Broadband multi-layer terahertz metamaterials fabrication and characterization on flexible substrates

Z. C. Chen, M. H. Hong, C. S. Lim, N. R. Han, L. P. Shi, and T. C. Chong, “Parallel laser microfabrication of large-area asymmetric split ring resonator metamaterials and its structural tuning for terahertz resonance,” Appl. Phys. Lett. 96(18), 181101 (2010).
[Crossref]

F. Miyamaru, S. Kuboda, K. Taima, K. Takano, M. Hangyo, and M. W. Takeda, “Three-dimensional bulk metamaterials operating in the terahertz range,” Appl. Phys. Lett. 96(8), 081105 (2010).
[Crossref]

C. S. Lim, M. H. Hong, Z. C. Chen, N. R. Han, B. Luk’yanchuk, and T. C. Chong, “Hybrid metamaterial design and fabrication for terahertz resonance response enhancement,” Opt. Express 18(12), 12421–12429 (2010).
[Crossref] [PubMed]

F. Miyamaru, M. W. Takeda, and K. Taima, “Characterization of terahertz metamaterials fabricated on flexible plastic films: toward fabrication of bulk metamaterials in terahertz region,” Appl. Phys. Express 2, 042001 (2009).
[Crossref]

H.-T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

H. Tao, A. C. Strikwerda, K. Fan, W. J. Padilla, X. Zhang, and R. D. Averitt, “Reconfigurable terahertz metamaterials,” Phys. Rev. Lett. 103(14), 147401 (2009).
[Crossref] [PubMed]

W. Withayachumnankul and D. Abbott, “Metamaterials in the terahertz regime,” IEEE Photon. J. 1(2), 99–118 (2009).
[Crossref]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[Crossref]

A. K. Azad, H.-T. Chen, X. Lu, J. Gu, N. R. Weisse-Bernstein, E. Akhadov, A. J. Taylor, W. Zhang, and J. F. O’Hara, “Flexible quasi-three-dimensional terahertz electric metamaterials,” Terahertz Sci. Technol. 2, 15–22 (2009).

H. Tao, A. C. Strikwerda, K. Fan, C. M. Bingham, W. J. Padilla, X. Zhang, and R. D. Averitt, “Terahertz metamaterials on free-standing highly-flexible polyimide substrates,” J. Phys. D Appl. Phys. 41(23), 232004 (2008).
[Crossref]

F. Miyamaru, Y. Saito, M. W. Takeda, B. Hou, L. Liu, W. Wen, and P. Sheng, “Terahertz electric response of fractal metamaterial structures,” Phys. Rev. B 77(4), 045124 (2008).
[Crossref]

A. K. Azad, A. J. Taylor, E. Smirnova, and J. F. O’Hara, “Characterization and analysis of terahertz metamaterials based on rectangular split-ring resonators,” Appl. Phys. Lett. 92(1), 011119 (2008).
[Crossref]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

Y. Yuan, C. Bingham, T. Tyler, S. Palit, T. H. Hand, W. J. Padilla, D. R. Smith, N. M. Jokerst, and S. A. Cummer, “Dual-band planar electric metamaterial in the terahertz regime,” Opt. Express 16(13), 9746–9752 (2008).
[Crossref] [PubMed]

C. M. Bingham, H. Tao, X. L. Liu, R. D. Averitt, X. Zhang, and W. J. Padilla, “Planar wallpaper group metamaterials for novel terahertz applications,” Opt. Express 16(23), 18565–18575 (2008).
[Crossref]

H.-T. Chen, J. F. O’Hara, A. J. Taylor, R. D. Averitt, C. Highstrete, M. Lee, and W. J. Padilla, “Complementary planar terahertz metamaterials,” Opt. Express 15(3), 1084–1095 (2007).
[Crossref] [PubMed]

T. Driscoll, G. O. Andreev, D. N. Basov, S. Palit, S. Y. Cho, N. M. Jokerst, and D. R. Smith, “Tuned permeability in terahertz split-ring resonators for devices and sensors,” Appl. Phys. Lett. 91(6), 062511 (2007).
[Crossref]

B. D. F. Casse, H. O. Moser, J. W. Lee, M. Bahou, S. Inglis, and L. K. Jian, “Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography,” Appl. Phys. Lett. 90(25), 254106 (2007).
[Crossref]

M. V. Gorkunov, S. A. Gredeskul, I. V. Shadrivov, and Y. S. Kivshar, “Effect of microscopic disorder on magnetic properties of metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 73(5), 056605 (2006).
[Crossref] [PubMed]

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312(5781), 1780–1782 (2006).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, and D. R. Smith, “Electric-field-coupled resonators for negative permittivity metamaterials,” Appl. Phys. Lett. 88(4), 041109 (2006).
[Crossref]

W. J. Padilla, A. J. Taylor, C. Highstrete, M. Lee, and R. D. Averitt, “Dynamical electric and magnetic metamaterial response at terahertz frequencies,” Phys. Rev. Lett. 96(10), 107401 (2006).
[Crossref] [PubMed]

H.-T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Y. Lin, M. H. Hong, T. C. Chong, C. S. Lim, G. X. Chen, L. S. Tan, Z. B. Wang, and L. P. Shi, “Ultrafast laser induced parallel phase change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005).
[Crossref] [PubMed]

R. Marqués, F. Medina, and R. Rafii-El-Idrissi, “Role of bianisotropy in negative permeability and left-handed metamaterials,” Phys. Rev. B 65(14), 144440 (2002).
[Crossref]

P. Gay-Balmaz and O. J. F. Martin, “Electromagnetic resonances in individual and coupled split-ring-resonators,” J. Appl. Phys. 92(5), 2929–2936 (2002).
[Crossref]

R. A. Shelby, D. R. Smith, and S. Schultz, “Experimental verification of a negative index of refraction,” Science 292(5514), 77–79 (2001).
[Crossref] [PubMed]

J. B. Pendry, “Negative refraction makes a perfect lens,” Phys. Rev. Lett. 85(18), 3966–3969 (2000).
[Crossref] [PubMed]

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

J. B. Pendry, A. J. Holden, D. J. Robbins, and W. J. Stewart, “Magnetism from conductors and enhanced nonlinear phenomena,” IEEE Trans. Microw. Theory Tech. 47(11), 2075–2084 (1999).
[Crossref]

V. G. Veselago, “The electrodynamics of substances with simultaneously negative values of ε and μ,” Sov. Phys. Usp. 10(4), 509–514 (1968).
[Crossref]

W. Withayachumnankul and D. Abbott, “Metamaterials in the terahertz regime,” IEEE Photon. J. 1(2), 99–118 (2009).
[Crossref]

A. K. Azad, H.-T. Chen, X. Lu, J. Gu, N. R. Weisse-Bernstein, E. Akhadov, A. J. Taylor, W. Zhang, and J. F. O’Hara, “Flexible quasi-three-dimensional terahertz electric metamaterials,” Terahertz Sci. Technol. 2, 15–22 (2009).

T. Driscoll, G. O. Andreev, D. N. Basov, S. Palit, S. Y. Cho, N. M. Jokerst, and D. R. Smith, “Tuned permeability in terahertz split-ring resonators for devices and sensors,” Appl. Phys. Lett. 91(6), 062511 (2007).
[Crossref]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[Crossref]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[Crossref]

H.-T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

H. Tao, A. C. Strikwerda, K. Fan, W. J. Padilla, X. Zhang, and R. D. Averitt, “Reconfigurable terahertz metamaterials,” Phys. Rev. Lett. 103(14), 147401 (2009).
[Crossref] [PubMed]

H. Tao, A. C. Strikwerda, K. Fan, C. M. Bingham, W. J. Padilla, X. Zhang, and R. D. Averitt, “Terahertz metamaterials on free-standing highly-flexible polyimide substrates,” J. Phys. D Appl. Phys. 41(23), 232004 (2008).
[Crossref]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

C. M. Bingham, H. Tao, X. L. Liu, R. D. Averitt, X. Zhang, and W. J. Padilla, “Planar wallpaper group metamaterials for novel terahertz applications,” Opt. Express 16(23), 18565–18575 (2008).
[Crossref]

H.-T. Chen, J. F. O’Hara, A. J. Taylor, R. D. Averitt, C. Highstrete, M. Lee, and W. J. Padilla, “Complementary planar terahertz metamaterials,” Opt. Express 15(3), 1084–1095 (2007).
[Crossref] [PubMed]

H.-T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

W. J. Padilla, A. J. Taylor, C. Highstrete, M. Lee, and R. D. Averitt, “Dynamical electric and magnetic metamaterial response at terahertz frequencies,” Phys. Rev. Lett. 96(10), 107401 (2006).
[Crossref] [PubMed]

H.-T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

A. K. Azad, H.-T. Chen, X. Lu, J. Gu, N. R. Weisse-Bernstein, E. Akhadov, A. J. Taylor, W. Zhang, and J. F. O’Hara, “Flexible quasi-three-dimensional terahertz electric metamaterials,” Terahertz Sci. Technol. 2, 15–22 (2009).

A. K. Azad, A. J. Taylor, E. Smirnova, and J. F. O’Hara, “Characterization and analysis of terahertz metamaterials based on rectangular split-ring resonators,” Appl. Phys. Lett. 92(1), 011119 (2008).
[Crossref]

B. D. F. Casse, H. O. Moser, J. W. Lee, M. Bahou, S. Inglis, and L. K. Jian, “Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography,” Appl. Phys. Lett. 90(25), 254106 (2007).
[Crossref]

T. Driscoll, G. O. Andreev, D. N. Basov, S. Palit, S. Y. Cho, N. M. Jokerst, and D. R. Smith, “Tuned permeability in terahertz split-ring resonators for devices and sensors,” Appl. Phys. Lett. 91(6), 062511 (2007).
[Crossref]

Y. Yuan, C. Bingham, T. Tyler, S. Palit, T. H. Hand, W. J. Padilla, D. R. Smith, N. M. Jokerst, and S. A. Cummer, “Dual-band planar electric metamaterial in the terahertz regime,” Opt. Express 16(13), 9746–9752 (2008).
[Crossref] [PubMed]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

C. M. Bingham, H. Tao, X. L. Liu, R. D. Averitt, X. Zhang, and W. J. Padilla, “Planar wallpaper group metamaterials for novel terahertz applications,” Opt. Express 16(23), 18565–18575 (2008).
[Crossref]

H. Tao, A. C. Strikwerda, K. Fan, C. M. Bingham, W. J. Padilla, X. Zhang, and R. D. Averitt, “Terahertz metamaterials on free-standing highly-flexible polyimide substrates,” J. Phys. D Appl. Phys. 41(23), 232004 (2008).
[Crossref]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[Crossref]

B. D. F. Casse, H. O. Moser, J. W. Lee, M. Bahou, S. Inglis, and L. K. Jian, “Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography,” Appl. Phys. Lett. 90(25), 254106 (2007).
[Crossref]

Y. Lin, M. H. Hong, T. C. Chong, C. S. Lim, G. X. Chen, L. S. Tan, Z. B. Wang, and L. P. Shi, “Ultrafast laser induced parallel phase change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

A. K. Azad, H.-T. Chen, X. Lu, J. Gu, N. R. Weisse-Bernstein, E. Akhadov, A. J. Taylor, W. Zhang, and J. F. O’Hara, “Flexible quasi-three-dimensional terahertz electric metamaterials,” Terahertz Sci. Technol. 2, 15–22 (2009).

H.-T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

H.-T. Chen, J. F. O’Hara, A. J. Taylor, R. D. Averitt, C. Highstrete, M. Lee, and W. J. Padilla, “Complementary planar terahertz metamaterials,” Opt. Express 15(3), 1084–1095 (2007).
[Crossref] [PubMed]

H.-T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

Z. C. Chen, M. H. Hong, C. S. Lim, N. R. Han, L. P. Shi, and T. C. Chong, “Parallel laser microfabrication of large-area asymmetric split ring resonator metamaterials and its structural tuning for terahertz resonance,” Appl. Phys. Lett. 96(18), 181101 (2010).
[Crossref]

C. S. Lim, M. H. Hong, Z. C. Chen, N. R. Han, B. Luk’yanchuk, and T. C. Chong, “Hybrid metamaterial design and fabrication for terahertz resonance response enhancement,” Opt. Express 18(12), 12421–12429 (2010).
[Crossref] [PubMed]

T. Driscoll, G. O. Andreev, D. N. Basov, S. Palit, S. Y. Cho, N. M. Jokerst, and D. R. Smith, “Tuned permeability in terahertz split-ring resonators for devices and sensors,” Appl. Phys. Lett. 91(6), 062511 (2007).
[Crossref]

Z. C. Chen, M. H. Hong, C. S. Lim, N. R. Han, L. P. Shi, and T. C. Chong, “Parallel laser microfabrication of large-area asymmetric split ring resonator metamaterials and its structural tuning for terahertz resonance,” Appl. Phys. Lett. 96(18), 181101 (2010).
[Crossref]

C. S. Lim, M. H. Hong, Z. C. Chen, N. R. Han, B. Luk’yanchuk, and T. C. Chong, “Hybrid metamaterial design and fabrication for terahertz resonance response enhancement,” Opt. Express 18(12), 12421–12429 (2010).
[Crossref] [PubMed]

Y. Lin, M. H. Hong, T. C. Chong, C. S. Lim, G. X. Chen, L. S. Tan, Z. B. Wang, and L. P. Shi, “Ultrafast laser induced parallel phase change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

H.-T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

Y. Yuan, C. Bingham, T. Tyler, S. Palit, T. H. Hand, W. J. Padilla, D. R. Smith, N. M. Jokerst, and S. A. Cummer, “Dual-band planar electric metamaterial in the terahertz regime,” Opt. Express 16(13), 9746–9752 (2008).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

T. Driscoll, G. O. Andreev, D. N. Basov, S. Palit, S. Y. Cho, N. M. Jokerst, and D. R. Smith, “Tuned permeability in terahertz split-ring resonators for devices and sensors,” Appl. Phys. Lett. 91(6), 062511 (2007).
[Crossref]

N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005).
[Crossref] [PubMed]

H. Tao, A. C. Strikwerda, K. Fan, W. J. Padilla, X. Zhang, and R. D. Averitt, “Reconfigurable terahertz metamaterials,” Phys. Rev. Lett. 103(14), 147401 (2009).
[Crossref] [PubMed]

H. Tao, A. C. Strikwerda, K. Fan, C. M. Bingham, W. J. Padilla, X. Zhang, and R. D. Averitt, “Terahertz metamaterials on free-standing highly-flexible polyimide substrates,” J. Phys. D Appl. Phys. 41(23), 232004 (2008).
[Crossref]

P. Gay-Balmaz and O. J. F. Martin, “Electromagnetic resonances in individual and coupled split-ring-resonators,” J. Appl. Phys. 92(5), 2929–2936 (2002).
[Crossref]

M. V. Gorkunov, S. A. Gredeskul, I. V. Shadrivov, and Y. S. Kivshar, “Effect of microscopic disorder on magnetic properties of metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 73(5), 056605 (2006).
[Crossref] [PubMed]

H.-T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

M. V. Gorkunov, S. A. Gredeskul, I. V. Shadrivov, and Y. S. Kivshar, “Effect of microscopic disorder on magnetic properties of metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 73(5), 056605 (2006).
[Crossref] [PubMed]

A. K. Azad, H.-T. Chen, X. Lu, J. Gu, N. R. Weisse-Bernstein, E. Akhadov, A. J. Taylor, W. Zhang, and J. F. O’Hara, “Flexible quasi-three-dimensional terahertz electric metamaterials,” Terahertz Sci. Technol. 2, 15–22 (2009).

N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005).
[Crossref] [PubMed]

Z. C. Chen, M. H. Hong, C. S. Lim, N. R. Han, L. P. Shi, and T. C. Chong, “Parallel laser microfabrication of large-area asymmetric split ring resonator metamaterials and its structural tuning for terahertz resonance,” Appl. Phys. Lett. 96(18), 181101 (2010).
[Crossref]

C. S. Lim, M. H. Hong, Z. C. Chen, N. R. Han, B. Luk’yanchuk, and T. C. Chong, “Hybrid metamaterial design and fabrication for terahertz resonance response enhancement,” Opt. Express 18(12), 12421–12429 (2010).
[Crossref] [PubMed]

Y. Yuan, C. Bingham, T. Tyler, S. Palit, T. H. Hand, W. J. Padilla, D. R. Smith, N. M. Jokerst, and S. A. Cummer, “Dual-band planar electric metamaterial in the terahertz regime,” Opt. Express 16(13), 9746–9752 (2008).
[Crossref] [PubMed]

F. Miyamaru, S. Kuboda, K. Taima, K. Takano, M. Hangyo, and M. W. Takeda, “Three-dimensional bulk metamaterials operating in the terahertz range,” Appl. Phys. Lett. 96(8), 081105 (2010).
[Crossref]

H.-T. Chen, J. F. O’Hara, A. J. Taylor, R. D. Averitt, C. Highstrete, M. Lee, and W. J. Padilla, “Complementary planar terahertz metamaterials,” Opt. Express 15(3), 1084–1095 (2007).
[Crossref] [PubMed]

W. J. Padilla, A. J. Taylor, C. Highstrete, M. Lee, and R. D. Averitt, “Dynamical electric and magnetic metamaterial response at terahertz frequencies,” Phys. Rev. Lett. 96(10), 107401 (2006).
[Crossref] [PubMed]

J. B. Pendry, A. J. Holden, D. J. Robbins, and W. J. Stewart, “Magnetism from conductors and enhanced nonlinear phenomena,” IEEE Trans. Microw. Theory Tech. 47(11), 2075–2084 (1999).
[Crossref]

Z. C. Chen, M. H. Hong, C. S. Lim, N. R. Han, L. P. Shi, and T. C. Chong, “Parallel laser microfabrication of large-area asymmetric split ring resonator metamaterials and its structural tuning for terahertz resonance,” Appl. Phys. Lett. 96(18), 181101 (2010).
[Crossref]

C. S. Lim, M. H. Hong, Z. C. Chen, N. R. Han, B. Luk’yanchuk, and T. C. Chong, “Hybrid metamaterial design and fabrication for terahertz resonance response enhancement,” Opt. Express 18(12), 12421–12429 (2010).
[Crossref] [PubMed]

Y. Lin, M. H. Hong, T. C. Chong, C. S. Lim, G. X. Chen, L. S. Tan, Z. B. Wang, and L. P. Shi, “Ultrafast laser induced parallel phase change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

F. Miyamaru, Y. Saito, M. W. Takeda, B. Hou, L. Liu, W. Wen, and P. Sheng, “Terahertz electric response of fractal metamaterial structures,” Phys. Rev. B 77(4), 045124 (2008).
[Crossref]

B. D. F. Casse, H. O. Moser, J. W. Lee, M. Bahou, S. Inglis, and L. K. Jian, “Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography,” Appl. Phys. Lett. 90(25), 254106 (2007).
[Crossref]

B. D. F. Casse, H. O. Moser, J. W. Lee, M. Bahou, S. Inglis, and L. K. Jian, “Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography,” Appl. Phys. Lett. 90(25), 254106 (2007).
[Crossref]

Y. Yuan, C. Bingham, T. Tyler, S. Palit, T. H. Hand, W. J. Padilla, D. R. Smith, N. M. Jokerst, and S. A. Cummer, “Dual-band planar electric metamaterial in the terahertz regime,” Opt. Express 16(13), 9746–9752 (2008).
[Crossref] [PubMed]

T. Driscoll, G. O. Andreev, D. N. Basov, S. Palit, S. Y. Cho, N. M. Jokerst, and D. R. Smith, “Tuned permeability in terahertz split-ring resonators for devices and sensors,” Appl. Phys. Lett. 91(6), 062511 (2007).
[Crossref]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005).
[Crossref] [PubMed]

N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005).
[Crossref] [PubMed]

M. V. Gorkunov, S. A. Gredeskul, I. V. Shadrivov, and Y. S. Kivshar, “Effect of microscopic disorder on magnetic properties of metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 73(5), 056605 (2006).
[Crossref] [PubMed]

N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005).
[Crossref] [PubMed]

N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005).
[Crossref] [PubMed]

N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005).
[Crossref] [PubMed]

F. Miyamaru, S. Kuboda, K. Taima, K. Takano, M. Hangyo, and M. W. Takeda, “Three-dimensional bulk metamaterials operating in the terahertz range,” Appl. Phys. Lett. 96(8), 081105 (2010).
[Crossref]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

B. D. F. Casse, H. O. Moser, J. W. Lee, M. Bahou, S. Inglis, and L. K. Jian, “Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography,” Appl. Phys. Lett. 90(25), 254106 (2007).
[Crossref]

H.-T. Chen, J. F. O’Hara, A. J. Taylor, R. D. Averitt, C. Highstrete, M. Lee, and W. J. Padilla, “Complementary planar terahertz metamaterials,” Opt. Express 15(3), 1084–1095 (2007).
[Crossref] [PubMed]

W. J. Padilla, A. J. Taylor, C. Highstrete, M. Lee, and R. D. Averitt, “Dynamical electric and magnetic metamaterial response at terahertz frequencies,” Phys. Rev. Lett. 96(10), 107401 (2006).
[Crossref] [PubMed]

Z. C. Chen, M. H. Hong, C. S. Lim, N. R. Han, L. P. Shi, and T. C. Chong, “Parallel laser microfabrication of large-area asymmetric split ring resonator metamaterials and its structural tuning for terahertz resonance,” Appl. Phys. Lett. 96(18), 181101 (2010).
[Crossref]

C. S. Lim, M. H. Hong, Z. C. Chen, N. R. Han, B. Luk’yanchuk, and T. C. Chong, “Hybrid metamaterial design and fabrication for terahertz resonance response enhancement,” Opt. Express 18(12), 12421–12429 (2010).
[Crossref] [PubMed]

Y. Lin, M. H. Hong, T. C. Chong, C. S. Lim, G. X. Chen, L. S. Tan, Z. B. Wang, and L. P. Shi, “Ultrafast laser induced parallel phase change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

Y. Lin, M. H. Hong, T. C. Chong, C. S. Lim, G. X. Chen, L. S. Tan, Z. B. Wang, and L. P. Shi, “Ultrafast laser induced parallel phase change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

F. Miyamaru, Y. Saito, M. W. Takeda, B. Hou, L. Liu, W. Wen, and P. Sheng, “Terahertz electric response of fractal metamaterial structures,” Phys. Rev. B 77(4), 045124 (2008).
[Crossref]

C. M. Bingham, H. Tao, X. L. Liu, R. D. Averitt, X. Zhang, and W. J. Padilla, “Planar wallpaper group metamaterials for novel terahertz applications,” Opt. Express 16(23), 18565–18575 (2008).
[Crossref]

A. K. Azad, H.-T. Chen, X. Lu, J. Gu, N. R. Weisse-Bernstein, E. Akhadov, A. J. Taylor, W. Zhang, and J. F. O’Hara, “Flexible quasi-three-dimensional terahertz electric metamaterials,” Terahertz Sci. Technol. 2, 15–22 (2009).

C. S. Lim, M. H. Hong, Z. C. Chen, N. R. Han, B. Luk’yanchuk, and T. C. Chong, “Hybrid metamaterial design and fabrication for terahertz resonance response enhancement,” Opt. Express 18(12), 12421–12429 (2010).
[Crossref] [PubMed]

R. Marqués, F. Medina, and R. Rafii-El-Idrissi, “Role of bianisotropy in negative permeability and left-handed metamaterials,” Phys. Rev. B 65(14), 144440 (2002).
[Crossref]

P. Gay-Balmaz and O. J. F. Martin, “Electromagnetic resonances in individual and coupled split-ring-resonators,” J. Appl. Phys. 92(5), 2929–2936 (2002).
[Crossref]

R. Marqués, F. Medina, and R. Rafii-El-Idrissi, “Role of bianisotropy in negative permeability and left-handed metamaterials,” Phys. Rev. B 65(14), 144440 (2002).
[Crossref]

F. Miyamaru, S. Kuboda, K. Taima, K. Takano, M. Hangyo, and M. W. Takeda, “Three-dimensional bulk metamaterials operating in the terahertz range,” Appl. Phys. Lett. 96(8), 081105 (2010).
[Crossref]

F. Miyamaru, M. W. Takeda, and K. Taima, “Characterization of terahertz metamaterials fabricated on flexible plastic films: toward fabrication of bulk metamaterials in terahertz region,” Appl. Phys. Express 2, 042001 (2009).
[Crossref]

F. Miyamaru, Y. Saito, M. W. Takeda, B. Hou, L. Liu, W. Wen, and P. Sheng, “Terahertz electric response of fractal metamaterial structures,” Phys. Rev. B 77(4), 045124 (2008).
[Crossref]

D. Schurig, J. J. Mock, and D. R. Smith, “Electric-field-coupled resonators for negative permittivity metamaterials,” Appl. Phys. Lett. 88(4), 041109 (2006).
[Crossref]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

B. D. F. Casse, H. O. Moser, J. W. Lee, M. Bahou, S. Inglis, and L. K. Jian, “Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography,” Appl. Phys. Lett. 90(25), 254106 (2007).
[Crossref]

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[Crossref]

A. K. Azad, H.-T. Chen, X. Lu, J. Gu, N. R. Weisse-Bernstein, E. Akhadov, A. J. Taylor, W. Zhang, and J. F. O’Hara, “Flexible quasi-three-dimensional terahertz electric metamaterials,” Terahertz Sci. Technol. 2, 15–22 (2009).

A. K. Azad, A. J. Taylor, E. Smirnova, and J. F. O’Hara, “Characterization and analysis of terahertz metamaterials based on rectangular split-ring resonators,” Appl. Phys. Lett. 92(1), 011119 (2008).
[Crossref]

H.-T. Chen, J. F. O’Hara, A. J. Taylor, R. D. Averitt, C. Highstrete, M. Lee, and W. J. Padilla, “Complementary planar terahertz metamaterials,” Opt. Express 15(3), 1084–1095 (2007).
[Crossref] [PubMed]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[Crossref]

H. Tao, A. C. Strikwerda, K. Fan, W. J. Padilla, X. Zhang, and R. D. Averitt, “Reconfigurable terahertz metamaterials,” Phys. Rev. Lett. 103(14), 147401 (2009).
[Crossref] [PubMed]

H.-T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

H. Tao, A. C. Strikwerda, K. Fan, C. M. Bingham, W. J. Padilla, X. Zhang, and R. D. Averitt, “Terahertz metamaterials on free-standing highly-flexible polyimide substrates,” J. Phys. D Appl. Phys. 41(23), 232004 (2008).
[Crossref]

Y. Yuan, C. Bingham, T. Tyler, S. Palit, T. H. Hand, W. J. Padilla, D. R. Smith, N. M. Jokerst, and S. A. Cummer, “Dual-band planar electric metamaterial in the terahertz regime,” Opt. Express 16(13), 9746–9752 (2008).
[Crossref] [PubMed]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

C. M. Bingham, H. Tao, X. L. Liu, R. D. Averitt, X. Zhang, and W. J. Padilla, “Planar wallpaper group metamaterials for novel terahertz applications,” Opt. Express 16(23), 18565–18575 (2008).
[Crossref]

H.-T. Chen, J. F. O’Hara, A. J. Taylor, R. D. Averitt, C. Highstrete, M. Lee, and W. J. Padilla, “Complementary planar terahertz metamaterials,” Opt. Express 15(3), 1084–1095 (2007).
[Crossref] [PubMed]

W. J. Padilla, A. J. Taylor, C. Highstrete, M. Lee, and R. D. Averitt, “Dynamical electric and magnetic metamaterial response at terahertz frequencies,” Phys. Rev. Lett. 96(10), 107401 (2006).
[Crossref] [PubMed]

H.-T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor, and R. D. Averitt, “Active terahertz metamaterial devices,” Nature 444(7119), 597–600 (2006).
[Crossref] [PubMed]

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

Y. Yuan, C. Bingham, T. Tyler, S. Palit, T. H. Hand, W. J. Padilla, D. R. Smith, N. M. Jokerst, and S. A. Cummer, “Dual-band planar electric metamaterial in the terahertz regime,” Opt. Express 16(13), 9746–9752 (2008).
[Crossref] [PubMed]

T. Driscoll, G. O. Andreev, D. N. Basov, S. Palit, S. Y. Cho, N. M. Jokerst, and D. R. Smith, “Tuned permeability in terahertz split-ring resonators for devices and sensors,” Appl. Phys. Lett. 91(6), 062511 (2007).
[Crossref]

N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312(5781), 1780–1782 (2006).
[Crossref] [PubMed]

J. B. Pendry, “Negative refraction makes a perfect lens,” Phys. Rev. Lett. 85(18), 3966–3969 (2000).
[Crossref] [PubMed]

J. B. Pendry, A. J. Holden, D. J. Robbins, and W. J. Stewart, “Magnetism from conductors and enhanced nonlinear phenomena,” IEEE Trans. Microw. Theory Tech. 47(11), 2075–2084 (1999).
[Crossref]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[Crossref]

R. Marqués, F. Medina, and R. Rafii-El-Idrissi, “Role of bianisotropy in negative permeability and left-handed metamaterials,” Phys. Rev. B 65(14), 144440 (2002).
[Crossref]

J. B. Pendry, A. J. Holden, D. J. Robbins, and W. J. Stewart, “Magnetism from conductors and enhanced nonlinear phenomena,” IEEE Trans. Microw. Theory Tech. 47(11), 2075–2084 (1999).
[Crossref]

F. Miyamaru, Y. Saito, M. W. Takeda, B. Hou, L. Liu, W. Wen, and P. Sheng, “Terahertz electric response of fractal metamaterial structures,” Phys. Rev. B 77(4), 045124 (2008).
[Crossref]

R. A. Shelby, D. R. Smith, and S. Schultz, “Experimental verification of a negative index of refraction,” Science 292(5514), 77–79 (2001).
[Crossref] [PubMed]

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312(5781), 1780–1782 (2006).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, and D. R. Smith, “Electric-field-coupled resonators for negative permittivity metamaterials,” Appl. Phys. Lett. 88(4), 041109 (2006).
[Crossref]

M. V. Gorkunov, S. A. Gredeskul, I. V. Shadrivov, and Y. S. Kivshar, “Effect of microscopic disorder on magnetic properties of metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 73(5), 056605 (2006).
[Crossref] [PubMed]

R. A. Shelby, D. R. Smith, and S. Schultz, “Experimental verification of a negative index of refraction,” Science 292(5514), 77–79 (2001).
[Crossref] [PubMed]

F. Miyamaru, Y. Saito, M. W. Takeda, B. Hou, L. Liu, W. Wen, and P. Sheng, “Terahertz electric response of fractal metamaterial structures,” Phys. Rev. B 77(4), 045124 (2008).
[Crossref]

Z. C. Chen, M. H. Hong, C. S. Lim, N. R. Han, L. P. Shi, and T. C. Chong, “Parallel laser microfabrication of large-area asymmetric split ring resonator metamaterials and its structural tuning for terahertz resonance,” Appl. Phys. Lett. 96(18), 181101 (2010).
[Crossref]

Y. Lin, M. H. Hong, T. C. Chong, C. S. Lim, G. X. Chen, L. S. Tan, Z. B. Wang, and L. P. Shi, “Ultrafast laser induced parallel phase change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[Crossref]

A. K. Azad, A. J. Taylor, E. Smirnova, and J. F. O’Hara, “Characterization and analysis of terahertz metamaterials based on rectangular split-ring resonators,” Appl. Phys. Lett. 92(1), 011119 (2008).
[Crossref]

Y. Yuan, C. Bingham, T. Tyler, S. Palit, T. H. Hand, W. J. Padilla, D. R. Smith, N. M. Jokerst, and S. A. Cummer, “Dual-band planar electric metamaterial in the terahertz regime,” Opt. Express 16(13), 9746–9752 (2008).
[Crossref] [PubMed]

T. Driscoll, G. O. Andreev, D. N. Basov, S. Palit, S. Y. Cho, N. M. Jokerst, and D. R. Smith, “Tuned permeability in terahertz split-ring resonators for devices and sensors,” Appl. Phys. Lett. 91(6), 062511 (2007).
[Crossref]

J. B. Pendry, D. Schurig, and D. R. Smith, “Controlling electromagnetic fields,” Science 312(5781), 1780–1782 (2006).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, and D. R. Smith, “Electric-field-coupled resonators for negative permittivity metamaterials,” Appl. Phys. Lett. 88(4), 041109 (2006).
[Crossref]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

R. A. Shelby, D. R. Smith, and S. Schultz, “Experimental verification of a negative index of refraction,” Science 292(5514), 77–79 (2001).
[Crossref] [PubMed]

D. R. Smith, W. J. Padilla, D. C. Vier, S. C. Nemat-Nasser, and S. Schultz, “Composite medium with simultaneously negative permeability and permittivity,” Phys. Rev. Lett. 84(18), 4184–4187 (2000).
[Crossref] [PubMed]

N. Katsarakis, G. Konstantinidis, A. Kostopoulos, R. S. Penciu, T. F. Gundogdu, M. Kafesaki, E. N. Economou, Th. Koschny, and C. M. Soukoulis, “Magnetic response of split-ring resonators in the far-infrared frequency regime,” Opt. Lett. 30(11), 1348–1350 (2005).
[Crossref] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[Crossref] [PubMed]

J. B. Pendry, A. J. Holden, D. J. Robbins, and W. J. Stewart, “Magnetism from conductors and enhanced nonlinear phenomena,” IEEE Trans. Microw. Theory Tech. 47(11), 2075–2084 (1999).
[Crossref]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[Crossref]

H. Tao, A. C. Strikwerda, K. Fan, W. J. Padilla, X. Zhang, and R. D. Averitt, “Reconfigurable terahertz metamaterials,” Phys. Rev. Lett. 103(14), 147401 (2009).
[Crossref] [PubMed]

H. Tao, A. C. Strikwerda, K. Fan, C. M. Bingham, W. J. Padilla, X. Zhang, and R. D. Averitt, “Terahertz metamaterials on free-standing highly-flexible polyimide substrates,” J. Phys. D Appl. Phys. 41(23), 232004 (2008).
[Crossref]

F. Miyamaru, S. Kuboda, K. Taima, K. Takano, M. Hangyo, and M. W. Takeda, “Three-dimensional bulk metamaterials operating in the terahertz range,” Appl. Phys. Lett. 96(8), 081105 (2010).
[Crossref]

F. Miyamaru, M. W. Takeda, and K. Taima, “Characterization of terahertz metamaterials fabricated on flexible plastic films: toward fabrication of bulk metamaterials in terahertz region,” Appl. Phys. Express 2, 042001 (2009).
[Crossref]

F. Miyamaru, S. Kuboda, K. Taima, K. Takano, M. Hangyo, and M. W. Takeda, “Three-dimensional bulk metamaterials operating in the terahertz range,” Appl. Phys. Lett. 96(8), 081105 (2010).
[Crossref]

F. Miyamaru, S. Kuboda, K. Taima, K. Takano, M. Hangyo, and M. W. Takeda, “Three-dimensional bulk metamaterials operating in the terahertz range,” Appl. Phys. Lett. 96(8), 081105 (2010).
[Crossref]

F. Miyamaru, M. W. Takeda, and K. Taima, “Characterization of terahertz metamaterials fabricated on flexible plastic films: toward fabrication of bulk metamaterials in terahertz region,” Appl. Phys. Express 2, 042001 (2009).
[Crossref]

F. Miyamaru, Y. Saito, M. W. Takeda, B. Hou, L. Liu, W. Wen, and P. Sheng, “Terahertz electric response of fractal metamaterial structures,” Phys. Rev. B 77(4), 045124 (2008).
[Crossref]

Y. Lin, M. H. Hong, T. C. Chong, C. S. Lim, G. X. Chen, L. S. Tan, Z. B. Wang, and L. P. Shi, “Ultrafast laser induced parallel phase change nanolithography,” Appl. Phys. Lett. 89(4), 041108 (2006).
[Crossref]

H. Tao, A. C. Strikwerda, K. Fan, W. J. Padilla, X. Zhang, and R. D. Averitt, “Reconfigurable terahertz metamaterials,” Phys. Rev. Lett. 103(14), 147401 (2009).
[Crossref] [PubMed]

H. Tao, A. C. Strikwerda, K. Fan, C. M. Bingham, W. J. Padilla, X. Zhang, and R. D. Averitt, “Terahertz metamaterials on free-standing highly-flexible polyimide substrates,” J. Phys. D Appl. Phys. 41(23), 232004 (2008).
[Crossref]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: design, fabrication and characterization,” Opt. Express 16(10), 7181–7188 (2008).
[Crossref] [PubMed]

C. M. Bingham, H. Tao, X. L. Liu, R. D. Averitt, X. Zhang, and W. J. Padilla, “Planar wallpaper group metamaterials for novel terahertz applications,” Opt. Express 16(23), 18565–18575 (2008).
[Crossref]

H.-T. Chen, W. J. Padilla, M. J. Cich, A. K. Azad, R. D. Averitt, and A. J. Taylor, “A metamaterial solid-state terahertz phase modulator,” Nat. Photonics 3(3), 148–151 (2009).
[Crossref]

A. K. Azad, H.-T. Chen, X. Lu, J. Gu, N. R. Weisse-Bernstein, E. Akhadov, A. J. Taylor, W. Zhang, and J. F. O’Hara, “Flexible quasi-three-dimensional terahertz electric metamaterials,” Terahertz Sci. Technol. 2, 15–22 (2009).

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. O’Hara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[Crossref]

A. K. Azad, A. J. Taylor, E. Smirnova, and J. F. O’Hara, “Characterization and analysis of terahertz metamaterials based on rectangular split-ring resonators,” Appl. Phys. Lett. 92(1), 011119 (2008).
[Crossref]

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