft X-ray Optics (SPIE Optical Engineering Press, 1994).

Z. Jiang, Toolbox: X-ray Refraction of Matter, MatLab Central, (2004).

E. Gullikson, web site The Center for X-Ray Optics (1995–2010), retrieved http://henke.lbl.gov/optical_constants/ .

D. Ksenzov, “Interaction of femtosecond x-ray pulses with periodical multilayer structures,” (PhD Thesis, Siegen University, Siegen, 2010).

M. Born and E. Wolf, Principles of Optics, 7th ed. (Campridge university press, Cambridge, 2000).

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Figures (3)

Fig. 1
Fig. 1

Boron atomic scattering factors obtained from a B film (B-atomic) [18], a B4C film (B-compound) [19] and the CXRO database [15]

Fig. 2
Fig. 2

Analytical calculation of a perfect La/B4C multilayer for different B4C optical constants, namely – measured B4C optical constants (B-compound) [19], measured B atomic scattering factors used to calculate B4C optical constants (B-atomic) [18] and values calculated from elemental data from ref [15].

Fig. 3
Fig. 3

Normalized maximum reflectance of measured samples and calculations using measured boron and B4C optical constants

Tables (1)

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Table 1 Calculated Parameters of the Optimized Multilayers.

Equations (1)

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n=1δ+iβ δ= r 0 λ 2 2π ρ N A MW i n i f 1 i β= r 0 λ 2 2π ρ N A MW i n i f 2 i

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