Abstract

We demonstrate a compact, single-chip 40-channel, dense wavelength division multiplexing (DWDM) variable attenuator multi/demultiplexer (VMUX/DEMUX) by monolithic integration of an echelle grating and high-speed p-i-n VOA on the silicon-on-insulator (SOI) platform. The demonstrated device has a flat-top filter shape, on chip loss of 5.0dB, low PDL of 0.3dB after compensation of the polarization dependent frequency (PDF) shift, a fast attenuation response speed of 3MHz, and an area of only 25mm by 10mm.

© 2011 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. T. H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, R. Kou, S. Park, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier-injection structure,” 36th European Conference and Exhibition on Optical Communications (ECOC 2010) (IEEE, 2010), paper We.8.E.3.
  2. Y. Nasu, K. Watanabe, M. Itoh, H. Yamazaki, S. Kamei, R. Kasahara, I. Ogawa, A. Kaneko, and Y. Inoue, “Ultrasmall 100 GHz 40-channel VMUX/DEMUX based on single-chip 2.5%Δ PLC,” J. Lightwave Technol. 27(12), 2087–2094 (2009).
    [CrossRef]
  3. M. P. Earnshaw, M. Cappuzzo, E. Chen, L. Gomez, A. Griffin, E. Laskowski, and A. Wong-Foy, “High performance variable optical attenuator multiplexer filter (VMUX),” Optical Fiber Communication Conference (OFC 2004) (Optical Society of America, 2004), paper MF36.
  4. A. Kaneko, Y. Doi, Y. Hashizume, S. Kamei, Y. Tamura, I. Ogawa, T. Kominato, and S. Suzuki, “Ultra small 16 ch variable optical attenuator multiplexer (V-AWG) using multi-chip PLC integration technology for ROADM,” 31st European Conference and Exhibition on Optical Communications (ECOC 2005) (IEEE, 2005), pp. 987–990.
  5. I. E. Day, S. W. Roberts, R. O'Carroll, A. Knights, P. Sharp, G. F. Hopper, B. J. Luff, and M. Asghari, “Single-chip variable optical attenuator and multiplexer subsystem integration,” Optical Fiber Communication Conference (OFC 2002) (Optical Society of America, 2002), pp. 72–73.
  6. D. Feng, W. Qian, H. Liang, C.-C. Kung, J. Fong, B. J. Luff, and M. Asghari, “Novel fabrication tolerant flat-top demultiplexers based on etched diffraction gratings in SOI,” 5rd Int. Conf. Group IV Photonics, Sorrento, Italy (September 17–19, 2008), pp. 386–388.
  7. B. J. Luff, D. Feng, D. C. Lee, W. Qian, H. Liang, and M. Asghari, “Hybrid silicon photonics for low-cost high-bandwidth link applications,” Adv. Opt. Technol. 2008, 245131 (2008). doi:.
  8. N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization-insensitive silicon-on-insulator-based WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
    [CrossRef]
  9. S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
    [CrossRef]
  10. M. R. Amersfoort, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel, and C. Caneau, “Passband broadening of integrated arrayed waveguide filters using multimode interference couplers,” Electron. Lett. 32(5), 449–451 (1996).
    [CrossRef]
  11. R. Marz, Integrated Optics Design and Modeling (Artech House, 1994).
  12. P. Cheben, D.-X. Xu, S. Janz, A. Delage, and D. Dalacu, “Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer,” Proc. SPIE 4997, 181–189 (2003).
    [CrossRef]
  13. J.-J. He, E. S. Koteles, B. Lamontagne, L. Erickson, A. Delâge, and M. Davies, “Integrated polarization compensator for WDM waveguide demultiplexers,” IEEE Photon. Technol. Lett. 11(2), 224–226 (1999).
    [CrossRef]
  14. P. Cheben, “Wavelength dispersive planar waveguide device: Echelle gratings and arrayed waveguide gratings,” in Optical Waveguide: From Theory to Applied Technologies, M. L. Calvo and V. Laksminarayanan, eds. (Taylor & Francis, 2007), Chap. 5.
  15. S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
    [CrossRef]
  16. V. I. Tolstikhin, A. Densmore, K. Pimenov, Y. Logvin, F. Wu, S. Laframboise, and S. Grabtchak, “Monolithically integrated optical channel monitor for DWDM transmission systems,” J. Lightwave Technol. 22(1), 146–153 (2004).
    [CrossRef]
  17. R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987).
    [CrossRef]

2009 (1)

2008 (2)

B. J. Luff, D. Feng, D. C. Lee, W. Qian, H. Liang, and M. Asghari, “Hybrid silicon photonics for low-cost high-bandwidth link applications,” Adv. Opt. Technol. 2008, 245131 (2008). doi:.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization-insensitive silicon-on-insulator-based WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

2006 (1)

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

2004 (2)

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

V. I. Tolstikhin, A. Densmore, K. Pimenov, Y. Logvin, F. Wu, S. Laframboise, and S. Grabtchak, “Monolithically integrated optical channel monitor for DWDM transmission systems,” J. Lightwave Technol. 22(1), 146–153 (2004).
[CrossRef]

2003 (1)

P. Cheben, D.-X. Xu, S. Janz, A. Delage, and D. Dalacu, “Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer,” Proc. SPIE 4997, 181–189 (2003).
[CrossRef]

1999 (1)

J.-J. He, E. S. Koteles, B. Lamontagne, L. Erickson, A. Delâge, and M. Davies, “Integrated polarization compensator for WDM waveguide demultiplexers,” IEEE Photon. Technol. Lett. 11(2), 224–226 (1999).
[CrossRef]

1996 (1)

M. R. Amersfoort, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel, and C. Caneau, “Passband broadening of integrated arrayed waveguide filters using multimode interference couplers,” Electron. Lett. 32(5), 449–451 (1996).
[CrossRef]

1987 (1)

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987).
[CrossRef]

Amersfoort, M. R.

M. R. Amersfoort, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel, and C. Caneau, “Passband broadening of integrated arrayed waveguide filters using multimode interference couplers,” Electron. Lett. 32(5), 449–451 (1996).
[CrossRef]

Andreadakis, N. C.

M. R. Amersfoort, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel, and C. Caneau, “Passband broadening of integrated arrayed waveguide filters using multimode interference couplers,” Electron. Lett. 32(5), 449–451 (1996).
[CrossRef]

Asghari, M.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization-insensitive silicon-on-insulator-based WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

B. J. Luff, D. Feng, D. C. Lee, W. Qian, H. Liang, and M. Asghari, “Hybrid silicon photonics for low-cost high-bandwidth link applications,” Adv. Opt. Technol. 2008, 245131 (2008). doi:.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

Balakrishnan, A.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

Bennett, B. R.

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987).
[CrossRef]

Bidnyk, S.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

Caneau, C.

M. R. Amersfoort, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel, and C. Caneau, “Passband broadening of integrated arrayed waveguide filters using multimode interference couplers,” Electron. Lett. 32(5), 449–451 (1996).
[CrossRef]

Charbonneau, S.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

Cheben, P.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

P. Cheben, D.-X. Xu, S. Janz, A. Delage, and D. Dalacu, “Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer,” Proc. SPIE 4997, 181–189 (2003).
[CrossRef]

Cloutier, M.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

Dalacu, D.

P. Cheben, D.-X. Xu, S. Janz, A. Delage, and D. Dalacu, “Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer,” Proc. SPIE 4997, 181–189 (2003).
[CrossRef]

Davies, M.

J.-J. He, E. S. Koteles, B. Lamontagne, L. Erickson, A. Delâge, and M. Davies, “Integrated polarization compensator for WDM waveguide demultiplexers,” IEEE Photon. Technol. Lett. 11(2), 224–226 (1999).
[CrossRef]

Delage, A.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

P. Cheben, D.-X. Xu, S. Janz, A. Delage, and D. Dalacu, “Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer,” Proc. SPIE 4997, 181–189 (2003).
[CrossRef]

Delâge, A.

J.-J. He, E. S. Koteles, B. Lamontagne, L. Erickson, A. Delâge, and M. Davies, “Integrated polarization compensator for WDM waveguide demultiplexers,” IEEE Photon. Technol. Lett. 11(2), 224–226 (1999).
[CrossRef]

Densmore, A.

Dossou, K.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

Erickson, L.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

J.-J. He, E. S. Koteles, B. Lamontagne, L. Erickson, A. Delâge, and M. Davies, “Integrated polarization compensator for WDM waveguide demultiplexers,” IEEE Photon. Technol. Lett. 11(2), 224–226 (1999).
[CrossRef]

Feng, D.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization-insensitive silicon-on-insulator-based WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

B. J. Luff, D. Feng, D. C. Lee, W. Qian, H. Liang, and M. Asghari, “Hybrid silicon photonics for low-cost high-bandwidth link applications,” Adv. Opt. Technol. 2008, 245131 (2008). doi:.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

Feng, N.-N.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization-insensitive silicon-on-insulator-based WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

Fong, J.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization-insensitive silicon-on-insulator-based WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

Gao, M.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

Grabtchak, S.

He, J.-J.

J.-J. He, E. S. Koteles, B. Lamontagne, L. Erickson, A. Delâge, and M. Davies, “Integrated polarization compensator for WDM waveguide demultiplexers,” IEEE Photon. Technol. Lett. 11(2), 224–226 (1999).
[CrossRef]

Inoue, Y.

Itoh, M.

Janz, S.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

P. Cheben, D.-X. Xu, S. Janz, A. Delage, and D. Dalacu, “Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer,” Proc. SPIE 4997, 181–189 (2003).
[CrossRef]

Kamei, S.

Kaneko, A.

Kasahara, R.

Koteles, E. S.

J.-J. He, E. S. Koteles, B. Lamontagne, L. Erickson, A. Delâge, and M. Davies, “Integrated polarization compensator for WDM waveguide demultiplexers,” IEEE Photon. Technol. Lett. 11(2), 224–226 (1999).
[CrossRef]

Krug, P. A.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

Kung, C. C.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

Kung, C.-C.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization-insensitive silicon-on-insulator-based WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

Laframboise, S.

Lamontagne, B.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

J.-J. He, E. S. Koteles, B. Lamontagne, L. Erickson, A. Delâge, and M. Davies, “Integrated polarization compensator for WDM waveguide demultiplexers,” IEEE Photon. Technol. Lett. 11(2), 224–226 (1999).
[CrossRef]

LeBlanc, H. P.

M. R. Amersfoort, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel, and C. Caneau, “Passband broadening of integrated arrayed waveguide filters using multimode interference couplers,” Electron. Lett. 32(5), 449–451 (1996).
[CrossRef]

Lee, D. C.

B. J. Luff, D. Feng, D. C. Lee, W. Qian, H. Liang, and M. Asghari, “Hybrid silicon photonics for low-cost high-bandwidth link applications,” Adv. Opt. Technol. 2008, 245131 (2008). doi:.

Liang, H.

B. J. Luff, D. Feng, D. C. Lee, W. Qian, H. Liang, and M. Asghari, “Hybrid silicon photonics for low-cost high-bandwidth link applications,” Adv. Opt. Technol. 2008, 245131 (2008). doi:.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization-insensitive silicon-on-insulator-based WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

Logvin, Y.

Luff, B. J.

B. J. Luff, D. Feng, D. C. Lee, W. Qian, H. Liang, and M. Asghari, “Hybrid silicon photonics for low-cost high-bandwidth link applications,” Adv. Opt. Technol. 2008, 245131 (2008). doi:.

Nasu, Y.

Ogawa, I.

Packirisamy, M.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

Pearson, M.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

Pimenov, K.

Qian, W.

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization-insensitive silicon-on-insulator-based WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

B. J. Luff, D. Feng, D. C. Lee, W. Qian, H. Liang, and M. Asghari, “Hybrid silicon photonics for low-cost high-bandwidth link applications,” Adv. Opt. Technol. 2008, 245131 (2008). doi:.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

Rajhel, A.

M. R. Amersfoort, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel, and C. Caneau, “Passband broadening of integrated arrayed waveguide filters using multimode interference couplers,” Electron. Lett. 32(5), 449–451 (1996).
[CrossRef]

Soole, J. B. D.

M. R. Amersfoort, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel, and C. Caneau, “Passband broadening of integrated arrayed waveguide filters using multimode interference couplers,” Electron. Lett. 32(5), 449–451 (1996).
[CrossRef]

Soref, R. A.

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987).
[CrossRef]

Tolstikhin, V. I.

Watanabe, K.

Wu, F.

Xu, D.-X.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

P. Cheben, D.-X. Xu, S. Janz, A. Delage, and D. Dalacu, “Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer,” Proc. SPIE 4997, 181–189 (2003).
[CrossRef]

Yamazaki, H.

Yin, J.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

Adv. Opt. Technol. (1)

B. J. Luff, D. Feng, D. C. Lee, W. Qian, H. Liang, and M. Asghari, “Hybrid silicon photonics for low-cost high-bandwidth link applications,” Adv. Opt. Technol. 2008, 245131 (2008). doi:.

Electron. Lett. (1)

M. R. Amersfoort, J. B. D. Soole, H. P. LeBlanc, N. C. Andreadakis, A. Rajhel, and C. Caneau, “Passband broadening of integrated arrayed waveguide filters using multimode interference couplers,” Electron. Lett. 32(5), 449–451 (1996).
[CrossRef]

IEEE J. Quantum Electron. (1)

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987).
[CrossRef]

IEEE Photon. Technol. Lett. (4)

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delage, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[CrossRef]

J.-J. He, E. S. Koteles, B. Lamontagne, L. Erickson, A. Delâge, and M. Davies, “Integrated polarization compensator for WDM waveguide demultiplexers,” IEEE Photon. Technol. Lett. 11(2), 224–226 (1999).
[CrossRef]

N.-N. Feng, D. Feng, H. Liang, W. Qian, C.-C. Kung, J. Fong, and M. Asghari, “Low-loss polarization-insensitive silicon-on-insulator-based WDM filter for triplexer applications,” IEEE Photon. Technol. Lett. 20(23), 1968–1970 (2008).
[CrossRef]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C. C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[CrossRef]

J. Lightwave Technol. (2)

Proc. SPIE (1)

P. Cheben, D.-X. Xu, S. Janz, A. Delage, and D. Dalacu, “Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer,” Proc. SPIE 4997, 181–189 (2003).
[CrossRef]

Other (7)

T. H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, R. Kou, S. Park, K. Yamada, and S. Itabashi, “Monolithic integration of a silica-based arrayed waveguide grating filter and silicon variable optical attenuators based on p-i-n carrier-injection structure,” 36th European Conference and Exhibition on Optical Communications (ECOC 2010) (IEEE, 2010), paper We.8.E.3.

P. Cheben, “Wavelength dispersive planar waveguide device: Echelle gratings and arrayed waveguide gratings,” in Optical Waveguide: From Theory to Applied Technologies, M. L. Calvo and V. Laksminarayanan, eds. (Taylor & Francis, 2007), Chap. 5.

M. P. Earnshaw, M. Cappuzzo, E. Chen, L. Gomez, A. Griffin, E. Laskowski, and A. Wong-Foy, “High performance variable optical attenuator multiplexer filter (VMUX),” Optical Fiber Communication Conference (OFC 2004) (Optical Society of America, 2004), paper MF36.

A. Kaneko, Y. Doi, Y. Hashizume, S. Kamei, Y. Tamura, I. Ogawa, T. Kominato, and S. Suzuki, “Ultra small 16 ch variable optical attenuator multiplexer (V-AWG) using multi-chip PLC integration technology for ROADM,” 31st European Conference and Exhibition on Optical Communications (ECOC 2005) (IEEE, 2005), pp. 987–990.

I. E. Day, S. W. Roberts, R. O'Carroll, A. Knights, P. Sharp, G. F. Hopper, B. J. Luff, and M. Asghari, “Single-chip variable optical attenuator and multiplexer subsystem integration,” Optical Fiber Communication Conference (OFC 2002) (Optical Society of America, 2002), pp. 72–73.

D. Feng, W. Qian, H. Liang, C.-C. Kung, J. Fong, B. J. Luff, and M. Asghari, “Novel fabrication tolerant flat-top demultiplexers based on etched diffraction gratings in SOI,” 5rd Int. Conf. Group IV Photonics, Sorrento, Italy (September 17–19, 2008), pp. 386–388.

R. Marz, Integrated Optics Design and Modeling (Artech House, 1994).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (7)

Fig. 1
Fig. 1

Mask layout of the VMUX/DEMUX chip.

Fig. 2
Fig. 2

Schematic of echelle grating.

Fig. 3
Fig. 3

Simulation of PDF and transition loss vs. etching depth of the PDF compensation region.

Fig. 4
Fig. 4

Measured 40 channel VMUX/DEMUX spectra.

Fig. 5
Fig. 5

Measured channel spectra after applying various currents to a VOA.

Fig. 6
Fig. 6

Measured attenuations vs. applied current for all 40 channel VOAs.

Fig. 7
Fig. 7

Measured frequency response for silicon p-i-n VOA.

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

n Λ ( sin α + sin β ) = m λ 0
Δ α     =     ( λ 1.55 ) 2 × [ 8.5 × 10 18 ( Δ N e )     +     6.0 × 10 18 ( Δ N h ) ]

Metrics