A single-shot common-path phase-stepping radial shearing interferometer (RSI) is proposed for wavefront measurements. In the proposed RSI, three quarter-wave plates are used as phase shifters to produce four spatially separated phase-stepping fringe patterns that are recorded simultaneously by a single CCD camera. The proposed RSI can measure the wavefront under test in real-time, and it is also insensitive to environmental vibration due to its common-path structure. Experimentally the proposed RSI is applied to detect the distorted wavefronts generated by a liquid crystal spatial light modulator. The measured aberrations are in good agreement with that obtained with (by) a Hartmann-Shack wavefront sensor, indicating that the proposed RSI is a useful tool for wavefront measurements.
© 2011 OSA
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