Abstract

We demonstrate coupling from tapered optical fibers to 450 nm by 250 nm silicon strip waveguides using compact cantilever couplers. The couplers consist of silicon inverse width tapers embedded within silicon dioxide cantilevers. Finite difference time domain simulations are used to design the length of the silicon inverse width taper to as short as 6.5 μm for a cantilever width of 2 μm. Modeling of various strip waveguide taper profiles shows reduced coupling losses for a quadratic taper profile. Infrared measurements of fabricated devices demonstrate average coupling losses of 0.62 dB per connection for the quasi-TE mode and 0.50 dB per connection for the quasi-TM mode across the optical telecommunications C band. In the wavelength range from 1477 nm to 1580 nm, coupling losses for both polarizations are less than 1 dB per connection. The compact, broadband, and low-loss coupling scheme enables direct access to photonic integrated circuits on an entire chip surface without the need for dicing or cleaving the chip.

© 2011 OSA

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  1. R. Soref, “The past, present, and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
    [CrossRef]
  2. T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
    [CrossRef]
  3. S. J. McNab, N. Moll, and Y. A. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11(22), 2927–2939 (2003).
    [CrossRef] [PubMed]
  4. V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
    [CrossRef] [PubMed]
  5. K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30(5), 498–500 (2005).
    [CrossRef] [PubMed]
  6. G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17(12), 2613–2615 (2005).
    [CrossRef]
  7. T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
    [CrossRef]
  8. J. V. Galán, P. Sanchis, G. Sánchez, and J. Martí, “Polarization insensitive low-loss coupling technique between SOI waveguides and high mode field diameter single-mode fibers,” Opt. Express 15(11), 7058–7065 (2007).
    [CrossRef] [PubMed]
  9. H. Sun, A. Chen, A. Szep, and L. R. Dalton, “Efficient fiber coupler for vertical silicon slot waveguides,” Opt. Express 17(25), 22571–22577 (2009).
    [CrossRef] [PubMed]
  10. T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86(4-6), 1117–1119 (2009).
    [CrossRef]
  11. Q. Fang, T.-Y. Liow, J. F. Song, C. W. Tan, M. B. Yu, G. Q. Lo, and D.-L. Kwong, “Suspended optical fiber-to-waveguide mode size converter for silicon photonics,” Opt. Express 18(8), 7763–7769 (2010).
    [CrossRef] [PubMed]
  12. M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283(19), 3678–3682 (2010).
    [CrossRef]
  13. B. Ben Bakir, A. V. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers,” IEEE Photon. Technol. Lett. 22(11), 739–741 (2010).
    [CrossRef]
  14. L. Chen, C. R. Doerr, Y.-K. Chen, and T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
    [CrossRef]
  15. D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
    [CrossRef]
  16. G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13(19), 7374–7379 (2005).
    [CrossRef] [PubMed]
  17. P. Cheben, S. Janz, D.-X. Xu, B. Lamontagne, A. Delâge, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18(1), 13–15 (2006).
    [CrossRef]
  18. L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fédéli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24(10), 3810–3815 (2006).
    [CrossRef]
  19. F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
    [CrossRef]
  20. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
    [CrossRef] [PubMed]
  21. Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits,” Opt. Lett. 35(8), 1290–1292 (2010).
    [CrossRef] [PubMed]
  22. P. Sun and R. M. Reano, “Cantilever couplers for intra-chip coupling to silicon photonic integrated circuits,” Opt. Express 17(6), 4565–4574 (2009).
    [CrossRef] [PubMed]
  23. P. Sun and R. M. Reano, “Vertical chip-to-chip coupling between silicon photonic integrated circuits using cantilever couplers,” Opt. Express 19(5), 4722–4727 (2011).
    [CrossRef] [PubMed]
  24. D. Pozar, Microwave Engineering (John Wiley & Sons, 2005).
  25. O. Mitomi, K. Kasaya, and H. Miyazawa, “Design of a single-mode tapered waveguide for low-loss chip-to-fiber coupling,” IEEE J. Quantum Electron. 30(8), 1787–1793 (1994).
    [CrossRef]
  26. T. Alder, A. Stöhr, R. Heinzelmann, and D. Jäger, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12(8), 1016–1018 (2000).
    [CrossRef]

2011 (1)

2010 (6)

Q. Fang, T.-Y. Liow, J. F. Song, C. W. Tan, M. B. Yu, G. Q. Lo, and D.-L. Kwong, “Suspended optical fiber-to-waveguide mode size converter for silicon photonics,” Opt. Express 18(8), 7763–7769 (2010).
[CrossRef] [PubMed]

Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits,” Opt. Lett. 35(8), 1290–1292 (2010).
[CrossRef] [PubMed]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[CrossRef] [PubMed]

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283(19), 3678–3682 (2010).
[CrossRef]

B. Ben Bakir, A. V. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers,” IEEE Photon. Technol. Lett. 22(11), 739–741 (2010).
[CrossRef]

L. Chen, C. R. Doerr, Y.-K. Chen, and T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[CrossRef]

2009 (3)

2007 (2)

2006 (3)

L. Vivien, D. Pascal, S. Lardenois, D. Marris-Morini, E. Cassan, F. Grillot, S. Laval, J.-M. Fédéli, and L. El Melhaoui, “Light injection in SOI microwaveguides using high-efficiency grating couplers,” J. Lightwave Technol. 24(10), 3810–3815 (2006).
[CrossRef]

P. Cheben, S. Janz, D.-X. Xu, B. Lamontagne, A. Delâge, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18(1), 13–15 (2006).
[CrossRef]

R. Soref, “The past, present, and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[CrossRef]

2005 (4)

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17(12), 2613–2615 (2005).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

K. K. Lee, D. R. Lim, D. Pan, C. Hoepfner, W.-Y. Oh, K. Wada, L. C. Kimerling, K. P. Yap, and M. T. Doan, “Mode transformer for miniaturized optical circuits,” Opt. Lett. 30(5), 498–500 (2005).
[CrossRef] [PubMed]

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13(19), 7374–7379 (2005).
[CrossRef] [PubMed]

2003 (2)

2002 (2)

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

2000 (1)

T. Alder, A. Stöhr, R. Heinzelmann, and D. Jäger, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12(8), 1016–1018 (2000).
[CrossRef]

1994 (1)

O. Mitomi, K. Kasaya, and H. Miyazawa, “Design of a single-mode tapered waveguide for low-loss chip-to-fiber coupling,” IEEE J. Quantum Electron. 30(8), 1787–1793 (1994).
[CrossRef]

Absil, P.

Alder, T.

T. Alder, A. Stöhr, R. Heinzelmann, and D. Jäger, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12(8), 1016–1018 (2000).
[CrossRef]

Almeida, V. R.

Atta, R.

Ayre, M.

Baets, R.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17(12), 2613–2615 (2005).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Ben Bakir, B.

B. Ben Bakir, A. V. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers,” IEEE Photon. Technol. Lett. 22(11), 739–741 (2010).
[CrossRef]

Bienstman, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Bogaerts, W.

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[CrossRef] [PubMed]

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17(12), 2613–2615 (2005).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Bolten, J.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86(4-6), 1117–1119 (2009).
[CrossRef]

Cassan, E.

Cheben, P.

P. Cheben, S. Janz, D.-X. Xu, B. Lamontagne, A. Delâge, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18(1), 13–15 (2006).
[CrossRef]

Chen, A.

Chen, L.

L. Chen, C. R. Doerr, Y.-K. Chen, and T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[CrossRef]

Chen, Y.-K.

L. Chen, C. R. Doerr, Y.-K. Chen, and T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[CrossRef]

Dalton, L. R.

de Gyves, A. V.

B. Ben Bakir, A. V. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers,” IEEE Photon. Technol. Lett. 22(11), 739–741 (2010).
[CrossRef]

De Mesel, K.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Delâge, A.

P. Cheben, S. Janz, D.-X. Xu, B. Lamontagne, A. Delâge, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18(1), 13–15 (2006).
[CrossRef]

Doan, M. T.

Doerr, C. R.

L. Chen, C. R. Doerr, Y.-K. Chen, and T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[CrossRef]

Dumon, P.

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17(12), 2613–2615 (2005).
[CrossRef]

El Melhaoui, L.

Ensell, G.

Evans, A. G. R.

Fang, Q.

Fedeli, J.-M.

B. Ben Bakir, A. V. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers,” IEEE Photon. Technol. Lett. 22(11), 739–741 (2010).
[CrossRef]

Fédéli, J.-M.

Först, M.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86(4-6), 1117–1119 (2009).
[CrossRef]

Fukuda, H.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

Galán, J. V.

Grillot, F.

He, S.

Headley, W.

Heinzelmann, R.

T. Alder, A. Stöhr, R. Heinzelmann, and D. Jäger, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12(8), 1016–1018 (2000).
[CrossRef]

Hoepfner, C.

Hvam, J. M.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283(19), 3678–3682 (2010).
[CrossRef]

Itabashi, S.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

Jäger, D.

T. Alder, A. Stöhr, R. Heinzelmann, and D. Jäger, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12(8), 1016–1018 (2000).
[CrossRef]

Janz, S.

P. Cheben, S. Janz, D.-X. Xu, B. Lamontagne, A. Delâge, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18(1), 13–15 (2006).
[CrossRef]

Kasaya, K.

O. Mitomi, K. Kasaya, and H. Miyazawa, “Design of a single-mode tapered waveguide for low-loss chip-to-fiber coupling,” IEEE J. Quantum Electron. 30(8), 1787–1793 (1994).
[CrossRef]

Kimerling, L. C.

Krauss, T. F.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Kurz, H.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86(4-6), 1117–1119 (2009).
[CrossRef]

Kwong, D.-L.

Lamontagne, B.

P. Cheben, S. Janz, D.-X. Xu, B. Lamontagne, A. Delâge, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18(1), 13–15 (2006).
[CrossRef]

Lardenois, S.

Laval, S.

Lee, K. K.

Lepage, G.

Lim, D. R.

Liow, T.-Y.

Q. Fang, T.-Y. Liow, J. F. Song, C. W. Tan, M. B. Yu, G. Q. Lo, and D.-L. Kwong, “Suspended optical fiber-to-waveguide mode size converter for silicon photonics,” Opt. Express 18(8), 7763–7769 (2010).
[CrossRef] [PubMed]

L. Chen, C. R. Doerr, Y.-K. Chen, and T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[CrossRef]

Lipson, M.

Liu, L.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283(19), 3678–3682 (2010).
[CrossRef]

Lo, G. Q.

Lyan, P.

B. Ben Bakir, A. V. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers,” IEEE Photon. Technol. Lett. 22(11), 739–741 (2010).
[CrossRef]

Marris-Morini, D.

Martí, J.

Masanovic, G. Z.

McNab, S. J.

Mitomi, O.

O. Mitomi, K. Kasaya, and H. Miyazawa, “Design of a single-mode tapered waveguide for low-loss chip-to-fiber coupling,” IEEE J. Quantum Electron. 30(8), 1787–1793 (1994).
[CrossRef]

Miyazawa, H.

O. Mitomi, K. Kasaya, and H. Miyazawa, “Design of a single-mode tapered waveguide for low-loss chip-to-fiber coupling,” IEEE J. Quantum Electron. 30(8), 1787–1793 (1994).
[CrossRef]

Moerman, I.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Moll, N.

Mollenhauer, T.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86(4-6), 1117–1119 (2009).
[CrossRef]

Morita, H.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

Oh, W.-Y.

Orobtchouk, R.

B. Ben Bakir, A. V. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers,” IEEE Photon. Technol. Lett. 22(11), 739–741 (2010).
[CrossRef]

Ou, H.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283(19), 3678–3682 (2010).
[CrossRef]

Pan, D.

Panepucci, R. R.

Pascal, D.

Passaro, V. M. N.

Porzier, C.

B. Ben Bakir, A. V. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers,” IEEE Photon. Technol. Lett. 22(11), 739–741 (2010).
[CrossRef]

Pu, M.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283(19), 3678–3682 (2010).
[CrossRef]

Reano, R. M.

Reed, G. T.

Roelkens, G.

Roman, A.

B. Ben Bakir, A. V. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers,” IEEE Photon. Technol. Lett. 22(11), 739–741 (2010).
[CrossRef]

Sánchez, G.

Sanchis, P.

Schrauwen, J.

Selvaraja, S.

Shoji, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

Song, J. F.

Soref, R.

R. Soref, “The past, present, and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[CrossRef]

Stöhr, A.

T. Alder, A. Stöhr, R. Heinzelmann, and D. Jäger, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12(8), 1016–1018 (2000).
[CrossRef]

Sun, H.

Sun, P.

Szep, A.

Taillaert, D.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[CrossRef]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Takahashi, J.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

Takahashi, M.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

Tamechika, E.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

Tan, C. W.

Tanev, S.

P. Cheben, S. Janz, D.-X. Xu, B. Lamontagne, A. Delâge, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18(1), 13–15 (2006).
[CrossRef]

Tang, Y.

Timotijevic, B.

Tsai, W. S.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86(4-6), 1117–1119 (2009).
[CrossRef]

Tsuchizawa, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

Van Daele, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Van Laere, F.

Van Thourhout, D.

Verheyen, P.

Vermeulen, D.

Verstuyft, S.

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

Vivien, L.

Vlasov, Y. A.

Wada, K.

Wahlbrink, T.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86(4-6), 1117–1119 (2009).
[CrossRef]

Waldow, M.

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86(4-6), 1117–1119 (2009).
[CrossRef]

Wang, Z.

Watanabe, T.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

Westergren, U.

Wosinski, L.

Xu, D.-X.

P. Cheben, S. Janz, D.-X. Xu, B. Lamontagne, A. Delâge, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18(1), 13–15 (2006).
[CrossRef]

Yamada, K.

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

Yap, K. P.

Yu, M. B.

Yvind, K.

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283(19), 3678–3682 (2010).
[CrossRef]

Electron. Lett. (1)

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[CrossRef]

IEEE J. Quantum Electron. (2)

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[CrossRef]

O. Mitomi, K. Kasaya, and H. Miyazawa, “Design of a single-mode tapered waveguide for low-loss chip-to-fiber coupling,” IEEE J. Quantum Electron. 30(8), 1787–1793 (1994).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (2)

R. Soref, “The past, present, and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[CrossRef]

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, and H. Morita, “Microphotonics devices based on silicon microfabrication technology,” IEEE J. Sel. Top. Quantum Electron. 11(1), 232–240 (2005).
[CrossRef]

IEEE Photon. Technol. Lett. (5)

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” IEEE Photon. Technol. Lett. 17(12), 2613–2615 (2005).
[CrossRef]

P. Cheben, S. Janz, D.-X. Xu, B. Lamontagne, A. Delâge, and S. Tanev, “A broad-band waveguide grating coupler with a subwavelength grating mirror,” IEEE Photon. Technol. Lett. 18(1), 13–15 (2006).
[CrossRef]

T. Alder, A. Stöhr, R. Heinzelmann, and D. Jäger, “High-efficiency fiber-to-chip coupling using low-loss tapered single-mode fiber,” IEEE Photon. Technol. Lett. 12(8), 1016–1018 (2000).
[CrossRef]

B. Ben Bakir, A. V. de Gyves, R. Orobtchouk, P. Lyan, C. Porzier, A. Roman, and J.-M. Fedeli, “Low-loss (<1 dB) and polarization-insensitive edge fiber couplers fabricated on 200-mm silicon-on-insulator wafers,” IEEE Photon. Technol. Lett. 22(11), 739–741 (2010).
[CrossRef]

L. Chen, C. R. Doerr, Y.-K. Chen, and T.-Y. Liow, “Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[CrossRef]

J. Lightwave Technol. (2)

Microelectron. Eng. (1)

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, and H. Kurz, “Fabrication of high efficiency SOI taper structures,” Microelectron. Eng. 86(4-6), 1117–1119 (2009).
[CrossRef]

Opt. Commun. (1)

M. Pu, L. Liu, H. Ou, K. Yvind, and J. M. Hvam, “Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguide,” Opt. Commun. 283(19), 3678–3682 (2010).
[CrossRef]

Opt. Express (8)

G. Z. Masanovic, G. T. Reed, W. Headley, B. Timotijevic, V. M. N. Passaro, R. Atta, G. Ensell, and A. G. R. Evans, “A high efficiency input/output coupler for small silicon photonic devices,” Opt. Express 13(19), 7374–7379 (2005).
[CrossRef] [PubMed]

S. J. McNab, N. Moll, and Y. A. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11(22), 2927–2939 (2003).
[CrossRef] [PubMed]

J. V. Galán, P. Sanchis, G. Sánchez, and J. Martí, “Polarization insensitive low-loss coupling technique between SOI waveguides and high mode field diameter single-mode fibers,” Opt. Express 15(11), 7058–7065 (2007).
[CrossRef] [PubMed]

P. Sun and R. M. Reano, “Cantilever couplers for intra-chip coupling to silicon photonic integrated circuits,” Opt. Express 17(6), 4565–4574 (2009).
[CrossRef] [PubMed]

H. Sun, A. Chen, A. Szep, and L. R. Dalton, “Efficient fiber coupler for vertical silicon slot waveguides,” Opt. Express 17(25), 22571–22577 (2009).
[CrossRef] [PubMed]

Q. Fang, T.-Y. Liow, J. F. Song, C. W. Tan, M. B. Yu, G. Q. Lo, and D.-L. Kwong, “Suspended optical fiber-to-waveguide mode size converter for silicon photonics,” Opt. Express 18(8), 7763–7769 (2010).
[CrossRef] [PubMed]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[CrossRef] [PubMed]

P. Sun and R. M. Reano, “Vertical chip-to-chip coupling between silicon photonic integrated circuits using cantilever couplers,” Opt. Express 19(5), 4722–4727 (2011).
[CrossRef] [PubMed]

Opt. Lett. (3)

Other (1)

D. Pozar, Microwave Engineering (John Wiley & Sons, 2005).

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Figures (11)

Fig. 1
Fig. 1

(Color online) Diagram of the cantilever coupler. In the diagram, the top cladding is made to be transparent in order to make visible the embedded inverse width taper silicon waveguide. Light from a tapered optical fiber is coupled into a 450 nm × 250 nm cross-section silicon strip waveguide via the cantilever coupler.

Fig. 2
Fig. 2

(Color online) Cross-sectional schematic of the cantilever coupler. The width and height of the silicon inverse width taper core are denoted wt and ht, respectively. The width of the cantilever coupler is denoted wc, the width of the air gap is denoted wg, the width of the top bump is denoted wb, the height of the bottom cladding of the cantilever is denoted ho and the height of the top cladding is denoted hp.

Fig. 3
Fig. 3

(Color online) FDTD modeling results of coupling loss versus quadratic inverse width taper length L2. A sharp reduction in coupling loss occurs for tapers longer than 6 μm. (L1 = L2 + 1 μm, wt,start = 60 nm, wt,end = 450 nm, ht = 250 nm, wc, = 2 μm, ho = 1 μm, hp = 1.1 μm, wg = 5 μm).

Fig. 4
Fig. 4

(Color online) FDTD modeling results of coupling loss versus cantilever width, wc, for a quadratic inverse width taper length, L2, equal to 6.5 μm. (L1 = L2 + 1 μm, wt,start = 60 nm, wt,end = 450 nm, ht = 250 nm, ho = 1 μm, hp = 1.1 μm, wg = 5 μm).

Fig. 5
Fig. 5

(Color online) FDTD modeling results of quasi-TE mode coupling loss using the profile of the inverse width taper as a parameter: (a) Waveguide width for each taper profile as a function of longitudinal coordinate along the direction of propagation (normalized to length L2); (b) Coupling loss versus wavelength for each taper profile. (L1 = L2 + 1 μm, L2 = 6.5 μm, wc = 2 μm, wt,start = 60 nm, wt,end = 450 nm, ht = 250 nm, ho = 1 μm, hp = 1.1 μm, wg = 5 μm).

Fig. 6
Fig. 6

(Color Online) FDTD modeling results of the evolving x-y cross-sectional mode profile for the dominant electric field component of the quasi-TE mode (top) and quasi-TM mode (bottom) within the cantilever coupler. Fields are calculated at positions given by coordinate z relative to the cantilever coupler facet. The dashed while lines represent oxide boundaries in the cantilever in (a)-(d) and at the end of the cantilever in (e). Solid white lines in (b)-(e) represent the cross-section of the silicon strip waveguide. (L1 = L2 + 1 μm, L2 = 6.5 μm, wc = 2 μm, wt,start = 60 nm, wt,end = 450 nm, ht = 250 nm, ho = 1 μm, hp = 1.1 μm, wg = 5 μm).

Fig. 7
Fig. 7

(Color online) Fabrication of cantilever couplers: (a) Silicon strip waveguides patterned on an SOI wafer using electron-beam lithography and plasma etching, (b) silicon dioxide top cladding deposited by PECVD, (c) evaporation of Ti/Ni etch mask, (d) FIB direct write of coupler geometry, (e) Plasma etch to release the cantilever coupler from the substrate, (f) wet etch to remove the Ti/Ni mask.

Fig. 8
Fig. 8

Main: Top-down SEM image of a fabricated cantilever coupler; Inset: angled view SEM image of the cantilever coupler showing that the coupler is fully released from the substrate.

Fig. 9
Fig. 9

Schematic of the measurement setup. The chip consists of back-to-back cantilever couplers interconnected by straight silicon waveguides of varying lengths.

Fig. 10
Fig. 10

(Color online) Measured insertion loss of back-to-back couplers versus interconnecting waveguide length at 1550 nm wavelength. The coupling loss is 0.956 dB per pair of couplers (0.48 dB per connection) for the quasi-TE mode and 0.789 dB per pair of couplers (0.39 dB per connection) for the quasi-TM mode.

Fig. 11
Fig. 11

(Color online) Measured coupling loss versus wavelength. The average measured coupling loss values in the telecommunications C band are 0.62 dB per connection for the quasi-TE mode and 0.50 dB per connection for the quasi-TM mode.

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