A single-shot common-path phase-stepping radial shearing interferometer (RSI) is proposed for wavefront measurements. In the proposed RSI, three quarter-wave plates are used as phase shifters to produce four spatially separated phase-stepping fringe patterns that are recorded simultaneously by a single CCD camera. The proposed RSI can measure the wavefront under test in real-time, and it is also insensitive to environmental vibration due to its common-path structure. Experimentally the proposed RSI is applied to detect the distorted wavefronts generated by a liquid crystal spatial light modulator. The measured aberrations are in good agreement with that obtained with (by) a Hartmann-Shack wavefront sensor, indicating that the proposed RSI is a useful tool for wavefront measurements.
© 2011 OSA
Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography
Yucong Zhu, Katsumi Sugisaki, Masashi Okada, Katsura Otaki, Zhiqiang Liu, Jun Kawakami, Mikihiko Ishii, Jun Saito, Katsuhiko Murakami, Masanobu Hasegawa, Chidane Ouchi, Seima Kato, Takayuki Hasegawa, Akiyoshi Suzuki, Hideo Yokota, and Masahito Niibe
Appl. Opt. 46(27) 6783-6792 (2007)
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