Abstract

We designed, fabricated and characterized a nano-periodical highly-efficient blazed grating for extreme-ultraviolet (XUV) radiation. The grating was optimized by the rigorous coupled-wave analysis method (RCWA) and milled into the top layer of a highly-reflective mirror for IR light. The XUV diffraction efficiency was determined to be around 20% in the range from 35.5 to 79.2 nm. The effects of the nanograting on the reflectivity of the IR light and non-linear effects introduced by the nanograting have been measured and are discussed.

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2010 (2)

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010).
[CrossRef] [PubMed]

2009 (1)

T. Hanke, G. Krauss, D. Träutlein, B. Wild, R. Bratschitsch, and A. Leitenstorfer, “Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses,” Phys. Rev. Lett. 103(25), 257404 (2009).
[CrossRef] [PubMed]

2008 (3)

T. Eidam, F. Röser, O. Schmidt, J. Limpert, and A. Tünnermann, “57 W, 27 fs pulses from a fiber laser system using nonlinear compression,” Appl. Phys. B 92(1), 9–12 (2008).
[CrossRef]

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

D. C. Yost, T. R. Schibli, and J. Ye, “Efficient output coupling of intracavity high-harmonic generation,” Opt. Lett. 33(10), 1099–1101 (2008).
[CrossRef] [PubMed]

2007 (3)

M. I. Stockman, M. F. Kling, U. Kleineberg, and F. Krausz, “Attosecond nanoplasmonic-field microscope,” Nat. Photonics 1(9), 539–544 (2007).
[CrossRef]

M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007).
[CrossRef]

J. Wu and H. Zeng, “Cavity-enhanced noncollinear high-harmonic generation for extreme ultraviolet frequency combs,” Opt. Lett. 32(22), 3315–3317 (2007).
[CrossRef] [PubMed]

2006 (1)

K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14(18), 8189–8197 (2006).
[CrossRef] [PubMed]

2005 (2)

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005).
[CrossRef] [PubMed]

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94(19), 193201 (2005).
[CrossRef] [PubMed]

1997 (1)

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

1995 (2)

M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12(5), 1068–1076 (1995).
[CrossRef]

M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, “Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach,” J. Opt. Soc. Am. A 12(5), 1077–1086 (1995).
[CrossRef]

1993 (1)

P. B. Corkum, “Plasma perspective on strong field multiphoton ionization,” Phys. Rev. Lett. 71(13), 1994–1997 (1993).
[CrossRef] [PubMed]

1986 (1)

M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of metallic surface-relief gratings,” J. Opt. Soc. Am. A 3(11), 1780–1787 (1986).
[CrossRef]

Alahmed, Z. A.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

Apolonski, A.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

Azzeer, A. M.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

Bernhardt, B.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

Bratschitsch, R.

T. Hanke, G. Krauss, D. Träutlein, B. Wild, R. Bratschitsch, and A. Leitenstorfer, “Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses,” Phys. Rev. Lett. 103(25), 257404 (2009).
[CrossRef] [PubMed]

Burnett, N. H.

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

Corkum, P. B.

P. B. Corkum, “Plasma perspective on strong field multiphoton ionization,” Phys. Rev. Lett. 71(13), 1994–1997 (1993).
[CrossRef] [PubMed]

Eidam, T.

I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010).
[CrossRef] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

T. Eidam, F. Röser, O. Schmidt, J. Limpert, and A. Tünnermann, “57 W, 27 fs pulses from a fiber laser system using nonlinear compression,” Appl. Phys. B 92(1), 9–12 (2008).
[CrossRef]

Fernandez, A.

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

Fill, E.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010).
[CrossRef] [PubMed]

Gaylord, T. K.

M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12(5), 1068–1076 (1995).
[CrossRef]

M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, “Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach,” J. Opt. Soc. Am. A 12(5), 1077–1086 (1995).
[CrossRef]

M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of metallic surface-relief gratings,” J. Opt. Soc. Am. A 3(11), 1780–1787 (1986).
[CrossRef]

Gohle, C.

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005).
[CrossRef] [PubMed]

Gohle, Ch.

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

Goulielmakis, E.

M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007).
[CrossRef]

Graf, R.

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

Grann, E. B.

M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, “Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach,” J. Opt. Soc. Am. A 12(5), 1077–1086 (1995).
[CrossRef]

M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12(5), 1068–1076 (1995).
[CrossRef]

Gu, X.

I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010).
[CrossRef] [PubMed]

Hanke, T.

T. Hanke, G. Krauss, D. Träutlein, B. Wild, R. Bratschitsch, and A. Leitenstorfer, “Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses,” Phys. Rev. Lett. 103(25), 257404 (2009).
[CrossRef] [PubMed]

Hänsch, T. W.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005).
[CrossRef] [PubMed]

Herrmann, M.

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005).
[CrossRef] [PubMed]

Hofstetter, M.

M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007).
[CrossRef]

Holzwarth, R.

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005).
[CrossRef] [PubMed]

Jones, R. J.

K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14(18), 8189–8197 (2006).
[CrossRef] [PubMed]

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94(19), 193201 (2005).
[CrossRef] [PubMed]

Kan, C.

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

Kim, D.

M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007).
[CrossRef]

Kim, J.

M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007).
[CrossRef]

Kleineberg, U.

M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007).
[CrossRef]

M. I. Stockman, M. F. Kling, U. Kleineberg, and F. Krausz, “Attosecond nanoplasmonic-field microscope,” Nat. Photonics 1(9), 539–544 (2007).
[CrossRef]

Kling, M. F.

M. I. Stockman, M. F. Kling, U. Kleineberg, and F. Krausz, “Attosecond nanoplasmonic-field microscope,” Nat. Photonics 1(9), 539–544 (2007).
[CrossRef]

Koppitsch, R.

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

Krauss, G.

T. Hanke, G. Krauss, D. Träutlein, B. Wild, R. Bratschitsch, and A. Leitenstorfer, “Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses,” Phys. Rev. Lett. 103(25), 257404 (2009).
[CrossRef] [PubMed]

Krausz, F.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010).
[CrossRef] [PubMed]

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

M. I. Stockman, M. F. Kling, U. Kleineberg, and F. Krausz, “Attosecond nanoplasmonic-field microscope,” Nat. Photonics 1(9), 539–544 (2007).
[CrossRef]

M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007).
[CrossRef]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005).
[CrossRef] [PubMed]

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

Leitenstorfer, A.

T. Hanke, G. Krauss, D. Träutlein, B. Wild, R. Bratschitsch, and A. Leitenstorfer, “Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses,” Phys. Rev. Lett. 103(25), 257404 (2009).
[CrossRef] [PubMed]

Lenzner, M.

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

Limpert, J.

I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010).
[CrossRef] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

T. Eidam, F. Röser, O. Schmidt, J. Limpert, and A. Tünnermann, “57 W, 27 fs pulses from a fiber laser system using nonlinear compression,” Appl. Phys. B 92(1), 9–12 (2008).
[CrossRef]

Moharam, M. G.

M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, “Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach,” J. Opt. Soc. Am. A 12(5), 1077–1086 (1995).
[CrossRef]

M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12(5), 1068–1076 (1995).
[CrossRef]

M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of metallic surface-relief gratings,” J. Opt. Soc. Am. A 3(11), 1780–1787 (1986).
[CrossRef]

Moll, K. D.

K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14(18), 8189–8197 (2006).
[CrossRef] [PubMed]

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94(19), 193201 (2005).
[CrossRef] [PubMed]

Ozawa, A.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

Pervak, V.

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

Pommet, D. A.

M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, “Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach,” J. Opt. Soc. Am. A 12(5), 1077–1086 (1995).
[CrossRef]

M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12(5), 1068–1076 (1995).
[CrossRef]

Pupeza, I.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010).
[CrossRef] [PubMed]

Rauschenberger, J.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005).
[CrossRef] [PubMed]

Röser, F.

T. Eidam, F. Röser, O. Schmidt, J. Limpert, and A. Tünnermann, “57 W, 27 fs pulses from a fiber laser system using nonlinear compression,” Appl. Phys. B 92(1), 9–12 (2008).
[CrossRef]

Sartania, S.

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

Schibli, T. R.

D. C. Yost, T. R. Schibli, and J. Ye, “Efficient output coupling of intracavity high-harmonic generation,” Opt. Lett. 33(10), 1099–1101 (2008).
[CrossRef] [PubMed]

Schmidt, O.

T. Eidam, F. Röser, O. Schmidt, J. Limpert, and A. Tünnermann, “57 W, 27 fs pulses from a fiber laser system using nonlinear compression,” Appl. Phys. B 92(1), 9–12 (2008).
[CrossRef]

Schnürer, M.

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

Schuessler, H. A.

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005).
[CrossRef] [PubMed]

Schultze, M.

M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007).
[CrossRef]

Spielmann, C.

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

Stockman, M. I.

M. I. Stockman, M. F. Kling, U. Kleineberg, and F. Krausz, “Attosecond nanoplasmonic-field microscope,” Nat. Photonics 1(9), 539–544 (2007).
[CrossRef]

Thorpe, M. J.

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94(19), 193201 (2005).
[CrossRef] [PubMed]

Träutlein, D.

T. Hanke, G. Krauss, D. Träutlein, B. Wild, R. Bratschitsch, and A. Leitenstorfer, “Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses,” Phys. Rev. Lett. 103(25), 257404 (2009).
[CrossRef] [PubMed]

Tünnermann, A.

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010).
[CrossRef] [PubMed]

T. Eidam, F. Röser, O. Schmidt, J. Limpert, and A. Tünnermann, “57 W, 27 fs pulses from a fiber laser system using nonlinear compression,” Appl. Phys. B 92(1), 9–12 (2008).
[CrossRef]

Udem, T.

I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010).
[CrossRef] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005).
[CrossRef] [PubMed]

Uiberacker, M.

M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007).
[CrossRef]

Walker, D. R.

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

Wild, B.

T. Hanke, G. Krauss, D. Träutlein, B. Wild, R. Bratschitsch, and A. Leitenstorfer, “Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses,” Phys. Rev. Lett. 103(25), 257404 (2009).
[CrossRef] [PubMed]

Wobrauschek, P.

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

Wu, J.

J. Wu and H. Zeng, “Cavity-enhanced noncollinear high-harmonic generation for extreme ultraviolet frequency combs,” Opt. Lett. 32(22), 3315–3317 (2007).
[CrossRef] [PubMed]

Ye, J.

D. C. Yost, T. R. Schibli, and J. Ye, “Efficient output coupling of intracavity high-harmonic generation,” Opt. Lett. 33(10), 1099–1101 (2008).
[CrossRef] [PubMed]

K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14(18), 8189–8197 (2006).
[CrossRef] [PubMed]

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94(19), 193201 (2005).
[CrossRef] [PubMed]

Yost, D. C.

D. C. Yost, T. R. Schibli, and J. Ye, “Efficient output coupling of intracavity high-harmonic generation,” Opt. Lett. 33(10), 1099–1101 (2008).
[CrossRef] [PubMed]

Zeng, H.

J. Wu and H. Zeng, “Cavity-enhanced noncollinear high-harmonic generation for extreme ultraviolet frequency combs,” Opt. Lett. 32(22), 3315–3317 (2007).
[CrossRef] [PubMed]

Appl. Phys. B (1)

T. Eidam, F. Röser, O. Schmidt, J. Limpert, and A. Tünnermann, “57 W, 27 fs pulses from a fiber laser system using nonlinear compression,” Appl. Phys. B 92(1), 9–12 (2008).
[CrossRef]

J. Opt. Soc. Am. A (3)

M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of metallic surface-relief gratings,” J. Opt. Soc. Am. A 3(11), 1780–1787 (1986).
[CrossRef]

M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, “Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings,” J. Opt. Soc. Am. A 12(5), 1068–1076 (1995).
[CrossRef]

M. G. Moharam, D. A. Pommet, E. B. Grann, and T. K. Gaylord, “Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach,” J. Opt. Soc. Am. A 12(5), 1077–1086 (1995).
[CrossRef]

N. J. Phys. (1)

M. Schultze, E. Goulielmakis, M. Uiberacker, M. Hofstetter, J. Kim, D. Kim, F. Krausz, and U. Kleineberg, “Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics,” N. J. Phys. 9(7), 243 (2007).
[CrossRef]

Nat. Photonics (1)

M. I. Stockman, M. F. Kling, U. Kleineberg, and F. Krausz, “Attosecond nanoplasmonic-field microscope,” Nat. Photonics 1(9), 539–544 (2007).
[CrossRef]

Nature (1)

C. Gohle, T. Udem, M. Herrmann, J. Rauschenberger, R. Holzwarth, H. A. Schuessler, F. Krausz, and T. W. Hänsch, “A frequency comb in the extreme ultraviolet,” Nature 436(7048), 234–237 (2005).
[CrossRef] [PubMed]

Opt. Express (2)

K. D. Moll, R. J. Jones, and J. Ye, “Output coupling methods for cavity-based high-harmonic generation,” Opt. Express 14(18), 8189–8197 (2006).
[CrossRef] [PubMed]

I. Pupeza, X. Gu, E. Fill, T. Eidam, J. Limpert, A. Tünnermann, F. Krausz, and T. Udem, “Highly sensitive dispersion measurement of a high-power passive optical resonator using spatial-spectral interferometry,” Opt. Express 18(25), 26184–26195 (2010).
[CrossRef] [PubMed]

Opt. Lett. (3)

J. Wu and H. Zeng, “Cavity-enhanced noncollinear high-harmonic generation for extreme ultraviolet frequency combs,” Opt. Lett. 32(22), 3315–3317 (2007).
[CrossRef] [PubMed]

D. C. Yost, T. R. Schibli, and J. Ye, “Efficient output coupling of intracavity high-harmonic generation,” Opt. Lett. 33(10), 1099–1101 (2008).
[CrossRef] [PubMed]

I. Pupeza, T. Eidam, J. Rauschenberger, B. Bernhardt, A. Ozawa, E. Fill, A. Apolonski, T. Udem, J. Limpert, Z. A. Alahmed, A. M. Azzeer, A. Tünnermann, T. W. Hänsch, and F. Krausz, “Power scaling of a high-repetition-rate enhancement cavity,” Opt. Lett. 35(12), 2052–2054 (2010).
[CrossRef] [PubMed]

Phys. Rev. Lett. (4)

P. B. Corkum, “Plasma perspective on strong field multiphoton ionization,” Phys. Rev. Lett. 71(13), 1994–1997 (1993).
[CrossRef] [PubMed]

R. J. Jones, K. D. Moll, M. J. Thorpe, and J. Ye, “Phase-coherent frequency combs in the vacuum ultraviolet via high-harmonic generation inside a femtosecond enhancement cavity,” Phys. Rev. Lett. 94(19), 193201 (2005).
[CrossRef] [PubMed]

A. Ozawa, J. Rauschenberger, Ch. Gohle, M. Herrmann, D. R. Walker, V. Pervak, A. Fernandez, R. Graf, A. Apolonski, R. Holzwarth, F. Krausz, T. W. Hänsch, and T. Udem, “High harmonic frequency combs for high resolution spectroscopy,” Phys. Rev. Lett. 100(25), 253901 (2008).
[CrossRef] [PubMed]

T. Hanke, G. Krauss, D. Träutlein, B. Wild, R. Bratschitsch, and A. Leitenstorfer, “Efficient nonlinear light emission of single gold optical antennas driven by few-cycle near-infrared pulses,” Phys. Rev. Lett. 103(25), 257404 (2009).
[CrossRef] [PubMed]

Science (1)

C. Spielmann, N. H. Burnett, S. Sartania, R. Koppitsch, M. Schnürer, C. Kan, M. Lenzner, P. Wobrauschek, and F. Krausz, “Generation of Coherent X-rays in the Water Window Using 5-Femtosecond Laser Pulses,” Science 278(5338), 661–664 (1997).
[CrossRef]

Other (3)

A. Cingöz, D. Yost, J. Ye, A. Ruehl, M. Fermann, and I. Hartl, “Power Scaling of High-Repetition-Rate HHG,” International Conference on Ultrafast Phenomena (2010).

E. D. Palik, G. Ghosh, and E. J. Prucha, eds., Handbook of Optical Constants of Solids, (Academic Press New York, 1985).

J. Kaster, I. Pupeza, T. Eidam, C. Jocher, E. Fill, J. Limpert, R. Holzwarth, B. Bernhardt, T. Udem, T. W. Hänsch, A. Tünnermann, and F. Krausz, “Towards MW Average Powers in Ultrafast High-Repetition-Rate Enhancement Cavities,” HILAS 2011, Istanbul.

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