Abstract

We demonstrate the design, fabrication, and characterization of silicon photonic crystal cavities realized in a silicon on insulator (SOI) platform, operating at a wavelength of 4.4 μm with a quality factor of 13,600. Cavity modes are imaged using the technique of scanning resonant scattering microscopy. To the best of our knowledge, this is the first demonstration of photonic devices fabricated in SOI and operating in the 4-5μm wavelength range.

© 2011 OSA

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  1. C. Tsay, E. Mujagić, C. K. Madsen, C. F. Gmachl, and C. B. Arnold, “Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides,” Opt. Express 18(15), 15523–15530 (2010), http://www.opticsinfobase.org/abstract.cfm?URI=oe-18-15-15523 .
    [CrossRef] [PubMed]
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    [CrossRef]
  3. R. A. Soref, S. J. Emelett, and A. R. Buchwald, “Silicon waveguided components for the long-wave infrared region,” J. Opt. A, Pure Appl. Opt. 8(10), 840–848 (2006).
    [CrossRef]
  4. S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
    [CrossRef]
  5. B. Jalali, “Silicon Photonics Nonlinear Optics in the Mid-Infrared,” Nat. Photonics 4(8), 506–508 (2010).
    [CrossRef]
  6. V. Raghunathan, D. Borlaug, R. R. Rice, and B. Jalali, “Demonstration of a Mid-infrared silicon Raman amplifier,” Opt. Express 15(22), 14355–14362 (2007), http://www.opticsinfobase.org/oe/abstract.cfm?uri=oe-15-22-14355 .
    [CrossRef] [PubMed]
  7. X. P. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
    [CrossRef]
  8. T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, “Silicon-on-sapphire integrated waveguides for the mid-infrared,” Opt. Express 18(12), 12127–12135 (2010), http://www.opticsinfobase.org/abstract.cfm?URI=oe-18-12-12127 .
    [CrossRef] [PubMed]
  9. A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, “Silicon waveguides and ring resonators at 5.5 um,” Appl. Phys. Lett. 97(21), 213501 (2010).
    [CrossRef]
  10. Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
    [CrossRef] [PubMed]
  11. P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
    [CrossRef]
  12. M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
    [CrossRef]
  13. M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O'Faolain, and T. F. Krauss, “Light scattering and Fano resonances in high-Q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
    [CrossRef]
  14. M. Notomi, A. Shinya, S. Mitsugi, G. Kira, E. Kuramochi, and T. Tanabe, “Optical bistable switching action of Si high-Q photonic-crystal nanocavities,” Opt. Express 13(7), 2678–2687 (2005).
    [CrossRef] [PubMed]
  15. T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. A. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
    [CrossRef] [PubMed]

2010

C. Tsay, E. Mujagić, C. K. Madsen, C. F. Gmachl, and C. B. Arnold, “Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides,” Opt. Express 18(15), 15523–15530 (2010), http://www.opticsinfobase.org/abstract.cfm?URI=oe-18-15-15523 .
[CrossRef] [PubMed]

R. Soref, “Mid-infrared photonics in silicon and germanium,” Nat. Photonics 4(8), 495–497 (2010).
[CrossRef]

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

B. Jalali, “Silicon Photonics Nonlinear Optics in the Mid-Infrared,” Nat. Photonics 4(8), 506–508 (2010).
[CrossRef]

X. P. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, “Silicon-on-sapphire integrated waveguides for the mid-infrared,” Opt. Express 18(12), 12127–12135 (2010), http://www.opticsinfobase.org/abstract.cfm?URI=oe-18-12-12127 .
[CrossRef] [PubMed]

A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, “Silicon waveguides and ring resonators at 5.5 um,” Appl. Phys. Lett. 97(21), 213501 (2010).
[CrossRef]

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. A. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[CrossRef] [PubMed]

2009

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O'Faolain, and T. F. Krauss, “Light scattering and Fano resonances in high-Q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

2007

2006

R. A. Soref, S. J. Emelett, and A. R. Buchwald, “Silicon waveguided components for the long-wave infrared region,” J. Opt. A, Pure Appl. Opt. 8(10), 840–848 (2006).
[CrossRef]

2005

M. Notomi, A. Shinya, S. Mitsugi, G. Kira, E. Kuramochi, and T. Tanabe, “Optical bistable switching action of Si high-Q photonic-crystal nanocavities,” Opt. Express 13(7), 2678–2687 (2005).
[CrossRef] [PubMed]

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

2003

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

Aers, G. C.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Akahane, Y.

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

Alic, N.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Andreani, L. C.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O'Faolain, and T. F. Krauss, “Light scattering and Fano resonances in high-Q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Arnold, C. B.

Asano, T.

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

Asher, W.

Babinec, T. M.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. A. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[CrossRef] [PubMed]

Baehr-Jones, T.

Belotti, M.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O'Faolain, and T. F. Krauss, “Light scattering and Fano resonances in high-Q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Boggio, J. M. C.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Borlaug, D.

Buchwald, A. R.

R. A. Soref, S. J. Emelett, and A. R. Buchwald, “Silicon waveguided components for the long-wave infrared region,” J. Opt. A, Pure Appl. Opt. 8(10), 840–848 (2006).
[CrossRef]

Cheung, I. W.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Dalacu, D.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Deotare, P. B.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

Divliansky, I. B.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Emelett, S. J.

R. A. Soref, S. J. Emelett, and A. R. Buchwald, “Silicon waveguided components for the long-wave infrared region,” J. Opt. A, Pure Appl. Opt. 8(10), 840–848 (2006).
[CrossRef]

Frank, I. W.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

Frederick, S.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Galli, M.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O'Faolain, and T. F. Krauss, “Light scattering and Fano resonances in high-Q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Gmachl, C. F.

Green, W. M. J.

X. P. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

Hausmann, B. J. M.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. A. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[CrossRef] [PubMed]

Hemmer, P. R.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. A. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[CrossRef] [PubMed]

Hochberg, M.

Ilic, R.

Jalali, B.

Khan, M.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. A. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[CrossRef] [PubMed]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

Kira, G.

Krauss, T. F.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O'Faolain, and T. F. Krauss, “Light scattering and Fano resonances in high-Q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Kuramochi, E.

Liu, X. P.

X. P. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

Liu, Y.

A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, “Silicon waveguides and ring resonators at 5.5 um,” Appl. Phys. Lett. 97(21), 213501 (2010).
[CrossRef]

Loncar, M.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. A. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[CrossRef] [PubMed]

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

Madsen, C. K.

Maze, J. R.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. A. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[CrossRef] [PubMed]

McCutcheon, M. W.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Mitsugi, S.

Mookherjea, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Moro, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Mujagic, E.

Noda, S.

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

Notomi, M.

O'Faolain, L.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O'Faolain, and T. F. Krauss, “Light scattering and Fano resonances in high-Q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Osgood, R. M.

X. P. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

Park, J. S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Penkov, B.

Poole, P. J.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Portalupi, S. L.

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O'Faolain, and T. F. Krauss, “Light scattering and Fano resonances in high-Q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

Radic, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Raghunathan, V.

Rice, R. R.

Rieger, G. W.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Shinya, A.

Song, B. S.

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

Soref, R.

R. Soref, “Mid-infrared photonics in silicon and germanium,” Nat. Photonics 4(8), 495–497 (2010).
[CrossRef]

Soref, R. A.

R. A. Soref, S. J. Emelett, and A. R. Buchwald, “Silicon waveguided components for the long-wave infrared region,” J. Opt. A, Pure Appl. Opt. 8(10), 840–848 (2006).
[CrossRef]

Spott, A.

Tanabe, T.

Tsay, C.

Vlasov, Y. A.

X. P. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

Williams, R. L.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Young, J. F.

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

Zhang, Y. A.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. A. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[CrossRef] [PubMed]

Zlatanovic, S.

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

Appl. Phys. Lett.

P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Loncar, “High quality factor photonic crystal nanobeam cavities,” Appl. Phys. Lett. 94(12), 121106 (2009).
[CrossRef]

M. W. McCutcheon, G. W. Rieger, I. W. Cheung, J. F. Young, D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, “Resonant scattering and second-harmonic spectroscopy of planar photonic crystal microcavities,” Appl. Phys. Lett. 87(22), 221110 (2005).
[CrossRef]

M. Galli, S. L. Portalupi, M. Belotti, L. C. Andreani, L. O'Faolain, and T. F. Krauss, “Light scattering and Fano resonances in high-Q photonic crystal nanocavities,” Appl. Phys. Lett. 94(7), 071101 (2009).
[CrossRef]

A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, “Silicon waveguides and ring resonators at 5.5 um,” Appl. Phys. Lett. 97(21), 213501 (2010).
[CrossRef]

J. Opt. A, Pure Appl. Opt.

R. A. Soref, S. J. Emelett, and A. R. Buchwald, “Silicon waveguided components for the long-wave infrared region,” J. Opt. A, Pure Appl. Opt. 8(10), 840–848 (2006).
[CrossRef]

Nat. Nanotechnol.

T. M. Babinec, B. J. M. Hausmann, M. Khan, Y. A. Zhang, J. R. Maze, P. R. Hemmer, and M. Loncar, “A diamond nanowire single-photon source,” Nat. Nanotechnol. 5(3), 195–199 (2010).
[CrossRef] [PubMed]

Nat. Photonics

S. Zlatanovic, J. S. Park, S. Moro, J. M. C. Boggio, I. B. Divliansky, N. Alic, S. Mookherjea, and S. Radic, “Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source,” Nat. Photonics 4(8), 561–564 (2010).
[CrossRef]

B. Jalali, “Silicon Photonics Nonlinear Optics in the Mid-Infrared,” Nat. Photonics 4(8), 506–508 (2010).
[CrossRef]

R. Soref, “Mid-infrared photonics in silicon and germanium,” Nat. Photonics 4(8), 495–497 (2010).
[CrossRef]

X. P. Liu, R. M. Osgood, Y. A. Vlasov, and W. M. J. Green, “Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides,” Nat. Photonics 4(8), 557–560 (2010).
[CrossRef]

Nature

Y. Akahane, T. Asano, B. S. Song, and S. Noda, “High-Q photonic nanocavity in a two-dimensional photonic crystal,” Nature 425(6961), 944–947 (2003).
[CrossRef] [PubMed]

Opt. Express

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Figures (6)

Fig. 1
Fig. 1

(a) Mode profile of Ez field component of L3 photonic crystal cavity with a = 1.34 μm, r = 0.263a, t = 0.5 μm, and hole shift s = 0.15a, with resonance wavelength of 4.604 μm and Q factor of 24,000. (b) Scanning electron micrograph of fabricated L3 photonic crystal cavity. (c) Scanning electron micrograph of etched sidewall of photonic crystal cavity hole; image is taken at 45° tilt.

Fig. 2
Fig. 2

Results of FDTD calculations showing L3 photonic crystal cavity resonance wavelengths and quality factors as a function of s, the hole shift.

Fig. 3
Fig. 3

Schematic of experimental setup used for resonant scattering-based characterization of photonic crystal cavities.

Fig. 4
Fig. 4

(a) Resonant scattering spectra of photonic crystal cavities with s = 0, s = 0.075a, s = 0.15a, s = 0.225a. Scale is linear. Inset shows Fano fit to s = 0.15a cavity. Fitting parameters are A0 = 5.6e-5, q = 2.52, Γ = 5.0 GHz, f0 = 68 THz, and F0 = 0.0013. Cavity with s = 0.2a did not show a resonance. (b) resonance wavelength and Q vs. s. for measured cavities. A peak Q of 13,600 is measured at 4408 nm. Lines between points are there to guide the eye.

Fig. 5
Fig. 5

Mid-infrared scanning resonant scattering image of an array of 5 cavities (upper left hand structure is photonic crystal with no cavity). Scanning electron micrograph is provided for comparison. When our laser is tuned to one of the cavity resonances, and scanned over the cavity array, only the cavity in resonance with the laser lights up. For example, when 4380.2 nm light, corresponding to the resonance of the top right cavity in the center panel, is scanned over the array, only that cavity appears “ON”, featuring a bright spot in its center. Alternatively, when the laser is tuned to 4401.5nm and scanned over the array, only the middle-left cavity (rightmost panel) resonates.

Fig. 6
Fig. 6

(a) Resonant scattering spectrum showing peaks corresponding to two inter-cavity Fabry-Perot resonances (4430.0 nm and 4567.5 nm) and one L3 photonic crystal cavity resonance (4444.0 nm). (b) scanning images of Fabry-Perot resonances (leftmost and right most panels) and photonic crystal cavity resonance (center panel).

Equations (1)

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F ( f ) = A 0 + F 0 [ q + 2 ( f f 0 ) / Γ ] 2 1 + [ 2 ( f f 0 ) / Γ ] 2 ,

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