Abstract

Two kinds of Al/Zr (Al(1%wtSi)/Zr and Al(Pure)/Zr) multilayers for extreme ultraviolet (EUV) optics were deposited on fluorine doped tin oxide coated glass by using direct–current magnetron sputtering technology. The comparison of the two systems shows that the Al(1%wtSi)/Zr multilayers have the lowest interfacial roughness and highest reflectivity. Based on the X–ray diffraction, the performance of the two systems is determined by the crystallization of Al layer. To fully understand the Al(1%wtSi)/Zr multilayer, we built up a two–layer model to fit situation of the AFM images, and simulate the grazing incident x–ray reflection-measurements of multilayers with various periods (N = 10, 40, 60, 80). Below 40 periods, the roughness components are lowered. After 40 periods, both surface and interfacial roughness increase with the period number, and decrease the reflectance. According to transmission electron microscope images, the model can represent the variable structure of the system.

© 2012 OSA

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  1. D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
    [CrossRef]
  2. A. J. Corso, P. Zuppella, P. Nicolosi, D. L. Windt, E. Gullikson, and M. G. Pelizzo, “Capped Mo/Si multilayers with improved performance at 30.4 nm for future solar missions,” Opt. Express 19(15), 13963–13973 (2011).
    [CrossRef] [PubMed]
  3. S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
    [CrossRef]
  4. D. L. Windt and J. A. Bellotti, “Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications,” Appl. Opt. 48(26), 4932–4941 (2009).
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  6. E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
    [CrossRef]
  7. M.-H. Hu, K. Le Guen, J.-M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
    [CrossRef] [PubMed]
  8. J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
    [CrossRef] [PubMed]
  9. K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
    [CrossRef]
  10. K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
    [CrossRef]
  11. D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
    [CrossRef] [PubMed]
  12. D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).
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  14. J.-K. Ho and K.-L. Lin, “The structures of compositionally modulated multilayer films,” Scr. Metall. Mater. 33(12), 1895–1900 (1995).
    [CrossRef]
  15. J.-K. Ho and K.-L. Lin, “The metastable Al/Zr alloy thin films prepared by alternate sputtering Deposition,” J. Appl. Phys. 75(5), 2434–2440 (1994).
    [CrossRef]
  16. K. J. Blobaum, T. P. Weihs, T. W. Barbee, and M. A. Wall, “Solid state reaction of Al and Zr in Al/Zr multilayers: a calorimetry study,” in Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr (1995).
  17. E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
    [CrossRef]
  18. H. Nii, M. Niibe, H. Kinoshita, and Y. Sugie, “Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm,” J. Synchrotron Radiat. 5(3), 702–704 (1998).
    [CrossRef] [PubMed]
  19. H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe, and H. Kinoshita, “Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering,” Jpn. J. Appl. Phys. 41(Part 1, No. 8), 5338–5341 (2002).
    [CrossRef]
  20. D. G. Stearns, D. P. Gaines, D. W. Sweeney, and E. M. Gullikson, “Nonspecular x-ray scattering in a multilayer-coated imaging system,” J. Appl. Phys. 84(2), 1003–1028 (1998).
    [CrossRef]
  21. M. Trost, S. Schröder, T. Feigl, A. Duparré, and A. Tünnermann, “Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers,” Appl. Opt. 50(9), C148–C153 (2011).
    [CrossRef] [PubMed]
  22. D. L. Windt, “IMD–Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
    [CrossRef]
  23. Q. Yang and L. R. Zhao, “Characterization of nano-layered multilayer coatings using modified Bragg law,” Mater. Charact. 59(9), 1285–1291 (2008).
    [CrossRef]

2011 (6)

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

M. Trost, S. Schröder, T. Feigl, A. Duparré, and A. Tünnermann, “Influence of the substrate finish and thin film roughness on the optical performance of Mo/Si multilayers,” Appl. Opt. 50(9), C148–C153 (2011).
[CrossRef] [PubMed]

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[CrossRef] [PubMed]

A. J. Corso, P. Zuppella, P. Nicolosi, D. L. Windt, E. Gullikson, and M. G. Pelizzo, “Capped Mo/Si multilayers with improved performance at 30.4 nm for future solar missions,” Opt. Express 19(15), 13963–13973 (2011).
[CrossRef] [PubMed]

2010 (4)

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

M.-H. Hu, K. Le Guen, J.-M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[CrossRef] [PubMed]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

2009 (1)

2008 (1)

Q. Yang and L. R. Zhao, “Characterization of nano-layered multilayer coatings using modified Bragg law,” Mater. Charact. 59(9), 1285–1291 (2008).
[CrossRef]

2004 (1)

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

2002 (2)

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe, and H. Kinoshita, “Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering,” Jpn. J. Appl. Phys. 41(Part 1, No. 8), 5338–5341 (2002).
[CrossRef]

1998 (3)

D. G. Stearns, D. P. Gaines, D. W. Sweeney, and E. M. Gullikson, “Nonspecular x-ray scattering in a multilayer-coated imaging system,” J. Appl. Phys. 84(2), 1003–1028 (1998).
[CrossRef]

D. L. Windt, “IMD–Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[CrossRef]

H. Nii, M. Niibe, H. Kinoshita, and Y. Sugie, “Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm,” J. Synchrotron Radiat. 5(3), 702–704 (1998).
[CrossRef] [PubMed]

1997 (1)

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE 7360, 73600O 1–9 (1997).

1995 (1)

J.-K. Ho and K.-L. Lin, “The structures of compositionally modulated multilayer films,” Scr. Metall. Mater. 33(12), 1895–1900 (1995).
[CrossRef]

1994 (1)

J.-K. Ho and K.-L. Lin, “The metastable Al/Zr alloy thin films prepared by alternate sputtering Deposition,” J. Appl. Phys. 75(5), 2434–2440 (1994).
[CrossRef]

1992 (1)

S. B. Qadri, C. Kim, M. Twigg, and D. Moon, “Ion-beam deposition of Zr-Al multilayers and their structural properties,” Surf. Coat. Tech. 54, 335–337 (1992).

Alameda, J. B.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Anderson, E. H.

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[CrossRef] [PubMed]

D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).

André, J.-M.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

M.-H. Hu, K. Le Guen, J.-M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[CrossRef] [PubMed]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE 7360, 73600O 1–9 (1997).

Auchere, F.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

Bajt, S.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Barbee, T. W.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

K. J. Blobaum, T. P. Weihs, T. W. Barbee, and M. A. Wall, “Solid state reaction of Al and Zr in Al/Zr multilayers: a calorimetry study,” in Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr (1995).

Bellotti, J. A.

Blobaum, K. J.

K. J. Blobaum, T. P. Weihs, T. W. Barbee, and M. A. Wall, “Solid state reaction of Al and Zr in Al/Zr multilayers: a calorimetry study,” in Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr (1995).

Bourassin-Bouchet, Ch.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

Bridou, F.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

Cabrini, S.

Cambie, R.

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[CrossRef] [PubMed]

D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).

Clift, W. M.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Corso, A. J.

De Rossi, S.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

Delmotte, F.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

M.-H. Hu, K. Le Guen, J.-M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[CrossRef] [PubMed]

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE 7360, 73600O 1–9 (1997).

DeLuca, E.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Dhuey, S. D.

Donguy, S.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Duparré, A.

Feigl, T.

Folta, J. A.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Gaines, D. P.

D. G. Stearns, D. P. Gaines, D. W. Sweeney, and E. M. Gullikson, “Nonspecular x-ray scattering in a multilayer-coated imaging system,” J. Appl. Phys. 84(2), 1003–1028 (1998).
[CrossRef]

Galtayries, A.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

M.-H. Hu, K. Le Guen, J.-M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[CrossRef] [PubMed]

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE 7360, 73600O 1–9 (1997).

Golub, L.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Goray, L. I.

Guen, K. L.

Gullikson, E.

Gullikson, E. M.

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[CrossRef] [PubMed]

D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

D. G. Stearns, D. P. Gaines, D. W. Sweeney, and E. M. Gullikson, “Nonspecular x-ray scattering in a multilayer-coated imaging system,” J. Appl. Phys. 84(2), 1003–1028 (1998).
[CrossRef]

Hecquet, C.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE 7360, 73600O 1–9 (1997).

Ho, J.-K.

J.-K. Ho and K.-L. Lin, “The structures of compositionally modulated multilayer films,” Scr. Metall. Mater. 33(12), 1895–1900 (1995).
[CrossRef]

J.-K. Ho and K.-L. Lin, “The metastable Al/Zr alloy thin films prepared by alternate sputtering Deposition,” J. Appl. Phys. 75(5), 2434–2440 (1994).
[CrossRef]

Hu, M.-H.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

M.-H. Hu, K. Le Guen, J.-M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[CrossRef] [PubMed]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE 7360, 73600O 1–9 (1997).

Huang, Q.

Jérome, A.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

Jonnard, P.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

M.-H. Hu, K. Le Guen, J.-M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[CrossRef] [PubMed]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. L. Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt. 49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE 7360, 73600O 1–9 (1997).

Kaufmann, B.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Kim, C.

S. B. Qadri, C. Kim, M. Twigg, and D. Moon, “Ion-beam deposition of Zr-Al multilayers and their structural properties,” Surf. Coat. Tech. 54, 335–337 (1992).

Kinoshita, H.

H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe, and H. Kinoshita, “Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering,” Jpn. J. Appl. Phys. 41(Part 1, No. 8), 5338–5341 (2002).
[CrossRef]

H. Nii, M. Niibe, H. Kinoshita, and Y. Sugie, “Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm,” J. Synchrotron Radiat. 5(3), 702–704 (1998).
[CrossRef] [PubMed]

Kjornrattanawanich, B.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Le Guen, K.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

M.-H. Hu, K. Le Guen, J.-M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[CrossRef] [PubMed]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE 7360, 73600O 1–9 (1997).

Li, H.

Li, H. Ch.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

Lin, K.-L.

J.-K. Ho and K.-L. Lin, “The structures of compositionally modulated multilayer films,” Scr. Metall. Mater. 33(12), 1895–1900 (1995).
[CrossRef]

J.-K. Ho and K.-L. Lin, “The metastable Al/Zr alloy thin films prepared by alternate sputtering Deposition,” J. Appl. Phys. 75(5), 2434–2440 (1994).
[CrossRef]

Matsuo, Y.

H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe, and H. Kinoshita, “Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering,” Jpn. J. Appl. Phys. 41(Part 1, No. 8), 5338–5341 (2002).
[CrossRef]

Meltchakov, E.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

M.-H. Hu, K. Le Guen, J.-M. André, P. Jonnard, E. Meltchakov, F. Delmotte, and A. Galtayries, “Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light,” Opt. Express 18(19), 20019–20028 (2010).
[CrossRef] [PubMed]

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE 7360, 73600O 1–9 (1997).

Menesguen, Y.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

Meny, C.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

Miyagawa, M.

H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe, and H. Kinoshita, “Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering,” Jpn. J. Appl. Phys. 41(Part 1, No. 8), 5338–5341 (2002).
[CrossRef]

Moon, D.

S. B. Qadri, C. Kim, M. Twigg, and D. Moon, “Ion-beam deposition of Zr-Al multilayers and their structural properties,” Surf. Coat. Tech. 54, 335–337 (1992).

Nicolosi, P.

Nii, H.

H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe, and H. Kinoshita, “Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering,” Jpn. J. Appl. Phys. 41(Part 1, No. 8), 5338–5341 (2002).
[CrossRef]

H. Nii, M. Niibe, H. Kinoshita, and Y. Sugie, “Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm,” J. Synchrotron Radiat. 5(3), 702–704 (1998).
[CrossRef] [PubMed]

Niibe, M.

H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe, and H. Kinoshita, “Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering,” Jpn. J. Appl. Phys. 41(Part 1, No. 8), 5338–5341 (2002).
[CrossRef]

H. Nii, M. Niibe, H. Kinoshita, and Y. Sugie, “Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm,” J. Synchrotron Radiat. 5(3), 702–704 (1998).
[CrossRef] [PubMed]

Padmore, H. A.

D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[CrossRef] [PubMed]

Pelizzo, M. G.

Qadri, S. B.

S. B. Qadri, C. Kim, M. Twigg, and D. Moon, “Ion-beam deposition of Zr-Al multilayers and their structural properties,” Surf. Coat. Tech. 54, 335–337 (1992).

Ravet-Krill, M.-F.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

Rossi, S.

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

Roulliay, M.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

Salmassi, F.

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[CrossRef] [PubMed]

D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).

Schröder, S.

Seely, J.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Spiller, E. A.

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Stearns, D. G.

D. G. Stearns, D. P. Gaines, D. W. Sweeney, and E. M. Gullikson, “Nonspecular x-ray scattering in a multilayer-coated imaging system,” J. Appl. Phys. 84(2), 1003–1028 (1998).
[CrossRef]

Sugie, Y.

H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe, and H. Kinoshita, “Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering,” Jpn. J. Appl. Phys. 41(Part 1, No. 8), 5338–5341 (2002).
[CrossRef]

H. Nii, M. Niibe, H. Kinoshita, and Y. Sugie, “Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm,” J. Synchrotron Radiat. 5(3), 702–704 (1998).
[CrossRef] [PubMed]

Sweeney, D. W.

D. G. Stearns, D. P. Gaines, D. W. Sweeney, and E. M. Gullikson, “Nonspecular x-ray scattering in a multilayer-coated imaging system,” J. Appl. Phys. 84(2), 1003–1028 (1998).
[CrossRef]

Trost, M.

Tünnermann, A.

Twigg, M.

S. B. Qadri, C. Kim, M. Twigg, and D. Moon, “Ion-beam deposition of Zr-Al multilayers and their structural properties,” Surf. Coat. Tech. 54, 335–337 (1992).

Varniere, F.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

Voronov, D. L.

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[CrossRef] [PubMed]

D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).

Wall, M. A.

K. J. Blobaum, T. P. Weihs, T. W. Barbee, and M. A. Wall, “Solid state reaction of Al and Zr in Al/Zr multilayers: a calorimetry study,” in Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr (1995).

Walton, C. C.

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

Wang, Z.

Wang, Z. S.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

Warwick, T.

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[CrossRef] [PubMed]

D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).

Weihs, T. P.

K. J. Blobaum, T. P. Weihs, T. W. Barbee, and M. A. Wall, “Solid state reaction of Al and Zr in Al/Zr multilayers: a calorimetry study,” in Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr (1995).

Windt, D. L.

A. J. Corso, P. Zuppella, P. Nicolosi, D. L. Windt, E. Gullikson, and M. G. Pelizzo, “Capped Mo/Si multilayers with improved performance at 30.4 nm for future solar missions,” Opt. Express 19(15), 13963–13973 (2011).
[CrossRef] [PubMed]

D. L. Windt and J. A. Bellotti, “Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications,” Appl. Opt. 48(26), 4932–4941 (2009).
[CrossRef] [PubMed]

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

D. L. Windt, “IMD–Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[CrossRef]

Yang, Q.

Q. Yang and L. R. Zhao, “Characterization of nano-layered multilayer coatings using modified Bragg law,” Mater. Charact. 59(9), 1285–1291 (2008).
[CrossRef]

Yashchuk, V. V.

D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).

D. L. Voronov, E. H. Anderson, R. Cambie, S. Cabrini, S. D. Dhuey, L. I. Goray, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “A 10,000 groove/mm multilayer coated grating for EUV spectroscopy,” Opt. Express 19(7), 6320–6325 (2011).
[CrossRef] [PubMed]

Zhang, X.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

Zhao, L. R.

Q. Yang and L. R. Zhao, “Characterization of nano-layered multilayer coatings using modified Bragg law,” Mater. Charact. 59(9), 1285–1291 (2008).
[CrossRef]

Zhou, S.

Zhou, S. K.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

Zhu, J.

Zhu, J. T.

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

Ziani, A.

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

Zuppella, P.

Appl. Opt. (3)

Appl. Phys. Lett. (1)

K. Le Guen, M.-H. Hu, J.-M. André, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, C. Meny, A. Galtayries, and P. Jonnard, “Observation of an asymmetrical effect when introducing Zr in Mg/Co multilayers,” Appl. Phys. Lett. 98(25), 251909 (2011).
[CrossRef]

Appl. Phys., A Mater. Sci. Process. (1)

E. Meltchakov, C. Hecquet, M. Roulliay, S. Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, and F. Delmotte, “Development of Al-based multilayer optics for EUV,” Appl. Phys., A Mater. Sci. Process. 98(1), 111–117 (2010).
[CrossRef]

Comput. Phys. (1)

D. L. Windt, “IMD–Software for modeling the optical properties of multilayer films,” Comput. Phys. 12(4), 360–370 (1998).
[CrossRef]

J. Appl. Phys. (2)

J.-K. Ho and K.-L. Lin, “The metastable Al/Zr alloy thin films prepared by alternate sputtering Deposition,” J. Appl. Phys. 75(5), 2434–2440 (1994).
[CrossRef]

D. G. Stearns, D. P. Gaines, D. W. Sweeney, and E. M. Gullikson, “Nonspecular x-ray scattering in a multilayer-coated imaging system,” J. Appl. Phys. 84(2), 1003–1028 (1998).
[CrossRef]

J. Phys. Chem. C (1)

K. Le Guen, M.-H. Hu, J.-M. André, P. Jonnard, S. K. Zhou, H. Ch. Li, J. T. Zhu, Z. S. Wang, and C. Meny, “Development and interfacial characterization of Co/Mg periodic multilayers for the EUV range,” J. Phys. Chem. C 114(14), 6484–6490 (2010).
[CrossRef]

J. Synchrotron Radiat. (1)

H. Nii, M. Niibe, H. Kinoshita, and Y. Sugie, “Fabrication of Mo/Al multilayer films for a wavelength of 18.5 nm,” J. Synchrotron Radiat. 5(3), 702–704 (1998).
[CrossRef] [PubMed]

Jpn. J. Appl. Phys. (1)

H. Nii, M. Miyagawa, Y. Matsuo, Y. Sugie, M. Niibe, and H. Kinoshita, “Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering,” Jpn. J. Appl. Phys. 41(Part 1, No. 8), 5338–5341 (2002).
[CrossRef]

Mater. Charact. (1)

Q. Yang and L. R. Zhao, “Characterization of nano-layered multilayer coatings using modified Bragg law,” Mater. Charact. 59(9), 1285–1291 (2008).
[CrossRef]

Opt. Eng. (1)

S. Bajt, J. B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo-Si multilayers,” Opt. Eng. 41(8), 1797–1804 (2002).
[CrossRef]

Opt. Express (3)

Proc. SPIE (4)

P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, E. Meltchakov, C. Hecquet, F. Delmotte, and A. Galtayries, “Optical, chemical and depth characterization of Al/SiC periodic multilayers,” Proc. SPIE 7360, 73600O 1–9 (1997).

D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, E. M. Gullikson, C. C. Walton, L. Golub, and E. DeLuca, “EUV Multilayers for Solar Physics,” Proc. SPIE 5168, 1–11 (2004).
[CrossRef]

D. L. Voronov, E. H. Anderson, R. Cambie, E. M. Gullikson, F. Salmassi, T. Warwick, V. V. Yashchuk, and H. A. Padmore, “Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates,” Proc. SPIE 8139, 81390B 1–10 (2011).

E. Meltchakov, A. Ziani, F. Auchere, X. Zhang, M. Roulliay, S. De Rossi, Ch. Bourassin-Bouchet, A. Jérome, F. Bridou, F. Varniere, and F. Delmotte, “EUV reflectivity and stability of tri-component Al-based multilayers,” Proc. SPIE 8168, 816819, 816819-9 (2011).
[CrossRef]

Scr. Metall. Mater. (1)

J.-K. Ho and K.-L. Lin, “The structures of compositionally modulated multilayer films,” Scr. Metall. Mater. 33(12), 1895–1900 (1995).
[CrossRef]

Surf. Coat. Tech. (1)

S. B. Qadri, C. Kim, M. Twigg, and D. Moon, “Ion-beam deposition of Zr-Al multilayers and their structural properties,” Surf. Coat. Tech. 54, 335–337 (1992).

Other (1)

K. J. Blobaum, T. P. Weihs, T. W. Barbee, and M. A. Wall, “Solid state reaction of Al and Zr in Al/Zr multilayers: a calorimetry study,” in Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr (1995).

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Figures (5)

Fig. 1
Fig. 1

Grazing incidence x–ray reflectivity curves of two multilayer types. a: Al(1%wtSi)/Zr (40 periods, red line) and Al(Pure)/Zr (40 periods, blue line); b: Al(1%wtSi)/Zr (60 periods, red line) and Al(Pure)/Zr (60 periods, blue line).

Fig. 2
Fig. 2

(a) Calculated reflectivity around 18 nm for Al(1%wtSi)/Zr, Al(Pure)/Zr and Mo/Si multilayers at normal incidence (points), the curves of experiment for Al (1%wtSi)/Zr (red solid line) and Al (Pure)/Zr (blue line and symbol) are also present; (b) diffraction curves of the samples of Al(1%wtSi)/Zr(red line) and Al(Pure)/Zr(blue line) with different period numbers(40, 60).

Fig. 3
Fig. 3

AFM images of Al (1%wtSi)/Zr multilayer films with various layers, N10(a), N40(b), N60(c), N80(d).

Fig. 4
Fig. 4

(a) X-ray reflectivity measurements color curve (blue line) of the different period number and curves obtained by a fitting calculation (red line); (b) Transmission electron micrograph of the Al (1%wtSi)/Zr multilayer (N120) obtained with low magnification.

Fig. 5
Fig. 5

High magnification transmission electron micrographs and selected area electron diffraction pattern used to observed the cross-section of Al(1%wtSi)/Zr multilayer (N120). The micrographs and SAED patterns of the periods N = 80 (a, d, g), N = 60 (b, e, h) and N = 40 (c, f, i) are shown in the figure.

Tables (1)

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Table 1 Theoretical parameters of different multilayers are derived from the Fig. 2(a).

Equations (1)

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σ=B1+A1exp(N/C1),0<N40=B2+A2exp(N/C2),N>40

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