Abstract

A comparative study of laser induced damage of HfO2/SiO2 and TiO2/SiO2 mirrors at 1064 nm has been carried out. One TiO2/SiO2 mirror with absorption of 300 ppm and two HfO2/SiO2 mirrors with absorption of 40 and 4.5 ppm were fabricated using electron beam evaporation method. For r-on-1 test, all HfO2/SiO2 mirrors with low average absorption are above 150 J/cm2 at 10ns. However, the TiO2/SiO2 mirrors with high average absorption are just 9.5 J/cm2, which are probably due to the rather high absorption and rather low band gap energy. Meanwhile, all the samples were irradiated from front and back side respectively using the raster scan test mode. In case of front side irradiation, it is found that: for TiO2/SiO2 high reflectors, the representative damage morphologies are shallow pits that were probably caused by absorbing centers. However, for HfO2/SiO2 high reflectors, the dominant damage morphologies are micrometer-sized nodules ejected pits and the delamination initiating from the pits. The absorption of HfO2/SiO2 coatings is low enough to have minor influence on the laser damage resistance. In case of backside irradiation, the morphology of TiO2/SiO2 mirrors is mainly center melted pits that are thermal melting induced damage. Meanwhile, HfO2/SiO2 mirrors with isometrical fracture rings damage morphology are thermal induced stress damage.

© 2011 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. M. R. Borden, J. A. Folta, C. J. Stolz, J. R. Taylor, J. E. Wolfe, A. J Griffin, M. D. Thomas, “Improved method for laser damage testing coated optics”, Proc. SPIE 5991, 59912A1 (2005)
  2. F. Y. Genin and C. J. Stolz, “Morphologies of laser-induced damage in hafnia-silica multilayer mirror and polarizer coatings,” Proc. SPIE 2870, 439–448 (1996).
    [CrossRef]
  3. M. R. Kozlowski, “Ri. Tench, R. Chow, L. Sheehan, “Influence of defect shape on laser induced damage in multilayer coatings,” Proc. SPIE 2253, 743–750 (1994).
    [CrossRef]
  4. J. C. Stolz, J. Adams, M. D. Shirk, M. A. Norton, and T. L. Weiland, “Engineering meter-scale laser resistant coatings for the near IR”, Proc. SPIE 5963, 59630Y1–9 (2005)
  5. J. Christopher, Stolz, Michael D. Thomas and Andrew J. Griffin, “BDS thin film damage competition”, Proc. SPIE 7132, 71320C1 (2008)
  6. J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
    [CrossRef]
  7. M. R. Kozlowski and R. Chow, “The role of defects in laser damage of multilayer coatings,” Proc. SPIE 2114, 640–649 (1994).
    [CrossRef]
  8. C. J. Stolz, R. J. Tench, M. R. Kozlowski, and A. Fornier, “A comparison of nodular defect seed geometries from different deposition techniques,” Proc. SPIE 2714, 374–382 (1995).
    [CrossRef]
  9. S. Papernov, and A. W. Schmid, “Laser-induced surface damage of optical materials: Absorption sources, initiation, growth, and mitigation”, Proc. SPIE 7132, 71321J1 (2008)
  10. E. Welsch and D. Ristau, “Photothermal measurements on optical thin films,” Appl. Opt. 34(31), 7239–7253 (1995).
    [CrossRef] [PubMed]
  11. J. Dijon, T. Poiroux, and C. Desrumaux, “Nano absorbing centers: a key point in laser damage thin films,” Proc. SPIE 2966, 315–325 (1997).
    [CrossRef]
  12. L. Jensen, M. Jupé, and D. Ristau, “UV damage mechanisms in oxide high reflectors,” Proc. SPIE 7132, 71320G, 71320G-12 (2008).
    [CrossRef]
  13. S. papernov, A. W. Schmid, J. B. Oliver, and A. L. Rigatti, “Damage threshold and morphology of the front- and back-irradiated SiO2 thin films containing gold nanoparticles as artificial absorbing defects,” Proc. SPIE 6720, 67200G (2007).
    [CrossRef]
  14. J. Hue, P. Garrec, J. Dijon, and P. Lyan, “R-on-1 automatic mapping: a new tool for laser damage testing,” Proc. SPIE 2714, 90–101 (1996).
    [CrossRef]
  15. M. R. Borden, J. A. Folta, C. J. Stolz, J. R. Taylor, J. E. Wolfe, A. J. Griffin, and M. D. Thomas, “Improved method for laser damage testing coated optics”, Proc. SPIE 5991, 59912A1 (2005)
  16. M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005).
    [CrossRef]
  17. F. Y. Genin, C. J. Stolz, and M. R. Kozlowski, “Growth of laser-induced damage during repetitive illumination of HfO2-SiO2 multilayer mirror and polarizer coatings,” Proc. SPIE 2966, 273–282 (1997).
    [CrossRef]
  18. J.-Y. Natoli, F. Wagner, A. Ciapponi, S. Palmier, L. Gallais, and M. Commandré, “Non destructive evaluation on optical components for high power density applications,” Proc. SPIE 7101, 710118 (2008).
    [CrossRef]
  19. X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, “Laser damage resistance of dichroic mirrors at 532 nm and 1064nm,” Proc. SPIE 7842, 78420C, 78420C-8 (2010).
    [CrossRef]

2010

X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, “Laser damage resistance of dichroic mirrors at 532 nm and 1064nm,” Proc. SPIE 7842, 78420C, 78420C-8 (2010).
[CrossRef]

2008

J.-Y. Natoli, F. Wagner, A. Ciapponi, S. Palmier, L. Gallais, and M. Commandré, “Non destructive evaluation on optical components for high power density applications,” Proc. SPIE 7101, 710118 (2008).
[CrossRef]

L. Jensen, M. Jupé, and D. Ristau, “UV damage mechanisms in oxide high reflectors,” Proc. SPIE 7132, 71320G, 71320G-12 (2008).
[CrossRef]

2007

S. papernov, A. W. Schmid, J. B. Oliver, and A. L. Rigatti, “Damage threshold and morphology of the front- and back-irradiated SiO2 thin films containing gold nanoparticles as artificial absorbing defects,” Proc. SPIE 6720, 67200G (2007).
[CrossRef]

2005

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005).
[CrossRef]

2004

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

1997

F. Y. Genin, C. J. Stolz, and M. R. Kozlowski, “Growth of laser-induced damage during repetitive illumination of HfO2-SiO2 multilayer mirror and polarizer coatings,” Proc. SPIE 2966, 273–282 (1997).
[CrossRef]

J. Dijon, T. Poiroux, and C. Desrumaux, “Nano absorbing centers: a key point in laser damage thin films,” Proc. SPIE 2966, 315–325 (1997).
[CrossRef]

1996

F. Y. Genin and C. J. Stolz, “Morphologies of laser-induced damage in hafnia-silica multilayer mirror and polarizer coatings,” Proc. SPIE 2870, 439–448 (1996).
[CrossRef]

J. Hue, P. Garrec, J. Dijon, and P. Lyan, “R-on-1 automatic mapping: a new tool for laser damage testing,” Proc. SPIE 2714, 90–101 (1996).
[CrossRef]

1995

C. J. Stolz, R. J. Tench, M. R. Kozlowski, and A. Fornier, “A comparison of nodular defect seed geometries from different deposition techniques,” Proc. SPIE 2714, 374–382 (1995).
[CrossRef]

E. Welsch and D. Ristau, “Photothermal measurements on optical thin films,” Appl. Opt. 34(31), 7239–7253 (1995).
[CrossRef] [PubMed]

1994

M. R. Kozlowski and R. Chow, “The role of defects in laser damage of multilayer coatings,” Proc. SPIE 2114, 640–649 (1994).
[CrossRef]

M. R. Kozlowski, “Ri. Tench, R. Chow, L. Sheehan, “Influence of defect shape on laser induced damage in multilayer coatings,” Proc. SPIE 2253, 743–750 (1994).
[CrossRef]

Borden, M. R.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Campbell, J. H.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Cheng, X.

X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, “Laser damage resistance of dichroic mirrors at 532 nm and 1064nm,” Proc. SPIE 7842, 78420C, 78420C-8 (2010).
[CrossRef]

Chow, R.

M. R. Kozlowski and R. Chow, “The role of defects in laser damage of multilayer coatings,” Proc. SPIE 2114, 640–649 (1994).
[CrossRef]

Ciapponi, A.

J.-Y. Natoli, F. Wagner, A. Ciapponi, S. Palmier, L. Gallais, and M. Commandré, “Non destructive evaluation on optical components for high power density applications,” Proc. SPIE 7101, 710118 (2008).
[CrossRef]

Commandré, M.

J.-Y. Natoli, F. Wagner, A. Ciapponi, S. Palmier, L. Gallais, and M. Commandré, “Non destructive evaluation on optical components for high power density applications,” Proc. SPIE 7101, 710118 (2008).
[CrossRef]

Desrumaux, C.

J. Dijon, T. Poiroux, and C. Desrumaux, “Nano absorbing centers: a key point in laser damage thin films,” Proc. SPIE 2966, 315–325 (1997).
[CrossRef]

Dijon, J.

J. Dijon, T. Poiroux, and C. Desrumaux, “Nano absorbing centers: a key point in laser damage thin films,” Proc. SPIE 2966, 315–325 (1997).
[CrossRef]

J. Hue, P. Garrec, J. Dijon, and P. Lyan, “R-on-1 automatic mapping: a new tool for laser damage testing,” Proc. SPIE 2714, 90–101 (1996).
[CrossRef]

Ding, T.

X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, “Laser damage resistance of dichroic mirrors at 532 nm and 1064nm,” Proc. SPIE 7842, 78420C, 78420C-8 (2010).
[CrossRef]

Feit, M. D.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Fornier, A.

C. J. Stolz, R. J. Tench, M. R. Kozlowski, and A. Fornier, “A comparison of nodular defect seed geometries from different deposition techniques,” Proc. SPIE 2714, 374–382 (1995).
[CrossRef]

Gallais, L.

J.-Y. Natoli, F. Wagner, A. Ciapponi, S. Palmier, L. Gallais, and M. Commandré, “Non destructive evaluation on optical components for high power density applications,” Proc. SPIE 7101, 710118 (2008).
[CrossRef]

Garrec, P.

J. Hue, P. Garrec, J. Dijon, and P. Lyan, “R-on-1 automatic mapping: a new tool for laser damage testing,” Proc. SPIE 2714, 90–101 (1996).
[CrossRef]

Genin, F. Y.

F. Y. Genin, C. J. Stolz, and M. R. Kozlowski, “Growth of laser-induced damage during repetitive illumination of HfO2-SiO2 multilayer mirror and polarizer coatings,” Proc. SPIE 2966, 273–282 (1997).
[CrossRef]

F. Y. Genin and C. J. Stolz, “Morphologies of laser-induced damage in hafnia-silica multilayer mirror and polarizer coatings,” Proc. SPIE 2870, 439–448 (1996).
[CrossRef]

Hackel, R. P.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Hawley-Fedder, R. A.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Hue, J.

J. Hue, P. Garrec, J. Dijon, and P. Lyan, “R-on-1 automatic mapping: a new tool for laser damage testing,” Proc. SPIE 2714, 90–101 (1996).
[CrossRef]

Jensen, L.

L. Jensen, M. Jupé, and D. Ristau, “UV damage mechanisms in oxide high reflectors,” Proc. SPIE 7132, 71320G, 71320G-12 (2008).
[CrossRef]

Jiao, H.

X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, “Laser damage resistance of dichroic mirrors at 532 nm and 1064nm,” Proc. SPIE 7842, 78420C, 78420C-8 (2010).
[CrossRef]

Jupé, M.

L. Jensen, M. Jupé, and D. Ristau, “UV damage mechanisms in oxide high reflectors,” Proc. SPIE 7132, 71320G, 71320G-12 (2008).
[CrossRef]

Kozlowski, M. R.

F. Y. Genin, C. J. Stolz, and M. R. Kozlowski, “Growth of laser-induced damage during repetitive illumination of HfO2-SiO2 multilayer mirror and polarizer coatings,” Proc. SPIE 2966, 273–282 (1997).
[CrossRef]

Kozlowski, M. R.

C. J. Stolz, R. J. Tench, M. R. Kozlowski, and A. Fornier, “A comparison of nodular defect seed geometries from different deposition techniques,” Proc. SPIE 2714, 374–382 (1995).
[CrossRef]

Kozlowski, M. R.

M. R. Kozlowski and R. Chow, “The role of defects in laser damage of multilayer coatings,” Proc. SPIE 2114, 640–649 (1994).
[CrossRef]

M. R. Kozlowski, “Ri. Tench, R. Chow, L. Sheehan, “Influence of defect shape on laser induced damage in multilayer coatings,” Proc. SPIE 2253, 743–750 (1994).
[CrossRef]

Liu, J.

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005).
[CrossRef]

Lyan, P.

J. Hue, P. Garrec, J. Dijon, and P. Lyan, “R-on-1 automatic mapping: a new tool for laser damage testing,” Proc. SPIE 2714, 90–101 (1996).
[CrossRef]

Ma, B.

X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, “Laser damage resistance of dichroic mirrors at 532 nm and 1064nm,” Proc. SPIE 7842, 78420C, 78420C-8 (2010).
[CrossRef]

Menapace, J. A.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Mero, M.

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005).
[CrossRef]

Natoli, J.-Y.

J.-Y. Natoli, F. Wagner, A. Ciapponi, S. Palmier, L. Gallais, and M. Commandré, “Non destructive evaluation on optical components for high power density applications,” Proc. SPIE 7101, 710118 (2008).
[CrossRef]

Oliver, J. B.

S. papernov, A. W. Schmid, J. B. Oliver, and A. L. Rigatti, “Damage threshold and morphology of the front- and back-irradiated SiO2 thin films containing gold nanoparticles as artificial absorbing defects,” Proc. SPIE 6720, 67200G (2007).
[CrossRef]

Palmier, S.

J.-Y. Natoli, F. Wagner, A. Ciapponi, S. Palmier, L. Gallais, and M. Commandré, “Non destructive evaluation on optical components for high power density applications,” Proc. SPIE 7101, 710118 (2008).
[CrossRef]

papernov, S.

S. papernov, A. W. Schmid, J. B. Oliver, and A. L. Rigatti, “Damage threshold and morphology of the front- and back-irradiated SiO2 thin films containing gold nanoparticles as artificial absorbing defects,” Proc. SPIE 6720, 67200G (2007).
[CrossRef]

Poiroux, T.

J. Dijon, T. Poiroux, and C. Desrumaux, “Nano absorbing centers: a key point in laser damage thin films,” Proc. SPIE 2966, 315–325 (1997).
[CrossRef]

Rigatti, A. L.

S. papernov, A. W. Schmid, J. B. Oliver, and A. L. Rigatti, “Damage threshold and morphology of the front- and back-irradiated SiO2 thin films containing gold nanoparticles as artificial absorbing defects,” Proc. SPIE 6720, 67200G (2007).
[CrossRef]

Riley, M. O.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Ristau, D.

L. Jensen, M. Jupé, and D. Ristau, “UV damage mechanisms in oxide high reflectors,” Proc. SPIE 7132, 71320G, 71320G-12 (2008).
[CrossRef]

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005).
[CrossRef]

E. Welsch and D. Ristau, “Photothermal measurements on optical thin films,” Appl. Opt. 34(31), 7239–7253 (1995).
[CrossRef] [PubMed]

Rudolph, W.

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005).
[CrossRef]

Runkel, M.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Schmid, A. W.

S. papernov, A. W. Schmid, J. B. Oliver, and A. L. Rigatti, “Damage threshold and morphology of the front- and back-irradiated SiO2 thin films containing gold nanoparticles as artificial absorbing defects,” Proc. SPIE 6720, 67200G (2007).
[CrossRef]

Shen, Z.

X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, “Laser damage resistance of dichroic mirrors at 532 nm and 1064nm,” Proc. SPIE 7842, 78420C, 78420C-8 (2010).
[CrossRef]

Starke, K.

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005).
[CrossRef]

Stolz, C. J.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

F. Y. Genin, C. J. Stolz, and M. R. Kozlowski, “Growth of laser-induced damage during repetitive illumination of HfO2-SiO2 multilayer mirror and polarizer coatings,” Proc. SPIE 2966, 273–282 (1997).
[CrossRef]

F. Y. Genin and C. J. Stolz, “Morphologies of laser-induced damage in hafnia-silica multilayer mirror and polarizer coatings,” Proc. SPIE 2870, 439–448 (1996).
[CrossRef]

C. J. Stolz, R. J. Tench, M. R. Kozlowski, and A. Fornier, “A comparison of nodular defect seed geometries from different deposition techniques,” Proc. SPIE 2714, 374–382 (1995).
[CrossRef]

Tench, R. J.

C. J. Stolz, R. J. Tench, M. R. Kozlowski, and A. Fornier, “A comparison of nodular defect seed geometries from different deposition techniques,” Proc. SPIE 2714, 374–382 (1995).
[CrossRef]

Wagner, F.

J.-Y. Natoli, F. Wagner, A. Ciapponi, S. Palmier, L. Gallais, and M. Commandré, “Non destructive evaluation on optical components for high power density applications,” Proc. SPIE 7101, 710118 (2008).
[CrossRef]

Wang, Z.

X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, “Laser damage resistance of dichroic mirrors at 532 nm and 1064nm,” Proc. SPIE 7842, 78420C, 78420C-8 (2010).
[CrossRef]

Welsch, E.

Whitman, P. K.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Yu, J.

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Zhang, J.

X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, “Laser damage resistance of dichroic mirrors at 532 nm and 1064nm,” Proc. SPIE 7842, 78420C, 78420C-8 (2010).
[CrossRef]

Appl. Opt.

Phys. Rev. B

M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, “Scaling laws of femtosecond laser pulse induced breakdown in oxide films,” Phys. Rev. B 71(11), 115109 (2005).
[CrossRef]

Proc. SPIE

F. Y. Genin, C. J. Stolz, and M. R. Kozlowski, “Growth of laser-induced damage during repetitive illumination of HfO2-SiO2 multilayer mirror and polarizer coatings,” Proc. SPIE 2966, 273–282 (1997).
[CrossRef]

J.-Y. Natoli, F. Wagner, A. Ciapponi, S. Palmier, L. Gallais, and M. Commandré, “Non destructive evaluation on optical components for high power density applications,” Proc. SPIE 7101, 710118 (2008).
[CrossRef]

X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, “Laser damage resistance of dichroic mirrors at 532 nm and 1064nm,” Proc. SPIE 7842, 78420C, 78420C-8 (2010).
[CrossRef]

J. Dijon, T. Poiroux, and C. Desrumaux, “Nano absorbing centers: a key point in laser damage thin films,” Proc. SPIE 2966, 315–325 (1997).
[CrossRef]

L. Jensen, M. Jupé, and D. Ristau, “UV damage mechanisms in oxide high reflectors,” Proc. SPIE 7132, 71320G, 71320G-12 (2008).
[CrossRef]

S. papernov, A. W. Schmid, J. B. Oliver, and A. L. Rigatti, “Damage threshold and morphology of the front- and back-irradiated SiO2 thin films containing gold nanoparticles as artificial absorbing defects,” Proc. SPIE 6720, 67200G (2007).
[CrossRef]

J. Hue, P. Garrec, J. Dijon, and P. Lyan, “R-on-1 automatic mapping: a new tool for laser damage testing,” Proc. SPIE 2714, 90–101 (1996).
[CrossRef]

F. Y. Genin and C. J. Stolz, “Morphologies of laser-induced damage in hafnia-silica multilayer mirror and polarizer coatings,” Proc. SPIE 2870, 439–448 (1996).
[CrossRef]

M. R. Kozlowski, “Ri. Tench, R. Chow, L. Sheehan, “Influence of defect shape on laser induced damage in multilayer coatings,” Proc. SPIE 2253, 743–750 (1994).
[CrossRef]

J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, “NIF optical materials and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

M. R. Kozlowski and R. Chow, “The role of defects in laser damage of multilayer coatings,” Proc. SPIE 2114, 640–649 (1994).
[CrossRef]

C. J. Stolz, R. J. Tench, M. R. Kozlowski, and A. Fornier, “A comparison of nodular defect seed geometries from different deposition techniques,” Proc. SPIE 2714, 374–382 (1995).
[CrossRef]

Other

S. Papernov, and A. W. Schmid, “Laser-induced surface damage of optical materials: Absorption sources, initiation, growth, and mitigation”, Proc. SPIE 7132, 71321J1 (2008)

J. C. Stolz, J. Adams, M. D. Shirk, M. A. Norton, and T. L. Weiland, “Engineering meter-scale laser resistant coatings for the near IR”, Proc. SPIE 5963, 59630Y1–9 (2005)

J. Christopher, Stolz, Michael D. Thomas and Andrew J. Griffin, “BDS thin film damage competition”, Proc. SPIE 7132, 71320C1 (2008)

M. R. Borden, J. A. Folta, C. J. Stolz, J. R. Taylor, J. E. Wolfe, A. J. Griffin, and M. D. Thomas, “Improved method for laser damage testing coated optics”, Proc. SPIE 5991, 59912A1 (2005)

M. R. Borden, J. A. Folta, C. J. Stolz, J. R. Taylor, J. E. Wolfe, A. J Griffin, M. D. Thomas, “Improved method for laser damage testing coated optics”, Proc. SPIE 5991, 59912A1 (2005)

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (5)

Fig. 1
Fig. 1

Laser damage threshold of Samples using r-on-1 test mode: (a) Sample T1 with average 9.5J/cm2, (b) Sample H1: 155.8J/cm2, Sample H2: 160.3 J/cm2.

Fig. 2
Fig. 2

Representative damage morphologies of Sample T1

Fig. 3
Fig. 3

Representative damage morphologies of Sample H1 and H2 under raster scan testing mode, (a) SEM microscope; (b) nomarski microscope under 200X magnification

Fig. 4
Fig. 4

Dominant laser damage morphologies of Sample T1 under rear irradiation using raster scan test method, (a) nomarski microscope under 500X magnification; (b) cross-section using FIB microscope

Fig. 5
Fig. 5

Representative laser damage morphologies of Sample H1, H2 under rear irradiation using raster scan test method, (a) Nomarski microscope under 500X magnification; (b) using SEM microscope

Tables (1)

Tables Icon

Table 1 Details of various measurements of these samples

Metrics